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Electrostatic drive type parameter excited micromechanic solid fluctuation disc gyroscope

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CN103822620A
CN103822620A CN 201410058548 CN201410058548A CN103822620A CN 103822620 A CN103822620 A CN 103822620A CN 201410058548 CN201410058548 CN 201410058548 CN 201410058548 A CN201410058548 A CN 201410058548A CN 103822620 A CN103822620 A CN 103822620A
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drive
detection
disc
shaped
electrodes
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CN 201410058548
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Chinese (zh)
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张卫平
刘亚东
唐健
汪濙海
成宇翔
孙殿竣
陈文元
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上海交通大学
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/567Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
    • G01C19/5677Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional vibrators, e.g. ring-shaped vibrators

Abstract

The invention provides an electrostatic drive type parameter excited micromechanic solid fluctuation disc gyroscope, comprising a disc-shaped substrate, four non-cross comb electrostatic drive electrodes, four cross comb parallel plate detection electrodes and eight U-shaped beams, wherein four drive electrodes and four detection electrodes are uniformly and alternatively arranged along an outer edge of the disc-shaped substrate; and the tail end of each drive electrode and each detection electrode is provided with a U-shaped beam playing the fixing and supporting roles. The disc-shaped substrate is driven to work in a manner of parameter excitation; the drive modality and the detection modality are matched with each other. The gyroscope is manufactured by an MEMS bulk silicon processing technology. A drive frequency is twice that of an inherent frequency of the gyroscope; generated spurious signals have no interference to detection signals; and at the same time, the parameter excitation has the characteristics of large gain, strong stability and small damping influence.

Description

一种静电驱动式参数激励的微机械固体波动盘形陀螺仪 An electrostatic drive type parametric excitation micromechanical gyroscope solid disc-shaped fluctuation

技术领域 FIELD

[0001] 本发明涉及微机电技术领域的固体波动模态匹配陀螺,具体地,涉及一种静电驱动式参数激励的微机械固体波动盘形陀螺仪。 [0001] The present invention relates to a solid art microelectromechanical match fluctuations in gyro mode, in particular, it relates to an electrostatic drive type parametric excitation micromechanical gyroscope solid disc-shaped fluctuation.

背景技术 Background technique

[0002] 陀螺仪是一种能够检测载体角度或角速度的惯性器件,在姿态控制和导航定位等领域有着非常重要的作用。 [0002] The gyroscope is capable of detecting the angle or the angular velocity vector of inertial devices, has a very important role in the attitude control and navigation fields. 随着国防科技和航空、航天工业的发展,惯性导航系统对于陀螺仪的要求也向低成本、小体积、高精度、多轴检测、高可靠性、能适应各种恶劣环境的方向发展。 With the development of defense technology and aerospace industry, inertial navigation system requirements for gyro also to low-cost, small size, high precision, multi-axis detection, high reliability and can adapt to the development direction of a variety of harsh environments. 因此,MEMS微陀螺的重要性不言而喻。 Therefore, the importance of MEMS gyroscope is self-evident. 特别地,静电驱动陀螺仪作为MEMS微陀螺的一个重要研究方向,已经成为该领域的一个研究热点。 In particular, the gyro electrostatic drive as an important research MEMS micro gyroscope has become a hot topic in the field.

[0003] 然而,在静电驱动MEMS陀螺仪中,由于寄生电容的存在,输出信号会受到驱动信号的干扰,使得无法直接从输出信号中获得准确的信息,甚至连谐振频率都会有比较大的差距。 [0003] However, in the electrostatically driven MEMS gyroscope, since the parasitic capacitance of the output signal subject to interference of the driving signal, making it impossible to obtain accurate information from the output signal, even the resonance frequency will have a relatively large gap .

[0004] 基于此,迫切需要提出一种新的陀螺结构或新的工作原理,使其产生的寄生信号不会对检测信号产生干扰,从而保证能够得到准确的信号输出。 [0004] Based on this, an urgent need to propose a new structure or a new gyro operating principle, it does not produce spurious signals generated interference detection signal, to ensure accurate signal output can be obtained.

发明内容 SUMMARY

[0005] 针对现有技术中的缺陷,本发明的目的是提供一种静电驱动式参数激励的微机械固体波动盘形陀螺仪,该陀螺利用新的驱动原理,其驱动频率是陀螺仪固有频率的两倍,所以产生的寄生信号不会对检测信号产生干扰。 [0005] For the prior art drawbacks, an object of the present invention is to provide an electrostatic drive type parametric excitation micromechanical gyroscope disc-shaped solid fluctuation, the use of new drive principles gyroscope which the driving frequency is the natural frequency of the gyroscope twice, the spurious signal does not generate an interference detection signal. 同时,参数激励本身也具有增益大,稳定性强,受阻尼影响小的特点。 Meanwhile, parametric excitation itself has a large gain, stability, blocked a small Nepalese impact characteristics.

[0006] 为实现以上目的,本发明提供一种静电驱动式参数激励的微机械固体波动盘形陀螺仪,包括: [0006] To achieve the above object, the present invention provides an electrostatic drive type parametric excitation micromechanical gyroscope solid disc-shaped fluctuations, comprising:

[0007] 一个圆盘形基体; [0007] A disc-shaped substrate;

[0008] 四个非交叉梳齿静电驱动电极; [0008] The four non-intersecting electrostatic comb-drive electrodes;

[0009] 四个交叉梳齿平行板检测电极; [0009] The four comb-crossing detection parallel-plate electrodes;

[0010] 八个U型梁; [0010] eight U-beam;

[0011] 其中,四个驱动电极和四个检测电极分别沿圆盘形基体外环边缘均匀交替配置,四个驱动电极和四个检测电极的末端均设有一个起固定支撑作用的U型梁; [0011] wherein four driving electrodes and detecting electrodes along the four disc-shaped substrate body are alternately arranged uniformly ring edge, the end of four driving electrode and the detection electrode are provided with four U-beams from the fixed support a role ;

[0012] 所述微陀螺利用参数激励的方式驱动圆盘形基体振动,其驱动模态和检测模态互相匹配,通过在一对非交叉梳齿静电驱动电极上施加正弦交流电压,由边缘场效应产生圆盘形基体在驱动模态的振动;当有垂直于圆盘形基体底部的角速度输入时,在科氏力作用下,圆盘形基体的谐振方式会从驱动模态向检测模态变化;通过检测圆盘形基体交叉梳齿平行板检测电极间的感应电容的变化,就可检测垂直于圆盘形基体底部平面的角速度大小。 The [0012] Microgyroscope driven using parametric excitation vibration disc-shaped base body, which drive mode and a detection mode match each other, by applying a sinusoidal alternating voltage to a pair of non-intersecting electrostatic comb-drive electrodes by a fringe field effect of vibration disc-shaped base body driving modes; when vertical input angular velocity base shaped base discs, the Coriolis force, the resonance mode disc-shaped base body can from the driving mode detecting modal state to change; by sensing changes in capacitance between the comb-shaped detection electrode parallel plate disk-shaped substrate crossing, the size of the angular velocity can be detected is perpendicular to the plane of the bottom of disc-shaped base body.

[0013] 优选地,所述圆盘形基体材料为单晶硅,其上均匀配置驱动电极和检测电极的一个梳齿,其中:在驱动电极结构中,盘形基体上对应的梳齿电极与另外两侧的电极构成非交叉梳齿结构;在检测电极结构中,盘形基体上对应的梳齿电极与另外两侧的电极构成交叉梳齿平行板结构。 [0013] Preferably, the disc-shaped single crystal silicon base material, a uniform configuration comb driving electrode and the detection electrode thereon, wherein: the driving electrode structure, comb electrodes corresponding to the disc-shaped base body Further both electrodes constituting the non-interleaved comb-structure; detecting electrode structure, the disc-shaped substrate corresponding to the comb-shaped electrodes on both sides of the electrode constituting the additional cross-comb-parallel plate structure.

[0014] 优选地,所述驱动电极材料为单晶硅,其上沉积有一层金属或者采用离子掺杂方式形成所需电极;所述驱动电极采用静电驱动方式,具体来说,是利用边缘场效应产生圆盘形基体在驱动模态的振动,其结构为非交叉梳齿结构。 [0014] Preferably, the drive electrode material is a single crystal silicon, on which is deposited a layer of metal or formed to a desired doping ion electrode; said electrostatic driving electrodes driving method, specifically, a fringe field is the use of effect produced disc-shaped base body of the drive mode vibration, which comb-structure is non-cross structure.

[0015] 优选地,所述检测电极材料为单晶硅,其上沉积有一层金属或者采用离子掺杂方式形成所需电极;所述检测电极利用电容感应效应进行检测,其结构为交叉梳齿平行板结构。 [0015] Preferably, the detection electrode material is a single crystal silicon, on which is deposited a layer of metal or formed to a desired doping ion electrode; electrode by the effect of capacitive sensing to detect the detection, comb-shaped structure as a cross the parallel plate structure.

[0016] 优选地,所述U型梁结构位于驱动电极和检测电极的末端,其材料为单晶硅,起固定、支撑圆盘形基体的作用。 [0016] Preferably, the U-shaped beam structure located at the ends of the driving electrode and the detection electrode, the material is single crystal silicon, from the fixed, the role of supporting the disc-shaped base.

[0017] 优选地,四个所述驱动电极中的两个相对的驱动电极被施加交流电压时,由边缘场效应产生圆盘形基体在驱动模态的振动;当存在输入角速度时,圆盘形基体的振型向检测模态转变,利用检测电极处电容感应效应产生的敏感电信号进行信号检测;上述驱动模态和检测模态互相匹配。 When [0017] Preferably, two of the four drive electrodes opposing electrode driving AC voltage is applied, vibration is generated in the disc-shaped base body by the edge drive mode FET; when there is an input angular velocity, the disc shaped base modal mode transition to the detection by sensitive electrical capacitance detecting electrodes induction effect generated by the detection signal; the drive mode and the detection mode match each other.

[0018] 与现有技术相比,本发明具有如下的有益效果: [0018] Compared with the prior art, the present invention has the following advantages:

[0019] 1、受阻尼因素影响小,根据非线性振动理论,陀螺仪振动时,如果外界条件(温度等)发生变化,材料阻尼系数会随之发生变化,但是该微陀螺在主振型上的振动幅值与阻尼系数的大小无关,阻尼的大小只是与输入电压的阈值有关,阻尼越大,输入电压的最小值也越大; [0019] 1, damped factor is small, according to the theory of nonlinear oscillation, when the vibrating gyroscope, if the external conditions (temperature, etc.) changes, consequent changes will damping material, but in the main the microgyroscope modes regardless of the magnitude of the vibration amplitude damping, the damping is only the size of the input voltage with a threshold value related to the greater damping, the greater the minimum value of the input voltage;

[0020] 2、陀螺仪带宽增大,使陀螺仪的稳定性大大增强; [0020] 2, the bandwidth of the gyroscope is increased, so that greatly enhanced the stability of the gyroscope;

[0021] 3、陀螺仪的灵敏度大大提高,利用非线性振动获得的振动幅值比直接简谐振动的振幅要大得多; [0021] 3, greatly improved the sensitivity of the gyro, vibration amplitude is obtained using the nonlinear vibration amplitude than the direct harmonic vibration is much greater;

[0022] 4、陀螺仪的驱动信号的频率是其振动的固有频率的两倍左右,可以减小寄生电容对于检测信号的影响,从而能够减小陀螺仪的噪声,增大陀螺仪的分辨率。 [0022] 4, the frequency of the drive signal of the gyro is about twice the natural frequency of vibration, influence of parasitic capacitance can be reduced to the detection signal, thereby reducing the noise in a gyroscope, increase the resolution of the gyroscope .

附图说明 BRIEF DESCRIPTION

[0023] 通过阅读参照以下附图对非限制性实施例所作的详细描述,本发明的其它特征、目的和优点将会变得更明显: [0023] By reading the following detailed description of non-limiting embodiments given with reference to the following figures, other features of the present invention, objects and advantages will become more apparent:

[0024] 图1为本实施例立体结构示意图; [0024] FIG. 1 is a perspective schematic view of the structure of the present embodiment;

[0025] 图2为本实施例平面结构示意图; [0025] Fig 2 a schematic diagram of a planar structure of the present embodiment;

[0026] 图3为本实施例非交叉梳齿静电驱动电极的结构示意图; [0026] FIG. 3 is a schematic structural diagram of drive electrodes non-interleaved comb-shaped electrostatic embodiments of the present embodiment;

[0027] 图4为本实施例交叉梳齿平行板检测电极的结构剖面图; [0027] FIG. 4 the cross sectional view of the structure of the comb-shaped electrodes parallel plate detector embodiment of the present embodiment;

[0028] 图中:1为圆盘形基体,2为驱动电极,3为检测电极,4为U型梁。 [0028] FIG: 1 is a disc-shaped base body, 2 a driving electrode, the detection electrode 3, 4 is a U-beam.

具体实施方式 detailed description

[0029] 下面结合具体实施例对本发明进行详细说明。 Specific embodiments of the present invention will be described in detail [0029] below in conjunction. 以下实施例将有助于本领域的技术人员进一步理解本发明,但不以任何形式限制本发明。 The following examples will assist those skilled in the art a further understanding of the invention, but do not limit the present invention in any way. 应当指出的是,对本领域的普通技术人员来说,在不脱离本发明构思的前提下,还可以做出若干变形和改进。 It should be noted that one of ordinary skill in the art, without departing from the spirit of the present invention, further modifications and changes may be made. 这些都属于本发明的保护范围。 All these fall within the scope of the present invention.

[0030] 如图1所示,本实施例提供一种静电驱动式参数激励的微机械固体波动盘形陀螺仪,包括: [0030] As shown in FIG 1, the present embodiment provides a parametric excitation electrostatic drive type micromechanical gyroscope solid disc-shaped fluctuations, comprising:

[0031] 一个圆盘形基体I; [0031] A disc-shaped base I;

[0032] 四个非交叉梳齿静电驱动电极2 ; [0032] The electrostatic comb-drive four non-intersecting electrode 2;

[0033] 四个交叉梳齿平行板检测电极3 ; [0033] The four comb-crossing detection parallel-plate electrode 3;

[0034] 八个U型梁4 ; [0034] eight U-beam 4;

[0035] 其中,四个驱动电极2和四个检测电极3分别沿圆盘形基体I外环边缘均匀交替配置,四个驱动电极2和四个检测电极3的末端均设有一个起固定支撑作用的U型梁4。 [0035] wherein four drive electrodes 2 and 3 are four detection electrodes along the outer edge of the disc-shaped substrate I uniformly alternately arranged, four driving electrode tip 2 and the four detection electrodes 3 are provided from a fixed support the role of U-beam 4.

[0036] 本实施例中,所述圆盘形基体I的材料为单晶硅,其上均匀配置驱动电极2和检测电极3的一个梳齿,其中:在驱动电极2结构中,圆盘形基体I上对应的梳齿电极与另外两侧的电极构成非交叉梳齿结构;在检测电极3结构中,圆盘形基体I上对应的梳齿电极与另外两侧的电极构成交叉梳齿平行板结构(如图1所示)。 [0036] In this embodiment, the disc-shaped base material I is a silicon single crystal, a uniform configuration comb driving electrode 2 and the detection electrode 3 thereon, wherein: the structure of the driving electrodes 2, a disc-shaped I corresponding comb electrodes on both sides of the base and the electrode constituting the additional non-cross-comb-structure; in the third configuration detection electrodes, comb electrodes corresponding to the I and the additional disc-shaped base body on both sides of comb-shaped electrodes intersecting parallel plate structure (Figure 1).

[0037] 本实施例中,所述驱动电极2材料为单晶硅,其上沉积有一层金属或者采用离子掺杂方式形成所需电极。 [0037] In this embodiment, the driving electrodes 2 single crystal silicon material, a layer of metal deposited thereon to form the desired electrode or ion doping method. 驱动电极2采用静电驱动方式,具体来说,是利用边缘场效应产生圆盘形基体I在驱动模态的振动,其结构为非交叉梳齿结构(如图2所示)。 2 uses electrostatic drive electrode driving mode, in particular, the use of disc-shaped fringe field effect generating matrix I in the drive mode of vibration, which comb-structure is non-cross structure (Figure 2).

[0038] 本实施例中,所述检测电极3材料为单晶硅,其上沉积有一层金属或者采用离子掺杂方式形成所需电极。 [0038] In this embodiment, the detection electrode 3 single crystal silicon material, on which is deposited a layer of metal or ion doping a desired electrode is formed. 检测电极3利用电容感应效应进行检测,其结构为交叉梳齿平行板结构(如图3所示)。 3 using the capacitance detection electrode detecting induction effect, having the structure cross-comb-parallel plate structures (Figure 3).

[0039] 本实施例中,所述U型梁4结构位于驱动电极2和检测电极3的末端,其材料为单晶硅,起固定、支撑圆盘形基体I的作用。 [0039] In this embodiment, the U-shaped beam structure 4 at the end of the driving electrodes 2 and the detection electrode 3, single crystal silicon material, from the fixed, disc-shaped base supporting the role of I.

[0040] 本实施例中,四个所述驱动电极2中的两个相对的驱动电极被施加交流电压时,由边缘场效应产生圆盘形基体I在驱动模态的振动;当存在输入角速度时,圆盘形基体I的振型向检测模态转变,利用检测电极3处电容感应效应产生的敏感电信号进行信号检测;上述驱动模态和检测模态互相匹配。 [0040] In the present embodiment, two of the four drive electrodes 2 when the opposing electrode driving AC voltage is applied, by the edge of a disc-shaped base body vibration I mode field effect driving; and when there is an input angular velocity , the disc-shaped base body to the I-type vibration mode transition detection, detection using capacitive sensing electrode sensitive electrical effect produced at the signal detector 3; the driving mode and the detection mode match each other.

[0041] 本发明利用参数激励的方式驱动圆盘形基体I振动,其驱动模态和检测模态互相匹配。 Invention utilizes parametric excitation mode [0041] This disc-shaped base body I drive vibration mode and the driving mode detected match. 当四个所述驱动电极2中的两个相对的驱动电极2被施加交流电压时,由边缘场效应产生圆盘形基体I在驱动模态的振动;当有垂直于圆盘形基体I底部的角速度输入时,在科氏力作用下,圆盘形基体I的谐振方式会从驱动模态向检测模态变化;通过检测圆盘形基体I交叉梳齿平行板电极间的感应电容的变化,就可检测垂直于圆盘形基体I底部平面的角速度大小。 When two of the four drive electrodes 2 opposite to the driving AC voltage is applied to electrode 2, the disc-shaped edges of the base body vibration I mode field effect driving; and when there is a bottom perpendicular to the disc-shaped base body I when the input angular velocity, the Coriolis force, the disc-shaped base body I will resonantly driving mode is changed from the detection mode; disc-shaped base body by detecting a change in cross-I induced capacitance between comb-shaped electrodes parallel plate , the size of the angular velocity can be detected bottom plane perpendicular to the disk-shaped substrate I.

[0042] 本实施例所述的一种静电驱动式参数激励的微机械固体波动盘形陀螺仪,使用单晶硅基体,采用硅体加工工艺,通过在对应的单晶硅梳齿上沉积一层金属或者采用离子掺杂方式形成所需要的驱动电极和检测电极;最后,为盘形谐振子焊接外围电路以及进行最终的封装得到陀螺芯片成品。 [0042] The present micromechanical gyroscope disc-shaped solid fluctuation, using a single crystal silicon substrate of an electrostatic drive type excitation parameters according to the embodiment, the body silicon process, by depositing a corresponding comb teeth on Si forming a metal layer or the drive electrode and the detection electrode by ion doping required manner; Finally, disk-shaped resonator circuit and the peripheral welding of the final finished package obtained gyro chip.

[0043] 以上对本发明的具体实施例进行了描述。 [0043] The foregoing specific embodiments of the invention have been described. 需要理解的是,本发明并不局限于上述特定实施方式,本领域技术人员可以在权利要求的范围内做出各种变形或修改,这并不影响本发明的实质内容。 Is to be understood that the present invention is not limited to the particular embodiments, those skilled in the art can make various changes and modifications within the scope of the appended claims, this does not affect the substance of the present invention.

Claims (6)

1.一种静电驱动式参数激励的微机械固体波动盘形陀螺仪,其特征在于,包括: 一个圆盘形基体; 四个非交叉梳齿静电驱动电极; 四个交叉梳齿平行板检测电极; 八个U型梁; 其中,四个驱动电极和四个检测电极分别沿圆盘形基体外环边缘均匀交替配置,四个驱动电极和四个检测电极的末端均设有一个起固定支撑作用的U型梁; 所述微陀螺利用参数激励的方式驱动圆盘形基体振动,其驱动模态和检测模态互相匹配,通过在一对非交叉梳齿静电驱动电极上施加正弦交流电压,由边缘场效应产生圆盘形基体在驱动模态的振动;当有垂直于圆盘形基体底部的角速度输入时,在科氏力作用下,圆盘形基体的谐振方式会从驱动模态向检测模态变化;通过检测圆盘形基体交叉梳齿平行板检测电极间的感应电容的变化,检测垂直于圆盘形基体底部平面的角速度大 1. An electrostatic drive type parametric excitation micromechanical gyroscope disc-shaped solid fluctuation, characterized by comprising: a disc-shaped substrate; four non-intersecting electrostatic comb-drive electrodes; four comb-crossing detection electrodes parallel plate ; eight U-beam; wherein four driving electrodes and detecting electrodes along the four disc-shaped ring edge yl vitro uniformly arranged alternately, and the four-terminal four drive electrodes are provided with a detection electrode from the fixed supporting role the U-beam; micro gyroscope using the parametric excitation mode driving vibration disc-shaped base body, which drive mode and a detection mode match each other, by applying a sinusoidal alternating voltage to a pair of non-intersecting electrostatic comb-drive electrodes by fringe field effects vibration disc-shaped base body of the drive mode; when the angular velocity input perpendicular to the bottom disk-shaped base, in the Coriolis force, the resonant mode of disc-shaped base body to be detected from the driving mode modal variation; sensing changes in capacitance between the cross comb electrodes by detecting a detection parallel-plate disc-shaped base body, the detection plane perpendicular to the bottom of the large angular velocity a disk-shaped substrate .
2.根据权利要求1所述的一种静电驱动式参数激励的微机械固体波动盘形陀螺仪,其特征在于,所述圆盘形基体材料为单晶硅,其上均匀配置驱动电极和检测电极的一个梳齿,其中:在驱动电极结构中,盘形基体上对应的梳齿电极与另外两侧的电极构成非交叉梳齿结构;在检测电极结构中,盘形基体上对应的梳齿电极与另外两侧的电极构成交叉梳齿平行板结构。 2. An electrostatic drive type according to a parametric excitation micromechanical gyroscope solid disc-shaped fluctuation claim, wherein said disc-shaped single crystal silicon base material, uniformly arranged on the drive electrode and the detection a comb-shaped electrodes, wherein: the driving electrode structure, the disc-shaped substrate corresponding to the comb-shaped electrodes on both sides of the electrode constituting the additional non-interleaved comb-shaped structure; detecting electrode structure, the corresponding comb-shaped disc-shaped base body electrode and the electrode constituting the other two sides of the cross comb-parallel plate structure.
3.根据权利要求2所述的一种静电驱动式参数激励的微机械固体波动盘形陀螺仪,其特征在于,所述驱动电极材料为单晶硅,其上沉积有一层金属或者采用离子掺杂方式形成所需电极;所述驱动电极采用静电驱动方式,即是利用边缘场效应产生圆盘形基体在驱动模态的振动,其结构为非交叉梳齿结构。 3. An electrostatic driving said parametric excitation type micromechanical gyroscope solid disc-shaped fluctuation claim, wherein said driving electrode material is silicon, which is deposited on a metal ion-doped or heteroaryl desired electrode is formed; electrostatic driving electrodes of the driving mode, i.e., fringe field effects produced using a disc-shaped substrate in the drive mode of vibration, the structure of a non-cross-comb teeth structure.
4.根据权利要求2所述的一种静电驱动式参数激励的微机械固体波动盘形陀螺仪,其特征在于,所述检测电极材料为单晶硅,其上沉积有一层金属或者采用离子掺杂方式形成所需电极;所述检测电极利用电容感应效应进行检测,其结构为交叉梳齿平行板结构。 4. An electrostatic driving said parametric excitation type micromechanical gyroscope solid disc-shaped fluctuation claim, wherein said detection electrode material is silicon, which is deposited on a metal ion-doped or heteroaryl manner to form the desired electrode; electrode by capacitive detection to detect the induction effect, having the structure cross-comb-parallel plate structure.
5.根据权利要求1-4任一项所述的一种静电驱动式参数激励的微机械固体波动盘形陀螺仪,其特征在于,所述U型梁结构位于驱动电极和检测电极的末端,其材料为单晶硅,起固定、支撑圆盘形基体的作用。 5. An electrostatic drive type according to a parametric excitation micromechanical gyroscope solid disc-shaped fluctuation claims 1-4, characterized in that the U-beam structure located at the end of the driving electrode and the detection electrode, the material is single crystal silicon, from the fixed, the role of supporting the disc-shaped base.
6.根据权利要求1-4任一项所述的一种静电驱动式参数激励的微机械固体波动盘形陀螺仪,其特征在于,四个所述驱动电极中的两个相对的驱动电极被施加交流电压时,由边缘场效应产生圆盘形基体在驱动模态的振动;当存在输入角速度时,圆盘形基体的振型向检测模态转变,利用检测电极处电容感应效应产生的敏感电信号进行信号检测;上述驱动模态和检测模态互相匹配。 6. An electrostatic drive type according to a parametric excitation micromechanical gyroscope solid disc-shaped fluctuation claims 1 to 4, wherein two of said four driving electrodes opposing driving electrodes when AC voltage is applied, vibration is generated in the disc-shaped base body by the edge drive mode FET; when there is an input angular velocity, vibration type disc-shaped base body to the mode transition is detected using sensitive detection capacitance electrodes induction effect produced electrical signal detection; the driving mode and the detection mode match each other.
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