CN106597839A - MEMS gyro automatic modal matching control device and method based on negative stiffness effect - Google Patents
MEMS gyro automatic modal matching control device and method based on negative stiffness effect Download PDFInfo
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Abstract
The invention provides an MEMS gyro automatic modal matching control device based on a negative stiffness effect, and adopts external calibrating signal input, so as to obtain a required modal matching control quantity. The external calibration signal is formed by superposition of two groups of sinusoidal signals a and b with different frequencies, the frequency of one group is higher than the center frequency of a driving mode, the frequency of the other group is lower than the center frequency of the driving mode, frequency difference between the frequencies of the two groups and the center frequency of the driving mode is equal, thus automatic modal matching is realized, and no extra reference quantity is needed. The device suppresses signal coupling and interference in a modal matching process. Two paths of calibrating signals having the same frequency difference with a driving signal are used, a reference signal of a PI controller is set to be 0, and open-loop search for a reference point is not needed. In the device, the calibrating signals are loaded on a detection mechanism in the form of force feedback, the detection mechanism is put in a feedback loop, detection of the amplitude-frequency characteristic of a mode is brought into full play, and output amplitude of the calibrating signal passing the detection mechanism is relatively large.
Description
Technical field
The present invention relates to MEMS (MEMS) and Mierotubule-associated proteins e measurement technology, and in particular to a kind of based on negative firm
The MEMS gyro automatic modality matching control apparatus of degree effect
Background technology
MEMS gyroscope has been achieved for significant progress in the research progress of nearly more than 20 years, at present substantially can be full
The military affairs such as the Navigation, Guide and Controlling of sufficient low and middle-end, industrial and consumer application demand.With the propulsion that MEMS gyroscope is studied
With deeply, can MEMS gyroscope break through current precision becomes the focal issue of academia and industrial quarters common concern.Therefore, such as
What further improves the precision of MEMS gyroscope, excavates the potential ability of MEMS gyroscope, or even breaks through its ultimate precision, is near
The hot issue of MEMS gyroscope research over year.Mode matching technique is primarily referred to as by certain control technology or technique handss
The driven-mode of Duan Shixian MEMS gyroscopes and sensed-mode are matched.The early stage research of correlation technique that had many documents to carry out,
Such as model frequency is changed using extra auxiliary process deposition or etches polycrystalline silicon, come using local thermal stress or electrostatic negative stiffness
Soften spring rate, or mode vectors correlation is realized using self-adaptation control method.Early stage research has many defects, if desired for people
Work is intervened, it is difficult to meet large-scale production, while also being difficult to realization stablizes complete mode vectors correlation control；Or control method is multiple
It is miscellaneous, it is difficult to using defects such as side circuit realizations.With the propulsion of research, subsequently there are various automatic molds by control technology
State matching process, achieves preferable effect.
The content of the invention
Goal of the invention：For the deficiencies in the prior art, the present invention devises a kind of MEMS gyro based on negative stiffness effects
Automatic modality matching control apparatus, by the frequency difference between driven-mode and sensed-mode zero is adjusted to.The machine of maximum can be realized
Tool sensitivity, and mechanical sensitivity is linear with quality factor, can give full play to sensed-mode quality factor to machinery
The amplification of sensitivity, can reach capacity in theory machinery under the conditions of limiting quality factor (hundreds of thousands is even millions of)
Sensitivity, with very big potentiality.Using two-way and drive signal, with the calibration signal of frequency difference, (all the way frequency is higher than driven-mode
Mid frequency, all the way frequency is less than driven-mode mid frequency), PI controller reference signals are set to 0, it is not necessary to open loop
Find reference point.Calibration signal is carried in testing agency in the form of force feedback, and testing agency is placed in feedback circuit, is filled
The amplitude-frequency characteristic of sensed-mode is waved in distribution so that the output amplitude through testing agency of calibration signal is larger, is easy to follow-up letter
Number extract.
Technical scheme：A kind of MEMS gyro automatic modality matching control apparatus based on negative stiffness effects, including testing machine
Structure, preamplifier, adder, amplifier, demodulator, torque variator, calibration signal generator, phase shifter, low-pass filtering
Device, PI controllers, stiffness tuning device；
The outfan of the testing agency connects the input of preamplifier so that the output signal of testing agency is passed through
Preamplifier conversion is extracted after amplifying；
The outfan of the preamplifier is connected respectively the input of adder with the outfan of calibration signal so that front
Signal fused is realized in the output of the output and calibration signal of putting amplifier in adder；
The outfan of the adder connects the input of amplifier so that the output of adder makees corresponding through amplifier
Processing and amplifying；
The outfan of the amplifier connects respectively the input of demodulator and the input of torque variator so that amplify
On the one hand signal afterwards as the input signal of demodulator, on the other hand realizes voltage to the conversion of power through torque variator；
The input of the outfan connecting detection mechanism of the torque variator, realization is transformed to voltage signal corresponding
Power is applied in testing agency, completes force feedback；
The outfan of the calibration signal connects the input of phase shifter, and 90 ° of phase shifts are made to input signal using the phase shifter
After export；
The outfan of the calibration signal is connected the input of demodulator with the outfan of phase shifter simultaneously, used as demodulator
Input signal, demodulator realizes demodulation to amplifier output signal；
The outfan of the demodulator connects the input of low pass filter, the outfan connection PI controls of low pass filter
The input of device, using PI controllers corresponding proportional, integral control is made to input signal；The control parameter of PI controllers needs
The frequency of reference calibrations signal makees corresponding adjusted design, to guarantee that system is operated in governing speed soon, adjusts stable state.
The input of the outfan coupling stiffness actuator of the PI controllers, the outfan connecting detection of stiffness tuning device
The input of mechanism, after stiffness tuning device is correspondingly processed the output of PI controllers, by output signal testing machine is applied to
On structure, the stiffness tuning to testing agency is completed.The resonant frequency of testing agency changes because of stiffness change, is finally completed detection
Mode vectors correlation between mode and driven-mode.
Further, the simplified model of the testing agency includes a pair of detecting electrodes S+ and S-, a pair of feedback electrode F+
And F-, a public electrode G；The detecting electrode is connected with preamplifier, completes the extraction to sensed-mode signal；It is described
Feedback electrode is connected with torque variator and stiffness tuning device simultaneously, and force feedback and the effect of stiffness tuning are realized respectively.
Further, the stiffness tuning device inside includes two multipliers, and mechanical parameter km, input signal is PI controls
Output signal Vp of device and the detection output signal of testing agency；First multiplier is used to realize believing the output of PI controllers
Number make square to process, the output of first multiplier as second multiplier input, with mechanical parameter and testing agency
Output is multiplied, and the output result of second multiplier is the output of stiffness tuning device；The output of stiffness tuning device is applied to feedback
On electrode F+ and F-, the stiffness tuning to testing agency is realized.
Further, the demodulator inside includes 8 multipliers, 4 low pass filters, 3 adders；The demodulation
The input signal of device is the output V of amplifiero1, the phase shifter output c and d and the output a and b of calibration signal；To put first
The output V of big deviceo1It is multiplied with the output c and d of phase shifter and the output a and b of calibration signal, obtains signal a1, b1, c1, d1,
Then four road signals are made square to process after low pass filter, obtain signal a2, b2, c2, d2, respectively by a2 and c2, b2 and
D2 is added, and obtains signal db, ca, finally using the difference of db and ca as demodulator output；The demodulator is realized to detection
The measurement of mechanism's output signal amplitude size, and remove the impact of phase place.
Further, in order to improve MEMS gyro mode vectors correlation during capacity of resisting disturbance, the device employs outside
Calibration signal is input into, the mode vectors correlation controlled quentity controlled variable needed for obtaining；The external calibration signal is by the different sinusoidal letter of two class frequencys
Number a and b is formed by stacking, a class frequency higher than driven-mode mid frequency, one group of mid frequency less than driven-mode, and two
Person is equal in the frequency difference of the mid frequency of driven-mode, realizes that automatic modality is matched, without extra reference quantity；The shifting
Phase device realizes phase shift accurate to two groups of 90 ° of calibration signals, two after phase shift group signal c and d and calibration signal a and b together as
Input signal required for subsequent demodulation；After the completion of mode vectors correlation, the input signal of the PI controllers fuctuation within a narrow range near 0.
Further, the input of the external calibration signal is realized by the form of force feedback, specific as follows：With
External calibration signal Vi for open cycle system input, the output Vo1 of amplifier is the outfan of open cycle system, then the open loop
System is placed in testing agency on feedback circuit；During mode vectors correlation, the first resonance peak and second are widened by parameter configuration
Frequency difference between resonance peak, makes system operating frequency in the corresponding frequency range of first resonance peak.
Further, the frequency size of the cut-off frequency reference calibrations signal of the low pass filter makees relative set, really
Guarantor can completely filter AC compounent, extract effective control signal.
Beneficial effect：
(1) mode vectors correlation is referred to and for the frequency difference between driven-mode and sensed-mode to be adjusted to zero.Mode vectors correlation is mainly excellent
Gesture can be achieved on the mechanical sensitivity of maximum, and mechanical sensitivity is linear with quality factor, can give full play to inspection
Amplification of the mode quality factor to mechanical sensitivity is surveyed, in theory can (hundreds of thousands be even hundreds of in limiting quality factor
Ten thousand) reach capacity mechanical sensitivity under the conditions of, with very big potentiality.
(2) using external calibration signal input, the signal coupling and interference in mode vectors correlation process is suppressed.
(3) using two-way and drive signal with frequency difference calibration signal (all the way frequency is higher than driven-mode mid frequency, one
Road frequency is less than driven-mode mid frequency), PI controller reference signals are set to 0, it is not necessary to which reference point is found in open loop.
(4) calibration signal is carried in testing agency in the form of force feedback, and testing agency is placed in feedback circuit, is filled
The amplitude-frequency characteristic of sensed-mode is waved in distribution so that the output amplitude through testing agency of calibration signal is larger, is easy to follow-up letter
Number extract.
(5) demodulation module eliminates the impact of phase place, during mode vectors correlation, simplifies the control difficulty of system.
Description of the drawings
Fig. 1 is the MEMS gyro automatic modality matching control apparatus structure chart based on negative stiffness effects of the present invention；
Fig. 2 is the simplified model of the testing agency of the present invention；
Fig. 3 is the composition schematic diagram of the calibration signal of the present invention；
Fig. 4 is the Bode diagram of the open cycle system of the present invention；
Fig. 5 is the stiffness tuning device structural representation of the present invention；
Fig. 6 is the demodulator structure schematic diagram of the present invention.
Specific embodiment
The present invention is done below in conjunction with the accompanying drawings further is explained.
Fig. 1 is the MEMS gyro automatic modality matching control apparatus structure chart based on negative stiffness effects of the present invention, including
It is testing agency, preamplifier, adder, amplifier, demodulator, torque variator, calibration signal generator, the phase shifter, low
Bandpass filter, PI controllers, stiffness tuning device.The output of testing agency is connected with stiffness tuning device, and stiffness tuning device is defeated
Go out and as the input of testing agency, the purpose of adjusting detection mechanism rigidity is reached with this.Meanwhile, the outfan of testing agency with
Preamplifier is connected, and with this extraction to testing agency's output signal is realized.The output of preamplifier and calibration signal one
With the input as adder, the superposition of the two is realized.The output of adder is connected with the input of amplifier, is entered by amplifier
The corresponding amplitude of row is amplified.The output of amplifier on the one hand as the input signal of demodulator, on the one hand with torque variator phase
Even, the output of torque variator is connected with testing agency, and torque variator realizes voltage to the change of power, by the output of amplifier
Signal is applied in testing agency.The input of 90 ° of phase shifters is calibration signal, realizes 90 ° of phase shifts to calibration signal.90 ° of shiftings
With the output of adder and calibration signal simultaneously as the input signal of demodulator, demodulator is by corresponding for the output of phase device
Demodulation method extracts required control signal.The output of demodulator is connected with the input of low pass filter, further filters out and is not required to
The AC signal wanted.Used as the input of PI controllers, PI controllers realize corresponding proportional, integral control for the output of low pass filter
System.The output of PI controllers changes the rigidity of testing agency, Jin Ergai as the input of stiffness tuning device by stiffness tuning device
Become its resonant frequency, realize mode vectors correlation.
Fig. 2 show the simplified model of the testing agency of the present invention.Testing agency's simplified model is mainly public including one
Electrode G, a pair of detecting electrode S+ and S-, a pair of feedback electrodes F+ and F-, detecting electrode S+ and S-, feedback electrode F+ and F- difference
Sensing capacitor and feedback condenser are constituted in public electrode (G).Detecting electrode S+ and S- are connected with preamplifier, and it is right to realize
The extraction of sensing capacitor capacitance variations.Detecting electrode S+ and S- is connected with stiffness tuning device input, stiffness tuning device it is defeated
Go out and be connected with feedback electrode F+ and F-, realize the stiffness tuning to testing agency.The output phase of feedback electrode and torque variator
Even, voltage signal is transformed into power and is applied on feedback electrode by torque variator.
Fig. 3 is the composition schematic diagram of the calibration signal in the present invention.Calibration signal is different sinusoidal signal a of two class frequencys
Constitute with b, wherein, the frequency of signal a is w1, the frequency of signal b is w2.The mid frequency for assuming driven-mode is wd, then w1-wd
=wd-w2.Signal a, b through adder mixing after as calibration signal, meanwhile, signal a, b as 90 ° of phase shifters input,
90 ° of phase shifters realize 90 ° of phase shifts to signal a, b, export corresponding signal c, d.Signal c after calibration signal a, b and phase shift,
Input signals of the d respectively as demodulator.
Fig. 4 is the open cycle system Bode diagram in the present invention.With calibration signal as input, amplifier is output as output
End, its transmission functionDue to testing agency is placed in the feedback loop, therefore occur two in its width phase curve
Individual peak value.In parameter configuration, by the selection of gain, by the position of second resonance peak to the big direction movement of frequency, keep away
In the frequency range for exempting to have signal to fall into the second resonance peak during mode vectors correlation.
Fig. 5 is the stiffness tuning device structural representation in the present invention.Inside includes two multipliers, and mechanical parameter km is defeated
Enter output signal V that signal is PI controllerspAnd the detection output signal of testing agency.First multiplier is right for realizing
PI controller output signals make a square process, and the output of first multiplier is joined as the input of second multiplier with machinery
The output of number and testing agency is multiplied, and the output result of second multiplier is the output of stiffness tuning device.Stiffness tuning device
Output is applied on feedback electrode F+ and F-, realizes the stiffness tuning to testing agency.
Fig. 6 is the demodulator structure schematic diagram in the present invention.Demodulator inside includes 8 multipliers, 4 low-pass filtering
Device, 3 adders.The input signal of demodulator is the output V of amplifiero1, the phase shifter output c and d and calibration signal
Output a and b.First by the output V of amplifiero1It is multiplied with the output c and d of phase shifter and the output a and b of calibration signal, obtains
To signal a1, b1, c1, d1, then four road signals are made square to process after low pass filter, obtain signal a2, b2, c2, d2,
A2 is added with c2, b2 with d2 respectively, obtains signal db, ca, finally using the difference of db and ca as demodulator output.The solution
Adjust device to realize the measurement to testing agency's output signal amplitude size, and remove the impact of phase place.
The above is only the preferred embodiment of the present invention, it is noted that for the ordinary skill people of the art
For member, under the premise without departing from the principles of the invention, some improvements and modifications can also be made, these improvements and modifications also should
It is considered as protection scope of the present invention.
Claims (7)
1. a kind of MEMS gyro automatic modality matching control apparatus based on negative stiffness effects, it is characterised in that：Including testing machine
Structure, preamplifier, adder, amplifier, demodulator, torque variator, calibration signal generator, phase shifter, low-pass filtering
Device, PI controllers, stiffness tuning device；
The outfan of the testing agency connects the input of preamplifier so that the output signal of testing agency is through preposition
Amplifier conversion is extracted after amplifying；
The outfan of the preamplifier is connected respectively the input of adder with the outfan of calibration signal so that front storing
The big output of device realizes signal fused with the output of calibration signal in adder；
The outfan of the adder connects the input of amplifier so that the output of adder is put accordingly through amplifier
It is big to process；
The outfan of the amplifier connects respectively the input of demodulator and the input of torque variator so that after amplification
On the one hand signal as the input signal of demodulator, on the other hand realizes voltage to the conversion of power through torque variator；
Voltage signal is transformed to corresponding power and is applied by the input of the outfan connecting detection mechanism of the torque variator, realization
It is added in testing agency, completes force feedback；
The outfan of the calibration signal connects the input of phase shifter, makees defeated after 90 ° of phase shifts to input signal using the phase shifter
Go out；
The outfan of the calibration signal is connected the input of demodulator with the outfan of phase shifter simultaneously, used as the defeated of demodulator
Enter signal, demodulator realizes the demodulation to amplifier output signal；
The outfan of the demodulator connects the input of low pass filter, the outfan connection PI controllers of low pass filter
Input, using PI controllers corresponding proportional, integral control is made to input signal；
The input of the outfan coupling stiffness actuator of the PI controllers, the outfan connecting detection mechanism of stiffness tuning device
Input, after stiffness tuning device is correspondingly processed the output of PI controllers, output signal is applied in testing agency,
Complete the stiffness tuning to testing agency.
2. a kind of MEMS gyro automatic modality matching control apparatus based on negative stiffness effects according to claim 1, its
It is characterised by：The simplified model of the testing agency include a pair of detecting electrodes S+ and S-, a pair of feedback electrodes F+ and F-, one
Public electrode G；The detecting electrode is connected with preamplifier, completes the extraction to sensed-mode signal；The feedback electrode
It is connected with torque variator and stiffness tuning device simultaneously, force feedback and the effect of stiffness tuning is realized respectively.
3. a kind of MEMS gyro automatic modality matching control apparatus based on negative stiffness effects according to claim 1, its
It is characterised by：The stiffness tuning device inside includes two multipliers, mechanical parameter km, and input signal is the output of PI controllers
Signal Vp and the detection output signal of testing agency；First multiplier is used to realize to PI controller output signals work square
Process, the output of first multiplier is multiplied as the input of second multiplier with the output of mechanical parameter and testing agency,
The output result of second multiplier is the output of stiffness tuning device；The output of stiffness tuning device is applied to feedback electrode F+ and F-
On, realize the stiffness tuning to testing agency.
4. a kind of MEMS gyro automatic modality matching control apparatus based on negative stiffness effects according to claim 1, its
It is characterised by：The demodulator inside includes 8 multipliers, 4 low pass filters, 3 adders；The input of the demodulator
Signal is the output V of amplifiero1, the phase shifter output c and d and the output a and b of calibration signal；First by the defeated of amplifier
Go out Vo1It is multiplied with the output c and d of phase shifter and the output a and b of calibration signal, obtains signal a1, b1, c1, d1, then four tunnels
Signal makees a square process after low pass filter, obtains signal a2, b2, c2, d2, is respectively added a2 with c2, b2 with d2, obtains
To signal db, ca, finally using the difference of db and ca as demodulator output；The demodulator is realized believing testing agency's output
The measurement of number amplitude size, and remove the impact of phase place.
5. a kind of MEMS gyro automatic modality matching control apparatus based on negative stiffness effects according to claim 1 are realized
The MEMS gyro automatic modality match control method based on negative stiffness effects, it is characterised in that：Employ external calibration signal
Input, the mode vectors correlation controlled quentity controlled variable needed for obtaining；The external calibration signal is folded by different sinusoidal signal a of two class frequencys and b
Plus form, a class frequency higher than driven-mode mid frequency, one group of mid frequency less than driven-mode, and the two is in driving
The frequency difference of the mid frequency of mode is equal, realizes that automatic modality is matched, without extra reference quantity；The phase shifter is realized
To the accurate phase shift of two groups of 90 ° of calibration signals, two after phase shift group signal c and d is with calibration signal a and b together as subsequent demodulation
Required input signal；After the completion of mode vectors correlation, the input signal of the PI controllers fuctuation within a narrow range near 0.
6. a kind of MEMS gyro automatic modality match control method based on negative stiffness effects according to claim 5, its
It is characterised by：The input of the external calibration signal is realized by the form of force feedback, specific as follows：With external calibration
Signal Vi is the input of open cycle system, and the output Vo1 of amplifier is the outfan of open cycle system, then the open cycle system will be examined
Survey mechanism to be placed on feedback circuit；During mode vectors correlation, by parameter configuration widen the first resonance peak and the second resonance peak it
Between frequency difference, make system operating frequency in the corresponding frequency range of first resonance peak.
7. a kind of MEMS gyro automatic modality match control method based on negative stiffness effects according to claim 5, its
It is characterised by：The frequency size of the cut-off frequency reference calibrations signal of the low pass filter makees relative set, it is ensured that can be complete
AC compounent is filtered entirely, extracts effective control signal.
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN107389090A (en) * | 2017-06-12 | 2017-11-24 | 中国航空工业集团公司西安飞行自动控制研究所 | A kind of mechanical non-orthogonal closed-loop policy for improving MEMS gyro anti-vibration characteristic |
| CN110108266A (en) * | 2019-05-08 | 2019-08-09 | 南京理工大学 | The real-time automated closed-loop mode matching method of gyro based on mechanical VCO phaselocked loop |
| CN110542437A (en) * | 2019-09-21 | 2019-12-06 | 中北大学 | Mechanical sensitivity self-compensation method for driving-detecting mode interchange micro-mechanical gyroscope |
| CN110823249A (en) * | 2019-10-18 | 2020-02-21 | 中国航空工业集团公司西安飞行自动控制研究所 | Automatic mode matching control structure and method for silicon micro gyroscope |
| CN112781578A (en) * | 2020-12-25 | 2021-05-11 | 湖南航天机电设备与特种材料研究所 | Optical fiber gyroscope with scale factor self-adaptive control and method |
| GB2616713A (en) * | 2022-02-09 | 2023-09-20 | Honeywell Int Inc | Vibratory sensor with electronic balancing |
| US11994390B2 (en) | 2022-02-09 | 2024-05-28 | Honeywell International Inc. | Vibratory sensor with electronic balancing |
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| CN110823249A (en) * | 2019-10-18 | 2020-02-21 | 中国航空工业集团公司西安飞行自动控制研究所 | Automatic mode matching control structure and method for silicon micro gyroscope |
| CN110823249B (en) * | 2019-10-18 | 2023-01-13 | 中国航空工业集团公司西安飞行自动控制研究所 | Automatic mode matching control structure and method for silicon micro gyroscope |
| CN112781578A (en) * | 2020-12-25 | 2021-05-11 | 湖南航天机电设备与特种材料研究所 | Optical fiber gyroscope with scale factor self-adaptive control and method |
| CN112781578B (en) * | 2020-12-25 | 2022-07-15 | 湖南航天机电设备与特种材料研究所 | Optical fiber gyroscope with scale factor self-adaptive control and method |
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