CN109029409B - Parameter amplification method and device in micromechanical gyroscope with tunable gate structure - Google Patents
Parameter amplification method and device in micromechanical gyroscope with tunable gate structure Download PDFInfo
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Abstract
The invention discloses a parametric amplification method and a parametric amplification device in a micromechanical gyroscope with a tunable gate structure. The device comprises a tunable micromechanical gyroscope, a driving signal generating circuit, a capacitance/voltage converting circuit, a tuning signal amplifying circuit, a first digital-to-analog converter, an analog-to-digital converter, a second digital-to-analog converter and a field programmable gate array chip. The invention utilizes the variable-area triangular electrode to realize a tuning structure without introducing a soft spring effect, and utilizes the field programmable gate array chip to generate a root-sign-form tuning voltage signal, thereby being capable of separately setting the direct current tuning capacity and the parametric amplification capacity. The method can be applied to the driving mode or the detection mode of the micromechanical gyroscope, and can also be applied to other kinds of micromechanical resonators.
Description
Technical Field
The invention relates to a micromechanical gyroscope, in particular to a parametric amplification method and a parametric amplification device in a micromechanical gyroscope with a tunable gate structure.
Background
The micro-mechanical gyroscope has the characteristics of small volume, low power consumption, mass production and the like, and has wide application prospect in the industrial and civil fields. In recent years, the performance index of the micromechanical gyroscope is continuously improved, and the micromechanical gyroscope has the potential of high-precision application, such as an inertial navigation unit.
The principle of parametric amplification is that the elastic coefficient changes periodically, and the effect of a part of damping coefficients can be counteracted under specific parameters, so that the quality factor of the device is amplified, and the mechanical sensitivity of the device can be improved. The micromechanical gyroscope is also called a Coriolis vibration gyroscope and is based on an energy exchange mechanism of two vibration modes, namely a driving mode and a detection mode. For micromechanical gyroscopes, parametric amplification may be applied to either the drive or detection mode, but sensitivity can only be increased if the mode is matched.
The traditional tunable micromechanical device is generally based on a comb-tooth variable-pitch tuning structure, and a soft spring effect is introduced when parametric amplification is applied. The triangular tuning electrode adopted by the invention is a linear tuning structure, and a soft spring effect cannot be introduced in the tuning process, and the vibration displacement amplitude of the device cannot be limited. In addition, the conventional parametric amplification tuning signal generally has three forms: vt＝Vaccos(ωt)、Vt＝Vdc+Vaccos(ωt)、Vt＝Vdc+Vaccos (2 ω t), neither of which forms can be directly adjusted by adjusting the parameter VdcAnd VacThe DC tuning capability and the parametric amplification capability are set separately. The tuning signal in root form adopted by the invention can pass through AdcAdjustment of the DC tuning capability, AacThe parametric amplification capability is adjusted. Compared with other tuning signal forms, the method has advantages. The method can be applied to micromechanical gyroscope drive modes or detection modes, and can also be applied to other kinds of micromechanical resonators.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and provides a parametric amplification method and a parametric amplification device in a micromechanical gyroscope with a tunable gate structure.
The technical scheme of the invention is as follows:
the adopted tuning structure is based on a variable-area triangular electrode, and the adopted tuning signal is in a root sign form generated by a field programmable gate array chip.
The parametric amplification method in the micromechanical gyroscope with the tunable gate structure comprises the following specific steps:
1) the driving signal generating module generates an alternating current driving signal and a carrier signal by using a field programmable gate array chip, generates a direct current driving signal by using a reference voltage chip, and adds the alternating current driving signal and the direct current driving signal by using an operational amplifier chip of a driving signal generating circuit to generate two paths of driving signals. The two driving signals are in the form of Vd＝Vd-DC±Vd-ACcos (ω t), where Vd-DCTo drive a DC component, Vd-ACTo drive the ac amplitude, ω is the drive frequency. The driving alternating current amplitude and the driving frequency are obtained by adjusting parameters in the field programmable gate array chip in real time through serial port communication, and when the driving frequency is increased progressively at fixed intervals in a certain frequency interval, frequency sweeping operation can be carried out. The driving signal is output to any modal driving signal input end of the micromechanical gyroscope, and the secondary driving electricity is completed on the driving electrode of the micromechanical gyroscopeConversion of the signal to an electrostatic driving force. And outputting the carrier signal to a carrier signal input end of the micro-mechanical gyroscope.
2) The tuning signal generation module generates a tuning signal in a root form by using the field programmable gate array chip and outputs the tuning signal to the tuning signal amplification module.
3) The tuning signal amplifying module further amplifies the tuning signal by using the tuning signal amplifying circuit, and outputs the tuning signal to the tuning signal input end of the tunable micromechanical gyroscope to realize direct current tuning or parametric amplification, and the conversion from the tuning electric signal to the electrostatic tuning force can be completed on the tuning electrode of the micromechanical gyroscope.
4) The displacement detection module converts capacitance change caused by an output vibration signal of the micro-mechanical gyroscope into a voltage signal by using a capacitance/voltage conversion circuit, completes carrier modulation, and inputs the obtained detection voltage signal to the amplitude and phase extraction module.
5) The amplitude and phase extraction module samples the detection voltage signal obtained by the detection capacitor/voltage module into the field programmable gate array chip to perform carrier demodulation and orthogonal demodulation, and then completes the amplitude and phase extraction by utilizing a vector mode of a coordinate rotation digital calculation method.
Further, the tuning signal generated by the tuning signal generation module is in the form of
Wherein A isdcTo tune the DC component, AacIn order to tune the amplitude of the alternating current,
to tune the phase. The frequency sweep mode is used for testing the parametric amplification effect, when the driving signal is in the frequency sweep mode, omega is increased progressively at fixed intervals in a certain frequency interval, the frequency of the tuning signal is kept to be 2 omega all the time, a frequency response curve before and after parametric amplification can be drawn through the amplitude and phase extraction module, and obvious modal amplification can be observed; the working mode is used for angular velocity detection, and when the driving signal is in the working mode, omega is kept at the driving resonant frequencyAnd at the moment, the frequency of the tuning signal is still kept at 2 omega, and the performance changes of the micro-mechanical gyroscope before and after parametric amplification, such as sensitivity, angle random walk, bias instability and the like, can be obtained through testing.
The invention discloses a parametric amplification method device in a micromechanical gyroscope with a tunable gate structure, which comprises the tunable micromechanical gyroscope, a driving signal generation circuit, a tuning signal amplification circuit, a capacitance/voltage conversion circuit, a first digital-to-analog converter, a second digital-to-analog converter, an analog-to-digital converter and a field programmable gate array chip. The first output end of the field programmable gate array chip is connected with the input end of the first digital-to-analog converter, and the second output end of the field programmable gate array chip is connected with the input end of the second digital-to-analog converter. The output end of the first digital-to-analog converter is connected with the input end of the driving signal generating circuit, and the output end of the driving signal generating circuit is connected with the driving signal input end of the tunable micromechanical gyroscope. The output end of the second digital-to-analog converter is connected with the input end of the tuning signal amplifying circuit, and the output end of the tuning signal amplifying circuit is connected with the tuning signal input end of the tunable micromechanical gyroscope. The vibration displacement output end of the tuning micromechanical gyroscope is connected with the input end of the capacitance/voltage conversion circuit, the output end of the capacitance/voltage conversion circuit is connected with the input end of the analog/digital converter, and the output end of the analog/digital converter is connected with the input end of the field programmable gate array chip.
Furthermore, the tunable micromechanical gyroscope comprises a driving end, a feedback end, a force balance end, a detection end and a tuning end, wherein the tuning end realizes a tuning function based on a variable-area triangular electrode, and the variable-area triangular electrode is composed of a movable rectangular electrode and a fixed triangle, or the variable-area triangular electrode is composed of a movable triangular electrode and a fixed rectangular electrode.
Compared with the prior art, the invention has the beneficial effects that:
1) the parametric amplification of the invention is realized based on the triangular variable-area tuning electrode, and the soft spring effect is not introduced, so that the working displacement of the micromechanical gyroscope with the tunable gate structure is not limited.
2) The parametric amplification of the invention is based on a novel tuning voltage in root sign form, and can be used for separately setting the direct current tuning capacity and the parametric amplification capacity.
3) The parametric amplification method can effectively improve the performances of the micromechanical gyroscope with the tunable gate structure, such as sensitivity, angle random walk, bias instability and the like.
4) The parametric amplification method can be applied to not only the driving mode or the detection mode of the micromechanical gyroscope, but also other types of micromechanical resonators.
Drawings
Fig. 1 is a schematic diagram of a parametric amplification method in a tunable gate structure micromachined gyroscope.
In the figure, a tunable micromechanical gyroscope 1 refers to a micromechanical gyroscope with a triangular tuning electrode designed in a driving mode or a detection mode, a displacement detection module 2 refers to a capacitance/voltage conversion circuit to obtain a detection voltage signal, and an amplitude and phase signal extraction module 3 refers to a coordinate rotation digital calculation method to calculate the amplitude and phase of the detection voltage signal in a vector mode.
Fig. 2 is a schematic diagram of a driving signal generating module according to the present invention.
Fig. 3 is a schematic diagram of a tuning signal generation module in the present invention.
Fig. 4 is a timing diagram of the driving signals and the tuning signals in the present invention.
Fig. 5 is a schematic structural diagram of a parametric amplification device in a micromechanical gyroscope with a tunable gate structure.
Fig. 6 is a schematic view of a micromechanical structure according to the present invention.
Fig. 7 is a driving signal generating circuit diagram of the present invention.
Fig. 8 is a tuned signal amplification circuit diagram of the present invention.
Fig. 9 is a circuit diagram of the capacitance/voltage conversion circuit of the present invention.
Detailed Description
As shown in fig. 1, the parametric amplification method in the micromechanical gyroscope with the tunable gate structure includes the following steps:
1) drive signal generation module utilizing currentThe field programmable gate array chip generates an alternating current driving signal and a carrier signal, the reference voltage chip generates a direct current driving signal, and the alternating current driving signal and the direct current driving signal are added and reduced by an operational amplifier chip of the driving signal generating circuit to generate two paths of driving signals. The two driving signals are in the form of Vd＝Vd-DC±Vd-ACcos (ω t), where Vd-DCTo drive a DC component, Vd-ACTo drive the ac amplitude, ω is the drive frequency. The driving alternating current amplitude and the driving frequency are obtained by adjusting parameters in the field programmable gate array chip in real time through serial port communication, and when the driving frequency is increased progressively at fixed intervals in a certain frequency interval, frequency sweeping operation can be carried out. The driving signal is output to a driving signal input end of any mode of the micromechanical gyroscope, and the conversion from the driving electric signal to the electrostatic driving force can be completed on a driving electrode of the micromechanical gyroscope. And outputting the carrier signal to a carrier signal input end of the micro-mechanical gyroscope.
2) The tuning signal generation module generates a tuning signal in a root form by using the field programmable gate array chip and outputs the tuning signal to the tuning signal amplification module.
3) The tuning signal amplifying module further amplifies the tuning signal by using the tuning signal amplifying circuit, and outputs the tuning signal to the tuning signal input end of the tunable micromechanical gyroscope to realize direct current tuning or parametric amplification, and the conversion from the tuning electric signal to the electrostatic tuning force can be completed on the tuning electrode of the micromechanical gyroscope.
4) The displacement detection module converts capacitance change caused by an output vibration signal of the micro-mechanical gyroscope into a voltage signal by using a capacitance/voltage conversion circuit, completes carrier modulation, and inputs the obtained detection voltage signal to the amplitude and phase extraction module.
5) The amplitude and phase extraction module samples the detection voltage signal obtained by the detection capacitor/voltage module into the field programmable gate array chip to perform carrier demodulation and orthogonal demodulation, and then completes the amplitude and phase extraction by utilizing a vector mode of a coordinate rotation digital calculation method.
In the present invention, the tuning signal is generated by the tuning signal generation moduleThe tuning signal is in the form of
Wherein A isdcTo tune the DC component, AacIn order to tune the amplitude of the alternating current,
to tune the phase. The frequency sweep mode is used for testing the parametric amplification effect, when the driving signal is in the frequency sweep mode, omega is increased progressively at fixed intervals in a certain frequency interval, the frequency of the tuning signal is kept to be 2 omega all the time, a frequency response curve before and after parametric amplification can be drawn through the amplitude and phase extraction module, and obvious modal amplification can be observed; the working mode is used for detecting the angular velocity, when the driving signal is in the working mode, omega is kept as the driving resonance frequency, the frequency of the tuning signal is still kept as 2 omega at the moment, and the performance changes of the micro-mechanical gyroscope before and after parametric amplification, such as sensitivity, angle random walk, bias instability and the like can be obtained through testing.
After a certain mode of the micromechanical gyroscope is applied with a tuning voltage as shown above, the difference equation of the mode becomes
Wherein the right side of the equation represents the driving force generated by the two-way driving signal at the driving signal end of the gyroscope, F0Driving force amplitude, omega driving frequency, m, c, K equivalent mass, damping coefficient, elastic coefficient of the movable mass block of the resonator, and KTRepresenting the tuning coefficients. The steady state solution of the vibration displacement x, the first derivative and the second derivative of the steady state solution can be obtained by a standard perturbation method, and then the difference equation is replaced, so that the vibration displacement x can be solved by trigonometric function transformation. In particular, at resonance, the tuned resonance frequency, resonance displacement amplitude, and resonance displacement phase are as follows:
by the above derivation, in colloquial terms, the tuning effect is due to the tuning of the DC component AdcIt was decided that this is consistent with the case of dc tuning. Whereas the parametric amplification/reduction effect is obtained by tuning only the AC amplitude AacAnd tuning phase
And (6) determining. Maximum resonance displacement amplitude is
The minimum resonance displacement amplitude is reached
In both cases, the resonant displacement phase is-pi/2. The parametric method of the present invention thus allows for separate adjustment of the dc tuning capability and the parametric amplification capability by this voltage form.
As shown in fig. 2, the driving signal generating module generates the driving ac amplitude and the driving frequency in step 1) in a field programmable gate array chip by a coordinate rotation digital calculation method, and adds the ac driving signal and the dc driving signal by an operational amplifier chip of the driving signal generating circuit to generate a driving signal.
As shown in fig. 3, the tuning signal generating module generates the ac tuning signal by the coordinate rotation digital calculation method in the field programmable gate array chip according to the ac component amplitude, the ac component phase and the driving frequency in step 2), and continues to add the dc tuning signal in the field programmable gate array chip and open the root number to obtain the tuning signal.
As shown in fig. 4, is a timing diagram of the driving signal and the tuning signal. The drive signal and theTuning the signal at
The most pronounced parametric amplification effect will occur, in particular implementations the tuning phase is set to
Tuning the DC component AdcCan independently adjust the DC tuning capability and tune the AC amplitude AacIndependently adjustable parametric amplification, AdcAnd AacThe larger the dc tuning capability and the parametric amplification capability, respectively, will be. In the figure, two driving signals are Vd＝Vd-DC±Vd-ACcos (ω t), where Vd-DC＝5V，Vd-AC2V, ω 4000 pi rad/s. The tuning signal is
Wherein A isdc＝50V，Aac＝20V，
As shown in fig. 5, a parametric amplification method and apparatus for a micromechanical gyroscope with a tunable gate structure includes a tunable micromechanical gyroscope, a driving signal generating circuit, a tuning signal amplifying circuit, a capacitor/voltage converting circuit, a first digital-to-analog converter, a second digital-to-analog converter, an analog-to-digital converter, and a field programmable gate array chip. The first output end of the field programmable gate array chip is connected with the input end of the first digital-to-analog converter, and the second output end of the field programmable gate array chip is connected with the input end of the second digital-to-analog converter. The output end of the first digital-to-analog converter is connected with the input end of the driving signal generating circuit, and the output end of the driving signal generating circuit is connected with the driving signal input end of the tunable micromechanical gyroscope. The output end of the second digital-to-analog converter is connected with the input end of the tuning signal amplifying circuit, and the output end of the tuning signal amplifying circuit is connected with the tuning signal input end of the tunable micromechanical gyroscope. The vibration displacement output end of the tuning micromechanical gyroscope is connected with the input end of the capacitance/voltage conversion circuit, the output end of the capacitance/voltage conversion circuit is connected with the input end of the analog/digital converter, and the output end of the analog/digital converter is connected with the input end of the field programmable gate array chip.
As shown in fig. 6, the tunable micromechanical gyroscope refers to a micromechanical gyroscope with a triangular tuning electrode designed in a driving mode or a detection mode. In the specific implementation process, if a sufficiently large driving signal is added in the driving mode, the limit vibration displacement is still not reached, a parametric amplification method can be applied in the driving mode; if the driving mode can reach the limit vibration displacement, a parametric amplification method can be applied to the detection mode of the mode matching gyroscope; it is therefore necessary to select in which modality the invention is to be applied, depending on the actual situation. The figure shows a gate structure micromechanical gyroscope structure with tunable detection mode, and if a parametric amplification method is applied to the driving mode, a triangular tuning electrode as shown in the figure is only required to be designed in the driving mode. The driving end and the feedback end represent a driving signal input end and a vibration displacement output end of a driving mode, the force balance end and the detection end represent a driving signal input end and a vibration displacement output end of a detection mode, and a parametric amplification method can be applied to one of the two modes.
As shown in fig. 7, the driving signal generating circuit is: the AC driving signals are respectively connected with the first resistors R1And a fifth resistor R5Is connected to the DC driving signal and the second resistor R2And a seventh resistor R7Is connected at one end. A first resistor R1And a second resistor R2Is connected with the negative input terminal of the first operational amplifier, and a fourth resistor R4Is grounded, and a fourth resistor R4The other end of which is connected to the positive input of the first operational amplifier. A seventh resistor R7Is connected to the negative input terminal of the first operational amplifier, a fifth resistor R5Is connected with the positive input end of the second operational amplifier, a sixth resistor R6Is grounded, a sixth resistor R6And the other end of the second operational amplifier is connected with the positive input end of the second operational amplifier. Third resistor R3One end of and the firstNegative input terminal of operational amplifier, third resistor R3The other end of the first operational amplifier is connected with the output end of the first operational amplifier, and the signal output by the output end of the first operational amplifier is a first path of driving signal. Eighth resistor R8Is connected to the negative input of the second operational amplifier, an eighth resistor R8The other end of the first operational amplifier is connected with the output end of the second operational amplifier, and the signal output by the output end of the second operational amplifier is a second path of driving signal. The two driving signals are connected to the driving signal input end of the tunable micromechanical gyroscope and used for driving the tunable micromechanical gyroscope to generate vibration displacement.
As shown in fig. 8, the tuning signal amplifying circuit is: tuning signal and ninth resistor R9Is connected to a ninth resistor R9And the other end of the second operational amplifier is connected with the negative input end of the third operational amplifier. Eleventh resistor R11Is grounded, an eleventh resistor R11And the other end of the second operational amplifier is connected with the positive input end of the third operational amplifier. A tenth resistor R10Is connected to the negative input terminal of the third operational amplifier, a tenth resistor R10And the other end of the second operational amplifier is connected with the output end of the third operational amplifier. The signal output by the output end of the third operational amplifier is an amplified tuning signal. The amplified tuning signal is connected to the tuning signal input end of the tunable micromechanical gyroscope and is used for applying a direct current tuning or parametric amplification method.
As shown in fig. 9, the capacitance/voltage conversion circuit is: two groups of differential detection capacitors C of tunable micromechanical gyroscope1And C2Is connected to a carrier signal, C1And C2The other end of the first path of detection capacitor signal is connected with the first path of detection capacitor signal and the second path of detection capacitor signal respectively, and the two paths of detection capacitor signals are connected with the negative input ends of the fourth operational amplifier and the fifth operational amplifier respectively. Twelfth resistor R12And a third capacitance C3And one end of the parallel connection is connected with the negative input end of the fourth operational amplifier, and the other end of the parallel connection is connected with the output end of the fourth operational amplifier. Thirteenth resistor R13And a fourth capacitance C4Parallel connection, one end of which is connected with the negative pole of the fifth operational amplifierThe input end is connected, and the other end is connected with the output end of the fifth operational amplifier. The positive input ends of the fourth operational amplifier and the fifth operational amplifier are both grounded, and the output ends of the fourth operational amplifier and the fifth operational amplifier are respectively a first path of detection voltage signal and a second path of detection voltage signal. To this end, the conversion from the capacitance signal to the voltage signal is completed by the fourth operational amplifier and the fifth operational amplifier. A fourteenth resistance R14Is connected with the output terminal of the fourth operational amplifier, a fourteenth resistor R14Is connected with the positive input terminal of the sixth operational amplifier, a fifteenth resistor R15Is grounded, a fifteenth resistor R15And the other end of the second operational amplifier is also connected to the positive input of the sixth operational amplifier. Sixteenth resistor R16Is connected with the output terminal of the fifth operational amplifier, a sixteenth resistor R16Is connected with the negative input terminal of the sixth operational amplifier, a seventeenth resistor R17Is connected to the negative input terminal of the sixth operational amplifier, a seventeenth resistor R17And the other end of the second comparator is connected with the output end of the sixth arithmetic unit. The output signal of the sixth operational amplifier is a detection voltage signal. The differential subtraction of the first path of detection voltage signal and the second path of detection voltage signal is realized through the sixth operational amplifier, and the detection voltage signal is obtained.
Claims (3)
1. A parametric amplification method in a micromechanical gyroscope with a tunable gate structure is characterized by comprising the following specific steps:
1) the driving signal generating module generates an alternating current driving signal and a carrier signal by using a field programmable gate array chip, generates a direct current driving signal by using a reference voltage chip, adds the alternating current driving signal and the direct current driving signal by using an operational amplifier chip of a driving signal generating circuit to generate two driving signals, wherein the two driving signals are in a V formd＝Vd-DC±Vd-ACcos (ω t), where Vd-DCTo drive a DC component, Vd-ACTo drive the ac amplitude, ω is the drive frequency; serial port communication is used for driving alternating current amplitude and driving frequency to realize parameters in field programmable gate array chipThe frequency sweep operation is carried out when the driving frequency is increased progressively at fixed intervals in a certain frequency interval, the driving signal is output to the driving signal input end of any mode of the tunable micromechanical gyroscope, the conversion from the driving electric signal to the electrostatic driving force can be completed on the driving electrode of the tunable micromechanical gyroscope, and the carrier signal is output to the carrier signal input end of the tunable micromechanical gyroscope;
2) the tuning signal generation module generates a tuning signal in a root form by utilizing a field programmable gate array chip and outputs the tuning signal to the tuning signal amplification module;
the tuning signal generated by the tuning signal generation module is in the form of
Wherein A isdcTo tune the DC component, AacIn order to tune the amplitude of the alternating current,
to tune the phase; the frequency sweep mode is used for testing the parametric amplification effect, when the driving signal is in the frequency sweep mode, omega is increased progressively at fixed intervals in a certain frequency interval, the frequency of the tuning signal is kept to be 2 omega all the time, a frequency response curve before and after parametric amplification can be drawn through the amplitude and phase extraction module, and obvious modal amplification can be observed; the working mode is used for detecting the angular velocity, when the driving signal is in the working mode, omega is kept as the driving resonance frequency, the frequency of the tuning signal is still kept as 2 omega at the moment, and the sensitivity, the angle random walk and the bias instability change of the micro-mechanical gyroscope before and after parameter amplification can be obtained through testing;
3) the tuning signal amplification module further amplifies the tuning signal by using the tuning signal amplification circuit, and outputs the tuning signal to a tuning signal input end of the tunable micromechanical gyroscope to realize direct current tuning or parametric amplification, and conversion from a tuning electric signal to electrostatic tuning force can be completed on a tuning electrode of the micromechanical gyroscope;
4) the displacement detection module converts capacitance change caused by an output vibration signal of the micromechanical gyroscope into a voltage signal by using a capacitance/voltage conversion circuit, completes carrier modulation, and inputs the obtained detection voltage signal to the amplitude and phase extraction module;
5) the amplitude and phase extraction module samples the detection voltage signal obtained by the displacement detection module into the field programmable gate array chip to perform carrier demodulation and orthogonal demodulation, and then completes the amplitude and phase extraction by utilizing a vector mode of a coordinate rotation digital calculation method.
2. A device for realizing the parametric amplification method in the tunable micromechanical gyroscope with the gate structure as claimed in claim 1, which comprises a tunable micromechanical gyroscope, a driving signal generating circuit, a tuning signal amplifying circuit, a capacitance/voltage converting circuit, a first digital-to-analog converter, a second digital-to-analog converter, an analog-to-digital converter and a field programmable gate array chip, wherein a first output terminal of the field programmable gate array chip is connected with an input terminal of the first digital-to-analog converter, a second output terminal of the field programmable gate array chip is connected with an input terminal of the second digital-to-analog converter, an output terminal of the first digital-to-analog converter is connected with an input terminal of the driving signal generating circuit, an output terminal of the driving signal generating circuit is connected with a driving signal input terminal of the tunable micromechanical gyroscope, and an output terminal of the second digital-to-analog converter is connected with an input terminal of, the output end of the tuning signal amplifying circuit is connected with the tuning signal input end of the tunable micromechanical gyroscope, the vibration displacement output end of the tunable micromechanical gyroscope is connected with the input end of the capacitance/voltage conversion circuit, the output end of the capacitance/voltage conversion circuit is connected with the input end of the analog/digital converter, and the output end of the analog/digital converter is connected with the input end of the field programmable gate array chip.
3. The device according to claim 2, wherein the tunable micromechanical gyroscope comprises a driving end, a feedback end, a force balancing end, a detection end and a tuning end, wherein the tuning end is based on a variable-area triangular electrode to realize a tuning function, and the variable-area triangular electrode is composed of a movable rectangular electrode and a fixed triangle, or the variable-area triangular electrode is composed of a movable triangular electrode and a fixed rectangular electrode.
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| CN101813480B (en) * | 2010-04-20 | 2012-02-15 | 浙江大学 | Micro-mechanics comb-typed gate capacitance top having electric tuning function |
| CN102109345B (en) * | 2010-12-13 | 2012-12-12 | 谢元平 | Digital signal processing method and device for micro-mechanical gyroscope |
| CN102944230B (en) * | 2012-11-14 | 2015-12-16 | 浙江大学 | A kind of constant frequency driving method of tunable micromechanical gyroscope and device thereof |
| CN104142158B (en) * | 2014-04-10 | 2017-01-25 | 北京航空航天大学 | Analog circuit of direct frequency output resonant type micromechanical gyroscope harmonic oscillator |
| KR101724488B1 (en) * | 2015-12-11 | 2017-04-07 | 현대자동차 주식회사 | Mems resonator |
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