CN116576889B - Ring resonance gyro sensitive structure screening device and application method thereof - Google Patents
Ring resonance gyro sensitive structure screening device and application method thereof Download PDFInfo
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Abstract
The invention discloses a ring-shaped resonance gyro sensitive structure screening device and an application method thereof. The invention aims to realize the measurement of resonance characteristic parameters of the ring-shaped resonance gyro sensitive structure so as to be used for screening the ring-shaped resonance gyro sensitive structure and improve the screening efficiency of the ring-shaped resonance gyro sensitive structure.
Description
Technical Field
The invention relates to the technical field of gyro testing, in particular to a screening device for a ring-shaped resonance gyro sensitive structure and an application method thereof.
Background
In the production and processing process of the ring-shaped resonance gyro sensitive structure, the sensitive structure parameters of the ring-shaped resonance gyro sensitive structure can be different in a certain range due to accumulation of various factors, and defective products can also appear. Therefore, a screening evaluation must be performed for each ring resonator gyro sensitive structure. The existing screening evaluation of the ring-shaped resonance gyro sensitive structure adopts a sweep frequency mode, but the traditional simple sweep frequency mode is only suitable for measuring ring-shaped resonance gyro sensitive structure products with low Q value (the Q value is the product of oscillation frequency and oscillation decay time), and the problems that the oscillation frequency measurement is inaccurate, the oscillation decay time cannot be measured and the like exist for ring-shaped resonance gyro sensitive structure products with high Q value. Therefore, how to realize screening and evaluation of the ring-shaped resonance gyro sensitive structure has become a key technical problem to be solved urgently.
Disclosure of Invention
The invention aims to solve the technical problems: aiming at the problems in the prior art, the invention provides a screening device for a ring-shaped resonance gyro sensitive structure and an application method thereof, and aims to realize resonance characteristic parameter measurement of the ring-shaped resonance gyro sensitive structure for screening the ring-shaped resonance gyro sensitive structure and improve screening efficiency of the ring-shaped resonance gyro sensitive structure.
In order to solve the technical problems, the invention adopts the following technical scheme:
the utility model provides a ring resonance gyro sensitive structure sieving mechanism, includes signal generation unit, frequency modulation axle unit, special fixture, carrier signal generation module and signal conversion demodulation circuit, signal generation unit's output links to each other with the signal terminal on the special fixture in order to be used for providing two way sweep signals to the ring resonance gyro sensitive structure of being screened, frequency modulation axle unit's output links to each other with the signal terminal on the special fixture in order to be used for providing frequency modulation axle modulation signal to the ring resonance gyro sensitive structure of being screened, carrier signal generation module's output links to each other with signal conversion demodulation circuit and the signal terminal on the special fixture in order to be used for providing carrier signal to signal conversion demodulation circuit and the ring resonance gyro sensitive structure of being screened, signal conversion demodulation circuit's input links to each other with the signal terminal on the special fixture in order to be used for carrying out demodulation output with the detected signal of the ring resonance gyro sensitive structure of being screened.
The signal generating unit further comprises an upper computer, a phase-locked amplifier, a first change-over switch, a bias voltage generating module and two signal buffering bias modules, wherein a communication port of the phase-locked amplifier is connected with the upper computer, an output end of the phase-locked amplifier is connected with an input end of the first change-over switch to be used for generating two paths of sweep signals through the first change-over switch, the two paths of sweep signals are respectively connected with one input end of one signal buffering bias module, an output end of the bias voltage generating module is connected with the other input end of the signal buffering bias module, the signal buffering bias module is used for buffering sweep signals, differentially converting and superposing direct current bias voltages, and an output end of the signal buffering bias module is connected with a signal terminal on a special fixture to be used for providing two paths of sweep signals for the screened annular resonance gyro sensitive structure.
The phase-locked amplifier comprises a phase-locked loop (PLL) and a Proportion Integration Differentiation (PID) controller which are connected with each other, wherein the control end of the PLL is connected with an upper computer to control parameters of generated sweep frequency signals, the control end of the PLL is connected with the output end of the PID controller, and the input end of the PID controller is connected with the output end of a signal conversion demodulation circuit to control the internal gain of the lock amplifier according to the difference value between the amplitude of a drive signal which is demodulated and restored and a set value.
The signal buffering bias module comprises a buffer circuit, a differential conversion circuit and a direct current bias voltage superposition circuit which are sequentially connected, and an input sweep frequency signal is output after sequentially buffering, differential and direct current bias voltages are superposed through the buffer circuit, the differential conversion circuit and the direct current bias voltage superposition circuit.
The frequency modulation and shaft adjustment unit comprises a frequency modulation and shaft adjustment power supply, a frequency modulation and shaft adjustment circuit and two second change-over switches, wherein the frequency modulation and shaft adjustment power supply is connected with the power supply end of the frequency modulation and shaft adjustment circuit, the frequency modulation and shaft adjustment circuit is used for generating two paths of adjustment voltages required by the screened ring-shaped resonance gyro sensitive structure, and the output end of the frequency modulation and shaft adjustment circuit is connected with the signal terminals on the special fixture through the two second change-over switches respectively so as to be used for providing frequency modulation and shaft adjustment signals for the screened ring-shaped resonance gyro sensitive structure.
The signal conversion demodulation circuit comprises a signal conversion module and a demodulation module, the signal conversion module comprises a C/V conversion circuit and a filter circuit, and detection signals of the screened ring-shaped resonance gyro sensitive structure sequentially pass through the C/V conversion circuit and the filter circuit and then are output to the demodulation module to demodulate driving signals according to carrier signals provided by the carrier signal generation module.
The carrier signal generating module is a singlechip.
The special fixture includes the circuit board and installs the anchor clamps faller on the circuit board with the fastener, one side of anchor clamps faller is equipped with articulated apron, be equipped with on the apron be used for with the buckle of anchor clamps faller auto-lock, the middle part of anchor clamps faller is equipped with the constant head tank that is used for placing ring resonance gyro sensitive structure, be equipped with on the anchor clamps faller and be used for the thimble of being connected with ring resonance gyro sensitive structure electricity, the thimble is pressed on the contact of circuit board and is connected with frequency modulation axle unit, carrier signal generation module and signal conversion demodulation circuit electricity respectively through the connecting terminal on the circuit board. The inner side of the cover plate is provided with a boss for propping the ring-shaped resonance gyro sensitive structure.
An application method of the ring-shaped resonance gyro sensitive structure screening device comprises the following steps:
s101, installing a ring-shaped resonance gyro sensitive structure to be tested in a special fixture, generating a sweep frequency signal with the natural frequency close to that of a resonance unit in the sensitive structure by a control signal generating unit, and jumping to the S102 after the output signal of the ring-shaped resonance gyro sensitive structure to be tested oscillates stably;
s102, recording the frequency of an output signal after stable oscillation as the oscillation frequency of a ring-shaped resonance gyro sensitive structure to be tested; when one mode of the ring-shaped resonance gyro sensitive structure to be tested is in stable oscillation, adjusting the axis adjusting voltage through the frequency adjusting axis adjusting unit to enable the orthogonal output of the other mode to be minimum, and recording the axis adjusting voltage at the moment as the axis adjusting voltage of the ring-shaped resonance gyro sensitive structure to be tested; when one mode of the ring-shaped resonance gyro sensitive structure to be tested oscillates stably, the frequency modulation voltage is regulated by the frequency modulation and axis regulation unit to maximize the coupling output of the other mode, and the frequency modulation voltage at the moment is recorded as the frequency modulation voltage of the ring-shaped resonance gyro sensitive structure to be tested;
s103, disconnecting the sweep frequency signal of the input signal generating unit, starting timing, detecting the amplitude of the oscillation output signal of the tested ring-shaped resonance gyro sensitive structure, stopping timing when the amplitude of the oscillation output signal is reduced by 3db, taking the timing time as the oscillation damping time of the tested ring-shaped resonance gyro sensitive structure, and calculating the product of the oscillation damping time and the oscillation frequency as the Q value of the tested ring-shaped resonance gyro sensitive structure.
Compared with the prior art, the invention has the following advantages: the invention discloses a screening device for a ring-shaped resonance gyro sensitive structure, which comprises a signal generating unit, a frequency modulation and axis adjusting unit, a special clamp, a carrier signal generating module and a signal conversion and demodulation circuit, wherein the output end of the signal generating unit is connected with a signal terminal on the special clamp and is used for providing two paths of sweep signals for the screened ring-shaped resonance gyro sensitive structure, the output end of the frequency modulation and axis adjusting unit is connected with the signal terminal on the special clamp and is used for providing the frequency modulation and axis adjusting signal for the screened ring-shaped resonance gyro sensitive structure, the output end of the carrier signal generating module is connected with the signal conversion and demodulation circuit and the signal terminal on the special clamp and is used for providing the carrier signal for the signal conversion and demodulation circuit and the screened ring-shaped resonance gyro sensitive structure, the input end of the signal conversion and demodulation circuit is connected with the signal terminal on the special clamp and is used for demodulating and outputting the detection signal of the screened ring-shaped resonance gyro sensitive structure.
Drawings
Fig. 1 is a schematic structural diagram of an apparatus according to an embodiment of the present invention.
Fig. 2 is a schematic diagram of an apparatus according to an embodiment of the present invention.
Fig. 3 is a schematic diagram of a testing principle of the device according to the embodiment of the present invention.
Fig. 4 is a schematic circuit diagram of a signal conversion module of a signal conversion demodulation circuit according to an embodiment of the invention.
Fig. 5 is a schematic circuit diagram of a demodulation module of the signal conversion demodulation circuit in an embodiment of the invention.
Fig. 6 is a schematic structural diagram of a special fixture according to an embodiment of the present invention.
Legend description: 1. a signal generating unit; 11. an upper computer; 12. a phase-locked amplifier; 13. a first changeover switch; 14. a bias voltage generation module; 15. a signal buffer bias module; 2. a frequency modulation and shaft adjustment unit; 21. a frequency modulation and axis adjustment power supply; 22. a frequency modulation and axis adjustment circuit; 23. a second change-over switch; 3. a special clamp; 31. a circuit board; 32. a clamp needle plate; 33. a cover plate; 331. a boss; 34. a buckle; 4. a carrier signal generation module; 5. and a signal conversion demodulation circuit.
Detailed Description
As shown in fig. 1, the screening device for the ring resonator gyro sensitive structure of the present embodiment includes a signal generating unit 1, a frequency modulation and axis modulation unit 2, a special fixture 3, a carrier signal generating module 4 and a signal conversion demodulation circuit 5, wherein an output end of the signal generating unit 1 is connected to a signal terminal on the special fixture 3 for providing two paths of sweep signals to the ring resonator gyro sensitive structure to be screened, an output end of the frequency modulation and axis modulation unit 2 is connected to a signal terminal on the special fixture 3 for providing the frequency modulation and axis modulation signal to the ring resonator gyro sensitive structure to be screened, an output end of the carrier signal generating module 4 is connected to the signal conversion demodulation circuit 5 and the signal terminal on the special fixture 3 for providing the carrier signal to the signal conversion demodulation circuit 5 and the ring resonator gyro sensitive structure to be screened, and an input end of the signal conversion demodulation circuit 5 is connected to the signal terminal on the special fixture 3 for demodulating and outputting a detection signal of the ring resonator gyro sensitive structure to be screened. In addition, the screening device of the ring-shaped resonance gyro sensitive structure of the embodiment further comprises a direct-current power supply for supplying power to the signal generating unit 1, the frequency modulation and shaft adjustment unit 2 and the like.
As shown in fig. 1, the signal generating unit 1 further includes a host computer 11, a lock-in amplifier 12, a first switch 13, a bias voltage generating module 14 and two signal buffer bias modules 15, where a communication port of the lock-in amplifier 12 is connected to the host computer 11, an output end of the lock-in amplifier 12 is connected to an input end of the first switch 13 for generating two paths of sweep signals through the first switch 13, the two paths of sweep signals are each connected to one input end of one signal buffer bias module 15, an output end of the bias voltage generating module 14 is connected to the other input end of the signal buffer bias module 15, the signal buffer bias module 15 is used for buffering the sweep signals, differentially converting and superimposing the dc bias voltages, and an output end of the signal buffer bias module 15 is connected to a signal terminal on the special fixture 3 for providing the two paths of sweep signals to the ring resonator gyro sensitive structure being screened. As shown in fig. 2, through the structure, one path of sweep frequency signal and two electrical signal channels can be utilized to complete closed loop scanning driving of two modes of the structure in a time-sharing manner, so that resonance characteristic parameters of the ring-shaped resonance gyro sensitive structure, such as an oscillation frequency value, a Q value and the like, are rapidly measured, resonance characteristic parameter measurement of the ring-shaped resonance gyro sensitive structure is realized, the ring-shaped resonance gyro sensitive structure is screened, and screening efficiency of the ring-shaped resonance gyro sensitive structure is improved.
As shown in fig. 1, the lock-in amplifier 12 includes a phase-locked loop PLL and a PID controller, which are connected to each other, the control end of the phase-locked loop PLL is connected to the host computer 11 for controlling the frequency of the generated sweep frequency signal, the control end of the phase-locked loop PLL is connected to the output end of the PID controller, the input end of the PID controller is connected to the output end of the signal conversion demodulation circuit 5 for controlling the gain in the lock-in according to the difference between the amplitude of the demodulated and restored driving signal and the set value, so as to realize closed-loop control of the amplitude of the sweep frequency signal, and the screened ring resonator gyro sensitive structure resonates to generate oscillation with stable amplitude, so as to facilitate the measurement of various parameters.
In this embodiment, the signal buffer bias module 15 includes a buffer circuit, a differential conversion circuit and a dc bias voltage superposition circuit that are sequentially connected, and the input sweep frequency signal is output after sequentially passing through the buffer circuit, the differential conversion circuit and the dc bias voltage superposition circuit to be buffered, differential converted and superimposed with the dc bias voltage.
In this embodiment, the fm tuning unit 2 includes an fm tuning power supply 21, an fm tuning circuit 22 and two second switches 23, where the fm tuning power supply 21 is connected to a power supply end of the fm tuning circuit 22, the fm tuning circuit 22 is configured to generate two paths of tuning voltages and one path of bias voltage required by the screened ring-resonator gyro sensitive structure, and an output end of the fm tuning circuit 22 is connected to a signal terminal on the special fixture 3 through the two second switches 23 respectively to be used for providing fm tuning signals to the screened ring-resonator gyro sensitive structure.
In this embodiment, the signal conversion demodulation circuit 5 includes a signal conversion module and a demodulation module, the signal conversion module includes a C/V conversion circuit and a filter circuit, and the detection signal of the screened ring resonator gyro sensitive structure sequentially passes through the C/V conversion circuit and the filter circuit and then is output to the demodulation module to demodulate the driving signal according to the carrier signal provided by the carrier signal generation module 4.
In this embodiment, the carrier signal generating module 4 is a single chip microcomputer, and is configured to generate an MCU carrier signal with a frequency far higher than the frequency sweep signal, and input the MCU carrier signal to the signal terminal on the special fixture 3. One path of sweep frequency signal is output from the lock-in amplifier 12, enters one path of signal channel through the first switch 13, is buffered and differentially converted by the signal buffering bias module 15, and is added with direct current bias voltage generated by the bias voltage generating module 14 to be input to the following clamp needle plate 32. As shown in fig. 3, the modulated sweep frequency signal is connected to the electrode of the ring resonator gyro sensitive structure through the signal terminal on the special fixture 3, and the two paths of adjustment voltages provided by the frequency modulation axis adjustment power supply 21 are also applied to the corresponding electrode of the ring resonator gyro sensitive structure. The ring resonance gyro sensitive structure generates resonance, and various superimposed signals are output to the signal conversion and pi-type filter circuit and then sent to the signal conversion demodulation circuit 5 to restore the driving signal (input signal). When the frequency of the driving signal is the same as the natural frequency of a resonance unit in the ring resonance gyro sensitive structure, the resonance generates maximum amplitude, and the power requirement of the driving signal is minimum under the set amplitude. This is accomplished by the phase-locked loop PLL and PID controller of the lock-in amplifier 12, and when oscillation is stable, the frequency is the oscillation frequency value of the structure. Then, the driving signal is disconnected and timing is started, the amplitude of the oscillation output signal is observed, and when the amplitude is reduced by 3db, the timing is stopped, and the timing is the oscillation decay time. When one mode stably oscillates, the voltage of the axis is regulated to minimize the orthogonal output of the other mode, the frequency-modulated voltage is regulated to maximize the coupling output of the other mode, the voltage values are the frequency-modulated voltage and the axis-modulated voltage of the structure respectively, and the basic parameters of the structure are measured, so that the purpose of screening is achieved.
The signal conversion demodulation circuit 5 includes a signal conversion module and a demodulation module. As shown in fig. 4, the signal conversion module works in the following principle: the front-end differential signal PinSns is connected with a negative terminal 2 pin of an operational amplifier UI1A, an amplifying function is completed through RI1, RI3 and the operational amplifier, and a high-frequency signal is not amplified and directly passes through CI1 and CI2, so that an amplifying and filtering effect is achieved; and similarly, the two amplified signals are respectively connected into the negative end and the positive end of the operational amplifier through RI21 and RI23 to finish conversion and amplification, and level signals CapNSMod_P and CapNSMod_N are obtained. As shown in fig. 5, the demodulation module operates according to the following principle: the positive level of the modulation signal, the level of the modulation signal and the carrier wave are respectively sent to a multiplexing analog switch UI5 through pins 2 and 4, pins 9 and 7, pins 1 and 5 to complete demodulation, the demodulation signal is sent to a filter circuit consisting of a resistor RH7, a capacitor CH7 and a resistor RH8 through a pin 10, and is sent to a pin 10 of an operational amplifier UH1C to be buffered after being filtered, and finally is sent to the operational amplifier UH1B to be amplified through a resistor RH 9.
In order to facilitate the replacement of sensitive structures, the device is provided with a special fixture 3 which can be disassembled and disassembled quickly. As shown in fig. 6, the special fixture 3 includes a circuit board 31 and a fixture needle plate 32 mounted on the circuit board 31 by fasteners, one side of the fixture needle plate 32 is provided with a hinged cover plate 33, the cover plate 33 is provided with a buckle 34 for self-locking with the fixture needle plate 32, the middle part of the fixture needle plate 32 is provided with a positioning slot for placing a ring-shaped resonance gyro sensitive structure, the fixture needle plate 32 is provided with a thimble for electrically connecting with the ring-shaped resonance gyro sensitive structure, and the thimble is pressed on a contact of the circuit board 31 and is electrically connected with the frequency modulation and shaft adjusting unit 2, the carrier signal generating module 4 and the signal conversion and demodulation circuit 5 respectively through connecting terminals on the circuit board 31. In this embodiment, a boss 331 for propping against the ring-shaped resonator gyro sensitive structure is provided on the inner side of the cover plate 33.
The first important characteristic of the screening device for the ring-shaped resonance gyro sensitive structure can measure resonance structure parameters with high Q value. The oscillation characteristics of the high Q value resonance structure are different from those of the low Q value, and the high Q value resonance structure has the characteristics of high frequency, long oscillation time, difficulty in full driving and the like. The phase-locked amplifier 12 of the screening device for the ring-shaped resonance gyro sensitive structure comprises a phase-locked loop PLL and a PID controller which are connected with each other, wherein a circuit adopts a phase PLL structure and an amplitude PID structure, after the frequency of a resonance point is rapidly scanned and measured, the phase of the structure type obtained in the earlier stage is input, the PLL is started to lock the phase, and after resonance is stabilized, the resonance frequency and the attenuation time are accurately measured. Meanwhile, the amplitude adopts a PID closed-loop structure, so that the resonance structure can be stably and fully driven for a long time, the minimum driving force is achieved, and the most full oscillation is achieved. The second important characteristic of the screening device for the ring-shaped resonance gyro sensitive structure of the embodiment is the processing of the driving signals. After the original driving signal enters the circuit board, the first switch 13 is used for selecting a signal channel corresponding to the first mode or the second mode, then the signal channel enters the two-stage operational amplifier circuit for amplification and differential conversion, the direct-current bias voltage output by the bias voltage generating module 14 is overlapped, and finally the direct-current bias voltage is sent to a signal terminal on the later-stage special clamp 3. Meanwhile, the detection signal output from the signal terminal on the special fixture 3 is sent to the switch demodulation circuit after being subjected to C/V conversion and filtering by the signal conversion demodulation circuit 5, and the driving signal is restored for subsequent comparison processing. The MCU carrier signal is generated by a singlechip on the circuit board as a carrier signal generating module 4, the driving signal is modulated by the MCU carrier signal, which is an important step of signal processing, and the anti-interference capability of the signal is improved through modulation and demodulation, so that the actual change of the characteristics of the driving signal is better transmitted for later adjustment of control parameters. The third important feature of the screening device for the ring resonator gyro sensitive structure of the embodiment is the modular design. One module is an external device such as a lock-in amplifier 12, a direct current power supply, and one module is a device body such as a circuit board, a special fixture 3, or the like. The maximum collocation of existing mature equipment is a great advantage of the device. The phase-locked signal amplifier and the direct current power supply can generate driving signals, various power supplies and bias voltages by simple connection, and the driving signals can be subjected to open-loop frequency sweeping, closed-loop PLL phase locking and closed-loop PID amplitude stabilization, and display control of various signals is completed on a computer web interface. The frequency modulation voltage of the adjusting shaft is directly loaded to the structural electrode on the clamp by an external power supply, the voltage is accurate and stable, and the adjustment is convenient and quick. The device main body provides a convenient and quick channel for the input and output of the driving signals, and the reprocessing of the driving signals is finished. In short, one is responsible for basic signal generation and one is responsible for signal processing, and finally, the input signal and the output signal have basically consistent parameters, and only have amplitude difference, so that the labor division and the cooperation are realized. The fourth characteristic of the screening device for the ring-shaped resonance gyro sensitive structure of the embodiment is that the special fixture 3 is adopted to realize reliable connection and quick replacement of the screening sensitive structure. The special fixture 3 adopts a box cover mechanical structure, and the whole part is arranged on a circuit board by using a fastener. During screening, the cover plate 33 above the clamp is directly opened, the sensitive structure is placed in the clamp, the cover plate 33 is closed, the buckle 34 is self-locked by pressing, the boss 331 at the lower part of the cover plate 33 props against the back of the sensitive structure, one end of tens of ejector pins on the clamp needle plate 32 is pressed on the contact of the circuit board 31, and one end of the ejector pins props against electrode pins of the sensitive structure. The contacts on the circuit board 31 are connected to an external circuit to complete signal input/output. The cover plate 33 and the buckle 34 of the clamp are designed with spring damping force, so that proper pressure application can be ensured. The fifth characteristic of the screening device for the ring resonator gyro sensitive structure of the present embodiment is that the switch is applied (channel fast switching circuit). As described above, the whole device has two parallel channels, so that two modes of the sensitive structure are driven in a time-sharing manner, and another mode is required to be observed, which requires that the driving signals are switched back and forth between the channels. In the structure screening shaft adjustment and frequency adjustment, the bias voltage needs to be frequently switched between the electrodes, the device adopts the cooperation of PCB wiring and a (single-pole double-throw) change-over switch, the switch can be easily switched by one switch, and the device is convenient and efficient.
In addition, this embodiment also provides an application method of the above-mentioned ring-resonator gyro sensitive structure screening device, including:
s101, installing a ring resonator gyro sensitive structure to be tested in a special fixture 3, generating a sweep frequency signal (rough measurement frequency is obtained by earlier sweep frequency) which is close to the natural frequency of a resonance unit in the sensitive structure by a control signal generating unit 1, and jumping to the step S102 after the output signal oscillation of the ring resonator gyro sensitive structure to be tested is stable; the natural frequency being similar means that the frequency difference is smaller than the set value, for example, plus or minus 10Hz, etc., and the value can be taken according to the actual requirement.
S102, recording the frequency of an output signal after stable oscillation as the oscillation frequency of a ring-shaped resonance gyro sensitive structure to be tested; when one mode of the ring-shaped resonance gyro sensitive structure to be tested is in stable oscillation, the frequency modulation and axis adjustment unit 2 is used for adjusting the axis adjustment voltage to enable the orthogonal output of the other mode to be minimum, and the axis adjustment voltage at the moment is recorded as the axis adjustment voltage of the ring-shaped resonance gyro sensitive structure to be tested; when one mode of the ring resonator gyro sensitive structure to be tested oscillates stably, the frequency modulation voltage is regulated by the frequency modulation axis regulating unit 2 to maximize the coupling output of the other mode, the frequency modulation voltage at the moment is recorded as the frequency modulation voltage of the ring resonator gyro sensitive structure to be tested, and the necessary performance of the sensitive structure of the frequency modulation axis regulating can be realized by smaller voltage;
s103, disconnecting the sweep frequency signal of the input signal generating unit 1, starting timing, detecting the amplitude of the oscillation output signal of the ring-shaped resonance gyro sensitive structure to be tested, stopping timing when the amplitude of the oscillation output signal is reduced by 3db, taking the timing time as the oscillation damping time of the ring-shaped resonance gyro sensitive structure to be tested, and calculating the product of the oscillation damping time and the oscillation frequency as the Q value of the ring-shaped resonance gyro sensitive structure to be tested.
The above description is only a preferred embodiment of the present invention, and the protection scope of the present invention is not limited to the above examples, and all technical solutions belonging to the concept of the present invention belong to the protection scope of the present invention. It should be noted that modifications and adaptations to the present invention may occur to one skilled in the art without departing from the principles of the present invention and are intended to be within the scope of the present invention.
Claims (9)
1. The screening device for the ring-shaped resonance gyro sensitive structure is characterized by comprising a signal generating unit (1), a frequency modulation and axis adjusting unit (2), a special fixture (3), a carrier signal generating module (4) and a signal conversion and demodulation circuit (5), wherein the output end of the signal generating unit (1) is connected with a signal terminal on the special fixture (3) for providing two paths of sweep signals for the screened ring-shaped resonance gyro sensitive structure, the output end of the frequency modulation and axis adjusting unit (2) is connected with the signal terminal on the special fixture (3) for providing a frequency modulation and axis adjusting signal for the screened ring-shaped resonance gyro sensitive structure, the output end of the carrier signal generating module (4) is connected with the signal terminal on the signal conversion and demodulation circuit (5) and the signal terminal on the special fixture (3) for providing a carrier signal for the screened ring-shaped resonance gyro sensitive structure, the input end of the signal conversion and demodulation circuit (5) is connected with the signal terminal on the special fixture (3) for demodulating and outputting the detection signal of the screened ring-shaped resonance gyro sensitive structure, the signal generating unit (1), the signal generating module (12) further comprises a phase lock-in which a phase lock amplifier (11) is connected with a phase lock amplifier (13), a phase lock amplifier (13) and a phase lock amplifier (13) connected with the phase lock amplifier (11), the output end of the lock-in amplifier (12) is connected with the input end of the first switch (13) to be used for generating two paths of sweep signals through the first switch (13), the two paths of sweep signals are respectively connected with one input end of a signal buffering bias module (15), the output end of the bias voltage generating module (14) is connected with the other input end of the signal buffering bias module (15), the signal buffering bias module (15) is used for buffering the sweep signals and performing differential conversion and superposition of direct-current bias voltages, and the output end of the signal buffering bias module (15) is connected with a signal terminal on the special fixture (3) to be used for providing two paths of sweep signals for the screened ring-shaped resonance gyro sensitive structure.
2. The screening device for the ring-resonator gyro sensitive structure according to claim 1, wherein the phase-locked amplifier (12) comprises a phase-locked loop PLL and a PID controller which are connected with each other, a control end of the phase-locked loop PLL is communicatively connected with the host computer (11) for setting the sweep signal parameter, a control end of the phase-locked loop PLL is connected with an output end of the PID controller, and an input end of the PID controller is connected with an output end of the signal conversion demodulation circuit (5) for controlling the gain of the lock amplifier according to a difference value between the amplitude of the demodulated and restored driving signal and the set value.
3. The screening device for the ring-shaped resonant gyroscope sensitive structure according to claim 1, wherein the signal buffering bias module (15) comprises a buffer circuit, a differential conversion circuit and a direct-current bias voltage superposition circuit which are sequentially connected, and an input sweep frequency signal is sequentially buffered, differentially converted and superimposed with the direct-current bias voltage by the buffer circuit, the differential conversion circuit and the direct-current bias voltage superposition circuit and then output.
4. The screening device for the ring-shaped resonance gyro sensitive structure according to claim 1, wherein the frequency modulation and axis adjustment unit (2) comprises a frequency modulation and axis adjustment power supply (21), a frequency modulation and axis adjustment circuit (22) and two second switches (23), the frequency modulation and axis adjustment power supply (21) is connected with a power supply end of the frequency modulation and axis adjustment circuit (22), the frequency modulation and axis adjustment circuit (22) is used for generating two paths of adjustment voltages required by the screened ring-shaped resonance gyro sensitive structure, and an output end of the frequency modulation and axis adjustment circuit (22) is connected with a signal terminal on a special fixture (3) through the two second switches (23) respectively so as to be used for providing frequency modulation and axis adjustment signals for the screened ring-shaped resonance gyro sensitive structure.
5. The screening device for the ring resonator gyro sensitive structure according to claim 4, wherein the signal conversion demodulation circuit (5) comprises a signal conversion module and a demodulation module, the signal conversion module comprises a C/V conversion circuit and a filter circuit, and the screened detection signal of the ring resonator gyro sensitive structure is sequentially output to the demodulation module after passing through the C/V conversion circuit and the filter circuit, so as to demodulate the driving signal according to the carrier signal provided by the carrier signal generation module (4).
6. The screening device for the ring-shaped resonance gyro sensitive structure according to claim 4, wherein the carrier signal generating module (4) is a single chip microcomputer.
7. The screening device for the ring-shaped resonance gyro sensitive structure according to claim 1, wherein the special fixture (3) comprises a circuit board (31) and a fixture needle plate (32) which is installed on the circuit board (31) through a fastener, a hinged cover plate (33) is arranged on one side of the fixture needle plate (32), a buckle (34) which is used for being self-locked with the fixture needle plate (32) is arranged on the cover plate (33), a positioning groove for placing the ring-shaped resonance gyro sensitive structure is arranged in the middle of the fixture needle plate (32), a thimble which is used for being electrically connected with the ring-shaped resonance gyro sensitive structure is arranged on the fixture needle plate (32), and the thimble is pressed on a contact of the circuit board (31) and is electrically connected with the frequency modulation and shaft adjusting unit (2), the carrier signal generating module (4) and the signal conversion demodulation circuit (5) through connecting terminals on the circuit board (31) respectively.
8. The screening device for the ring-shaped resonance gyro sensitive structure according to claim 7, characterized in that a boss (331) for pushing the ring-shaped resonance gyro sensitive structure is arranged on the inner side of the cover plate (33).
9. A method of using the ring resonator gyro sensitive structure screening apparatus of any one of claims 1 to 8, comprising:
s101, installing a ring-shaped resonance gyro sensitive structure to be tested in a special fixture (3), generating a sweep frequency signal close to the natural frequency of a resonance unit in the sensitive structure by a control signal generating unit (1), and jumping to the step S102 after the output signal of the ring-shaped resonance gyro sensitive structure to be tested oscillates stably;
s102, recording the frequency of an output signal after stable oscillation as the oscillation frequency of a ring-shaped resonance gyro sensitive structure to be tested; when one mode of the ring-shaped resonance gyro sensitive structure to be tested oscillates stably, the frequency modulation and axis adjustment unit (2) is used for adjusting the axis adjustment voltage to enable the orthogonal output of the other mode to be minimum, and the axis adjustment voltage at the moment is recorded to be used as the axis adjustment voltage of the ring-shaped resonance gyro sensitive structure to be tested; when one mode of the ring-shaped resonance gyro sensitive structure to be tested oscillates stably, the frequency modulation voltage is adjusted through the frequency modulation and axis adjustment unit (2) to enable the coupling output of the other mode to be maximum, and the frequency modulation voltage at the moment is recorded to be used as the frequency modulation voltage of the ring-shaped resonance gyro sensitive structure to be tested;
s103, disconnecting the sweep frequency signal of the input signal generating unit (1) and starting timing, detecting the amplitude of an oscillation output signal of the ring-shaped resonance gyro sensitive structure to be tested, stopping timing when the amplitude of the oscillation output signal is reduced by 3db, taking the timing time as the oscillation damping time of the ring-shaped resonance gyro sensitive structure to be tested, and calculating the product of the oscillation damping time and the oscillation frequency as the Q value of the ring-shaped resonance gyro sensitive structure to be tested.
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| FI126019B (en) * | 2014-02-12 | 2016-05-31 | Murata Manufacturing Co | MEMS resonator drive current circuitry |
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