CN102944230B - A kind of constant frequency driving method of tunable micromechanical gyroscope and device thereof - Google Patents
A kind of constant frequency driving method of tunable micromechanical gyroscope and device thereof Download PDFInfo
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Abstract
The invention discloses a kind of constant frequency driving method and device thereof of tunable micromechanical gyroscope, the method comprises drive singal generation, harmonic ringing generation, input, amplitude and phase extraction four steps, and this device comprises tunable micromechanical gyroscope, drive signal generation circuit, electric capacity/voltage conversion circuit, harmonic ringing amplifying circuit, the first D/A, A/D converter, the second D/A and field programmable gate array chip.The present invention, by the automatic adjustment to alternating current drive signal amplitude and tunable micromechanical gyroscope own resonance frequency, the frequency of drive output signal and amplitude can be made to keep constant, and the phase differential of this signal and alternating current drive signal also keeps constant.The present invention realizes simply, without the need to following the tracks of the resonance frequency of driven-mode, to avoid in system with the module of frequency dependence under time varying frequency the impact that system is brought, can simplify the signal processing of system, can improve system stability.
Description
Technical field
The present invention relates to micromechanical gyro, particularly relate to a kind of constant frequency driving method and device thereof of tunable micromechanical gyroscope.
Background technology
Micromechanical gyro is the inertial sensor of the extraneous rotation information of a kind of perception, because of advantages such as its volume are little, low in energy consumption, can produce in batches, is paid attention to gradually in civilian even military domain.The steady operation of micromechanical gyro need depend on its driven-mode to be continued and stable vibration, and the vibration control circuit of drift to driven-mode of the parameter of micromechanical gyro own proposes certain requirement.
What the micromechanical gyro with tuning structure was certain because the device defects caused manufacturing process imperfection has makes up effect and obtains extensive research, the tunable micromechanical gyroscope of various structures also starts extensively to be developed, and processing tunable micromechanical gyroscope is accomplished technically.
Existing micromechanical gyro Driving technique generally makes drive singal adapt to the drift of micromechanical gyro parameter and change, to ensure that the amplitude of driven-mode vibration signal keeps constant, but the frequency of vibration signal changes often, this not only adds the complicacy of micromechanical gyro system signal process, also can in influential system with the stability of frequency correlation module work, and then the instability causing gyro signal to detect.Therefore, existing micromechanical gyroscope drive method itself can bring certain instability to micromechanical gyro system.Also the technology that driving frequency can be kept constant is no lack of in existing micromechanical gyro Driving technique, but these technology or require that signal deteching circuit can not exist larger time delay, or require comparatively complicated control circuit.
Summary of the invention
The object of the invention is to overcome the deficiencies in the prior art, utilize increasingly extensive tunable micromechanical gyroscope simultaneously, a kind of constant frequency driving method and device thereof of tunable micromechanical gyroscope is provided.
The constant frequency driving method of tunable micromechanical gyroscope is that constant frequency drive singal has constant frequency relative to reference frequency source, the phase signal that constant frequency drive singal and driven-mode output signal is obtained by phase difference detection, utilize phase signal to carry out FEEDBACK CONTROL and obtain harmonic ringing, harmonic ringing is put on the tuning structure of tunable micromechanical gyroscope, the resonance frequency of adjustment tunable micromechanical gyroscope driven-mode, makes the resonance frequency of driven-mode be locked in the frequency of constant frequency drive singal.
The concrete steps of method are as follows:
1) range signal that alternating current drive signal generation module exports according to amplitude and phase extraction module produces alternating current drive signal, carrier signal generation module produces carrier signal simultaneously, alternating current drive signal produces AC signal with carrier signal after being added, AC signal input drive signal generation module, drive singal generation module produces drive singal according to the AC signal of input and the direct current biasing of module self, the driving signal input inputing to tunable micromechanical gyroscope is vibrated to drive tunable micromechanical gyroscope to produce electrostatic driving force, complete carrier modulation simultaneously,
2) phase signal that harmonic ringing generation module exports according to amplitude and phase extraction module produces harmonic ringing, inputs to the harmonic ringing input end of tunable micromechanical gyroscope to adjust the resonance frequency of micromechanical gyro;
3) signal detection module detects the vibration signal that tunable micromechanical gyroscope produces with electrostatic forcing, converts vibration signal to measurable voltage signal, completes the demodulation to modulation signal simultaneously;
4) amplitude and phase extraction module carry out amplitude and phase extraction to the voltage signal that signal detection module exports, obtain phase signal and range signal, phase signal is inputed to harmonic ringing generation module, range signal is inputed to alternating current drive signal generation module.
Described harmonic ringing generation module is contrasted the fixed phase when phase signal as described in step 4) and driven-mode resonance, obtain error signal, error signal is controlled the raw harmonic ringing of self-adaptation real estate by controller, harmonic ringing inputs on the tuning structure of tunable micromechanical gyroscope after adding amount of bias, in order to compensate the change of tunable micromechanical gyroscope resonance frequency, keep the phase signal as described in step 4) constant.
Described alternating current drive signal generation module is contrasted the reference amplitude when range signal as described in step 4) and driven-mode resonance, obtain error signal, control error signal come by controller the amplitude of adaptively modifying alternating current drive signal, keep the range signal as described in step 4) constant.
The constant frequency drive unit of tunable micromechanical gyroscope comprises tunable micromechanical gyroscope, drive signal generation circuit, electric capacity/voltage conversion circuit, harmonic ringing amplifying circuit, first D/A, A/D converter, second D/A and field programmable gate array chip, the output terminal of tunable micromechanical gyroscope is connected with the input end of electric capacity/voltage conversion circuit, the output terminal of electric capacity/voltage conversion circuit is connected with the input end of A/D converter, the output terminal of A/D converter is connected with the input end of field programmable gate array chip, first output terminal of field programmable gate array chip is connected with the input end of the first D/A, second output terminal of field programmable gate array chip is connected with the input end of the second D/A, the output terminal of the first D/A is connected with the input end of drive signal generation circuit, the output terminal of the second D/A is connected with the input end of harmonic ringing amplifying circuit, the output terminal of drive signal generation circuit is connected with the driving signal input of tunable micromechanical gyroscope, the output terminal of harmonic ringing amplifying circuit is connected with the harmonic ringing input end of tunable micromechanical gyroscope, described field programmable gate array chip inside completes carrier wave generation/synchronous demodulation, amplitude and phase extraction, alternating current drive signal produces, carrier signal produces, harmonic ringing produces, the function that alternating current drive signal is added with carrier signal, first output terminal output AC drive singal of field programmable gate array chip and carrier signal sum, alternating current drive signal and carrier signal sum input tunable micromechanical gyroscope after the first D/A and drive signal generation circuit, second output terminal of field programmable gate array chip exports harmonic ringing, harmonic ringing inputs tunable micromechanical gyroscope after the second D/A and harmonic ringing amplifying circuit, the output signal of tunable micromechanical gyroscope converts voltage signal to through electric capacity/voltage conversion circuit, voltage signal carries out signal transacting through the input end of A/D converter input field programmable gate array chip, the drift in time of the resonance frequency of tunable micromechanical gyroscope realizes compensating by the automatic adjustment of tuning voltage, the drift in time of tunable micromechanical gyroscope drive amplitude realizes compensating by the automatic adjustment of alternating current drive signal amplitude.
Described drive signal generation circuit is: input signal respectively with the first resistance R
1with the 12 resistance R
12one end connect, the first resistance R
1the other end be connected with the negative input end of the first operational amplifier, the positive input terminal of the first operational amplifier and the 3rd resistance R
3one end connect, the 3rd resistance R
3other end ground connection, the negative input end of the first operational amplifier and the second resistance R
2one end connect, the second resistance R
2the other end be connected with the output terminal of the first operational amplifier, the output terminal of the first operational amplifier and the 7th resistance R
7one end connect, the 7th resistance R
7the other end be connected with the negative input end of the second operational amplifier, the positive input terminal of the second operational amplifier and the 9th resistance R
9one end connect, the other end ground connection of the 9th resistance, the 5th resistance R
5a termination power, the 5th resistance R
5the other end respectively with the 4th resistance R
4, the 6th resistance R
6with the 13 resistance R
13one end connect, the 4th resistance R
4other end ground connection, the 6th resistance R
6the other end be connected with the negative input end of the second operational amplifier, the negative input end of the second operational amplifier and the 8th resistance R
8one end connect, the 8th resistance R
8the other end be connected with the output terminal of the second operational amplifier, the 12 resistance R
12the other end be connected with the positive input terminal of the 3rd operational amplifier, the negative input end of the 3rd operational amplifier respectively with the tenth resistance R
10with the 11 resistance R
11one end connect, the tenth resistance R
10other end ground connection, the 11 resistance R
11the other end be connected with the output terminal of the 3rd operational amplifier, the output terminal of the 3rd operational amplifier and the 14 resistance R
14one end connect, the 14 resistance R
14the other end be connected with the negative input end of four-operational amplifier, the 13 resistance R
13the other end be connected with the negative input end of four-operational amplifier, the positive input terminal of four-operational amplifier and the 16 resistance R
16one end connect, the 16 resistance R
16other end ground connection, the negative input end of four-operational amplifier and the 15 resistance R
15one end connect, the 15 resistance R
15the other end be connected with the output terminal of four-operational amplifier.
Described electric capacity/voltage conversion circuit is: two groups of difference sensitization capacitance C of tunable micromechanical gyroscope
1and C
2one end be connected with the output terminal of the second operational amplifier and four-operational amplifier respectively, two groups of difference sensitization capacitance C
1and C
2common port be connected with the negative input end of the 5th operational amplifier, the positive input terminal ground connection of the 5th operational amplifier, the negative input end of the 5th operational amplifier respectively with the 3rd electric capacity C
3with the 17 resistance R
17one end connect, the 3rd electric capacity C
3with the 17 resistance R
17the other end be all connected with the output terminal of the 5th operational amplifier.
Described harmonic ringing amplifying circuit is: input signal and the 21 resistance R
21one end connect, the 21 resistance R
21the other end be connected with the negative input end of the 6th operational amplifier, the positive input terminal of the 6th operational amplifier and the 23 resistance R
23one end connect, the 23 resistance R
23other end ground connection, the 19 resistance R
19a termination power, the 19 resistance R
19the other end respectively with the 18 resistance R
18with the 20 resistance R
20one end connect, the 18 resistance R
18other end ground connection, the 20 resistance R
20the other end be connected with the negative input end of the 6th operational amplifier, the negative input end of the 6th operational amplifier and the 22 resistance R
22one end connect, the 22 resistance R
22the other end be connected with the output terminal of the 6th operational amplifier.
The beneficial effect that the present invention compared with prior art has is:
1) the present invention can improve the stability of micromechanical gyro system on the basis of simplified control circuit.
2) the present invention can avoid the impact that brings system stability with the module of frequency dependence in micromechanical gyro system, improves the stability of micromechanical gyro system.
3) the present invention can make the frequency of the vibration signal of driven-mode and amplitude keep constant, and the phase differential of this signal and alternating current drive signal also keeps constant, the signal transacting of micromechanical gyro system can be simplified, improve the stability of micromechanical gyro system simultaneously further.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of the constant frequency driving method of tunable micromechanical gyroscope;
Fig. 2 is that harmonic ringing of the present invention produces schematic diagram;
Fig. 3 is that alternating current drive signal of the present invention produces schematic diagram;
Fig. 4 is the circuit block diagram of the constant frequency drive unit of tunable micromechanical gyroscope;
Fig. 5 is drive signal generation circuit figure of the present invention;
Fig. 6 is electric capacity of the present invention/voltage conversion circuit figure;
Fig. 7 is harmonic ringing amplification circuit diagram of the present invention.
Embodiment
The constant frequency driving method of tunable micromechanical gyroscope is that constant frequency drive singal has constant frequency relative to reference frequency source, the phase signal that constant frequency drive singal and driven-mode output signal is obtained by phase difference detection, utilize phase signal to carry out FEEDBACK CONTROL and obtain harmonic ringing, harmonic ringing is put on the tuning structure of tunable micromechanical gyroscope, the resonance frequency of adjustment tunable micromechanical gyroscope driven-mode, makes the resonance frequency of driven-mode be locked in the frequency of constant frequency drive singal.
As shown in Figure 1, the concrete steps of the constant frequency driving method of tunable micromechanical gyroscope are as follows:
1) range signal that alternating current drive signal generation module exports according to amplitude and phase extraction module produces alternating current drive signal, carrier signal generation module produces carrier signal simultaneously, alternating current drive signal produces AC signal with carrier signal after being added, AC signal input drive signal generation module, drive singal generation module produces drive singal according to the AC signal of input and the direct current biasing of module self, the driving signal input inputing to tunable micromechanical gyroscope is vibrated to drive tunable micromechanical gyroscope to produce electrostatic driving force, complete carrier modulation simultaneously, the generation of carrier signal and alternating current drive signal realizes by the method such as coordinate rotation digital computer algorithm or direct digital frequency synthesier in the specific implementation,
2) phase signal that harmonic ringing generation module exports according to amplitude and phase extraction module produces harmonic ringing, inputs to the harmonic ringing input end of tunable micromechanical gyroscope to adjust the resonance frequency of micromechanical gyro;
3) signal detection module detects the vibration signal that tunable micromechanical gyroscope produces with electrostatic forcing, converts vibration signal to measurable voltage signal, completes the demodulation to modulation signal simultaneously;
4) amplitude and phase extraction module carry out amplitude and phase extraction to the voltage signal that signal detection module exports, obtain phase signal and range signal, phase signal is inputed to harmonic ringing generation module, range signal is inputed to alternating current drive signal generation module, amplitude and phase extraction can adopt coordinate rotation digital computer algorithm when specific implementation.
As shown in Figure 2, described harmonic ringing generation module is contrasted the fixed phase when phase signal as described in step 4) and driven-mode resonance, obtain error signal, error signal is controlled the raw harmonic ringing of self-adaptation real estate by controller, harmonic ringing inputs on the tuning structure of tunable micromechanical gyroscope after adding amount of bias, in order to compensate the change of tunable micromechanical gyroscope resonance frequency, keep the phase signal as described in step 4) constant, described controller in the specific implementation can adoption rate-integral controller.
As shown in Figure 3, described alternating current drive signal generation module is contrasted the reference amplitude when range signal as described in step 4) and driven-mode resonance, obtain error signal, error signal is controlled come the amplitude of adaptively modifying alternating current drive signal by controller, keep the range signal as described in step 4) constant, described controller in the specific implementation can adoption rate-integral controller.
As shown in Figure 4, the constant frequency drive unit of tunable micromechanical gyroscope comprises tunable micromechanical gyroscope, drive signal generation circuit, electric capacity/voltage conversion circuit, harmonic ringing amplifying circuit, first D/A, A/D converter, second D/A and field programmable gate array chip, the output terminal of tunable micromechanical gyroscope is connected with the input end of electric capacity/voltage conversion circuit, the output terminal of electric capacity/voltage conversion circuit is connected with the input end of A/D converter, the output terminal of A/D converter is connected with the input end of field programmable gate array chip, first output terminal of field programmable gate array chip is connected with the input end of the first D/A, second output terminal of field programmable gate array chip is connected with the input end of the second D/A, the output terminal of the first D/A is connected with the input end of drive signal generation circuit, the output terminal of the second D/A is connected with the input end of harmonic ringing amplifying circuit, the output terminal of drive signal generation circuit is connected with the driving signal input of tunable micromechanical gyroscope, the output terminal of harmonic ringing amplifying circuit is connected with the harmonic ringing input end of tunable micromechanical gyroscope, described field programmable gate array chip inside completes carrier wave generation/synchronous demodulation, amplitude and phase extraction, alternating current drive signal produces, carrier signal produces, harmonic ringing produces, the function that alternating current drive signal is added with carrier signal, first output terminal output AC drive singal of field programmable gate array chip and carrier signal sum, alternating current drive signal and carrier signal sum input tunable micromechanical gyroscope after the first D/A and drive signal generation circuit, second output terminal of field programmable gate array chip exports harmonic ringing, harmonic ringing inputs tunable micromechanical gyroscope after the second D/A and harmonic ringing amplifying circuit, the output signal of tunable micromechanical gyroscope converts voltage signal to through electric capacity/voltage conversion circuit, voltage signal carries out signal transacting through the input end of A/D converter input field programmable gate array chip, the drift in time of the resonance frequency of tunable micromechanical gyroscope realizes compensating by the automatic adjustment of tuning voltage, the drift in time of tunable micromechanical gyroscope drive amplitude realizes compensating by the automatic adjustment of alternating current drive signal amplitude.
As shown in Figure 5, described drive signal generation circuit is: input signal respectively with the first resistance R
1with the 12 resistance R
12one end connect, the first resistance R
1the other end be connected with the negative input end of the first operational amplifier, the positive input terminal of the first operational amplifier and the 3rd resistance R
3one end connect, the 3rd resistance R
3other end ground connection, the negative input end of the first operational amplifier and the second resistance R
2one end connect, the second resistance R
2the other end be connected with the output terminal of the first operational amplifier, the output terminal of the first operational amplifier and the 7th resistance R
7one end connect, the 7th resistance R
7the other end be connected with the negative input end of the second operational amplifier, the positive input terminal of the second operational amplifier and the 9th resistance R
9one end connect, the other end ground connection of the 9th resistance, the 5th resistance R
5a termination power, the 5th resistance R
5the other end respectively with the 4th resistance R
4, the 6th resistance R
6with the 13 resistance R
13one end connect, the 4th resistance R
4other end ground connection, the 6th resistance R
6the other end be connected with the negative input end of the second operational amplifier, the negative input end of the second operational amplifier and the 8th resistance R
8one end connect, the 8th resistance R
8the other end be connected with the output terminal of the second operational amplifier, the 12 resistance R
12the other end be connected with the positive input terminal of the 3rd operational amplifier, the negative input end of the 3rd operational amplifier respectively with the tenth resistance R
10with the 11 resistance R
11one end connect, the tenth resistance R
10other end ground connection, the 11 resistance R
11the other end be connected with the output terminal of the 3rd operational amplifier, the output terminal of the 3rd operational amplifier and the 14 resistance R
14one end connect, the 14 resistance R
14the other end be connected with the negative input end of four-operational amplifier, the 13 resistance R
13the other end be connected with the negative input end of four-operational amplifier, the positive input terminal of four-operational amplifier and the 16 resistance R
16one end connect, the 16 resistance R
16other end ground connection, the negative input end of four-operational amplifier and the 15 resistance R
15one end connect, the 15 resistance R
15the other end be connected with the output terminal of four-operational amplifier, the signal that the second operational amplifier and four-operational amplifier output terminal export can simultaneously for driving tunable micromechanical gyroscope produce vibration and modulate vibration signal.
As shown in Figure 6, described electric capacity/voltage conversion circuit is: two groups of difference sensitization capacitance C of tunable micromechanical gyroscope
1and C
2one end be connected with the output terminal of the second operational amplifier and four-operational amplifier respectively, two groups of difference sensitization capacitance C
1and C
2common port be connected with the negative input end of the 5th operational amplifier, the positive input terminal ground connection of the 5th operational amplifier, the negative input end of the 5th operational amplifier respectively with the 3rd electric capacity C
3with the 17 resistance R
17one end connect, the 3rd electric capacity C
3with the 17 resistance R
17the other end be all connected with the output terminal of the 5th operational amplifier, the difference that the signal that the output terminal of the 5th operational amplifier exports has achieved two groups of difference sensitization capacitances is subtracted each other.
As shown in Figure 7, described harmonic ringing amplifying circuit is: input signal and the 21 resistance R
21one end connect, the 21 resistance R
21the other end be connected with the negative input end of the 6th operational amplifier, the positive input terminal of the 6th operational amplifier and the 23 resistance R
23one end connect, the 23 resistance R
23other end ground connection, the 19 resistance R
19a termination power, the 19 resistance R
19the other end respectively with the 18 resistance R
18with the 20 resistance R
20one end connect, the 18 resistance R
18other end ground connection, the 20 resistance R
20the other end be connected with the negative input end of the 6th operational amplifier, the negative input end of the 6th operational amplifier and the 22 resistance R
22one end connect, the 22 resistance R
22the other end be connected with the output terminal of the 6th operational amplifier.
Claims (7)
1. a constant frequency driving method for tunable micromechanical gyroscope, is characterized in that the concrete steps of method are as follows:
1) range signal that alternating current drive signal generation module exports according to amplitude and phase extraction module produces alternating current drive signal, carrier signal generation module produces carrier signal simultaneously, alternating current drive signal produces AC signal with carrier signal after being added, AC signal input drive signal generation module, drive singal generation module produces drive singal according to the AC signal of input and the direct current biasing of module self, the driving signal input inputing to tunable micromechanical gyroscope is vibrated to drive tunable micromechanical gyroscope to produce electrostatic driving force, complete carrier modulation simultaneously,
2) phase signal that harmonic ringing generation module exports according to amplitude and phase extraction module produces harmonic ringing, inputs to the harmonic ringing input end of tunable micromechanical gyroscope to adjust the resonance frequency of micromechanical gyro;
3) signal detection module detects the vibration signal that tunable micromechanical gyroscope produces with electrostatic forcing, converts vibration signal to measurable voltage signal, completes the demodulation to modulation signal simultaneously;
4) amplitude and phase extraction module carry out amplitude and phase extraction to the voltage signal that signal detection module exports, obtain phase signal and range signal, phase signal is inputed to harmonic ringing generation module, range signal is inputed to alternating current drive signal generation module.
2. the constant frequency driving method of a kind of tunable micromechanical gyroscope according to claim 1, it is characterized in that described harmonic ringing generation module is contrasted the fixed phase when phase signal as described in step 4) and driven-mode resonance, obtain error signal, error signal is controlled the raw tuning control signal of self-adaptation real estate by controller, input on the tuning structure of tunable micromechanical gyroscope as harmonic ringing after tuning control signal adds amount of bias, in order to compensate the change of tunable micromechanical gyroscope resonance frequency, keep the phase signal as described in step 4) constant.
3. the constant frequency driving method of a kind of tunable micromechanical gyroscope according to claim 1, it is characterized in that described alternating current drive signal generation module is contrasted the reference amplitude when range signal as described in step 4) and driven-mode resonance, obtain error signal, control error signal come by controller the amplitude of adaptively modifying alternating current drive signal, keep the range signal as described in step 4) constant.
4. the constant frequency drive unit of a tunable micromechanical gyroscope, it is characterized in that comprising tunable micromechanical gyroscope, drive signal generation circuit, electric capacity/voltage conversion circuit, harmonic ringing amplifying circuit, first D/A, A/D converter, second D/A and field programmable gate array chip, the output terminal of tunable micromechanical gyroscope is connected with the input end of electric capacity/voltage conversion circuit, the output terminal of electric capacity/voltage conversion circuit is connected with the input end of A/D converter, the output terminal of A/D converter is connected with the input end of field programmable gate array chip, first output terminal of field programmable gate array chip is connected with the input end of the first D/A, second output terminal of field programmable gate array chip is connected with the input end of the second D/A, the output terminal of the first D/A is connected with the input end of drive signal generation circuit, the output terminal of the second D/A is connected with the input end of harmonic ringing amplifying circuit, the output terminal of drive signal generation circuit is connected with the driving signal input of tunable micromechanical gyroscope, the output terminal of harmonic ringing amplifying circuit is connected with the harmonic ringing input end of tunable micromechanical gyroscope, described field programmable gate array chip inside completes carrier wave generation/synchronous demodulation, amplitude and phase extraction, alternating current drive signal produces, carrier signal produces, harmonic ringing produces, the function that alternating current drive signal is added with carrier signal, first output terminal output AC drive singal of field programmable gate array chip and carrier signal sum, alternating current drive signal and carrier signal sum input tunable micromechanical gyroscope after the first D/A and drive signal generation circuit, second output terminal of field programmable gate array chip exports harmonic ringing, harmonic ringing inputs tunable micromechanical gyroscope after the second D/A and harmonic ringing amplifying circuit, the output signal of tunable micromechanical gyroscope converts voltage signal to through electric capacity/voltage conversion circuit, voltage signal carries out signal transacting through the input end of A/D converter input field programmable gate array chip, the drift in time of the resonance frequency of tunable micromechanical gyroscope realizes compensating by the automatic adjustment of tuning voltage, the drift in time of tunable micromechanical gyroscope drive amplitude realizes compensating by the automatic adjustment of alternating current drive signal amplitude.
5. the constant frequency drive unit of a kind of tunable micromechanical gyroscope according to claim 4, is characterized in that described drive signal generation circuit is: input signal respectively with the first resistance R
1with the 12 resistance R
12one end connect, the first resistance R
1the other end be connected with the negative input end of the first operational amplifier, the positive input terminal of the first operational amplifier and the 3rd resistance R
3one end connect, the 3rd resistance R
3other end ground connection, the negative input end of the first operational amplifier and the second resistance R
2one end connect, the second resistance R
2the other end be connected with the output terminal of the first operational amplifier, the output terminal of the first operational amplifier and the 7th resistance R
7one end connect, the 7th resistance R
7the other end be connected with the negative input end of the second operational amplifier, the positive input terminal of the second operational amplifier and the 9th resistance R
9one end connect, the other end ground connection of the 9th resistance, the 5th resistance R
5a termination power, the 5th resistance R
5the other end respectively with the 4th resistance R
4, the 6th resistance R
6with the 13 resistance R
13one end connect, the 4th resistance R
4other end ground connection, the 6th resistance R
6the other end be connected with the negative input end of the second operational amplifier, the negative input end of the second operational amplifier and the 8th resistance R
8one end connect, the 8th resistance R
8the other end be connected with the output terminal of the second operational amplifier, the 12 resistance R
12the other end be connected with the positive input terminal of the 3rd operational amplifier, the negative input end of the 3rd operational amplifier respectively with the tenth resistance R
10with the 11 resistance R
11one end connect, the tenth resistance R
10other end ground connection, the 11 resistance R
11the other end be connected with the output terminal of the 3rd operational amplifier, the output terminal of the 3rd operational amplifier and the 14 resistance R
14one end connect, the 14 resistance R
14the other end be connected with the negative input end of four-operational amplifier, the 13 resistance R
13the other end be connected with the negative input end of four-operational amplifier, the positive input terminal of four-operational amplifier and the 16 resistance R
16one end connect, the 16 resistance R
16other end ground connection, the negative input end of four-operational amplifier and the 15 resistance R
15one end connect, the 15 resistance R
15the other end be connected with the output terminal of four-operational amplifier.
6. the constant frequency drive unit of a kind of tunable micromechanical gyroscope according to claim 5, is characterized in that described electric capacity/voltage conversion circuit is: two groups of difference sensitization capacitance C of tunable micromechanical gyroscope
1and C
2one end be connected with the output terminal of the second operational amplifier and four-operational amplifier respectively, two groups of difference sensitization capacitance C
1and C
2common port be connected with the negative input end of the 5th operational amplifier, the positive input terminal ground connection of the 5th operational amplifier, the negative input end of the 5th operational amplifier respectively with the 3rd electric capacity C
3with the 17 resistance R
17one end connect, the 3rd electric capacity C
3with the 17 resistance R
17the other end be all connected with the output terminal of the 5th operational amplifier.
7. the constant frequency drive unit of a kind of tunable micromechanical gyroscope according to claim 4, is characterized in that described harmonic ringing amplifying circuit is: input signal and the 21 resistance R
21one end connect, the 21 resistance R
21the other end be connected with the negative input end of the 6th operational amplifier, the positive input terminal of the 6th operational amplifier and the 23 resistance R
23one end connect, the 23 resistance R
23other end ground connection, the 19 resistance R
19a termination power, the 19 resistance R
19the other end respectively with the 18 resistance R
18with the 20 resistance R
20one end connect, the 18 resistance R
18other end ground connection, the 20 resistance R
20the other end be connected with the negative input end of the 6th operational amplifier, the negative input end of the 6th operational amplifier and the 22 resistance R
22one end connect, the 22 resistance R
22the other end be connected with the output terminal of the 6th operational amplifier.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210455784.8A CN102944230B (en) | 2012-11-14 | 2012-11-14 | A kind of constant frequency driving method of tunable micromechanical gyroscope and device thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210455784.8A CN102944230B (en) | 2012-11-14 | 2012-11-14 | A kind of constant frequency driving method of tunable micromechanical gyroscope and device thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102944230A CN102944230A (en) | 2013-02-27 |
| CN102944230B true CN102944230B (en) | 2015-12-16 |
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| GB201204355D0 (en) * | 2012-03-13 | 2012-04-25 | Atlantic Inertial Systems Ltd | Vibratory ring structure |
| CN103162681B (en) * | 2013-03-19 | 2015-06-24 | 中国人民解放军国防科学技术大学 | Method and device for testing signals used for micromechanical gyroscope |
| CN103791897B (en) * | 2014-02-20 | 2016-05-11 | 北京华力创通科技股份有限公司 | Impel the circuit of micromechanical gyro fast start-up |
| CN104390639B (en) * | 2014-10-31 | 2017-10-03 | 中国人民解放军国防科学技术大学 | Scale factor stability method for improving and device for micromechanical gyro |
| CN104897150B (en) * | 2015-06-16 | 2017-08-25 | 中北大学 | A kind of method for lifting the full warm nature energy of silicon micromechanical gyroscope bandwidth |
| CN106525016B (en) * | 2016-10-26 | 2019-11-15 | 中国矿业大学(北京) | A kind of self-adaptation control method of resonant mode gyro |
| CN108803473B (en) * | 2018-05-23 | 2023-12-12 | 浙江大学 | Micromechanical accelerometer control method and device |
| CN109029409B (en) * | 2018-06-15 | 2020-09-01 | 浙江大学 | Parameter amplification method and device in micromechanical gyroscope with tunable gate structure |
| CN111351504B (en) * | 2018-12-21 | 2023-10-17 | 航天科工惯性技术有限公司 | Current frequency conversion device and system with programmable scale factors |
| CN111272161B (en) * | 2020-03-06 | 2021-07-06 | 尚同电子科技(淄博)有限公司 | Micro gyroscope excitation and protection device and method |
| CN111766402A (en) * | 2020-07-01 | 2020-10-13 | 浙江大学 | Tuning control method of micro-mechanical accelerometer |
| CN112003584B (en) * | 2020-08-28 | 2024-01-26 | 上海应用技术大学 | Micro-resonator control system based on time lag feedback |
| CN112815938B (en) * | 2020-12-31 | 2022-10-21 | 中国电子科技集团公司第十三研究所 | Phase adjusting device and method applied to MEMS (micro-electromechanical systems) inertial device |
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