CN112815938B - Phase adjusting device and method applied to MEMS (micro-electromechanical systems) inertial device - Google Patents
Phase adjusting device and method applied to MEMS (micro-electromechanical systems) inertial device Download PDFInfo
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Abstract
The invention is suitable for the technical field of MEMS inertial devices, and provides a phase adjusting device and a phase adjusting method applied to the MEMS inertial device, wherein the phase adjusting device comprises: the waveform conversion module, the digital quantity conversion module and the filter phase shift module are connected in sequence; the waveform conversion module is used for converting the resonance signal output by the MEMS inertial device resonator into a square wave signal; the digital quantity conversion module is used for outputting a digital quantity which is in direct proportion to the period of the resonance signal according to the square wave signal; the filter phase shift module is used for adjusting the central frequency of the filter phase shift module according to the digital quantity, so that the central frequency of the filter phase shift module is equal to the frequency of the resonance signal, and filtering the resonance signal according to the adjusted filter phase shift module, so that the phase of the output filtering signal is kept constant, and the problem that the requirement of an occasion with higher phase requirement cannot be met due to phase change is solved.
Description
Technical Field
The invention belongs to the technical field of MEMS (micro-electromechanical systems) inertial devices, and particularly relates to a phase adjusting device and method applied to an MEMS inertial device.
Background
For Micro Electro Mechanical Systems (MEMS) inertial devices, the problem of objective processing inconsistency can cause different resonant frequencies of MEMS inertial devices in the same batch; moreover, the resonant frequency of the MEMS inertial device may shift with temperature.
However, since the phase delay of a common circuit such as a filter varies with the variation of the signal frequency, the variation of the resonant frequency of the MEMS inertial device causes the phase variation, but in the MEMS inertial device, precise phase control of the processed resonant signal is required, and the phase delay of a component for the resonant signal of different frequency is required to be constant. If the phase delay changes along with the change of the resonant frequency, for some occasions with higher phase requirements, for example, the phase change in quadrature demodulation can cause the phase angle of the quadrature demodulation to change, thereby affecting the performance of the zero position of the inertia device. Or the phase change of the positive feedback can cause the effective feedback to be smaller, consume more power consumption and cause performance attenuation.
Therefore, in the MEMS device, how to make the phase change not to change with the change of the resonant frequency of the MEMS inertial device becomes an urgent problem to be solved
Disclosure of Invention
In view of this, embodiments of the present invention provide a phase adjustment apparatus applied to a MEMS inertial device, so as to solve the problem in the prior art that a phase change changes with a change of a resonant frequency of the MEMS inertial device.
A first aspect of an embodiment of the present invention provides a phase adjustment apparatus applied to an MEMS inertial device, including:
the device comprises a waveform conversion module, a digital quantity conversion module and a filter phase shift module;
the input end of the waveform conversion module is used for being connected with the output end of the MEMS inertial device resonator, the output end of the waveform conversion module is connected with the input end of the digital quantity conversion module, and the waveform conversion module is used for converting a resonance signal output by the MEMS inertial device resonator into a square wave signal;
the output end of the digital quantity conversion module is connected with the input end of the filter phase shift module, and the digital quantity conversion module is used for outputting a digital quantity which is in direct proportion to the period of the resonance signal according to the square wave signal;
the input end of the filter phase shift module is further used for being connected with the output end of the MEMS inertial device resonator, the output end of the filter phase shift module outputs a filtering signal, and the filter phase shift module is used for adjusting the central frequency of the filter phase shift module according to the digital quantity to enable the adjusted central frequency of the filter phase shift module to be equal to the frequency of the resonance signal, and filtering the resonance signal according to the adjusted filter phase shift module to enable the phase of the filtering signal to be constant.
A second aspect of the embodiments of the present invention provides a phase adjustment method applied to a MEMS inertial device, using any one of the phase adjustment apparatuses described above, the phase adjustment method applied to the MEMS inertial device including:
acquiring a resonance signal of a resonator of the MEMS inertial device, and acquiring a square wave signal according to the resonance signal;
obtaining a first voltage signal and a second voltage signal according to the square wave signal and the current source;
inputting the first voltage signal to a non-inverting input terminal of a comparator, and inputting the second voltage signal to an inverting input terminal of the comparator;
the comparator compares the first voltage signal with the second voltage signal, and when the first voltage signal is greater than the second voltage signal, a high level is output, so that the counting result of the accumulator is increased by 1;
updating the first voltage signal according to the counting result of the accumulator until the updated first voltage signal is equal to the second voltage signal, and inputting the counting result of the current accumulator into a filter;
and the filter adjusts the center frequency of the filter to the frequency of the resonance signal according to the counting result, and the resonance signal is filtered by adopting the adjusted filter, so that the phase of the output filtering signal is kept constant.
Compared with the prior art, the embodiment of the invention has the following beneficial effects: the invention converts the resonance signal output by the MEMS inertial device resonator into the square wave signal according to the waveform conversion module, performs digital quantity conversion on the frequency of the resonance signal by using the square wave signal according to the digital quantity conversion module to obtain the digital quantity which is in direct proportion to the period of the resonance signal, adjusts the central frequency of the filter phase shift module to the frequency of the resonance signal according to the digital quantity, and filters the resonance signal by using the adjusted filter phase shift module, so that the phase of the output filtering signal is kept constant and cannot be changed due to the change of the resonance frequency, and the problem that the phase change caused by the change of the resonance frequency in the MEMS device can not meet the requirement of an occasion with higher phase requirement is further avoided. For example, phase changes can cause changes in the quadrature demodulation phase angle, thereby affecting the performance of the null of the inertial device. Or the effective feedback of the positive feedback is reduced due to the phase change, more power consumption is consumed, and the problem of performance attenuation is caused.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings needed to be used in the embodiments or the prior art descriptions will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without inventive exercise.
Fig. 1 is a schematic structural diagram of a phase adjustment device applied to a MEMS inertial device according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of a phase adjustment device applied to a MEMS inertial device according to another embodiment of the present invention;
fig. 3 is a schematic flow chart of a phase adjustment method applied to a MEMS inertial device according to an embodiment of the present invention.
Detailed Description
In the following description, for purposes of explanation and not limitation, specific details are set forth, such as particular system structures, techniques, etc. in order to provide a thorough understanding of the embodiments of the invention. It will be apparent, however, to one skilled in the art that the present invention may be practiced in other embodiments that depart from these specific details. In other instances, detailed descriptions of well-known systems, devices, circuits, and methods are omitted so as not to obscure the description of the present invention with unnecessary detail.
In order to illustrate the technical means of the present invention, the following description is given by way of specific examples.
Fig. 1 is a schematic structural diagram of a phase adjustment apparatus applied to a MEMS inertial device according to an embodiment of the present invention, which is described in detail as follows, and a phase adjustment apparatus 10 applied to a MEMS inertial device includes: a waveform conversion module 11, a digital value conversion module 12 and a filter phase shift module 13.
The input end of the waveform conversion module 11 is used for being connected with the output end of the MEMS inertial device resonator, the output end of the waveform conversion module 11 is connected with the input end of the digital value conversion module 12, and the waveform conversion module 11 is used for converting the resonance signal output by the MEMS inertial device resonator into a square wave signal.
The output end of the digital quantity conversion module 12 is connected to the input end of the filter phase shift module 13, and the digital quantity conversion module 12 is configured to output a digital quantity proportional to the period of the resonance signal according to the square wave signal.
The input end of the filter phase shift module 13 is further configured to be connected to the output end of the MEMS inertial device resonator, the output end of the filter phase shift module 13 outputs a filtering signal, and the filter phase shift module 13 is configured to adjust the center frequency of the filter phase shift module 13 according to the digital quantity, so that the center frequency of the filter phase shift module after adjustment is equal to the frequency of the resonance signal, and filter the resonance signal according to the adjusted filter phase shift module, so that the phase of the filtering signal is kept constant.
The waveform conversion module can convert the resonance signal output by the MEMS inertial device resonator into a square wave signal, the duty ratio of the square wave signal can be 50%, wherein the high level of the square wave signal corresponds to the time sequence ph1, and the low level of the square wave signal corresponds to the time sequence ph2, so that the square wave signal is utilized to track the frequency of the resonance signal.
In this embodiment, the resonance signal output by the MEMS inertial device resonator is converted into a square wave signal according to the waveform conversion module, digital quantity conversion is performed on the frequency of the resonance signal according to the digital quantity conversion module by using the square wave signal to obtain a digital quantity proportional to the period of the resonance signal, the center frequency of the filter phase shift module is adjusted to the frequency of the resonance signal according to the digital quantity, and the adjusted filter phase shift module is used to filter the resonance signal, so that the phase of the output filtered signal is kept constant and does not change due to the change of the resonance frequency, thereby avoiding the problem that the phase change is caused by the change of the resonance frequency in the MEMS device, which further causes the problem that the requirement of the occasion with higher phase requirement cannot be met. For example, phase variations can cause variations in the quadrature demodulation phase angle, thereby affecting the performance of the inertial device null. Or the effective feedback of the positive feedback is reduced due to the phase change, more power consumption is consumed, and the problem of performance attenuation is caused. The method is favorable for reducing the influence of demodulation phase change on zero position change and reducing the amplitude influence on driving a closed loop.
Alternatively, referring to fig. 2, the waveform conversion module 11 may include a comparison unit 111 and a buffer unit 112.
The first input end of the comparing unit 111 is used for inputting the resonance signal output by the MEMS inertial device resonator, the second input end of the comparing unit 112 is grounded, the output end of the comparing unit 111 is connected with the input end of the buffering unit 112, and the output end of the buffering unit 112 outputs a square wave signal.
Illustratively, the comparing unit 111 may be a hysteresis comparator, and the buffering unit 112 may be a buffer.
Optionally, the digital-to-digital conversion module 12 may include a current source, a switching tube S1, a switching tube S2, a configurable resistor array, a comparator, an accumulator, and a configurable capacitor array.
The current source is respectively connected with the drain electrode of the switch tube S1 and the drain electrode of the switch tube S2, the grid electrode of the switch tube S1 and the grid electrode of the switch tube S2 are respectively used for inputting square wave signals, the source electrode of the switch tube S1 is respectively connected with one end of the configurable capacitor array and the in-phase input end of the comparator, and the source electrode of the switch tube S2 is respectively connected with one end of the configurable resistor array and the reverse-phase input end of the comparator; the output end of the comparator is connected with the input end of the accumulator; the output end of the accumulator is connected with the other end of the configurable capacitor array, and the output end of the accumulator is used as the output end of the digital quantity conversion module; the other end of the configurable resistor array is grounded, and the configuration end of the configurable resistor array is used for inputting a configuration signal RC [ M:0].
The switch tube S1 and the switch tube S2 in the digital quantity conversion module 12 work alternately under the control of square wave signals, when the square wave signals are high levels and correspond to a time sequence ph1, the switch tube S1 is conducted, the switch tube S2 is cut off, a current source charges the configurable capacitor array, when the square wave signals are low levels and correspond to a time sequence ph2, the switch tube S1 is cut off, the switch tube S2 is conducted, a current source flows through the configurable resistor array, the resistance of the configurable resistor array is controlled by a configuration signal RC [ M:0], a comparator works in a ph2 stage, when the charging voltage of the configurable capacitor array is larger than the voltage of the configurable resistor array, the comparator outputs high levels, the digital quantity output by an accumulator is counted in an accumulated mode, and the digital quantity CC [ N:0] output by the accumulator is used for controlling the access capacitor of the configurable capacitor array in a feedback mode.
Optionally, the configurable capacitor array may include a capacitor array and a switch tube array.
One end of each capacitor array is connected with the source electrode of the switch tube S1, and the other end of each capacitor array is connected with the corresponding drain electrode in the switch tube array; the source electrodes in the switch tube array are all grounded, and the grid electrodes in the switch tube array are all connected with the output end of the accumulator.
Illustratively, the digital value CC [ N:0] output by the accumulator is utilized]The access capacitor of the feedback control configurable capacitor array can be set as CC [ 0] when the digital quantity output by the accumulator is]Time, CC [ 0] in switch tube array]The corresponding switch is turned on, when the switch tube S1 is turned on, the current source charges the capacitor of 1 × Cu, and when the digital quantity output by the accumulator is CC [1 ]]Time, CC [1 ] in switch tube array]The corresponding switch is turned on, when the switch tube S1 is turned on, the current source charges the capacitor of 2 × Cu, and so on, when the digital quantity output by the accumulator is CC [ N ]]Time, CC [ N ] in switch tube array]The corresponding switch is turned on, when the switch tube S1 is turned on, the current source pair 2 N * The capacitance of Cu charges.
Wherein the charging voltage of the configurable capacitor array is V cout ＝I src /C total * And (dT) is carried out. Wherein dT =0.5T. Wherein, I src Is the current value of a current source, C total The access capacitance value of the configurable capacitor array is T, and T is the clock period of the square wave signal.
Voltage of configurable resistor array: v rout ＝I src *R total 。
When V is cout ＝V rout Then the digital value conversion module reaches the equilibrium state, at this time, I src /C total *dT＝I src *R total Thus, it can be seen that: c total ＝0.5T/R total . It can be seen that the digital quantity output by the accumulator is directly proportional to the period of the square wave signal, that is, the digital quantity output by the accumulator is directly proportional to the period of the harmonic signal, that is, the digital quantity conversion module of the embodiment implements the conversion from the period of the harmonic signal to the digital quantity.
Optionally, the filter phase shift module 13 includes a first resistor array, a second resistor array, a third resistor array, a first capacitor array, a second capacitor array, and an operational amplifier.
One end of the first resistor array is used for inputting a resonance signal, and the other end of the first resistor array is respectively connected with one end of the first capacitor array and one end of the second capacitor array; the other end of the first capacitor array is grounded; the other end of the second capacitor array is respectively connected with one end of the second resistor array, one end of the third resistor array and the first input end of the operational amplifier; one end of the second resistor array is also connected with one end of the third resistor array, and the other end of the second resistor array is connected with the output end of the operational amplifier; the other end of the third resistor array is grounded; the configuration end of the first capacitor array and the configuration end of the second capacitor array are used for inputting configuration signals; the control end of the first resistor array, the control end of the second resistor array and the control end of the third resistor array are all connected with the output end of the digital value conversion module 12.
In this embodiment, the filter phase shift module is configured to filter noise and interference outside a harmonic signal band, and for the inertial device, the center frequency of the filter phase shift module is a harmonic frequency. The filter phase shift module is composed of an operational amplifier, a resistor and a capacitor, and the central frequency and the bandwidth of the filter phase shift module are determined by the resistor and the capacitor. If the resistance and capacitance of the filter phase shift module are fixed, when the frequency of the harmonic signal changes, the amplitude and phase of the filtered signal output by the filter phase shift module will change.
In this embodiment, the values of the first resistor array, the second resistor array, and the third resistor array in the filter phase shift module are dynamically adjusted by using the digital quantity converted from the period of the resonant signal, so that the center frequency of the filter phase shift module is maintained as the frequency of the harmonic signal carrier. The values of the first capacitor array and the second capacitor array are controlled by adopting configuration signals of a configurable resistor array in the digital quantity conversion module, and can be preset by software according to requirements. And the performance of the filter phase shift module is changed by adjusting the values of the first resistor array, the second resistor array and the third resistor array to track the change of the frequency of the harmonic signal.
As still another embodiment of the present invention, referring to fig. 3, the present invention further includes a phase adjusting method applied to a MEMS inertial device, the phase adjusting method applied to the MEMS inertial device including:
Optionally, when the first voltage signal is less than or equal to the second voltage signal, the counting result of the accumulator remains unchanged.
In step 304, the first voltage signal is updated according to the counting result of the accumulator until the updated first voltage signal is equal to the second voltage signal, and the counting result of the current accumulator is input into the filter.
Optionally, updating the first voltage signal according to the counting result of the accumulator may include: updating the capacitance value of the capacitor in the capacitor array according to the counting result; the first voltage signal is updated according to the capacitance value.
And 305, adjusting the center frequency of the filter to the frequency of the resonance signal according to the counting result by the filter, and filtering the resonance signal by the adjusted filter to keep the phase of the output filtering signal constant.
In the embodiment, a resonance signal of a resonator of the MEMS inertial device is obtained, and a square wave signal is obtained according to the resonance signal; charging capacitors in the capacitor array according to the square wave signal and the current source to obtain a first voltage signal corresponding to the capacitor array, obtaining a second voltage signal corresponding to a resistor according to the square wave signal and the resistor between the current source and the ground, inputting the first voltage signal to a non-inverting input end of the comparator, and inputting the second voltage signal to an inverting input end of the comparator; the comparator compares the first voltage signal with the second voltage signal, when the first voltage signal is greater than the second voltage signal, a high level is output, the counting result of the accumulator is increased by 1, the first voltage signal is updated according to the counting result of the accumulator until the updated first voltage signal is equal to the second voltage signal, and the counting result of the current accumulator is input into the filter; and the filter adjusts the center frequency of the filter to the frequency of the resonance signal according to the counting result, and filters the resonance signal by adopting the adjusted filter, so that the phase of the output filtering signal is kept constant.
In the embodiment of the invention, the resonance signal is filtered by using the adjusted filter, so that the phase of the output filtering signal is kept constant and cannot be changed due to the change of the resonance frequency, and the problem that the phase change is caused by the change of the resonance frequency in an MEMS device, and the requirement of an occasion with higher phase requirement cannot be met is further solved. For example, phase changes can cause changes in the quadrature demodulation phase angle, thereby affecting the performance of the null of the inertial device. Or the effective feedback of the positive feedback is reduced due to the phase change, more power consumption is consumed, and the problem of performance attenuation is caused.
The above-mentioned embodiments are only used to illustrate the technical solution of the present invention, and not to limit the same; although the present invention has been described in detail with reference to the foregoing embodiments, it should be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; such modifications and substitutions do not substantially depart from the spirit and scope of the embodiments of the present invention, and are intended to be included within the scope of the present invention.
Claims (9)
1. A phase adjustment device for use in a MEMS inertial device, comprising: the device comprises a waveform conversion module, a digital quantity conversion module and a filter phase shift module;
the input end of the waveform conversion module is used for being connected with the output end of the MEMS inertial device resonator, the output end of the waveform conversion module is connected with the input end of the digital quantity conversion module, and the waveform conversion module is used for converting a resonance signal output by the MEMS inertial device resonator into a square wave signal;
the output end of the digital quantity conversion module is connected with the input end of the filter phase shift module, and the digital quantity conversion module is used for outputting a digital quantity which is in direct proportion to the period of the resonance signal according to the square wave signal;
the input end of the filter phase shift module is further used for being connected with the output end of the MEMS inertial device resonator, the output end of the filter phase shift module outputs a filtering signal, and the filter phase shift module is used for adjusting the central frequency of the filter phase shift module according to the digital quantity, so that the adjusted central frequency of the filter phase shift module is equal to the frequency of the resonance signal, and filtering the resonance signal according to the adjusted filter phase shift module, so that the phase of the filtering signal is kept constant.
2. The phase adjusting device applied to the MEMS inertial device of claim 1, wherein the waveform conversion module includes a comparison unit and a buffer unit;
the first input end of the comparison unit is used for inputting the resonance signal output by the MEMS inertial device resonator, the second input end of the comparison unit is grounded, the output end of the comparison unit is connected with the input end of the buffer unit, and the output end of the buffer unit outputs a square wave signal.
3. The phase adjusting device applied to the MEMS inertial device of claim 2, wherein the comparing unit is a hysteresis comparator and the buffering unit is a buffer.
4. The phase adjusting device applied to the MEMS inertial device of any one of claims 1 to 3, wherein the digital quantity conversion module comprises a current source, a switch tube S1, a switch tube S2, a configurable resistor array, a comparator, an accumulator and a configurable capacitor array;
the current source is respectively connected with the drain electrode of the switch tube S1 and the drain electrode of the switch tube S2, the grid electrode of the switch tube S1 and the grid electrode of the switch tube S2 are respectively used for inputting the square wave signal, the source electrode of the switch tube S1 is respectively connected with one end of the configurable capacitor array and the non-inverting input end of the comparator, and the source electrode of the switch tube S2 is respectively connected with one end of the configurable resistor array and the inverting input end of the comparator;
the output end of the comparator is connected with the input end of the accumulator;
the output end of the accumulator is connected with the other end of the configurable capacitor array, and the output end of the accumulator is used as the output end of the digital quantity conversion module;
the other end of the configurable resistor array is grounded, and the configuration end of the configurable resistor array is used for inputting configuration signals.
5. The phase adjusting device applied to the MEMS inertial device of claim 4, wherein the configurable capacitor array comprises a capacitor array and a switch tube array;
one end of each capacitor array is connected with the source electrode of the switch tube S1, and the other end of each capacitor array is connected with the corresponding drain electrode in the switch tube array;
and the source electrodes in the switch tube array are all grounded, and the grid electrodes in the switch tube array are all connected with the output end of the accumulator.
6. The phase adjustment apparatus for MEMS inertial devices of claim 5 wherein the filter phase shift module comprises a first resistive array, a second resistive array, a third resistive array, a first capacitive array, a second capacitive array, and an operational amplifier;
one end of the first resistor array is used for inputting the resonance signal, and the other end of the first resistor array is respectively connected with one end of the first capacitor array and one end of the second capacitor array;
the other end of the first capacitor array is grounded;
the other end of the second capacitor array is respectively connected with one end of the second resistor array, one end of the third resistor array and the first input end of the operational amplifier;
one end of the second resistor array is also connected with one end of the third resistor array, and the other end of the second resistor array is connected with the output end of the operational amplifier;
the other end of the third resistor array is grounded;
the configuration end of the first capacitor array and the configuration end of the second capacitor array are used for inputting the configuration signal;
and the control end of the first resistor array, the control end of the second resistor array and the control end of the third resistor array are connected with the output end of the digital quantity conversion module.
7. A phase adjustment method applied to a MEMS inertial device, using the phase adjustment apparatus of any one of claims 4 to 6, the phase adjustment method applied to a MEMS inertial device comprising:
acquiring a resonance signal of a resonator of the MEMS inertial device, and acquiring a square wave signal according to the resonance signal;
obtaining a first voltage signal and a second voltage signal according to the square wave signal and the current source;
inputting the first voltage signal to a non-inverting input terminal of a comparator, and inputting the second voltage signal to an inverting input terminal of the comparator;
the comparator compares the first voltage signal with the second voltage signal, and when the first voltage signal is greater than the second voltage signal, a high level is output, so that the counting result of the accumulator is increased by 1;
updating the first voltage signal according to the counting result of the accumulator until the updated first voltage signal is equal to the second voltage signal, and inputting the counting result of the current accumulator into a filter phase shift module;
and the filter phase shift module adjusts the center frequency of the filter phase shift module to the frequency of the resonance signal according to the counting result, and the adjusted filter phase shift module is adopted to filter the resonance signal, so that the phase of the output filtering signal is kept constant.
8. The phase adjustment method for the MEMS inertial device according to claim 7, wherein a count result of the accumulator remains unchanged when the first voltage signal is equal to or less than the second voltage signal.
9. The phase adjustment method for a MEMS inertial device according to claim 7, wherein the updating the first voltage signal according to the count result of the accumulator includes:
updating the capacitance value of the capacitor in the capacitor array according to the counting result;
and updating the first voltage signal according to the updated capacitance value.
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| CN105865431A (en) * | 2016-04-15 | 2016-08-17 | 中国电子科技集团公司第十三研究所 | Phase adjusting device and demodulating device for MEMS gyroscope digital circuit |
| CN106655844A (en) * | 2016-09-28 | 2017-05-10 | 广东电网有限责任公司电力科学研究院 | Full-digital phase-locked loop-based resonant current phase controller and method |
| CN108332735B (en) * | 2018-02-06 | 2020-05-19 | 浙江大学 | Resonance type fiber-optic gyroscope coherent demodulation system and method based on external beam interference |
| CN108931665B (en) * | 2018-05-21 | 2020-11-20 | 东南大学 | Digital phase-locked measurement and control circuit for silicon micro-resonant accelerometer |
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2020
- 2020-12-31 CN CN202011639780.6A patent/CN112815938B/en active Active
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