CN102944230A - Constant-frequency drive method and constant-frequency drive device of tunable micromechanical gyroscope - Google Patents
Constant-frequency drive method and constant-frequency drive device of tunable micromechanical gyroscope Download PDFInfo
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- CN102944230A CN102944230A CN2012104557848A CN201210455784A CN102944230A CN 102944230 A CN102944230 A CN 102944230A CN 2012104557848 A CN2012104557848 A CN 2012104557848A CN 201210455784 A CN201210455784 A CN 201210455784A CN 102944230 A CN102944230 A CN 102944230A
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Abstract
The invention discloses a constant-frequency drive method and a constant-frequency drive device of a tunable micromechanical gyroscope. The method comprises the steps of generation of a drive signal, generation of a tuning signal, signal detection, amplitude extraction and phase extraction, and the device comprises the tunable micromechanical gyroscope, a drive signal generation circuit, a capacitance/voltage conversion circuit, a tuning signal amplification circuit, a first digital/analog converter, an analog/digital converter, a second digital/analog converter and an in-situ programmable gate array chip. Through the automatic adjustment of the alternative-current drive signal amplitude and the resonant frequency of the tunable micromechanical gyroscope, the frequency and the amplitude of the drive output signal can be maintained constant, and the phase difference of the drive output signal and the alternative-current drive signal can also be maintained constant. The constant-frequency drive method and the constant-frequency drive device are simple to realize, the resonant frequency of a drive modal is unnecessary to track, the influence on the system from the module which is correlated to the frequency in the system under the time-variant frequency can be avoided, the signal processing process of the system can be simplified, and the system stability can be improved.
Description
Technical field
The present invention relates to micromechanical gyro, relate in particular to a kind of constant frequency driving method and device thereof of tunable micromechanical gyro.
Background technology
The advantages such as micromechanical gyro is the inertial sensor of the extraneous rotation information of a kind of perception, and is little, low in energy consumption because of its volume, as can to produce in batches obtain paying attention in civilian even military domain gradually.The steady operation of micromechanical gyro need depend on that its driven-mode continues and stable vibration, and the drift of the parameter of micromechanical gyro own has proposed certain requirement to the vibration control circuit of driven-mode.
The remedy effect certain owing to the device defects that the manufacturing process imperfection is caused has with the micromechanical gyro of tuning structure obtained broad research, the tunable micromechanical gyro of various structures also begins extensively to be developed, and it is accomplished technically to process tunable micromechanical gyro.
Existing micromechanical gyro Driving technique generally makes the drift that drives signal adaptation micromechanical gyro parameter and changes, keep constant with the amplitude that guarantees the driven-mode vibration signal, but the frequency of vibration signal changes often, this has not only increased the complicacy that the micromechanical gyro system signal is processed, also can affect in the system stability with the work of frequency dependence module, and then the instability that causes gyro signal to detect.Therefore, existing micromechanical gyro driving method itself can bring certain instability to the micromechanical gyro system.Also be no lack of the technology that can keep driving frequency constant in the existing micromechanical gyro Driving technique, but these technology or require signal deteching circuit can not have larger time-delay, or require comparatively complicated control circuit.
Summary of the invention
The objective of the invention is to overcome the deficiencies in the prior art, utilize simultaneously increasingly extensive tunable micromechanical gyro, a kind of constant frequency driving method and device thereof of tunable micromechanical gyro is provided.
The constant frequency driving method of tunable micromechanical gyro is that constant frequency driving signal has constant frequency with respect to reference frequency source, obtain the phase signal that constant frequency drives signal and driven-mode output signal by phase difference detection, utilize phase signal to come FEEDBACK CONTROL to obtain harmonic ringing, harmonic ringing is put on the tuning structure of tunable micromechanical gyro, adjust the resonance frequency of tunable micromechanical gyro driven-mode, the resonance frequency of driven-mode is locked on the frequency of constant frequency driving signal.
The concrete steps of method are as follows:
1) exchange driving signal generator module produces according to the range signal of amplitude and the output of phase extraction module and exchanges the driving signal, the carrier signal generation module produces carrier signal simultaneously, exchange driving signal and carrier signal and after addition, produce AC signal, AC signal input drive signal generation module, drive signal generator module and produce the driving signal according to the AC signal of input and the direct current biasing of module self, the driving signal input that inputs to tunable micromechanical gyro drives tunable micromechanical gyro vibration to produce the static driving force, finishes simultaneously carrier modulation;
2) the harmonic ringing generation module produces harmonic ringing according to the phase signal of amplitude and the output of phase extraction module, and the resonance frequency of adjusting micromechanical gyro is brought in the harmonic ringing input that inputs to tunable micromechanical gyro;
3) signal detection module detects the vibration signal that tunable micromechanical gyro produces with electrostatic forcing, converts vibration signal to measurable voltage signal, finishes simultaneously the demodulation to modulation signal;
4) amplitude and phase extraction module are carried out amplitude and phase extraction to the voltage signal of signal detection module output, obtain phase signal and range signal, phase signal is inputed to the harmonic ringing generation module, range signal is inputed to exchange the driving signal generator module.
Described harmonic ringing generation module is that the fixed phase with such as the described phase signal of step 4) and driven-mode resonance the time compares, obtain error signal, control the self-adaptation real estate to give birth to harmonic ringing by controller error signal, harmonic ringing inputs on the tuning structure of tunable micromechanical gyro after adding amount of bias, in order to compensate the variation of tunable micromechanical gyro resonance frequency, keep constant such as the described phase signal of step 4).
It is that reference amplitude with such as the described range signal of step 4) and driven-mode resonance the time compares that described interchange drives signal generator module, obtain error signal, control adaptively modifying to exchange the amplitude that drives signal by controller error signal, keep constant such as the described range signal of step 4).
The constant frequency drive unit of tunable micromechanical gyro comprises tunable micromechanical gyro, drive signal generation circuit, electric capacity/voltage conversion circuit, the harmonic ringing amplifying circuit, the first D/A, A/D converter, the second D/A and field programmable gate array chip, the output terminal of tunable micromechanical gyro is connected with the input end of electric capacity/voltage conversion circuit, the output terminal of electric capacity/voltage conversion circuit is connected with the input end of A/D converter, the output terminal of A/D converter is connected with the input end of field programmable gate array chip, the first output terminal of field programmable gate array chip is connected with the input end of the first D/A, the second output terminal of field programmable gate array chip is connected with the input end of the second D/A, the output terminal of the first D/A is connected with the input end of drive signal generation circuit, the output terminal of the second D/A is connected with the input end of harmonic ringing amplifying circuit, the output terminal of drive signal generation circuit is connected with the driving signal input of tunable micromechanical gyro, and the output terminal of harmonic ringing amplifying circuit is connected with the harmonic ringing input end of tunable micromechanical gyro; Carrier wave generation/synchronous demodulation is finished in described field programmable gate array chip inside, amplitude and phase extraction, exchange and drive the signal generation, carrier signal produces, harmonic ringing produces, exchange the function that drives signal and carrier signal addition, the first output terminal output AC of field programmable gate array chip drives signal and carrier signal sum, exchange driving signal and carrier signal sum and behind the first D/A and drive signal generation circuit, input tunable micromechanical gyro, the second output terminal output harmonic ringing of field programmable gate array chip, harmonic ringing is inputted tunable micromechanical gyro behind the second D/A and harmonic ringing amplifying circuit, the output signal of tunable micromechanical gyro converts voltage signal to through electric capacity/voltage conversion circuit, voltage signal carries out the signal processing through the input end of A/D converter input field programmable gate array chip, the drift in time of the resonance frequency of tunable micromechanical gyro can realize compensation by the automatic adjustment of tuning voltage, and tunable micromechanical gyro drives amplitude drift in time can realize compensation by the automatic adjustment that exchanges drive signal amplitude.
Described drive signal generation circuit is: input signal respectively with the first resistance R
1With the 12 resistance R
12An end connect the first resistance R
1The other end be connected the positive input terminal of the first operational amplifier and the 3rd resistance R with the negative input end of the first operational amplifier
3An end connect the 3rd resistance R
3Other end ground connection, the negative input end of the first operational amplifier and the second resistance R
2An end connect the second resistance R
2The other end be connected the output terminal of the first operational amplifier and the 7th resistance R with the output terminal of the first operational amplifier
7An end connect the 7th resistance R
7The other end be connected the positive input terminal of the second operational amplifier and the 9th resistance R with the negative input end of the second operational amplifier
9An end connect the other end ground connection of the 9th resistance, the 5th resistance R
5A termination power, the 5th resistance R
5The other end respectively with the 4th resistance R
4, the 6th resistance R
6With the 13 resistance R
13An end connect the 4th resistance R
4Other end ground connection, the 6th resistance R
6The other end be connected the negative input end of the second operational amplifier and the 8th resistance R with the negative input end of the second operational amplifier
8An end connect the 8th resistance R
8The other end be connected the 12 resistance R with the output terminal of the second operational amplifier
12The other end be connected with the positive input terminal of the 3rd operational amplifier, the negative input end of the 3rd operational amplifier respectively with the tenth resistance R
10With the 11 resistance R
11An end connect the tenth resistance R
10Other end ground connection, the 11 resistance R
11The other end be connected the output terminal of the 3rd operational amplifier and the 14 resistance R with the output terminal of the 3rd operational amplifier
14An end connect the 14 resistance R
14The other end be connected the 13 resistance R with the negative input end of four-operational amplifier
13The other end be connected the positive input terminal of four-operational amplifier and the 16 resistance R with the negative input end of four-operational amplifier
16An end connect the 16 resistance R
16Other end ground connection, the negative input end of four-operational amplifier and the 15 resistance R
15An end connect the 15 resistance R
15The other end be connected with the output terminal of four-operational amplifier.
Described electric capacity/voltage conversion circuit is: two groups of difference sensitization capacitance C of tunable micromechanical gyro
1And C
2An end be connected respectively two groups of difference sensitization capacitance C with the output terminal of the second operational amplifier and four-operational amplifier
1And C
2Common port be connected with the negative input end of the 5th operational amplifier, the positive input terminal ground connection of the 5th operational amplifier, the negative input end of the 5th operational amplifier respectively with the 3rd capacitor C
3With the 17 resistance R
17An end connect the 3rd capacitor C
3With the 17 resistance R
17The other end all be connected with the output terminal of the 5th operational amplifier.
Described harmonic ringing amplifying circuit is: input signal and the 21 resistance R
21An end connect the 21 resistance R
21The other end be connected the positive input terminal of the 6th operational amplifier and the 23 resistance R with the negative input end of the 6th operational amplifier
23An end connect the 23 resistance R
23Other end ground connection, the 19 resistance R
19A termination power, the 19 resistance R
19The other end respectively with the 18 resistance R
18With the 20 resistance R
20An end connect the 18 resistance R
18Other end ground connection, the 20 resistance R
20The other end be connected the negative input end of the 6th operational amplifier and the 22 resistance R with the negative input end of the 6th operational amplifier
22An end connect the 22 resistance R
22The other end be connected with the output terminal of the 6th operational amplifier.
The beneficial effect that the present invention compared with prior art has is:
1) the present invention can improve the micromechanical gyro Systems balanth on the basis of simplified control circuit.
2) the present invention can avoid the impact that with the module of frequency dependence system stability brought in the micromechanical gyro system, improves the micromechanical gyro Systems balanth.
3) the present invention can make frequency and the amplitude of the vibration signal of driven-mode keep constant, and this signal also keeps constant with the phase differential that exchanges the driving signal, can simplify the signal of micromechanical gyro system and process, further improve simultaneously the micromechanical gyro Systems balanth.
Description of drawings
Fig. 1 is the schematic diagram of the constant frequency driving method of tunable micromechanical gyro;
Fig. 2 is that harmonic ringing of the present invention produces synoptic diagram;
Fig. 3 is that interchange of the present invention drives signal generation synoptic diagram;
Fig. 4 is the circuit block diagram of the constant frequency drive unit of tunable micromechanical gyro;
Fig. 5 is drive signal generation circuit figure of the present invention;
Fig. 6 is electric capacity of the present invention/voltage conversion circuit figure;
Fig. 7 is harmonic ringing amplification circuit diagram of the present invention.
Embodiment
The constant frequency driving method of tunable micromechanical gyro is that constant frequency driving signal has constant frequency with respect to reference frequency source, obtain the phase signal that constant frequency drives signal and driven-mode output signal by phase difference detection, utilize phase signal to come FEEDBACK CONTROL to obtain harmonic ringing, harmonic ringing is put on the tuning structure of tunable micromechanical gyro, adjust the resonance frequency of tunable micromechanical gyro driven-mode, the resonance frequency of driven-mode is locked on the frequency of constant frequency driving signal.
As shown in Figure 1, the concrete steps of the constant frequency driving method of tunable micromechanical gyro are as follows:
1) exchange driving signal generator module produces according to the range signal of amplitude and the output of phase extraction module and exchanges the driving signal, the carrier signal generation module produces carrier signal simultaneously, exchange driving signal and carrier signal and after addition, produce AC signal, AC signal input drive signal generation module, drive signal generator module and produce the driving signal according to the AC signal of input and the direct current biasing of module self, the driving signal input that inputs to tunable micromechanical gyro drives tunable micromechanical gyro vibration to produce the static driving force, finish simultaneously carrier modulation, carrier signal can realize by methods such as coordinate rotation digital computer algorithm or Direct Digital frequency synthesis in the specific implementation with the generation that exchanges the driving signal;
2) the harmonic ringing generation module produces harmonic ringing according to the phase signal of amplitude and the output of phase extraction module, and the resonance frequency of adjusting micromechanical gyro is brought in the harmonic ringing input that inputs to tunable micromechanical gyro;
3) signal detection module detects the vibration signal that tunable micromechanical gyro produces with electrostatic forcing, converts vibration signal to measurable voltage signal, finishes simultaneously the demodulation to modulation signal;
4) amplitude and phase extraction module are carried out amplitude and phase extraction to the voltage signal of signal detection module output, obtain phase signal and range signal, phase signal is inputed to the harmonic ringing generation module, range signal is inputed to interchange drive signal generator module, amplitude and phase extraction can adopt coordinate rotation digital computer algorithm when specific implementation.
As shown in Figure 2, described harmonic ringing generation module is that the fixed phase with such as the described phase signal of step 4) and driven-mode resonance the time compares, obtain error signal, control the self-adaptation real estate to give birth to harmonic ringing by controller error signal, harmonic ringing inputs on the tuning structure of tunable micromechanical gyro after adding amount of bias, in order to compensate the variation of tunable micromechanical gyro resonance frequency, keep constant such as the described phase signal of step 4), but described controller adoption rate-integral controller in the specific implementation.
As shown in Figure 3, it is that reference amplitude with such as the described range signal of step 4) and driven-mode resonance the time compares that described interchange drives signal generator module, obtain error signal, control adaptively modifying to exchange the amplitude that drives signal by controller error signal, keep constant such as the described range signal of step 4), but described controller adoption rate-integral controller in the specific implementation.
As shown in Figure 4, the constant frequency drive unit of tunable micromechanical gyro comprises tunable micromechanical gyro, drive signal generation circuit, electric capacity/voltage conversion circuit, the harmonic ringing amplifying circuit, the first D/A, A/D converter, the second D/A and field programmable gate array chip, the output terminal of tunable micromechanical gyro is connected with the input end of electric capacity/voltage conversion circuit, the output terminal of electric capacity/voltage conversion circuit is connected with the input end of A/D converter, the output terminal of A/D converter is connected with the input end of field programmable gate array chip, the first output terminal of field programmable gate array chip is connected with the input end of the first D/A, the second output terminal of field programmable gate array chip is connected with the input end of the second D/A, the output terminal of the first D/A is connected with the input end of drive signal generation circuit, the output terminal of the second D/A is connected with the input end of harmonic ringing amplifying circuit, the output terminal of drive signal generation circuit is connected with the driving signal input of tunable micromechanical gyro, and the output terminal of harmonic ringing amplifying circuit is connected with the harmonic ringing input end of tunable micromechanical gyro; Carrier wave generation/synchronous demodulation is finished in described field programmable gate array chip inside, amplitude and phase extraction, exchange and drive the signal generation, carrier signal produces, harmonic ringing produces, exchange the function that drives signal and carrier signal addition, the first output terminal output AC of field programmable gate array chip drives signal and carrier signal sum, exchange driving signal and carrier signal sum and behind the first D/A and drive signal generation circuit, input tunable micromechanical gyro, the second output terminal output harmonic ringing of field programmable gate array chip, harmonic ringing is inputted tunable micromechanical gyro behind the second D/A and harmonic ringing amplifying circuit, the output signal of tunable micromechanical gyro converts voltage signal to through electric capacity/voltage conversion circuit, voltage signal carries out the signal processing through the input end of A/D converter input field programmable gate array chip, the drift in time of the resonance frequency of tunable micromechanical gyro can realize compensation by the automatic adjustment of tuning voltage, and tunable micromechanical gyro drives amplitude drift in time can realize compensation by the automatic adjustment that exchanges drive signal amplitude.
As shown in Figure 5, described drive signal generation circuit is: input signal respectively with the first resistance R
1With the 12 resistance R
12An end connect the first resistance R
1The other end be connected the positive input terminal of the first operational amplifier and the 3rd resistance R with the negative input end of the first operational amplifier
3An end connect the 3rd resistance R
3Other end ground connection, the negative input end of the first operational amplifier and the second resistance R
2An end connect the second resistance R
2The other end be connected the output terminal of the first operational amplifier and the 7th resistance R with the output terminal of the first operational amplifier
7An end connect the 7th resistance R
7The other end be connected the positive input terminal of the second operational amplifier and the 9th resistance R with the negative input end of the second operational amplifier
9An end connect the other end ground connection of the 9th resistance, the 5th resistance R
5A termination power, the 5th resistance R
5The other end respectively with the 4th resistance R
4, the 6th resistance R
6With the 13 resistance R
13An end connect the 4th resistance R
4Other end ground connection, the 6th resistance R
6The other end be connected the negative input end of the second operational amplifier and the 8th resistance R with the negative input end of the second operational amplifier
8An end connect the 8th resistance R
8The other end be connected the 12 resistance R with the output terminal of the second operational amplifier
12The other end be connected with the positive input terminal of the 3rd operational amplifier, the negative input end of the 3rd operational amplifier respectively with the tenth resistance R
10With the 11 resistance R
11An end connect the tenth resistance R
10Other end ground connection, the 11 resistance R
11The other end be connected the output terminal of the 3rd operational amplifier and the 14 resistance R with the output terminal of the 3rd operational amplifier
14An end connect the 14 resistance R
14The other end be connected the 13 resistance R with the negative input end of four-operational amplifier
13The other end be connected the positive input terminal of four-operational amplifier and the 16 resistance R with the negative input end of four-operational amplifier
16An end connect the 16 resistance R
16Other end ground connection, the negative input end of four-operational amplifier and the 15 resistance R
15An end connect the 15 resistance R
15The other end be connected with the output terminal of four-operational amplifier, the signal of the second operational amplifier and four-operational amplifier output terminal output can be used for simultaneously driving tunable micromechanical gyro and produce vibration and vibration signal is modulated.
As shown in Figure 6, described electric capacity/voltage conversion circuit is: two groups of difference sensitization capacitance C of tunable micromechanical gyro
1And C
2An end be connected respectively two groups of difference sensitization capacitance C with the output terminal of the second operational amplifier and four-operational amplifier
1And C
2Common port be connected with the negative input end of the 5th operational amplifier, the positive input terminal ground connection of the 5th operational amplifier, the negative input end of the 5th operational amplifier respectively with the 3rd capacitor C
3With the 17 resistance R
17An end connect the 3rd capacitor C
3With the 17 resistance R
17The other end all be connected with the output terminal of the 5th operational amplifier, the signal of the output terminal of the 5th operational amplifier output has realized that the difference of two groups of difference sensitization capacitances subtracts each other.
As shown in Figure 7, described harmonic ringing amplifying circuit is: input signal and the 21 resistance R
21An end connect the 21 resistance R
21The other end be connected the positive input terminal of the 6th operational amplifier and the 23 resistance R with the negative input end of the 6th operational amplifier
23An end connect the 23 resistance R
23Other end ground connection, the 19 resistance R
19A termination power, the 19 resistance R
19The other end respectively with the 18 resistance R
18With the 20 resistance R
20An end connect the 18 resistance R
18Other end ground connection, the 20 resistance R
20The other end be connected the negative input end of the 6th operational amplifier and the 22 resistance R with the negative input end of the 6th operational amplifier
22An end connect the 22 resistance R
22The other end be connected with the output terminal of the 6th operational amplifier.
Claims (8)
1. the constant frequency driving method of a tunable micromechanical gyro, it is characterized in that constant frequency drives signal and has constant frequency with respect to reference frequency source, obtain the phase signal that constant frequency drives signal and driven-mode output signal by phase difference detection, utilize phase signal to come FEEDBACK CONTROL to obtain harmonic ringing, harmonic ringing is put on the tuning structure of tunable micromechanical gyro, adjust the resonance frequency of tunable micromechanical gyro driven-mode, the resonance frequency of driven-mode is locked on the frequency of constant frequency driving signal.
2. the constant frequency driving method of a kind of tunable micromechanical gyro as claimed in claim 1 is characterized in that the concrete steps of method are as follows:
1) exchange driving signal generator module produces according to the range signal of amplitude and the output of phase extraction module and exchanges the driving signal, the carrier signal generation module produces carrier signal simultaneously, exchange driving signal and carrier signal and after addition, produce AC signal, AC signal input drive signal generation module, drive signal generator module and produce the driving signal according to the AC signal of input and the direct current biasing of module self, the driving signal input that inputs to tunable micromechanical gyro drives tunable micromechanical gyro vibration to produce the static driving force, finishes simultaneously carrier modulation;
2) the harmonic ringing generation module produces harmonic ringing according to the phase signal of amplitude and the output of phase extraction module, and the resonance frequency of adjusting micromechanical gyro is brought in the harmonic ringing input that inputs to tunable micromechanical gyro;
3) signal detection module detects the vibration signal that tunable micromechanical gyro produces with electrostatic forcing, converts vibration signal to measurable voltage signal, finishes simultaneously the demodulation to modulation signal;
4) amplitude and phase extraction module are carried out amplitude and phase extraction to the voltage signal of signal detection module output, obtain phase signal and range signal, phase signal is inputed to the harmonic ringing generation module, range signal is inputed to exchange the driving signal generator module.
3. the constant frequency driving method of a kind of tunable micromechanical gyro according to claim 2, it is characterized in that described harmonic ringing generation module is that fixed phase with such as the described phase signal of step 4) and driven-mode resonance the time compares, obtain error signal, control the self-adaptation real estate to give birth to harmonic ringing by controller error signal, harmonic ringing inputs on the tuning structure of tunable micromechanical gyro after adding amount of bias, in order to compensate the variation of tunable micromechanical gyro resonance frequency, keep constant such as the described phase signal of step 4).
4. the constant frequency driving method of a kind of tunable micromechanical gyro according to claim 2, it is characterized in that it is that reference amplitude with such as the described range signal of step 4) and driven-mode resonance the time compares that described interchange drives signal generator module, obtain error signal, control adaptively modifying to exchange the amplitude that drives signal by controller error signal, keep constant such as the described range signal of step 4).
5. the constant frequency drive unit of a tunable micromechanical gyro, it is characterized in that comprising tunable micromechanical gyro, drive signal generation circuit, electric capacity/voltage conversion circuit, the harmonic ringing amplifying circuit, the first D/A, A/D converter, the second D/A and field programmable gate array chip, the output terminal of tunable micromechanical gyro is connected with the input end of electric capacity/voltage conversion circuit, the output terminal of electric capacity/voltage conversion circuit is connected with the input end of A/D converter, the output terminal of A/D converter is connected with the input end of field programmable gate array chip, the first output terminal of field programmable gate array chip is connected with the input end of the first D/A, the second output terminal of field programmable gate array chip is connected with the input end of the second D/A, the output terminal of the first D/A is connected with the input end of drive signal generation circuit, the output terminal of the second D/A is connected with the input end of harmonic ringing amplifying circuit, the output terminal of drive signal generation circuit is connected with the driving signal input of tunable micromechanical gyro, and the output terminal of harmonic ringing amplifying circuit is connected with the harmonic ringing input end of tunable micromechanical gyro; Carrier wave generation/synchronous demodulation is finished in described field programmable gate array chip inside, amplitude and phase extraction, exchange and drive the signal generation, carrier signal produces, harmonic ringing produces, exchange the function that drives signal and carrier signal addition, the first output terminal output AC of field programmable gate array chip drives signal and carrier signal sum, exchange driving signal and carrier signal sum and behind the first D/A and drive signal generation circuit, input tunable micromechanical gyro, the second output terminal output harmonic ringing of field programmable gate array chip, harmonic ringing is inputted tunable micromechanical gyro behind the second D/A and harmonic ringing amplifying circuit, the output signal of tunable micromechanical gyro converts voltage signal to through electric capacity/voltage conversion circuit, voltage signal carries out the signal processing through the input end of A/D converter input field programmable gate array chip, the drift in time of the resonance frequency of tunable micromechanical gyro can realize compensation by the automatic adjustment of tuning voltage, and tunable micromechanical gyro drives amplitude drift in time can realize compensation by the automatic adjustment that exchanges drive signal amplitude.
6. the constant frequency drive unit of a kind of tunable micromechanical gyro according to claim 5 is characterized in that described drive signal generation circuit is: input signal respectively with the first resistance R
1With the 12 resistance R
12An end connect the first resistance R
1The other end be connected the positive input terminal of the first operational amplifier and the 3rd resistance R with the negative input end of the first operational amplifier
3An end connect the 3rd resistance R
3Other end ground connection, the negative input end of the first operational amplifier and the second resistance R
2An end connect the second resistance R
2The other end be connected the output terminal of the first operational amplifier and the 7th resistance R with the output terminal of the first operational amplifier
7An end connect the 7th resistance R
7The other end be connected the positive input terminal of the second operational amplifier and the 9th resistance R with the negative input end of the second operational amplifier
9An end connect the other end ground connection of the 9th resistance, the 5th resistance R
5A termination power, the 5th resistance R
5The other end respectively with the 4th resistance R
4, the 6th resistance R
6With the 13 resistance R
13An end connect the 4th resistance R
4Other end ground connection, the 6th resistance R
6The other end be connected the negative input end of the second operational amplifier and the 8th resistance R with the negative input end of the second operational amplifier
8An end connect the 8th resistance R
8The other end be connected the 12 resistance R with the output terminal of the second operational amplifier
12The other end be connected with the positive input terminal of the 3rd operational amplifier, the negative input end of the 3rd operational amplifier respectively with the tenth resistance R
10With the 11 resistance R
11An end connect the tenth resistance R
10Other end ground connection, the 11 resistance R
11The other end be connected the output terminal of the 3rd operational amplifier and the 14 resistance R with the output terminal of the 3rd operational amplifier
14An end connect the 14 resistance R
14The other end be connected the 13 resistance R with the negative input end of four-operational amplifier
13The other end be connected the positive input terminal of four-operational amplifier and the 16 resistance R with the negative input end of four-operational amplifier
16An end connect the 16 resistance R
16Other end ground connection, the negative input end of four-operational amplifier and the 15 resistance R
15An end connect the 15 resistance R
15The other end be connected with the output terminal of four-operational amplifier.
7. the constant frequency drive unit of a kind of tunable micromechanical gyro according to claim 5 is characterized in that described electric capacity/voltage conversion circuit is: two groups of difference sensitization capacitance C of tunable micromechanical gyro
1And C
2An end be connected respectively two groups of difference sensitization capacitance C with the output terminal of the second operational amplifier and four-operational amplifier
1And C
2Common port be connected with the negative input end of the 5th operational amplifier, the positive input terminal ground connection of the 5th operational amplifier, the negative input end of the 5th operational amplifier respectively with the 3rd capacitor C
3With the 17 resistance R
17An end connect the 3rd capacitor C
3With the 17 resistance R
17The other end all be connected with the output terminal of the 5th operational amplifier.
8. the constant frequency drive unit of a kind of tunable micromechanical gyro according to claim 5 is characterized in that described harmonic ringing amplifying circuit is: input signal and the 21 resistance R
21An end connect the 21 resistance R
21The other end be connected the positive input terminal of the 6th operational amplifier and the 23 resistance R with the negative input end of the 6th operational amplifier
23An end connect the 23 resistance R
23Other end ground connection, the 19 resistance R
19A termination power, the 19 resistance R
19The other end respectively with the 18 resistance R
18With the 20 resistance R
20An end connect the 18 resistance R
18Other end ground connection, the 20 resistance R
20The other end be connected the negative input end of the 6th operational amplifier and the 22 resistance R with the negative input end of the 6th operational amplifier
22An end connect the 22 resistance R
22The other end be connected with the output terminal of the 6th operational amplifier.
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| CN201210455784.8A CN102944230B (en) | 2012-11-14 | 2012-11-14 | A kind of constant frequency driving method of tunable micromechanical gyroscope and device thereof |
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Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103162681A (en) * | 2013-03-19 | 2013-06-19 | 中国人民解放军国防科学技术大学 | Method and device for testing signals used for micromechanical gyroscope |
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| CN104390639A (en) * | 2014-10-31 | 2015-03-04 | 中国人民解放军国防科学技术大学 | Method and device for improving scale factor stability of micromechanical gyroscope |
| CN104897150A (en) * | 2015-06-16 | 2015-09-09 | 中北大学 | Method for improving bandwidth full-temperature performance of silicon micromechanical gyroscope |
| CN106525016A (en) * | 2016-10-26 | 2017-03-22 | 中国矿业大学(北京) | Self-adaptive control method for resonant gyroscope |
| CN104185774B (en) * | 2012-03-13 | 2017-06-09 | 大西洋惯性系统有限公司 | Vibration ring structure and its tuning methods |
| CN108803473A (en) * | 2018-05-23 | 2018-11-13 | 浙江大学 | A kind of micro-mechanical accelerometer control method and device |
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| CN111351504A (en) * | 2018-12-21 | 2020-06-30 | 航天科工惯性技术有限公司 | Current frequency conversion device and system with programmable scale factors |
| CN111766402A (en) * | 2020-07-01 | 2020-10-13 | 浙江大学 | Tuning control method of micro-mechanical accelerometer |
| CN112003584A (en) * | 2020-08-28 | 2020-11-27 | 上海应用技术大学 | Micro resonator control system based on time-lag feedback |
| CN112815938A (en) * | 2020-12-31 | 2021-05-18 | 中国电子科技集团公司第十三研究所 | Phase adjusting device and method applied to MEMS (micro-electromechanical systems) inertial device |
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| CN104185774B (en) * | 2012-03-13 | 2017-06-09 | 大西洋惯性系统有限公司 | Vibration ring structure and its tuning methods |
| CN103162681B (en) * | 2013-03-19 | 2015-06-24 | 中国人民解放军国防科学技术大学 | Method and device for testing signals used for micromechanical gyroscope |
| CN103162681A (en) * | 2013-03-19 | 2013-06-19 | 中国人民解放军国防科学技术大学 | Method and device for testing signals used for micromechanical gyroscope |
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| CN104390639A (en) * | 2014-10-31 | 2015-03-04 | 中国人民解放军国防科学技术大学 | Method and device for improving scale factor stability of micromechanical gyroscope |
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| CN106525016A (en) * | 2016-10-26 | 2017-03-22 | 中国矿业大学(北京) | Self-adaptive control method for resonant gyroscope |
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| CN108803473B (en) * | 2018-05-23 | 2023-12-12 | 浙江大学 | Micromechanical accelerometer control method and device |
| CN109029409A (en) * | 2018-06-15 | 2018-12-18 | 浙江大学 | Parameter amplification method and its device in a kind of tunable grid structure micromechanical gyro |
| CN111351504A (en) * | 2018-12-21 | 2020-06-30 | 航天科工惯性技术有限公司 | Current frequency conversion device and system with programmable scale factors |
| CN111351504B (en) * | 2018-12-21 | 2023-10-17 | 航天科工惯性技术有限公司 | Current frequency conversion device and system with programmable scale factors |
| CN111272161A (en) * | 2020-03-06 | 2020-06-12 | 尚同电子科技(淄博)有限公司 | Micro gyroscope excitation and protection device and method |
| CN111272161B (en) * | 2020-03-06 | 2021-07-06 | 尚同电子科技(淄博)有限公司 | Micro gyroscope excitation and protection device and method |
| CN111766402A (en) * | 2020-07-01 | 2020-10-13 | 浙江大学 | Tuning control method of micro-mechanical accelerometer |
| CN112003584A (en) * | 2020-08-28 | 2020-11-27 | 上海应用技术大学 | Micro resonator control system based on time-lag feedback |
| CN112003584B (en) * | 2020-08-28 | 2024-01-26 | 上海应用技术大学 | Micro-resonator control system based on time lag feedback |
| CN112815938A (en) * | 2020-12-31 | 2021-05-18 | 中国电子科技集团公司第十三研究所 | Phase adjusting device and method applied to MEMS (micro-electromechanical systems) inertial device |
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