CN103162679B - System and method for eliminating micromechanical gyroscope in-phase error based on multiplication - Google Patents
System and method for eliminating micromechanical gyroscope in-phase error based on multiplication Download PDFInfo
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- CN103162679B CN103162679B CN201310070816.7A CN201310070816A CN103162679B CN 103162679 B CN103162679 B CN 103162679B CN 201310070816 A CN201310070816 A CN 201310070816A CN 103162679 B CN103162679 B CN 103162679B
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Abstract
The invention discloses a system for eliminating micromechanical gyroscope in-phase error based on multiplication, an input end of a phase shifter is connected to a driving signal, an output end is connected to a 90 DEG phase shifter and a first phase-sensitive demodulation module, and is connected to a multiplication circuit through a controlled switch; the input end of the first phase-sensitive demodulation module is connected to a micromechanical gyroscope angular velocity extraction signal, one path of the output end is connected to an amplitude detection circuit through the controlled switch, the output end of the amplitude detection circuit is connected to the multiplication circuit, other path is connected to the multiplication circuit through the controlled switch; the multiplication circuit is connected to a data memory through the controlled switch, the output end of the data memory is connected to a difference circuit, the difference circuit is connected to the micromechanical gyroscope angular velocity extraction signal; the output end of the 90 DEG phase shifter is connected to a second phase-sensitive demodulation module, the output end of the second phase-sensitive demodulation module is connected to the micromechanical gyroscope angular velocity extraction signal, the output end is connected to a peak detection circuit, the output end of the peak detection circuit is connected to the phase shifter. According to the invention, the in-phase error can be effectively eliminated, and the measure precision of the micromechanical gyroscope can be enhanced.
Description
Technical field
The present invention relates to a kind of based on multiplication elimination micromechanical gyroscope in-phase error system and method, refer in particular to a kind of based on multiplication elimination capacitive micro mechinery gyroscope in-phase error system and method.
Background technology
Even if gyro is a kind of sensor that also can detect moving object self attitude and state change without extraneous reference signal, its function is the angular velocity of responsive movable body.Based on the third generation micro-mechanical gyroscope of MEMS technology, have that volume is little, lightweight, the advantage such as be with roomy, low in energy consumption and impact strength high, be widely used in military affairs and civil area.
In prior art, the sensitive structure of capacitive micro mechinery gyroscope instrument adopts body silicon or surface silicon processes to be made, and because size is extremely small, is generally micron dimension, under existing process conditions, is difficult to controlled working precision.Therefore, sensitive structure also exists fabrication error in the fabrication process.This error directly affects the key technical index such as the stability of silicon micromechanical gyroscope offset output, the nonlinearity of scaling factor and bandwidth of operation.Meanwhile, micromechanical gyro needs accurate measured angular rate signal field application at aerospace, precise guidance, exact instrument and deep-sea detecting etc. is restricted.
The various fabrication errors of sensitive structure, can extract in the processing procedure of angular velocity signal at micromechanical gyro and be transformed into quadrature error and in-phase error two kinds of error signals.Quadrature error and in-phase error are two kinds of dominant interferer in angular velocity signal leaching process, are the principal elements of restriction micromechanical gyro overall performance.
Wherein, in-phase error derives from the driving shaft of micro-mechanical gyroscope sensor construction and the incomplete vertical of detection axis, during load driver voltage, driving force detection side to there is component, this power is consistent with Coriolis power (coriolis force) direction that will detect, phase place is also consistent, causes being difficult to distinguish angular velocity signal in-phase error signal therewith in signal processing.Due to the frequency of in-phase error and Coriolis acceleration signal and phase place all identical, for this error signal separation and suppress all more difficult, in prior art, about suppressing, the signal transacting scheme of in-phase error is considerably less, lack general, and can effectively eliminate or suppress the signal transacting scheme of in-phase error.
As shown in Figure 1, traditional micromechanical gyro angular velocity signal extracts signal processing circuitry.From the principle of work of micromechanical gyro, the numerical value of input angular velocity signal be obtained, the variable quantity of sensitive structure Detection capacitance must be measured.But, the variable quantity of electric capacity is extremely faint, usually be all submerged in the 1/f noise of low frequency, in order to suppress 1/f noise, as shown in Figure 1, angular velocity extracts the method that circuit generally all adopts high frequency carrier to modulate, integrator is utilized to form charge amplifier, the changing value of Detection capacitance is transformed into voltage signal, and then through twice phase demodulation process, first time demodulation obtains the voltage signal be directly proportional to the variable quantity of Detection capacitance; Second time demodulation obtains the voltage signal be directly proportional to input angular velocity signal.The final output signal of described extraction comprises angular velocity signal, quadrature error signal and in-phase error signal.
Below analyze when there is not phase error, consider output signal when quadrature error and in-phase error:
As shown in Figure 1, for the first time after phase demodulation, the signal obtained
v in (t)the voltage signal be directly proportional to the variable quantity of Detection capacitance, when there is quadrature error and in-phase error,
v in (t)be angular velocity signal, quadrature error signal and in-phase error signal three sum, can be expressed as follows:
Wherein,
v cor represent the amplitude of Coriolis acceleration signal;
v in-p represent the amplitude of in-phase error signal;
v quc represent the amplitude of quadrature error signal; W represents the angular velocity signal of input; ω represents the angular frequency of micromechanical gyro drive singal;
Φrepresent the phase place of drive singal.Can find out from formula (1) in-phase error signal and Coriolis acceleration signal frequency and phase place all equal, and quadrature error signal is equal with Coriolis acceleration signal frequency, phase 90.If there is not phase error signal, then the reference signal of second time phase demodulation
v ref (t)be exactly drive singal, it
v in (t)with carry out multiplying, computing is as follows:
The high frequency item that frequency is 2 ω is eliminated, then the output signal obtained through low-pass filtering
v out1 (t)for:
As can be seen here, the reference signal of second time phase demodulation is drive singal
v ref (t)=V d cos(ω t+
Φ) time, comprise angular velocity signal and in-phase error signal in final output signal, quadrature error is completely eliminated.
If the reference signal of second time phase demodulation
v ref (t)orthogonal with drive singal, also namely its expression formula is
, by it
v in (t)with carry out multiplying, computing is as follows:
The high frequency item that frequency is 2 ω is eliminated, then the output signal obtained through low-pass filtering
v out2 (t)for:
As can be seen here, if the reference signal of second time phase demodulation
v ref (t)time orthogonal with drive singal, final output signal is pure quadrature error signal.
When below analysis exists phase error, consider output signal when quadrature error and in-phase error:
AC signal will inevitably cause the skew of phase place in transmission and processing process, and therefore in reality, phase error is difficult to avoid, so should take in the situation that phase error exists, when considering phase error
v in (t)need represent with following equation:
Δ in formula (6)
Φthe i.e. phase error of signal processing introducing, the reference signal now using drive singal as second time phase demodulation
v ref (t)=V d cos(ω t+
Φ), the final output signal after low-pass filtering is:
Comparison expression (7) is known with formula (3), when there is phase error, if the reference signal of second time phase demodulation is drive singal, then comprises angular velocity signal and in-phase error signal in final output signal, also comprising quadrature error signal, phase error Δ
Φless, then sin Δ
Φmore level off to zero, quadrature error signal is also less.
If the reference signal of second time phase demodulation
v ref (t)orthogonal with drive singal, also namely its expression formula is
, the final output signal now after low-pass filtering is:
Comparison expression (8) is known with formula (5), when there is phase error, if the reference signal of second time phase demodulation
v ref (t)time orthogonal with drive singal, then comprise quadrature error signal in final output signal, also comprise angular velocity signal and in-phase error signal, phase error Δ
Φless, then sin Δ
Φmore level off to zero, angular velocity and in-phase error signal also less.
The amplitude of usual quadrature error signal is much larger than the amplitude of in-phase error and angular velocity signal, and when three signals are superimposed, quadrature error plays a leading role.Therefore, in formula (8), on the right of equation, Section 1 plays a major role, and works as Δ
Φwhen equalling zero, on the right of equation, Section 1 gets its maximal value that can reach, and on the right of the middle equation of this up-to-date style (8), Section 2 is zero, and also namely angular velocity signal and in-phase error signal are zero, and formula (8) the right only comprises pure quadrature error signal.In addition, Δ is worked as
Φwhen equalling zero, formula (7) the right only comprises angular velocity signal and in-phase error signal, and quadrature error signal is completely eliminated only remaining in-phase error signal and useful angular velocity signal.
Traditional micromechanical gyro angular velocity signal extracts signal processing circuitry, and this system cannot eliminate in-phase error.
Summary of the invention
The object of the present invention is to provide a kind of based on multiplication elimination micromechanical gyroscope in-phase error system and method, it effectively eliminates in-phase error, thus improves the measuring accuracy of micromechanical gyro.
For reaching above-mentioned purpose, solution of the present invention is:
A kind of based on multiplication elimination micromechanical gyroscope in-phase error system, comprise peak detection circuit, amplitude detection circuit, the first phase sensitivity demodulation module, the second phase sensitivity demodulation module, phase shifter, 90
ophase shifter, data-carrier store, four controlled switchs, mlultiplying circuits and make difference circuit; Phase shifter inputs connects drive singal, exports termination 90
ophase shifter and the first phase sensitivity demodulation module, output terminal is also connected with mlultiplying circuit through controlled switch; First phase sensitivity demodulation module input termination micromechanical gyro angular velocity extracts signal, and output terminal one tunnel is connected with amplitude detection circuit through controlled switch, and amplitude detection circuit output terminal is connected with mlultiplying circuit, and another road is connected with mlultiplying circuit through controlled switch; Mlultiplying circuit is connected with data-carrier store through controlled switch, and data-carrier store output terminal is connected with as difference circuit, makes difference circuit and also connects micromechanical gyro angular velocity extraction signal;
90
ophase shifter exports the quick demodulation module of termination second-phase, and the input termination micromechanical gyro angular velocity of the second phase sensitivity demodulation module extracts signal, and export termination and connect peak detection circuit, peak detection circuit exports termination phase shifter.
Further, first phase sensitivity demodulation module is made up of low-pass filter and phase-sensitive demodulating circuits, the input end of phase-sensitive demodulating circuits connects phase shifter simultaneously and micromechanical gyro angular velocity extracts signal, low-pass filter of output termination, low-pass filter one tunnel is connected with amplitude detection circuit through controlled switch, and a road is connected with mlultiplying circuit through controlled switch.
Further, the second phase sensitivity demodulation module is made up of low-pass filter and phase-sensitive demodulating circuits, and the input end of phase-sensitive demodulating circuits connects 90 simultaneously
ophase shifter and micromechanical gyro angular velocity extract signal, low-pass filter of output termination; Low-pass filter connects peak detection circuit.
Further, high frequency carrier device, charge amplifier, filter amplifier, the quick demodulation module of third phase, the 4th phase demodulation module and signal amplifier is also comprised; The electric capacity of the input termination micromechanical gyro of high frequency carrier device, exports termination charge amplifier and the quick demodulation module of third phase; Charge amplifier connects filter amplifier, and filter amplifier connects the input end of the quick demodulation module of third phase, the output termination signal amplifier of the quick demodulation module of third phase, and signal amplifier connects the first phase sensitivity demodulation module and the second phase sensitivity demodulation module respectively; Through making signal input the 4th phase demodulation module of difference circuit.
Further, the quick demodulation module of third phase is made up of low-pass filter and phase-sensitive demodulating circuits, and the input end of phase-sensitive demodulating circuits connects filter amplifier and high frequency carrier device, low-pass filter of output termination simultaneously; Low-pass filter connects signal amplifier.
Further, the 4th phase demodulation module is made up of low-pass filter and phase-sensitive demodulating circuits, and the input end of phase-sensitive demodulating circuits connects drive singal and the signal through doing difference circuit input simultaneously, and low-pass filter of output termination, low-pass filter connects signal amplifier.
A kind of based on multiplication elimination micromechanical gyroscope in-phase error method, comprise the following steps:
Step one, extract input signal, described input signal comprises angular velocity signal, quadrature error signal and in-phase error signal;
Step 2, inputs the first phase sensitivity demodulation module and the second phase sensitivity demodulation module by input signal; Meanwhile, drive singal one tunnel inputs the first phase sensitivity demodulation module through phase shifter, does multiplying with input signal; Another road of drive singal is through phase shifter and 90 successively
ophase shifter inputs the second phase sensitivity demodulation module, makes the signal after multiplying and low-pass filtering input peak detection circuit with input signal; When the phase error that peak detection circuit detects input signal is zero, FEEDBACK CONTROL phase shifter, make drive singal equal with angular velocity signal phase place, drive singal inputs the first phase sensitivity demodulation module through phase shifter, and making the signal after multiplying and low-pass filtering with input signal is angular velocity signal and in-phase error signal;
Step 3, when the signal after the first phase sensitivity demodulation module has angular velocity signal, four controlled switchs all disconnect; When the signal after the first phase sensitivity demodulation module is without angular velocity signal, four controlled switchs are all closed, in-phase error signal one tunnel directly inputs mlultiplying circuit through controlled switch, one tunnel controls feedback factor through amplitude detection circuit, and feedback factor signal is inputted mlultiplying circuit, meanwhile, drive singal inputs mlultiplying circuit through controlled switch; In-phase error signal, feedback factor signal and drive singal are done the signal after multiplying to be kept in data-carrier store, and export to and make difference circuit, carry out making difference operation with the input signal making difference circuit, the signal done after difference is angular velocity signal and as final output signal.
Further, also comprise signal and export step, the phase-sensitive demodulating circuits of signal input the 4th phase demodulation module after making difference circuit work difference, is then inputted low-pass filter, after multiplying and low-pass filtering, is exported by signal amplifier.
After adopting such scheme, phase shifter of the present invention, 90
ophase shifter, the second phase sensitivity demodulation module and peak detection circuit are configured to a feedback control system.
When the phase error that peak detection circuit detects input signal is zero, FEEDBACK CONTROL phase shifter, make drive singal equal with angular velocity signal phase place, drive singal inputs the first phase sensitivity demodulation module through phase shifter, and making the signal after multiplying and low-pass filtering with input signal is angular velocity signal and in-phase error signal.
In-phase error signal, feedback factor signal and drive singal are done the signal after multiplying to be kept in data-carrier store, and export to and make difference circuit, carry out making difference operation with the input signal making difference circuit, the signal done after difference is angular velocity signal and as final output signal.
Therefore, the present invention is while completing angular velocity signal extraction, compensate in-phase error signal to the impact of useful Coriolis acceleration signal, thus improve the key technical index such as the stability of micromechanical gyro offset output, the nonlinearity of scaling factor and bandwidth of operation, significantly improve the overall performance of silicon micromechanical gyroscope, reach the object utilizing signal processing compensate for process error, improve the measuring accuracy of micromechanical gyro.
Accompanying drawing explanation
Fig. 1 is that prior art micromechanical gyro angular velocity signal extracts schematic diagram;
Fig. 2 is structural representation of the present invention;
Fig. 3 is the invention process system schematic.
Label declaration
Phase shifter 1 90
ophase shifter 2
First phase sensitivity demodulation module 3 phase-sensitive demodulating circuits 31
Low-pass filter 32 second phase sensitivity demodulation module 4
Phase-sensitive demodulating circuits 41 low-pass filter 42
Controlled switch 5 mlultiplying circuit 6
Amplitude detection circuit 7 data-carrier store 8
Make difference circuit 9 peak detection circuit 10.
High frequency carrier device 20 charge amplifier 30
The quick demodulation module 50 of filter amplifier 40 third phase
Phase-sensitive demodulating circuits 501 low-pass filter 502
Signal amplifier 60 the 4th phase demodulation module 70
Phase-sensitive demodulating circuits 701 low-pass filter 702
Signal amplifier 80.
Embodiment
Below in conjunction with drawings and the specific embodiments, the present invention is elaborated.
As shown in Figures 2 and 3, the one that the present invention discloses eliminates micromechanical gyroscope in-phase error system based on multiplication, comprises phase shifter 1,90
ophase shifter 2, first phase sensitivity demodulation module 3, second phase sensitivity demodulation module 4, four controlled switchs 5, mlultiplying circuit 6, amplitude detection circuit 7, data-carrier store 8, make difference circuit 9 and peak detection circuit 10.
Phase shifter 1 inputs termination drive singal
v ref (t)=V d cos(ω t+
Φ), export termination 90
ophase shifter 2 and the first phase sensitivity demodulation module 3, output terminal is also connected with mlultiplying circuit 6 through controlled switch 5.
First phase sensitivity demodulation module 3 inputs termination micromechanical gyro angular velocity and extracts signal, and described input signal comprises angular velocity signal, quadrature error signal and in-phase error signal.Connect output terminal one tunnel to be connected with amplitude detection circuit 7 through controlled switch 5, amplitude detection circuit 7 output terminal is connected with mlultiplying circuit 6, and another road is connected with mlultiplying circuit 6 through controlled switch 5; Mlultiplying circuit 6 is connected with data-carrier store 8 through controlled switch 5, data-carrier store 8 output terminal with make difference circuit 9 and be connected, make difference circuit 9 and also connect micromechanical gyro angular velocity extraction signal, described input signal comprises angular velocity signal, quadrature error signal and in-phase error signal.
First phase sensitivity demodulation module 3 is made up of phase-sensitive demodulating circuits 31 and low-pass filter 32, the input end of phase-sensitive demodulating circuits 31 connects phase shifter 1 simultaneously and micromechanical gyro angular velocity extracts signal, low-pass filter of output termination 32, low-pass filter 32 1 tunnel is connected with amplitude detection circuit 7 through controlled switch 5, and a road is connected with mlultiplying circuit 6 through controlled switch 5.
90
othe input termination micromechanical gyro angular velocity that phase shifter 2 exports termination second-phase quick demodulation module 4, second phase sensitivity demodulation module 4 extracts signal, and described signal is for comprising angular velocity signal, quadrature error signal and in-phase error signal.Export termination and connect peak detection circuit 10, peak detection circuit 10 exports termination phase shifter 1.
Second phase sensitivity demodulation module 4 is made up of phase-sensitive demodulating circuits 41 and low-pass filter 42, and the input end of phase-sensitive demodulating circuits 41 connects 90 simultaneously
ophase shifter 2 and micromechanical gyro angular velocity extract signal, low-pass filter of output termination 42; Low-pass filter 42 connects peak detection circuit 10.
The present invention also comprises high frequency carrier device 20, charge amplifier 30, filter amplifier 40, the quick demodulation module 50 of third phase, the 4th phase demodulation module 70 and signal amplifier 60.The electric capacity of the input termination micromechanical gyro of high frequency carrier device 20, exports termination charge amplifier 30 and the quick demodulation module 50 of third phase.
Charge amplifier 30 connects filter amplifier 40, filter amplifier 40 connects the input end of the quick demodulation module 50 of third phase, the output termination signal amplifier 60 of the quick demodulation module 50 of third phase, and signal amplifier 60 connects the first phase sensitivity demodulation module 3 and the second phase sensitivity demodulation module 4 respectively; Through making signal input the 4th phase demodulation module 70 of difference circuit 9.
The quick demodulation module 50 of third phase is made up of phase-sensitive demodulating circuits 501 and low-pass filter 502, and the input end of phase-sensitive demodulating circuits 501 connects filter amplifier 40 and high frequency carrier device 20, low-pass filter of output termination 502 simultaneously; Low-pass filter 502 connects signal amplifier 60.
4th phase demodulation module 70 is made up of phase-sensitive demodulating circuits 701 and low-pass filter 702, the input end of phase-sensitive demodulating circuits 701 connects drive singal and the signal through doing difference circuit 9 input simultaneously, low-pass filter of output termination 702, low-pass filter 702 connects signal amplifier 80, and signal finally exports.
Phase shifter 1,90 of the present invention
ophase shifter 2, second phase sensitivity demodulation module 4 and peak detection circuit 10 are configured to a feedback control system.Peak detection circuit 10 is in order to detect the amplitude output signal value of above-mentioned background technology Chinese style (8), and amplitude output signal value FEEDBACK CONTROL phase shifter 1, this phase shifter 1 produces second time demodulated reference signal V
ref3the phase value of (t).When peak detection circuit 10 reaches maximal value, reference signal V
ref3t the phase place of () is equal with the angular velocity signal phase place of input under the effect of phase shifter 1, be also Δ
Φequal zero.In Fig. 2, when feedback system is stablized, Δ
Φequal zero, export V
out7(t), namely formula (8) is pure quadrature error signal; Output signal V
out8t, in (), namely formula (7) quadrature error is completely eliminated, only remaining in-phase error signal and useful angular velocity signal.
Due to when phase error is zero, after carrying out second time phase demodulation with drive singal, quadrature error is completely eliminated, output signal is remaining useful angular velocity signal and in-phase error signal only, if now without angular velocity signal input, just output signal only remaining in-phase error signal, and this in-phase error signal occurs in direct current mode.And the in-phase error signal of input end is the form of cosine function, therefore the reference signal of in-phase error signal with second time phase demodulation is multiplied, be multiplied by a feedback factor again, the signal that three is multiplied and input signal subtract each other the in-phase error signal eliminating input node place.In addition, with an amplitude detection circuit, V
out8t the in-phase error signal at () place is as the input signal of this amplitude detection circuit, and the size of feedback factor is by the control of amplitude detection circuit, when amplitude detection module be input as zero time feedback factor reach stable, due to V after stable
out8t () is that the in-phase error signal at zero i.e. input node place has been eliminated, also will not have in-phase error signal in output signal.
The present invention is also open a kind of based on multiplication elimination micromechanical gyroscope in-phase error method, comprises the following steps:
Step one, extract input signal, as shown in Figure 3, adopt the method for high frequency carrier modulation, utilize integrator to form charge amplifier, the changing value detecting micromechanical gyro electric capacity is transformed into voltage signal, then after third phase quick demodulation module 50 phase demodulation, obtain the voltage signal be directly proportional to the variable quantity of Detection capacitance, described input signal comprises angular velocity signal, quadrature error signal and in-phase error signal.
Step 2, inputs the phase-sensitive demodulating circuits 31 of the first phase sensitivity demodulation module 3 and the phase-sensitive demodulating circuits 41 of the second phase sensitivity demodulation module 4 by input signal; Meanwhile, drive singal one tunnel inputs the phase-sensitive demodulating circuits 31 of the first phase sensitivity demodulation module 3 through phase shifter 1, does multiplying with input signal; Another road of drive singal is through phase shifter 1 and 90 successively
ophase shifter 2 inputs the phase-sensitive demodulating circuits 41 of the second phase sensitivity demodulation module 4, after doing multiplying, signal is inputted the low-pass filter 42 of the second phase sensitivity demodulation module 4 with input signal, filtered signal input peak detection circuit 10; When the phase error that peak detection circuit 10 detects input signal is zero, FEEDBACK CONTROL phase shifter 1, make drive singal equal with angular velocity signal phase place, drive singal inputs the phase-sensitive demodulating circuits 31 of the first phase sensitivity demodulation module 3 through phase shifter 1, does multiplying and the filtered signal of low-pass filter 32 of the first phase sensitivity demodulation module 3 is angular velocity signal and in-phase error signal with input signal.
Step 3, when having angular velocity signal through the filtered signal of low-pass filter 32 of the first phase sensitivity demodulation module, four controlled switchs 5 all disconnect; When through the filtered signal of low-pass filter 32 of the first phase sensitivity demodulation module without angular velocity signal time, four controlled switchs 5 are all closed, in-phase error signal one tunnel directly inputs mlultiplying circuit 6 through controlled switch 5, one tunnel controls feedback factor through amplitude detection circuit 7, and feedback factor signal is inputted mlultiplying circuit 6, meanwhile, drive singal inputs mlultiplying circuit 6 through controlled switch 5; In-phase error signal, feedback factor signal and drive singal being done the signal after multiplying is kept in data-carrier store 8, and export to and make difference circuit 9, carry out making difference operation with the input signal making difference circuit 9, the signal done after difference is angular velocity signal and as final output signal.
Also comprise signal and export step, the phase-sensitive demodulating circuits 701 of signal input the 4th phase demodulation module 70 after making difference circuit 9 work difference, is then inputted low-pass filter 702, after multiplying and low-pass filtering, is exported by signal amplifier 80.
The foregoing is only one embodiment of the present of invention, not to the restriction of this case design, all equivalent variations done according to the design key of this case, all fall into the protection domain of this case.
Claims (8)
1. eliminate a micromechanical gyroscope in-phase error system based on multiplication, it is characterized in that: comprise peak detection circuit, amplitude detection circuit, the first phase sensitivity demodulation module, the second phase sensitivity demodulation module, phase shifter, 90
ophase shifter, data-carrier store, four controlled switchs, mlultiplying circuits and make difference circuit; Phase shifter inputs connects drive singal, exports termination 90
ophase shifter and the first phase sensitivity demodulation module, output terminal is also connected with mlultiplying circuit through controlled switch; First phase sensitivity demodulation module input termination micromechanical gyro angular velocity extracts signal, and output terminal one tunnel is connected with amplitude detection circuit through controlled switch, and amplitude detection circuit output terminal is connected with mlultiplying circuit, and another road is connected with mlultiplying circuit through controlled switch; Mlultiplying circuit is connected with data-carrier store through controlled switch, and data-carrier store output terminal is connected with as difference circuit, makes difference circuit and also connects micromechanical gyro angular velocity extraction signal;
90
ophase shifter exports the quick demodulation module of termination second-phase, and the input termination micromechanical gyro angular velocity of the second phase sensitivity demodulation module extracts signal, and export termination and connect peak detection circuit, peak detection circuit exports termination phase shifter.
2. as claimed in claim 1 a kind of based on multiplication elimination micromechanical gyroscope in-phase error system, it is characterized in that: the first phase sensitivity demodulation module is made up of low-pass filter and phase-sensitive demodulating circuits, the input end of phase-sensitive demodulating circuits connects phase shifter simultaneously and micromechanical gyro angular velocity extracts signal, low-pass filter of output termination, low-pass filter one tunnel is connected with amplitude detection circuit through controlled switch, and a road is connected with mlultiplying circuit through controlled switch.
3. as claimed in claim 1 a kind of based on multiplication elimination micromechanical gyroscope in-phase error system, it is characterized in that: the second phase sensitivity demodulation module is made up of low-pass filter and phase-sensitive demodulating circuits, and the input end of phase-sensitive demodulating circuits connects 90 simultaneously
ophase shifter and micromechanical gyro angular velocity extract signal, low-pass filter of output termination; Low-pass filter connects peak detection circuit.
4. as claimed in claim 1 a kind of based on multiplication elimination micromechanical gyroscope in-phase error system, it is characterized in that: also comprise high frequency carrier device, charge amplifier, filter amplifier, the quick demodulation module of third phase, the 4th phase demodulation module and signal amplifier; The electric capacity of the input termination micromechanical gyro of high frequency carrier device, exports termination charge amplifier and the quick demodulation module of third phase; Charge amplifier connects filter amplifier, and filter amplifier connects the input end of the quick demodulation module of third phase, the output termination signal amplifier of the quick demodulation module of third phase, and signal amplifier connects the first phase sensitivity demodulation module and the second phase sensitivity demodulation module respectively; Through making signal input the 4th phase demodulation module of difference circuit.
5. as claimed in claim 4 a kind of based on multiplication elimination micromechanical gyroscope in-phase error system, it is characterized in that: the quick demodulation module of third phase is made up of low-pass filter and phase-sensitive demodulating circuits, the input end of phase-sensitive demodulating circuits connects filter amplifier and high frequency carrier device, low-pass filter of output termination simultaneously; Low-pass filter connects signal amplifier.
6. as claimed in claim 4 a kind of based on multiplication elimination micromechanical gyroscope in-phase error system, it is characterized in that: the 4th phase demodulation module is made up of low-pass filter and phase-sensitive demodulating circuits, the input end of phase-sensitive demodulating circuits connects drive singal and the signal through doing difference circuit input simultaneously, low-pass filter of output termination, low-pass filter connects signal amplifier.
7. eliminate a micromechanical gyroscope in-phase error method based on multiplication, it is characterized in that: comprise the following steps:
Step one, extract input signal, described input signal comprises angular velocity signal, quadrature error signal and in-phase error signal;
Step 2, inputs the first phase sensitivity demodulation module and the second phase sensitivity demodulation module by input signal; Meanwhile, drive singal one tunnel inputs the first phase sensitivity demodulation module through phase shifter, does multiplying with input signal; Another road of drive singal is through phase shifter and 90 successively
ophase shifter inputs the second phase sensitivity demodulation module, makes the signal after multiplying and low-pass filtering input peak detection circuit with input signal; When the phase error that peak detection circuit detects input signal is zero, FEEDBACK CONTROL phase shifter, make drive singal equal with angular velocity signal phase place, drive singal inputs the first phase sensitivity demodulation module through phase shifter, and making the signal after multiplying and low-pass filtering with input signal is angular velocity signal and in-phase error signal;
Step 3, when the signal after the first phase sensitivity demodulation module has angular velocity signal, four controlled switchs all disconnect; When the signal after the first phase sensitivity demodulation module is without angular velocity signal, four controlled switchs are all closed, in-phase error signal one tunnel directly inputs mlultiplying circuit through controlled switch, one tunnel controls feedback factor through amplitude detection circuit, and feedback factor signal is inputted mlultiplying circuit, meanwhile, drive singal inputs mlultiplying circuit through controlled switch; In-phase error signal, feedback factor signal and drive singal are done the signal after multiplying to be kept in data-carrier store, and export to and make difference circuit, carry out making difference operation with the input signal making difference circuit, the signal done after difference is angular velocity signal and as final output signal.
8. as claimed in claim 7 a kind of based on multiplication elimination micromechanical gyroscope in-phase error method, it is characterized in that: also comprise signal and export step, the phase-sensitive demodulating circuits of signal input the 4th phase demodulation module after making difference circuit work difference, then low-pass filter is inputted, after multiplying and low-pass filtering, exported by signal amplifier.
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| CN103983257B (en) * | 2014-05-06 | 2017-02-22 | 华侨大学 | Signal processing method capable of eliminating quadrature errors of micro-machined gyroscope |
| CN106918351A (en) * | 2017-03-24 | 2017-07-04 | 北方电子研究院安徽有限公司 | A kind of micro mechanical gyroscope automatic fault selftesting method based on quadrature error signal |
| CN114109505B (en) * | 2021-11-19 | 2023-07-04 | 中铁二十二局集团第四工程有限公司 | Tunnel catastrophe prediction system |
| CN114427854B (en) * | 2022-01-10 | 2023-04-07 | 北京自动化控制设备研究所 | Orthogonal coupling error suppression circuit of micro-electromechanical gyroscope |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101158582A (en) * | 2007-10-25 | 2008-04-09 | 北京航空航天大学 | Difference measurement method for MEMS gyroscopes |
| CN102109345A (en) * | 2010-12-13 | 2011-06-29 | 谢元平 | Digital signal processing method and device for micro-mechanical gyroscope |
| CN203163737U (en) * | 2013-03-06 | 2013-08-28 | 莫冰 | System for eliminating in-phase errors of micromechanical gyroscopes based on multiplication |
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101158582A (en) * | 2007-10-25 | 2008-04-09 | 北京航空航天大学 | Difference measurement method for MEMS gyroscopes |
| CN102109345A (en) * | 2010-12-13 | 2011-06-29 | 谢元平 | Digital signal processing method and device for micro-mechanical gyroscope |
| CN203163737U (en) * | 2013-03-06 | 2013-08-28 | 莫冰 | System for eliminating in-phase errors of micromechanical gyroscopes based on multiplication |
Non-Patent Citations (2)
| Title |
|---|
| 微机械陀螺的误差抑制电路;周志广;《传感技术学报》;20100630;第23卷(第6期);第808-811页 * |
| 振动式微陀螺正交误差自补偿方法;刘学等;《传感技术学报》;20120930;第25卷(第9期);第1221-1225页 * |
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