CN203163737U - System for eliminating in-phase errors of micromechanical gyroscopes based on multiplication - Google Patents
System for eliminating in-phase errors of micromechanical gyroscopes based on multiplication Download PDFInfo
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Abstract
The utility model discloses a system for eliminating in-phase errors of micromechanical gyroscopes based on multiplication. The system is characterized in that the input end of a phase shifter is connected with a drive signal and the output end thereof is connected with a 90-degree phase shifter and a first phase-sensitive demodulation module and is also connected with a multiplying circuit via a controlled switch; the input end of the first phase-sensitive demodulation module is connected with a micromechanical gyroscope angular speed extraction signal; one way of the output end of the first phase-sensitive demodulation module is connected with an amplitude detection circuit via a controlled switch and the other way is connected with the multiplying circuit via the controlled switch; the output end of the amplitude detection circuit is connected with the multiplying circuit; the multiplying circuit is connected with a data memory via a controlled switch; the output end of the data memory is connected with a difference circuit; the difference circuit is connected with the micromechanical gyroscope angular speed extraction signal; the output end of the 90-degree phase shifter is connected with a second phase-sensitive demodulation module; the input end of the second phase-sensitive demodulation module is connected with the micromechanical gyroscope angular speed extraction signal and the output end thereof is connected with a peak detection circuit; and the output end of the peak detection circuit is connected with the phase shifter. The system effectively eliminates in-phase errors, thus improving the measurement accuracy of micromechanical gyroscopes.
Description
Technical Field
The utility model relates to an eliminate micromechanical gyroscope homophase error system based on multiplication, especially indicate one kind and eliminate capacitanc micromechanical gyroscope homophase error system based on multiplication.
Background
The gyroscope is a sensor capable of detecting the self attitude and state change of a moving object even if no external reference signal exists, and has the function of sensing the angular speed of the moving object. The third-generation micro-mechanical gyroscope based on the MEMS technology has the advantages of small volume, light weight, large bandwidth, low power consumption, high impact strength and the like, and is widely applied to the military and civil fields.
In the prior art, a sensitive structure of a capacitive micro-mechanical gyroscope is manufactured by bulk silicon or surface silicon process, and due to the fact that the size is extremely small and is usually micron-sized, the processing precision is difficult to control under the existing process conditions. Therefore, the sensitive structure has a process error in the manufacturing process. The error directly affects key technical indexes such as stability of zero output of the silicon micromechanical gyroscope, nonlinearity of scale factors, working bandwidth and the like. Meanwhile, the application of the micro-mechanical gyroscope in the fields of space navigation, accurate guidance, precise instruments, deep sea detection and the like which need to accurately measure angular velocity signals is restricted.
Various process errors of the sensitive structure can be converted into two error signals of a quadrature error and an in-phase error in the processing process of extracting the angular velocity signal by the micro-mechanical gyroscope. The quadrature error and the in-phase error are two main interference signals in the angular velocity signal extraction process, and are main factors for restricting the overall performance of the micro-mechanical gyroscope.
The in-phase error is derived from incomplete perpendicularity of a driving shaft and a detection shaft of a micromechanical gyroscope sensor structure, when a driving voltage is loaded, a component force exists in the detection direction of the driving force, the component force is consistent with the Coriolis force (Coriolis force) to be detected in the direction and the phase, and therefore the angular velocity signal and the in-phase error signal are difficult to distinguish in the signal processing process. Since the in-phase error is the same as the Coriolis acceleration signal in frequency and phase, it is difficult to separate and suppress the error signal, and in the prior art, there are very few signal processing schemes for suppressing the in-phase error, and there is no general signal processing scheme that can effectively eliminate or suppress the in-phase error.
As shown in fig. 1, a conventional micromechanical gyroscope angular velocity signal extraction signal processing circuit system. According to the working principle of the micro-mechanical gyroscope, the variation of the detection capacitor of the sensitive structure must be measured to obtain the value of the input angular velocity signal. However, the capacitance variation is very weak, and is usually submerged in low-frequency 1/f noise, in order to suppress 1/f noise, as shown in fig. 1, an angular velocity extraction circuit generally adopts a high-frequency carrier modulation method, and uses an integrator to form a charge amplifier, so as to convert the variation value of the detected capacitance into a voltage signal, and then, after two phase-sensitive demodulation processes, the voltage signal proportional to the variation value of the detected capacitance is obtained by first demodulation; the second demodulation results in a voltage signal proportional to the input angular velocity signal. The extracted final output signal includes an angular velocity signal, a quadrature error signal, and an in-phase error signal.
The output signal when quadrature and in-phase errors are considered when no phase error is present is analyzed as follows:
as can be seen from FIG. 1, after the first phase-sensitive demodulation, the resulting signal is obtained inV(t)Is a voltage signal proportional to the variation of the detection capacitor, when there is a quadrature error and an in-phase error, inV(t)is the sum of the angular velocity signal, the quadrature error signal and the in-phase error signal, and can be expressed as follows:
wherein, corVrepresenting the amplitude of the Coriolis acceleration signal; in-pVrepresenting the amplitude of the in-phase error signal; qucVrepresenting the amplitude of the quadrature error signal; w represents an input angular velocity signal; ω represents the angular frequency of the micromechanical gyroscope drive signal;Φrepresenting the phase of the drive signal. From the equation (1), it can be seen that the in-phase error signal and the Coriolis acceleration signal have the same frequency and phase, while the quadrature error signal and the Coriolis acceleration signal have the same frequency and the phase difference is 90 degrees. If no phase error signal exists, the reference signal of the second phase-sensitive demodulation refV(t)Is the drive signal, it inV(t)And performing multiplication operation as follows:
eliminating high frequency term with frequency of 2 omega by low pass filtering to obtain output signal out1V(t)Comprises the following steps:
it can be seen that the reference signal of the second phase-sensitive demodulation is the driving signal ref dV(t)=V cos（ωt+Φ) And in time, the final output signal contains an angular velocity signal and an in-phase error signal, and the quadrature error is completely eliminated.
Reference signal if second phase sensitive demodulation refV(t)Orthogonal to the drive signal, i.e. expressed as inV(t)And performing multiplication operation as follows:
eliminating high frequency term with frequency of 2 omega by low pass filtering to obtain output signal out2V(t)Comprises the following steps:
it can be seen that the reference signal is demodulated if the second phase-sensitive demodulation is performed refV(t)In quadrature with the drive signal, the final output signal is a clean quadrature error signal.
The output signal when the quadrature error and the in-phase error are considered in the presence of a phase error is analyzed as follows:
since the ac signal inevitably causes phase shift during transmission processing, phase error is difficult to avoid in practice, and consideration should be given to the case where phase error exists, when phase error is taken into consideration inV(t)It is expressed by the following equation:
in the formula (6) < delta >ΦI.e. phase error introduced by the signal processing, when the drive signal is used as the reference signal for the second phase-sensitive demodulation refV(t) d=V cos（ωt+Φ) The final output signal after low-pass filtering is:
as can be seen from comparison of equations (7) and (3), when a phase error exists, if the reference signal of the second phase-sensitive demodulation is a drive signal, the final output signal includes an angular velocity signal and an in-phase error signal, and also includes a quadrature error signal, and the phase error ΔΦThe smaller, the smaller sin ΔΦThe closer to zero, the smaller the quadrature error signal.
Reference signal if second phase sensitive demodulation refV(t)And the final output signal after low-pass filtering is orthogonal to the driving signal, that is, the expression is:
comparing the equations (8) and (5) shows that if there is a phase error, the reference signal is demodulated for the second time refV(t)When the driving signal is orthogonal, the final output signal contains the orthogonal error signal and also the angular velocityDegree signal and in-phase error signal, phase error deltaΦThe smaller, the smaller sin ΔΦThe closer to zero, the smaller the angular velocity and in-phase error signals.
The amplitude of the quadrature error signal is usually much larger than the amplitude of the in-phase error and the angular velocity signal, and when the three signals are superimposed, the quadrature error is dominant. Therefore, in equation (8), the first term on the right side of the equation plays a major role when ΔΦWhen the value is equal to zero, the first term on the right side of the equation is taken to be the maximum value which can be reached by the first term, and the second term on the right side of the equation (8) is zero at this time, that is, the angular velocity signal and the in-phase error signal are zero, and the right side of the equation (8) only contains a pure quadrature error signal. Further, when ΔΦWhen the value is equal to zero, the right side of the equation (7) only contains the angular velocity signal and the in-phase error signal, and the quadrature error signal is completely eliminated, so that only the in-phase error signal and the useful angular velocity signal are left.
The traditional micromechanical gyroscope angular velocity signal extraction signal processing circuit system cannot eliminate in-phase errors.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide an eliminate micromechanical gyroscope in-phase error system based on multiplication, it effectively eliminates the in-phase error to improve micromechanical gyroscope's measurement accuracy.
To achieve the above object, the solution of the present invention is:
a system for eliminating micromechanical gyroscope in-phase error based on multiplication comprises a peak detection circuit, an amplitude detection circuit, a first phase-sensitive demodulation module, a second phase-sensitive demodulation module, a phase shifter and a phase shifter 90oThe phase shifter comprises a phase shifter, a data memory, four controlled switches, a multiplication circuit and a difference circuit; the phase shifter has an input terminal connected with the driving signal and an output terminal connected with 90oThe output end of the phase shifter and the first phase sensitive demodulation module is also connected with the multiplication circuit through a control switch; the input end of the first phase-sensitive demodulation module is connected with the angular velocity extraction signal of the micromechanical gyroscope, and the output end is connected with one pathThe controlled switch is connected with the amplitude detection circuit, the output end of the amplitude detection circuit is connected with the multiplication circuit, and the other path of the amplitude detection circuit is connected with the multiplication circuit through the controlled switch; the multiplication circuit is connected with a data memory through a controlled switch, the output end of the data memory is connected with a difference circuit, and the difference circuit is also connected with a micromechanical gyroscope angular velocity extraction signal;
90othe output end of the phase shifter is connected with the second phase-sensitive demodulation module, the input end of the second phase-sensitive demodulation module is connected with the micromechanical gyroscope angular velocity extraction signal, the output end of the second phase-sensitive demodulation module is connected with the peak value detection circuit, and the output end of the peak value detection circuit is connected with the phase shifter.
Furthermore, the first phase-sensitive demodulation module consists of a low-pass filter and a phase-sensitive demodulation circuit, wherein the input end of the phase-sensitive demodulation circuit is simultaneously connected with the phase shifter and the micromechanical gyroscope angular velocity extraction signal, the output end of the phase-sensitive demodulation circuit is connected with the low-pass filter, one path of the low-pass filter is connected with the amplitude detection circuit through the control switch, and the other path of the low-pass filter is connected with the multiplication circuit through the control switch.
Furthermore, the second phase-sensitive demodulation module consists of a low-pass filter and a phase-sensitive demodulation circuit, and the input end of the phase-sensitive demodulation circuit is simultaneously connected with 90oThe phase shifter and the micromechanical gyroscope angular velocity extract signals, and the output end of the phase shifter and the micromechanical gyroscope angular velocity extract signals is connected with a low-pass filter; the low-pass filter is connected with the peak value detection circuit.
The high-frequency carrier, the charge amplifier, the filter amplifier, the third phase-sensitive demodulation module, the fourth phase-sensitive demodulation module and the signal amplifier are further included; the input end of the high-frequency carrier is connected with the capacitor of the micro-mechanical gyroscope, and the output end of the high-frequency carrier is connected with the charge amplifier and the third phase-sensitive demodulation module; the charge amplifier is connected with the filter amplifier, the filter amplifier is connected with the input end of the third phase-sensitive demodulation module, the output end of the third phase-sensitive demodulation module is connected with the signal amplifier, and the signal amplifier is respectively connected with the first phase-sensitive demodulation module and the second phase-sensitive demodulation module; the signal passing through the difference circuit is input into a fourth phase-sensitive demodulation module.
Furthermore, the third phase-sensitive demodulation module consists of a low-pass filter and a phase-sensitive demodulation circuit, wherein the input end of the phase-sensitive demodulation circuit is connected with the filter amplifier and the high-frequency carrier at the same time, and the output end of the phase-sensitive demodulation circuit is connected with the low-pass filter; the low-pass filter is connected with the signal amplifier.
Furthermore, the fourth phase-sensitive demodulation module consists of a low-pass filter and a phase-sensitive demodulation circuit, wherein the input end of the phase-sensitive demodulation circuit is simultaneously connected with the driving signal and the signal input by the difference circuit, the output end of the phase-sensitive demodulation circuit is connected with the low-pass filter, and the low-pass filter is connected with the signal amplifier.
A method for eliminating micromechanical gyroscope in-phase errors based on multiplication comprises the following steps:
extracting input signals, wherein the input signals comprise an angular velocity signal, a quadrature error signal and an in-phase error signal;
inputting an input signal into a first phase-sensitive demodulation module and a second phase-sensitive demodulation module; meanwhile, one path of the driving signal is input into the first phase-sensitive demodulation module through the phase shifter and is multiplied with the input signal; the other path of the driving signal is sequentially phase-shifted and 90oThe phase shifter is input into a second phase-sensitive demodulation module, and a signal which is subjected to multiplication and low-pass filtering with an input signal is input into a peak value detection circuit; when the peak value detection circuit detects that the phase error of the input signal is zero, the phase shifter is fed back and controlled to enable the phase of the driving signal to be equal to that of the angular velocity signal, the driving signal is input into the first phase-sensitive demodulation module through the phase shifter, and the signal obtained after multiplication and low-pass filtering with the input signal is the angular velocity signal and the in-phase error signal;
step three, when the signal after passing through the first phase-sensitive demodulation module has an angular velocity signal, all four controlled switches are switched off; when the signal after passing through the first phase-sensitive demodulation module has no angular velocity signal, the four controlled switches are all closed, one path of the in-phase error signal is directly input into the multiplication circuit through the control switch, the other path of the in-phase error signal controls the feedback coefficient through the amplitude detection circuit, the feedback coefficient signal is input into the multiplication circuit, and meanwhile, the driving signal is input into the multiplication circuit through the controlled switches; the signals obtained by multiplying the in-phase error signal, the feedback coefficient signal and the driving signal are stored in a data memory and output to a difference circuit, and the difference circuit performs difference operation with the input signal of the difference circuit, and the signals obtained after difference operation are angular speed signals and serve as final output signals.
And further, the method also comprises a signal output step, wherein the signal subjected to the difference by the difference circuit is input into a phase-sensitive demodulation circuit of the fourth phase-sensitive demodulation module, then input into a low-pass filter, subjected to multiplication and low-pass filtering, and output through a signal amplifier.
After the proposal is adopted, the utility model discloses move looks ware, 90oThe phase shifter, the second phase sensitive demodulation module and the peak detection circuit are constructed into a feedback control system.
When the peak detection circuit detects that the phase error of the input signal is zero, the phase shifter is fed back and controlled to enable the phase of the driving signal to be equal to that of the angular velocity signal, the driving signal is input into the first phase-sensitive demodulation module through the phase shifter, and the signal obtained after multiplication and low-pass filtering with the input signal is the angular velocity signal and the in-phase error signal.
The signals obtained by multiplying the in-phase error signal, the feedback coefficient signal and the driving signal are stored in a data memory and output to a difference circuit, and the difference circuit performs difference operation with the input signal of the difference circuit, and the signals obtained after difference operation are angular speed signals and serve as final output signals.
Therefore, the utility model discloses when accomplishing the angular velocity signal and drawing, compensation in-phase error signal is to the influence of useful Coriolis acceleration signal to improve the stability of micromechanical gyroscope zero point output, the nonlinearity of scale factor and key technical indicator such as work bandwidth, improvement silicon micromechanical gyroscope's wholeness ability by a wide margin reaches the purpose that utilizes signal processing process compensation process error, improves micromechanical gyroscope's measurement accuracy.
Drawings
FIG. 1 is a prior art micromechanical gyroscope angular velocity signal extraction schematic;
fig. 2 is a schematic structural diagram of the present invention;
fig. 3 is a schematic diagram of the system for implementing the present invention.
Description of the reference symbols
Phase shifter 190o Phase shifter 2
First phase sensitive demodulation module 3 phase sensitive demodulation circuit 31
Low pass filter 32 second phase sensitive demodulation module 4
Phase sensitive demodulation circuit 41 low pass filter 42
Controlled switch 5 multiplier circuit 6
Amplitude detection circuit 7 data memory 8
The difference circuit 9 is a peak value detection circuit 10.
Phase sensitive demodulation circuit 501 low pass filter 502
Phase sensitive demodulation circuit 701 low pass filter 702
A signal amplifier 80.
Detailed Description
The present invention will be described in detail below with reference to the accompanying drawings and specific embodiments.
As shown in FIGS. 2 and 3, the present invention discloses a micromechanical gyroscope based on multiplication eliminationIn-phase error system comprising phase shifters 1, 90oThe phase shifter comprises a phase shifter 2, a first phase sensitive demodulation module 3, a second phase sensitive demodulation module 4, four controlled switches 5, a multiplication circuit 6, an amplitude detection circuit 7, a data memory 8, a difference circuit 9 and a peak value detection circuit 10.
The input end of the phase shifter 1 is connected with a driving signal ref dV(t)=V cos（ωt+Φ) The output end is connected with 90oThe phase shifter 2 and the first phase sensitive demodulation module 3, the output end is also connected with the multiplication circuit 6 through the control switch 5.
The input end of the first phase-sensitive demodulation module 3 is connected with an angular velocity extraction signal of the micro-mechanical gyroscope, and the input signal comprises an angular velocity signal, a quadrature error signal and an in-phase error signal. One output end is connected with an amplitude detection circuit 7 through a controlled switch 5, the output end of the amplitude detection circuit 7 is connected with a multiplication circuit 6, and the other output end is connected with the multiplication circuit 6 through the controlled switch 5; the multiplication circuit 6 is connected with a data memory 8 through a control switch 5, the output end of the data memory 8 is connected with a difference circuit 9, the difference circuit 9 is also connected with a micromechanical gyroscope angular velocity extraction signal, and the input signal comprises an angular velocity signal, a quadrature error signal and an in-phase error signal.
The first phase-sensitive demodulation module 3 is composed of a phase-sensitive demodulation circuit 31 and a low-pass filter 32, the input end of the phase-sensitive demodulation circuit 31 is connected with the phase shifter 1 and the micromechanical gyroscope angular velocity extraction signal at the same time, the output end is connected with the low-pass filter 32, one path of the low-pass filter 32 is connected with the amplitude detection circuit 7 through a controlled switch 5, and the other path is connected with the multiplication circuit 6 through the controlled switch 5.
90oThe output end of the phase shifter 2 is connected with a second phase-sensitive demodulation module 4, the input end of the second phase-sensitive demodulation module 4 is connected with a micromechanical gyroscope angular velocity extraction signal, and the signal comprises an angular velocity signal, a quadrature error signal and an in-phase error signal. The output end is connected with the peak value detection circuit 10, and the output end of the peak value detection circuit 10 is connected with the phase shifter 1.
The second phase-sensitive demodulation module 4 comprises a phase-sensitive demodulation circuit 41 and a low-pass filter 4241 is simultaneously connected to 90oThe phase shifter 2 and the micromechanical gyroscope angular velocity extract signals, and the output end is connected with the low-pass filter 42; the low pass filter 42 is connected to the peak detection circuit 10.
The utility model discloses still include high frequency carrier 20, charge amplifier 30, filtering amplifier 40, the third phase sensitive demodulation module 50, the fourth phase sensitive demodulation module 70 and signal amplifier 60. The input end of the high-frequency carrier 20 is connected with the capacitance of the micro-mechanical gyroscope, and the output end is connected with the charge amplifier 30 and the third phase-sensitive demodulation module 50.
The charge amplifier 30 is connected with the filter amplifier 40, the filter amplifier 40 is connected with the input end of the third phase-sensitive demodulation module 50, the output end of the third phase-sensitive demodulation module 50 is connected with the signal amplifier 60, and the signal amplifier 60 is respectively connected with the first phase-sensitive demodulation module 3 and the second phase-sensitive demodulation module 4; the signal passed through the difference circuit 9 is input to the fourth phase sensitive demodulation block 70.
The third phase-sensitive demodulation module 50 consists of a phase-sensitive demodulation circuit 501 and a low-pass filter 502, wherein the input end of the phase-sensitive demodulation circuit 501 is connected with the filter amplifier 40 and the high-frequency carrier 20 at the same time, and the output end of the phase-sensitive demodulation circuit 501 is connected with the low-pass filter 502; the low pass filter 502 is connected to the signal amplifier 60.
The fourth phase-sensitive demodulation module 70 is composed of a phase-sensitive demodulation circuit 701 and a low-pass filter 702, wherein the input end of the phase-sensitive demodulation circuit 701 is connected to the driving signal and the signal input through the difference circuit 9, the output end is connected to the low-pass filter 702, the low-pass filter 702 is connected to the signal amplifier 80, and the signal is finally output.
The utility model discloses move looks ware 1, 90oThe phase shifter 2, the second phase sensitive demodulation module 4 and the peak detection circuit 10 are constructed as a feedback control system. The peak detection circuit 10 is used to detect the output signal amplitude value of the above-mentioned type (8) in the background art, the output signal amplitude value is fed back to control the phase shifter 1, the phase shifter 1 generates the second demodulation reference signal Vref3(t) phase values. When the peak detection circuit 10 reaches the maximum value, the reference signal Vref3The phase of (t) is equal to the phase of the input angular velocity signal by the phase shifter 1, and alsoNamely, DeltaΦEqual to zero. In FIG. 2, Δ when the feedback system is stableΦIs equal to zero, outputs Vout7(t), i.e., equation (8) is a clean quadrature error signal; output signal Vout8In (t), i.e., equation (7), the quadrature error is completely eliminated, leaving only the in-phase error signal and the useful angular velocity signal.
When the phase error is zero, the quadrature error is completely eliminated after the second phase-sensitive demodulation is carried out by the driving signal, the output signal only has a useful angular velocity signal and an in-phase error signal, at the moment, if no angular velocity signal is input, the output signal only has an in-phase error signal, and the in-phase error signal appears in a direct current mode. The in-phase error signal at the input is in the form of a cosine function, so that the in-phase error signal is multiplied by the reference signal of the second phase-sensitive demodulation and then multiplied by a feedback coefficient, and the multiplied signals are subtracted from the input signal to eliminate the in-phase error signal at the input node. In addition, an amplitude detection circuit, Vout8The in-phase error signal at (t) is used as the input signal of the amplitude detection circuit, the feedback coefficient is controlled by the amplitude detection circuit, when the input of the amplitude detection module is zero, the feedback coefficient is stable, and after the feedback coefficient is stable, V is generatedout8(t) is zero-i.e. the in-phase error signal at the input node is cancelled-and there will be no in-phase error signal in the output signal.
The utility model discloses still disclose a method for eliminating micromechanical gyroscope cophase error based on multiplication, including following step:
firstly, an input signal is extracted, as shown in fig. 3, a charge amplifier is formed by an integrator by using a high-frequency carrier modulation method, a change value of a capacitance of a micro-mechanical gyroscope is converted into a voltage signal, and then the voltage signal which is in direct proportion to the change value of the capacitance is obtained after phase-sensitive demodulation by a third phase-sensitive demodulation module 50, wherein the input signal comprises an angular velocity signal, a quadrature error signal and an in-phase error signal.
Step two, inputting the input signal into the phase sensitive demodulation of the first phase sensitive demodulation module 3A phase sensitive demodulation circuit 41 of the circuit 31 and the second phase sensitive demodulation module 4; meanwhile, one path of the driving signal is input into the phase sensitive demodulation circuit 31 of the first phase sensitive demodulation module 3 through the phase shifter 1, and is multiplied with the input signal; the other path of the driving signal passes through the phase shifters 1 and 90 in sequenceoThe phase shifter 2 inputs the phase sensitive demodulation circuit 41 of the second phase sensitive demodulation module 4, after the multiplication operation with the input signal, the signal is input to the low-pass filter 42 of the second phase sensitive demodulation module 4, the filtered signal is input to the peak value detection circuit 10; when the peak detection circuit 10 detects that the phase error of the input signal is zero, the phase shifter 1 is feedback-controlled to make the phase of the driving signal equal to the phase of the angular velocity signal, the driving signal is input to the phase-sensitive demodulation circuit 31 of the first phase-sensitive demodulation module 3 through the phase shifter 1, multiplication is performed on the driving signal and the signal filtered by the low-pass filter 32 of the first phase-sensitive demodulation module 3 is an angular velocity signal and an in-phase error signal.
Step three, when the signal filtered by the low-pass filter 32 of the first phase-sensitive demodulation module has an angular velocity signal, all four controlled switches 5 are turned off; when the signal filtered by the low-pass filter 32 of the first phase-sensitive demodulation module has no angular velocity signal, the four controlled switches 5 are all closed, one path of the in-phase error signal is directly input into the multiplication circuit 6 through the controlled switch 5, one path of the in-phase error signal controls a feedback coefficient through the amplitude detection circuit 7, the feedback coefficient signal is input into the multiplication circuit 6, and meanwhile, a driving signal is input into the multiplication circuit 6 through the controlled switch 5; the signal obtained by multiplying the in-phase error signal, the feedback coefficient signal, and the drive signal is stored in the data memory 8, and is output to the difference circuit 9, and is subjected to difference operation with the input signal of the difference circuit 9, and the signal obtained by difference operation is an angular velocity signal and is used as a final output signal.
The method further comprises a signal output step, wherein the signal subjected to the difference by the difference circuit 9 is input into a phase sensitive demodulation circuit 701 of the fourth phase sensitive demodulation module 70, then input into a low-pass filter 702, subjected to multiplication and low-pass filtering, and output through a signal amplifier 80.
The above description is only an embodiment of the present invention, and is not a limitation on the design of the present application, and all equivalent changes made according to the design key of the present application fall within the protection scope of the present application.
Claims (6)
1. A system for eliminating micromechanical gyroscope in-phase error based on multiplication is characterized in that: comprises a peak value detection circuit, an amplitude detection circuit, a first phase-sensitive demodulation module, a second phase-sensitive demodulation module, a phase shifter and a phase detector 90oThe phase shifter comprises a phase shifter, a data memory, four controlled switches, a multiplication circuit and a difference circuit; the phase shifter has an input terminal connected with the driving signal and an output terminal connected with 90oThe output end of the phase shifter and the first phase sensitive demodulation module is also connected with the multiplication circuit through a control switch; the input end of the first phase-sensitive demodulation module is connected with the angular velocity extraction signal of the micro-mechanical gyroscope, and one path of the output end of the first phase-sensitive demodulation module is subjected toThe control switch is connected with the amplitude detection circuit, the output end of the amplitude detection circuit is connected with the multiplication circuit, and the other path of the amplitude detection circuit is connected with the multiplication circuit through the controlled switch; the multiplication circuit is connected with a data memory through a controlled switch, the output end of the data memory is connected with a difference circuit, and the difference circuit is also connected with a micromechanical gyroscope angular velocity extraction signal;
90othe output end of the phase shifter is connected with the second phase-sensitive demodulation module, the input end of the second phase-sensitive demodulation module is connected with the micromechanical gyroscope angular velocity extraction signal, the output end of the second phase-sensitive demodulation module is connected with the peak value detection circuit, and the output end of the peak value detection circuit is connected with the phase shifter.
2. The system for eliminating micromechanical gyroscope in-phase errors based on multiplication according to claim 1, characterized in that: the first phase-sensitive demodulation module consists of a low-pass filter and a phase-sensitive demodulation circuit, wherein the input end of the phase-sensitive demodulation circuit is simultaneously connected with the phase shifter and the micromechanical gyroscope angular velocity extraction signal, the output end of the phase-sensitive demodulation circuit is connected with the low-pass filter, one path of the low-pass filter is connected with the amplitude detection circuit through the controlled switch, and the other path of the low-pass filter is connected with the multiplication circuit through the controlled switch.
3. The system for eliminating micromechanical gyroscope in-phase errors based on multiplication according to claim 1, characterized in that: the second phase-sensitive demodulation module consists of a low-pass filter and a phase-sensitive demodulation circuit, and the input end of the phase-sensitive demodulation circuit is simultaneously connected with 90 DEG CoThe phase shifter and the micromechanical gyroscope angular velocity extract signals, and the output end of the phase shifter and the micromechanical gyroscope angular velocity extract signals is connected with a low-pass filter; the low-pass filter is connected with the peak value detection circuit.
4. The system for eliminating micromechanical gyroscope in-phase errors based on multiplication according to claim 1, characterized in that: the high-frequency carrier, the charge amplifier, the filter amplifier, the third phase-sensitive demodulation module, the fourth phase-sensitive demodulation module and the signal amplifier are also included; the input end of the high-frequency carrier is connected with the capacitor of the micro-mechanical gyroscope, and the output end of the high-frequency carrier is connected with the charge amplifier and the third phase-sensitive demodulation module; the charge amplifier is connected with the filter amplifier, the filter amplifier is connected with the input end of the third phase-sensitive demodulation module, the output end of the third phase-sensitive demodulation module is connected with the signal amplifier, and the signal amplifier is respectively connected with the first phase-sensitive demodulation module and the second phase-sensitive demodulation module; the signal passing through the difference circuit is input into a fourth phase-sensitive demodulation module.
5. The system for eliminating micromechanical gyroscope in-phase errors based on multiplication according to claim 4, wherein: the third phase-sensitive demodulation module consists of a low-pass filter and a phase-sensitive demodulation circuit, wherein the input end of the phase-sensitive demodulation circuit is connected with the filter amplifier and the high-frequency carrier at the same time, and the output end of the phase-sensitive demodulation circuit is connected with the low-pass filter; the low-pass filter is connected with the signal amplifier.
6. The system for eliminating micromechanical gyroscope in-phase errors based on multiplication according to claim 4, wherein: the fourth phase sensitive demodulation module consists of a low-pass filter and a phase sensitive demodulation circuit, wherein the input end of the phase sensitive demodulation circuit is simultaneously connected with the driving signal and the signal input by the difference circuit, the output end of the phase sensitive demodulation circuit is connected with the low-pass filter, and the low-pass filter is connected with the signal amplifier.
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| Application Number | Priority Date | Filing Date | Title |
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| CN 201320101480 CN203163737U (en) | 2013-03-06 | 2013-03-06 | System for eliminating in-phase errors of micromechanical gyroscopes based on multiplication |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103162679A (en) * | 2013-03-06 | 2013-06-19 | 莫冰 | System and method for eliminating micromechanical gyroscope in-phase error based on multiplication |
| CN112697120A (en) * | 2020-12-10 | 2021-04-23 | 北京自动化控制设备研究所 | Switch demodulation circuit of quartz tuning fork gyroscope |
-
2013
- 2013-03-06 CN CN 201320101480 patent/CN203163737U/en not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103162679A (en) * | 2013-03-06 | 2013-06-19 | 莫冰 | System and method for eliminating micromechanical gyroscope in-phase error based on multiplication |
| CN103162679B (en) * | 2013-03-06 | 2015-07-22 | 莫冰 | System and method for eliminating micromechanical gyroscope in-phase error based on multiplication |
| CN112697120A (en) * | 2020-12-10 | 2021-04-23 | 北京自动化控制设备研究所 | Switch demodulation circuit of quartz tuning fork gyroscope |
| CN112697120B (en) * | 2020-12-10 | 2022-10-18 | 北京自动化控制设备研究所 | Switch demodulation circuit of quartz tuning fork gyroscope |
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