CN210005012U - multi-loop digital closed-loop control device for silicon MEMS gyroscope - Google Patents
multi-loop digital closed-loop control device for silicon MEMS gyroscope Download PDFInfo
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- CN210005012U CN210005012U CN201920819883.7U CN201920819883U CN210005012U CN 210005012 U CN210005012 U CN 210005012U CN 201920819883 U CN201920819883 U CN 201920819883U CN 210005012 U CN210005012 U CN 210005012U
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Abstract
The utility model discloses an digital closed-loop control device of silicon MEMS gyroscope multiloop, the device include the little gyroscope detection module of silicon at front end, the analog interface module of middle-end and the FPGA module of rear end, front end and rear end pass through the middle-end and link to each other, form three closed-loop control circuit, the front end comprises detection mechanism, to detecting output electrode, force feedback mechanism, to force feedback electrode, quadrature correction mechanism, quadrature correction electrode, frequency tuning mechanism and frequency tuning electrode, the middle-end comprises C/V converter, instrument amplifier, analog/digital converter and four sets of digital/analog converter, the rear end comprises input submodule piece and two demodulation submodule pieces, the utility model discloses can realize the real-time online mode automatic matching of little gyroscope of silicon, accomplish closed-loop detection and quadrature error correction simultaneously, use FPGA module to realize control algorithm, can effectively restrain because of temperature variation, the intercouple of return circuit brings the interference, the algorithm complexity is low, tuning precision is high.
Description
Technical Field
The utility model relates to a measuring instrument technical field of micro-electro-mechanical system (MEMS) and little inertial navigation, concretely relates to kinds of silicon MEMS gyroscope multiloop digital closed-loop control device.
Background
The mode matching technology, the closed loop detection and the quadrature error correction technology are all important means for improving the precision of the silicon micro gyroscope, wherein the mode matching technology can effectively improve the bias stability and the mechanical sensitivity by eliminating the resonance frequency difference between the driving mode and the detection mode of the silicon micro gyroscope, and can be matched with the closed loop detection and the quadrature error correction technology, can improve the precision of the traditional acceleration signal detection, the mode matching technology is easily interfered by factors such as temperature, consumption and the like, and a large amount of FPGA is required to be applied to realize the high-speed parallel control of the FPGA, so that the FPGA has good control prospect by using a large amount of FPGA digital control algorithms, and the FPGA has good control prospect by using a simple FPGA system.
SUMMERY OF THE UTILITY MODEL
The utility model aims at overcoming the defects of the prior art and providing a multi-loop digital closed-loop control device for silicon MEMS gyroscopes.
The technical scheme is that the kinds of silicon MEMS gyroscope multi-loop digital closed-loop control device comprises a front-end silicon micro-gyroscope detection module, a middle-end analog interface module and a rear-end FPGA module, wherein the silicon micro-gyroscope detection module and the FPGA module are connected through the analog interface module to form three closed-loop control loops;
the silicon micro gyroscope detection module comprises:
pairs of force feedback electrodes Ef + and Ef-, applying to the force feedback mechanism an analog voltage signal generated by the nd or second digital-to-analog converter;
the force feedback mechanism converts the analog voltage signal into electrostatic force to generate an excitation effect on the detection mechanism;
, the force feedback mechanism comprises a force feedback polar plate which is respectively connected with force feedback electrodes Ef + and Ef-and a movable polar plate which is applied with carrier signals, wherein the force feedback electrodes Ef + and Ef-are connected with digital bilateral input signals Vi or digital detection feedback signals Vf, and analog signals are converted and output by a D/A converter;
the detection mechanism converts the excitation action generated by the force feedback mechanism into capacitance variation; under the action of the correction force of the orthogonal correction mechanism and the analog direct-current tuning voltage of the frequency tuning mechanism, orthogonal signals and detection modal frequency are changed;
, the detecting mechanism comprises detecting output polar plates (11, 12) connected with detecting output electrodes Es +, Es-and a movable polar plate (10) for receiving high-frequency carrier signals applied by external equipment, the movable polar plate (10) generates corresponding displacement according to the action of the force feedback mechanism to change the capacitance between the movable polar plate (10) and the detecting output polar plates (11, 12), and the detecting output electrodes Es + and Es-transmit the capacitance conversion quantity to the C/V converter;
, detecting and outputting the capacitance variation of the detection mechanism under the action of the force feedback mechanism;
an orthogonal correction electrode Eq for applying an analog orthogonal correction voltage outputted from the third digital/analog converter to the orthogonal correction mechanism;
the orthogonal correction mechanism converts the digital orthogonal correction signal Vq into a correction force in the detection direction of the silicon micro gyroscope, acts on the detection mechanism and is used for eliminating the orthogonal error of the silicon micro gyroscope;
a frequency tuning electrode Et for applying an analog dc tuning voltage outputted from the fourth digital/analog converter to the frequency tuning mechanism;
the frequency tuning mechanism is used for changing the structural rigidity of the silicon micro gyroscope in the detection direction under the action of the analog direct-current tuning voltage generated by the frequency tuning electrode Et according to the electrostatic negative rigidity effect, changing the detection mode resonant frequency and completing the mode matching of the silicon micro gyroscope;
, the frequency tuning mechanism comprises a tuning polar plate connected to a frequency tuning electrode Et, a common polar plate applied with a carrier signal, the frequency tuning electrode Et is connected with an analog signal which is converted and output by a fourth D/A converter from a digital DC tuning signal Vt, and the electrostatic force between the tuning polar plate and the common polar plate keeps balance in the driving and detecting directions of the silicon micro gyroscope, and is used for changing the rigidity of the silicon micro gyroscope in the detecting direction according to the change of the DC tuning signal Vt, so that the resonant frequency of the detection mode is matched with the resonant frequency of the driving mode.
The analog interface module includes:
the C/V converter converts the capacitance variation output by pairs of detection output electrodes Es +, Es into a voltage signal;
the instrument amplifier is used for carrying out differential amplification on the amplitude of the voltage signal converted by the C/V converter to obtain an analog response signal Vo, wherein the analog response signal Vo comprises bilateral input signal Vi response amplitude information before mode matching and comprises a Coriolis acceleration signal and an orthogonal error signal after mode matching;
the analog/digital converter is used for converting the analog response signal Vo subjected to differential amplification by the instrument amplifier into a digital quantity and outputting the digital quantity to the FPGA module;
the D/A converter converts the digital bilateral input signal Vi generated by the input submodule into an analog voltage signal and outputs the analog voltage signal to the force feedback electrodes Ef + and Ef-;
the second digital/analog converter is used for converting the digital detection feedback signal Vf demodulated by the demodulation submodule into an analog voltage signal and outputting the analog voltage signal to force feedback electrodes Ef + and Ef-;
the third digital/analog converter is used for converting the digital quadrature correction signal Vq demodulated by the demodulation submodule into an analog signal and outputting the analog signal to a quadrature correction electrode Eq;
the fourth digital-to-analog converter converts the digital direct-current tuning signal Vt demodulated by the second demodulation submodule into an analog direct-current tuning voltage and outputs the analog direct-current tuning voltage to a frequency tuning electrode Et;
the FPGA module comprises:
an input submodule for generating and outputting digital bilateral input signals Vi and to a demodulation reference sinw by using a complex multiplication algorithm1t、 sinw2t；
An demodulation submodule for extracting amplitude difference of the analog response signal Vo by square demodulation algorithm and performing PI (proportional-integral) control on the amplitude difference to obtain a digital DC tuning signal Vt;
and the second demodulation submodule demodulates the analog response signal Vo by adopting a multiplication demodulation algorithm after the mode matching is finished, and generates a digital detection feedback signal Vf and a digital quadrature correction signal Vq.
Further , the input submodule includes:
the complex multiplication submodule generates continuous sine values and cosine values of equivalent increased angles by adopting a complex multiplication algorithm and outputs the sine values and the cosine values to the digital oscillator;
the digital oscillator is provided with corresponding frequency control words and phase control words, so that the initial angle and angle increment of a complex multiplication algorithm can be controlled, the frequency and the initial phase of an output signal of the digital oscillator are further controlled, and two paths of input subsw signals cosw are realized1t、cosw2t and two-way demodulator reference sinw1t、sinw2Direct synthesis of t, where the frequency w1And w2Resonant frequency w of driving modedThe difference between them is equal and the difference needs to be greater than the detectionThe resonant frequency difference between the mode and the driving mode is used for avoiding the saturation of the direct current tuning signal;
th adder for inputting subsw signal cosw1t、cosw2t are added to generate a double-sided input signal Vi.
, the demodulation submodule includes a digital demodulator and a digital PI control submodule;
the digital demodulator includes:
multiplier for digital quantity and input subsw signal output by A/D converter1t is multiplied to generate th path product signal;
a second multiplier for comparing the digital value output from the A/D converter with the demodulator reference sinw1t, performing product operation to generate a second path of product signal;
a third multiplier for multiplying the digital quantity output from the A/D converter with the input sub-signal cosw2t, performing product operation to generate a third path of product signals;
a fourth multiplier for comparing the digital value output from the A/D converter with the demodulator reference sinw2t, performing product operation to generate a fourth path of product signal;
the th, second, third and fourth product signals are paths of signals containing DC-like components and AC components;
the IIR filter is used for low-pass filtering the , second, third and fourth product signals to respectively obtain , second, third and fourth direct current signals, wherein the direct current signals comprise amplitude response and phase response information of two sub signals of the bilateral input signal Vi;
the squarer is used for carrying out square operation on th, second, third and fourth direct current signals to obtain th, second, third and fourth direct current signal squares;
the second adder is used for adding the square of the th direct current signal and the square of the second direct current signal to obtain the square sum of the th direct current signal;
the third adder is used for performing addition operation on the squares of the third and fourth types of direct current signals to obtain the square sum of the second type of direct current signals;
the subtracter is used for carrying out difference on the square sum of the class direct current signals and the second class direct current signals to obtain the amplitude difference of two-path sub-signal amplitude response of the bilateral input signal;
the digital PI control submodule comprises:
the reference value presetting module is set to be 0, and when the amplitude difference of amplitude response of two paths of sub signals of the bilateral input signal is the reference value, the digital PI control submodule stops working to obtain an accurate direct current tuning signal;
the second subtracter is used for obtaining the difference value between the amplitude difference of the amplitude response of the two paths of sub signals of the bilateral input signal and the reference value;
and the digital PI controller is used for carrying out PI control on the difference value output by the second subtracter so as to generate the direct current tuning signal Vt.
Further , the second demodulation submodule includes:
a fifth multiplier for multiplying the digital quantity converted by the A/D converter with the driving signal sinwdt is multiplied, the digital quantity comprises a Coriolis acceleration signal and a quadrature error signal, and the product is a fifth product signal comprising a quasi-direct current component and an alternating current component; the drive signal sinwdt is introduced by the drive mode loop of the MEMS gyroscope, where wdIs the drive mode resonant frequency;
a sixth multiplier for multiplying the digital value converted by the A/D converter and the drive detection signal coswdt is multiplied, the digital quantity comprises a Coriolis acceleration signal and a quadrature error signal, and the product is a sixth product signal comprising a quasi-direct current component and an alternating current component; the drive detection signal coswdt is introduced by a drive circuit, where wdIs the drive mode resonant frequency;
the second IIR filter is used for performing low-pass filtering on the fifth path of product signals and outputting fifth type direct current signals;
the third IIR filter is used for performing low-pass filtering on the sixth path of product signals and outputting sixth type direct current signals;
the third subtracter is used for carrying out difference operation on the fifth type direct current signal and the reference value 0 of the second digital PI controller;
the fourth subtracter is used for carrying out difference operation on the sixth type direct current signal and the reference value 0 of the third digital PI controller;
the second PI controller is used for carrying out proportional-integral control on the difference value output by the third subtracter to generate and output the amplitude of the detection feedback signal;
the third PI controller is used for carrying out proportional-integral control on the difference value output by the fourth subtracter to generate and output an orthogonal correction signal Vq;
a seventh multiplier for multiplying the amplitude of the detection feedback signal with the drive detection signal coswdt are multiplied to obtain a detection feedback signal Vf, wherein wdIs the drive mode resonant frequency.
Has the advantages that: compared with the prior art, the utility model has the advantages of as follows:
(1) realizing frequency tuning of the silicon micro gyroscope by using an FPGA module; the control loop is digitized by using a control algorithm of detection feedback and orthogonal correction, so that the digital control loop has high-efficiency data processing capability, and the interference on a control system caused by factors such as temperature change, mutual coupling among loops and the like is effectively inhibited;
(2) the tuning voltage is fed back to the detection mode of the gyroscope, so that closed-loop control is realized, and compared with the previous tuning method, the closed-loop control can realize real-time online mode matching;
(3) the degree of modal matching is corrected by using the silicon micro gyroscope to detect the symmetry of modal amplitude response, so that the difficulty of measuring modal frequency in real time is avoided, and higher tuning precision can be obtained;
(4) the Coriolis acceleration is detected in a detection feedback mode, so that the influence of the mechanical sensitivity increase of the silicon micro gyroscope after mode matching on the working bandwidth can be effectively reduced; meanwhile, an orthogonal correction loop is used for eliminating the orthogonal error of the silicon micro gyroscope, so that the detection accuracy is effectively improved.
Description of the drawings:
fig. 1 is a schematic view of the overall structure of the present invention;
FIG. 2 is a schematic diagram of an input sub-module;
FIG. 3 is a schematic diagram of an demodulation submodule;
FIG. 4 is a schematic diagram of a second demodulation submodule;
FIG. 5 is a schematic diagram of a frequency tuning mechanism;
FIG. 6 is a schematic diagram of an orthogonality correction mechanism;
FIG. 7 is a schematic diagram of a force feedback mechanism and a detection mechanism.
Detailed Description
The present invention will be described in further detail in with reference to the drawings and the detailed description.
The embodiment provides silicon MEMS gyroscope multi-loop digital closed-loop control devices, which comprise a silicon micro-gyroscope detection module positioned at the front end, an analog interface module positioned at the middle end and an FPGA module positioned at the rear end, wherein the silicon micro-gyroscope detection module and the FPGA module are connected through the analog interface module to form three closed-loop control loops.
Referring to fig. 1, it shows the overall structure diagram of the present invention.
The silicon micro gyroscope detection module consists of pairs of force feedback electrodes Ef + and Ef-, a force feedback mechanism, a detection mechanism, pairs of detection output electrodes Es + and Es-, an orthogonal correction electrode Eq, an orthogonal correction mechanism, a frequency tuning electrode Et and a frequency tuning mechanism.
In this embodiment, the analog interface module includes a C/V converter using an MB6S chip, an instrumentation amplifier using an AD8221 chip, an analog/digital converter using an AD7767 chip, and a , two, three, or four digital/analog converters with CS4344 chips.
In this embodiment, the FPGA module uses an EP3C55F484I7 chip, and the module includes an input sub-module, a th demodulation sub-module, and a second demodulation sub-module.
The input submodule in the FPGA module is connected with a D/A converter, a digital bilateral input signal Vi generated by the input submodule is converted into an analog voltage signal, a D/A converter is respectively connected with force feedback electrodes Ef + and Ef-, and the analog bilateral input signal is applied to a force feedback mechanism.
The detection output electrodes Es + and Es-are used to output the capacitance variation of the detection mechanism by the input signal, which is converted into a voltage signal using a C/V converter since the capacitance variation cannot be directly measured. The C/V converter and the C/V converter are connected with an instrument amplifier and are used for carrying out differential amplification on the amplitude of the voltage signal, and the instrument amplifier is used for carrying out differential amplification on the amplitude of the voltage signal. The amplified analog signal is an analog response signal Vo containing bilateral input signal response amplitude information, and therefore the analog response signal Vo is converted into digital quantity through an analog-to-digital converter and is input into the FPGA module to be subjected to amplitude extraction and processing.
The demodulation submodule is used for extracting the amplitude difference of the response signal Vo, generating a digital direct current tuning signal Vt, converting the digital direct current tuning signal Vt into an analog direct current tuning voltage through a fourth digital-to-analog converter connected with the module, inputting the analog direct current tuning voltage to a frequency tuning electrode Et, and further acting on a frequency tuning mechanism.
Since the mode matching results in an increase in the mechanical sensitivity of the gyroscope, to reduce the effect of the mode matching on the operating bandwidth of the gyroscope, closed-loop detection is used to detect the coriolis acceleration, and a quadrature error correction mechanism is used to eliminate the quadrature error, and step , when the mode matching is completed, the response signal Vo includes a coriolis acceleration signal and a quadrature error signal.
The second demodulation submodule is used for converting the demodulated digital detection feedback signal Vf into an analog detection feedback signal through a second digital/analog converter connected with the module and inputting the analog detection feedback signal to force feedback electrodes Ef + and Ef-, and simultaneously, the second demodulation submodule also outputs a digital orthogonal correction signal Vq to a third digital/analog converter connected with the module and converts the digital orthogonal correction signal Vq into an analog signal, and then the analog signal is input to an orthogonal correction electrode Eq., the electrostatic force generated by the analog detection feedback signal is acted on a detection mechanism by the force feedback mechanism to form closed loop detection feedback, and meanwhile, when the orthogonal correction mechanism is acted by the orthogonal correction signal, correction forces in detection directions are generated and acted on the detection mechanism to eliminate orthogonal errors.
The FPGA module is mainly used for completing bilateral input signals ViDemodulation reference, DC tuning signal VtAnd an algorithm for generating the detection feedback signal Vf and the quadrature correction signal Vq.
For example, fig. 2 shows a schematic diagram of an input submodule for generating an input signal and a demodulation reference, the input submodule mainly comprises a complex multiplication submodule, a digital oscillator and an th adder, the complex multiplication submodule generates a sine value and a cosine value of continuous equal increment angles and outputs the sine value and the cosine value to the digital oscillator, and two paths of input subsw signals cosw can be directly synthesized by setting corresponding frequency control words and phase control words of the digital oscillator1t、cosw2t and two-way demodulation reference sinw1t、 sinw2t, wherein the frequency w1And w2The difference value is equal to the difference value between the resonance frequencies of the driving modes, and the difference value needs to be larger than the resonance frequency difference between the detection mode and the driving mode. Input sub-signal cosw1t、cosw2t generates the bilateral input signal Vi through the th adder.
FIG. 3 is a schematic diagram of the th demodulation sub-module for generating a tuning voltage signal th demodulation sub-module mainly includes a digital demodulator and a digital PI control sub-module, wherein the digital demodulator is composed of a four-way multiplier, a th IIR filter, a squarer, a second adder, a third adder and a th subtracteroAfter being input into the FPGA module by the A/D converter, the signals are respectively connected with two paths of input signals cosw1t、cosw2t and two-way demodulation reference sinw1t、sinw2t is multiplied by th, second, third and fourth multipliers, the four-way products each containing signals of like DC component and AC component, in order toFiltering out AC component in product, low-pass filtering four-way product with IIR filter, filtering to obtain DC-like signal containing reference signal VoBecause the silicon micro-gyroscope detects the symmetry of modal amplitude response, the amplitude difference is 0 in a complete modal matching state, a reference value in a digital PI control sub-module is set to be 0, and the difference value between the amplitude difference and the reference value is obtained through the second subtracter and input into a digital PI controller to generate a direct current tuning Vt signal.
Fig. 4 shows a schematic diagram of a second demodulation submodule, which is used for generating a detection feedback signal and a quadrature correction signal. The second demodulation submodule mainly comprises a fifth multiplier, a sixth multiplier, a seventh multiplier, a second IIR filter, a third subtracter, a fourth subtracter, a second PI controller and a third PI controller. Wherein, the Coriolis acceleration signal and the orthogonal error signal are input into the FPGA module through the analog/digital converter and then are combined with the signal sinwdt、coswdt are multiplied by a fifth multiplier and a sixth multiplier respectively to generate paths of fifth product signals and sixth product signals containing quasi-DC components and AC components, wherein wdIs the driving signal frequency, and the signal sinwdt、coswdt is introduced by the drive circuit. And the fifth and sixth paths of product signals are subjected to low-pass filtering through a second IIR filter and a third IIR filter respectively, only DC-like signals are reserved at the output of the filters, and when the driving mode reaches a resonance state and the quadrature error is completely inhibited, the DC-like signals of the detection feedback loop and the quadrature correction loop are all stabilized at 0, so that the reference values of the second digital PI controller and the third digital PI controller are both set to be 0. And obtaining a difference value between the quasi-direct current signal and the reference value through a third subtracter and a fourth subtracter, inputting the difference value into a second digital PI controller and a third digital PI controller, and outputting the difference value as the amplitude of the detection feedback signal and the quadrature correction signal Vq. Detecting amplitude and signal cosw of feedback signaldAnd t is multiplied by a seventh multiplier to obtain a detection feedback signal Vf.
Referring to fig. 5, a schematic diagram of a frequency tuning mechanism is shown, which is composed of a tuning plate 1 and a common plate 2, wherein, after a digital dc tuning signal Vt connected to the tuning plate 1 and a frequency tuning electrode Et. is converted into an analog signal by a fourth digital/analog converter, the analog signal is inputted to the tuning electrode Et, and carrier signals are applied to the common plate 2, and an electrostatic force between the tuning plate 1 and the common plate 2 is kept balanced in a driving and detecting direction.
As shown in fig. 6, which shows a schematic diagram of an orthogonal correction mechanism composed of a correction pad 4 and a common pad 5, wherein the correction pad 4 is connected to an orthogonal correction electrode Eq. And after the third digital orthogonal correction signal Vq is converted into an analog signal by a digital-to-analog converter, the analog signal is input into an orthogonal correction electrode Eq, and simultaneously a carrier signal is applied to the common polar plate 5, because the vertical distance between the comb teeth of the common polar plate 5 and the correction polar plate 4 is unequal, the electrostatic force generated by the direct current orthogonal correction signal Vq in the detection direction has unbalance, so that an orthogonal correction force 6 is generated in the detection direction, and the correction of the orthogonal error of the detection mode is realized.
Referring to fig. 7, there is shown a schematic diagram of a force feedback mechanism consisting of pairs of force feedback plates 7 and 8 and a movable plate 9, wherein the force feedback plates 7 and 8 are connected to force feedback electrodes Ef + and Ef-, respectively, a digital bilateral input signal Vi is converted into an analog signal by a d/a converter and then input to the force feedback electrodes Ef + and Ef-, and at the same time, a carrier signal is applied to the movable plate 9. the bilateral input signal Vi or a sense feedback signal Vf is converted by a d/a converter or a second d/a converter to generate an electrostatic force to displace the "push" or "pull" movable plate 9 in a sense direction and then act on the sensing mechanism 4. the movable plate 10 in the sensing mechanism 4 will generate corresponding displacements and thus change the capacitance between the movable plate 10 and the sense output plates 11 and 12. sense output electrodes Es + and Es-are connected to sense output plates 11 and 12, respectively, to convert the capacitance into a C/V signal for processing.
Claims (8)
- The multi-loop digital closed-loop control device of the silicon MEMS gyroscopes is characterized by comprising a front silicon micro gyroscope detection module, a middle analog interface module and a rear FPGA module, wherein the silicon micro gyroscope detection module and the FPGA module are connected through the analog interface module to form three closed-loop control loops;the silicon micro gyroscope detection module comprises:applying an analog voltage signal Vo generated by the th digital-to-analog converter or the second digital-to-analog converter to the force feedback mechanism;the force feedback mechanism converts the analog voltage signal Vo into electrostatic force to generate an excitation effect on the detection mechanism;the detection mechanism converts the excitation action generated by the force feedback mechanism into capacitance variation; under the action of the correction force of the orthogonal correction mechanism and the analog direct-current tuning voltage of the frequency tuning mechanism, orthogonal signals and detection modal frequency are changed;, detecting and outputting the capacitance variation of the detection mechanism under the action of the force feedback mechanism;an orthogonal correction electrode Eq for applying an analog orthogonal correction voltage outputted from the third digital/analog converter to the orthogonal correction mechanism;the orthogonal correction mechanism converts the digital orthogonal correction signal Vq into a correction force in the detection direction of the silicon micro gyroscope, acts on the detection mechanism and is used for eliminating the orthogonal error of the silicon micro gyroscope;a frequency tuning electrode Et for applying an analog dc tuning voltage outputted from the fourth digital/analog converter to the frequency tuning mechanism;the frequency tuning mechanism is used for changing the structural rigidity of the silicon micro gyroscope in the detection direction under the action of the analog direct-current tuning voltage generated by the frequency tuning electrode Et according to the electrostatic negative rigidity effect, changing the detection mode resonant frequency and completing the mode matching of the silicon micro gyroscope;the analog interface module includes:the C/V converter converts the capacitance variation output by pairs of detection output electrodes Es +, Es into a voltage signal;the instrument amplifier is used for carrying out differential amplification on the amplitude of the voltage signal converted by the C/V converter to obtain an analog response signal Vo, wherein the analog response signal Vo comprises bilateral input signal Vi response amplitude information before mode matching and comprises a Coriolis acceleration signal and an orthogonal error signal after mode matching;the analog/digital converter is used for converting the analog response signal Vo subjected to differential amplification by the instrument amplifier into a digital quantity and outputting the digital quantity to the FPGA module;the D/A converter converts the digital bilateral input signal Vi generated by the input submodule into an analog voltage signal and outputs the analog voltage signal to the force feedback electrodes Ef + and Ef-;the second digital/analog converter is used for converting the digital detection feedback signal Vf demodulated by the demodulation submodule into an analog voltage signal and outputting the analog voltage signal to force feedback electrodes Ef + and Ef-;the third digital/analog converter is used for converting the digital quadrature correction signal Vq demodulated by the demodulation submodule into an analog signal and outputting the analog signal to a quadrature correction electrode Eq;the fourth digital-to-analog converter converts the digital direct-current tuning signal Vt demodulated by the second demodulation submodule into an analog direct-current tuning voltage and outputs the analog direct-current tuning voltage to a frequency tuning electrode Et;the FPGA module comprises:an input submodule for generating and outputting digital bilateral input signals Vi and to a demodulation reference sinw by using a complex multiplication algorithm1t、sinw2t；An demodulation submodule for extracting the amplitude difference of the analog response signal Vo by using a square demodulation algorithm and performing PI control on the amplitude difference to obtain a digital DC tuning signal Vt;and the second demodulation submodule demodulates the analog response signal Vo by adopting a multiplication demodulation algorithm after the mode matching is finished, and generates a digital detection feedback signal Vf and a digital quadrature correction signal Vq.
- 2. The silicon MEMS gyroscope multi-loop digitized closed-loop control device of claim 1, wherein: the frequency tuning mechanism comprises a tuning polar plate (1) connected to a frequency tuning electrode Et, and a common polar plate (2) applied with a carrier signal, wherein the frequency tuning electrode Et is connected with an analog signal which is converted and output by a fourth digital-to-analog converter from a digital direct-current tuning signal Vt; and electrostatic force between the tuning polar plate (1) and the common polar plate (2) keeps balance in the driving and detecting directions of the silicon micro gyroscope, and is used for changing the rigidity (3) of the silicon micro gyroscope in the detecting direction according to the change of the direct current tuning signal Vt so as to enable the resonant frequency of the detection mode to be matched with the resonant frequency of the driving mode.
- 3. The silicon MEMS gyroscope multi-loop digitized closed-loop control device of claim 1, wherein: the orthogonal correction mechanism comprises a correction plate (4) connected to an orthogonal correction electrode Eq and a common plate (5) applied with a carrier signal; the orthogonal correction electrode Eq is accessed to an analog signal which is converted and output by a digital orthogonal correction signal Vq through a third digital-to-analog converter, the vertical distance between the comb teeth of the common polar plate (5) and the correction polar plate (4) is unequal, and the orthogonal correction electrode Eq is used for generating an orthogonal correction force (6) in the detection direction according to the unbalance of electrostatic force generated by the direct current orthogonal correction signal Vq in the detection direction and correcting the orthogonal error of the detection mode.
- 4. The silicon MEMS gyroscope multi-loop digital closed-loop control device of claim 1, wherein the force feedback mechanism comprises pairs of force feedback plates (7, 8) respectively connected with force feedback electrodes Ef + and Ef-and a movable plate (9) applied with carrier signals, the force feedback electrodes Ef + and Ef-are connected with digital bilateral input signals Vi or digital detection feedback signals Vf, and are converted by a D/A converter to output analog signals, the analog signals output by the D/A converter are converted by the force feedback plates (7, 8) to generate electrostatic force, and the movable plate (9) is pushed or pulled to generate displacement along the detection direction and act on the detection mechanism.
- 5. The multi-loop digital closed-loop control device of the silicon MEMS gyroscope according to claim 1, wherein the detection mechanism comprises a detection output electrode (11, 12) connected with detection output electrodes Es +, Es-and a movable electrode (10) receiving a carrier signal applied by an external device, the movable electrode (10) generates corresponding displacement according to the action of a force feedback mechanism to change the capacitance between the movable electrode (10) and the detection output electrode (11, 12), and the detection output electrodes Es + and Es-transmit the capacitance conversion quantity to the C/V converter.
- 6. The silicon MEMS gyroscope multi-loop digitized closed-loop control apparatus of claim 1, wherein the input sub-module comprises:the complex multiplication submodule generates continuous sine values and cosine values of equivalent increased angles by adopting a complex multiplication algorithm and outputs the sine values and the cosine values to the digital oscillator;the digital oscillator is provided with corresponding frequency control words and phase control words to control the initial angle and angle increment of a complex multiplication algorithm, further control the frequency and initial phase of an output signal of the digital oscillator and directly synthesize two paths of input subs signals cosw1t、cosw2t and two-way demodulator reference sinw1t、sinw2t, where the frequency w1And w2Resonant frequency w of driving modedThe difference value is equal to each other, and the difference value needs to be larger than the resonance frequency difference between the detection mode and the driving mode;th adder for inputting subsw signal cosw1t、cosw2t are added to generate a double-sided input signal Vi.
- 7. The silicon MEMS gyroscope multi-loop digitized closed-loop control device of claim 1, wherein the demodulation sub-module comprises a digital demodulator and a digital PI control sub-module;the digital demodulator includes:multiplication No. Device for the output of a digital quantity and an input subsw signal of an analog-to-digital converter1t is multiplied to generate th path product signal;a second multiplier for comparing the digital value output from the A/D converter with the demodulator reference sinw1t, performing product operation to generate a second path of product signal;a third multiplier for multiplying the digital quantity output from the A/D converter with the input sub-signal cosw2t, performing product operation to generate a third path of product signals;a fourth multiplier for comparing the digital value output from the A/D converter with the demodulator reference sinw2t, performing product operation to generate a fourth path of product signal;the th, second, third and fourth paths of product signals are all paths of signals containing quasi-direct current components and alternating current components;the IIR filter is used for low-pass filtering the , second, third and fourth product signals to respectively obtain , second, third and fourth direct current signals, wherein the direct current signals comprise amplitude response and phase response information of two sub signals of the bilateral input signal Vi;the squarer is used for carrying out square operation on th, second, third and fourth direct current signals to obtain th, second, third and fourth direct current signal squares;the second adder is used for adding the square of the th direct current signal and the square of the second direct current signal to obtain the square sum of the th direct current signal;the third adder is used for performing addition operation on the squares of the third and fourth types of direct current signals to obtain the square sum of the second type of direct current signals;the subtracter is used for carrying out difference on the square sum of the class direct current signals and the second class direct current signals to obtain the amplitude difference of two-path sub-signal amplitude response of the bilateral input signal;the digital PI control submodule comprises:the reference value presetting module is set to be 0, and when the amplitude difference of amplitude response of two paths of sub signals of the bilateral input signal is the reference value, the digital PI control submodule stops working to obtain an accurate direct current tuning signal;the second subtracter is used for obtaining the difference value between the amplitude difference of the amplitude response of the two paths of sub signals of the bilateral input signal and the reference value;and the digital PI controller is used for carrying out PI control on the difference value output by the second subtracter to generate a direct current tuning signal Vt.
- 8. The silicon MEMS gyroscope multi-loop digitized closed-loop control device of claim 1 wherein the second demodulation sub-module comprises:a fifth multiplier for multiplying the digital quantity converted by the A/D converter with the driving signal sinwdt is multiplied, the digital quantity comprises a Coriolis acceleration signal and a quadrature error signal, and the product is a fifth product signal comprising a quasi-direct current component and an alternating current component; the drive signal sinwdt is introduced by the drive mode loop of the MEMS gyroscope, where wdIs the drive mode resonant frequency;a sixth multiplier for multiplying the digital value converted by the A/D converter and the drive detection signal coswdt is multiplied, the digital quantity comprises a Coriolis acceleration signal and a quadrature error signal, and the product is a sixth product signal comprising a quasi-direct current component and an alternating current component; the drive detection signal coswdt is introduced by a drive circuit, where wdIs the drive mode resonant frequency;the second IIR filter is used for performing low-pass filtering on the fifth path of product signals and outputting fifth type direct current signals;the third IIR filter is used for performing low-pass filtering on the sixth path of product signals and outputting sixth type direct current signals;the third subtracter is used for carrying out difference operation on the fifth type direct current signal and the reference value 0 of the second digital PI controller;the fourth subtracter is used for carrying out difference operation on the sixth type direct current signal and the reference value 0 of the third digital PI controller;the second PI controller is used for carrying out proportional-integral control on the difference value output by the third subtracter to generate and output the amplitude of the detection feedback signal;the third PI controller is used for carrying out proportional-integral control on the difference value output by the fourth subtracter to generate and output an orthogonal correction signal Vq;a seventh multiplier for multiplying the amplitude of the detection feedback signal with the drive detection signal coswdt are multiplied to obtain a detection feedback signal Vf, wherein wdIs the drive mode resonant frequency.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110160514A (en) * | 2019-05-31 | 2019-08-23 | 东南大学 | A kind of silicon MEMS gyroscopes multiloop Digitized Closed Loop control device |
| CN112880657A (en) * | 2021-01-15 | 2021-06-01 | 清华大学 | System on chip for demodulating and controlling MEMS resonant gyroscope signal |
| CN116499445A (en) * | 2023-06-30 | 2023-07-28 | 成都市晶蓉微电子有限公司 | MEMS gyroscope digital output monolithic integration system |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110160514A (en) * | 2019-05-31 | 2019-08-23 | 东南大学 | A kind of silicon MEMS gyroscopes multiloop Digitized Closed Loop control device |
| CN110160514B (en) * | 2019-05-31 | 2024-01-26 | 东南大学 | Multi-loop digital closed-loop control device of silicon MEMS gyroscope |
| CN112880657A (en) * | 2021-01-15 | 2021-06-01 | 清华大学 | System on chip for demodulating and controlling MEMS resonant gyroscope signal |
| CN112880657B (en) * | 2021-01-15 | 2023-02-07 | 清华大学 | System on chip for demodulating and controlling MEMS resonant gyroscope signal |
| CN116499445A (en) * | 2023-06-30 | 2023-07-28 | 成都市晶蓉微电子有限公司 | MEMS gyroscope digital output monolithic integration system |
| CN116499445B (en) * | 2023-06-30 | 2023-09-12 | 成都市晶蓉微电子有限公司 | MEMS gyroscope digital output monolithic integration system |
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