CN203163738U - System for eliminating in-phase errors of micromechanical gyroscopes based on difference - Google Patents
System for eliminating in-phase errors of micromechanical gyroscopes based on difference Download PDFInfo
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- CN203163738U CN203163738U CN 201320101734 CN201320101734U CN203163738U CN 203163738 U CN203163738 U CN 203163738U CN 201320101734 CN201320101734 CN 201320101734 CN 201320101734 U CN201320101734 U CN 201320101734U CN 203163738 U CN203163738 U CN 203163738U
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Abstract
The utility model discloses a system for eliminating in-phase errors of micromechanical gyroscopes based on difference. The system is characterized in that the input end of a phase shifter is connected with a drive signal and the output end thereof is connected with a 90-degree phase shifter and a first phase-sensitive demodulation module; the input end of the first phase-sensitive demodulation module is connected with a micromechanical gyroscope angular speed extraction signal and the output end thereof is simultaneously connected with a difference circuit and a controlled switch; the output end of the controlled switch is connected with a data memory; the output end of the data memory is connected with the difference circuit; the output end of the 90-degree phase shifter is connected with a second phase-sensitive demodulation module; the input end of the second phase-sensitive demodulation module is connected with the micromechanical gyroscope angular speed extraction signal and the output end thereof is connected with a peak detection circuit; and the output end of the peak detection circuit is connected with the phase shifter. The system effectively eliminates in-phase errors, thus improving the measurement accuracy of micromechanical gyroscopes.
Description
Technical field
The utility model relates to a kind of based on making difference elimination micromechanical gyro in-phase error system, refers in particular to a kind of based on making the poor capacitive micro mechinery gyroscope in-phase error system of eliminating.
Background technology
Even gyro is a kind of sensor that extraneous reference signal also can detect moving object self attitude and state variation that do not have, its function is the angular velocity of responsive movable body.Based on the third generation micro-mechanical gyroscope of MEMS technology, have that volume is little, in light weight, bandwidth is big, an advantage such as low in energy consumption and impact strength height, be widely used in military affairs and civil area.
In the prior art, the sensitive structure of capacitive micro mechinery gyroscope instrument adopts body silicon or surface silicon processes to be made, because size is extremely small, is generally micron dimension, under the existing processes condition, is difficult to the control machining precision.Therefore, sensitive structure exists fabrication error in manufacture process.This error directly influences key technical index such as the nonlinearity of stability, scaling factor of output at silicon micromechanical gyroscope zero point and bandwidth of operation.Simultaneously, the restriction micromechanical gyro needs the application in accurate measured angular rate signal field at aerospace, precise guidance, exact instrument and deep-sea detecting etc.
The various fabrication errors of sensitive structure can be transformed into quadrature error and two kinds of error signals of in-phase error in the processing procedure of micromechanical gyro extraction angular velocity signal.Quadrature error and in-phase error are two kinds of main undesired signals in the angular velocity signal leaching process, are the principal elements of restriction micromechanical gyro overall performance.
Wherein, the driving shaft that in-phase error derives from the micro-mechanical gyroscope sensor construction with detect the incomplete vertical of axle, during load driver voltage, driving force the detection side to existing component, this power is consistent with Coriolis power (coriolis force) direction that will detect, phase place is also consistent, causes being difficult to distinguish in signal processing angular velocity signal in-phase error signal therewith.Because in-phase error is all identical with frequency and the phase place of Coriolis acceleration signal, difficulty is all compared in separation and inhibition for this error signal, in the prior art, considerably less about the signal processing scheme that suppresses in-phase error, lack generally, and can effectively eliminate or suppress the signal processing scheme of in-phase error.
As shown in Figure 1, traditional micromechanical gyro angular velocity signal extracts signal processing circuitry.By the principle of work of micromechanical gyro as can be known, obtain the numerical value of input angular velocity signal, must measure sensitive structure and detect the changes in capacitance amount.Yet, the changes in capacitance amount is extremely faint, usually all be submerged in the 1/f noise of low frequency, in order to suppress 1/f noise, as shown in Figure 1, angular velocity extracts the method that circuit generally all adopts the high frequency carrier modulation, utilize integrator to constitute charge amplifier, to detect the changes in capacitance value and be transformed into voltage signal, then through twice phase demodulation process, demodulation for the first time obtains and detects the voltage signal that the changes in capacitance amount is directly proportional; Demodulation for the second time obtains the voltage signal that is directly proportional with the input angular velocity signal.The final output signal of described extraction comprises angular velocity signal, quadrature error signal and in-phase error signal.
Below analyze when not having phase error the output signal when considering quadrature error and in-phase error:
As shown in Figure 1, for the first time behind the phase demodulation, the signal that obtains
V In (t)Be and detect the voltage signal that the changes in capacitance amount is directly proportional, when having quadrature error and in-phase error,
V In (t)Be angular velocity signal, quadrature error signal and in-phase error signal three sum, can be expressed as follows:
Wherein,
V Cor The amplitude of expression Coriolis acceleration signal;
V In-p The amplitude of expression in-phase error signal;
V Quc The amplitude of expression quadrature error signal; W represents the angular velocity signal imported; ω represents that micromechanical gyro drives the angular frequency of signal;
ΦExpression drives the phase place of signal.The in-phase error signal all equates with Coriolis acceleration signal frequency and phase place as can be seen from formula (1), and quadrature error signal equates with Coriolis acceleration signal frequency, phase phasic difference 90.If there is not a phase error signal, the reference signal of phase demodulation for the second time then
V Ref (t)Drive signal exactly, it
V In (t)With carry out multiplying, computing is as follows:
Eliminating frequency through low-pass filtering is the high frequency item of 2 ω, the output signal that then obtains
V Out1 (t)For:
This shows that the reference signal of phase demodulation is for driving signal for the second time
V Ref (t)=V d Cos(ω t+
Φ) time, comprising angular velocity signal and in-phase error signal in the final output signal, quadrature error is eliminated fully.
Reference signal as if the phase demodulation second time
V Ref (t)With the driving signal in orthogonal, also be that its expression formula is
, with it
V In (t)With carry out multiplying, computing is as follows:
Eliminating frequency through low-pass filtering is the high frequency item of 2 ω, the output signal that then obtains
V Out2 (t)For:
This shows, as if the reference signal of the phase demodulation second time
V Ref (t)During with the driving signal in orthogonal, final output signal is pure quadrature error signal.
Below analyze when having phase error the output signal when considering quadrature error and in-phase error:
AC signal will inevitably cause the skew of phase place in transmission and processing process, so phase error is difficult to avoid in the reality, thus should the situation that phase error exists be taken in, when considering phase error
V In (t)Need to represent with following equation:
Δ in the formula (6)
ΦBe the phase error that signal processing is introduced, this moment is to drive signal as the reference signal of the phase demodulation second time
V Ref (t)=V d Cos(ω t+
Φ), through the final output signal after the low-pass filtering be:
Comparison expression (7) and formula (3) when having phase error, if the reference signal of phase demodulation then comprises angular velocity signal and in-phase error signal for driving signal in the final output signal for the second time, also comprise quadrature error signal, the phase error Δ as can be known
ΦMore little, sin Δ then
ΦMore level off to zero, quadrature error signal is also more little.
Reference signal as if the phase demodulation second time
V Ref (t)With the driving signal in orthogonal, also be that its expression formula is
, through the final output signal after the low-pass filtering be at this moment:
Comparison expression (8) and formula (5) as can be known, when having phase error, if the reference signal of phase demodulation for the second time
V Ref (t)During with the driving signal in orthogonal, then comprise quadrature error signal in the final output signal, also comprise angular velocity signal and in-phase error signal, the phase error Δ
ΦMore little, sin Δ then
ΦMore level off to zero, angular velocity and in-phase error signal are also more little.
Usually the amplitude of quadrature error signal is much larger than the amplitude of in-phase error and angular velocity signal, and when three signals were superimposed, quadrature error played a leading role.Therefore in the formula (8), first on equation the right plays a major role, and works as Δ
ΦWhen equalling zero, the maximal value that it can reach is got on first on equation the right, and second on equation the right is zero in this up-to-date style (8), also is that angular velocity signal and in-phase error signal are zero, and formula (8) the right only comprises pure quadrature error signal.In addition, work as Δ
ΦWhen equalling zero, formula (7) the right only comprises angular velocity signal and in-phase error signal, and quadrature error signal is eliminated only remaining in-phase error signal and useful angular velocity signal fully.
Traditional micromechanical gyro angular velocity signal extracts signal processing circuitry, and in-phase error can't be eliminated by this system.
The utility model content
The purpose of this utility model is to provide a kind of and eliminates micromechanical gyro in-phase error system based on making difference, and it effectively eliminates in-phase error, thereby improves the measuring accuracy of micromechanical gyro.
For reaching above-mentioned purpose, solution of the present utility model is:
A kind of based on making difference elimination micromechanical gyro in-phase error system, comprise peak detection circuit, the first phase demodulation module, the second phase demodulation module, phase shifter, 90
oPhase shifter, data-carrier store, controlled switch and make difference circuit; Phase shifter input termination drives signal, output termination 90
oPhase shifter and the first phase demodulation module; The first phase demodulation module input connects micromechanical gyro angular velocity and extracts signal, and output terminal connects simultaneously makes difference circuit and controlled switch, controlled switch output termination data-carrier store, and data-carrier store output termination is made difference circuit;
90
oThe phase shifter output termination second phase demodulation module, the input termination micromechanical gyro angular velocity of the second phase demodulation module extracts signal, and the output termination connects peak detection circuit, peak detection circuit output termination phase shifter.
Further, the first phase demodulation module is made up of low-pass filter and phase demodulation circuit, and the input end of phase demodulation circuit connects phase shifter simultaneously and micromechanical gyro angular velocity extracts signal, low-pass filter of output termination; Low-pass filter connects simultaneously makes difference circuit and controlled switch.
Further, the second phase demodulation module is made up of low-pass filter and phase demodulation circuit, and the input end of phase demodulation circuit connects 90 simultaneously
oPhase shifter and micromechanical gyro angular velocity extract signal, low-pass filter of output termination; Low-pass filter connects peak detection circuit.
Further, also comprise high frequency carrier device, charge amplifier, filter amplifier, the quick demodulation module of third phase and signal amplifier; The electric capacity of the input termination micromechanical gyro of high frequency carrier device, output termination charge amplifier and the quick demodulation module of third phase; Charge amplifier connects filter amplifier, and filter amplifier connects the input end of the quick demodulation module of third phase, the output termination signal amplifier of the quick demodulation module of third phase, and signal amplifier connects the first phase demodulation module and the second phase demodulation module respectively.
Further, the quick demodulation module of third phase is made up of low-pass filter and phase demodulation circuit, and the input end of phase demodulation circuit connects filter amplifier and high frequency carrier device, low-pass filter of output termination simultaneously; Low-pass filter connects signal amplifier.
A kind of based on making difference elimination micromechanical gyro in-phase error method, may further comprise the steps:
Step 1 is extracted input signal, and described input signal comprises angular velocity signal, quadrature error signal and in-phase error signal;
After adopting such scheme, the utility model phase shifter, 90
oPhase shifter, the second phase demodulation circuit, second low-pass filter and peak detection circuit are configured to a feedback control system.
When peak detection circuit detects the phase of input signals error and is zero, the FEEDBACK CONTROL phase shifter, the driving signal is equated with the angular velocity signal phase place, drive signal and import the first phase demodulation circuit through phase shifter, do multiplying with input signal and the filtered signal of first low-pass filter is angular velocity signal and in-phase error signal.
Difference circuit is made in the signal input that will contain in-phase error signal and angular velocity signal, and is poor with the in-phase error signal of data-carrier store output, and the signal after work differs from is angular velocity signal and as final output signal.
Therefore, the utility model is when finishing the angular velocity signal extraction, compensation in-phase error signal is to the influence of useful Coriolis acceleration signal, thereby improve key technical index such as the nonlinearity of stability, scaling factor of output at micromechanical gyro zero point and bandwidth of operation, significantly improve the overall performance of silicon micromechanical gyroscope, reach the purpose of utilizing signal processing compensate for process error, improve the measuring accuracy of micromechanical gyro.
Description of drawings
Fig. 1 is that prior art micromechanical gyro angular velocity signal extracts schematic diagram;
Fig. 2 is structural representation of the present utility model;
Fig. 3 is the utility model implementation system synoptic diagram.
Label declaration
Phase shifter 1 90
o Phase shifter 2
The first phase demodulation module, 3 phase demodulation circuit 31
Low-pass filter 32 second phase demodulation modules 4
Controlled switch 5 is made difference circuit 6
Data-carrier store 7 peak detection circuits 8
High frequency carrier device 10 charge amplifiers 20
The quick demodulation module 40 of filter amplifier 30 third phases
Embodiment
Below in conjunction with drawings and the specific embodiments the utility model is elaborated.
Consult Fig. 2 and shown in Figure 3, what the utility model disclosed is a kind of based on making difference elimination micromechanical gyro in-phase error system, comprises phase shifter 1,90
o Phase shifter 2, the first phase demodulation module 3, the second phase demodulation module 4, controlled switch 5, make difference circuit 6, data-carrier store 7 and peak detection circuit 8.
Phase shifter 1 input termination drives signal
V Ref (t)=V d Cos(ω t+
Φ), output termination 90
o Phase shifter 2 and the first phase demodulation module 3.
The first phase demodulation module, 3 input termination micromechanical gyro angular velocity extract signal, described extraction signal comprise angular velocity signal, quadrature error signal and in-phase error signal, output terminal connects simultaneously makes difference circuit 5 and controlled switch 6, controlled switch 6 output termination data-carrier stores 7, data-carrier store 7 output terminations are made difference circuit 5.
The first phase demodulation module 3 is made up of phase demodulation circuit 31 and low-pass filter 32, and the input end of phase demodulation circuit 31 connects phase shifter 1 simultaneously and micromechanical gyro angular velocity extracts signal, low-pass filter of output termination 32; Low-pass filter 32 connects simultaneously makes difference circuit 5 and controlled switch 6.
90
oThe phase shifter 2 output terminations second phase demodulation module 4, the input termination micromechanical gyro angular velocity of the second phase demodulation module 4 extracts signal, described extraction signal comprise angular velocity signal, quadrature error signal and in-phase error signal, the output termination connects peak detection circuit 8, peak detection circuit 8 output termination phase shifters 1.
The second phase demodulation module 4 is made up of phase demodulation circuit 41 and low-pass filter 42, and the input end of phase demodulation circuit 41 connects 90 simultaneously
o Phase shifter 2 and micromechanical gyro angular velocity extract signal, low-pass filter of output termination 42; Low-pass filter 42 connects peak detection circuit 8.
The utility model also comprises high frequency carrier device 10, charge amplifier 20, filter amplifier 30, the quick demodulation module 40 of third phase and signal amplifier 50.
The electric capacity of the input termination micromechanical gyro of high frequency carrier device 10, output termination charge amplifier 20 and the quick demodulation module 40 of third phase; Charge amplifier 20 connects filter amplifier 30, filter amplifier 30 connects the input end of the quick demodulation module 40 of third phase, the output termination signal amplifier 50 of the quick demodulation module 40 of third phase, and signal amplifier 50 connects the first phase demodulation module 3 and the second phase demodulation module 4 respectively.
The quick demodulation module 40 of third phase is made up of phase demodulation circuit 401 and low-pass filter 402, and the input end of phase demodulation circuit 401 connects filter amplifier 30 and high frequency carrier device 10, low-pass filter of output termination 402 simultaneously; Low-pass filter 402 connects signal amplifier 50.
The utility model phase shifter 1,90
o Phase shifter 2, the second phase demodulation module 4 and peak detection circuit 8 are configured to a feedback control system.Peak detection circuit 8 is in order to detect the amplitude output signal value of above-mentioned background technology Chinese style (8), amplitude output signal value FEEDBACK CONTROL phase shifter 1, this phase shifter 1 generation demodulated reference signal V second time
Ref3(t) phase value.When peak detection circuit 8 reaches maximal value, reference signal V
Ref3(t) phase place equates with the angular velocity signal phase place of input under the effect of phase shifter 1, also is Δ
ΦEqual zero.Among Fig. 2, when feedback system is stablized, Δ
ΦEqual zero output V
Out7(t), namely formula (8) is pure quadrature error signal; Output signal V
Out8(t) in, namely formula (7) quadrature error is eliminated fully, only remaining in-phase error signal and useful angular velocity signal.
Because when phase error is zero, quadrature error is eliminated fully after carrying out the phase demodulation second time with the driving signal, output signal is remaining useful angular velocity signal and in-phase error signal only, this moment, output signal was the stack of in-phase error signal therewith of useful angular velocity signal as if there being angular velocity signal to import then if no angular velocity signal is imported then just remaining in-phase error signal only of output signal.When no angular velocity signal is imported, note this in-phase error signal with data-carrier store 7, at output terminal output signal is deducted this in-phase error signal, just obtained pure angular velocity signal.
The utility model is achieved by following steps when eliminating the micromechanical gyro in-phase error:
Step 1, extract input signal, as shown in Figure 3, adopt the method for high frequency carrier modulation, utilize integrator to constitute charge amplifier, will detect micromechanical gyro changes in capacitance value and be transformed into voltage signal, then behind quick demodulation module 40 phase demodulations of third phase, obtain and detect the voltage signal that the changes in capacitance amount is directly proportional, described input signal comprises angular velocity signal, quadrature error signal and in-phase error signal.
The above only is an embodiment of the present utility model, is not the restriction to this case design, and all equivalent variations of doing according to the design key of this case all fall into the protection domain of this case.
Claims (5)
1. eliminate micromechanical gyro in-phase error system based on making difference for one kind, it is characterized in that: comprise peak detection circuit, the first phase demodulation module, the second phase demodulation module, phase shifter, 90
oPhase shifter, data-carrier store, controlled switch and make difference circuit; Phase shifter input termination drives signal, output termination 90
oPhase shifter and the first phase demodulation module; The first phase demodulation module input connects micromechanical gyro angular velocity and extracts signal, and output terminal connects simultaneously makes difference circuit and controlled switch, controlled switch output termination data-carrier store, and data-carrier store output termination is made difference circuit;
90
oThe phase shifter output termination second phase demodulation module, the input termination micromechanical gyro angular velocity of the second phase demodulation module extracts signal, and the output termination connects peak detection circuit, peak detection circuit output termination phase shifter.
2. as claimed in claim 1 a kind of based on making difference elimination micromechanical gyro in-phase error system, it is characterized in that: the first phase demodulation module is made up of low-pass filter and phase demodulation circuit, the input end of phase demodulation circuit connects phase shifter simultaneously and micromechanical gyro angular velocity extracts signal, low-pass filter of output termination; Low-pass filter connects simultaneously makes difference circuit and controlled switch.
3. as claimed in claim 1 a kind of based on making difference elimination micromechanical gyro in-phase error system, it is characterized in that: the second phase demodulation module is made up of low-pass filter and phase demodulation circuit, and the input end of phase demodulation circuit connects 90 simultaneously
oPhase shifter and micromechanical gyro angular velocity extract signal, low-pass filter of output termination; Low-pass filter connects peak detection circuit.
4. as claimed in claim 1 a kind of based on making difference elimination micromechanical gyro in-phase error system, it is characterized in that: also comprise high frequency carrier device, charge amplifier, filter amplifier, the quick demodulation module of third phase and signal amplifier; The electric capacity of the input termination micromechanical gyro of high frequency carrier device, output termination charge amplifier and the quick demodulation module of third phase; Charge amplifier connects filter amplifier, and filter amplifier connects the input end of the quick demodulation module of third phase, the output termination signal amplifier of the quick demodulation module of third phase, and signal amplifier connects the first phase demodulation module and the second phase demodulation module respectively.
5. as claimed in claim 4 a kind of based on making difference elimination micromechanical gyro in-phase error system, it is characterized in that: the quick demodulation module of third phase is made up of low-pass filter and phase demodulation circuit, the input end of phase demodulation circuit connects filter amplifier and high frequency carrier device, low-pass filter of output termination simultaneously; Low-pass filter connects signal amplifier.
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| CN 201320101734 CN203163738U (en) | 2013-03-06 | 2013-03-06 | System for eliminating in-phase errors of micromechanical gyroscopes based on difference |
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| CN 201320101734 CN203163738U (en) | 2013-03-06 | 2013-03-06 | System for eliminating in-phase errors of micromechanical gyroscopes based on difference |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103148847A (en) * | 2013-03-06 | 2013-06-12 | 莫冰 | System and method for eliminating in-phase error of micromechanical gyroscope based on differential |
| CN112697120A (en) * | 2020-12-10 | 2021-04-23 | 北京自动化控制设备研究所 | Switch demodulation circuit of quartz tuning fork gyroscope |
-
2013
- 2013-03-06 CN CN 201320101734 patent/CN203163738U/en not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103148847A (en) * | 2013-03-06 | 2013-06-12 | 莫冰 | System and method for eliminating in-phase error of micromechanical gyroscope based on differential |
| CN103148847B (en) * | 2013-03-06 | 2015-07-22 | 莫冰 | System and method for eliminating in-phase error of micromechanical gyroscope based on differential |
| CN112697120A (en) * | 2020-12-10 | 2021-04-23 | 北京自动化控制设备研究所 | Switch demodulation circuit of quartz tuning fork gyroscope |
| CN112697120B (en) * | 2020-12-10 | 2022-10-18 | 北京自动化控制设备研究所 | Switch demodulation circuit of quartz tuning fork gyroscope |
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