CN202119447U - Closed loop detection device for silicon micromachined and dynamically-turned mixed gyroscope - Google Patents
Closed loop detection device for silicon micromachined and dynamically-turned mixed gyroscope Download PDFInfo
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- CN202119447U CN202119447U CN2011202240336U CN201120224033U CN202119447U CN 202119447 U CN202119447 U CN 202119447U CN 2011202240336 U CN2011202240336 U CN 2011202240336U CN 201120224033 U CN201120224033 U CN 201120224033U CN 202119447 U CN202119447 U CN 202119447U
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Abstract
The utility model discloses a closed loop detection device for a silicon micromachined and dynamically-turned mixed gyroscope, which comprises an annunciator, a torquer and a signal processing module. The annunciator comprises two pairs of signal detecting electrodes, the torquer comprises two torque feedback electrodes which are respectively used for input angular speed and balance input torque of two shafts on a sensitive gyroscope, and the signal processing module comprises modulation carrier signals, preload high voltage, a pre-amplifying circuit, a signal demodulator circuit, two difference amplifying circuits and a direct-current and alternating-current superposed circuit. Signals of the two shafts are detected by the signal detecting electrodes to be pre-amplified prior to signal demodulation, each demodulated detection signal is subjected to the co-phase and counter-phase calculations with the preload high voltage prior to being amplified and output, output feedback voltage signals are superposed with a pair of counter-phase modulation carrier signals through the direct-current and alternating-current superposed circuit and then output to the torque feedback electrodes. The closed loop detection device resolves the problem of tuning of the silicon micromachined and dynamically-turned mixed gyroscope by means of capacitance detection and static electric power feedback.
Description
Technical field
The utility model relates to microelectromechanical systems (MEMS) and micro-inertia measuring technical field, and particularly a kind of silicon fine motion is transferred and mixed gyrostatic closed loop detection control apparatus and application process thereof.
Background technology
The gyroscope evolution is roughly floated and air-suspension gyroscope, dynamically tuned gyro, DTG, electrostatic gyroscope, laser gyro, optical fibre gyro and oscillation gyro (silicon micromechanical gyroscope) etc. through frame gyroscope appearance, liquid.Dynamically tuned gyro, DTG is because precision is higher, and zero is stable partially 0.001
o～1
o/ h; Become one of domestic present topmost gyroscope; Application reaches about 80%; But its shock resistance is relatively poor because its structure, material and processing characteristics have directly caused, start-up time is long and cost is higher, especially its relatively large volume restrictions it in the application in a lot of fields.At present, though the precision of optical fibre gyro and laser gyro has has met or exceeded dynamically tuned gyro, DTG, their volumes are bigger, cost an arm and a leg, and do not wait from several ten thousand to the hundreds of thousands dollar, compare dynamic tuned gyroscope and do not have too big advantage.And the silicon micromechanical gyroscope of follow-up appearance; Though have that volume is little, in light weight, low-cost, low energy consumption, high reliability, be easy to advantages such as intellectuality and digitizing; But be limited by processing technology and integrated circuit signal processing power, silicon micro-gyroscope also is in 1 at present
o～100
oIn the low precision stage among the/h, high precision also needs one than long hair exhibition process in realizing.Therefore, a kind of volume of application market active demand is less, price is lower, and performance index and the expensive suitable novel gyroscope of electro-mechanical gyro appearance.
The silicon fine motion is transferred and is mixed gyrostatic research just in order to satisfy this application demand.The silicon fine motion is transferred and is mixed the new and high technology that new development is got up on the basis that the gyroscope technology is technological at flexure gyroscope and the silicon micromechanical gyroscope technology is progressively ripe.It is to be put forward by people such as U.S.'s moral thunder platinum (Charies Stark Draper Lab. is called for short CSDL) Lyle J. Jenkins in 2003 at first that the silicon fine motion transfer to mix gyroscope, but has only carried out preliminary theoretic discussion.At present, it is less transfer to mix gyrostatic relevant report about the silicon fine motion, and Southeast China University domesticly carries out the silicon fine motion the earliest and transfers the unit that mixes gyroscope research, and its structure can be the associated description in the patent document of CN 100392353C with reference to notification number.
The silicon fine motion transfers the mixing gyroscope to be made up of micromachine, rotor block, signalling means, torquer etc., and micromachine is processed by traditional precision optical machinery processing or micro electronmechanical process technology, is mainly used in and drives the rotor block high speed rotating, to obtain the momentum moment greatly; Rotor block, signalling means, torquer adopt the body silicon process technology to process, and rotor block is provided with bottom crown.Traditional dynamically tuned gyro, DTG is tuning generally to be adjusted the positive stiffness coefficient of torsion bar, the moment of inertia of gimbal and the angular velocity of rotation of drive motor repeatedly through precise machine machining and realizes tuning.And the mixing gyroscope is transferred in the silicon fine motion because silicon sheet formula gimbal is both little thin, and the negative moment of elasticity magnitude that is produced by gimbal is very little, only is equivalent to the positive moment of elasticity 10 of torsion bar
-5, therefore, it is tuning in silicon fine motion accent mixing gyroscope, can't to adopt traditional mode.Secondly; Carry out when tuning adopting traditional open loop detection mode; (do not have remaining rigidity) under the ideal conditions, the effect of extraneous input angular velocity will cause the continuous precession campaign of the rotor axis of rotation, can't carry out input; And precession gyrorotor even can collide, and lose measurement function with shell wall; And when having remaining rigidity to exist, open loop detects and also has the influence that measurement range is little, non-linear greatly, input is subject to open cycle system parameters variations such as mechanical configuration parameter and circuit parameter.And traditional dynamically tuned gyro, DTG adopts inductance signalling means and moving-iron type torquer mostly, and not only volume is big, Heavy Weight (for example torquer magnet steel), and shortcoming such as thermal value is very big when under higher rate, working.
Summary of the invention
The utility model transfer to mix gyroscope to the novel silicon fine motion provides a kind of based on the closed loop detection control apparatus of balancing technique again; Solution transfers the mixing gyroscope to carry out a tuning difficult problem to the silicon fine motion, makes input receive the influence of system parameter variations such as mechanical configuration parameter and circuit parameter less.
For realizing above-mentioned purpose, the technical scheme that the utility model is taked is: a kind of silicon fine motion is transferred and is mixed the gyroscope loop detector, comprises signalling means, torquer, signal processing module; It is characterized in that said signalling means is the capacitance signal device, comprise 2 pairs of signal detection electrode; Torquer is the electric capacity torquer, comprises 2 pairs of moment feedback electrodes; The pole plate of each electrode all is parallel to the gyrowheel setting; 1 pair of corresponding 1 pair of moment feedback electrode of signal detection electrode, the input and the moment that are used for 1 axle on the gyroscope are fed back;
Said signal processing module comprises modulated carrier signal, preload high pressure, pre-amplification circuit, signal demodulating circuit, differential amplifier circuit and alternating current-direct current supercircuit; Modulated carrier signal is 2 pairs, and the modulated carrier signal frequency is identical, amplitude is identical, phase place is opposite for 2 of per 1 centering;
Detected two axis signals of signal detection electrode amplify through pre-amplification circuit, and the back serves as with reference to carry out signal demodulation to two axis signals with corresponding first-harmonic through signal demodulating circuit; Diaxon detection signal after the demodulation inputs to the input end in the same way and the reverse input end of two differential amplifier circuits respectively; The preload high pressure inputs to the input end in the same way of above-mentioned two differential amplifier circuits respectively simultaneously; The output terminal output feedback voltage signal of differential amplifier circuit; 2 feedback voltage signals superpose through the modulated carrier signal of alternating current-direct current supercircuit and 1 pair of anti-phase, export corresponding moment feedback electrode then to.
Feedback voltage can be realized two functions: one of which is for realizing close-loop feedback control; It is two tuning for realizing negative stiffness: the preload high pressure acts on the plane of signalling means and detects on the electric capacity; Under electrostatic forcing; To produce the static negative stiffness, this static negative stiffness and silicon fine motion transfer that to mix the positive rigidity of gyrostatic torsion bar opposite; Therefore through adjusting the size of preload high pressure, the size that can regulate the static negative stiffness.
As a kind of improvement, also comprise the logical frequency selection circuit of band in the signal processing module, the signal input part of the logical frequency selection circuit of band connects the signal output part of pre-amplification circuit; The signal output part of the logical frequency selection circuit of band connects the input end of signal demodulating circuit.Concrete, the logical frequency selection circuit of band adopts multiple feedback-type bandwidth-limited circuit, is used to separate the capacitance detecting signal of two sensitive axes, and it can adopt existing correlation function module or utilize existing ripe circuit engineering to realize.
As a kind of improvement, also comprise low-pass filter circuit in the signal processing module, the signal input part of low-pass filter circuit connects the signal output part of signal demodulating circuit, and the signal output part of low-pass filter circuit connects the signal input part of differential amplifier circuit.Concrete; Signal demodulating circuit is the phase demodulation circuit; Low-pass filter circuit and phase demodulation circuit all can adopt existing circuit module also can adopt existing ripe circuit engineering to realize, constitute signal demodulation link jointly, and the capacitance signal after the modulation is separated with noise signal.
As a kind of improvement, also comprise trap circuit in the signal processing module, the signal input part of trap circuit connects the signal output part of signal demodulating circuit, and the signal output part of trap circuit connects the signal input part of differential amplifier circuit.Concrete, trap circuit can adopt existing interlock circuit module or utilize existing ripe circuit engineering to realize.Because gyrorotor up and down can not absolute parallel between capacitor plate with himself, so gyrorotor will produce the interchange interference identical with rotational frequency when rotating, and trap circuit is used to suppress the interchange interference that caused by the gyrowheel rotation.
As a kind of improvement, also comprise correcting circuit in the signal processing module, the signal input part of correcting circuit connects the signal output part of signal demodulating circuit, and the signal output part of correcting circuit connects the signal input part of differential amplifier circuit.Concrete, correcting circuit can adopt existing interlock circuit module or utilize existing ripe circuit engineering to realize that it is used to improve the magnitude margin and the Phase margin characteristic of open cycle system.
As a kind of improvement, also comprise the decoupling zero circuit in the signal processing module, the signal input part of decoupling zero circuit connects the signal output part of signal demodulating circuit, and the signal output part of decoupling zero circuit connects the signal input part of differential amplifier circuit.Concrete, detection signal inputs in the decoupling zero circuit simultaneously after the correction of diaxon, carries out obtaining more accurate feedback signal after influence is each other eliminated in the decoupling zero computing.The decoupling zero circuit can adopt existing interlock circuit module or utilize existing ripe circuit engineering to realize.
Preferably, the pre-amplification circuit in the said signal processing module adopts common port difference type pre-amplification circuit, is used to amplify the capacitance detecting signal of two sensitive axes, and it can adopt existing correlation function module or utilize existing ripe circuit engineering to realize.
Preferably, the frequency of said 2 pairs of carrier signals is different, and 2 carrier signals of per 1 centering obtain for connect the output of in-phase amplifier and inverting amplifier respectively through 1 fundamental signal source.Use two different carrier signals that the capacitance detecting signal is modulated and demodulation, be convenient to distinguish the responsive detection signal of diaxon more, the influence of ghost effect around suppressing simultaneously.The fundamental signal source can be provided by existing Correlated Signals device.
Preferably, said correcting circuit comprises two-stage calculation amplifier, and the inverting input of first order operational amplifier is the signal input part of correcting circuit; The output terminal of first order operational amplifier connects the inverting input of second level operational amplifier; The output terminal of second level operational amplifier is the signal output part of correcting circuit; Cross-over connection has T type circuit between the inverting input of two-stage calculation amplifier and the signal output part.Can be when using through the gain enlargement factor of operational amplifier is set, adjustment zero limit is improved the dynamic and static properties of system.
Preferably, the decoupling zero circuit of the utility model adopts the diagonal line decoupling zero, and system decoupling is become two two type second-order systems, and the transport function of decoupling zero network is:
J is the moment of inertia of gyrorotor in the formula (1), and H transfers for the silicon fine motion and mixes gyrostatic input angle momentum.What obtain after the decoupling zero is two two type second-order systems, and gain is lower.
Beneficial effect
The silicon fine motion of the utility model transfers the gyrostatic loop detector of mixing to adopt static negative stiffness mode to carry out tuning: the preload high pressure acts on the plane through the moment feedback electrode and detects on the electric capacity; Under electrostatic forcing, produce with silicon fine motion accent and mix the opposite static negative stiffness of the positive rigidity of gyrostatic torsion bar; Through the size of adjustment preload high pressure U, the size that can regulate the static negative stiffness; The positive moment of elasticity that size through adjustment static negative electricity rigidity in the tuning process compensates inside and outside torsion bar realizes tuning.The utlity model has following advantage:
(1) closed loop detects big, the non-linear little and input of measurement range and receives the influence of system parameter variations such as mechanical configuration parameter and circuit parameter less; The closed loop that has the decoupling zero function simultaneously detects and can realize two axis signal decoupling zero control and input; The preload high pressure that boost module produces; Not only as the dc offset voltage that constitutes feedback voltage signal; And can also be used for the tuning of rotor balancing ring by the negative stiffness effects of its generation, and promptly eliminate the remaining rigidity of torsion bar, solved the silicon fine motion and transferred and mix a gyrostatic tuning difficult problem; And method is simple, and debugging is convenient;
(2) adopt two-way different frequency fundamental signal to two-way capacitance detecting signal modulate, frequency-selecting and demodulation can effectively distinguish the diaxon detection signal, suppresses the influence of ghost effect;
(3) volume is little, simple in structure, highly sensitive, thermal value is little.
Description of drawings
Shown in Figure 1 is the silicon fine motion accent mixing gyroscope loop detector block diagram of the utility model;
Shown in Figure 2 is the interface circuit figure of the utility model;
Shown in Figure 3 is the correcting circuit figure of the utility model;
Shown in Figure 4 is the decoupling zero circuit diagram of the utility model.
Embodiment
For the content that makes the utility model is more obviously understandable, further specify below in conjunction with accompanying drawing and embodiment.
In conjunction with Fig. 1, the silicon fine motion of the utility model transfers the gyrostatic loop detector of mixing to comprise signalling means and torquer, and signalling means comprises 2 pairs of signal detection electrode (E, F), (G, H), and torquer comprises 2 pairs of moment feedback electrodes (A, B), (C, D).Feedback electrode (A, B), (C, D), and the pole plate of signal detection electrode (E, F), (G, H) all with gyrorotor 10 on pole plate be parallel to each other, constitute the differential responsive electric capacity that detects.
Signal detection electrode (E, F), (G, H) detect the capacitance variations signal that is caused by input angular velocity; And signal exported in the prime amplifier 11; Signal after preposition amplification carries out the separation of two axis signals by the logical frequency-selecting amplifier 12,18 of band, and two axis signals after will separating export phase demodulation circuit 13,19 respectively to.Phase-sensitive demodulator 13,19 carries out demodulation with fundamental signal source waveform as a reference to signal; Signal after the demodulation exports low-pass filter 14,20 and trapper 15,21 to, carries out the elimination of undesired signal.Afterwards, signal inputs to correcting circuit 16,22 and carries out the improvement of magnitude margin and Phase margin; Two axis signals after the correction all export in the decoupling zero circuit 23, eliminate influencing each other of two axis signals through decoupling zero, and output feedback signal Vf1, Vf2.
Boost module 1 provides direct current preload high pressure U, divides four tunnel in-phase input ends that input to respectively in the operational amplifier 2,3,4,5; Feedback signal Vf1 inputs to the in-phase end of operational amplifier 3 and the end of oppisite phase of operational amplifier 2 respectively; Feedback signal Vf2 inputs to the in-phase end of operational amplifier 5 and the end of oppisite phase of operational amplifier 4 respectively; Feedback voltage signal U-Vf1, U+Vf1, U-Vf2, U+Vf2 after obtaining difference and amplifying input to respectively in the alternating current- direct current supercircuit 6,7,8,9 and exchange carrier wave and carry out linear superposition.
In conjunction with shown in Figure 2; Adopt the preceding discharge of common port Differential Detection type road in the pre-amplification circuit; And the two carrier modulation modes of employing; Moment feedback electrode A, B, C, D be modulated carrier signal+V1 ,-V1 ,+V2 ,-the interface electrode of V2, be again the interface electrode of feedback voltage signal U-Vf1, U+Vf1, U-Vf2, U+Vf2.Modulated carrier signal is modulated the capacitance variations signal of the differential sensitization capacitance C1 that caused by input angular velocity, C2, C3, C4; Modulation signal often is worth capacitor C 5, C6, C7, C8 by signal detection electrode (E, F), (G, H) output; Amplified by prime amplifier; Through being with logical frequency selection circuit 12,18 that the diaxon detection signal is separated, can obtain the variation of two pairs of differential sensitization capacitances.Follow-up through signal Processing such as demodulation, correction, decoupling zeros, obtain big or small feedback voltage signal U-Vf1, U+Vf1, U-Vf2, the U+Vf2 of reaction input angular velocity.
Different according to mechanical configuration parameter with tuning requirement; Preload high pressure U is generally about 50 ~ 150V; Feedback voltage signal U-Vf1, U+Vf1, U-Vf2, U+Vf2 act on feedback electrode A, B, C, the last realization of D close-loop feedback control respectively; Under the effect of differential electrostatic force, form the two-way feedback moment, the gyroscopic couple that balance is caused by extraneous angular velocity input.
The utility model adopts static negative stiffness mode to carry out tuning: preload high pressure U acts on the plane through moment feedback electrode A, B, C, D, and to detect capacitor C 1, C2, C3, C4 last; Under electrostatic forcing, will produce the static negative stiffness; This static negative stiffness and silicon fine motion transfer that to mix the positive rigidity of gyrostatic torsion bar opposite; Through the size of adjustment preload high pressure U, the size that can regulate the static negative stiffness; The positive moment of elasticity that size through adjustment static negative electricity rigidity in the tuning process compensates inside and outside torsion bar realizes tuning.
In conjunction with Fig. 3, the correcting circuit of the utility model has adopted the form of two-stage anticipatory control, and through the gain enlargement factor is set, adjustment zero limit is improved the dynamic and static properties of system.Comprise two-stage calculation amplifier U2, U3 in the correcting circuit, the inverting input of first order operational amplifier U2 is through the signal input part Vin1 of resistance connection R2 correcting circuit, in-phase input end ground connection; The output terminal of first order operational amplifier U2 is through the inverting input of resistance R 6 connection second level operational amplifier U3, the in-phase end ground connection of second level operational amplifier U3; The output terminal of second level operational amplifier U3 is the signal output part Vout1 of correcting circuit; Cross-over connection has T type circuit between the inverting input of two-stage calculation amplifier and the signal output part.Resistance R 3 and resistance R 4 are serially connected between the backward end and output terminal of first order operational amplifier U2, and resistance R 5 one terminates between resistance R 3 and the resistance R 4, and the other end links to each other with an end of capacitor C 10, and the other end of capacitor C 10 links to each other with ground.Similar first T type resistor network; Resistance R 7 and resistance R 8 are serially connected between the backward end and output terminal of second level operational amplifier U3; Resistance R 9 one terminates between resistance R 7 and the resistance R 8, and the other end links to each other with an end of capacitor C 11, the other end ground connection of capacitor C 11.
The utility model adopts the diagonal line decoupling zero, and system decoupling is become two two type second-order systems, and the transport function of decoupling zero network is:
J is the moment of inertia of gyrorotor in the formula (1), and H transfers for the silicon fine motion and mixes gyrostatic input angle momentum, and what obtain after the decoupling zero is two two type second-order systems, and gain is lower.The correspondence of formula (1) realizes that circuit is as shown in Figure 4; Output signal behind the calibrated separately circuit of diaxon detection capacitance signal is as the input signal Vin2 and the Vin3 of decoupling zero circuit; Vin2 is connected with R15 with resistance R 10 simultaneously, and resistance R 10, capacitor C 12 and operational amplifier U4 constitute integrating circuit; The other end of resistance R 10 is connected the backward end of operational amplifier U4, the ground connection of end in the same way of U4, and capacitor C 12 is connected across backward end and the output terminal of operational amplifier U4; Operational amplifier U5 constitutes follow circuit, and the output terminal of operational amplifier U4 is connected on the end in the same way of operational amplifier U5, and the backward end of operational amplifier U5 directly links to each other with output terminal.Another road input signal Vin3 is connected with R18 with resistance R 11 simultaneously; Resistance R 11, capacitor C 13 and operational amplifier U6 constitute integrating circuit; The other end of R11 is connected the backward end of operational amplifier U6; The ground connection of end in the same way of U6, capacitor C 13 is connected across backward end and the output terminal of operational amplifier U6; Resistance R 12, R13 and operational amplifier U7 constitute reverse amplification circuit; The output terminal of operational amplifier U6 is connected on an end of resistance R 12; The other end of resistance R 12 is connected on the backward end of operational amplifier U7; The ground connection of end in the same way of operational amplifier U7, resistance R 13 is connected across between the backward end and output terminal of operational amplifier U7.Resistance R 14, R15, R16 and operational amplifier U8 constitute adding circuit; The output terminal of operational amplifier U7 is connected with resistance R 14; The backward end of the other end of R14 and operational amplifier U8; The backward end of another termination operational amplifier of resistance R 15, resistance R 16 are connected across between operational amplifier U8 backward end and the output terminal, and operational amplifier U8 is output as one the road and separates coupling signal Vf1; Resistance R 17, R18, R19 and operational amplifier U9 constitute adding circuit; The output terminal of operational amplifier U5 is connected with resistance R 17; The backward end of the other end of R17 and operational amplifier U9; The backward end of another termination operational amplifier of resistance R 18, resistance R 19 are connected across between operational amplifier U9 backward end and the output terminal, and operational amplifier U9 is output as another road and separates coupling signal Vf2.Follow-up through the feedback signal after differential operational amplifier 2,3,4, the 5 completion decoupling zeros and the stack of preload high pressure, form feedback voltage signal.
The case of practical implementation described in the utility model is merely the preferable case study on implementation of the utility model, is not the practical range that is used for limiting the utility model.Be that all equivalences of doing according to the content of the utility model claim change and modification, all should be as the technological category of the utility model.
Claims (9)
1. a silicon fine motion is transferred and is mixed the gyroscope loop detector, comprises signalling means, torquer, signal processing module; It is characterized in that said signalling means is the capacitance signal device, comprise 2 pairs of signal detection electrode; Torquer is the electric capacity torquer, comprises 2 pairs of moment feedback electrodes; The pole plate of each electrode all is parallel to the gyrowheel setting; The corresponding 1 pair of moment feedback electrode of the 1 pair of signal detection electrode is used for the input angular velocity and the balance input torque of 1 axle on the responsive gyroscope;
Said signal processing module comprises modulated carrier signal, preload high pressure, pre-amplification circuit, signal demodulating circuit, differential amplifier circuit and alternating current-direct current supercircuit; Modulated carrier signal is 2 pairs, and the modulated carrier signal frequency is identical, amplitude is identical, phase place is opposite for 2 of per 1 centering;
Detected two axis signals of signal detection electrode amplify through pre-amplification circuit, and the back to two axis signals, serves as with reference to carry out signal demodulation with corresponding first-harmonic through signal demodulating circuit; Diaxon detection signal after the demodulation inputs to the input end in the same way and the reverse input end of two differential amplifier circuits respectively; The preload high pressure inputs to the input end in the same way of above-mentioned two differential amplifier circuits respectively simultaneously; The output terminal output feedback voltage signal of differential amplifier circuit, the feedback voltage signal of output exports the moment feedback electrode to then through the modulated carrier signal stack of alternating current-direct current supercircuit and a pair of anti-phase.
2. silicon fine motion according to claim 1 is transferred and is mixed gyroscope closed loop detection control apparatus, it is characterized in that, also comprises the logical frequency selection circuit of band in the signal processing module, and the signal input part of the logical frequency selection circuit of band connects the pre-amplification circuit signal output part; The signal output part of the logical frequency selection circuit of band connects the signal demodulating circuit input end.
3. silicon fine motion according to claim 1 is transferred and is mixed gyroscope closed loop detection control apparatus; It is characterized in that; Also comprise low-pass filter circuit in the signal processing module; The signal input part of low-pass filter circuit connects the signal output part of signal demodulating circuit, and the signal output part of low-pass filter circuit connects the signal input part of differential amplifier circuit.
4. silicon fine motion according to claim 1 is transferred and is mixed gyroscope closed loop detection control apparatus; It is characterized in that; Also comprise trap circuit in the signal processing module; The signal input part of trap circuit connects the signal output part of signal demodulating circuit, and the signal output part of trap circuit connects the signal input part of differential amplifier circuit.
5. silicon fine motion according to claim 1 is transferred and is mixed gyroscope closed loop detection control apparatus; It is characterized in that; Also comprise correcting circuit in the signal processing module; The signal input part of correcting circuit connects the signal output part of signal demodulating circuit, and the signal output part of correcting circuit connects the signal input part of differential amplifier circuit.
6. silicon fine motion according to claim 1 is transferred and is mixed gyroscope closed loop detection control apparatus; It is characterized in that; Also comprise the decoupling zero circuit in the signal processing module; The signal input part of decoupling zero circuit connects the signal output part of signal demodulating circuit, and the signal output part of decoupling zero circuit connects the signal input part of differential amplifier circuit.
7. mixing gyroscope closed loop detection control apparatus is transferred in each described silicon fine motion according to claim 1-6; It is characterized in that; The frequency of 2 pairs of carrier signals is different, and 2 carrier signals of per 1 centering obtain for connect the output of in-phase amplifier and inverting amplifier respectively through 1 fundamental signal source.
8. silicon fine motion according to claim 5 is transferred and is mixed gyroscope closed loop detection control apparatus, it is characterized in that said correcting circuit comprises two-stage calculation amplifier, and the inverting input of first order operational amplifier is the signal input part of correcting circuit; The output terminal of first order operational amplifier connects the inverting input of second level operational amplifier; The output terminal of second level operational amplifier is the signal output part of correcting circuit; Cross-over connection has T type circuit between the inverting input of two-stage calculation amplifier and the signal output part.
9. silicon fine motion according to claim 6 is transferred and is mixed gyroscope closed loop detection control apparatus, it is characterized in that said decoupling zero circuit adopts the diagonal line decoupling zero, and system decoupling is become two two type second-order systems, and the transport function of decoupling zero network is:
J is the moment of inertia of gyrorotor in the formula (1), and H transfers for the silicon fine motion and mixes gyrostatic input angle momentum.
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| CN102353366A (en) * | 2011-06-29 | 2012-02-15 | 东南大学 | Closed loop detection apparatus for silicon micromachined/dynamically tuned hybrid gyroscope |
| CN102759365A (en) * | 2012-07-12 | 2012-10-31 | 中国人民解放军国防科学技术大学 | Bias stability improving method and device for silicon micromechanical gyroscope |
| CN104111079A (en) * | 2014-06-13 | 2014-10-22 | 工业和信息化部电子第五研究所 | Micromechanical gyroscope closed-loop detection design method and device |
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| CN102353366A (en) * | 2011-06-29 | 2012-02-15 | 东南大学 | Closed loop detection apparatus for silicon micromachined/dynamically tuned hybrid gyroscope |
| CN102759365B (en) * | 2012-07-12 | 2014-12-17 | 中国人民解放军国防科学技术大学 | Bias stability improving method and device for silicon micromechanical gyroscope |
| CN102759365A (en) * | 2012-07-12 | 2012-10-31 | 中国人民解放军国防科学技术大学 | Bias stability improving method and device for silicon micromechanical gyroscope |
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| CN105074384A (en) * | 2012-12-24 | 2015-11-18 | 原子能和替代能源委员会 | Gyroscope with simplified calibration and simplified calibration method for a gyroscope |
| CN105074384B (en) * | 2012-12-24 | 2018-01-09 | 原子能和替代能源委员会 | Simplify the gyroscope of calibration and the simplification calibration method of gyroscope |
| CN104111079B (en) * | 2014-06-13 | 2017-03-08 | 工业和信息化部电子第五研究所 | Micromechanical gyro closed loop detection design method and apparatus |
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| CN109655082A (en) * | 2018-12-24 | 2019-04-19 | 陕西航天时代导航设备有限公司 | A kind of total digitalization dynamic tuned gyroscope servo-control system |
| CN112539744A (en) * | 2019-09-20 | 2021-03-23 | 中国科学院微电子研究所 | Sensitive signal reading circuit of silicon micro-gyroscope |
| CN113063446A (en) * | 2021-05-18 | 2021-07-02 | 东南大学 | Silicon micro-gyroscope scale factor nonlinear compensation method based on measurement and control circuit |
| CN113063446B (en) * | 2021-05-18 | 2022-04-05 | 东南大学 | Silicon micro-gyroscope scale factor nonlinear compensation method based on measurement and control circuit |
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