CN104459181B - A kind of bionical hair sensor sensitive for flow velocity, acceleration and angular speed - Google Patents
A kind of bionical hair sensor sensitive for flow velocity, acceleration and angular speed Download PDFInfo
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- CN104459181B CN104459181B CN201410853371.4A CN201410853371A CN104459181B CN 104459181 B CN104459181 B CN 104459181B CN 201410853371 A CN201410853371 A CN 201410853371A CN 104459181 B CN104459181 B CN 104459181B
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Abstract
The present invention relates to provide a kind of bionical hair sensor sensitive for flow velocity, acceleration and angular speed, including top hair, middle part silicon micro-sensor structure, bottom are to make signal lead on a glass substrate.Top hair can drive external frame in silicon micro-sensor structure or so to rock in the present invention；Using the negative stiffness effects principle of electrostatic force, realize to acceleration, the detection of flow rate speed；By in the form of sensor array, realizing the differentiation to acceleration and fluid velocity detection.When external world's input is input into for acceleration, then all the sensors can be acted on and be produced torsion.Two minor structures in silicon micro-sensor structure are gyroscope arrangement, are the twice of single gyro instrument output signal using being symmetrically arranged for detecting the angular speed size in the external world；Using variable area formula capacitance detecting, interference of the powered motion to detecting is reduced.
Description
Technical field
It is used for flow velocity, acceleration and angular speed the invention belongs to microelectron-mechanical field of inertia measurement, more particularly to one kind
Sensitive bionical hair sensor.
Background technology
Micromechanical Inertial Instruments include mechanical gyroscope (MMG) and micro-mechanical accelerometer (MMA).Using micro-electronic machining
Be completely integrated on a silicon chip for micro mechanical structure and required electronic circuit by technique, so as to reach performance, price, volume,
The high unity of weight, reliability aspects.But the measurement simultaneously to acceleration and angular speed is realized, is often required for using
The combination of gyroscope and accelerometer, increased the complexity of system, be unfavorable for realizing the miniaturization of measurement apparatus, while also making
Overall cost increase, is unfavorable for the large-scale application of testing equipment.
Hair formula sensor is a kind of new microsensor having a high potential, and it is, by bionics principle, to copy certainly
Hair structure in right boundary carries out Sensor Design, is processed by coordinating existing MEMS technology technology, be capable of achieving to flow velocity,
The measurement of acceleration, angular speed etc., has the advantages that sensitivity and high resolution, wide dynamic range, strong antijamming capability.
In recent years, domestic and international You Duojia research institutions have started the research to hair formula sensor.Dutch Universiteit Twente
Professor G.J.M.Krijnen tentatively have developed a kind of hair formula sensor, flow velocity is carried out by the polymeric hair at top
It is sensitive, it is possible to achieve to the mm/s grades of sensitivity of wind speed.But, the hair formula sensor of major part mechanism research and development at present is flow velocity biography
Sensor, can only realize the measurement to fluid velocity, unitary function, and structure is complex, and practicality is poor.
The content of the invention
Goal of the invention：In order to overcome the deficiencies in the prior art, the present invention provide it is a kind of for flow velocity, acceleration and
The sensitive bionical hair sensor of angular speed, by emulating the structure of hair, using the negative stiffness effects principle using electrostatic force,
Realization is tested the speed.
Technical scheme：To achieve the above object, the present invention is adopted the following technical scheme that：One kind for flow velocity, acceleration and
The sensitive bionical hair sensor of angular speed, including glass substrate, it is characterised in that including bottom signal lead, silicon micro sensing
Device structure and polymeric hair；The bottom signal lead arrangement on a glass substrate, connects the corresponding of silicon micro-sensor structure
Electrode；Silicon micro-sensor structure is bonded by anchor point and is suspended in glass substrate；The polymeric hair is bonded in silicon micro sensing
Device structure upper surface；
The silicon micro-sensor structure fabrication on monocrystalline silicon piece, including in external frame, two middle frames and two
Portion's framework；External frame both sides are connected by the torsion beam being arranged symmetrically with anchor point respectively；Outside two middle frames are symmetrically embedded in
In portion's framework, an inner frame is respectively embedded into each middle frame；The middle frame and inner frame pass through U-shaped bullet
Property beam is connected with anchor point, is suspended in glass substrate；
Acceleration, flow rate detection comb, driving comb are disposed between the external frame and middle frame and inspection is driven
Survey comb；The inner frame disposed inboard has angular velocity detection comb.
Further, acceleration, flow rate detection comb by the comb group that is fixed in external frame be fixed on middle part frame
Comb group on frame to insert group into.When hair is subject to extraneous acceleration or fluid matasomatism, external frame can be driven around torsion
Beam deflects certain angle, and for acceleration, flow rate detection comb, the comb being fixed in external frame can be followed to be carried out
Deflection, and being fixed on the comb in middle frame will not follow deflection, so the overlapping area hair of the capacitor plate that they are constituted
It is raw to change.Electrostatic potential is applied with external frame, by the comb that is fixed in external frame to being fixed in middle frame
Comb produce negative stiffness effects, change middle frame intrinsic frequency, when the overlapping area between comb changes, in
The intrinsic frequency of portion's framework changes degree and also changes.
Further, driving comb by upper and lower two parts comb to insert group into wherein lower comb is fixed on anchor point.Drive
Comb is bilateral driving to the type of drive of middle frame, and band is applied respectively in the both sides fixed fingers in every group of driving comb
There is the reverse AC drive voltage of the constant amplitude of direct current biasing, middle frame is done simple harmonic motion in the Y direction.
Further, drive detection comb by upper and lower two parts comb to insert group into, wherein lower comb is fixed on anchor point,
Upper comb dent is fixed in middle frame.Detection comb is driven to use variable area formula comb capacitive detecting structure, due to middle frame
Simple harmonic motion can cause drive detection comb pole plate between electric capacity produce change, detected by the change, and lead to
Cross the electrode that is connected with comb and be fed back to drive circuit, by being fed back on drive signal after processing of circuit, centre can be made
Framework keeps being moved with resonant frequency.
Further, angular velocity detection comb by upper and lower two parts comb to insert group into wherein lower comb is fixed on anchor point
On, upper comb dent is fixed on inner frame.Angular velocity detection comb is used and becomes space type capacitive detecting structure, from Y-direction
Motion will not be between angular velocity detection comb pole plate electric capacity produce influence.Come from when middle frame is correctly driven and had
During the turning rate input of Z axis, inner frame can produce the motion in X-direction, so that between changing angular velocity detection comb pole plate
Electric capacity, by detecting the capacitance variations, just can obtain the size of input angular velocity.
Further, polymeric hair is obtained by polymeric material SU-8 by stretching.SU-8 is common polymeric material
Material, it is with low cost, easily obtain.
Further, it is with same frequency and reversed-phase work when symmetrical middle frame and inner frame are driven and are detected
Pattern, testing agency realizes differential detection.
Beneficial effect：
(1) present invention for the sensitive bionical hair sensor of flow velocity, acceleration and angular speed can to acceleration, flow velocity and
Angular speed is measured；
(2) designed using bionical hair formula, by sensitive applied external force (acceleration or flow velocity are acted on), achievable pair adds
The measurement of speed and flow velocity；
(3) it is by the form of sensor array, a part of sensor is hermetically sealed, another part normally with the external world
Contact, it is possible to achieve to acceleration and the differentiation of fluid velocity detection；
(4) acceleration, flow rate detection structure use resonant mode negative stiffness effects comb, high with certainty of measurement, anti-interference
The strong advantage of ability, and data signal is output as, be conducive to the digitlization of circuit；
(5) silicon micro-sensor structure can realize the measurement of angular velocity；
(6) angular velocity detection part is designed using symmetrical structure, and when there is turning rate input, left and right sides detection output is big
Small opposite signal, the size of input angular velocity can be obtained by the differential change for measuring two signals, and the differential fashion can have
Effect suppression common mode interference, increases output signal；
(7) the decoupling beam being connected with pedestal uses the structure of U-shaped beam, and the heat that can not only effectively discharge processing generation should
Power, it is suppressed that orthogonal coupling error signal, and the non-linear of motion is reduced, improve acceleration so as to increase Oscillation Amplitude
Spend the sensitivity of detection；
(8) the movable comb of resonator is separately positioned in external frame and central frame, can effective utilization space, side
Just driving comb and drive feedback comb are arranged.
Brief description of the drawings
Fig. 1 is structural representation of the invention；
Fig. 2 is single minor structure schematic diagram of the invention；
Fig. 3 is bottom signal lead schematic diagram of the invention.
Specific embodiment
The present invention is done below in conjunction with the accompanying drawings further is explained.
As shown in Figure 1, a kind of bionical hair sensor sensitive for flow velocity, acceleration and angular speed, including glass
Substrate, it is characterised in that including bottom signal lead, silicon micro-sensor structure and polymeric hair 3；The bottom signal lead
Arrangement on a glass substrate, connects the respective electrode of silicon micro-sensor structure；Silicon micro-sensor structure is bonded suspension by anchor point 5
In in glass substrate；The polymeric hair 3 is bonded in silicon micro-sensor structure upper surface；
As shown in Fig. 2 the silicon micro-sensor structure fabrication is on monocrystalline silicon piece, including 6, two middle part frames of external frame
Frame 110 and two inner frames 120；The both sides of external frame 6 are connected by the torsion beam 4 being arranged symmetrically with anchor point 5 respectively；Two
Middle frame is symmetrically embedded in external frame 6, and an identical inner frame is respectively embedded into each middle frame 110
120；The middle frame 110 and inner frame 120 are connected by U-shaped spring beam with anchor point, are suspended in glass substrate；
Two middle frames 110 and its attachment structure are identical structure, two symmetrical configuration arrangements.
Acceleration, flow rate detection comb 104, driving comb are disposed between the external frame 6 and middle frame 110
101 and drive detection comb 102；The disposed inboard of the inner frame 120 has angular velocity detection comb 106.
Acceleration, flow rate detection comb 104 by the comb group that is fixed in external frame be fixed in middle frame
Comb group to insert group into.Voltage U is applied in external frame 6, pair with when sensor have along X-direction acceleration or have stream
When speed acts on polymeric hair 3, the torque of generation can drive external frame to be reversed around torsion beam 4.I.e. when hair is subject to outer
When boundary's acceleration or fluid matasomatism, external frame can be driven to deflect certain angle around torsion beam, be examined for acceleration, flow velocity
Survey comb for, the comb being fixed in external frame can be followed into horizontal deflection, and be fixed on the comb in middle frame will not
The overlapping area of deflection, the so capacitor plate that they are constituted is followed to change.Electrostatic potential is applied with external frame, is led to
Cross comb of the comb being fixed in external frame to being fixed in middle frame and produce negative stiffness effects, change middle frame
Intrinsic frequency, when the overlapping area between comb changes, the intrinsic frequency of middle frame changes degree and also changes.
Driving comb 101 is by upper and lower two parts comb to insert group into wherein lower comb is fixed on anchor point.Driving comb pair
The type of drive of middle frame be bilateral driving, in upper and lower two fixed fingers respectively apply with identical direct current biasing etc.
The reverse AC drive voltage of width, middle frame 110 makees the simple harmonic motion in Y direction in the presence of electrostatic force is exchanged.
Drive detection comb 102 by upper and lower two parts comb to insert group into, wherein lower comb is fixed on anchor point, upper comb dent
It is fixed in middle frame 110.Detection comb is driven to use variable area formula comb capacitive detecting structure, due to the letter of middle frame
Harmonic motion can cause drive detection comb pole plate between electric capacity produce change, detected by the change, and by with
The connected electrode of comb is fed back to drive circuit, by being fed back on drive signal after processing of circuit, can make central frame
Keep being moved with resonant frequency.
Angular velocity detection comb 106 by upper and lower two parts comb to insert group into, wherein lower comb is fixed on anchor point, upper comb
Tooth is fixed on inner frame 120.Angular velocity detection comb is used and becomes space type capacitive detecting structure, from the fortune in Y-direction
Dynamic electric capacity that will not be between angular velocity detection comb pole plate produces influence.Come from Z axis when middle frame is correctly driven and had
Turning rate input when, inner frame can produce the motion in X-direction, so as to change the electricity between angular velocity detection comb pole plate
Hold, by detecting the capacitance variations, just can obtain the size of input angular velocity.
Polymeric hair 3 is obtained by polymeric material SU-8 by stretching.
It is with same frequency and reversed-phase mode of operation when symmetrical middle frame and inner frame are driven and are detected, detection
Mechanism realizes differential detection.
As shown in figure 3, driving comb 101, drive detection comb 102, angular velocity detection comb 106 respectively with lower floor's glass
Corresponding bonding point fixed drive comb bonding point 601, the fixed drive feedback comb bonding point 603 and fixed test comb of substrate
Bonding point 605 is connected.
Specific embodiment：
As shown in figure 1, the present invention is for the sensitive bionical hair sensor of flow velocity, acceleration and angular speed, by upper, middle and lower
Three layers of composition, upper strata is polymeric hair, middle level is silicon micro-sensor structure, lower floor is that the signal for making on a glass substrate draws
Line.For measuring flow rate speed and acceleration in same plane along X-direction, and the angular speed that Z-direction is input into, institute
Silicon micro-sensor structure is stated by 6, two groups of symmetrical middle frames 110 of external frame and two groups of 120 groups symmetrical of inner frames
Into.External frame is connected by torsion beam 4 with fixed anchor point 5 on a glass substrate.Two identical middle frames 110
The inside of external frame 5 is arranged symmetrically in, is connected with fixed anchor point on a glass substrate by U-shaped spring beam 103 so that
Middle frame is hanging on glass substrate.
Acceleration, flow rate detection comb 104, driving comb 101 are disposed between external frame and middle frame and are driven
Detection comb 102, in fig. 2, flow rate detection comb 104 is specifically labeled as 104a, 104b, 104c, 104d, only for convenient
Expression, this four flow rate detection comb are identical.Driving comb 101 is specifically labeled as 101a, 101b, 101c, 101d；Drive
Detection comb is specifically labeled as 102a, 102b, 102c, 102d.Inner frame 120 is connected by U-shaped beam 105 with middle frame 110
Connect, in Fig. 2, U-shaped beam 105 is specifically labeled as 105a, 105b, 105c, 105d, is equally also suspended on glass substrate.It is internal
Framework disposed inboard has angular velocity detection comb 106, is specifically labeled as 106a, 106b, 106c.
As shown in Figure 1, 2, total is symmetrical on axis for said structure.Silicon micro-sensor is by external frame 6, middle part
Framework 110 and inner frame 120 are constituted, and middle frame is connected by U-shaped spring beam 103 with respective anchor point, is fixed on glass
On substrate, due to U-shaped beam in X-direction for rigidity, therefore the motion of middle frame are limited in Y-direction.
Be disposed between external frame 6 and middle frame 110 acceleration, flow rate detection comb 104a, 104b, 104c,
104d, 204a, acceleration, flow rate detection comb are by the comb being fixed in external frame and the comb being fixed in middle frame
To insert group into.When having external acceleration or fluid velocity is input into, polymeric hair 3 drives external frame 6 to reverse, acceleration,
The comb being fixed in flow rate detection comb in middle frame will not follow outer framework to reverse, therefore when reversing, acceleration, flow velocity inspection
The faying surface surveyed between two parts comb (comb being fixed on outer framework and the comb being fixed in middle frame) of comb
Product can change.
Driving comb is disposed between external frame and middle frame and detection comb is driven.Driving comb 101a, 101b,
The comb pair being fixed in middle frame of 101c, 101d by two comb being fixed on the anchor point of glass substrate and between it
Insert group into.To drive detection comb 102a, 102b between two groups of driving combs, be arranged in the left and right sides of middle frame, structure with
Driving comb is identical, be also by with the comb being fixed on the anchor point of glass substrate and the comb being fixed in middle frame
To insert group into.Be connected by U-shaped spring beam 105 between middle frame 110 and inner frame 120, inner frame Y direction with
Moved with middle frame, can independent side-to-side movement in X-direction.The inner side of inner frame 120 is angular velocity detection comb
106a, 106b, 106c, angular velocity detection comb is by fixing the comb on anchor point on a glass substrate and being fixed on inner frame
On comb to insert group into.
Wherein the structure of side is applied with voltage U as shown in Fig. 2 gyroscope is surrounded by external frame in external frame, in
It is that the comb being fixed in external frame in acceleration, flow rate detection comb just carries identical voltage.Acceleration, flow rate detection
The comb being fixed in comb in middle frame 110 will be subject to come from the electrostatic force of the comb on the frame of external frame 6, due to electrostatic
The sucking action of power, pole plate there occurs that rigidity softens, and intrinsic frequency diminishes, and when external frame follows polymer cilium to put together
When dynamic, the overlapping area between acceleration, flow rate detection comb changes, the electrostatic force hair that the comb in middle frame is subject to
Raw to change, the degree of the negative stiffness effects being subject to also changes, and then the intensity of variation of intrinsic frequency also changes.Drive
Each is fixed on comb on the anchor point of glass substrate by upper and lower two fixed fingers in comb 101a, 101b, 101c, 101d
Composition, applies the reverse AC drive voltage of the constant amplitude with identical direct current biasing respectively in upper and lower two fixed fingers, this
Sample middle frame 110 makees the simple harmonic motion in Y direction in the presence of electrostatic force is exchanged.Feedback comb 102a and 102b detection
The motion state of middle frame, and drive circuit is fed back to, drive circuit adjusts drive signal according to feedback signal, in making
Portion's frame work is at the resonant frequency fx.Middle frame is connected with inner frame by U-shaped beam 105a, 105b, 105c, 105d.
Internally the inner side of framework 110, arranges three groups of detection combs 106a, 106b and 106c, and every group of detection comb is by two antisymmetry
The differential capacitor detection comb of arrangement is constituted, and capacitance detecting comb is by fixing fixed fingers on a glass substrate and being fixed on
Movable comb on inner frame to insert group into.
By in the form of sensor array, realizing the differentiation to acceleration and fluid velocity detection, a part is passed
Sensor is hermetically sealed, and another part is normally contacted with the external world, when the external world is for fluid environment, the hair of hermetically sealed sensor
Fluid matasomatism, the sensor without being sealed will not be subject to will be acted on；When external world's input is input into for acceleration,
Then all the sensors can be acted on and be produced torsion.
Glass substrate is as shown in figure 3, including signal lead and metal silicon/glass bonding point.Signal lead includes electrostatic electricity
Pressure input lead 8c, driving input lead 607,608, drive feedback input lead 611,612, detection output signal lead 609,
610；Metal silicon/glass bonding point include fixed pedestal bonding point 8a, 8b, fixed drive comb bonding point 601a, 601b,
601c, 601d, 602a, 602b, 602c, 602d, fixed drive feedback comb bonding point 603a, 603b, 604a, 604b fix inspection
Survey comb bonding point 605a, 605b, 605c, 606a, 606b, 606c.
The present invention is electric using bilateral electrostatic drive for the sensitive bionical hair sensor of flow velocity, acceleration and angular speed
Hold the working method of detection.Constant amplitude of the applying with identical direct current biasing is reverse on driving input lead 607 is with 608 exchanges
Driving voltage, opposite voltage is applied on the driving input lead of symmetrical side, then two middle frames 110 are operated in frequency
Reverse state, comb electric capacity is that the electrostatic drive power that driving direction is subject to is in x-axis：
In formula, n is the movable comb number of teeth of resonator, and ε is dielectric constant, and h is the thickness of structure, d0It is comb spacing, VdFor
The DC offset voltage of driving voltage, VaIt is alternating voltage, ωdIt is the angular frequency of alternating voltage.
Two minor structures 100 are the structures in dotted line frame in Fig. 1, and specifically, the structure in Fig. 2 is a minor structure
100, two sub- symmetrical configurations are set, due to two driving comb electric capacity of minor structure 100 for antisymmetry is arranged, therefore, effect
Electrostatic drive force direction in two minor structures 100 is opposite.
Therefore the middle frame 110 in minor structure makees reverse simple harmonic quantity linearly coupled in the presence of electrostatic drive power in Y-axis.
When the frequency of driving alternating voltage is consistent with the intrinsic frequency of gyroscope driven-mode, linearly coupled displacement is：
In formula, Fd0It is static-electronic driving power amplitude, kxIt is the elastic stiffness of X-direction, QxIt is the quality factor of driven-mode
Linearly coupled speed is：
When gyroscope has extraneous input angle speed ω about the z axiszWhen, according to the right-hand rule, detection quality is in output shaft (X
Axle) acted on by Corioli's acceleration, its size is：
In formula,It is dextrorotation angle between input angle speed and linearly coupled speed.
If inner frame quality is ms, then act on and detect that the Corioli inertial force in quality is：
The direction of Corioli inertial force is in opposite direction with Corioli's acceleration, therefore, act on Ge Shi on inner frame 120 and be used to
Property power it is in opposite direction.In the presence of Corioli inertial force, inner frame 120 does opposite simple harmonic oscillation along sensitive axes (X-axis).
So so that the gap between activity sensitivity comb and fixed sensitivity comb is changed by certain simple harmonic oscillation rule, capacitance difference
After value signal is processed through electronic circuit, output voltage signal can be obtained.Comb voltage signal is two voltage letters of minor structure 100
Number sum, and the size of output voltage signal is proportional to the size of input angle speed.Output voltage signal is compared by phase discriminator
With the phase relation of pumping signal, then the direction of input angle speed can be distinguished.
When gyroscope is driven, feedback comb can detect the intrinsic frequency change of gyro, so as to feed back to drive
On dynamic circuit, driving voltage is adjusted so that gyro is operated in resonant frequency.
Voltage U is applied in external frame 6, when sensor have along X-direction acceleration or to have flow velocity to act on poly-
During compound hair 3, the torque of generation can drive external frame to be reversed around torsion beam 4, now, because middle frame is in Z axis side
To being no free degree, so in acceleration, flow rate detection comb 104a, 104b, 104c, 104d, 104e, 104f, with
Framework connected pole plate in portion's is remained stationary as, and the pole plate being connected with external frame can follow rotation, this brief acceleration, flow rate detection
Overlapping area between comb changes, therefore the comb come from external frame suffered by the comb being connected with middle frame 110
The electrostatic force of tooth changes, according to electrostatic negative stiffness effect, because electrostatic force changes, so the equivalent negative stiffness for producing changes
Become, the intrinsic frequency of middle frame changes.When there is electrostatic negative stiffness, resonant frequency is changed into：
Wherein, k is comb original mechanical stiffness, keIt is the comb mechanical stiffness under the effect of electrostatic force negative stiffness effects, feFor quiet
Resonant frequency under the effect of electric power negative stiffness effects.By feeding back comb to driving the detection of resonant frequency, such that it is able to draw
The angle of hair deflection, the size of acceleration or flow rate speed is known by can be calculated.
The above is only the preferred embodiment of the present invention, it is noted that for the ordinary skill people of the art
For member, under the premise without departing from the principles of the invention, some improvements and modifications can also be made, these improvements and modifications also should
It is considered as protection scope of the present invention.
Claims (7)
1. a kind of bionical hair sensor sensitive for flow velocity, acceleration and angular speed, including glass substrate, its feature exists
In, including bottom signal lead, silicon micro-sensor structure and polymeric hair (3)；The bottom signal lead is arranged in glass
On substrate, the respective electrode of silicon micro-sensor structure is connected；Silicon micro-sensor structure is bonded by anchor point (5) and is suspended in glass lined
On bottom；The polymeric hair (3) is bonded in silicon micro-sensor structure upper surface；
The silicon micro-sensor structure fabrication is on monocrystalline silicon piece, including external frame (6), two middle frames (110) and two
Individual inner frame (120)；External frame (6) both sides are connected by the torsion beam (4) being arranged symmetrically with anchor point (5) respectively；Two
Middle frame is symmetrically embedded in external frame (6), and an identical interior sash is respectively embedded into each middle frame (110)
Frame (120)；The middle frame (110) and inner frame (120) are connected by U-shaped spring beam with anchor point, are suspended in glass
On glass substrate；
Acceleration, flow rate detection comb (104), driving comb are disposed between the external frame (6) and middle frame (110)
(101) and drive detection comb (102)；Inner frame (120) disposed inboard has angular velocity detection comb (106).
2. as claimed in claim 1 a kind of for flow velocity, the bionical hair sensor of acceleration and angular speed sensitivity, its feature
Be, the acceleration, flow rate detection comb (104) by the comb group that is fixed in external frame be fixed in middle frame
Comb group to insert group into.
3. as claimed in claim 2 a kind of for flow velocity, the bionical hair sensor of acceleration and angular speed sensitivity, its feature
It is that the driving comb (101) is by upper and lower two parts comb to insert group into wherein lower comb is fixed on anchor point.
4. as claimed in claim 2 a kind of for flow velocity, the bionical hair sensor of acceleration and angular speed sensitivity, its feature
Be, driving detection comb (102) by upper and lower two parts comb to insert group into, wherein lower comb is fixed on anchor point, on
Comb is fixed in middle frame (110).
5. as claimed in claim 2 a kind of for flow velocity, the bionical hair sensor of acceleration and angular speed sensitivity, its feature
Be, the angular velocity detection comb (106) by upper and lower two parts comb to insert group into, wherein lower comb is fixed on anchor point,
Upper comb dent is fixed on inner frame (120).
6. a kind of for flow velocity, the bionical hair sensor of acceleration and angular speed sensitivity as described in claim 1-5 is any,
Characterized in that, the polymeric hair (3) is obtained by polymeric material SU-8 by stretching.
7. a kind of for flow velocity, the bionical hair sensor of acceleration and angular speed sensitivity as described in claim 1-5 is any,
Characterized in that, be with same frequency and reversed-phase mode of operation when symmetrical middle frame and inner frame are driven and are detected, inspection
Survey mechanism and realize differential detection.
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| CN104833350B (en) * | 2015-04-24 | 2017-05-31 | 东南大学 | For flow velocity and the sensitive bionical hair sensor of acceleration and detection method |
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| CN111521170B (en) * | 2020-05-22 | 2022-10-25 | 东南大学 | Master-slave mass micro mechanical hair gyroscope for driving amplitude amplification |
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| WO2007143123A2 (en) * | 2006-06-02 | 2007-12-13 | The Board Of Trustees Of The University Of Illinois | Micromachined artificial haircell |
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| CN102062604A (en) * | 2009-11-17 | 2011-05-18 | 北京大学 | Capacitive micromachined tuning fork gyroscope |
| CN102749479B (en) * | 2012-06-18 | 2014-04-23 | 东南大学 | Vertical axis silicon micro resonant mode accelerometer based on negative stiffness effect |
| ITTO20120855A1 (en) * | 2012-09-28 | 2014-03-29 | Milano Politecnico | INTEGRATED STRUCTURE OF DETECTIVE DETECTION OF ACCELERATION AND ANGULAR SPEED AND RELATIVE MEMS SENSOR DEVICE |
| CN103760382B (en) * | 2014-01-16 | 2016-04-27 | 中国工程物理研究院电子工程研究所 | The micro-resonant acceleration sensor chip of a kind of electrostatic stiffness formula silicon |
| CN104089612B (en) * | 2014-07-28 | 2017-02-15 | 东南大学 | Dual-tuning fork effect-based symmetric full-decoupling dual-mass block silicon micro-gyroscope |
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