CN105021176A - Mems gyroscope measurement and control circuit - Google Patents
Mems gyroscope measurement and control circuit Download PDFInfo
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- CN105021176A CN105021176A CN201410166890.3A CN201410166890A CN105021176A CN 105021176 A CN105021176 A CN 105021176A CN 201410166890 A CN201410166890 A CN 201410166890A CN 105021176 A CN105021176 A CN 105021176A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/04—Programme control other than numerical control, i.e. in sequence controllers or logic controllers
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- Automation & Control Theory (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Gyroscopes (AREA)
Abstract
The invention discloses an MEMS gyroscope measurement and control circuit which is an SOPC digital processing circuit based on an IP core. The MEMS gyroscope measurement and control circuit is characterized in that the IP core receives an MEMS gyroscope driving shaft detection signal and outputs a corresponding driving signal; the IP core receives an MEMS gyroscope sensing shaft detection signal and outputs the angular speed of an MEMS gyroscope. On the basis of an existing MEMS gyroscope, the precise of the gyroscope is improved by a method of realizing high gain and low noise of the measurement and control circuit so as to improve the overall stability and interference rejection of the gyroscope by virtue of an SOPC digital processing technology, a charge amplifier and imbalanced capacitance compensation.
Description
Technical field
The invention belongs to error signal processing technology field, be specifically related to a kind of MEMS gyro instrument telemetry circuit.
Background technology
MEMS (micro electro mechanical system) (Micro Electro Mechanical System, MEMS) is the new ambit of of growing up in conjunction with precision machinery technology on microelectric technique basis.MEMS technology has the advantages such as volume is little, lightweight, low in energy consumption, the Mierotubule-associated proteins got up based on this technical development is exactly the MEMS sensor of a quasi-representative, its appearance greatly extends the range of application of inertial technology, makes a study hotspot based on Mierotubule-associated proteins builds low cost, high performance micro-inertial navigation system becomes rapidly current field of inertia technology.
At present, the performance of MEMS gyro instrument, especially precision index, also have larger gap with traditional gyro, can only be applied to the occasion of low accuracy requirement.Affect the factor of MEMS gyro instrument precision except responsive original paper manufacturing process, maximum effect factor is the drift of telemetry circuit itself.The present invention therefore.
Summary of the invention
The object of the invention is to provide a kind of MEMS gyro instrument telemetry circuit, solve the drifting problem of the telemetry circuit of MEMS gyro instrument in prior art, the present invention is on the basis of existing MEMS gyro instrument, realized high-gain, the low noise of telemetry circuit by SOPC digital processing technology, charge amplifier, detuning capacitor compensation method, thus improve the stability of gyro entirety and the method for antijamming capability.
In order to solve these problems of the prior art, technical scheme provided by the invention is:
A kind of MEMS gyro instrument telemetry circuit is the SOPC digital processing circuit based on IP kernel, it is characterized in that described IP kernel receives MEMS gyro instrument driving shaft detection signal, and exports corresponding drive singal; And described IP kernel receives MEMS gyro instrument sensitive axes detection signal, and export the angular speed of MEMS gyro instrument; Described driving shaft detection signal is as carrier signal after the demodulation of LMSD demodulator circuit, and its quadrature component carries out filtering process through Butterworth4 rank low-pass filter, carries out amplitude closed loop after carrying out amplitude set by PI controller; Its in-phase component carries out filtering process through Butterworth4 rank low-pass filter, carries out phase place closed loop after carrying out phase settings by PI controller; Two components after closed loop carry out sine wave synthesis, output drive signal; Described sensitive axes detection signal is as carrier signal after the demodulation of LMSD demodulator circuit, and its in-phase component carries out filtering process through Butterworth4 rank low-pass filter, exports the angular speed of MEMS gyro instrument after carrying out temperature compensation.
In preferred technical scheme, described temperature compensation be by described driving shaft detection signal as carrier signal after the demodulation of LMSD demodulator circuit, its in-phase component carries out filtering process through Butterworth4 rank low-pass filter, carries out phase place closed loop and carry out temperature compensation by PI controller to the carrier signal after filtering process after carrying out phase settings by PI controller.
In preferred technical scheme, described telemetry circuit also comprises the change capacitive detection circuit detected the change capacitor noise signal of MEMS gyro instrument, and described change capacitive detection circuit comprises prime charge amplifier (CSA) circuit, circuit of high pass filter, synchronous demodulation circuit and the low-pass filter circuit that cascade is arranged.
In preferred technical scheme, described telemetry circuit also comprises and utilizes isolated detuning capacitor signal to control the detuning capacitor signal compensation circuit of the gain of variable gain amplifier, wherein the output negative feedback of variable gain amplifier is to the input end of charge amplifier, is eliminated by the output voltage signal caused by detuning capacitor from the output of charge amplifier.
The invention discloses a kind of design of high stability MEMS gyro instrument telemetry circuit, it is characterized in that: on the basis of existing MEMS gyro instrument, compensate by SOPC digital processing technology, charge amplifier, detuning capacitor the high-gain, the low noise that realize telemetry circuit, thus the method for the stability and antijamming capability that improve gyro entirety improves gyrostatic precision.The present invention relates to a kind of MEMS gyro instrument telemetry circuit, particularly relate to and compensate by SOPC digital processing technology, charge amplifier, detuning capacitor the high-gain, the low noise that realize telemetry circuit, thus improve the stability of gyro entirety and the method for antijamming capability.
Affect the factor of MEMS gyro instrument precision in prior art except responsive original paper manufacturing process, maximum effect factor is the drift of telemetry circuit itself, therefore, compensated and a set of gyroscope signal process, control algolithm by SOPC digital processing technology, charge amplifier, detuning capacitor, effectively solve the problem of gyro circuit drift and complicacy, thus promote progress and the stability of MEMS gyro instrument.
So-called SOPC digital processing circuit, because MEMS gyro is while microminiaturization, the negative effect brought is exactly that its signal is very faint, therefore the gain of testing circuit is larger, and then comparatively classical spinning top is larger on the impact of its overall performance to cause its temperature stability, therefore must design the telemetry circuit of high-temperature stability.
The approach improving telemetry circuit stability has three:
(1) take measures in circuit design, avoid temperature sensitive circuit form, take the measures such as gain compensation that temperature drift is reduced to alap degree simultaneously;
(2) sufficient age stability process is carried out to circuit, the stability of circuit is improved further;
(3) compensation mechanism that design is necessary, compensates last remaining temperature drift;
The present invention adopts the mode based on the SOPC digital processing circuit of IP kernel, and such one is to realize complicated control method, and to reach the full closed loop control of gyration, two is digitizedly to export, and three is the temperature drift problems as far as possible can avoiding mimic channel.
On the development basis of digital MEMS gyro, develop the special I P core (as Fig. 1) for MEMS gyro observing and controlling, the signal that can complete MEMS inertial sensor in conjunction with soft-core processor reads and closed-loop control, therefore for the observing and controlling of MEMS inertia type instrument, by the volume using FPGA can reduce system further, and significantly can improve the dirigibility of circuit.Pass through digitizing technique, the adjustment of MEMS inertia type instrument observing and controlling parameter is simpler, and complicated Error Compensation Algorithm can be realized, therefore adopt digitizing testing and control project not only can improve the stability of instrument, and the debugging after device industrialization, calibration and calibration cost can be reduced.
So-called charge amplifier, owing to changing the frequency of capacitance signal at the frequency band range of a few KHz to tens KHz, the overriding noise source of charge amplifier is the 1/f noise of metal-oxide-semiconductor.In order to suppress 1/f noise, amplifier to be lacked of proper care and low-frequency disturbance, we adopt CHS (ChopperStabilization) technology in CSA circuit, as accompanying drawing 2.In the gyroscope structure of reality, parasitic coupling capacitance can be there is between each group comb electric capacity, as shown in Figure 3.At this moment Hi-pass filter is just needed to coordinate CHS technology effectively to suppress the interference of low frequency electricity coupled signal.The one-piece construction of change capacitive detection circuit as shown in Figure 4, forms primarily of four parts: prime charge amplifier (CSA), Hi-pass filter, synchronous demodulation and low-pass filter.
So-called gyro detuning capacitor compensates, and due to actual process manufacturing tolerance, gyro Differential Detection electric capacity exists detuning capacitor (difference between differential capacitance initial value), can reduce the dynamic range of capacitive detection circuit, need to compensate.
The method of traditional suppression detuning capacitor mainly contains two kinds: building-out capacitor array on additional bucking voltage and sheet.These two kinds traditional detuning capacitor compensation methodes all need to carry out independent test and correction for each gyro.The present invention proposes a kind of method that self-adaptation realizes detuning capacitor compensation, principle as shown in Figure 5.Utilize isolated detuning capacitor signal to control the gain of variable gain amplifier, then by the input end of the output negative feedback of variable gain amplifier (VGA:Variable Gain Amplifier) to charge amplifier, output voltage signal caused by detuning capacitor is eliminated from the output of charge amplifier, thus realizes the compensation to detuning capacitor.Regulate owing to not needing to carry out extra test in the compensation process of detuning capacitor, and the effect compensated is determined by the gain of feedback loop, therefore the method has more practicality relative to traditional detuning capacitor compensation method.Fig. 6 is the circuit diagram of a kind of specific implementation of detuning capacitor adaptive equalization.
In sum, in MEMS gyro instrument telemetry circuit, utilize SOPC digital processing technology, charge amplifier and gyro detuning capacitor compensation technique, realize the high-gain of telemetry circuit, low noise, thus improve stability and the antijamming capability of gyro entirety, the effective precision improving MEMS gyro.
Accompanying drawing explanation
Below in conjunction with drawings and Examples, the invention will be further described:
Fig. 1 is single shaft of the present invention digital MEMS gyro observing and controlling principle;
Fig. 2 is the CSA circuit structure of employing CHS technology of the present invention;
Fig. 3 is the parasitic coupling capacitance in gyroscope structure of the present invention;
Fig. 4 is the one-piece construction of capacitive detection circuit of the present invention;
Fig. 5 is the schematic diagram of detuning capacitor adaptive equalization of the present invention;
Fig. 6 is the circuit diagram of a kind of specific implementation of detuning capacitor adaptive equalization of the present invention.
Embodiment
Below in conjunction with specific embodiment, such scheme is described further.Should be understood that these embodiments are not limited to for illustration of the present invention limit the scope of the invention.The implementation condition adopted in embodiment can do further adjustment according to the condition of concrete producer, and not marked implementation condition is generally the condition in normal experiment.
Embodiment
As shown in Figure 1, the MEMS gyro instrument telemetry circuit of the present embodiment is the SOPC digital processing circuit based on IP kernel, and described IP kernel receives MEMS gyro instrument driving shaft detection signal, and exports corresponding drive singal; And described IP kernel receives MEMS gyro instrument sensitive axes detection signal, and export the angular speed of MEMS gyro instrument; Described driving shaft detection signal is as carrier signal after the demodulation of LMSD demodulator circuit, and its quadrature component carries out filtering process through Butterworth4 rank low-pass filter, carries out amplitude closed loop after carrying out amplitude set by PI controller; Its in-phase component carries out filtering process through Butterworth4 rank low-pass filter, carries out phase place closed loop after carrying out phase settings by PI controller; Two components after closed loop carry out sine wave synthesis, output drive signal; Described sensitive axes detection signal is as carrier signal after the demodulation of LMSD demodulator circuit, and its in-phase component carries out filtering process through Butterworth4 rank low-pass filter, exports the angular speed of MEMS gyro instrument after carrying out temperature compensation.
Because MEMS gyro is while microminiaturization, the negative effect brought is exactly that its signal is very faint, and therefore the gain of testing circuit is comparatively large, and then comparatively classical spinning top is larger on the impact of its overall performance to cause its temperature stability.
The present invention adopts the mode based on the SOPC digital processing circuit of IP kernel, and such one is to realize complicated control method, and to reach the full closed loop control of gyration, two is digitizedly to export, and three is the temperature drift problems as far as possible can avoiding mimic channel.
On the development basis of digital MEMS gyro, develop the special I P core for MEMS gyro observing and controlling, the signal that can complete MEMS inertial sensor in conjunction with soft-core processor reads and closed-loop control, therefore for the observing and controlling of MEMS inertia type instrument, by the volume using FPGA can reduce system further, and significantly can improve the dirigibility of circuit.Pass through digitizing technique, the adjustment of MEMS inertia type instrument observing and controlling parameter is simpler, and complicated Error Compensation Algorithm can be realized, therefore adopt digitizing testing and control project not only can improve the stability of instrument, and the debugging after device industrialization, calibration and calibration cost can be reduced.
Described temperature compensation be by described driving shaft detection signal as carrier signal after the demodulation of LMSD demodulator circuit, its in-phase component carries out filtering process through Butterworth4 rank low-pass filter, carries out phase place closed loop and carry out temperature compensation by PI controller to the carrier signal after filtering process after carrying out phase settings by PI controller.
As shown in Figure 4, described telemetry circuit also comprises the change capacitive detection circuit detected the change capacitor noise signal of MEMS gyro instrument, and described change capacitive detection circuit comprises prime charge amplifier (CSA) circuit, circuit of high pass filter, synchronous demodulation circuit and the low-pass filter circuit that cascade is arranged.
Owing to changing the frequency of capacitance signal at the frequency band range of a few KHz to tens KHz, the overriding noise source of charge amplifier is the 1/f noise of metal-oxide-semiconductor.In order to suppress 1/f noise, amplifier to be lacked of proper care and low-frequency disturbance, in CSA circuit, adopt CHS (Chopper Stabilization) technology, as Fig. 2.In the gyroscope structure of reality, parasitic coupling capacitance can be there is between each group comb electric capacity, as shown in Figure 3.At this moment Hi-pass filter is just needed to coordinate CHS technology effectively to suppress the interference of low frequency electricity coupled signal.
As shown in Figure 5 and Figure 6, described telemetry circuit also comprises and utilizes isolated detuning capacitor signal to control the detuning capacitor signal compensation circuit of the gain of variable gain amplifier, wherein the output negative feedback of variable gain amplifier is to the input end of charge amplifier, is eliminated by the output voltage signal caused by detuning capacitor from the output of charge amplifier.
Due to actual process manufacturing tolerance, there is detuning capacitor (difference between differential capacitance initial value) in gyro Differential Detection electric capacity, can reduce the dynamic range of capacitive detection circuit, need to compensate.The present invention utilizes isolated detuning capacitor signal to control the gain of variable gain amplifier, then by the input end of the output negative feedback of variable gain amplifier (VGA:Variable Gain Amplifier) to charge amplifier, output voltage signal caused by detuning capacitor is eliminated from the output of charge amplifier, thus realizes the compensation to detuning capacitor.Regulate owing to not needing to carry out extra test in the compensation process of detuning capacitor, and the effect compensated is determined by the gain of feedback loop, therefore the method has more practicality relative to traditional detuning capacitor compensation method.Fig. 6 is the circuit diagram of a kind of specific implementation of detuning capacitor adaptive equalization.
Above-described embodiment, only for technical conceive of the present invention and feature are described, its object is to person skilled in the art can be understood content of the present invention and implement according to this, can not limit the scope of the invention with this.All equivalent transformations of doing according to Spirit Essence of the present invention or modification, all should be encompassed within protection scope of the present invention.
Claims (4)
1. MEMS gyro instrument telemetry circuit is the SOPC digital processing circuit based on IP kernel, it is characterized in that described IP kernel receives MEMS gyro instrument driving shaft detection signal, and exports corresponding drive singal; And described IP kernel receives MEMS gyro instrument sensitive axes detection signal, and export the angular speed of MEMS gyro instrument; Described driving shaft detection signal is as carrier signal after the demodulation of LMSD demodulator circuit, and its quadrature component carries out filtering process through Butterworth 4 rank low-pass filter, carries out amplitude closed loop after carrying out amplitude set by PI controller; Its in-phase component carries out filtering process through Butterworth 4 rank low-pass filter, carries out phase place closed loop after carrying out phase settings by PI controller; Two components after closed loop carry out sine wave synthesis, output drive signal; Described sensitive axes detection signal is as carrier signal after the demodulation of LMSD demodulator circuit, and its in-phase component carries out filtering process through Butterworth 4 rank low-pass filter, exports the angular speed of MEMS gyro instrument after carrying out temperature compensation.
2. MEMS gyro instrument telemetry circuit according to claim 1, it is characterized in that described temperature compensation be by described driving shaft detection signal as carrier signal after the demodulation of LMSD demodulator circuit, its in-phase component carries out filtering process through Butterworth 4 rank low-pass filter, carries out phase place closed loop and carry out temperature compensation by PI controller to the carrier signal after filtering process after carrying out phase settings by PI controller.
3. MEMS gyro instrument telemetry circuit according to claim 1, it is characterized in that described telemetry circuit also comprises the change capacitive detection circuit detected the change capacitor noise signal of MEMS gyro instrument, described change capacitive detection circuit comprises prime charge amplifier (CSA) circuit, circuit of high pass filter, synchronous demodulation circuit and the low-pass filter circuit that cascade is arranged.
4. MEMS gyro instrument telemetry circuit according to claim 1, it is characterized in that described telemetry circuit also comprises utilizes isolated detuning capacitor signal to control the detuning capacitor signal compensation circuit of the gain of variable gain amplifier, wherein the output negative feedback of variable gain amplifier is to the input end of charge amplifier, is eliminated by the output voltage signal caused by detuning capacitor from the output of charge amplifier.
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| CN201410166890.3A CN105021176B (en) | 2014-04-24 | 2014-04-24 | MEMS gyroscope telemetry circuit |
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| CN201410166890.3A CN105021176B (en) | 2014-04-24 | 2014-04-24 | MEMS gyroscope telemetry circuit |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN107817432A (en) * | 2017-10-23 | 2018-03-20 | 北京晨晶电子有限公司 | A kind of MEMS gyroscope circuit board detecting method and device |
| CN109883409A (en) * | 2019-01-31 | 2019-06-14 | 无锡城市职业技术学院(无锡高等师范学校无锡环境科学与工程研究中心) | One kind being based on FPGA gyro array signal processing method |
| CN117647240A (en) * | 2024-01-29 | 2024-03-05 | 中科亿海微电子科技（苏州）有限公司 | Device and method for performing phase-sensitive detection on fiber optic gyroscope |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107817432A (en) * | 2017-10-23 | 2018-03-20 | 北京晨晶电子有限公司 | A kind of MEMS gyroscope circuit board detecting method and device |
| CN107817432B (en) * | 2017-10-23 | 2019-12-20 | 北京晨晶电子有限公司 | MEMS gyroscope circuit board detection method and device |
| CN109883409A (en) * | 2019-01-31 | 2019-06-14 | 无锡城市职业技术学院(无锡高等师范学校无锡环境科学与工程研究中心) | One kind being based on FPGA gyro array signal processing method |
| CN117647240A (en) * | 2024-01-29 | 2024-03-05 | 中科亿海微电子科技（苏州）有限公司 | Device and method for performing phase-sensitive detection on fiber optic gyroscope |
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