CN104535057B - A kind of silicon micro mechanical linearly coupled formula gyro and its quadrature error rigidity bearing calibration - Google Patents
A kind of silicon micro mechanical linearly coupled formula gyro and its quadrature error rigidity bearing calibration Download PDFInfo
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- CN104535057B CN104535057B CN201410830124.2A CN201410830124A CN104535057B CN 104535057 B CN104535057 B CN 104535057B CN 201410830124 A CN201410830124 A CN 201410830124A CN 104535057 B CN104535057 B CN 104535057B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
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- G—PHYSICS
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- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
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Abstract
The invention discloses the rigidity bearing calibration of a kind of silicon micro mechanical linearly coupled formula gyro and its quadrature error, this method includes：Driving closed loop excitation driven-mode makes driven-mode with fixed amplitude vibration on its resonant frequency point；Demodulate to obtain orthogonal signalling amplitude through drive displacement signal after extracting signal in sense channel, just it comparative result will be sent into quadrature alignment controller more afterwards with reference signal；Controller output signal exports the orthogonal rigidity into gyroscope structure through voltage regulator module and corrects broach, and produces electrostatic negative stiffness to correct the coupling stiffness of generation quadrature error.The purpose of orthogonal coupling stiffness can be completely eliminated to reach according to the different auto-adjustment control amounts of the orthogonal coupling stiffness of target gyroscope structure in controller in the present invention, so as to significantly reduce influence of the mismachining tolerance to gyro performance.The method of the invention has the advantages that small volume, easy realization, reliability is high, temperature performance is good, can be integrated with gyroscope structure.
Description
Technical field
The present invention relates to silicon micromechanical gyroscope field, and in particular to a kind of silicon micro mechanical linearly coupled formula gyro and its orthogonal mistake
Poor rigidity bearing calibration.
Background technology
Silicon micromechanical gyroscope is one kind MEMS (Micro-Electro-Mechanical System, MEMS)
The inertia measurement sensor that technology is process, its use Coriolis effect principle measure carrier angular rate information, have small volume,
It is low in energy consumption, in light weight, cost is low, overload-resistant characteristic is strong, being easily integrated and the advantages that produce in batches.At present in many fields all
There is application, such as：Inertial navigation, automotive safety, Industry Control, consumer electronics etc..It was initially born at the end of the eighties in last century,
With the continuous development of processing technology and observation and control technology, the precision of silicon micromechanical gyroscope also gradually steps up, and silicon is micro- in the world at present
Mechanical gyro degree of precision up to 1 °/h (bias instaility) within, can meet the precision need of Tactics-level gyroscope
Ask.The one kind of silicon micro mechanical linearly coupled formula gyro as silicon micromechanical gyroscope, obtains pushing away for each scientific research institution and company in recent years
High, compared to the silicon micromechanical gyroscope (angular oscillation formula, rotator type etc.) with other working methods, linearly coupled formula gyroscope structure, which has, to be added
The advantages that work is simple in construction, and detection signal has linearly been spent.At present, the higher silicon micromechanical gyroscope of the precision of international mainstream is most of
All employ linearly coupled structure.
Fig. 1 is that typical silicon micromechanical gyroscope forms structural representation, in preferable gyroscope structure, gyro system be present
The kinetic equation of system is：
In formula (A1), x is driven-mode displacement；cxx, cyy, kxx, kyyRespectively driving and sensed-mode equivalent damping and
Equivalent stiffness；Fdx=Fdsin(ωdT) it is driving force suffered by driving axial structure；mxAnd myRespectively drive and detect axially knot
Structure equivalent mass；ΩzFor input angle speed；Y is detection axial arrangement displacement；myFor brother's formula quality；In order to ensure that driven-mode obtains
To maximum vibration amplitude, there is ωd=ωx.And in actual application, due to caused error in process, cause gyro
The undesirable factors such as coupling stiffness, Coupling Damping are contained in structure, then undesirable factor is added in formula (A1) has：
In formula (A2), cxy, kxy, cyx, kyxRespectively driven-mode is coupled to the Coupling Damping of sensed-mode and coupled firm
Degree, sensed-mode are coupled to the Coupling Damping and coupling stiffness of driven-mode.Under normal circumstances, gyroscope structure encapsulation is using true
Empty form, so Coupling Damping c in formula (A2)xyAnd cyxThe equal very little of item.It is acerous and the influence of coupling stiffness is very big by contrast
When speed inputs, equivalent inpnt angular speed caused by coupling stiffness is brother's formula in-phase signal tens of or even hundreds times, in reality
In engineering process all there is quadrature error in most of structure.Because the producing cause of orthogonal coupling stiffness obtains for processing
Elastic axis direction with design major axes orientation angle β be presentQx, then have：
In formula (A3), kxAnd kyThe respectively design rigidity of driven-mode and sensed-mode.Further compare above formula to understand：
K is understood from formula (A4)yxAnd kxyIt is equal.
Brother's formula signal is extracted in sense channel at present and mostly use phase demodulation method, this method understand in implementation process by
Certain demodulation phase angle error is introduced in reasons such as circuit components parameter matching errors, so that partial orthogonality signal is carried by mistake
Being taken as brother's formula signal then influences gyro performance.Therefore, the coupling stiffness for being inherently eliminated generation quadrature error is to reduce just
Hand over error to gyro performance impact, improve the effective ways of gyro static properties.
The content of the invention
Goal of the invention：To solve problems of the prior art, the present invention provides a kind of static properties good silicon microcomputer
Tool linearly coupled formula gyro and its quadrature error rigidity bearing calibration, reduce gyroscope structure is influenceed by mismachining tolerance, to improve top
Spiral shell performance, quadrature alignment can be carried out to different gyro individuals automatically in larger correcting range by realizing.
Technical scheme：In order to preferably realize above-mentioned purpose, the invention provides a kind of silicon micro mechanical linearly coupled formula gyro,
Encapsulated including gyroscope structure, gyro telemetry circuit and gyro, specifically：
Described gyroscope structure includes driving axial structure, detection axial arrangement, coupling stiffness module and quadrature alignment and born
Rigidity produces structure；
Described driving axial structure includes driving incentive structure, driving quality and drive displacement extraction structure, described
Driving axial structure is used to ensure stable vibration of brother's formula quality in driving direction, and necessary condition is provided for Ge Shili generation；
Wherein, described driving incentive structure is used to external voltage being converted into electrostatic force, and it is solid that the driving incentive structure includes driving
Determine broach and driving activity broach；Described driving quality includes driver framework and first brother's formula quality；The driver framework is used
In connection driving activity broach, driven-mode support beam and Ge Shi mass, the driving activity broach is scattered to be arranged in driving frame
It is used to increase the electrostatic force conversion efficiency that capacity area improves unit area on frame, the driven-mode support beam is used to connect anchor
Point and driver framework simultaneously play a supportive role, and displacement caused by driver framework is XM, and brother's formula quality is used to produce Coriolis effect；
Described drive displacement extraction structure is used to driver framework displacement XM being converted to the XV outputs of driving capacitance signal, described driving
Displacement extraction structure includes driving detection fixed broach and driving detection activity broach；
Described detection axial arrangement is produced by detection quality and detection displacement extraction structure composition for extracting by Ge Shili
Raw sensed-mode displacement；
Described coupling stiffness module is coupled to the coupling stiffness of sensed-mode by driven-mode and sensed-mode is coupled to
The coupling stiffness composition of driven-mode, the non-ideal factor belonged to during Gyroscope Design, is produced by mismachining tolerance；
Described quadrature alignment negative stiffness generation mechanism includes four groups of quadrature alignment negative stiffnesses and produces broach, the orthogonal school
Positive negative stiffness produces central frame both sides crossed-symmetrical arrangement of the broach along brother's formula quality, for producing electrostatic negative stiffness to offset
Coupling stiffness.
Described gyro telemetry circuit includes driving closed loop, measure loop and quadrature alignment closed loop；Described
Driving closed loop is driven-mode for ensureing the driving axial structure along driving direction perseverance amplitude vibrations and vibration frequency
Natural resonance frequency；Described measure loop is used to a detection capacitance change YV parts being adjusted to YSE outputs, another part
Exported after demodulating and filter on the basis of driving pumping signal XS as gyro.
Specifically, described measure loop includes prime amplification interface, secondary amplifier, brother's formula demodulator and LPF
Device, wherein, the prime amplification interface is used to detection capacitance change YV being converted into voltage signal and tentatively amplified；Institute
Secondary amplifier is stated further to amplify prime amplification interface output signal, and output signal YSE；Brother's formula demodulator is to drive
Demodulation YSE obtains Ge Shi signals and two frequency-doubled signals on the basis of dynamic pumping signal XS；The low pass filter includes the first low pass
Wave filter and the second wave filter, wherein, two frequency-doubled signals that the first wave filter is used to filter out demodulator output are pure to obtain
Ge Shi signal amplitudes, the second low pass filter are used to export LPF as gyroscope final output.
Described coupling stiffness module includes the coupling stiffness k that driven-mode is coupled to sensed-modeyxWith sensed-mode coupling
Close the coupling stiffness k of driven-modexy, wherein, described kyxDriver framework displacement XM can be converted to bonding force FXQ applications
Onto detection quality；Described kxyDetection framework displacement YM can be converted to bonding force FYQ to be applied in driving quality.
Described quadrature alignment negative stiffness produces broach and includes the first fixed broach, the second fixed broach, the 3rd fixation comb
Tooth, the 4th fixed broach and Ge Shi mass, wherein, turned between the first fixed broach and the second fixed broach, the 3rd fixes comb
Turned between tooth and the 4th fixed broach；Described quadrature alignment negative stiffness produce broach use do not design equidistantly it is quiet to produce
Electric negative stiffness；Described quadrature alignment negative stiffness generation mechanism is coupled to the coupling stiffness k of sensed-mode in correction driven-modeyx
While recoverable sensed-mode be coupled to the coupling stiffness k of driven-modexy。
Described quadrature alignment closed loop includes drive displacement amplifier, quadrature demodulator, orthogonal low pass filter, ratio
Compared with device, quadrature alignment benchmark, quadrature alignment controller and chromacoder, wherein, described drive displacement amplifier is not
XV is amplified on the premise of changing driving capacitance signal XV, to meet the amplitude demand of demodulation reference signal；The quadrature demodulation
Device extracts the orthogonal signalling in the output signal of secondary amplifier in sense channel, produces two frequency-doubled signals and quadrature error width
Value signal；The orthogonal low pass filter filters two frequency-doubled signals, only retains quadrature amplitude signal；The comparator will be orthogonal
Amplitude signal and the quadrature alignment benchmark compare, and produce comparative result；The quadrature alignment controller is relatively tied according to described
Fruit produces control signal；The chromacoder includes flow directing device, phase inverter, the first buffer and the second buffer, uses
Delivered in generation QS signals after control signal is changed after quadrature alignment negative stiffness generation mechanism changes control signal and produce QS
Signal delivers to quadrature alignment negative stiffness generation mechanism.
Present invention further proposes a kind of silicon micro mechanical linearly coupled formula gyroscope quadrature error rigidity bearing calibration, including such as
Lower step：
(1) orthogonal signalling amplitude in sense channel is obtained in real time；
(2) using step (1) the orthogonal signalling amplitude as controlled quentity controlled variable, phase is obtained by comparing itself and reference signal relation
The quadrature alignment control signal answered；
(3) step (2) the quadrature alignment control signal is changed, is sent into gyroscope structure, and orthogonal school therein
Positive negative stiffness generation mechanism, which coordinates, produces electrostatic negative stiffness, and the electrostatic negative stiffness can be with balanced quadrature coupling stiffness；Thus, institute
The coupling stiffness k that driven-mode is coupled to sensed-mode can be eliminated simultaneously by stating quadrature alignment negative stiffness generation mechanismyxWith detection mould
State is coupled to the coupling stiffness k of driven-modexy。
General principle is by driving closed loop to encourage driven-mode, driven-mode is vibrated with fixed amplitude humorous at its
On vibration frequency point；Obtained just through the demodulation (orthogonal with Ge Shi signal phases) of drive displacement signal after signal is extracted in sense channel
Hand over signal amplitude；Comparative result is sent into quadrature alignment controller by orthogonal signalling amplitude and reference signal more afterwards；Controller
Output signal exports the orthogonal rigidity into gyroscope structure through voltage regulator module and corrects broach, and produces electrostatic negative stiffness with school
The positive coupling stiffness for producing quadrature error.
Specifically, step (1) concretely comprises the following steps：
The output signal XV of drive displacement extraction structure and the output signal YV of detection displacement extraction structure, institute are obtained in real time
Stating drive displacement signal should be in driver framework displacement with the same phase of frequency；
The output signal XV amplitudes of drive displacement extraction structure, which are adjusted, makes its amplitude be suitable as demodulating benchmark, obtains
To XSE, its frequency and phase invariant in the processing procedure；
The output signal YV amplitudes for detecting displacement extraction structure, which are adjusted, makes its amplitude be adapted to be demodulated, and obtains YSE,
Its frequency and phase invariant in the processing procedure；
YSE is demodulated using XSE as benchmark；
The low-pass filtered device of above-mentioned demodulation result is filtered out into the high-frequency signal after demodulation, then obtains orthogonal signalling amplitude.
Step (2) concretely comprise the following steps：
The orthogonal signalling amplitude that the step (1) is obtained is judged compared with quadrature alignment benchmark；
Above-mentioned judged result is sent into quadrature alignment controller, further obtains Quadrature control signals；
The Quadrature control signals are inputted to chromacoder, to obtain quadrature alignment negative stiffness generation mechanism just
Hand over correcting controlling signal.
Step (3) concretely comprise the following steps：
Caused electrostatic negative stiffness then produces with obtaining new coupling stiffness after the original orthogonal coupling stiffness superposition of structure
Raw new quadrature error signal；
According to the step (1) and the result of step (2), quadrature alignment control signal is readjusted, finally makes orthogonal letter
Number amplitude is equal with quadrature alignment benchmark；
Above-mentioned middle quadrature alignment benchmark is set to 0, then quadrature alignment negative stiffness is completely eliminated orthogonal after system is stable
Coupling stiffness.
Beneficial effect：The present invention is used for silicon micro mechanical linearly coupled formula gyroscope quadrature error rigidity and corrected, and can effectively reduce top
In spiro structure caused by mismachining tolerance quadrature error, compared with prior art, its tool has the advantage that：
(1) present invention utilizes drive displacement signal and orthogonal signalling frequency equal phase identical feature, with phase demodulation
Quadrature signal amplitude is extracted based on method, using quadrature alignment closed loop control method, structure Coupling is offset with electrostatic negative stiffness
Rigidity, it can significantly reduce driven-mode simultaneously and be coupled to the coupling stiffness of sensed-mode and sensed-mode is coupled to driven-mode
Coupling stiffness；
(2) after using the method for the present invention, silicon micromechanical gyroscope performance can significantly improve；
(3) present invention has the advantages that low good real-time, efficiency high, cost, small volume, small power consumption, easy to use, simultaneously
Quadrature alignment can be carried out to different gyro individuals automatically in larger correcting range, the engineering batch for being readily applicable to gyro is raw
Production；
(4) present invention is for the different actual conditions of the orthogonal coupling stiffness of different gyros individual, it is proposed that quadrature alignment is certainly
Autocontrol system, the system can be corrected automatically in correcting range according to different orthogonal coupling stiffness, in gyro engineering
It is of very high actual application value in metaplasia production.
Brief description of the drawings
Fig. 1 is that typical silicon micromechanical gyroscope forms structural representation；
Fig. 2 is gyroscope structure and telemetry circuit connection diagram；
Fig. 3 is structure Coupling stiffness schematic diagram；
Fig. 4 is quadrature alignment negative stiffness generation mechanism schematic diagram；
Fig. 5 is detection open loop circuit theory schematic diagram；
Fig. 6 is quadrature alignment closed loop circuit theory schematic diagram；
Fig. 7 is chromacoder structural representation.
Embodiment
Below in conjunction with the accompanying drawings and specific embodiment, methods described that the present invention is furture elucidated, it should be understood that these embodiments are only
For illustrating the present invention rather than limitation the scope of the present invention, after the present invention is read, those skilled in the art are to the present invention
The modifications of the various equivalent form of values fall within the application appended claims limited range.
As shown in figure 1, a kind of typical silicon micromechanical gyroscope composition structural representation, including gyroscope structure 1, gyro are surveyed
Circuit 2 and gyro encapsulation 3 are controlled, for correcting the quadrature error of silicon micro mechanical linearly coupled formula gyro.Gyroscope structure 1 is by driving axial
Structure 11, detection axial arrangement 12, coupling stiffness module 13 and quadrature alignment negative stiffness generation mechanism 14 form, as shown in Figure 2.
Driving axial structure 11 includes driving incentive structure 111, driving quality 112 and drive displacement extraction structure 113, drives
Dynamic axial arrangement 11 is used to ensure stable vibration of brother's formula quality in driving direction.Wherein, driving incentive structure 111 to be used for will be outer
It is electrostatic force to connect photovoltaic conversion, and it includes driving fixed broach and driving activity broach；Drive quality 112 include driver framework and
Brother's formula quality；The driver framework is used to connect driving activity broach, driven-mode support beam and Ge Shi mass, drives movable comb
Scattered be arranged on driver framework of tooth is used to increase the electrostatic force conversion efficiency that capacity area improves unit area, driven-mode branch
Support beam is used to connect anchor point and driver framework and play a supportive role, and displacement caused by driver framework is XM, and brother's formula quality is used
In generation Coriolis effect；Drive displacement extraction structure 113, which is used to be converted to driver framework displacement XM, drives capacitance signal XV defeated
Go out, drive displacement extraction structure 113 includes driving detection fixed broach and driving detection activity broach.
Detection axial arrangement 12 is made up of detection quality 121 and detection displacement extraction structure 122, for extracting by Ge Shili
Caused sensed-mode displacement.
Coupling stiffness module 13 is coupled to the coupling stiffness 131 of sensed-mode by driven-mode and sensed-mode is coupled to drive
The coupling stiffness 132 of dynamic model state forms, as shown in Figure 3.Wherein, described kyxDriver framework displacement XM can be converted to coupling by 131
FXQ is applied in detection quality 121 with joint efforts；Described kxyDetection framework displacement YM can be converted to bonding force FYQ by 132 to be applied to
Drive in quality 121.
Quadrature alignment negative stiffness generation mechanism 14 includes four groups of quadrature alignment negative stiffnesses and produces broach, quadrature alignment negative stiffness
Central frame both sides crossed-symmetrical arrangement of the broach along brother's formula quality is produced, it is firm to offset coupling for producing electrostatic negative stiffness
Degree.
Gyro telemetry circuit 2 includes driving closed loop 21, measure loop 22 and quadrature alignment closed loop 23；Driving is closed
Loop back path 21 is used to ensure that the driving axial structure 11 is consolidated along driving direction perseverance amplitude vibrations and vibration frequency for driven-mode
There is resonant frequency；Measure loop 22 is used to a detection capacitance change YV parts being adjusted to YSE outputs, and another part is to drive
Exported after demodulating and filter on the basis of pumping signal XS as gyro.
Wherein, measure loop 22 includes prime amplification interface 221, secondary amplifier 222, brother's formula demodulator 223 and low pass
Wave filter, wherein, prime amplification interface 221 is used to detection capacitance change YV being converted into voltage signal and tentatively put
Greatly；Secondary amplifier 222 further amplifies the prime amplification output signal of interface 221, and output signal YSE；Brother's formula solution
Adjust device 223 to demodulate YSE on the basis of driving pumping signal XS and obtain Ge Shi signals and two frequency-doubled signals；Low pass filter includes the
One low pass filter 224 and the second wave filter 225, wherein, the first wave filter 224 is used for the two frequencys multiplication letter for filtering out demodulator output
Number to obtain pure Ge Shi signal amplitudes, the second low pass filter 225 is used to exporting LPF finally defeated as gyroscope
Go out, as shown in Figure 5.
As shown in figure 4, quadrature alignment negative stiffness produce broach include the first fixed broach 141, the second fixed broach 142,
3rd fixed broach 143, the 4th fixed broach 144 and Ge Shi mass, wherein, the first fixed broach (141) and second fixes comb
Tooth turns between (142), is turned between the 3rd fixed broach (143) and the 4th fixed broach (144)；Described quadrature alignment is born
Rigidity generation broach, which uses, not to be designed equidistantly to produce electrostatic negative stiffness；Described quadrature alignment negative stiffness generation mechanism 14 exists
Correction driven-mode is coupled to the coupling stiffness k of sensed-modeyxRecoverable sensed-mode is coupled to driven-mode while 131
Coupling stiffness kxy132。
As shown in fig. 6, quadrature alignment closed loop 23 includes drive displacement amplifier 231, quadrature demodulator 232, orthogonal
Low pass filter 233, comparator 234, quadrature alignment benchmark 235, quadrature alignment controller 236 and chromacoder 237, its
In, drive displacement amplifier 231 amplifies XV on the premise of driving capacitance signal XV is not changed, to meet demodulation reference signal
Amplitude demand；Quadrature demodulator 232 extracts the orthogonal signalling in the output signal of secondary amplifier 222 in sense channel,
Produce two frequency-doubled signals and quadrature error amplitude signal；Orthogonal low pass filter 233 filters two frequency-doubled signals, only retains orthogonal
Amplitude signal；Comparator 234 compares quadrature amplitude signal and quadrature alignment benchmark 235, produces comparative result；Quadrature alignment control
Device 236 processed produces control signal according to the comparative result；Chromacoder 237 includes flow directing device 2371, phase inverter
2372nd, the first buffer 2373 and the second buffer 2374, orthogonal school is delivered to for producing QS signals after control signal is changed
Positive negative stiffness generation mechanism 14, its output signal are that QS contains Vqkl1And Vqkl2。
For quadrature alignment negative stiffness generation mechanism 14, as shown in figure 4, its fixed broach plate 141,142,143,144 with
8 parallel plate capacitors formed between brother's formula quality, when mass to drive shaft and detection direction of principal axis have displacement x and y when, then on
Stating electric capacity can be expressed with matrix form：
In formula (A5), Cql1s, Cql2s, Cql3s, Cql4sRespectively the first fixed broach 141, the second fixed broach the 142, the 3rd
The fixed broach 144 of fixed broach 143 and the 4th and upper plate electric capacity caused by brother's formula quality；Cql1x, Cql2x, Cql3x, Cql4xRespectively
First fixed broach 141, the second fixed broach 142, the 3rd fixed broach 143, the 4th fixed broach 144 produce with brother's formula quality
Lower plate electric capacity；The length of broach lap in the x-direction is xq0；Broach long spacing is λ yq0；Short spacing is yq0；H is broach
Thickness；ε0For permittivity of vacuum.By carrying out parallel plate capacitor electrostatic force analysis to above-mentioned electric capacity, following equation can be obtained：
V in formula (A6)qkl1And Vqkl2The voltage respectively applied in fixed broach 141,142 and 143,144.Formula (A6) is retouched
What is stated is the stress of each electric capacity in the direction of the x axis, and formula (A7) describes the stress of each electric capacity in the y-axis direction.Take respectively
The sum of two matrix all elements is stated, then the value is to make a concerted effort on a direction, it is contemplated that correction broach number nq, then in x and y
There is stress sum on direction of principal axis：
Negated after the right and left of above-mentioned two formula seeks local derviation to x and y respectively, then can obtain the two power and driving and examining
Survey the stiffness matrix of axle：
In above formula, counter-diagonal element is coupling correction rigidity, and two coupling stiffness are equal, convolution (A4), when
kqxy+kxyWhen=0, there is kqyx+kyx=0, then detect and the coupling stiffness of driven-mode can be corrected simultaneously, substitute into relevant equations
After have：
The present embodiment is further simplified control system, order：
Vqkl1=VqD+Vqc (A12)
Vqkl2=VqD-Vqc (A13)
In formula, VqDFor fixed voltage；VqcFor control signal.Then according to formula (A11), have：
In formula (A14), only VqcFor variable, orthogonal coupling stiffness can be controlled with reaching by controlling the variable
Purpose.
It is as follows the step of the present embodiment on the basis of the quadrature alignment negative stiffness generation mechanism：
1) orthogonal signalling amplitude in sense channel is obtained in real time：The orthogonal signalling are included in detection displacement extraction structure
In 122 output signal YV, it is with driver framework displacement XM with the same phase of frequency.Phase sensitivity solution can be passed through on the basis of drive displacement signal
Tune mode obtains orthogonal signalling amplitude；
2) quadrature alignment signal controls：After step 1) the orthogonal signalling amplitude is obtained, by itself and quadrature alignment benchmark
235 are compared in comparator 234, and comparative result is sent into the quadrature alignment controller 236 being made up of PI control circuits simultaneously
Produce control signal Vqc, then signal QS is obtained after the processing of chromacoder 237, and export to quadrature alignment negative stiffness and produce
Life structure 14；
3) generation of negative stiffness and the elimination of coupling stiffness：Step 2) the QS signals include Vqkl1And Vqkl2, process is orthogonal
Closed-loop system processing is corrected, coupling stiffness can be offset with electrostatic negative stiffness in very short time, and system is reached stable state；
4) acquisition of gyro brother's formula signal after quadrature error eliminates：On the basis of above three step, in sense channel
Orthogonal signalling be almost suppressed, brother's formula signal can be obtained by phase demodulation mode.A variety of circuits are included in the present embodiment
Form, it is every to meet above-mentioned steps, and can realize in circuit
The device of (including analog circuit, digital circuit etc.) is within the scope of the present embodiment.In the present embodiment, step 1)
Detailed step include：
1.1) acquisition of quadrature demodulation reference signal：Driver framework displacement signal XM extracts structure structure through drive displacement
XV signals are obtained after 113, the process does not change frequency and phase information, so XV and the still same frequently same phase of orthogonal signalling.XV is passed through
Drive displacement amplifier 231 obtains XSE signals (process does not change signal frequency and phase equally), the letter after further amplifying
Number it is connected to quadrature demodulator 232 and demodulates reference edge, the demodulation benchmark for orthogonal signalling；
1.2) amplitude of orthogonal signalling obtains：Prime amplification interface 221 and secondary amplification of the YV signals by measure loop
YSE is obtained after the amplification of device 222, the signal contains orthogonal signalling amplitude information, is connected to the input of quadrature demodulator 232
End.Obtained after the processing of quadrature demodulator 232 containing the frequency-doubled signal of driving frequency two and orthogonal signalling amplitude, then through orthogonal low pass
The processing of wave filter 233 filters two frequency-doubled signals and both obtains orthogonal signalling amplitude；
1.3) the drive displacement amplifier 231 described in is using high phase place precision, the amplifier of low noise；
1.4) quadrature demodulator 232 described in is using switch demodulation principle；
1.5) the orthogonal low pass filter 233 described in uses second-order low-pass filter.
The detailed step of the step 2) includes：
2.1) comparison of orthogonal signalling amplitude and benchmark：It is " 0 " to set quadrature alignment benchmark 235, and the step 1) is obtained
To orthogonal signalling amplitude compared with quadrature alignment benchmark 235, when the former is exported on the occasion of instead more than the latter's comparator 234
Output negative value；
2.2) generation of quadrature alignment control signal：Quadrature alignment controller 236 mainly uses PI control forms and with product
Be divided into master, when comparator 234 export on the occasion of when controller 236 be negative saturation, otherwise is positive saturation.Reasonable selection PI Parameter adjustables
The sensitivity of controller is saved, is allowed to suitable solution demand, its control signal is Vqc；
2.3) acquisition of QS signals：In order to meet the control signal form of formula (A12) and formula (A13) description, turn in signal
Phase inverter 2372 is added in changing device 237 to be used to obtain-Vqc, then with DC voltage generator 2371 be superimposed to obtain VqD+VqcWith
VqD-Vqc.In order to reduce interference of the signal to circuit in structure, the first buffer 2373 and the second buffer 2374 are added；
2.4) by adjusting the direct current signal V in flow directing device 2371qDThe V of certain excursion can be madeqcSignal Regulation is just
Hand over the scope of correction rigidity bigger.
The detailed step of the step 3) includes：
3.1) generation of electrostatic negative stiffness：According to formula (A14), different control signal VqcCorresponding electrostatic can be produced
Negative stiffness；
3.2) compensation of the electrostatic negative stiffness to coupling stiffness：In original state, coupling stiffness is not corrected also and in most
Big state, the orthogonal signalling amplitude in loop is maximum, and control signal is in saturation (assuming that being in positive saturation).Then negative stiffness
kqyxMaximum, work as kqyx+kyx<Overcorrect state is in when 0, then orthogonal signalling phase is reverse, then controller output signal is reversed to
Saturation is born, then kqyxReduce, only work as kqyx=kyxWhen system be in stable, controller output valve can reflect the big of coupling stiffness
It is small.
Summary embodiment, the present invention is for the purpose of correction of orthogonal coupling stiffness, with simple, reliable quadrature alignment control
Device cooperation quadrature alignment negative stiffness generation mechanism processed has reached the purpose of the orthogonal rigidity of elimination.System can be according to gyroscope structure not
With coupling stiffness coefficient auto-adjustment control amount, the mark of silicon micromechanical gyroscope can be greatly improved on the basis of existing process technology
It is non-linear to spend factor, improves bias drift, reduces constant error, the engineering production to silicon micromechanical gyroscope has great reality
Meaning.
Claims (5)
1. a kind of silicon micro mechanical linearly coupled formula gyro, including gyroscope structure (1), gyro telemetry circuit (2) and gyro encapsulation (3),
Characterized in that,
Described gyroscope structure (1) include driving axial structure (11), detection axial arrangement (12), coupling stiffness module (13) and
Quadrature alignment negative stiffness generation mechanism (14)；
Described driving axial structure (11) includes driving incentive structure (111), driving quality (112) and drive displacement extraction knot
Structure (113), described driving axial structure (11) are used to ensure stable vibration of brother's formula quality in driving direction；Wherein, it is described
Driving incentive structure (111) be used to external voltage being converted into electrostatic force, it is solid that the driving incentive structure (111) includes driving
Determine broach and driving activity broach；Described driving quality (112) includes driver framework and Ge Shi mass；The driver framework is used
In connection driving activity broach, driven-mode support beam and Ge Shi mass, the driving activity broach is scattered to be arranged in driving frame
It is used to increase the electrostatic force conversion efficiency that capacity area improves unit area on frame, the driven-mode support beam is used to connect anchor
Point and driver framework simultaneously play a supportive role, and displacement caused by driver framework is XM, and brother's formula quality is used to produce Coriolis effect；
Described drive displacement extraction structure (113) is used to driver framework displacement XM being converted to the XV outputs of driving capacitance signal, described
Drive displacement extraction structure (113) include driving detection fixed broach and driving detection activity broach；
Described detection axial arrangement (12) is made up of detection quality (121) and detection displacement extraction structure (122), for extracting
The sensed-mode displacement as caused by Ge Shili；
Described coupling stiffness module (13) is coupled to the coupling stiffness (131) and sensed-mode coupling of sensed-mode by driven-mode
Close coupling stiffness (132) composition of driven-mode；
Described quadrature alignment negative stiffness generation mechanism (14) includes four groups of quadrature alignment negative stiffnesses and produces broach, the orthogonal school
Positive negative stiffness produces central frame both sides crossed-symmetrical arrangement of the broach along brother's formula quality, for producing electrostatic negative stiffness to offset
Coupling stiffness；
Described gyro telemetry circuit (2) includes driving closed loop (21), measure loop (22) and quadrature alignment closed loop
(23)；Described driving closed loop (21) be used to ensure the driving axial structure (11) along driving direction perseverance amplitude vibrations and
Vibration frequency is driven-mode natural resonance frequency；Wherein, described measure loop (22) include prime amplification interface (221),
Secondary amplifier (222), brother's formula demodulator (223) and low pass filter, wherein, the prime amplification interface (221) is used for will
Detection capacitance change YV is converted into voltage signal and tentatively amplified；The secondary amplifier (222) connects prime amplification
Mouth (221) output signal is further amplified, and output signal YSE, the signal include orthogonal signalling amplitude information；Brother's formula
Demodulator (223) demodulates YSE on the basis of driving pumping signal XS and obtains Ge Shi signals and two frequency-doubled signals；The LPF
Device includes the first low pass filter (224) and the second wave filter (225), wherein, the first wave filter (224) is used to filter out demodulator
To obtain pure Ge Shi signal amplitudes, the second low pass filter (225) is used to export LPF two frequency-doubled signals of output
As gyroscope final output；
Described quadrature alignment closed loop (23) includes drive displacement amplifier (231), quadrature demodulator (232), orthogonal low
Bandpass filter (233), comparator (234), quadrature alignment benchmark (235), quadrature alignment controller (236) and chromacoder
(237), wherein, described drive displacement amplifier (231) amplifies XV on the premise of driving capacitance signal XV is not changed
To XSE, to meet the amplitude demand of demodulation reference signal, the signal is connected to quadrature demodulator (232) demodulation reference edge, is used for
The demodulation benchmark of orthogonal signalling；The quadrature demodulator (232) is by the output signal of secondary amplifier (222) in sense channel
Orthogonal signalling extraction, produce two frequency-doubled signals and quadrature error amplitude signal；The orthogonal low pass filter (233) is by two times
Frequency signal filters, and only retains quadrature amplitude signal；The comparator (234) is by quadrature amplitude signal and the quadrature alignment benchmark
(235) compare, produce comparative result；The quadrature alignment controller (236) produces control signal V according to the comparative resultqc；
It is slow that the chromacoder (237) includes flow directing device (2371), phase inverter (2372), the first buffer (2373) and second
Device (2374) is rushed, quadrature alignment negative stiffness generation mechanism (14), institute are delivered to for caused QS signals after control signal is changed
State QS signals and contain Vqkl1And Vqkl2, wherein, Vqkl1=VqD+Vqc, Vqkl2=VqD-Vqc, in formula, VqDFor fixed voltage；VqcFor
Control voltage.
2. silicon micro mechanical linearly coupled formula gyro according to claim 1, it is characterised in that described coupling stiffness module
(13) the coupling stiffness k that driven-mode is coupled to sensed-mode is includedyx(131) and sensed-mode is coupled to the coupling of driven-mode
Rigidity kxy(132), wherein, described kyx(131) driver framework displacement XM can be converted to bonding force FXQ and is applied to detection matter
Measure on (121)；Described kxy(132) detection framework displacement YM can be converted to bonding force FYQ and be applied to driving quality (121)
On.
3. silicon micro mechanical linearly coupled formula gyro according to claim 1, it is characterised in that described quadrature alignment negative stiffness
Produce broach and include the first fixed broach (141), the second fixed broach (142), the 3rd fixed broach (143), the 4th fixation comb
Tooth (144) and brother's formula quality, wherein, turned between the first fixed broach (141) and the second fixed broach (142), the 3rd fixes
Turned between broach (143) and the 4th fixed broach (144)；It is not equidistant that described quadrature alignment negative stiffness produces broach use
Design to produce electrostatic negative stiffness；Described quadrature alignment negative stiffness generation mechanism (14) is coupled to detection in correction driven-mode
The coupling stiffness k of modeyx(131) recoverable sensed-mode is coupled to the coupling stiffness k of driven-mode whilexy(132)。
4. a kind of silicon micro mechanical linearly coupled formula gyroscope quadrature error rigidity bearing calibration, it is characterised in that comprise the following steps：
(1) the output signal XV of drive displacement extraction structure and the output signal YV of detection displacement extraction structure, institute are obtained in real time
Stating drive displacement signal should be in driver framework displacement with the same phase of frequency；
The output signal XV amplitudes of drive displacement extraction structure, which are adjusted, makes its amplitude be suitable as demodulating benchmark, obtains
XSE, its frequency and phase invariant in processing procedure；
The output signal YV amplitude parts for detecting displacement extraction structure, which are adjusted, makes its amplitude be adapted to be demodulated, and obtains YSE,
Its frequency and phase invariant in processing procedure, a portion YSE are demodulated XSE as benchmark, above-mentioned demodulation result are passed through
Low pass filter filters out the high-frequency signal after demodulation, then obtains orthogonal signalling amplitude；Another part is using pumping signal XS as base
Standard exports after demodulating and filtering as gyro, obtains Ge Shi signals and two frequency-doubled signals；
(2) judged the orthogonal signalling amplitude that the step (1) obtains as controlled quentity controlled variable compared with quadrature alignment benchmark, its
In, set quadrature alignment benchmark as " 0 ", the orthogonal signalling amplitude that step (1) is obtained compared with quadrature alignment benchmark, when
When the former is more than the latter, comparator output is on the occasion of output negative value on the contrary；
Above-mentioned judged result is sent into quadrature alignment controller, further obtains Quadrature control signals；
The Quadrature control signals are inputted to chromacoder, to obtain the orthogonal school of quadrature alignment negative stiffness generation mechanism
Positive control signal；
(3) step (2) the quadrature alignment control signal is changed, is sent into gyroscope structure, and quadrature alignment therein is born
Rigidity generation mechanism, which coordinates, produces electrostatic negative stiffness, and the electrostatic negative stiffness can be with balanced quadrature coupling stiffness.
5. according to the method for claim 4, it is characterised in that step (3) concretely comprise the following steps：
Caused electrostatic negative stiffness then produces new with obtaining new coupling stiffness after the original orthogonal coupling stiffness superposition of structure
Quadrature error signal；
According to the step (1) and the result of step (2), quadrature alignment control signal is readjusted, finally makes orthogonal signalling width
Degree is equal with quadrature alignment benchmark；
Above-mentioned quadrature alignment benchmark is set to 0, then quadrature alignment negative stiffness is completely eliminated corss coupling and closed just after system is stable
Degree.
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