CN100368773C - Method for extracting one-way harmonic wave of condenser type micro-gyroscope responsive signals and extraction apparatus therefor - Google Patents
Method for extracting one-way harmonic wave of condenser type micro-gyroscope responsive signals and extraction apparatus therefor Download PDFInfo
- Publication number
- CN100368773C CN100368773C CNB2004100411062A CN200410041106A CN100368773C CN 100368773 C CN100368773 C CN 100368773C CN B2004100411062 A CNB2004100411062 A CN B2004100411062A CN 200410041106 A CN200410041106 A CN 200410041106A CN 100368773 C CN100368773 C CN 100368773C
- Authority
- CN
- China
- Prior art keywords
- sensitive
- phase
- amplifier
- micro
- gyroscope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Landscapes
- Gyroscopes (AREA)
Abstract
The present invention relates to a method and an extractor thereof for extracting harmonic wave of sensitive signals of a micro-gyro single channel in a capacitor type. A basic wave signal is amplified, then is output to a micro-gyro public capacitor electrode, is respectively and slantingly positioned by the positive direct current and negative direct current and is connected with the earth; a sensitive capacitor electrode is connected with the virtual earth; the sensitive signals are respectively extracted from the sensitive capacitor electrode, are amplified by an anti-phase amplifier, and are differentially amplified by a differential amplifier; the micro-gyro sensitive signal is obtained by processing the output signal by phase-sensitive rectification and low-pass amplification; the basic wave signal sent out by a basic wave signal source is used as a control signal of the phase reference end of a phase-sensitive rectifier after the processes of the double frequency and the phase deviation. The extractor is composed of the micro-gyro public capacitor electrode, a drive capacitor electrode and a sensitive capacitor electrode, and can reduce the interference from drive signals to the sensitive signals.
Description
Technical Field
The invention relates to a sensing technology, in particular to a method and a device for extracting single-path harmonic waves of capacitive micro-gyroscope sensitive signals.
Background
The resonance type micro gyroscope utilizes alternating electrostatic force between the capacitor polar plates to enable the vibrator to generate mechanical vibration, and utilizes the Coriolis force generated by the rotation angular velocity to enable the vibrator to vibrate in the direction orthogonal to the driving direction. This orthogonal oscillation is detected by another set of sensing capacitors. In the traditional signal conditioning method, a DC bias is applied to a common electrode G, sinusoidal driving voltages with 180-degree phase difference are applied to electrodes C and D, and capacitance changes are detected on electrodes A and B. Since the static capacitance is small, about 2pf, the capacitance variation caused by the Coriolis effect is much smaller, about 1%. A. B needs to be connected to a charge amplifier consisting of an operational amplifier with high input impedance. The driving signal and the sensitive signal have the same frequency. There are serious signal coupling problems with this conventional approach because the stray capacitance coupling between the drive and sense electrodes is of the same order of magnitude relative to the drive or sense capacitance. The drive signal coupled to the sensitive electrode is hundreds of times greater than the signal generated by the coriolis force. It is difficult to stably separate the driving and sensitive same-frequency orthogonal signals with high precision by using a phase-sensitive detection method. There are also many ways to use high frequency signal as carrier wave to add to the sensitive capacitor, which is intended to solve the problem of coupling of original same frequency signal, and the effect is not ideal, and the complexity of the circuit is increased.
Disclosure of Invention
The invention provides a single-channel harmonic extraction method and an extraction device of a low-interference capacitance type micro gyroscope sensitive signal, which can reduce the interference of a driving signal to the sensitive signal.
The invention adopts the following technical scheme:
the method comprises the following steps:
a method for extracting harmonic wave of capacitive micro-gyroscope single-channel sensitive signal relates to sensing technology, which is characterized in that a fundamental wave signal sent by a fundamental wave signal source 2 is amplified by an amplifier 7 and then is transmitted to a micro-gyroscope common capacitance electrode G, driving capacitance electrodes C and D of a micro-gyroscope are respectively biased by positive and negative direct currents and are in alternating current grounding, the sensitive capacitance electrodes A and B are connected with virtual ground, sensitive signals are respectively extracted from the sensitive capacitance electrodes A and B and amplified by inverting amplifiers 3 and 4, then are differentially amplified by a differential amplifier 5, an output signal after differential amplification is subjected to phase-sensitive rectification and low-pass amplification to obtain a micro-gyroscope sensitive signal, and the fundamental wave signal sent by the fundamental wave signal source 2 is subjected to frequency doubling and phase shifting to be used as a control signal of a phase-sensitive rectification phase reference end.
The device is as follows:
an extraction device for implementing the method is composed of a micro-gyroscope common capacitance electrode G, driving capacitance electrodes C and D and sensitive capacitance electrodes A and B, and is characterized in that the driving capacitance electrodes C and D are respectively connected with positive and negative direct current bias voltages, inverting amplifiers 3 and 4 are respectively connected to the sensitive capacitance electrodes A and B and are respectively connected with input ends of the inverting amplifiers 3 and 4, a differential amplifier 5 is connected to output ends of the inverting amplifiers 3 and 4, output ends of the inverting amplifiers 3 and 4 are respectively connected with two input ends of the differential amplifier 5, a phase sensitive rectifier 9 is connected to an output end of the differential amplifier 5 and is connected with an input end of the phase sensitive rectifier 9, an amplifier 7 is connected to the micro-gyroscope common capacitance electrode G and is connected with an output end of the amplifier 7, a fundamental wave signal source 2 is connected to the amplifier 7 and is connected with an output end of the fundamental wave signal source 2, and an output end of the fundamental wave signal source 2 is connected with a phase reference end of the phase sensitive rectifier 9 after sequentially passing through a frequency multiplier 15 and a phase shifter 14.
Compared with the prior art, the invention has the following advantages:
the invention makes the fundamental wave signal sent by the fundamental wave signal source output to the micro-gyroscope common capacitance electrode after level conversion by the amplifier. The driving capacitor electrodes of the micro gyroscope are respectively biased by positive and negative direct current voltages, so that the mechanical vibration frequency is the same as the frequency of a fundamental wave signal source. The sensitive capacitive electrodes are at zero bias, so that theoretically only coriolis forces can generate mechanical vibrations in the sensitive direction. The micro gyroscope common capacitance electrode changes the capacitance with the sensitive capacitance electrode due to the mechanical vibration in the Coriolis force sensitive direction. The driving voltage and the mechanical vibration of the driving capacitor electrode generate second harmonic current in the sensitive capacitor. The invention utilizes a differential method to extract a second harmonic electric signal (namely a sensitive signal) which is orthogonal to a driving direction, namely the mechanical vibration amplitude and phase correlation in the Coriolis force sensitive direction from the second harmonic current generated by the sensitive capacitor. The invention uses differential method to make fundamental wave signal cancel and second harmonic wave signal constructive. When the mechanical parameters (resonance rigidity, mass and damping, namely resonance frequency and initial phase) of the micro gyroscope are stable, the driving voltage with stable amplitude and frequency, which is applied to the common capacitor electrode, can maintain stable mechanical vibration, namely, stable open-loop driving is realized. The invention uses circuit hardware or DSP software to generate a second harmonic signal synchronous with the phase of the driving voltage as a phase reference signal, and a control signal added to a phase reference end of phase-sensitive rectification is in the same phase with a sensitive signal generated by Coriolis force. The sensitive signal and the reference signal are subjected to phase-sensitive demodulation to obtain an analog level signal or a digital signal related to the rotation speed and the rotation direction.
The invention basically eliminates the interference coupling of the driving signal in the capacitive micro gyroscope to the sensitive signal, solves the problem of amplifying and picking up the weak sensitive signal in the capacitive micro gyroscope and reduces the requirement on the micro machining precision.
1. The invention adds fundamental wave (driving) signal to the public pole, and the other poles A, B, C and D are connected to the ground or virtual ground, so the stray coupling capacitance influence among A, B, C and D is theoretically zero. The driving frequency is the same as the mechanical resonance frequency in the driving direction. Two special techniques are used here:
a) The driving electrodes C and D are respectively biased by positive and negative direct currents and are simultaneously grounded by alternating current of a large capacitor. C. And the D terminal alternating current signal is short-circuited and cannot be coupled to the A and B terminals.
b) The sensitive end is not added with direct current bias, the driving forces are mutually offset, and fundamental frequency vibration caused by the driving signals cannot be generated in the sensitive direction. If the residual structural process defect still exists and residual unbalanced force occurs, the double-frequency residual mechanical vibration in the sensitive direction caused by the driving signal is very weak as long as the mechanical resonance frequency in the sensitive direction is different from the double frequency of the driving signal, and the amplitude of the residual mechanical vibration is far smaller than that of the vibration caused by the Coriolis force. If the force in the driving direction is not completely orthogonal to the sensitive direction, weak mechanical vibration with the same frequency as the driving direction also occurs in the sensitive direction in a static state (when the rotating speed is zero), which is called fundamental wave residual coupling vibration. The fundamental residual coupling vibration is proportional to the amplitude of the mechanical vibration in the driving direction, and the phase is the same as or opposite to the driving direction. The fundamental residual coupling vibration is superimposed with mechanical vibration caused by the Coriolis force. This superposition is also linear if the mechanical vibrations in the driving direction are in the linear region.
2. And the capacitance of the mechanical vibration sensitive electrode in the direction sensitive to the Coriolis force changes. This variation causes the current it passes to be frequency doubled modulated. The current in the capacitor contains a fundamental component and a second harmonic component. Since the changes introduced by the mechanical vibrations of the two sensitive capacitances a, B are differential, the fundamental wave components of the currents in the two sensitive capacitances are in the same direction as each other and the second harmonics are in opposite phase to each other. The second harmonic in the sensitive capacitance a, B has two components: firstly, the changing component caused by the Coriolis force is called rotation sensitive second harmonic; secondly, the fixed value caused by the residual coupling vibration of the fundamental wave is called lateral interference. Due to the micro-machining process problem, the mechanical vibration in the driving direction is coupled to the sensitive direction a little, and a transverse interference second harmonic is generated, and the phase of the transverse interference second harmonic is 90 degrees different from that of the vibration generated by the Coriolis force, namely the transverse interference second harmonic is orthogonal to the vibration phase generated by the Coriolis force. Experiments also show that the transversal interference second harmonic is much smaller than the full range value of the rotation sensitive second harmonic and is a fixed value. The following techniques are used here to cancel the fundamental interference:
c) The fundamental wave components are cancelled (subtracted) and the second harmonics are enhanced (added) by the differential amplifier.
When the mechanical structure of the micro-gyroscope is not strictly symmetrical due to process problems and the differential amplifier is also detuned, there are several components in the differentially amplified signal:
U d = rotation-sensitive second harmonic + rotation-sensitive direct current + cross interference second harmonic + residual fundamental
The residual fundamental component can be eliminated to the maximum extent by adjusting the amplification ratio of the two input portions of the differential amplifier.
d) The band-pass filter is used to eliminate residual fundamental wave component, rotate sensitive DC component and amplify the second harmonic.
3. And performing phase-sensitive rectification on the second harmonic wave to eliminate residual fixed components orthogonal to the sensitive signal. The amplitude of the output voltage after phase-sensitive rectification is proportional to the angular velocity, and the sign corresponds to the direction of the angular velocity.
4. If the second harmonic of the lateral interference is large, the current of the second harmonic of the lateral interference in the sensitive capacitor is detected when the sensor is in a static state, namely when the rotation angular velocity is zero, and the actual mechanical vibration state can be calculated. If the stiffness, mass, damping of the mechanical vibrations are considered to be time invariant, open loop stability control of the mechanical vibrations may be achieved based on static sensing.
5. Because the linear analog circuit (operational amplifier) is less in use amount, if the linear analog circuit is combined with a miniaturized DSP chip, the sensor is easy to realize miniaturization and intellectualization. The advantage is more prominent when the three-axis gyroscope shares one DSP.
Drawings
Fig. 1 is a block diagram of the present invention, wherein 8 is a low-pass amplifier.
Fig. 2 is a circuit diagram of an embodiment of the present invention, wherein 8 is a low pass amplifier.
Detailed Description
Embodiment 1 a single-channel harmonic extraction method of capacitive micro-gyroscope sensitive signals related to sensing technology, the fundamental wave signal sent out by the fundamental wave signal source 2 is amplified by the amplifier 7 and then transmitted to the micro-gyroscope common capacitance electrode G, the driving capacitance electrodes C and D of the micro-gyroscope are respectively biased by positive and negative direct currents and are grounded by alternating currents, the sensitive capacitance electrodes a and B are connected to virtual ground, the sensitive signals are respectively extracted from the sensitive capacitance electrodes a and B and amplified by the inverting amplifiers 3 and 4, and then differentially amplified by the differential amplifier 5, the output signal after differential amplification is subjected to phase-sensitive rectification and low-pass amplification to obtain the micro-gyroscope sensitive signal, the fundamental wave signal sent out by the fundamental wave signal source 2 is subjected to frequency doubling and phase shifting to be used as a control signal of the phase-sensitive rectification phase reference end, in this embodiment, the output signal of the differential amplifier 5 is amplified by the second harmonic band-pass amplifier 6 and then transmitted to the digital signal processor DSP; the fundamental wave signal source 2 is generated by a digital signal processor DSP, the phase sensitive rectification and the low pass amplification are performed by a phase sensitive rectifier and a low pass amplifier which are formed inside the digital signal processor DSP, the above amplifiers 3, 4, 5, 6 and 7 can be implemented by an operational amplifier of the type LF155, or other multi-amplifier combination chips, and the signal s (t) entering the signal input end of the phase sensitive rectifier includes a useful sensitive signal s1 (t) (which can be represented by asin (2 ω t)) generated by kirilox and a transverse interference signal s2 (t) (which can be represented by B cos (2 ω t)), that is: s (t) = S1 (t) + S2 (t), the phase sensitive rectifier completes the following operation functions:
t is the whole period, the digital signal processing is realized by using the multiplication and accumulation hardware device which is arranged in a DSP chip and used for finishing the function and replaces the integral operation. Sin (2 ω t) in the integral expression is calculated. S (t) is the actual sample value; the low-pass amplifier completes the functions of average operation and adjustment of amplification factor. The method is realized in the DSP through numerical operation.
Embodiment 2 a harmonic extraction device for obtaining a micro gyroscope single-path sensitive signal, which comprises a micro gyroscope common capacitance electrode G, driving capacitance electrodes C and D, and sensitive capacitance electrodes a and BThe driving capacitor electrodes C and D are grounded through a 24492road capacitor of a power supply, the driving capacitor electrodes C and D are respectively connected with positive and negative direct current bias voltages, the sensitive capacitor electrodes A and B are respectively connected with inverting amplifiers 3 and 4 and are respectively connected with the input ends of the inverting amplifiers 3 and 4, the output ends of the inverting amplifiers 3 and 4 are connected with a differential amplifier 5, the output ends of the inverting amplifiers 3 and 4 are respectively connected with two input ends of the differential amplifier 5, the output end of the differential amplifier 5 is connected with a second harmonic band-pass amplifier 6, the output end of the second harmonic band-pass amplifier 6 is connected with a phase-sensitive rectifier 9 and is connected with the input end of the phase-sensitive rectifier 9, the micro-gyroscope common capacitor electrode G is connected with an amplifier 7 and is connected with the output end of the amplifier 7, the amplifier 7 is connected with a fundamental wave signal source 2 and is connected with the output end of the fundamental wave signal source 2, the output end of the fundamental wave signal source 2 is connected with a phase reference end of the phase-sensitive rectifier 9 after sequentially passing through a frequency multiplier 15 and a fundamental wave amplifier 14, the inverting amplifier 3 or 4 can adopt an operational amplifier with the input end of a frequency multiplier 155, the other fundamental wave operational amplifier and an LF 7, and the other operational amplifier is grounded 73 Composition, one of the operational amplifiersInput terminal is grounded, and resistor R 73 Is bridged between the other input end and the output end of the operational amplifier, and the other input end of the operational amplifier is connected with resistors R which are mutually connected in series 71 And a capacitor C 71 And a resistance R 71 The other end of the first capacitor is the input end of an amplifier 7, a capacitor C 711 The other end of the resistor is connected with the other input end of the operational amplifier, and the resistors R are connected in series 71 And a capacitor C 71 Is connected with a resistor R 72 And a capacitor C 72 Resistance R 72 The other end of which is grounded, a capacitor C 72 The other end of the first harmonic signal source 2 is connected with the output end of the operational amplifier, the fundamental wave signal source 2, the phase sensitive rectifier 9, the frequency multiplier 15 and the phase shifter 14 can adopt the following scheme, and the specific scheme is as follows: the phase sensitive rectifier 9 is generated by a digital signal processor DSP, the output end of the differential amplifier 5 is connected with the a/D input end of the digital signal processor DSP, the fundamental wave signal source 2, the frequency multiplier 15 and the phase shifter 14 are generated by the digital signal processor DSP, the fundamental wave signal is output from the D/a output end of the digital signal processor DSP to the input end of the amplifier 7, the output end of the differential amplifier 5 is connected with the a/D input end of the digital signal processor DSP through a second harmonic band pass amplifier 6, the fundamental wave signal source 2 is realized by a sinusoidal signal sequence generated by the digital signal processor DSP, the frequency multiplier 15 and the phase shifter 14 are realized by a frequency-doubled and phase-shifted sinusoidal signal sequence generated by the digital signal processor DSP, and the second harmonic band pass amplifier 6 can adopt an operational amplifier with model number LF 155.
Claims (7)
1. A single-path harmonic extraction method of capacitive micro-gyroscope sensitive signals relates to the sensing technology, and is characterized in that fundamental wave signals sent by a fundamental wave signal source (2) are amplified by an amplifier (7) and then are transmitted to a micro-gyroscope common capacitance electrode (G), driving capacitance electrodes (C and D) of a micro-gyroscope are respectively biased by positive and negative direct currents and are in alternating current grounding, the sensing capacitance electrodes (A and B) are connected with virtual ground, sensitive signals are respectively extracted from the sensing capacitance electrodes (A and B) and amplified by two inverting amplifiers (3 and 4), differential amplification is carried out by a differential amplifier (5), output signals after differential amplification are subjected to phase-sensitive rectification and low-pass amplification to obtain micro-gyroscope sensitive signals, and the fundamental wave signals sent by the fundamental wave signal source (2) are subjected to double frequency and phase-shift processing and then serve as control signals of a phase-sensitive rectification phase reference end.
2. The method for extracting the single-channel harmonic wave from the capacitive micro-gyroscope sensitive signal as claimed in claim 1, wherein the fundamental wave signal source (2) is generated by a Digital Signal Processor (DSP), and the phase-sensitive rectification and the low-pass amplification are performed by a phase-sensitive rectifier and a low-pass amplifier built inside the Digital Signal Processor (DSP).
3. The single-channel harmonic extraction method of the capacitive micro-gyroscope sensor signal according to claim 1, characterized in that the output signal of the differential amplifier (5) is amplified by the second harmonic band-pass amplifier (6) and then input to the Digital Signal Processor (DSP).
4. An extraction device for carrying out the method according to claim 1, comprising a common capacitance electrode (G) with a micro-gyroscope, drive capacitance electrodes (C and D) and sensitive capacitance electrodes (a and B), wherein the drive capacitance electrodes (C and D) are connected to positive and negative dc bias voltages, the sensitive capacitance electrodes (a and B) are connected to two inverting amplifiers (3 and 4) and to the inputs of the two inverting amplifiers (3 and 4), respectively, the outputs of the two inverting amplifiers (3 and 4) are connected to a differential amplifier (5) and the outputs of the two inverting amplifiers (3 and 4) are connected to the inputs of the differential amplifier (5), the output of the differential amplifier (5) is connected to a phase sensitive rectifier (9) and to the input of the phase sensitive rectifier (9), the common capacitance electrode (G) with a micro-gyroscope is connected to an amplifier (7) and to the output of the amplifier (7), the amplifier (7) is connected to a fundamental wave signal source (2) and to the output of the fundamental wave signal source (2), and the phase shifter (a reference signal source (15) and a phase shifter (14) connected to the output of the phase sensitive rectifier.
5. Extraction device according to claim 4, characterized in that the phase sensitive rectifier (9) is generated by a Digital Signal Processor (DSP), the output of the differential amplifier (5) is connected to the A/D input of the Digital Signal Processor (DSP), the fundamental signal source (2), the frequency multiplier (15) and the phase shifter (14) are generated by the Digital Signal Processor (DSP), and the fundamental signal is fed from the D/A output of the Digital Signal Processor (DSP) to the input of the amplifier (7).
6. An extraction device as claimed in claim 5, characterized in that the output of the differential amplifier (5) is connected to the A/D input of a Digital Signal Processor (DSP) via a second harmonic band-pass amplifier (6).
7. The extraction apparatus according to claim 4, wherein the drive capacitor electrodes (C and D) are AC grounded via the power supply, way 24492.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2004100411062A CN100368773C (en) | 2004-06-29 | 2004-06-29 | Method for extracting one-way harmonic wave of condenser type micro-gyroscope responsive signals and extraction apparatus therefor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2004100411062A CN100368773C (en) | 2004-06-29 | 2004-06-29 | Method for extracting one-way harmonic wave of condenser type micro-gyroscope responsive signals and extraction apparatus therefor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1595063A CN1595063A (en) | 2005-03-16 |
| CN100368773C true CN100368773C (en) | 2008-02-13 |
Family
ID=34664897
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2004100411062A Expired - Fee Related CN100368773C (en) | 2004-06-29 | 2004-06-29 | Method for extracting one-way harmonic wave of condenser type micro-gyroscope responsive signals and extraction apparatus therefor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN100368773C (en) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103221331B (en) | 2010-09-18 | 2016-02-03 | 快捷半导体公司 | Hermetically sealed for MEMS |
| EP2616772B1 (en) | 2010-09-18 | 2016-06-22 | Fairchild Semiconductor Corporation | Micromachined monolithic 3-axis gyroscope with single drive |
| US8813564B2 (en) | 2010-09-18 | 2014-08-26 | Fairchild Semiconductor Corporation | MEMS multi-axis gyroscope with central suspension and gimbal structure |
| KR101938609B1 (en) | 2010-09-18 | 2019-01-15 | 페어차일드 세미컨덕터 코포레이션 | Micromachined monolithic 6-axis inertial sensor |
| DE112011103124T5 (en) | 2010-09-18 | 2013-12-19 | Fairchild Semiconductor Corporation | Bearing for reducing quadrature for resonant micromechanical devices |
| WO2012040211A2 (en) | 2010-09-20 | 2012-03-29 | Fairchild Semiconductor Corporation | Microelectromechanical pressure sensor including reference capacitor |
| US9488693B2 (en) | 2012-04-04 | 2016-11-08 | Fairchild Semiconductor Corporation | Self test of MEMS accelerometer with ASICS integrated capacitors |
| EP2647952B1 (en) | 2012-04-05 | 2017-11-15 | Fairchild Semiconductor Corporation | Mems device automatic-gain control loop for mechanical amplitude drive |
| EP2647955B8 (en) * | 2012-04-05 | 2018-12-19 | Fairchild Semiconductor Corporation | MEMS device quadrature phase shift cancellation |
| KR102058489B1 (en) | 2012-04-05 | 2019-12-23 | 페어차일드 세미컨덕터 코포레이션 | Mems device front-end charge amplifier |
| US9625272B2 (en) | 2012-04-12 | 2017-04-18 | Fairchild Semiconductor Corporation | MEMS quadrature cancellation and signal demodulation |
| DE102013014881B4 (en) | 2012-09-12 | 2023-05-04 | Fairchild Semiconductor Corporation | Enhanced silicon via with multi-material fill |
| US9644963B2 (en) | 2013-03-15 | 2017-05-09 | Fairchild Semiconductor Corporation | Apparatus and methods for PLL-based gyroscope gain control, quadrature cancellation and demodulation |
| CN112539744A (en) * | 2019-09-20 | 2021-03-23 | 中国科学院微电子研究所 | Sensitive signal reading circuit of silicon micro-gyroscope |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000088577A (en) * | 1998-09-08 | 2000-03-31 | Japan Aviation Electronics Industry Ltd | Detection circuit of capacity detection type oscillation gyro |
| JP2002098712A (en) * | 2000-09-21 | 2002-04-05 | Denso Corp | Capacitive type physical quantity detection device |
| JP2002162231A (en) * | 2001-09-28 | 2002-06-07 | Alps Electric Co Ltd | Vibration type gyroscope |
| US6412347B1 (en) * | 1998-09-16 | 2002-07-02 | Matsushita Electric Industrial Co., Ltd. | Angle speed sensor |
| CN2715110Y (en) * | 2004-06-29 | 2005-08-03 | 东南大学 | Single channel harmonic extractor for capacitor type micro-gyro sensitive signal |
-
2004
- 2004-06-29 CN CNB2004100411062A patent/CN100368773C/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000088577A (en) * | 1998-09-08 | 2000-03-31 | Japan Aviation Electronics Industry Ltd | Detection circuit of capacity detection type oscillation gyro |
| US6412347B1 (en) * | 1998-09-16 | 2002-07-02 | Matsushita Electric Industrial Co., Ltd. | Angle speed sensor |
| JP2002098712A (en) * | 2000-09-21 | 2002-04-05 | Denso Corp | Capacitive type physical quantity detection device |
| JP2002162231A (en) * | 2001-09-28 | 2002-06-07 | Alps Electric Co Ltd | Vibration type gyroscope |
| CN2715110Y (en) * | 2004-06-29 | 2005-08-03 | 东南大学 | Single channel harmonic extractor for capacitor type micro-gyro sensitive signal |
Non-Patent Citations (2)
| Title |
|---|
| 一种新型的光纤陀螺仪信号采集方法. 贾苹，李志宏.中国惯性技术学报，第11卷第2期. 2003 * |
| 捷联系统中陀螺仪数据采集器的设计. 钱卫忠，万德钧，李成嘉.东南大学学报(自然科学版)，第29卷第4期. 1999 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1595063A (en) | 2005-03-16 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN100368773C (en) | Method for extracting one-way harmonic wave of condenser type micro-gyroscope responsive signals and extraction apparatus therefor | |
| CN108253952B (en) | Zero-bias self-calibration MEMS gyroscope and zero-bias self-calibration method thereof | |
| CN100368772C (en) | Method for extracting two-way harmonic wave of condenser type micro-gyroscope responsive signals and extraction apparatus therefor | |
| CN103822623B (en) | A kind of oscillatory type silicon micromechanical gyro quadrature error closed loop compensation circuit | |
| US7779687B2 (en) | Detection device, gyrosensor, and electronic instrument | |
| US9915532B2 (en) | Method and apparatus for self-calibration of gyroscopes | |
| CN110160514B (en) | Multi-loop digital closed-loop control device of silicon MEMS gyroscope | |
| EP2447671B1 (en) | Angular velocity sensor, and synchronous detection circuit used therein | |
| CN100543418C (en) | Tuning fork vibrator for angular velocity sensor, the vehicle that uses the angular-rate sensor of this oscillator and use this angular-rate sensor | |
| KR101437190B1 (en) | Arrangement for measuring a rate of rotation using a vibration sensor | |
| US5703292A (en) | Sensor having an off-frequency drive scheme and a sense bias generator utilizing tuned circuits | |
| US6445195B1 (en) | Drive feedthrough nulling system | |
| JPH1073437A (en) | Oscillation gyro and detection circuit thereof | |
| CN109029409A (en) | Parameter amplification method and its device in a kind of tunable grid structure micromechanical gyro | |
| CN111220139B (en) | Micro-electro-mechanical multi-ring gyro force balance mode measurement and control circuit system | |
| CN210005012U (en) | multi-loop digital closed-loop control device for silicon MEMS gyroscope | |
| JP2002148047A (en) | Jyrosystem | |
| US8978473B2 (en) | Electrodes and associated electronic circuits for a piezoelectric vibrating gyrometer | |
| CN113819898A (en) | Error suppression method for orthogonal force feedback closed loop small-frequency-difference quartz gyroscope | |
| CN111998842A (en) | Online real-time automatic compensation method and system for phase delay of micromechanical gyroscope detection mode interface circuit | |
| Feng et al. | Differential pickup circuit design of a kind of Z-axis MEMS quartz gyroscope | |
| CN2715110Y (en) | Single channel harmonic extractor for capacitor type micro-gyro sensitive signal | |
| RU2274833C1 (en) | Device for transforming signals of micro-mechanical vibration-type gyroscope | |
| CN116592918A (en) | Charge amplifier-based resonant gyroscope feed-through error compensation device and method | |
| CN2711694Y (en) | Double-way harmonic wave extractor for capacitance type micro gyro sensitive signal |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20080213 Termination date: 20100629 |