CN110823249B - Automatic mode matching control structure and method for silicon micro gyroscope - Google Patents
Automatic mode matching control structure and method for silicon micro gyroscope Download PDFInfo
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Abstract
The invention discloses an automatic mode matching control structure and method based on a detection mode closed-loop silicon micro gyroscope, wherein a double-frequency signal is added into the detection mode closed-loop structure, the amplitude frequency response of the detection mode is symmetrical about the self resonant frequency, the phase frequency response is symmetrical about-90 DEG phase shift, tuning control voltage is generated through a double-frequency in-phase demodulation adder and a PI (proportional integral) controller, and the electrostatic stiffness tuning effect designed by capacitance variable gaps of tuning comb teeth is utilized to ensure that the detection mode resonant frequency of the silicon micro gyroscope is completely equal to the driving mode resonant frequency, so that automatic mode matching control is realized, and the mechanical detection sensitivity of the detection mode of the silicon micro gyroscope and the precision of the silicon micro gyroscope are effectively improved.
Description
Technical Field
The invention belongs to a silicon micro gyroscope closed-loop control technology, and particularly relates to an automatic mode matching control structure and method of a closed-loop silicon micro gyroscope based on a detection mode.
Background
The silicon micro gyroscope is used as an angular rate sensor and widely applied to consumer electronics, industrial control, automobile application, backup instruments of airplanes, a combined navigation system of a micro unmanned aerial vehicle, platform stability control, guidance application and the like. The silicon micro gyroscope consists of two working modes, namely a driving mode and a detection mode. The silicon micro gyroscope generally works in a non-modal matching mode, namely the resonance frequencies of a driving mode and a detection mode are not equal, so that the detection mode works on the resonance frequency of the driving mode but not the self resonance frequency, and the mechanical sensitivity of the detection mode is not fully exerted. How to realize the accurate matching of the resonance frequency of the driving mode and the detection mode through technical means, so that the detection mode is the same as the driving mode and works in a resonance state, the mechanical sensitivity of the detection mode is improved to the maximum extent, and the signal-to-noise ratio and the accuracy of the silicon micro gyroscope are improved, and the method becomes a key technology for improving the performance of the silicon micro gyroscope.
In order to realize mode matching, the detection mode resonant frequency and the driving mode resonant frequency can be set to be completely equal on the structural design, and the silicon micro gyroscope detection mode works in an open-loop mode. The problem with this approach is that the inconsistency of the machining process can result in the drive mode and the detection mode not being exactly equal in resonant frequency; or even if the two are exactly equal, the silicon micro gyroscope cannot keep complete accurate mode matching in a full working state due to the influence of stress, temperature change and the like. Moreover, this approach results in almost zero bandwidth of the silicon micro-gyroscope, making the silicon micro-gyroscope unusable.
The conventional detection mode closed-loop silicon micro gyroscope comprises a silicon micro gyroscope detection mode, a forward detection module, a controller and a torquer. The specific implementation forms of the method are various, and the method comprises a Sigma Delta detection mode closed loop, a demodulation modulation detection mode closed loop and other detection mode closed loops. On one hand, the detection mode closed-loop silicon micro gyroscope can servo the displacement of the detection mode of the silicon micro gyroscope to be close to a balance position, so that the scale coefficient of the detection mode is in direct proportion to the torquer, and the linearity of the scale coefficient is provided; on the other hand, the frequency difference between the driving mode and the detection mode loses the mechanical detection sensitivity and attenuates the performance of the gyroscope. Based on the detection mode closed loop silicon micro gyroscope, the precise matching of the resonance frequency of the detection mode and the driving mode is realized by utilizing the electrostatic rigidity tuning effect of the detection mode capacitance variable gap design and the closed loop control circuit, and the method becomes an effective means for improving the mechanical sensitivity of the detection mode closed loop silicon micro gyroscope.
Disclosure of Invention
In view of the above situation in the prior art, an object of the present invention is to provide an automatic mode matching control structure and method for a silicon micro gyroscope, so as to implement automatic mode matching control of a driving mode and a detection mode of the silicon micro gyroscope, and effectively improve mechanical detection sensitivity of the detection mode of the silicon micro gyroscope and accuracy of the silicon micro gyroscope.
According to one aspect of the invention, an automatic mode matching control structure of a silicon micro gyroscope is provided, which comprises a detection mode closed loop silicon micro gyroscope, a first dual-frequency signal generator, a second dual-frequency signal generator, a first in-phase demodulator, a second in-phase demodulator, a first gain module, a second gain module and a proportional-integral controller,
the detection mode closed-loop silicon micro gyroscope comprises a silicon micro gyroscope detection mode, a forward detection module, a controller and a torquer which are sequentially cascaded. The Coriolis force and the output of the torquer are added and then input into a silicon micro-gyroscope detection mode, and the output of the silicon micro-gyroscope detection mode is fed back to the silicon micro-gyroscope detection mode through a forward detection module, a controller and the torquer;
the first dual-frequency signal generator generates a standard amplitude modulation signal, the carrier frequency of the standard amplitude modulation signal is the resonance frequency of the driving mode of the silicon micro gyroscope, and therefore the standard amplitude modulation signal comprises a dual-frequency signal f = f with the same interval with the resonance frequency of the driving mode 1 +f 2 ＝Acos[(ω x -Δω)t]+Acos[(ω x +Δω)t]The double-frequency signal is used as a disturbance signal, and is added with the output of the forward detection module and then is input into the controller;
the second dual-frequency signal generator generates two paths of signals f 'with the same frequency and the same phase as the dual-frequency signals output by the first dual-frequency signal generator' 1 ＝A’cos[(ω x -Δω)t]And f' 2 ＝A’cos[(ω x +Δω)t]A demodulation reference signal as an output of the controller;
the first in-phase demodulator is used for outputting one path of output f 'of the second dual-frequency signal generator' 1 Demodulating in phase with the output of the controller to obtain omega x -amplitude response at the Δ ω frequency point;
the second in-phase demodulator is used for outputting f 'from the other path of the second dual-frequency signal generator' 2 Demodulating in phase with the output of the controller to obtain omega x Amplitude response at + Δ ω frequency point;
the first gain module is used for gain amplification of the output of the first in-phase demodulator, and the gain of the first in-phase demodulator is K (2 omega) x +Δω)/(2ω x ) The second gain module is used for gain amplification of the output of the second in-phase demodulator, and the gain of the second in-phase demodulator is K (2 omega) x -Δω)/(2ω x ) Wherein K is an arbitrary gain coefficient;
and the proportional-integral controller is used for performing proportional-integral control after the outputs of the first gain module and the second gain module are added, outputting tuning voltage and inputting the tuning voltage to a tuning electrode in a capacitance variable gap mode of a silicon micro gyroscope detection mode.
In the structure of the invention, the detection mode closed-loop silicon micro gyroscope is a Sigma Delta detection mode closed-loop silicon micro gyroscope.
In the structure of the present invention, the first in-phase demodulator and the second in-phase demodulator may be realized by a mixer plus a low-pass filter.
In the structure of the invention, the standard amplitude modulation signal is generated by mixing a low-frequency sinusoidal signal and a driving mode signal.
According to another aspect of the invention, an automatic mode matching control method for a silicon micro gyroscope is provided, which comprises the following steps:
sequentially cascading a silicon micro-gyroscope detection mode, a forward detection module, a controller and a torquer to form a detection mode closed-loop silicon micro-gyroscope, adding the output of the Coriolis force and the output of the torquer and inputting the sum to the silicon micro-gyroscope detection mode, and feeding the output of the silicon micro-gyroscope detection mode back to the silicon micro-gyroscope detection mode through the forward detection module, the controller and the torquer;
generating a standard amplitude modulation signal, wherein the carrier frequency of the standard amplitude modulation signal is the resonance frequency of the driving mode of the silicon micro gyroscope, so that the standard amplitude modulation signal comprises a dual-frequency signal f = f with the same interval with the resonance frequency of the driving mode 1 +f 2 ＝Acos[(ω x -Δω)t]+Acos[(ω x +Δω)t]The double-frequency signal is used as a disturbance signal, and is added with the output of the forward detection module and then is input into the controller;
generating two signals f 'having the same frequency and the same phase as the dual-frequency signal' 1 ＝A’cos[(ω x -Δω)t]And f' 2 ＝A’cos[(ω x +Δω)t]A demodulation reference signal as an output of the controller;
one path is output to f' 1 Demodulating in phase with the output of the controller to obtain omega x Amplitude response at the frequency point of Δ ω and gain amplification with gain K (2 ω) x +Δω)/(2ω x )；
F 'is output from the other line' 2 Demodulating in phase with the output of the controller to obtain omega x Amplitude response at + delta omega frequency point and gain amplification is carried out, and the gain is K (2 omega) x -Δω)/(2ω x ) K is an arbitrary gain coefficient;
and adding the two paths of output after gain amplification, performing proportional integral control, outputting tuning voltage, and inputting the tuning voltage to a tuning electrode in a capacitance variable gap mode of a silicon micro gyroscope detection mode.
In the method, the detection mode closed-loop silicon micro gyroscope is a Sigma Delta detection mode closed-loop silicon micro gyroscope.
In the method of the invention, in-phase demodulation is achieved by mixing plus low-pass filtering.
In the method of the present invention, the standard amplitude modulation signal is generated by mixing a low-frequency sinusoidal signal with a driving mode signal.
The invention fully utilizes the characteristic that the amplitude response of the detection mode is approximately symmetrical about the resonance frequency of the detection mode, and the phase is symmetrical about-90 degrees, when the resonance frequency of the detection mode is equal to the resonance frequency of the driving mode, the frequency is omega x In-phase amplitude response and frequency of + Δ ω disturbance signal x The in-phase amplitude response of the-delta omega disturbance signal is reversed in an equal way, so that the addition result of the adder at the back end is zero, and the resonance frequency of the detection mode is strictly equal to the resonance frequency of the driving mode.
The gain adjustment of the amplitude response of the dual-frequency signal is provided by the invention, so as to compensate the slight difference of the amplitude-frequency response of the detection mode relative to the resonance frequency of the detection mode. Wherein the frequency is (ω) x The amplitude response gain of the + Δ ω) disturbance signal is set to K (2 ω) x -Δω)/(2ω x ) Wherein the frequency is (ω) x - Δ ω) the amplitude response gain of the disturbance signal is set to K (2 ω) x +Δω)/(2ω x ) Where K is an arbitrary gain factor.
Drawings
FIG. 1 is a functional block diagram of a detection mode closed loop silicon micro gyroscope;
fig. 2 is a functional block diagram of an automatic mode matching control structure of a detection mode closed-loop silicon micro gyroscope according to the present invention.
Detailed Description
For a clearer understanding of the objects, technical solutions and advantages of the present invention, the present invention will be described in further detail below with reference to the accompanying drawings and embodiments.
The invention provides an automatic mode matching control structure and method based on a detection mode closed-loop silicon micro gyroscope, which are characterized in that a double-frequency signal is added into the detection mode closed-loop structure, the detection mode amplitude frequency response has symmetry about the self resonant frequency, the phase frequency response has symmetry about-90 DEG phase shift, tuning control voltage is generated through a double-frequency in-phase demodulation adder and a PI controller, and the electrostatic rigidity tuning effect designed by capacitance variable gaps of tuning comb teeth is utilized, so that the detection mode resonant frequency and the driving mode resonant frequency of the silicon micro gyroscope are completely equal, the automatic mode matching control is realized, and the mode matching control is not mismatched along with the change of external environment, such as temperature change, vibration, impact and the like.
Fig. 1 is a functional block diagram of a detection mode closed loop silicon micro gyroscope. Fig. 2 is a functional block diagram of an automatic mode matching control structure of a detection mode closed-loop silicon micro gyroscope according to the present invention.
As shown in the figure, the automatic mode matching control structure of the silicon micro gyroscope of the invention comprises a detection mode closed loop silicon micro gyroscope 06, a first dual-frequency signal generator 03, a second dual-frequency signal generator 07, a first in-phase demodulator 08, a second in-phase demodulator 09, a first gain module 10, a second gain module 11 and a proportional-integral controller 12.
The detection mode closed-loop silicon micro gyroscope 06 comprises a silicon micro gyroscope detection mode 01, a forward detection module 02, a controller 04 and a torquer 05 which are sequentially cascaded. The output of the Coriolis force and the output of the torquer 05 are added and then input into the silicon micro-gyroscope detection mode 01, and the output of the silicon micro-gyroscope detection mode 01 is fed back to the silicon micro-gyroscope detection mode 01 through the forward detection module 02, the controller 04 and the torquer 05.
The first dual-frequency signal generator 03 generates a standard amplitude-modulated signal having a carrier frequency of the driving mode resonance frequency of the silicon micro-gyroscope, such that the standard amplitude-modulated signal comprises a dual-frequency signal f = f at an equal distance from the driving mode resonance frequency 1 +f 2 ＝Acos[(ω x -Δω)t]+Acos[(ω x +Δω)t]The double frequencyThe signal is added to the output of the forward detection mode 02 as a disturbance signal, and then input to the controller 04.
The second dual frequency signal generator 07 generates two signals f 'having the same frequency and the same phase as the dual frequency signal outputted from the first dual frequency signal generator 03' 1 ＝A’cos[(ω x -Δω)t]And f' 2 ＝A’cos[(ω x +Δω)t]As a demodulation reference signal of the output of the controller 04.
The first in-phase demodulator 08 is used for outputting one output f 'of the second dual tone signal generator 07' 1 And the output of the controller 04 is demodulated in phase to obtain omega x Amplitude response at the frequency point Δ ω.
The second in-phase demodulator 09 is used for outputting f 'from the other path of the second dual-frequency signal generator 07' 2 And the output of the controller 04 is demodulated in phase to obtain omega x Amplitude response at the + Δ ω frequency point.
The first gain module 10 is used for gain amplifying the output of the first in-phase demodulator 08, and the gain is K (2 ω) x +Δω)/(2ω x ) The second gain module 11 is used for gain amplifying the output of the second in-phase demodulator 09, and the gain is K (2 ω) x -Δω)/(2ω x ) And K is an arbitrary gain coefficient.
The proportional-integral controller 12 is configured to perform proportional-integral control after summing outputs of the first gain module 10 and the second gain module 11, and output a tuning voltage to be input to a tuning electrode in a capacitance variable gap form of the silicon micro-gyroscope detection mode 01.
The following description will be given by way of example with reference to the above description.
The driving mode resonance frequency omega of the silicon micro gyroscope in the example x 10000 × 2 π rad/s, and 1000 × 2 π rad/s frequency gap Δ ω between the dual-frequency signal and the resonant frequency of the driving mode. The signal output by the first dual-frequency signal generator 03 is generated by multiplying the low-frequency gap Δ ω signal 2cos (1000 × 2 π t) and the driving mode displacement signal sin (10000 × 2 π t) (i.e., the low-frequency sinusoidal signal is mixed with the driving mode signal), and this generation is simple and easy to implement, and has a size of Δ ω signal 2cos (1000 × 2 π t) and the driving mode displacement signal sin (10000 × 2 π t)2cos (1000 × 2 π t) sin (10000 × 2 π t) = sin (11000 × 2 π t) + sin (9000 × 2 π t). The two paths of signals output by the second dual frequency signal generator 07 are sin (11000 × 2 π t) and sin (9000 × 2 π t), respectively.
For a typical detection mode closed loop silicon micro gyroscope 06, the structure thereof includes a silicon micro gyroscope detection mode 01, a forward detection module 02, a controller 04 and a torquer 05 which are sequentially cascaded. The detection mode closed-loop silicon micro gyroscope 06 adopts a Sigma Delta detection mode closed-loop control mode. The forward detection module 02 is implemented by a charge amplifier + a variable gain amplifier, and the output of the controller 05 is a pulse density signal.
Based on a Sigma Delta detection mode closed-loop silicon micro-gyroscope structure, firstly, introducing a double-frequency signal generated by a first double-frequency signal generator 03 outside a loop after a forward detection module 02; secondly, at the output end of the controller 05, the in-phase amplitude detection of the double-frequency signal is carried out through a first in-phase demodulator 08 and a second in-phase demodulator 09, and the amplitude response of the detection mode closed-loop silicon micro gyroscope 06 to the double-frequency signal is respectively extracted; the two amplitude responses are subjected to gain adjustment and addition through the first gain module 10 and the second gain module 11 again, and then tuning control voltage is generated through the PI controller 12; and finally, outputting the tuning control voltage to tuning comb teeth, and adjusting the resonance frequency of the detection mode by adjusting the rigidity of the detection mode by utilizing the electrostatic rigidity tuning effect designed by capacitance variable gap, thereby realizing accurate mode matching of the detection mode and the driving mode. Although the structure of the Sigma Delta detection mode closed-loop silicon micro-gyroscope is taken as an example for description, the present invention is also applicable to other forms of detection mode closed-loop silicon micro-gyroscopes, such as a demodulation modulation detection mode closed-loop silicon micro-gyroscope structure. Wherein the first in-phase demodulator (08) and the second in-phase demodulator (09) are realized by a mixer and a low-pass filter, and can also be realized by a multiplier and a low-pass filter.
The invention fully utilizes the approximately symmetrical characteristic of the amplitude response of the detection mode about the resonance frequency of the detection mode and the symmetrical characteristic of the phase about-90 degrees, when the resonance frequency of the detection mode is equal to the resonance frequency of the driving mode, the in-phase amplitude response of the double-frequency signal with the frequency of 11000 multiplied by 2 pi rad/s and the in-phase amplitude response of the double-frequency signal with the frequency of 9000 multiplied by 2 pi rad/s are equal and opposite, thereby realizing that the addition result of an adder at the rear end is zero, and leading the resonance frequency of the detection mode to be strictly equal to the resonance frequency of the driving mode.
The gain adjustment of the first gain module 10 and the second gain module 11 for the dual-frequency signal amplitude response is provided in the invention, in order to compensate for slight differences of the detection mode amplitude-frequency response with respect to the detection mode resonant frequency. Wherein the gain of the gain block 1 with an amplitude response of the dual frequency signal with a frequency of 11000 x 2 pi rad/s is set to 0.95, wherein the gain of the gain block 2 with an amplitude response of the dual frequency signal with a frequency of 9000 x 2 pi rad/s is set to 1.05.
Claims (8)
1. An automatic mode matching control structure of a silicon micro gyroscope comprises a detection mode closed loop silicon micro gyroscope (06), a first dual-frequency signal generator (03), a second dual-frequency signal generator (07), a first in-phase demodulator (08), a second in-phase demodulator (09), a first gain module (10), a second gain module (11) and a proportional-integral controller (12),
the detection mode closed-loop silicon micro gyroscope (06) comprises a silicon micro gyroscope detection mode (01), a forward detection module (02), a controller (04) and a torquer (05) which are sequentially cascaded, the output of the Coriolis force and the output of the torquer (05) are added and then input into the silicon micro gyroscope detection mode (01), and the output of the silicon micro gyroscope detection mode (01) is fed back to the silicon micro gyroscope detection mode (01) through the forward detection module (02), the controller (04) and the torquer (05);
the first dual-frequency signal generator (03) generates a standard amplitude modulation signal, the carrier frequency of the standard amplitude modulation signal is the resonance frequency of the driving mode of the silicon micro gyroscope, and therefore the standard amplitude modulation signal comprises a dual-frequency signal f = f with equal distance from the resonance frequency of the driving mode 1 +f 2 ＝Acos[(ω x -Δω)t]+Acos[(ω x +Δω)t]The double-frequency signal is used as a disturbance signal, is added with the output of the forward detection module (02), and is input into the controller (04);
the second dual-frequency signal generator (07) generates two paths of signals f 'with the same frequency and the same phase as the dual-frequency signals output by the first dual-frequency signal generator (03)' 1 ＝A’cos[(ω x -Δω)t]And f' 2 ＝A’cos[(ω x +Δω)t]A demodulation reference signal as an output of the controller (04);
the first in-phase demodulator (08) is used for outputting one-path output signal f 'of the second dual-frequency signal generator (07)' 1 And the output of the controller (04) is subjected to in-phase demodulation to obtain omega x -amplitude response at the Δ ω frequency point;
the second in-phase demodulator (09) is used for outputting the other path of output signal f 'of the second dual-frequency signal generator (07)' 2 And the output of the controller (04) is subjected to in-phase demodulation to obtain omega x Amplitude response at + Δ ω frequency point;
the first gain module (10) is used for gain amplification of the output of the first in-phase demodulator (08), and the second gain module (11) is used for gain amplification of the output of the second in-phase demodulator (09);
and the proportional-integral controller (12) is used for performing proportional-integral control after the outputs of the first gain module (10) and the second gain module (11) are added, and outputting a tuning voltage, and the tuning voltage is input to a tuning electrode in a capacitance variable gap form of the silicon micro-gyroscope detection mode (01).
2. The structure of claim 1, wherein the detection mode closed-loop silicon micro-gyroscope is a Sigma Delta detection mode closed-loop silicon micro-gyroscope.
3. The arrangement according to claim 1, wherein said first (08) and second (09) in-phase demodulators are realized by mixers plus low-pass filters.
4. The structure of claim 1, wherein said standard amplitude modulated signal is generated by mixing a low frequency sinusoidal signal with a drive mode signal.
5. An automatic mode matching control method for a silicon micro gyroscope comprises the following steps:
sequentially cascading a silicon micro-gyroscope detection mode (01), a forward detection module (02), a controller (04) and a torquer (05) to form a detection mode closed-loop silicon micro-gyroscope, adding the output of the Coriolis force and the output of the torquer (05) and inputting the sum to the silicon micro-gyroscope detection mode (01), and feeding back the output of the silicon micro-gyroscope detection mode (01) to the silicon micro-gyroscope detection mode (01) through the forward detection module (02), the controller (04) and the torquer (05);
generating a standard amplitude modulation signal, wherein the carrier frequency of the standard amplitude modulation signal is the resonance frequency of the driving mode of the silicon micro gyroscope, so that the standard amplitude modulation signal comprises a dual-frequency signal f = f with the same interval with the resonance frequency of the driving mode 1 +f 2 ＝Acos[(ω x -Δω)t]+Acos[(ω x +Δω)t]The double-frequency signal is used as a disturbance signal, is added with the output of the forward detection module (02), and is input into the controller (04);
generating two output signals f 'having the same frequency and the same phase as the dual-frequency signal' 1 ＝A’cos[(ω x -Δω)t]And f' 2 ＝A’cos[(ω x +Δω)t]A demodulation reference signal as an output of the controller (04);
one-way output signal f' 1 Demodulating in phase with the output of the controller to obtain omega x -amplitude response at the frequency point Δ ω and gain amplification;
the other path is output with a signal f' 2 Demodulating in phase with the output of the controller to obtain omega x Amplitude response on the + delta omega frequency point and gain amplification are carried out;
and adding the two paths of output after gain amplification, performing proportional integral control, and outputting tuning voltage, wherein the tuning voltage is input to a tuning electrode in a capacitance variable gap mode of a silicon micro gyroscope detection mode (01).
6. The method of claim 5, wherein the detection mode closed-loop silicon micro-gyroscope is a Sigma Delta detection mode closed-loop silicon micro-gyroscope.
7. The method of claim 5, wherein in-phase demodulation is achieved by mixing plus low-pass filtering.
8. The method of claim 5, wherein the standard amplitude modulation signal is generated by mixing a low frequency sinusoidal signal with the drive mode signal.
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