CN108007473A - Electronic circuit applied to MEMS - Google Patents
Electronic circuit applied to MEMS Download PDFInfo
- Publication number
- CN108007473A CN108007473A CN201610968513.0A CN201610968513A CN108007473A CN 108007473 A CN108007473 A CN 108007473A CN 201610968513 A CN201610968513 A CN 201610968513A CN 108007473 A CN108007473 A CN 108007473A
- Authority
- CN
- China
- Prior art keywords
- signal
- unit
- phase
- sensing
- electronic circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C25/00—Manufacturing, calibrating, cleaning, or repairing instruments or devices referred to in the other groups of this subclass
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Gyroscopes (AREA)
Abstract
A kind of electronic circuit applied to MEMS, formed with a signal sensing unit, a filter processing unit, a phase shift unit, one first phase inverter, a pretreatment unit and an analog/digital conversion processing unit, the electronic circuit as gyroscope reading circuit can be applied.Especially, this electronic circuit except can sense stabilizer unit one output signal and export an angular velocity signal to MEMS master controller in addition to, also at the same time can by the output signal carry out signal processing after, two signals that two anti-phase each other analogies of output adjust signal to stabilizer unit detect electrode, to adjust the Oscillation Amplitude of the mass block inside stabilizer unit using two analogy adjustment signals, mode compensates dynamically across axis coupling error whereby.
Description
Technical field
The present invention relates to the technical field of electronic circuit, particularly a kind of electronic circuit applied to MEMS.
Background technology
With selling fast for Nintendo's Wii game machines, single two-wheel carrier Sai Gewei Segway and smart mobile phone, movement
Sensor (motion sensor) reaches unprecedented extensive use.Motion sensor includes accelerometer and gyroscope, its
In, gyroscope is to measure a kind of microcomputer electric component of the rotational angle (angular speed) of object.Especially, mechanical gyro
Instrument, such as：Linear vibration formula gyroscope, be also designed specifically for measure coriolis acceleration (Coriolis acceleration) with
Extrapolate the angular speed change for the object for carrying gyroscope.
Referring to Fig. 1, to show a kind of Organization Chart of MEMS of the prior art.As shown in Figure 1, the prior art
MEMS (Micro-Electro-Mechanical system, MEMS), mainly includes three parts：One gyroscope machine
Tool structure 11 ', one drive circuit 12 ', one first sensing circuit 14 ', one second sensing circuit 13 ' and a control process circuit
15 ', with a process circuit 16 '.Wherein, the gyroscope mechanical structure 11 ' is by two frames 111 ', two mass blocks (proof mass)
112 ', two drivings are combed (driving comb) 113 ', are formed with two detection comb (pick-off comb) 114 ', and two matter
Gauge block (proof mass) 112 ' is fixed between two frame 111 ' by the auxiliary of multiple cantilevers (cantilever)..
Also, the drive circuit 12 ' is electrically connected to a driving of the driving comb 113 ' of the gyroscope mechanical structure 11 '
Electrode 1131 ', first sensing circuit 14 ' are electrically connected to a driving condition sensing electrode 1132 ' of driving comb 113 ', and
Second sensing circuit 13 ' is electrically connected to a detection electrode 1141 ' of detection comb 114 '.
Fig. 1 is unceasingly referred to, and please refer to Fig. 2A, 2B, makees cardon for display MEMS.Using the microcomputer
During electric system, a drive signal is exported to the drive circuit 12 ' with control process circuit 15 ' first so that the drive circuit 12 '
Driving comb 113 ' is driven to carry out an X-axis simple harmonic motion along X-direction according to the drive signal；At this time, the mass block
112 ' the traction because being driven comb 113 ' drives, and is can also carry out X-axis simple harmonic motion at the same frequency (such as Fig. 2A institutes
Show).It must illustrate, in order to determine the vibration frequency of mass block 112 ', amplitude, whether correct, the Ke Yitong with phase
Cross one be electrically connected to caused by the first sensing circuit 14 ' reading X-axis simple harmonic motion of the driving condition sensing electrode 1132 '
First sensing signal；Also, after handling first sensing signal via control process circuit 15 ', it can be determined that whether need to carry
Rise or reduce the vibration frequency (or Oscillation Amplitude) of mass block 112 '.
Also, as shown in Figure 2 B, when mass block 112 ' carries out simple harmonic motion and MEMS with fixed frequency along X-axis
After have rotated a special angle along X/Y plane (that is, having angular velocity vector Ω input in Z-direction), mass block 112 ' can because
It is subject to the effect of coriolis force and carries out a Y-axis simple harmonic motion along Y direction；At this time, can be by being electrically connected to the inspection
The second sensing circuit 13 ' for going out electrode 1141 ' reads one second sensing signal caused by the Y-axis simple harmonic motion；Also, via
After the process circuit 16 ' handles second sensing signal, the special angle can be calculated.
As known to being familiar with the engineer of gyroscope driving and reading circuit implementation, the machine of gyroscope mechanical structure 11 '
The technology defect of tool structure can cause mass block 112 ' to carry out Y-axis simple harmonic motion with producing one when X-axis simple harmonic motion across axis
Coupling error (quadrature coupling error).Therefore, engineer in design gyroscope driving with reading circuit when,
Synchronous demodulation method can be used in circuit.Based on driving condition detection signal (that is, first sensing signal) and detection signal
(that is, second sensing signal) has the phase difference of 90o, and the first sensing signal is first carried out phase by the synchronous demodulation method system
Move, the first sensing signal and the second sensing signal are subjected to multiplying afterwards, to demodulate an error transfer factor signal
(trimming signal).However, being based on being influenced be subject to phase-shift circuit precision and circuit noise (noise), cause residual
Remaining across axis coupling error can not be refined correction.
Although partial circuit noise (noise) can be eliminated using analogy-digital converter of high exponent number, such as：One
Analogy-digital converter comprising 2 rank loop filters can provide the noise improvement of 15 decibels/frequency multiplication (dB/decade), but
Analogy-digital converter simultaneously can not effectively eliminate those remaining across axis coupling errors.On the other hand, the analogy of high exponent number-
Digital converter usually has two major defects：(1) it is to cause to sell price costly that circuit design is complex；With
And (2) need the longer operating delay time (delay time), and the operating delay time is likely to result in phase demodulating mistake
By mistake.
The content of the invention
The technical problems to be solved by the invention are to provide a kind of electronic circuit applied to MEMS, with different from
The driving of the gyroscope of the prior art is micro electronmechanical to correct by adjusting the mode of the drive signal of drive circuit with reading circuit
Stabilizer unit in system.
To achieve these goals, the present invention provides a kind of electronic circuit applied to MEMS, with a signal
Sensing unit, a filter processing unit, a phase shift unit, one first phase inverter, a pretreatment unit and an analogy-number
Position conversion processing unit composition, can apply the electronic circuit as gyroscope reading circuit.Especially, this electronic circuit removes
An output signal of stabilizer unit can be sensed and exported beyond an angular velocity signal to the master controller of MEMS,
After also at the same time can be by carrying out signal processing to the output signal, two anti-phase each other analogies of output adjust signal to gyro
Two signals detection electrode of instrument element, to adjust the mass block inside stabilizer unit using two analogy adjustment signals
Oscillation Amplitude (amplitude), whereby mode compensate dynamically across axis coupling error.
One the 1st embodiment of the electronic circuit, applied in a MEMS, and is electrically connected to the micro-electro-mechanical systems
A stabilizer unit in system, the reading circuit with application for the stabilizer unit；The electronic circuit includes：
One signal sensing unit, is electrically connected to the one first signal detection electrode and a secondary signal of the stabilizer unit
Electrode is detected, to receive the one of stabilizer unit output signal, and exports a sensing signal；
One filter processing unit, is coupled to the signal sensing unit and the one drive circuit in the MEMS, to
The sensing signal and a driving detection signal are received, and an at least filtering process is carried out to the sensing signal, with output one first
Signal；
One phase shift unit, is coupled to the filter processing unit, to carry out a phase-shift processing to first signal, and it is defeated
First signal for going out one first adjustment signal to the stabilizer unit detects electrode；
One first phase inverter, is coupled to the phase shift unit, to it is anti-phase this first adjustment signal, and export with this first
The secondary signal for adjusting a signal second adjustment signal anti-phase each other to the stabilizer unit detects electrode；
One pretreatment unit, is coupled to the signal sensing unit to receive the sensing signal, and then exports one first signal；
And
One analogy-numerical digit conversion processing unit, is coupled to the pretreatment unit, first signal is converted into a number
Position signal.
One the 2nd embodiment of the electronic circuit, applied in a MEMS, and is electrically connected to the micro-electro-mechanical systems
A stabilizer unit in system, the reading circuit with application for the stabilizer unit；The electronic circuit includes：
One signal sensing unit, is electrically connected to the one first signal detection electrode and a secondary signal of the stabilizer unit
Electrode is detected, to receive the one of stabilizer unit output signal, and exports a sensing signal；
One pretreatment unit, is coupled to the signal sensing unit to receive the sensing signal, and then exports one first signal；
And
One analogy-numerical digit conversion processing unit, is coupled to the pretreatment unit, first signal is converted into a number
Position signal；
One phase shift unit, including：
One phase-shifter, the one drive circuit being coupled in the MEMS, is exported receiving the drive circuit
One string ripple signal, to carry out a phase-shift processing to the string ripple signal, and exports first phase adjustment string ripple signal；And
One proportional plus integral plus derivative controller, couples the phase-shifter and the analogy-numerical digit conversion processing unit；Wherein, the ratio
Example integral-derivative controller is according to across the axis phase (quadrature received from the analogy-numerical digit conversion processing unit
Phase) with a phase parameter (phase set point) and export a phase-modulation control signal (phase modulation
Controlling signal) to the phase-shifter；And
One first phase inverter, is coupled to the phase shift unit, adjusts string ripple signal to the anti-phase first phase, and export
String ripple signal, a second phase anti-phase each other adjustment string ripple signal, to being somebody's turn to do for the stabilizer unit are adjusted with the first phase
Secondary signal detects electrode.
The technical effects of the invention are that：
The present invention is applied to the electronic circuit of MEMS, and the driving different from the gyroscope of the prior art is electric with reading
Road corrects the stabilizer unit in MEMS by adjusting the mode of the drive signal of drive circuit, except can sense
One output signal of stabilizer unit is simultaneously exported beyond an angular velocity signal to the master controller of MEMS, also at the same time can be with
After carrying out signal processing to the output signal, two anti-phase each other analogies of output adjust signal to the two of stabilizer unit
A signal detects electrode, to adjust the Oscillation Amplitude of the mass block inside stabilizer unit using this two adjustment signals
(amplitude), mode compensates dynamically across axis coupling error whereby.
Below in conjunction with the drawings and specific embodiments, the present invention will be described in detail, but not as a limitation of the invention.
Brief description of the drawings
Fig. 1 is a kind of Organization Chart of MEMS of the display prior art；
Fig. 2A, 2B make cardon for display MEMS；
Fig. 3 is a kind of the 1st circuit framework figure of electronic circuit applied to MEMS of the display present invention；
Fig. 4 is a kind of the 2nd circuit framework figure of electronic circuit applied to MEMS of the display present invention；
Fig. 5 is a kind of the 3rd circuit framework figure of electronic circuit applied to MEMS of the display present invention.
Wherein, reference numeral
The present invention
2 stabilizer units
3 drive circuits
1 electronic circuit
The first signals of 20a detect electrode
20b secondary signals detect electrode
22 driving condition detecting electrodes
23 driving electrodes
11 signal sensing units
12 filter processing units
13 phase shift units
14 first phase inverters
15 pretreatment units
16 analogies-numerical digit conversion processing unit
17 second phase inverters
121 bandpass filters
122 multipliers
123 low-pass filters
131 phase-shifters
132 proportional plus integral plus derivative controllers
133 function of temperature compensation control units
17 amplifying units
18 adders
VbiasThe DC bias signal prior art
11 ' gyroscope mechanical structures
12 ' drive circuits
14 ' first sensing circuits
13 ' second sensing circuits
15 ' control process circuits
16 ' process circuits
111 ' frames
1132 ' driving condition sensing electrodes
1131 ' driving electrodes
1141 ' detection electrodes
112 ' mass blocks
113 ' driving combs
114 ' detection combs
Embodiment
The structural principle and operation principle of the present invention are described in detail below in conjunction with the accompanying drawings：
1st embodiment：
A kind of referring to Fig. 3, the 1st circuit framework of electronic circuit applied to MEMS for the display present invention
Figure.It is well known that MEMS generally includes：One stabilizer unit 2, one drive circuit 3 and a reading circuit, wherein originally
The electronic circuit 1 of invention is applied to the reading circuit.As shown in figure 3, the stabilizer unit 2 has one first signal detection electricity
Pole 20a, secondary signal detection electrode 20b, a driving condition detecting electrode 22 and a driving electrodes 23.
As known to being familiar with the driving of gyroscope and the engineer of reading circuit, which is electrically connected to this
Driving electrodes 23, to input a drive signal to the stabilizer unit 2 so that the mass block inside stabilizer unit 2 can
A simple harmonic motion is carried out along X-axis.Meanwhile drive circuit 3 is coupled to the driving condition detecting electrode 22 again, to obtain the gyro
One first output signal of instrument element 2, with the vibration frequency for block of checking on the quality, amplitude, whether correct with phase.It is worth explanation
It is that the second output signal of the stabilizer unit 2 detected based on the first output signal with the reading circuit has the phase of 90o
Potential difference, drive circuit 3 can export a string ripple signal after the phase difference is eliminated, such as：One first cosine signal Cos (ω t).
Also, when mass block is rotated with fixed frequency along X-axis progress simple harmonic motion and MEMS along X/Y plane
After one special angle (that is, having angular velocity vector Ω input in Z-direction), mass block can because being subject to the effect of coriolis force and
Simple harmonic motion is done along Y-axis；At this time, the primary processor of MEMS can be by being electrically connected to first signal detection electricity
The reading circuit of pole 20a and secondary signal detection electrode 20b reads one second output signal of the stabilizer unit 2；Also,
Via after the master processor processes second sensing signals, the special angle and the angular velocity vector Ω can be calculated.
After simply introducing the multiple electrodes of the stabilizer unit 2 and the function of the drive circuit 3, hereafter just start in detail
Introduce the composition circuit unit and its feature of the electronic circuit 1 of the present invention.As shown in figure 3, the electronic circuit 1 of the present invention wraps
Include：One signal sensing unit 11, a filter processing unit 12, a phase shift unit 13, one first phase inverter 14, a pre-treatment list
Member 15, one analogy-numerical digit conversion processing unit, 16 and 1 second phase inverter 17.Wherein, signal sensing unit 11 is an electric charge
Amplifier, and the first signal detection electrode 20a and secondary signal detection electrode 20b of the stabilizer unit 2 are electrically connected to, use
With receive the second of the stabilizer unit 2 output signal, and by this second output signal be converted to a sensing signal (that is, electricity
Press signal).
On the other hand, the pretreatment unit 15 is by a programmable gain amplifier (Programmable Gain
Amplifier, PGA) formed with a low-pass filter, and the signal sensing unit 11 is coupled to receive the sensing signal,
Into after to perform preposition amplification and low-pass filtering treatment to the sensing signal, one first signal is exported.Afterwards, it is coupled to the preceding place
A digital signal can be converted into by first signal by managing analogy-numerical digit conversion processing unit 16 of unit 15, and the numerical digit is believed
Number output to MEMS primary processor；At this time, after which carries out computing according to the digital signal, can count
Calculate the special angle that MEMS is rotated along X/Y plane.
In this, it is necessary to special instruction, although described above is rotated as example with MEMS along X/Y plane
Illustrate the signal sensing unit 11, the operating mode of the pretreatment unit 15 and the analogy-numerical digit conversion processing unit 16, so
And and be not used to limit the signal sensing unit 11, the pretreatment unit 15 can only with the analogy-numerical digit conversion processing unit 16
It is enough to detect the special angle that the MEMS is rotated along X/Y plane.Well imagine, MEMS may also edge
XZ planes or YZ planes are rotated, however, the tandem circuit list of this electronic circuit 1 that can't influence or change the present invention
Member is formed.Briefly, when the applications of electronic circuitry of the present invention is in the MEMS with multiaxis gyroscope, it is only necessary to
Accordingly increase the quantity of tandem circuit unit according to the quantity of the angular speed rotation axis of gyroscope, this is for being familiar with electronics
Can't be too difficult thing for the engineer of circuit design.
In addition, the filter processing unit 12 is coupled to the signal sensing unit 11 and the drive circuit in the MEMS
3, to receive the sensing signal that signal sensing unit 11 exported and the string ripple signal that the drive circuit 3 is exported.Such as
Shown in Fig. 3, the filter processing unit 12 includes：One bandpass filter 121, a multiplier 122 and a low-pass filter 123；
Wherein, which couples the signal sensing unit 11 to receive the sensing signal, and performs one to the sensing signal
Bandpass filtering treatment.At this time, the sensing signal for completing bandpass filtering treatment can be, for example, one second cosine signal Cos (ω
t-).Also, multiplier 122 couples the bandpass filter 121 and the drive circuit 3 in the MEMS, to finish receiving
The sensing signal of the bandpass filtering treatment and driving detection signal, and by the sensing signal and the driving detect signal into
Row multiplying, to demodulate a secondary signal.For example, by the first cosine signal Cos (ω t) and the second cosine signal
Cos (ω t-) carries out multiplying, then can demodulate the second output of across axis coupling and the stabilizer unit 2 caused by effect
Signal may have the value to bePhase error.
Hold above-mentioned, be coupled to the low-pass filter 123 of the multiplier 122 and the secondary signal is performed at a low-pass filtering
Reason, and export the first adjustment signal.As shown in figure 3, first adjustment signal then input be arranged at the low-pass filter 123 with
One second phase inverter 17 between the phase shift unit 13, and anti-phase processing is carried out by second phase inverter 17.Then, complete anti-
First adjustment signal of phase processor then inputs the phase shift unit 13, and is subject to the phase shift unit 13 to perform a phase-shift processing
The first signal detection electrode 20a of stabilizer unit 2 is inputted afterwards.In this, the first of input the first signal detection electrode 20a adjusts
Signal (trimming signal) can be, for example, the 3rd cosine signalWherein, the 3rd cosine signalBy the phase shift unit 13 according to demodulate come phase errorIt is produced.Meanwhile by phase shift
The first adjustment signal that unit 13 is exported can be also inputted to being electrically connected at the of the phase shift unit 13 and stabilizer unit 2
The first phase inverter 14 between binary signal detection electrode 20b, and first phase inverter 14 carries out reversely the first adjustment signal
After processing, a second adjustment signal anti-phase each other with the first adjustment signal is then exported to the second of the stabilizer unit 2
Signal detection electrode 20b.
Be different from the driving of the gyroscope of the prior art and the design of reading circuit, the present invention by the first adjustment signal and
Second adjustment signal anti-phase each other, which is mutually inputted to the first signal of the stabilizer unit 2, with the first adjustment signal detects electrode
20a and secondary signal detection electrode 20b, the first signal detection electrode is inputted by the first adjustment signal and second adjustment signal
20a and secondary signal detection electrode 20b, is, for example,WithTwo anaiog signals；Wherein,
The effect of the two anaiog signals is the Oscillation Amplitude for adjusting the mass block inside (trimming) stabilizer unit 2
(amplitude), mode compensates dynamically across axis coupling error whereby.
In this way, it is above-mentioned completely and clearly demonstrate the present invention a kind of electronic circuit applied to MEMS, pass through
By above-mentioned, it is following can to learn that the present invention has the advantages that：
(1) different from the prior art gyroscope driving and reading circuit by adjusting the drive signal of drive circuit
Mode corrects the stabilizer unit in MEMS, and the present invention is mainly with a signal sensing unit 11, a filtering process list
First 12, one phase shift unit 13, one first phase inverter 14, a pretreatment unit 15 and one analogy-numerical digit conversion processing unit
16 compositions can apply the electronic circuit as gyroscope reading circuit；Wherein, the electronic circuit is except that can sense gyro
One output signal of instrument element 2 is simultaneously exported beyond an angular velocity signal to the master controller of MEMS, can also be led at the same time
Cross after carrying out signal processing to the output signal, two anti-phase each other analogies of output adjust signal to the two of stabilizer unit 2
A signal detection electrode (20a, 20b), to adjust shaking for the mass block inside stabilizer unit 2 using this two adjustment signals
Amplitude (amplitude) is moved, mode compensates dynamically across axis coupling error whereby.
2nd embodiment：
Unceasingly, referring to Fig. 4, a kind of the 2nd electricity of electronic circuit applied to MEMS for the display present invention
Road Organization Chart.As shown in figure 4, the 2nd circuit framework of the electronic circuit 1 of the present invention includes：Locate before one signal sensing unit 11, one
Manage unit 15, one analogy-numerical digit conversion processing unit 16, a phase shift unit 13 and one first phase inverter 14.Wherein, should
Signal sensing unit 11, the configuration mode of the pretreatment unit 15 and the analogy-numerical digit conversion processing unit 16 and function in
Clear interpretation in preceding description, is to be not repeated to illustrate in this.
Different from foregoing 1st circuit framework, in the 2nd circuit framework, the phase shift unit 13 is by a phase-shifter 131
Formed with a proportional plus integral plus derivative controller 132.Wherein, which is coupled to the driving in the MEMS
Circuit 3, to receive the string ripple signal that the drive circuit 3 is exported, into to the string ripple signal one phase-shift processing of progress, example
Such as a sinusoidal signal Sin (ω t) is mutually moved intoIn this, sinusoidal signalIt can be referred to as first
Phase adjustment string ripple signal.On the other hand, proportional plus integral plus derivative controller (Proportional-Integral-Derivative
Controller, PID) 132 couple the phase-shifters 131 and the analogy-numerical digit conversion processing unit 16；Wherein, the proportional integration
Derivative controller 132 is according to across the axis phase (quadrature received from the analogy-numerical digit conversion processing unit 16
Phase) with a phase parameter (phase set point) and export a phase-modulation control signal (phase modulation
Controlling signal) to the phase-shifter 131.What deserves to be explained is actually the proportional plus integral plus derivative controller 132 from
The analogy-numerical digit conversion processing unit 16 receives one across axis signal (quadrature signal), and from being somebody's turn to do across in axis signal
Take out across the axis phase.In addition, the phase parameter is user's setting value, it is usually 0 °.Furthermore the first phase inverter 14
The phase shift unit 13 is coupled to, string ripple signal is adjusted to the anti-phase first phase, and is exported and first phase adjustment string
A ripple signal second phase anti-phase each other adjusts string ripple signal to the secondary signal detection electrode 20b of the stabilizer unit 2.
Referring back to Fig. 5, for a kind of the 3rd circuit of electronic circuit applied to MEMS of the display present invention
Organization Chart.In order to avoid variation of ambient temperature influences adjustment effect of the reading circuit for the stabilizer unit 2 of the present invention, such as
Shown in Fig. 5, further planning has a function of temperature compensation control unit 133 to the present invention in phase shift unit 13, to monitor the top
One environment temperature of spiral shell instrument element 2, and then a temperature compensation signal is exported to the phase-shifter 131.On the other hand, in order to enable
One phase adjustment string ripple signal can efficiently reach the adjustment for stabilizer unit 2 with second phase adjustment string ripple signal
Effect, the present invention set an amplifying unit 17 between the stabilizer unit 2 and the phase shift unit 13 again, to amplify this
One phase adjustment string ripple signal.Meanwhile to be loaded in one negative straight for first phase adjustment string ripple signal (that is, AC signal) in order to prevent
Flow on signal, the present invention sets an adder 18 between the stabilizer unit 2 and the amplifying unit 17 again, to by this
One phase adjustment string ripple signal and a DC bias signal VbiasAdd operation is carried out, mode causes first phase to adjust string whereby
Ripple signal (that is, AC signal) is loaded in the upper of a positive direct-current signal.
Certainly, the present invention can also have other various embodiments, ripe in the case of without departing substantially from spirit of the invention and its essence
Know those skilled in the art and make various corresponding changes and deformation in accordance with the present invention, but these change and become accordingly
Shape should all belong to the protection domain of appended claims of the invention.
Claims (12)
1. a kind of electronic circuit, applied in a MEMS, and the gyroscope being electrically connected in the MEMS
Element, the reading circuit with application for the stabilizer unit；It is characterized in that, the electronic circuit includes：
One signal sensing unit, the one first signal detection electrode and a secondary signal for being electrically connected to the stabilizer unit detect
Electrode, to receive the one of stabilizer unit output signal, and exports a sensing signal；
One filter processing unit, is coupled to the signal sensing unit and the one drive circuit in the MEMS, to receive
The string ripple signal that the sensing signal is exported with the drive circuit, and an at least filtering process is carried out to the sensing signal, with
Export one first signal；
One phase shift unit, is coupled to the filter processing unit, to carry out a phase-shift processing to first signal, and exports one
First signal of first adjustment signal to the stabilizer unit detects electrode；
One first phase inverter, is coupled to the phase shift unit, to the anti-phase first adjustment signal, and exports and first adjustment
The secondary signal of a signal second adjustment signal anti-phase each other to the stabilizer unit detects electrode；
One pretreatment unit, is coupled to the signal sensing unit to receive the sensing signal, and then exports one first signal；And
One analogy-numerical digit conversion processing unit, is coupled to the pretreatment unit, first signal is converted into numerical digit letter
Number.
2. electronic circuit as claimed in claim 1, it is characterised in that the signal sensing unit is a charge amplifier.
3. electronic circuit as claimed in claim 1, it is characterised in that the pretreatment unit by a programmable gain amplifier with
One low-pass filter is formed.
4. electronic circuit as claimed in claim 1, it is characterised in that the filter processing unit includes：
One bandpass filter, couples the signal sensing unit to receive the sensing signal, and perform a band logical to the sensing signal
Filtering process；
One multiplier, couples the bandpass filter and the drive circuit in the MEMS, to finish receiving band logical filter
Sensing signal and the string ripple signal of ripple processing, and the sensing signal and driving detection signal are subjected to multiplying,
To demodulate a secondary signal；
One low-pass filter, couples the multiplier, to perform a low-pass filtering treatment to the secondary signal, and exports first tune
Entire signal.
5. electronic circuit as claimed in claim 3, it is characterised in that the sensing signal exported for the charge amplifier one
Voltage signal.
6. electronic circuit as claimed in claim 4, it is characterised in that one second phase inverter is coupled to the filter processing unit
Between the low-pass filter and the phase shift unit, to carry out an anti-phase processing to the first adjustment signal.
7. a kind of electronic circuit, applied in a MEMS, and the gyroscope being electrically connected in the MEMS
Element, the reading circuit with application for the stabilizer unit；It is characterized in that, the electronic circuit includes：
One signal sensing unit, the one first signal detection electrode and a secondary signal for being electrically connected to the stabilizer unit detect
Electrode, to receive the one of stabilizer unit output signal, and exports a sensing signal；
One pretreatment unit, is coupled to the signal sensing unit to receive the sensing signal, and then exports one first signal；
One analogy-numerical digit conversion processing unit, is coupled to the pretreatment unit, first signal is converted into numerical digit letter
Number；
One phase shift unit, including：
One phase-shifter, the one drive circuit being coupled in the MEMS, to receive the string that the drive circuit is exported
Ripple signal, to carry out a phase-shift processing to the string ripple signal, and exports first phase adjustment string ripple signal；And
One proportional plus integral plus derivative controller, couples the phase-shifter and the analogy-numerical digit conversion processing unit；Wherein, which accumulates
Derivative controller is divided to export one according to across the axis phase received from the analogy-numerical digit conversion processing unit and a phase parameter
Phase-modulation control signal is to the phase-shifter；And
One first phase inverter, is coupled to the phase shift unit, adjusts string ripple signal to the anti-phase first phase, and export and be somebody's turn to do
A first phase adjustment string ripple signal second phase anti-phase each other adjusts string ripple signal to second letter of the stabilizer unit
Number detection electrode.
8. electronic circuit as claimed in claim 7, it is characterised in that the signal sensing unit is a charge amplifier.
9. electronic circuit as claimed in claim 7, it is characterised in that the pretreatment unit by a programmable gain amplifier with
One low-pass filter is formed.
10. electronic circuit as claimed in claim 7, it is characterised in that the phase shift unit further includes：One function of temperature compensation control
Unit, to monitor an environment temperature of the stabilizer unit, and then exports a temperature compensation signal to the phase-shifter.
11. electronic circuit as claimed in claim 7, it is characterised in that further include：
One amplifying unit, is coupled between the stabilizer unit and the phase shift unit, to amplify first phase adjustment string
Ripple signal；And
One adder, is coupled between the stabilizer unit and the amplifying unit, the first phase is adjusted string ripple signal
Add operation is carried out with a DC bias signal.
12. electronic circuit as claimed in claim 8, it is characterised in that the sensing signal is exported for the charge amplifier
One voltage signal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610968513.0A CN108007473A (en) | 2016-10-28 | 2016-10-28 | Electronic circuit applied to MEMS |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610968513.0A CN108007473A (en) | 2016-10-28 | 2016-10-28 | Electronic circuit applied to MEMS |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108007473A true CN108007473A (en) | 2018-05-08 |
Family
ID=62048518
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610968513.0A Pending CN108007473A (en) | 2016-10-28 | 2016-10-28 | Electronic circuit applied to MEMS |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108007473A (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1851403A (en) * | 2006-05-24 | 2006-10-25 | 北京航空航天大学 | Looped optical-frequency detection apparatus of resonance type micro-light electromechanical gyro |
| US20070194842A1 (en) * | 2004-03-12 | 2007-08-23 | Hotelling Steven P | Error correction for vibratory rate gyroscope |
| CN202119447U (en) * | 2011-06-29 | 2012-01-18 | 东南大学 | Closed loop detection device for silicon micromachined and dynamically-turned mixed gyroscope |
| CN102650526A (en) * | 2012-04-25 | 2012-08-29 | 北京航空航天大学 | Open-loop detecting circuit for frequency modulated continuous wave optical fiber gyroscope based on phase comparison |
| CN104142158A (en) * | 2014-04-10 | 2014-11-12 | 北京航空航天大学 | Analog circuit of direct frequency output resonant type micromechanical gyroscope harmonic oscillator |
| CN105892293A (en) * | 2016-04-06 | 2016-08-24 | 苏州大学 | Silicon micro-machined gyroscope digital driving closed loop control system |
-
2016
- 2016-10-28 CN CN201610968513.0A patent/CN108007473A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20070194842A1 (en) * | 2004-03-12 | 2007-08-23 | Hotelling Steven P | Error correction for vibratory rate gyroscope |
| CN1851403A (en) * | 2006-05-24 | 2006-10-25 | 北京航空航天大学 | Looped optical-frequency detection apparatus of resonance type micro-light electromechanical gyro |
| CN202119447U (en) * | 2011-06-29 | 2012-01-18 | 东南大学 | Closed loop detection device for silicon micromachined and dynamically-turned mixed gyroscope |
| CN102650526A (en) * | 2012-04-25 | 2012-08-29 | 北京航空航天大学 | Open-loop detecting circuit for frequency modulated continuous wave optical fiber gyroscope based on phase comparison |
| CN104142158A (en) * | 2014-04-10 | 2014-11-12 | 北京航空航天大学 | Analog circuit of direct frequency output resonant type micromechanical gyroscope harmonic oscillator |
| CN105892293A (en) * | 2016-04-06 | 2016-08-24 | 苏州大学 | Silicon micro-machined gyroscope digital driving closed loop control system |
Non-Patent Citations (1)
| Title |
|---|
| 蒋庆华等: "一种改进的振动式微机械陀螺驱动电路", 《传感技术学报》 * |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR101075672B1 (en) | Vibration compensating control circuit and imaging pickup apparatus | |
| US7284408B2 (en) | Sensor system | |
| EP2351982B1 (en) | Angular velocity sensor | |
| CN105763119A (en) | Control system and control method for CMG framework permanent magnet synchronous motor | |
| CN209181958U (en) | A kind of flex rotor experiment station high-speed balancing test macro | |
| CN104655116A (en) | Detection device, sensor, electronic apparatus, and moving object | |
| JPWO2014155559A1 (en) | Notch filter, external force estimator, motor controller and robot system | |
| JP2010112790A (en) | Angular velocity detection method for vibration type angular velocity sensor | |
| JP6586735B2 (en) | Circuit device, physical quantity detection device, electronic device, and moving object | |
| EP3916361B1 (en) | Rotation angle detection device, and electric power steering device including same rotation angle detection device | |
| CN210005012U (en) | multi-loop digital closed-loop control device for silicon MEMS gyroscope | |
| JP2017050664A (en) | Analog reference voltage generating circuit, circuit device, physical quantity sensor, electronic device and moving object | |
| CN103148847A (en) | System and method for eliminating in-phase error of micromechanical gyroscope based on differential | |
| Hajdu et al. | Complementary filter based sensor fusion on FPGA platforms | |
| CN106525015B (en) | Physical quantity detection system, electronic apparatus, and moving object | |
| CN108007473A (en) | Electronic circuit applied to MEMS | |
| CN112762917B (en) | Quadrature error suppression system and MEMS gyroscope | |
| CN116592912A (en) | Micro-mechanical gyroscope coupling error coefficient real-time identification method based on quadrature demodulation | |
| CN108020240A (en) | Electronic circuit applied to MEMS | |
| CN105910596B (en) | Circuit device, physical quantity detection device, electronic apparatus, and moving object | |
| CN104635033B (en) | Current error compensation method applied to motor | |
| JP6572585B2 (en) | CIRCUIT DEVICE, PHYSICAL QUANTITY DETECTION DEVICE, ELECTRONIC DEVICE, MOBILE BODY, CIRCUIT DEVICE MANUFACTURING METHOD | |
| CN203163737U (en) | System for eliminating in-phase errors of micromechanical gyroscopes based on multiplication | |
| CN115280100A (en) | Azimuth attitude angle measuring device | |
| CN117781994B (en) | Method, device and medium for testing rotary-variable sensor |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| TA01 | Transfer of patent application right | ||
| TA01 | Transfer of patent application right |
Effective date of registration: 20201202 Address after: 8th floor, 233-2 Baoqiao Road, Xindian District, Xinbei City, Taiwan, China Applicant after: DYNA IMAGE Corp. Applicant after: Lite-On Semiconductor Corp. Address before: 8th floor, 233-2 Baoqiao Road, Xindian District, Xinbei City, Taiwan, China Applicant before: DYNA IMAGE Corp. |
|
| WD01 | Invention patent application deemed withdrawn after publication | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20180508 |