CN108007473A - electronic circuit applied to micro-electromechanical system - Google Patents

Abstract

An electronic circuit applied to a micro-electromechanical system is composed of a signal sensing unit, a filtering processing unit, a phase shift unit, a first inverter, a pre-processing unit, and an analog-to-digital conversion processing unit, and can be applied as an electronic circuit of a gyroscope reading circuit. In particular, in addition to being able to sense an output signal of a gyroscope element and output an angular velocity signal to a main controller of the micro-electromechanical system, the electronic circuit can also output two analog adjustment signals of opposite phases to two signal detection electrodes of the gyroscope element after signal processing of the output signal, so as to use the two analog adjustment signals to adjust the vibration amplitude of the mass block inside the gyroscope element, thereby compensating for the dynamic cross-axis coupling error.

Description

Electronic Circuits Applied to MEMS

technical field

The invention relates to the technical field of electronic circuits, in particular to an electronic circuit applied to micro-electromechanical systems.

Background technique

With the popularity of the Nintendo Wii game console, the single-person two-wheeled vehicle Segway, and smart phones, motion sensors have been widely used in unprecedented ways. The motion sensor includes an accelerometer and a gyroscope, wherein the gyroscope is a micro-electromechanical device used to measure the rotation angle (angular velocity) of an object. In particular, mechanical gyroscopes, such as linear vibrating gyroscopes, are also designed to measure Coriolis acceleration to calculate the change in angular velocity of the object on which the gyroscope is mounted.

Please refer to FIG. 1 , which is a structural diagram of a MEMS in the prior art. As shown in Figure 1, the micro-electro-mechanical system (Micro-Electro-Mechanical system, MEMS) of the prior art mainly includes three parts: a gyroscope mechanical structure 11', a driving circuit 12', a first sensing circuit 14', a second sensing circuit 13', a control processing circuit 15', and a processing circuit 16'. Wherein, the gyroscope mechanical structure 11' is composed of two frames 111', two proof masses (proof mass) 112', two driving combs (driving comb) 113', and two detection combs (pick-off comb) 114' , and the two proof masses 112' are fixed between the two frames 111' with the assistance of a plurality of cantilever. .

Moreover, the driving circuit 12' is electrically connected to a driving electrode 1131' of the driving comb 113' of the gyroscope mechanical structure 11', and the first sensing circuit 14' is electrically connected to a driving electrode 113' of the driving comb 113'. The state sensing electrode 1132' is driven, and the second sensing circuit 13' is electrically connected to a detection electrode 1141' of the detection comb 114'.

Continue to refer to FIG. 1 , and please refer to FIGS. 2A and 2B at the same time, which are operation diagrams showing the MEMS. When using the micro-electro-mechanical system, first, the control processing circuit 15' outputs a driving signal to the driving circuit 12', so that the driving circuit 12' drives the driving comb 113' to perform an X-axis along the X-axis direction according to the driving signal. X-axis simple harmonic motion; at this time, the mass block 112' is driven by the driving comb 113', so it also performs X-axis simple harmonic motion at the same frequency (as shown in FIG. 2A ). It must be noted that, in order to determine whether the vibration frequency, amplitude, and phase of the proof mass 112' are correct, the X-axis abbreviation can be read by the first sensing circuit 14' electrically connected to the driving state sensing electrode 1132'. A first sensing signal caused by harmonic motion; and, after processing the first sensing signal through the control processing circuit 15 ′, it can be determined whether to increase or decrease the vibration frequency (or vibration amplitude) of the mass 112 ′.

And, as shown in FIG. 2B, when the mass 112' performs simple harmonic motion along the X-axis with a fixed frequency and the MEMS rotates a specific angle along the XY plane (that is, there is an angular velocity Ω input in the Z-axis direction ), the mass 112' will perform a Y-axis simple harmonic motion along the Y-axis direction due to the Coriolis force; at this time, the second sensing circuit electrically connected to the detection electrode 1141' can 13 ′ reads out a second sensing signal caused by the Y-axis simple harmonic motion; and, after processing the second sensing signal through the processing circuit 16 ′, the specific angle can be calculated.

As is well known to engineers who are familiar with the implementation of gyroscope driving and reading circuits, the technical flaws in the mechanical structure of the gyroscope mechanical structure 11 ′ will cause the mass 112 ′ to perform Y-axis simple harmonic motion and X-axis simple harmonic motion. - quadrature coupling error. Therefore, when designing gyroscope driving and reading circuits, engineers will use a synchronous demodulation method in the circuit. Based on the fact that there is a 90° phase difference between the driving state detection signal (that is, the first sensing signal) and the detection signal (that is, the second sensing signal), the synchronous demodulation method is to firstly perform the first sensing signal Phase shifting, and then multiplying the first sensing signal and the second sensing signal to demodulate an error trimming signal. However, due to the influence of the precision of the phase shift circuit and the noise of the circuit, the residual cross-axis coupling error cannot be accurately corrected.

Although, using a high-order analog-to-digital converter can eliminate some circuit noise (noise), for example: an analog-to-digital converter that includes a 2nd-order loop filter can provide 15 decibels/octave (dB/decade) Noise improves, but the analog-to-digital converter cannot effectively eliminate these residual cross-axis coupling errors. On the other hand, high-order analog-to-digital converters usually have two main disadvantages: (1) the circuit design is relatively complicated, so that the selling price is relatively expensive; and (2) it requires a long delay time (delay time ), and this operation delay time may cause phase demodulation errors.

Contents of the invention

The technical problem to be solved by the present invention is to provide an electronic circuit applied to a micro-electro-mechanical system, which is different from the prior art gyroscope drive and read circuit by adjusting the driving signal of the drive circuit to correct the micro-electro-mechanical system. gyroscope components.

In order to achieve the above object, the present invention provides an electronic circuit applied to micro-electro-mechanical systems, with a signal sensing unit, a filter processing unit, a phase shift unit, a first inverter, a pre-processing unit, and It is composed of an analog-to-digital conversion processing unit, which can be used as an electronic circuit of a gyroscope reading circuit. In particular, besides sensing an output signal of the gyroscope element and outputting an angular velocity signal to the main controller of the microelectromechanical system, the electronic circuit can also process the output signal so that the output is mutually inverse The two analog adjustment signals of the gyro element are sent to the two signal detection electrodes of the gyro element, so that the two analog adjustment signals can be used to adjust the vibration amplitude of the mass block inside the gyro element, thereby compensating the dynamic cross-axis coupling error.

A first embodiment of the electronic circuit is applied in a microelectromechanical system, and is electrically connected to a gyroscope element in the microelectromechanical system, so as to be used as a read circuit of the gyroscope element; the electronic Circuit includes:

A signal sensing unit, electrically connected to a first signal detection electrode and a second signal detection electrode of the gyroscope element, for receiving an output signal of the gyroscope element, and outputting a sensing signal;

a filter processing unit, coupled to the signal sensing unit and a driving circuit in the MEMS, for receiving the sensing signal and a driving detection signal, and performing at least one filtering process on the sensing signal, so as to output a first signal;

a phase shift unit, coupled to the filter processing unit, for performing a phase shift process on the first signal, and outputting a first adjustment signal to the first signal detection electrode of the gyroscope element;

A first inverter, coupled to the phase shift unit, is used for inverting the first adjustment signal, and outputting a second adjustment signal which is opposite to the first adjustment signal to the gyroscope element. The second signal detection electrode;

a pre-processing unit, coupled to the signal sensing unit to receive the sensing signal, and then output a first signal; and

An analog-to-digital conversion processing unit is coupled to the pre-processing unit for converting the first signal into a digital signal.

A second embodiment of the electronic circuit is applied in a MEMS, and is electrically connected to a gyroscope element in the MEMS, so as to be used as a reading circuit of the gyroscope element; the electronic Circuit includes:

A signal sensing unit, electrically connected to a first signal detection electrode and a second signal detection electrode of the gyroscope element, for receiving an output signal of the gyroscope element, and outputting a sensing signal;

a pre-processing unit, coupled to the signal sensing unit to receive the sensing signal, and then output a first signal; and

an analog-to-digital conversion processing unit, coupled to the pre-processing unit, for converting the first signal into a digital signal;

A phase displacement unit, including:

A phase shifter, coupled to a driving circuit in the micro-electro-mechanical system, is used to receive a sinusoidal signal output by the driving circuit, perform a phase-shift process on the sinusoidal signal, and output a first phase-adjusted sine wave signals; and

a proportional-integral-derivative controller, coupled to the phase shifter and the analog-digital conversion processing unit; wherein, the proportional-integral-derivative controller is received from the analog-digital conversion processing unit according to a cross-axis phase (quadraturephase) and a output a phase modulation control signal (phase modulation controlling signal) to the phase shifter according to the phase set point; and

A first inverter, coupled to the phase shifting unit, for inverting the first phase-adjusted sine wave signal, and outputting a second phase-adjusted sine-wave signal which is opposite to the first phase-adjusted sine-wave signal A sine wave signal to the second signal detection electrode of the gyroscope element.

Technical effect of the present invention is:

The present invention is applied to the electronic circuit of micro-electro-mechanical system, which is different from the driving and reading circuit of the prior art gyroscope by adjusting the driving signal of the driving circuit to correct the gyroscope element in the micro-electro-mechanical system, except that it can sense the gyroscope An output signal of the instrument element and output an angular velocity signal to the main controller of the micro-electromechanical system. At the same time, after signal processing the output signal, two analog adjustment signals that are mutually inverse phase can be output to the gyroscope element. The two signal detection electrodes are used to adjust the vibration amplitude of the mass block inside the gyroscope element by using the two adjustment signals, thereby compensating the dynamic cross-axis coupling error.

The present invention will be described in detail below in conjunction with the accompanying drawings and specific embodiments, but not as a limitation of the present invention.

Description of drawings

FIG. 1 is a structural diagram showing a micro-electro-mechanical system of the prior art;

2A and 2B are diagrams showing the operation of the MEMS;

FIG. 3 is a first circuit structure diagram showing an electronic circuit applied to a MEMS according to the present invention;

4 is a second circuit structure diagram showing an electronic circuit applied to a MEMS according to the present invention;

FIG. 5 is a diagram showing a third circuit structure of an electronic circuit applied to MEMS according to the present invention.

Among them, reference signs

this invention

2 Gyroscope elements

3 drive circuit

1 electronic circuit

20a First signal detection electrode

20b Second signal detection electrode

22 Driving state detection electrode

23 drive electrodes

11 Signal sensing unit

12 filter processing unit

13 phase shift unit

14 First inverter

15 pre-processing unit

16 analog-to-digital conversion processing unit

17 Second inverter

121 bandpass filter

122 multiplier

123 low pass filter

131 phase shifter

132 Proportional-integral-derivative controller

133 Temperature compensation control unit

17 amplifier unit

18 adder

V _bias DC bias signal prior art

11’ gyroscope mechanical structure

12’ drive circuit

14’ first sensing circuit

13’ second sensing circuit

15’ control processing circuit

16’ processing circuit

111' frame

1132' drive state sensing electrodes

1131’ drive electrodes

1141' detection electrode

112’ Mass

113’ drive comb

114’ detection comb

Detailed ways

Below in conjunction with accompanying drawing, structural principle and working principle of the present invention are specifically described:

The first embodiment:

Please refer to FIG. 3 , which is a diagram showing a first circuit structure of an electronic circuit applied to MEMS according to the present invention. As we all know, MEMS usually includes: a gyroscope element 2, a driving circuit 3, and a reading circuit, wherein the electronic circuit 1 of the present invention is applied to the reading circuit. As shown in FIG. 3 , the gyroscope element 2 has a first signal detection electrode 20 a , a second signal detection electrode 20 b , a driving state detection electrode 22 , and a driving electrode 23 .

As well known to engineers who are familiar with the driving and reading circuits of gyroscopes, the driving circuit 3 is electrically connected to the driving electrode 23 for inputting a driving signal to the gyroscope element 2, so that the mass inside the gyroscope element 2 The blocks are capable of a simple harmonic motion along the X axis. At the same time, the driving circuit 3 is coupled to the driving state detection electrode 22 to obtain a first output signal of the gyroscope element 2 to check whether the vibration frequency, amplitude, and phase of the mass are correct. It is worth noting that, based on the phase difference of 90o between the first output signal and the second output signal of the gyroscope element 2 detected by the reading circuit, the driving circuit 3 will output a string after eliminating the phase difference. wave signal, for example: a first cosine signal Cos(ωt).

Moreover, when the mass block performs simple harmonic motion along the X-axis at a fixed frequency and the MEMS rotates a specific angle along the XY plane (that is, there is an angular velocity Ω input in the Z-axis direction), the mass block will be affected by scientific The simple harmonic motion along the Y-axis is caused by the action of force; at this time, the main processor of the micro-electro-mechanical system can be electrically connected to the reading signal of the first signal detection electrode 20a and the second signal detection electrode 20b The circuit reads a second output signal of the gyroscope element 2; and, after processing the second sensing signal through the main processor, the specific angle and the angular velocity Ω can be calculated.

After briefly introducing the plurality of electrodes of the gyroscope element 2 and the functions of the driving circuit 3 , the circuit units and their functionality of the electronic circuit 1 of the present invention will be described in detail below. As shown in Figure 3, the electronic circuit 1 of the present invention includes: a signal sensing unit 11, a filter processing unit 12, a phase shift unit 13, a first inverter 14, a pre-processing unit 15, an analog- A digital conversion processing unit 16 and a second inverter 17 . Wherein, the signal sensing unit 11 is a charge amplifier, and is electrically connected to the first signal detection electrode 20a and the second signal detection electrode 20b of the gyroscope element 2, for receiving the second signal of the gyroscope element 2. output signal, and convert the second output signal into a sensing signal (that is, a voltage signal).

On the other hand, the pre-processing unit 15 is composed of a programmable gain amplifier (Programmable Gain Amplifier, PGA) and a low-pass filter, and is coupled to the signal sensing unit 11 to receive the sensing signal for further processing After pre-amplification and low-pass filtering are performed on the sensing signal, a first signal is output. After that, the analog-to-digital conversion processing unit 16 coupled to the pre-processing unit 15 will convert the first signal into a digital signal, and output the digital signal to the main processor of the MEMS; at this time, the main processing After the controller performs calculations based on the digital signal, the specific angle of rotation of the MEMS along the XY plane can be calculated.

Here, it must be particularly noted that although the above description takes the MEMS rotation along the XY plane as an example to describe the working modes of the signal sensing unit 11, the pre-processing unit 15 and the analog-to-digital conversion processing unit 16, However, it is not intended to limit that the signal sensing unit 11 , the pre-processing unit 15 and the analog-to-digital conversion processing unit 16 can only be used to detect the specific angle that the MEMS rotates along the XY plane. It is conceivable that the MEMS may also rotate along the XZ plane or the YZ plane, however, this will not affect or change the basic circuit unit configuration of the electronic circuit 1 of the present invention. Simply put, when the electronic circuit of the present invention is applied in a micro-electromechanical system with a multi-axis gyroscope, it is only necessary to increase the number of basic circuit units correspondingly according to the number of angular velocity rotation axes of the gyroscope. For circuit design engineers, it will not be too difficult.

In addition, the filter processing unit 12 is coupled to the signal sensing unit 11 and the drive circuit 3 in the MEMS, for receiving the sensing signal output by the signal sensing unit 11 and a signal output by the drive circuit 3 . Sine wave signal. As shown in FIG. 3 , the filter processing unit 12 includes: a band-pass filter 121, a multiplier 122, and a low-pass filter 123; wherein, the band-pass filter 121 is coupled to the signal sensing unit 11 for The sensing signal is received, and a band-pass filtering process is performed on the sensing signal. At this time, the sensing signal after the band-pass filter processing can be, for example, a second cosine signal Cos(ωt-). Moreover, the multiplier 122 is coupled to the band-pass filter 121 and the driving circuit 3 in the MEMS to receive the sensing signal and the driving detection signal after the band-pass filtering process, and convert the sensing signal Multiplication is performed with the drive detection signal to demodulate a second signal. For example, by multiplying the first cosine signal Cos(ωt) and the second cosine signal Cos(ωt-), the second cosine of the gyroscope element 2 caused by the cross-axis coupling effect can be demodulated. The output signal may have values phase error.

According to the above, the low-pass filter 123 coupled to the multiplier 122 performs a low-pass filtering process on the second signal, and outputs the first adjustment signal. As shown in FIG. 3 , the first adjustment signal is then input into a second inverter 17 disposed between the low-pass filter 123 and the phase shift unit 13, and the phase inversion process is performed by the second inverter 17. . Next, the first adjustment signal that has been inverted is input to the phase shift unit 13 , and is input to the first signal detection electrode 20 a of the gyroscope element 2 after being subjected to a phase shift process by the phase shift unit 13 . Here, the first trimming signal input to the first signal detection electrode 20a may be, for example, a third cosine signal where the third cosine signal According to the phase error value demodulated by the phase shift unit 13 produced. At the same time, the first adjustment signal output by the phase shift unit 13 is also input to the first inverter 14 electrically connected between the phase shift unit 13 and the second signal detection electrode 20b of the gyroscope element 2, And after the first inverter 14 inversely processes the first adjustment signal, it then outputs a second adjustment signal which is opposite to the first adjustment signal to the second signal detection of the gyroscope element 2. Electrode 20b.

Different from the design of the driving and reading circuit of the gyroscope in the prior art, the present invention mutually inputs the first adjustment signal and the second adjustment signal which is opposite to the first adjustment signal to the gyroscope element 2 The first signal detection electrode 20a and the second signal detection electrode 20b are used to input the first adjustment signal and the second adjustment signal into the first signal detection electrode 20a and the second signal detection electrode 20b, for example, and Two analog signals; wherein, the function of these two analog signals is to adjust (trimming) the vibration amplitude (amplitude) of the mass block inside the gyroscope element 2, thereby compensating the dynamic cross-axis coupling error.

In this way, the above has completely and clearly described an electronic circuit applied to micro-electromechanical systems of the present invention. Through the above, it can be known that the present invention has the following advantages:

(1) Different from the driving and reading circuit of the gyroscope in the prior art, the gyroscope element in the MEMS is corrected by adjusting the driving signal of the driving circuit. The present invention mainly uses a signal sensing unit 11, a filter Processing unit 12, a phase shift unit 13, a first inverter 14, a pre-processing unit 15, and an analog-digital conversion processing unit 16 form an electronic circuit that can be applied as a gyroscope reading circuit; wherein, the In addition to sensing an output signal of the gyroscope element 2 and outputting an angular velocity signal to the main controller of the micro-electromechanical system, the electronic circuit can also output two opposite-phase signals after signal processing the output signal. The analog adjustment signal is sent to the two signal detection electrodes (20a, 20b) of the gyroscope element 2, so as to use the two adjustment signals to adjust the vibration amplitude (amplitude) of the mass block inside the gyroscope element 2, thereby compensating the dynamic cross-axis coupling error.

The second embodiment:

Continuing, please refer to FIG. 4 , which is a second circuit structure diagram of an electronic circuit applied to MEMS according to the present invention. As shown in Figure 4, the second circuit structure of the electronic circuit 1 of the present invention includes: a signal sensing unit 11, a pre-processing unit 15, an analog-digital conversion processing unit 16, a phase shift unit 13, and a first an inverter 14 . Wherein, the configuration and functions of the signal sensing unit 11 , the pre-processing unit 15 and the analog-to-digital conversion processing unit 16 have been clearly explained in the foregoing description, so the description will not be repeated here.

Different from the aforementioned first circuit structure, in the second circuit structure, the phase shift unit 13 is composed of a phase shifter 131 and a proportional-integral-derivative controller 132 . Wherein, the phase shifter 131 is coupled to a drive circuit 3 in the MEMS, and is used to receive a sinusoidal signal output by the drive circuit 3, and then perform a phase shift process on the sinusoidal signal, for example Phase shift a sinusoidal signal Sin(ωt) into Here, the sinusoidal signal may be referred to as the first phase-adjusted sine wave signal. On the other hand, a proportional-integral-derivative controller (Proportional-Integral-DerivativeController, PID) 132 is coupled to the phase shifter 131 and the analog-digital conversion processing unit 16; wherein, the proportional-integral-derivative controller 132 is received from the analog - digitally converting a quadrature phase and a phase set point of the processing unit 16 to output a phase modulation controlling signal to the phase shifter 131 . It should be noted that actually the proportional integral differential controller 132 receives a quadrature signal from the analog-to-digital conversion processing unit 16 , and extracts the quadrature phase from the quadrature signal. In addition, the phase parameter is a user-set value, usually 0°. Furthermore, the first inverter 14 is coupled to the phase shifting unit 13 for inverting the first phase-adjusted sinusoidal signal and outputting a second phase-inverted phase-adjusted sinusoidal signal with the first phase-adjusted sinusoidal signal. The phase-adjusted sine wave signal is sent to the second signal detection electrode 20 b of the gyroscope element 2 .

Please continue to refer to FIG. 5 , which is a third circuit structure diagram showing an electronic circuit applied to MEMS according to the present invention. In order to avoid environmental temperature changes affecting the adjustment effect of the reading circuit of the present invention on the gyro element 2, as shown in Figure 5, the present invention further plans a temperature compensation control unit 133 in the phase shift unit 13 to monitor the gyro An ambient temperature of the instrument element 2 , and then output a temperature compensation signal to the phase shifter 131 . On the other hand, in order to enable the first phase adjustment sinusoidal signal and the second phase adjustment sinusoidal signal to effectively achieve the adjustment effect on the gyroscope element 2, the present invention further provides the gyroscope element 2 and the phase displacement unit 13 An amplifying unit 17 is arranged therebetween for amplifying the first phase-adjusted sine wave signal. Simultaneously, in order to prevent the first phase adjustment sine wave signal (that is, the AC signal) from being loaded on a negative DC signal, the present invention arranges an adder 18 between the gyroscope element 2 and the amplifying unit 17 to use The first phase-adjusted sinusoidal signal is added to a DC bias signal V _bias in such a way that the first phase-adjusted sinusoidal signal (that is, the AC signal) is loaded on a positive DC signal.

Certainly, the present invention also can have other multiple embodiments, without departing from the spirit and essence of the present invention, those skilled in the art can make various corresponding changes and deformations according to the present invention, but these corresponding Changes and deformations should belong to the scope of protection of the appended claims of the present invention.

Claims (12)

1. An electronic circuit, applied in a micro-electro-mechanical system, and electrically connected to a gyroscope element in the micro-electro-mechanical system, to be used as a reading circuit of the gyroscope element; it is characterized in that the electronic Circuit includes: A signal sensing unit, electrically connected to a first signal detection electrode and a second signal detection electrode of the gyroscope element, for receiving an output signal of the gyroscope element, and outputting a sensing signal; a filter processing unit, coupled to the signal sensing unit and a driving circuit in the MEMS, for receiving the sensing signal and a sine wave signal output by the driving circuit, and processing the sensing signal at least one filtering process to output a first signal; a phase shift unit, coupled to the filter processing unit, for performing a phase shift process on the first signal, and outputting a first adjustment signal to the first signal detection electrode of the gyroscope element; A first inverter, coupled to the phase shift unit, is used for inverting the first adjustment signal, and outputting a second adjustment signal which is opposite to the first adjustment signal to the gyroscope element. The second signal detection electrode; a pre-processing unit, coupled to the signal sensing unit to receive the sensing signal, and then output a first signal; and An analog-to-digital conversion processing unit is coupled to the pre-processing unit for converting the first signal into a digital signal. 2. The electronic circuit as claimed in claim 1, wherein the signal sensing unit is a charge amplifier. 3. The electronic circuit according to claim 1, wherein the pre-processing unit is composed of a programmable gain amplifier and a low-pass filter. 4. The electronic circuit according to claim 1, wherein the filter processing unit comprises: a band-pass filter, coupled to the signal sensing unit to receive the sensing signal, and perform a band-pass filtering process on the sensing signal; a multiplier, coupled to the band-pass filter and the drive circuit in the MEMS, to receive the sensing signal and the sinusoidal signal after the band-pass filter processing, and combine the sensing signal with the drive circuit The detection signal is multiplied to obtain a second signal through demodulation; A low-pass filter is coupled to the multiplier to perform a low-pass filter on the second signal and output the first adjusted signal. 5. The electronic circuit as claimed in claim 3, wherein the sensing signal is a voltage signal output by the charge amplifier. 6. The electronic circuit as claimed in claim 4, wherein a second inverter is coupled between the low-pass filter of the filter processing unit and the phase shift unit for adjusting the first The signal undergoes an inversion process. 7. An electronic circuit, applied in a micro-electro-mechanical system, and electrically connected to a gyroscope element in the micro-electro-mechanical system, to be used as a reading circuit of the gyroscope element; it is characterized in that the electronic Circuit includes: A signal sensing unit, electrically connected to a first signal detection electrode and a second signal detection electrode of the gyroscope element, for receiving an output signal of the gyroscope element, and outputting a sensing signal; a pre-processing unit, coupled to the signal sensing unit to receive the sensing signal, and then output a first signal; an analog-to-digital conversion processing unit, coupled to the pre-processing unit, for converting the first signal into a digital signal; A phase displacement unit, including: A phase shifter, coupled to a driving circuit in the micro-electro-mechanical system, is used to receive a sinusoidal signal output by the driving circuit, perform a phase-shift process on the sinusoidal signal, and output a first phase-adjusted sine wave signals; and a proportional-integral-derivative controller, coupled to the phase shifter and the analog-digital conversion processing unit; wherein, the proportional-integral-derivative controller is configured according to a cross-axis phase and a phase parameter received from the analog-digital conversion processing unit outputting a phase modulation control signal to the phase shifter; and A first inverter, coupled to the phase shifting unit, for inverting the first phase-adjusted sine wave signal, and outputting a second phase-adjusted sine-wave signal which is opposite to the first phase-adjusted sine-wave signal The wave signal is sent to the second signal detection electrode of the gyroscope element. 8. The electronic circuit as claimed in claim 7, wherein the signal sensing unit is a charge amplifier. 9. The electronic circuit according to claim 7, wherein the pre-processing unit is composed of a programmable gain amplifier and a low-pass filter. 10. The electronic circuit according to claim 7, wherein the phase displacement unit further comprises: a temperature compensation control unit for monitoring an ambient temperature of the gyro element, and then outputting a temperature compensation signal to the phase shifter. 11. The electronic circuit of claim 7, further comprising: an amplifying unit, coupled between the gyroscope element and the phase shifting unit, for amplifying the first phase-adjusted sine wave signal; and An adder, coupled between the gyroscope element and the amplifying unit, is used for adding the first phase-adjusted sinusoidal signal and a DC bias signal. 12. The electronic circuit as claimed in claim 8, wherein the sensing signal is a voltage signal output by the charge amplifier.