CN108332734B - Method for measuring three-axis angular velocity of micro-mechanical single-vibrator three-axis gyroscope - Google Patents
Method for measuring three-axis angular velocity of micro-mechanical single-vibrator three-axis gyroscope Download PDFInfo
- Publication number
- CN108332734B CN108332734B CN201810077661.2A CN201810077661A CN108332734B CN 108332734 B CN108332734 B CN 108332734B CN 201810077661 A CN201810077661 A CN 201810077661A CN 108332734 B CN108332734 B CN 108332734B
- Authority
- CN
- China
- Prior art keywords
- axis
- axis angular
- vibrator
- resonator
- driving
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/567—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
- G01C19/5691—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially three-dimensional vibrators, e.g. wine glass-type vibrators
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5776—Signal processing not specific to any of the devices covered by groups G01C19/5607 - G01C19/5719
Abstract
The invention discloses a method for measuring three-axis angular velocity of a micro-mechanical single-vibrator three-axis gyroscope, which comprises the steps of locking vibration amplitudes of two driving shafts of the single-vibrator three-axis gyroscope, driving the driving shafts at a fixed frequency, and enabling the frequencies to be different, carrying out in-phase demodulation on a detection quantity generated on a z axis through two frequency signals to obtain an xy axis angular velocity, enabling the z axis angular velocity to generate response on the two driving shafts, carrying out demodulation and filtering on output signals of a driving shaft resonator to obtain the z axis angular velocity, and finally realizing the measurement of the three-axis angular velocity of the single vibrator. The measuring method adopted by the invention can improve the detection precision of the gyroscope with compact structure and small volume.
Description
Technical Field
The invention relates to measurement of a micro-mechanical gyroscope, in particular to a method for measuring three-axis angular velocity of a micro-mechanical single-vibrator three-axis gyroscope, and belongs to the field of micro-electro-mechanical systems (MEMS).
Background
The gyroscope is an important inertial sensor and has wide application in various fields. The gyroscope is divided into a single-axis gyroscope, a double-axis gyroscope and a three-axis gyroscope according to the number of detection axes, and the three-axis gyroscope is required in many application occasions. In low-precision occasions such as consumer electronics and the like, multi-vibrator single-chip integration is generally adopted to realize small volume and low power consumption; in the application occasions of medium and high precision, the three-axis gyroscope is generally realized by adopting a method of mechanically assembling three independent single-axis gyroscopes, but the gyroscope in the mode has larger volume and limits the application occasions. The existing micromechanical triaxial gyroscope generally adopts multi-vibrator monolithic integration, the gyroscope has small volume and low precision, or three uniaxial gyroscopes are adopted for assembly, and the gyroscope has large volume and high cost.
Disclosure of Invention
The invention aims to provide a method for measuring the three-axis angular velocity of a micro-mechanical single-vibrator three-axis gyroscope with high precision.
The invention relates to a method for measuring three-axis angular velocity of a micro-mechanical single-vibrator three-axis gyroscope, which is characterized in that a driving module and a detection module are utilized to measure and calculate the three-axis angular velocity of the gyroscope, the gyroscope comprises driving electrodes (4-7), a vibrator (1), a driving module and a detection module, the vibrator (1) can elastically vibrate on an x axis and/or a y axis, and the surface of the vibrator (1) is provided with a plurality of vibrator electrodes Vdc(12) At the plurality of oscillator electrodes Vdc(12) A plurality of fixed electrodes (4-11) are arranged above the substrateThe fixed electrodes (4-11) comprise four driving electrodes Vx+(4)、Vx-(5)、Vy+(6)、Vy-(7) And four detection electrodes Vzx+(8)、Vzx-(9)、Vzy+(10)、Vzy-(11) Said drive electrode Vx+(4)、Vx-(5)、Vy+(6)、Vy-(7) And the detection electrode Vzx+(8)、Vzx-(9)、Vzy+(10)、Vzy-(11) Are alternately distributed with each other, and the plurality of oscillator electrodes Vdc(12) Corresponding to the plurality of fixed electrodes (4-11) one by one, the driving electrode Vx+(4)、Vx-(5) And the vibrator (1) form an x-axis angular vibration resonator, and the driving electrode Vy+(6)、Vy-(7) And the vibrator forms a y-axis angular vibration resonator, and the driving module is connected with the four driving electrodes Vx+(4)、Vx-(5)、Vy+(6)、Vy-(7) And the vibrator (1) for vibrating the x-axis angular vibration resonator and the y-axis angular vibration resonator, the method comprising the steps of:
(1) the driving module drives the x-axis angular vibration resonator and the y-axis angular vibration resonator to perform constant-frequency and constant-amplitude vibration, the vibration frequency of the x-axis angular vibration resonator is different from that of the y-axis angular vibration resonator, the amplitudes of the x-axis angular vibration resonator and the y-axis angular vibration resonator are constant, the driving module generates an output quantity Zout and a driving resonant frequency, and when an angular velocity is input, the detection electrode Vzx+(8)、Vzx-(9)、Vzy+(10)、Vzy-(11) And the plurality of vibrator electrodes Vdc(12) The capacitance between them produces corresponding capacitance variations Δ Czx +, Δ Czx-, Δ Czy +, Δ Czy-;
(2) and the capacitance variation delta Czx +, delta Czx-, delta Czy +, delta Czy-, the output quantity Zout and the driving resonant frequency are processed by a detection module to obtain the three-axis angular velocity.
Further, the driving module includes two loops, wherein the x-axis angular vibration resonator (xresoner), the transimpedance amplifier (TIA), the Band Pass Filter (BPF) and the automatic gain control module (AGC) form a first loop, the y-axis angular vibration resonator (yresoner), the transimpedance amplifier (TIA), the Band Pass Filter (BPF) and the automatic gain control module (AGC) form a second loop, the first loop is used for driving the x-axis angular vibration resonator (xresoner) to vibrate in a fixed frequency and fixed amplitude mode, the second loop is used for driving the y-axis angular vibration resonator (yresoner) to vibrate in a fixed frequency and fixed amplitude mode, the vibration frequency of the x-axis angular vibration resonator (xresoner) is different from the vibration frequency of the y-axis angular vibration resonator (yresoner), the amplitudes of the x-axis angular vibration resonator (xresoner) and the y-axis angular vibration resonator (yresoner) are constant, and the first loop is constant, The second loop is formed as a closed loop, with electrical connection between the two loops.
Further, the automatic gain control module (AGC) of the first loop is composed of a Rectifier (Rectifier), a Low Pass Filter (LPF), and a proportional integral controller (LPF), and the x-axis angular vibration resonator locks amplitude through the first loop.
Further, the second loop automatic gain control module (AGC) is composed of a Rectifier (Rectifier), a Low Pass Filter (LPF), and a proportional integral controller (LPF), and the output quantity Zout is output before the Low Pass Filter (LPF) of the second loop.
Further, when the first loop circuit and the second loop circuit are stable, the two resonator frequencies of the x-axis angular vibration resonator and the y-axis angular vibration resonator are respectively omega1And ω2The amplitude is constant, and the x-axis angle is thetax＝θ0xcos(ω1t+△φx) Angular velocity of y-axis thetay＝θ0ycos(ω2t+△φy) The torque generated by the z-axis angular velocity on the x-axis is Ixω2θ0ycos(ω2t+△φy) The torque generated on the y-axis is Iyω1θ0xcos(ω1t+△φx) Wherein, thetaox,θoyAngular vibration amplitude, △ phi, of the x-axis angular vibration resonator and the y-axis angular vibration resonator, respectivelyx,△φyRespectively an x-axis angular vibration resonator and the y-axis angular vibration resonancePhase difference between angular displacement of the device and the drive reference signal, Ix,IyThe output quantities Zout are filtered by a band-pass filter to remove omega2The frequency signal is synchronously demodulated and then is subjected to low-pass filtering to obtain the z-axis angular velocity omegaz。
Furthermore, the capacitance variation delta Czx + and the capacitance variation delta Czx-are summed after CV conversion, the capacitance variation delta Czy + and the capacitance variation delta Czy-are summed after CV conversion, the two quantities are subtracted again, and then the x-axis angular velocity omega of the x-axis angular vibration resonator is obtained after two frequency synchronous demodulation and low-pass filteringxAnd a y-axis angular velocity Ω of the y-axis angular vibration resonatoryThe two demodulation reference signals are respectively
And
wherein
And
respectively, the compensated phase difference of the two reference frequency signals.
The present invention will be described in further detail with reference to the accompanying drawings and specific embodiments.
Drawings
Fig. 1 is a schematic diagram of a dynamic structure of a single-oscillator dual-frequency driven triaxial gyroscope.
Fig. 2 is a schematic structural diagram of a single-oscillator dual-frequency driven three-axis gyroscope.
Fig. 3 is a schematic structural diagram of a single-vibrator orthogonal driving three-axis gyroscope system.
Fig. 4 is a system block diagram of a drive module.
FIG. 5 is a system block diagram of a detection module.
In the figure: 1. a mechanical vibrator; 2. a universal joint; 3. a support beam; 4. positive electrode of x drive shaft Vx+(ii) a 5. x drive shaft negative electrode Vx-(ii) a 6. y positive electrode of driving shaft Vy+(ii) a 7. y negative electrode of driving shaft Vy-(ii) a 8. Z-axis grid type detection electrode Vzx+(ii) a 9. Z-axis grid type detection electrode Vzy+(ii) a 10. Z-axis grid type detection electrode Vzx-(ii) a 11. Z-axis grid type detection electrode Vzy-(ii) a 12. Vibrator electrode Vdc。
Detailed Description
The invention relates to a micro-mechanical single-vibrator double-frequency driving three-axis gyroscope, which utilizes the action of Coriolis effect on a vibration rigid body to detect three-axis angular velocity. As shown in FIG. 1, the moments of inertia of a circularly symmetric rotational rigid body around the xyz axis are Ix,Iy,IzAngular velocity in the carrier coordinate system is ωx,ωy,ωzAngular velocity relative to inertial coordinate system is omegax,Ωy,ΩzAnd the Coriolis effect generates a torque Mx,My,Mz. When the angle of the xy-axis varies at different frequencies and the angle of the z-axis is small, i.e. thetax＝θ0xsinω1t，θy＝θ0ysinω2t，θz≈0(θ0x、θ0yIs the angular vibration amplitude, omega1、ω2Vibration is angular frequency), the torque generated by the coriolis effect can be obtained under a small angle linear approximation as:
the amplitude of the xy axis can be locked by an automatic control method (AGC), the signal output by the resonator contains two frequency components, and the loop band-pass filter (BPF) only allows the frequency signal of the driving shaft to pass through, so that other frequency interference can be suppressed. And another path of signal led out from the resonator is subjected to band-pass filtering and in-phase demodulation to obtain the z-axis angular velocity omegaz. In addition, z-axis torque MzWill produce an angular response thetazThis angle is defined by the torque MzAnd the nature of the resonator structure itself, i.e.
Wherein: i iszThe moment of inertia of the vibrator to the z axis; dzThe damping coefficient of the z axis of the vibrator; kzIs the axial elastic coefficient of the vibrator z.
When the vibration frequency omega1、ω2When the angular speed bandwidth to be measured is far larger than the bandwidth of the angular speed to be measured, the angle theta can be obtainedzCan be approximated as a steady state solution:
wherein: k is the gain of the response;
is the phase shift of the response.
Angle thetaz(or other physical quantities resulting therefrom, e.g. checking capacitance), by
And
the angular velocity omega of the xy axis can be obtained by demodulationx,Ωy。
As shown in figure 2, the micromechanical single-vibrator double-frequency driving three-axis gyroscope is characterized in that a vibrator (1) is fixed on a universal joint (2) through four supporting beams (3), the vibrator (1) can elastically vibrate on an x axis or a y axis, the universal joint (2) is an anchor point, the vibrator (1) is in a ring shape or a polygonal ring shape with xy axial symmetry, a plurality of fixed electrodes are arranged above the vibrator (1), and an electrode V is arranged on the fixed electrodesx+(4)、Vx-(5)、Vy+(6)、Vy-(7) For driving the electrodes, grid-type electrodes Vzx+(8)、Vzx-(9)、Vzy+(10)、Vzy-(11) For the detection electrode, a vibrator electrode Vdc(12) Fixed on a disk with an insulated surface and having the same DC potential. Electrode Vx+(4)、Vx-(5) And the vibrator (1) form an x-axis angular vibration resonator, an electrodeVy+(6)、Vy-(7) And a vibrator (1) to form a y-axis angular vibration resonator, a grid electrode Vzx+(8)、Vzx-(9)、Vzy+(10)、Vzy-(11) And a vibrator electrode Vdc(12) Four detection capacitors are formed, and the z-axis angular displacement of the vibrator (1) can be detected.
As shown in FIG. 3, the driving module is connected to the electrode Vx+(4)、Vx-(5)、Vy+(6)、Vy-(7) By constant frequency drive (omega)1,ω2) And automatically controlling to lock the amplitude, simultaneously leading out a Zout from a y-axis driving loop for measuring the z-axis angular velocity, and connecting a detection module to the Zout and a grid electrode Vzx+(8)、Vzx-(9)、Vzy+(10)、Vzy-(11) And obtaining the triaxial angular velocity through C-V conversion and double-frequency in-phase demodulation.
As shown in fig. 4, the drive module consists of two independent loops. The reference signal for the x-axis drive is sin ω1And t, the signal is transmitted to an automatic gain control module (AGC) after passing through a resonator (xResonator), a transimpedance amplifier (TIA) and a band-pass filter (BPF), and the signal generated by the AGC module is multiplied by an x-axis input signal to obtain a final driving signal. The AGC consists of a Rectifier (Rectifier), a Low Pass Filter (LPF) and a proportional integral Controller (PI Controller), and the drive loop locks the resonator amplitude. The y-axis drive is similar to the x-axis drive, with the frequency of the reference signal being ω2In the y-axis drive module, a branch Zout is taken from the TIA for measuring the z-axis angular velocity.
As shown in FIG. 5, the detection module is connected to Zout, the gate electrode Vzx+(8)、Vzx-(9)、Vzy+(10)、Vzy-(11) The above. Zout is band-pass filtered (BPF) and then used at a frequency of ω1The in-phase demodulation and low-pass filter (LPF) of the signal can obtain the z-axis angular velocity omegaz. The Coriolis effect will be at z-axis torque MzWill produce an angular response thetazThis angle is defined by the torque MzAnd four detection capacitors corresponding to the four fixed electrodes in the z-axis direction are respectively Czx+、Czx-、Czy+、Czy-Value (C)zx++Czx-)-(Czx++Czx-) Proportional to the z-axis angle. A variable V and four capacitors Czx+、Czx-、Czy+、Czy-Inputting the signal into a detection module, and performing C-V conversion and demodulation (the reference frequencies are respectively omega)1,ω2) The angular velocity omega to be measured can be obtained after the processing of filtering, compensation and the likex,Ωy。
The micromechanical single-vibrator double-frequency driving three-axis gyroscope adopts electrostatic driving and capacitance detection, and the driving detection principle schematic diagram of the gyroscope is shown in figures 2-5. Drive module connection electrode Vx+(4)、Vx-(5)、Vy+(6)、Vy-(7) And a vibrator (1), wherein the driving vibrator (1) performs fixed-frequency vibration in the xy axis, the two driving shafts have constant amplitude and different frequencies, and output quantity Zout and driving resonant frequency (omega) caused by the angular velocity of the z axis are generated at the same time1,ω2) When angular velocity is input, the grid electrode Vzx+(8)、Vzx-(9)、Vzy+(10)、Vzy-(11) And a vibrator electrode V corresponding theretodc(12) The capacitance between the three-axis angular velocity output module and the three-axis angular velocity output module generates corresponding capacitance variation delta Czx +, delta Czx-, delta Czy + and delta Czy-, and the capacitance variation and the output quantity Zout and frequency generated by the driving loop are processed by the detection module to obtain the three-axis angular velocity output quantity. The vibrator (1) adopts a fixed frequency (the frequency is respectively omega) on an xy axis1,ω2) The constant amplitude driving and the reference constant frequency driving signals are sin omega respectively1t and sin ω2t. The x-axis drive of the vibrator (1) locks the amplitude through Automatic Gain Control (AGC), and an AGC module consists of a Rectifier (Rectifier), a low-pass filter (LPF) and a proportional-integral Controller (PI Controller). The vibrator (1) corresponds to a resonator (xResonator) on the x-axis and the driving torque tauxPassing and external z-axis angular velocity (magnitude is omega)z) The resulting coriolis effect torque will cause an angle to be produced by xronotor. The amplitude of the x-axis resonator can be locked by a closed loop formed by a Trans Impedance Amplifier (TIA), a band pass filter (LPF) and an AGC module, and the amplitude of the closed loop formed by the x-axis resonator and the AGC module can be locked, wherein the amplitude can be adjusted by a variable VxrefAnd (6) adjusting. In which the LPF only allows the frequency omega1By this, the angular displacement signal caused by the Coriolis effect torque can be filtered out. The closed loop driven by the y-axis of the vibrator (1) is similar to the x-axis, but outputs a signal Zout before the loop LPF for detecting the z-axis angular velocity. When the two loops are stable, the frequencies of the two resonators on the xy axis are respectively omega1And ω2The amplitude is constant, and the x-axis angle is thetax＝θ0xcos(ω1t+△φx) Angular velocity of y-axis thetay＝θ0ycos(ω2t+△φy) The Coriolis effect of z-axis angular velocity produces a torque I on the x-axisxω2θ0ycos(ω2t+△φy) The torque generated on the y-axis is Iyω1θ0xcos(ω1t+△φx) Wherein, thetaox,θoyAngular vibration amplitude of xy-axis, △ phi respectivelyx,△φyRespectively, the phase difference between the xy-axis angular displacement and the drive reference signal, Ix,IyRespectively the moment of inertia of the xy axis.
The above is only a preferred embodiment of the present invention, and those skilled in the art should understand that the modifications or variations of the present invention can be made without departing from the principle of the present invention, and still fall within the protection scope of the present invention.
Claims (5)
1. A method for measuring three-axis angular velocity of a micromechanical single-vibrator three-axis gyroscope comprises the steps of measuring and calculating the three-axis angular velocity of the gyroscope by utilizing a driving module and a detecting module, wherein the gyroscope comprises a plurality of fixed electrodes (4, 5, 6, 7, 8, 9, 10, 11), a vibrator (1), the driving module and the detecting module, the vibrator (1) is fixed on a universal joint (2) by four supporting beams (3), the universal joint (2) is an anchor point, the vibrator (1) is in an xy-axis symmetrical annular shape or a multi-edge annular shape, the vibrator (1) can elastically vibrate on an x axis and a y axis, and a plurality of vibrator electrodes V are arranged on the surface of the vibrator (1)dc(12) At the plurality of oscillator electrodes Vdc(12) A plurality of fixed electrodes (4, 5, 6, 7, 8, 9, 10, 11) are arranged above, and the plurality of fixed electrodes (4, 5, 6, 7, 8, 9, 10, 11) comprise four driving electrodesVx+(4)、Vx-(5)、Vy+(6)、Vy-(7) And four detection electrodes Vzx+(8)、Vzx-(9)、Vzy+(10)、Vzy-(11) Said drive electrode Vx+(4)、Vx-(5)、Vy+(6)、Vy-(7) And the detection electrode Vzx+(8)、Vzx-(9)、Vzy+(10)、Vzy-(11) Are alternately distributed with each other, and the plurality of oscillator electrodes Vdc(12) The driving electrodes V correspond to the plurality of fixed electrodes (4, 5, 6, 7, 8, 9, 10, 11) one by onex+(4)、Vx-(5) And the vibrator (1) form an x-axis angular vibration resonator, and the driving electrode Vy+(6)、Vy-(7) And the vibrator forms a y-axis angular vibration resonator, and the driving module is connected with the four driving electrodes Vx+(4)、Vx-(5)、Vy+(6)、Vy-(7) And the vibrator (1) is used for vibrating the x-axis angular vibration resonator and the y-axis angular vibration resonator, the driving module comprises two loops, wherein the x-axis angular vibration resonator (xResonator), the transimpedance amplifier (TIA), the band-pass filter (BPF) and the automatic gain control module (AGC) form a first loop, the y-axis angular vibration resonator (yResonator), the transimpedance amplifier (TIA), the band-pass filter (BPF) and the automatic gain control module (AGC) form a second loop, the first loop is used for driving the x-axis angular vibration resonator (xResonator) to do fixed-frequency and fixed-amplitude vibration, the second loop is used for driving the y-axis angular vibration resonator (yResonator) to do fixed-frequency and fixed-amplitude vibration, the vibration frequency of the x-axis angular vibration resonator (xResonator) is different from the vibration frequency of the y-axis angular vibration resonator (yResonator), the amplitudes of the x-axis angular vibration resonator (xrononator) and the y-axis angular vibration resonator (yrononator) are constant, the first loop circuit and the second loop circuit are formed into a closed loop, and the two loop circuits are electrically connected; the method comprises the following steps:
(1) the driving module drives the x-axis angular vibration resonator and the y-axis angular vibration resonator to perform constant-frequency and constant-amplitude vibration, and the vibration frequency of the x-axis angular vibration resonator and the vibration frequency of the y-axis angular vibration resonatorIn contrast, the amplitudes of the x-axis angular vibration resonator and the y-axis angular vibration resonator are constant, the driving module generates an output quantity Zout and a driving resonant frequency, and the detection electrode V when an angular velocity is inputzx+(8)、Vzx-(9)、Vzy+(10)、Vzy-(11) And the plurality of vibrator electrodes Vdc(12) The capacitance between them produces corresponding capacitance variations Δ Czx +, Δ Czx-, Δ Czy +, Δ Czy-;
(2) and the capacitance variation delta Czx +, delta Czx-, delta Czy +, delta Czy-, the output quantity Zout and the driving resonant frequency are processed by a detection module to obtain the three-axis angular velocity.
2. The method of claim 1, wherein: the automatic gain control module (AGC) of the first loop is composed of a Rectifier (Rectifier), a Low Pass Filter (LPF), and a proportional integral Controller (PI Controller), and the x-axis angular vibration resonator locks amplitude through the first loop.
3. The method of claim 1, wherein: the second loop automatic gain control module (AGC) is composed of a Rectifier (Rectifier), a Low Pass Filter (LPF), and a proportional integral Controller (PI Controller), and outputs the output quantity Zout before the Low Pass Filter (LPF) of the second loop.
4. The method of claim 1, wherein when the first loop circuit and the second loop circuit are stable, two resonator frequencies of the x-axis angular vibration resonator and the y-axis angular vibration resonator are ω, respectively1And ω2Constant amplitude, at which the x-axis angular velocity is thetax＝θ0xcos(ω1t+Δφx) Angular velocity of y-axis thetay＝θ0ycos(ω2t+Δφy) The torque generated by the z-axis angular velocity on the x-axis is Ixω2θ0ycos(ω2t+Δφy) The torque generated on the y-axis is Iyω1θ0xcos(ω1t+Δφx) Wherein, thetaox,θoyAngular vibration amplitude, Δ φ, of the x-axis angular vibration resonator and the y-axis angular vibration resonator, respectivelyx,ΔφyPhase differences, I, of the angular displacements of the x-axis angular vibration resonator and the y-axis angular vibration resonator, respectively, from the drive reference signalx,IyThe output quantities Zout are filtered by a band-pass filter to remove omega2The frequency signal is synchronously demodulated and then is subjected to low-pass filtering to obtain the z-axis angular velocity omegaz。
5. The method as claimed in claim 1, wherein the capacitance variation amounts Δ Czx + and Δ Czx "are summed after CV conversion, the capacitance variation amounts Δ Czy + and Δ Czy" are summed after CV conversion, the two amounts are subtracted, and then the x-axis angular velocity Ω of the x-axis angular vibration resonator is obtained after two frequency synchronous demodulation and low pass filtering respectivelyxAnd a y-axis angular velocity Ω of the y-axis angular vibration resonatoryThe two demodulation reference signals are respectivelyAnd
wherein
And
respectively, the compensated phase difference of the two reference frequency signals.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810077661.2A CN108332734B (en) | 2018-01-26 | 2018-01-26 | Method for measuring three-axis angular velocity of micro-mechanical single-vibrator three-axis gyroscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810077661.2A CN108332734B (en) | 2018-01-26 | 2018-01-26 | Method for measuring three-axis angular velocity of micro-mechanical single-vibrator three-axis gyroscope |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108332734A CN108332734A (en) | 2018-07-27 |
| CN108332734B true CN108332734B (en) | 2020-02-28 |
Family
ID=62925837
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810077661.2A Active CN108332734B (en) | 2018-01-26 | 2018-01-26 | Method for measuring three-axis angular velocity of micro-mechanical single-vibrator three-axis gyroscope |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108332734B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109682958B (en) * | 2018-09-21 | 2021-01-15 | 深圳沃德生命科技有限公司 | Acceleration sensor signal compensation method for thrombelastogram instrument |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0521364A3 (en) * | 1991-07-05 | 1993-05-19 | Bodenseewerk Geraetetechnik Gmbh | Triaxial laser gyroscope |
| US5428995A (en) * | 1993-03-08 | 1995-07-04 | Litton Systems, Inc. | Counterbalanced vibratory triaxial angular rate sensor with open loop output |
| CN102353371A (en) * | 2011-07-22 | 2012-02-15 | 上海交通大学 | Triaxial microgyroscope for capacitance detection through static driving |
| CN103900545A (en) * | 2014-03-20 | 2014-07-02 | 东南大学 | Monolithic integration holohedral symmetry three-axis silicon micro-tuning fork gyroscope |
| CN104236536A (en) * | 2013-06-07 | 2014-12-24 | 上海矽睿科技有限公司 | Micro-mechanical three-axis angular velocity transducer |
-
2018
- 2018-01-26 CN CN201810077661.2A patent/CN108332734B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0521364A3 (en) * | 1991-07-05 | 1993-05-19 | Bodenseewerk Geraetetechnik Gmbh | Triaxial laser gyroscope |
| US5428995A (en) * | 1993-03-08 | 1995-07-04 | Litton Systems, Inc. | Counterbalanced vibratory triaxial angular rate sensor with open loop output |
| CN102353371A (en) * | 2011-07-22 | 2012-02-15 | 上海交通大学 | Triaxial microgyroscope for capacitance detection through static driving |
| CN104236536A (en) * | 2013-06-07 | 2014-12-24 | 上海矽睿科技有限公司 | Micro-mechanical three-axis angular velocity transducer |
| CN103900545A (en) * | 2014-03-20 | 2014-07-02 | 东南大学 | Monolithic integration holohedral symmetry three-axis silicon micro-tuning fork gyroscope |
Non-Patent Citations (1)
| Title |
|---|
| "三维掩膜硅各向异性腐蚀工艺释放微悬空结构";黄占喜;《加工、测量与设备》;20110531;第48卷(第5期);第326-331页 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN108332734A (en) | 2018-07-27 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN108253952B (en) | Zero-bias self-calibration MEMS gyroscope and zero-bias self-calibration method thereof | |
| US7874209B2 (en) | Capacitive bulk acoustic wave disk gyroscopes with self-calibration | |
| TW466334B (en) | Angular rate producer with microelectromechanical system technology | |
| US10209270B2 (en) | Inertial sensors | |
| TWI482946B (en) | Vibrationskompensation fuer drehratensensoren | |
| US10809061B2 (en) | Vibratory gyroscope including a plurality of inertial bodies | |
| CN106969785B (en) | Self-calibration device and method for gyroscope | |
| Casinovi et al. | Electrostatic self-calibration of vibratory gyroscopes | |
| CN114383590A (en) | Phase error identification and compensation method of rate integral gyroscope | |
| CN105074384A (en) | Gyroscope with simplified calibration and simplified calibration method for a gyroscope | |
| Yang et al. | Digital control system for the MEMS tuning fork gyroscope based on synchronous integral demodulator | |
| JP6144692B2 (en) | Fault detection using skew transducers | |
| CN109596115A (en) | Nested ring type vibration gyro nonlinear effect suppression method | |
| CN111024056A (en) | High-dynamic-input MEMS gyroscope bandwidth expansion closed-loop control method | |
| CN111412907A (en) | Full-angle measurement and control circuit system of micro-electromechanical multi-ring gyroscope | |
| CN108332732B (en) | Driving and detecting device of micro-mechanical single-vibrator three-axis gyroscope | |
| Liu et al. | Digital closed-loop control based on adaptive filter for drive mode of a MEMS gyroscope | |
| CN108332734B (en) | Method for measuring three-axis angular velocity of micro-mechanical single-vibrator three-axis gyroscope | |
| Fan et al. | High performance MEMS disk gyroscope with force-to-rebalance operation mode | |
| CN108318019B (en) | Method for measuring three-axis angular velocity of micro-mechanical single-vibrator three-axis gyroscope | |
| Cui et al. | Virtual rate-table method for characterization of microgyroscopes | |
| CN108318018B (en) | Micro-mechanical single-vibrator three-axis gyroscope | |
| CN108332733B (en) | Driving and detecting device of micro-mechanical single-vibrator three-axis gyroscope | |
| CN108332731B (en) | Micro-mechanical single-vibrator three-axis gyroscope | |
| KR100203315B1 (en) | Two axis navigation grade micromachined rotation sensor system |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |