CN108020240A - Electronic circuit applied to MEMS - Google Patents
Electronic circuit applied to MEMS Download PDFInfo
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- CN108020240A CN108020240A CN201610968519.8A CN201610968519A CN108020240A CN 108020240 A CN108020240 A CN 108020240A CN 201610968519 A CN201610968519 A CN 201610968519A CN 108020240 A CN108020240 A CN 108020240A
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- signal
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C25/00—Manufacturing, calibrating, cleaning, or repairing instruments or devices referred to in the other groups of this subclass
Abstract
It is a kind of applied to MEMS electronic circuit, the closed-loop driving circuit module being made of a signal sensing unit, a high-pass filter, an analog digital converter, an amplitude controlling and processing unit, a multiplier, a low-pass filter, a Phase Processing unit and a voltage controlled oscillator.Especially, the electronic circuit except can according to from driving condition sensing signal that stabilizer unit detects so that it is self adaptive produce a modulated drive signal in addition to, can also also eliminate the phase difference between the modulated drive signal of the driving condition sensing signal and body output self adaptively at the same time；In this way, the modulated drive signal exported just can drive the mass block inside stabilizer unit it is expected and correctly vibration frequency or Oscillation Amplitude carry out simple harmonic motion.
Description
Technical field
The present invention relates to the technical field of electronic circuit, particularly a kind of electronic circuit applied to MEMS.
Background technology
With selling fast for Nintendo's Wii game machines, single two-wheel carrier Sai Gewei Segway and smart mobile phone, movement
Sensor (motion sensor) reaches unprecedented extensive use.Motion sensor includes accelerometer and gyroscope, its
In, gyroscope is to measure a kind of microcomputer electric component of the rotational angle (angular speed) of object.Especially, mechanical gyro
Instrument, such as：Linear vibration formula gyroscope, be also designed specifically for measure coriolis acceleration (Coriolis acceleration) with
Extrapolate the angular speed change for the object for carrying gyroscope.
Referring to Fig. 1, to show a kind of Organization Chart of MEMS of the prior art.As shown in Figure 1, the prior art
MEMS (Micro-Electro-Mechanical system, MEMS), mainly includes three parts：One gyroscope machine
Tool structure 11 ', one drive circuit 12 ', one first sensing circuit 14 ', one second sensing circuit 13 ' and a control process circuit
15 ', with a process circuit 16 '.Wherein, the gyroscope mechanical structure 11 ' is by two frames 111 ', two mass blocks (proof mass)
112 ', two drivings are combed (driving comb) 113 ', are formed with two detection comb (pick-off comb) 114 ', and two matter
Gauge block (proof mass) 112 ' is fixed between two frame 111 ' by the auxiliary of multiple cantilevers (cantilever).
Also, the drive circuit 12 ' is electrically connected to a driving electricity of the driving comb 113 ' of the gyroscope mechanical structure 11 '
Pole 1131 ', first sensing circuit 14 ' are electrically connected to a driving condition sensing electrode 1132 ' of driving comb 113 ', and should
Second sensing circuit 13 ' is electrically connected to a detection electrode 1141 ' of detection comb 114 '.
Fig. 1 is unceasingly referred to, and please refer to Fig. 2A, 2B, makees cardon for display MEMS.Using the microcomputer
During electric system, a drive signal is exported to the drive circuit 12 ' with control process circuit 15 ' first so that the drive circuit 12 '
Driving comb 113 ' is driven to carry out an X-axis simple harmonic motion along X-direction according to the drive signal；At this time, the mass block
112 ' the traction because being driven comb 113 ' drives, and is can also carry out X-axis simple harmonic motion at the same frequency (such as Fig. 2A institutes
Show).Also, as shown in Figure 2 B, when mass block 112 ' with fixed frequency along X-axis carry out simple harmonic motion and MEMS along
After X/Y plane have rotated a special angle (that is, have angular velocity vector Ω input in Z-direction), mass block 112 ' can be because be subject to
The effect of coriolis force and along Y direction carry out a Y-axis simple harmonic motion；At this time, can be by being electrically connected to detection electricity
Second sensing circuit 13 ' of pole 1141 ' reads one second sensing signal caused by the Y-axis simple harmonic motion；Also, via at this
After reason circuit 16 ' handles second sensing signal, the special angle can be calculated.
What deserves to be explained is the first sensing circuit 14 ' shown in Fig. 1, control process circuit 15 ' are formed with drive circuit 12 '
One open loop drive circuit module (circuitry).In order to keep the precision of gyroscope mechanical structure 11 ', more simply,
Be in order to determine that whether correct the resonant frequency (or Oscillation Amplitude amplitude) of the simple harmonic motion of mass block 112 ' is poor,
It can be made by being electrically connected to the first sensing circuit 14 ' reading X-axis simple harmonic motion of the driving condition sensing electrode 1132 '
Into one first sensing signal；Also, after handling first sensing signal via control process circuit 15 ', it can be determined that whether
The mode by adjustment drive signal is needed the resonant frequency that is lifted or reduce mass block 112 '.However, it is subject to temperature, pressure
Power, mechanism aging etc. influence, and minor variations may occur for the resonant frequency of gyroscope mechanical structure 11 ', and this is small
Resonant frequency variable quantity can cause the defeated of gyroscope mechanical structure 11 ' because of the high quality factor of gyroscope mechanical structure 11 '
Go out a large amount of offsets of signal.
Therefore, in view of the open loop drive circuit commonly used can be subject to the factors such as temperature, pressure, mechanism aging influence and nothing
The resonant frequency of the frequency of decree drive signal and gyroscope mechanical structure 11 ' reaches consistent, and the present invention provides one kind and is applied to
The electronic circuit of MEMS.
The content of the invention
The technical problems to be solved by the invention are to provide a kind of electronic circuit applied to MEMS, with different from
Drive circuit inside the MEMS of the prior art is mostly by a sensing circuit, a control process circuit and a driving electricity
The open loop drive circuit module (open-loop driving circuitry) that road is formed.
To achieve these goals, the present invention provides a kind of electronic circuit applied to MEMS, by a signal
Sensing unit, a high-pass filter, one analogy-digital converter, an amplitude controlling and processing unit, a multiplier, a low pass
Closed-loop driving circuit module (the closed-loop that wave filter, a Phase Processing unit and a voltage controlled oscillator are formed
driving circuitry).Especially, the electronic circuit is except can be according to the driving condition detected from stabilizer unit
Sensing signal and (adaptive) is produced beyond a modulated drive signal (modulated driving signal) self adaptively,
The phase difference between the driving condition sensing signal and the modulated drive signal of body output can also be eliminated self adaptively at the same time；Such as
This, the modulated drive signal exported just can drive the mass block inside stabilizer unit it is expected and correct vibration frequency
(or Oscillation Amplitude) carries out simple harmonic motion.
In order to reach the main purpose of the invention described above, the present invention provides a kind of electronic circuit, applied to a micro electronmechanical system
In, and the stabilizer unit being electrically connected in the micro electronmechanical system；Wherein, which is the stabilizer unit
One drive circuit, and including：
One signal sensing unit, is coupled to a driving condition detecting electrode of the stabilizer unit, to receive the gyro
One output signal of instrument element, and export a driving condition sensing signal (drive state signal)；
One high-pass filter, is coupled to the signal sensing unit, to perform high pass filter to the driving condition sensing signal
Ripple processing；
One analogy-digital converter, is coupled to the high-pass filter to finish receiving the drive of the high-pass filtering processing
Dynamic state sensing signal, and export a numerical digit driving condition signal；
One amplitude controlling and processing unit, are coupled to the analogy-digital converter to receive the numerical digit driving condition signal,
And a modulated drive signal (modulated driving signal) is exported to a driving electrodes of the stabilizer unit；
One multiplier, while the high-pass filter and the amplitude controlling and processing unit are coupled, to finish receiving the height
The driving condition sensing signal and modulated drive signal of pass filter processing, and by the driving condition sensing signal and the modulation
Drive signal carries out multiplying, to demodulate one first signal；
One low-pass filter, is coupled to the multiplier, to perform a low-pass filtering treatment to first signal；
One Phase Processing unit, is coupled to the low-pass filter, with to completed the low-pass filtering treatment this first
Signal carries out a Phase Processing, and exports a frequency of oscillation adjustment signal；And
One voltage controlled oscillator, is coupled to the Phase Processing unit, and one according to possessed by the frequency of oscillation adjustment signal
Specific frequency and produce a secondary signal；
Wherein, the secondary signal as a referenced drive signal and input at the same time the amplitude controlling and processing unit, such
Than-digital converter and the reading circuit in the MEMS so that the analogy-digital converter is according to the referenced drive
Signal and complete the driving condition sensing signal of high-pass filtering processing and then export the numerical digit driving condition signal；Into
One step, the amplitude controlling is with processing unit according to the numerical digit driving condition signal and the referenced drive signal and then output
Modulated drive signal (modulated driving signal) is to the driving electrodes of the stabilizer unit.
The technical effects of the invention are that：
It is mostly open loop drive circuit module different from the drive circuit inside the MEMS of the prior art, this hair
It is bright with a signal sensing unit, a high-pass filter, one analogy-digital converter, an amplitude controlling and processing unit, a multiplication
Device, a low-pass filter, a Phase Processing unit and voltage controlled oscillator composition, can apply as gyroscope driving electricity
One electronic circuit on road；Especially, the electronic circuit according to the driving condition detected from stabilizer unit except can sense
Signal and (adaptive) is produced beyond a modulated drive signal (modulated driving signal) self adaptively, it is also same
When can eliminate self adaptively the driving condition sensing signal and body output modulated drive signal between phase difference；In this way,
The modulated drive signal exported just can drive the mass block inside stabilizer unit with it is expected and correctly vibration frequency into
Row simple harmonic motion.
Below in conjunction with the drawings and specific embodiments, the present invention will be described in detail, but not as a limitation of the invention.
Brief description of the drawings
Fig. 1 is a kind of Organization Chart of MEMS of the display prior art；
Fig. 2A, 2B make cardon for display MEMS；
Fig. 3 is a kind of circuit framework figure of electronic circuit applied to MEMS of the display present invention.
Wherein, reference numeral
The present invention
2 stabilizer units
3 reading circuits
1 electronic circuit
The first signals of 20a detect electrode
20b secondary signals detect electrode
22 driving condition detecting electrodes
23 driving electrodes
11 signal sensing units
12 high-pass filters
13 analogies-digital converter
14 amplitude controllings and processing unit
15 multipliers
16 low-pass filters
17 Phase Processing units
18 voltage controlled oscillators
141 first subtracters
142 first proportional plus integral plus derivative controllers
143 delta-sigma modulators
171 second subtracters
172 second proportional plus integral plus derivative controllers
The prior art
11 ' gyroscope mechanical structures
12 ' drive circuits
14 ' first sensing circuits
13 ' second sensing circuits
15 ' control process circuits
16 ' process circuits
111 ' frames
1132 ' driving condition sensing electrodes
1131 ' driving electrodes
1141 ' detection electrodes
112 ' mass blocks
113 ' driving combs
114 ' detection combs
Embodiment
The structural principle and operation principle of the present invention are described in detail below in conjunction with the accompanying drawings：
A kind of referring to Fig. 3, circuit framework figure of electronic circuit applied to MEMS for the display present invention.It is many
Well known, MEMS generally includes：One stabilizer unit 2, one drive circuit and a reading circuit 3, wherein the present invention
Electronic circuit 1 i.e. application is the drive circuit in MEMS.As shown in figure 3, the stabilizer unit 2 has one first letter
Number detection electrode 20a, secondary signal detection electrode 20b, a driving condition detecting electrode 22 and a driving electrodes 23.
The electronic circuit 1 (that is, drive circuit) of the present invention is electrically connected to the driving electrodes 23 to input a drive signal
To the stabilizer unit 2 so that the mass block inside stabilizer unit 2 can carry out a simple harmonic motion along X-axis.Meanwhile drive
Dynamic circuit is coupled to the driving condition detecting electrode 22 again, to obtain the one first of the stabilizer unit 2 output signal, to check
Whether the vibration frequency that mass block carries out simple harmonic motion is correct poor.
Also, when mass block is rotated with fixed frequency along X-axis progress simple harmonic motion and MEMS along X/Y plane
After one special angle (that is, having angular velocity vector Ω input in Z-direction), mass block can because being subject to the effect of coriolis force and
Simple harmonic motion is done along Y-axis；At this time, the primary processor of MEMS can be by being electrically connected to first signal detection electricity
Pole 20a and the reading circuit 3 of secondary signal detection electrode 20b export signal to read out the one second of stabilizer unit 2；And
And the reading circuit 3 can export a sensing signal (voltage signal) according to the second output signal, afterwards, via the main place
After reason device handles the sensing signal, the special angle and the angular velocity vector Ω can be calculated.
After simply introducing the multiple electrodes of the stabilizer unit 2 and the function of the reading circuit 3, then, hereafter just open
The composition circuit unit and its feature of the electronic circuit 1 of the present invention is discussed in detail in beginning.As shown in figure 3, the electronics electricity of the present invention
Road 1 (that is, drive circuit) includes：One signal sensing unit 11, a high-pass filter 12, one analogy-digital converter 13, one shake
Width controls and processing unit 14, a multiplier 15, a low-pass filter 16, a Phase Processing unit 17 and a voltage controlled oscillation
Device 18.Before the configuration state for introducing the circuit unit inside the electronic circuit 1 and its corresponding function, it is necessary to illustrate in advance
It is that the signal that electronic circuit 1 inputs the driving electrodes 23 of stabilizer unit 2 first is known as " drive signal (driving
Signal) ", drive circuit is known as driving by the signal received by signal sensing unit 11 again after completing the input of drive signal
Dynamic state sensing signal (drive state signal), and the amplitude controlling inside drive circuit and processing unit 14 are according to institute
The signal stated driving condition sensing signal and input driving electrodes 23 again is known as " modulated drive signal (modulated
driving signal)”.Above the explanation for signal nominal definition help to be understood quickly the technical characteristic of the present invention with
Spirit.
In the present invention, the signal sensing unit 11 is a charge amplifier and is electrically connected to the stabilizer unit 2
Driving condition detecting electrode 22, to receive the output signal of the stabilizer unit 2, and exports a driving condition sensing signal
(that is, voltage signal).Also, the high-pass filter 12 is coupled to the signal sensing unit 11 to be believed with being sensed to the driving condition
Number (drive state signal) performs high-pass filtering processing.Furthermore analogy-the digital converter 13 is coupled to the high pass
Wave filter 12 exports numerical digit driving condition letter to finish receiving the driving condition sensing signal of the high-pass filtering processing
Number (digital drive state signal).On the other hand, which is coupled to the analogy-number with processing unit 14
Bit pad 13 exports a modulated drive signal (modulated driving to receive the numerical digit driving condition signal
Signal) to a driving electrodes 23 of the stabilizer unit 2.
Especially, in the electronic circuit 1 of the present invention, a multiplier 15 is coupled to the high-pass filter 12 with being somebody's turn to do at the same time
Amplitude controlling and processing unit 14；So set, when the driving condition sensing signal for finishing receiving the high-pass filtering processing
And after the modulated drive signal, the multiplier 15 will then by the driving condition sensing signal and the modulated drive signal into
Row multiplying, to demodulate one first signal.The purpose of this multiplying (demodulation) is that solving charge amplifier is examined
The driving condition sensing signal (drive state signal) gone out drives with amplitude controlling and the modulation that processing unit 14 is exported
Phase difference between dynamic signal (modulated driving signal).
Assuming that driving condition sensing signal (drive state signal) and modulated drive signal (modulated
Driving signal) between phase difference beSo the first signal can be for example, one first cosine signalAfterwards, which can be transfused to the low-pass filter 16, Jin Ertong being mutually coupled with multiplier 15
Cross the low-pass filter 16 and a low-pass filtering treatment is performed to the first signal.Further, the low-pass filtering treatment is completed
First signal is transfused to the Phase Processing unit 17 via low-pass filter 16, with by the Phase Processing unit 17 to this first
Signal carries out a Phase Processing, and then exports a frequency of oscillation adjustment signal.Furthermore it is coupled to the Phase Processing unit 17
Voltage controlled oscillator 18 just can according to possessed by the frequency of oscillation adjustment signal specific frequency and produce a secondary signal, and
The secondary signal can be, for example, one second cosine signal Cos (ω t).
What deserves to be explained is the present invention is used as a referenced drive signal (reference driving using the secondary signal
signal)；Also, as shown in figure 3, the referenced drive signal is transfused to amplitude controlling and processing unit 14, analogy-numerical digit at the same time
Converter 13 and the reading circuit 3 in the MEMS so that the analogy-digital converter 13 is according to the referenced drive signal
And complete the driving condition sensing signal (drive state signal) of the high-pass filtering processing and then export a number
Position driving condition signal (digital drive state signal)；Further, the amplitude controlling and processing unit 14
According to the numerical digit driving condition signal and the referenced drive signal and then export the modulated drive signal (modulated
Driving signal) to the driving electrodes 23 of the stabilizer unit 2, in addition specifically, the analogy-digital converter 13
With the referenced drive signal as sampled reference signal, sample frequency can be greatly reduced, reach the requirement of low-power consumption.
In order to export suitable modulated drive signal (modulated driving signal), the present invention is especially with one the
One subtracter 141, one first proportional plus integral plus derivative controller 142 and a delta-sigma modulator (Sigma-delta
Modulation) the 143 composition amplitude controllings and processing unit 14.As shown in figure 3, first subtracter 141 is coupled to this
Voltage controlled oscillator 18, a subtraction is carried out to share voltage to the secondary signal and a voltage controlled oscillator.Also, this first
Proportional plus integral plus derivative controller 142 is coupled to the analogy-digital converter 13 to receive the numerical digit driving condition signal, and according to
The numerical digit driving condition signal and an amplitude parameter and export a signal modulation control signal (signal modulation
controlling signal).In this, it is necessary to which supplementary notes, the amplitude parameter are user's defined parameters
(amplitude set point), and the first proportional plus integral plus derivative controller 142 is an amplitude PID controller.In addition, this three
Angular integral modulator 143 couples first subtracter 141 and first proportional plus integral plus derivative controller 142, to finish receiving
Secondary signal and the signal modulation control signal of subtraction are stated, and then should according to the signal modulation control signal
Secondary signal is modulated into the modulated drive signal (modulated driving signal).
It must be supplemented with explanation, the secondary signal of input amplitude control and processing unit 14 (that is, referenced drive is believed
Number) must not have phase difference between the modulated drive signal (modulated driving signal)；It is so designed that, is subject to
The stabilizer unit 2 that the modulated drive signal is driven, its internal mass block just can be with desired vibration frequency (or vibration width
Spend amplitude) carry out simple harmonic motion.Therefore, in order to ensure referenced drive signal and the modulated drive signal (modulated
Driving signal) between do not have a phase difference, the present invention and especially micro- with one second subtracter 171 and one second proportional integration
Sub-controller 172 forms the Phase Processing unit 17.
As shown in figure 3, second subtracter 171 is coupled to the low-pass filter 16, to having completed the low pass filtered
First signal (that is, the first cosine signal of ripple processing) and a specific phase place value one phase subtraction of progress
Computing, and export one the 3rd signal.As known to being familiar with the driving of gyroscope and the engineer of Design of Read Circuit, general
In the case of, 90 ° of phase difference is had between drive signal and the driving condition sensing signal detected.Based on this reason.
The specific phase place value obtains ((phase set point-90 °)) by after a phase parameter is subtracted 90 °, and the phase
Parameter is user's defined parameters, that is, the phase of drive signal.However, when with the second subtracter 171 the first signal of completion
After phase subtraction between both specific phase place values, the first signal is also possible that with remaining phase difference；
Therefore the present invention but especially using the second proportional plus integral plus derivative controller 172 (that is, phase PID control device) eliminate first letter
Number it may carry remaining phase difference.Therefore, as shown in figure 3, being coupled to the second proportional integral differential of second subtracter 171
Controller 172 just then exports a frequency of oscillation adjustment signal to the voltage controlled oscillator 18 after the 3rd signal is received.Most
Eventually, voltage controlled oscillator 18 just according to possessed by the frequency of oscillation adjustment signal specific frequency (that is, ω t) and produce second
Signal (that is, referenced drive signal).
For the MEMS with single axis gyroscope element 2, electronic circuit 1 of the invention is usually detecting
Whether the driving condition of X-axis meets expection.Well imagine, in the MEMS with multiaxis gyroscope element 2, the present invention
Electronic circuit 1 be to detect Z axis, Y-axis, X-axis driving condition whether meet expection, this can't influence or change this hair
The tandem circuit unit of bright electronic circuit 1 is formed.Briefly, when the applications of electronic circuitry of the present invention is with multiaxis gyro
When in the MEMS of instrument element 2, it is only necessary to accordingly increase basic electricity according to the quantity of the angular speed rotation axis of gyroscope
The quantity of road unit, this can't be too difficult thing for the engineer for being familiar with design of electronic circuits.
In this way, it is above-mentioned completely and clearly demonstrate the present invention a kind of electronic circuit applied to MEMS, pass through
By above-mentioned, it is following that we can learn that the present invention has the advantages that：
(1) it is mostly by a sensing circuit (14 '), one different from the drive circuit inside the MEMS of the prior art
Open loop drive circuit module (the open-loop driving that control process circuit 15 ' is formed with one drive circuit 12 '
Circuitry) (as shown in Figure 1), the present invention are changed with a signal sensing unit 11, a high-pass filter 12, one analogy-numerical digit
Device 13, an amplitude controlling and processing unit 14, a multiplier 15, a low-pass filter 16, a Phase Processing unit 17, Yi Jiyi
The composition of voltage controlled oscillator 18 can apply the electronic circuit as gyroscope drive circuit；Especially, the electronic circuit except
Can the one modulation drive of (adaptive) generation self adaptively according to the driving condition sensing signal detected from stabilizer unit 2
Beyond dynamic signal (modulated driving signal), can also eliminate self adaptively at the same time the driving condition sensing signal with
Phase difference between the modulated drive signal of body output；In this way, the modulated drive signal exported just can drive gyroscope
Mass block inside element 2 is it is expected and correctly vibration frequency carries out simple harmonic motion.
Certainly, the present invention can also have other various embodiments, ripe in the case of without departing substantially from spirit of the invention and its essence
Know those skilled in the art and make various corresponding changes and deformation in accordance with the present invention, but these change and become accordingly
Shape should all belong to the protection domain of appended claims of the invention.
Claims (8)
1. a kind of electronic circuit, applied in a MEMS, and the gyroscope being electrically connected in the MEMS
Element；It is characterized in that, the applications of electronic circuitry is the one drive circuit of the stabilizer unit, and including：
One signal sensing unit, is coupled to a driving condition detecting electrode of the stabilizer unit, to receive gyroscope member
One output signal of part, and export a driving condition sensing signal；
One high-pass filter, is coupled to the signal sensing unit, to be performed to the driving condition sensing signal at a high-pass filtering
Reason；
One analogy-digital converter, is coupled to the high-pass filter to finish receiving the driving shape of the high-pass filtering processing
State sensing signal, and export a numerical digit driving condition signal；
One amplitude controlling and processing unit, are coupled to the analogy-digital converter to receive the numerical digit driving condition signal, and defeated
Go out a modulated drive signal to a driving electrodes of the stabilizer unit；
One multiplier, while the high-pass filter and the amplitude controlling and processing unit are coupled, filtered with finishing receiving the high pass
Driving condition sensing signal and the modulated drive signal of ripple processing, and the driving condition sensing signal and the modulation are driven
Signal carries out multiplying, to demodulate one first signal；
One low-pass filter, is coupled to the multiplier, to perform a low-pass filtering treatment to first signal；
One Phase Processing unit, is coupled to the low-pass filter, with first signal to having completed the low-pass filtering treatment
A Phase Processing is carried out, and exports a frequency of oscillation adjustment signal；And
One voltage controlled oscillator, is coupled to the Phase Processing unit, and one specific according to possessed by the frequency of oscillation adjustment signal
Frequency and produce a secondary signal；
Wherein, which as a referenced drive signal and inputs the amplitude controlling and processing unit, the analogy-number at the same time
Bit pad and the reading circuit in the MEMS so that the analogy-digital converter is according to the referenced drive signal
And complete the driving condition sensing signal of the high-pass filtering processing and then export the numerical digit driving condition signal；Further
Ground, the amplitude controlling according to the numerical digit driving condition signal and the referenced drive signal and then export the modulation with processing unit
Drive signal to the stabilizer unit the driving electrodes.
2. electronic circuit as claimed in claim 1, it is characterised in that the signal sensing unit is a charge amplifier.
3. electronic circuit as claimed in claim 1, it is characterised in that do not have between the secondary signal and the modulated drive signal
Phase difference.
4. electronic circuit as claimed in claim 1, it is characterised in that the amplitude controlling includes with processing unit：
One first subtracter, is coupled to the voltage controlled oscillator, to the secondary signal and a voltage controlled oscillator are shared voltage into
One subtraction of row；
One first proportional plus integral plus derivative controller, is coupled to the analogy-digital converter to receive the numerical digit driving condition signal,
And a signal modulation control signal is exported according to the numerical digit driving condition signal and an amplitude parameter；And
One delta-sigma modulator, couples first subtracter and first proportional plus integral plus derivative controller, to finish receiving
State secondary signal and the signal modulation control signal of subtraction；Wherein, the delta-sigma modulator is according to the signal tune
Control signal processed and the secondary signal is modulated into the modulated drive signal.
5. electronic circuit as claimed in claim 2, it is characterised in that the driving condition sensing signal is the charge amplifier institute
One voltage signal of output.
6. electronic circuit as claimed in claim 4, it is characterised in that the Phase Processing unit includes：
One second subtracter, is coupled to the low-pass filter, to first signal to having completed the low-pass filtering treatment
A phase subtraction is carried out with a specific phase place value, and exports one the 3rd signal；And
One second proportional plus integral plus derivative controller, is coupled to second subtracter to receive the 3rd signal, and shakes described in output
Frequency adjustment signal is swung to the voltage controlled oscillator.
7. electronic circuit as claimed in claim 6, it is characterised in that the specific phase place value is that a phase parameter is subtracted 90 °
After obtain.
8. electronic circuit as claimed in claim 7, it is characterised in that the phase parameter is all using definition with the amplitude parameter
Parameter.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610968519.8A CN108020240A (en) | 2016-10-28 | 2016-10-28 | Electronic circuit applied to MEMS |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610968519.8A CN108020240A (en) | 2016-10-28 | 2016-10-28 | Electronic circuit applied to MEMS |
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| Publication Number | Publication Date |
|---|---|
| CN108020240A true CN108020240A (en) | 2018-05-11 |
Family
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610968519.8A Pending CN108020240A (en) | 2016-10-28 | 2016-10-28 | Electronic circuit applied to MEMS |
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| CN (1) | CN108020240A (en) |
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| CN113110726A (en) * | 2021-03-29 | 2021-07-13 | 于桢达 | Electronic equipment interconnection terminal for internet communication |
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