CN103575262B - Wave quality and strengthen piezoelectric acoustic solid fluctuation disc micro-gyroscope - Google Patents
Wave quality and strengthen piezoelectric acoustic solid fluctuation disc micro-gyroscope Download PDFInfo
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- CN103575262B CN103575262B CN201310473448.0A CN201310473448A CN103575262B CN 103575262 B CN103575262 B CN 103575262B CN 201310473448 A CN201310473448 A CN 201310473448A CN 103575262 B CN103575262 B CN 103575262B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/567—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
- G01C19/5677—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional vibrators, e.g. ring-shaped vibrators
- G01C19/5684—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional vibrators, e.g. ring-shaped vibrators the devices involving a micromechanical structure
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5698—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using acoustic waves, e.g. surface acoustic wave gyros
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Abstract
The open one of the present invention is waved quality and is strengthened piezoelectric acoustic solid fluctuation disc micro-gyroscope, and comprising: a piezo disc, one is waved mass body, four electrodes and a fixed clamping device.Wherein electrode comprises again: two detecting electrodes and two drive electrodes.The described mass body that waves is positioned at piezo disc center and uprightly fixes, described four electrodes are uniformly distributed along disc surfaces surrounding, drive electrode and detecting electrode interval are placed, and fixed clamping device even interval outside disk surrounding is fixed disk, is tightly clipped in disk periphery surrounding.Disc structure high degree of symmetry of the present invention, driven-mode and sensed-mode are just respectively on the direction of drive electrode and detecting electrode; Only use a pair detecting electrode, very favourable for the angular velocity detected along waving mass body cylindricality direction; Structure of the present invention is simple, small size, have the features such as high q-factor and do not need Vacuum Package.
Description
Technical field
What the present invention relates to is a kind of solid ripple gyro of field of micro electromechanical technology, and specifically, it is a kind of Piezoelectric Driving piezoelectric detection disc micromechanical top based on solid ripple principle.
Background technology
Gyroscope be a kind of can the inertia device of sensitive carrier angle or angular velocity, have very important effect in fields such as control and navigator fixs.Along with science and techniques of defence and aerospace development, inertial navigation system for gyrostatic requirement also to low cost, small size, high precision, multiaxis detection, high reliability, the future development of various rugged surroundings can be adapted to.Based on MEMS(MicroElectroMechanicalSystems, Micro-Opto-Electro-Mechanical Systems) gyroscope of technology adopts the processing of micro-nano batch fabrication techniques, its cost, size, power consumption are all very low, and environmental suitability, mission life, reliability, integrated level have great raising compared with conventional art, thus MEMS microthrust test has become an important directions of the extensive investigation and application exploitation of MEMS technology in the last few years.
Solid ripple is a kind of mechanical wave in solid, the deformation that in solid, certain a bit or part is stressed or the disturbance of other reasons causes, as volume deformation or shearing deformation, propagates into other parts of solid with the form fluctuated.In wave propagation process, the particle in solid, except have small vibration on the position that it is original except, does not produce permanent displacement.Because solid is flexible, elastic force has the deformation that disturbance is caused to return to the ability of deformation-free state, so form fluctuation.Elasticity is the main cause that can form fluctuation in solid.
Through finding the literature search of prior art, the article DesignandFabricationofaNovelBiaxialPiezoelectricMicro-Gy roscope that RanGuan in 2012 delivers on KeyEngineeringMaterials periodical describes the piezoelectric micromotor gyro that mass body is waved in a kind of square having.Article utilizes MEMS micro fabrication to produce this piezoelectric micromotor gyro.Square surrounding distributes eight electrodes, and be divided into four drive electrodes and four detecting electrodes, four drive electrodes are in outside, and four detecting electrodes are in inner side.By applying the voltage signal of certain frequency on drive electrode, the vibration under encouraging square piezoelectric patches to produce driven-mode.(x or the y direction of original text when there is the acceleration input of vertically waving mass body direction, wave mass body in the z-direction), wave mass body and will produce the sensed-mode vibration of degeneracy under the effect of Ke Shi effect, square piezoelectric patches is driven to produce once per revolution vibration, detecting electrode will exist the output of electric signal because of this vibration, the size of electric signal is proportional to the size of additional angular velocity.By the signal transacting of peripheral circuit, just additional angular velocity can be obtained.
This technology exists following not enough: should require high to processing is symmetric containing the microthrust test waving mass body, once there is a point tolerance, operation mode will depart from expection greatly; The vibration of driven-mode and sensed-mode is always vibrated along the direction that rigidity is maximum, and therefore the vibration antinode of these two mode is not or not square limit place, but in corner, this is extremely unfavorable for driving and detecting; In addition, this twin shaft detection mode is extremely unfavorable for decoupling zero, once the angular velocity of both direction is coupled, because the antinode of modal vibration is in square corner, detecting electrode is cannot distinguish and detect the component of all directions; Further, this gyro volume is excessive, limits it much must application under small size condition.
Summary of the invention
The object of the invention is the deficiency for above-mentioned design, provide that a kind of structure is simple, small size, shock resistance and do not need the quality of waving of Vacuum Package to strengthen piezoelectric acoustic solid fluctuation disc micro-gyroscope.
For realizing above-mentioned object, quality of waving of the present invention strengthens piezoelectric acoustic solid fluctuation disc micro-gyroscope, comprising:
A piezo disc;
One is waved mass body, and this waves mass body and is fixed on described piezo disc center;
Four electrodes being uniformly distributed in described piezo disc surrounding, described four electrodes comprise two drive electrodes and two detecting electrodes, and drive electrode and detecting electrode interval are placed;
A fixed clamping device, this device even interval outside described piezo disc surrounding is fixed disk.
In the present invention, described disc material is piezoelectrics, waving mass body material is metal, utilizes the inverse piezoelectric effect of piezo disc on driving direction to drive, and utilize detection side upwards to wave piezo disc deformation that mass body causes and the direct piezo electric effect produced detect.
In the present invention, four described electrodes are metal material is all evenly be produced in piezo disc surrounding by the mode of plating.
In the present invention, fixed clamping device device materials is organic glass, and the fritter of fixed clamping device is placed with four electrode uniform intervals.
In the present invention, two drive electrode materials in four described electrodes are metal, and subtend is distributed on piezo disc, driving gyro, making piezo disc on drive electrode position, produce the vibration of driven-mode on Verticle disk direction for applying alternating voltage.
In the present invention, two detecting electrode materials in four described electrodes are metal, and subtend is distributed on piezo disc, for detecting the signal that gyro exports under sensed-mode.
Two drive electrodes in the present invention on piezo disc are when being applied in anti-phase alternating voltage and frequency is modality-specific frequency, by inverse piezoelectric effect, piezo disc is made to produce vibration, excitation bulk acoustic wave produces, form resonance mode outside piezo disc two antinode face, and wave mass body and vibrate thereupon, and enhance this effect.When there is edge and waving the turning rate input in mass body cylindricality direction, by Ke Shi effect, wave mass body and upwards occur oscillating component detection side, drive piezo disc on this angle detecting electrode position, produce the vibration of sensed-mode outside face, by direct piezo electric effect, by producing the electric signal being proportional to additional angular velocity size on detecting electrode, utilize the signal that detecting electrode detects can obtain the detection of additional angular velocity.
Compared with prior art, the present invention has following beneficial effect: disc structure high degree of symmetry, and driven-mode and sensed-mode are just respectively on the direction of drive electrode and detecting electrode; Only use a pair detecting electrode, very favourable for the angular velocity detected along waving mass body cylindricality direction; Resonance frequency, at about 100kHz, can make machinery (Blang) low noise reduce; By utilizing MEMS micro fabrication, make disk realize high degree of symmetry, electrode is uniformly distributed, and improves accuracy; Driven-mode and sensed-mode frequency splitting little, reduce the impact of temperature variation for driven-mode and sensed-mode, because this reducing temperature sensitivity; Size is little, and shock resistance is good, at atmospheric pressure or close to maintaining high Q value under atmospheric pressure, this simplify gyrostatic encapsulation thus reducing manufacturing cost, and usable range is wide, is beneficial to batch production.
Accompanying drawing explanation
By reading the detailed description done non-limiting example with reference to the following drawings, other features, objects and advantages of the present invention will become more obvious, and label identical in accompanying drawing represents identical structural detail, wherein:
Fig. 1 is perspective view of the present invention;
Fig. 2 is that ANSYS of the present invention emulates modal graph, is that quality enhancing piezoelectric acoustic solid fluctuation disc micro-gyroscope driven-mode vibration shape schematic diagram is waved in this invention;
Fig. 3 is principle of work of the present invention, explanation be when input angular velocity, wave mass body because of Ke Shi effect produce detection side to oscillating component schematic diagram;
Fig. 4 is that ANSYS of the present invention emulates modal graph, is that quality enhancing piezoelectric acoustic solid fluctuation disc micro-gyroscope sensed-mode vibration shape schematic diagram is waved in this invention;
Fig. 5 waves mass body vertex movements track schematic diagram, and wherein (a) and (b) are respectively when without additional angular velocity with have when additional angular velocity and wave mass body vertex movements track;
Fig. 6 is schematic cross-section of the present invention, shows the contact relation between various piece;
In figure: 1 is piezo disc, and 2 for waving mass body, 3 is electrode, and 4 is fixed clamping device.Wherein in electrode 3,31 is drive electrode, and 32 is detecting electrode.
Embodiment
Below in conjunction with specific embodiment, the present invention is described in detail.Following examples will contribute to those skilled in the art and understand the present invention further, but not limit the present invention in any form.It should be pointed out that to those skilled in the art, without departing from the inventive concept of the premise, some distortion and improvement can also be made.These all belong to protection scope of the present invention.
As shown in Figure 1, the present embodiment comprises:
A piezo disc 1;
One is waved mass body 2, and this waves mass body 2 and is fixed on described piezo disc 1 center;
Four electrodes 3 being uniformly distributed in disk surrounding, described four electrodes 3 comprise two drive electrodes 31 and two detecting electrodes 32, and drive electrode 31 and detecting electrode 32 interval are placed;
A fixed clamping device 4, this device even interval outside described piezo disc 1 surrounding is fixed disk.
In the present embodiment, described piezo disc 1 material is piezoelectric.Piezoelectric can produce electric field under the effect of external force, and on the contrary, when this crystal can stretch or shrink under impressed voltage effect, this characteristic is called as piezoelectric effect.Piezoelectric effect is due to the charge asymmetry in some material crystals original unit, thus causes forming electric dipole, and in whole crystal, the superposition of these dipole effect produces the polarization of whole crystal, thus produces electric field at material internal.The crystal only lacking symcenter just shows piezoelectric property.Conventional piezoelectric has quartz, piezoelectric ceramics (as LiNbO3, BaTiO3), PZT(lead zirconate titanate), ZnO, PVDF(polyvinyladine floride) etc.Piezoelectric is used to obtain maximum vibration displacement in the present embodiment, choose the PZT material that piezoelectric modulus is larger, utilize the inverse piezoelectric effect of piezo disc 1 on gyro driving direction to drive, utilize detection side upwards to wave piezo disc 1 deformation that mass body 2 causes and the direct piezo electric effect produced detect.
In the present embodiment, fixed clamping device 4 even interval outside disk surrounding is fixed disk 1, is tightly clipped in disk periphery surrounding, 90 degree, interval, and device materials is organic glass.
In the present embodiment, described in wave mass body 2 material be carbon steel, four described electrodes 3 are metal material nickel is all evenly be produced in piezo disc 1 surrounding by the mode of plating, and 90 degree, interval, waves mass body 2 and be fixedly bonded in piezo disc 1 center.Four electrodes 3 are with the fritter uniform intervals 45 degree placement of fixed clamping device 4.
In the present embodiment, two drive electrodes 31 in four electrodes 3 adopt metal material nickel, and subtend is positioned on piezo disc 1,180 degree, interval, for applying alternating voltage, driving gyro, making piezo disc 1 on drive electrode 31 position, produce the vibration of driven-mode on vertical piezo disc direction.
In the present embodiment, two detecting electrodes 32 in four electrodes 3 adopt metal material nickel, and subtend is positioned on piezo disc 1,180 degree, interval; For detecting the signal that gyro exports under sensed-mode.
In the present embodiment, two drive electrodes 31 on piezo disc 1 apply anti-phase alternating voltage and frequency is modality-specific frequency time, by inverse piezoelectric effect, piezo disc 1 is made to produce vibration, excitation bulk acoustic wave produces, and forming resonance mode outside piezo disc 1 two antinode face, is be driven-mode, and wave mass body 2 and vibrate thereupon, and enhance this effect.When there is edge and waving the turning rate input in mass body 2 cylindricality direction, by Ke Shi effect, wave mass body 2 and upwards occur oscillating component detection side, drive piezo disc 1 on this angle detecting electrode 32 position, produce the vibration of sensed-mode outside face, by direct piezo electric effect, detecting electrode 32 will produce the electric signal being proportional to additional angular velocity size, utilize the signal that detecting electrode 32 detects can obtain the detection of additional angular velocity.
As shown in Figure 2, it is the ANSYS Simulation drive modal graph of this example obtained by Finite Element Method, namely wave quality and strengthen piezoelectric acoustic solid fluctuation disc micro-gyroscope driven-mode vibration shape schematic diagram, drive electrode 31 applies sine voltage signal, make piezo disc 1 on this position, produce the out-of-plane vibration of disk due to inverse piezoelectric effect, encourage bulk acoustic wave to produce, form the driven-mode of this gyro, and wave mass body 2 and vibrate thereupon, and enhance this effect.
As shown in Figure 3, the principle of work of this example, what illustrate is when input angular velocity, wave mass body 2 because of Ke Shi effect produce detection side to oscillating component schematic diagram, when there is edge and waving the turning rate input in mass body 2 cylindricality direction, by Ke Shi effect, wave mass body 2 and upwards occur oscillating component detection side.
As shown in Figure 4, that the ANSYS of this example obtained by Finite Element Method emulates sensed-mode figure, namely wave quality and strengthen piezoelectric acoustic solid fluctuation disc micro-gyroscope sensed-mode vibration shape schematic diagram, when there is edge and waving the turning rate input in mass body 2 cylindricality direction, by Ke Shi effect, wave mass body 2 and upwards occur oscillating component detection side, drive piezo disc 1 on this angle detecting electrode 32 position, produce the vibration of sensed-mode outside face, by direct piezo electric effect, detecting electrode 32 will produce the electric signal being proportional to additional angular velocity size, utilize the signal that detecting electrode 32 detects can obtain the detection of additional angular velocity.
As shown in Figure 5, wherein a) (b) be respectively this example when without additional angular velocity and have additional angular velocity, wave mass body 2 vertex movements track schematic diagram; When without additional angular velocity, AB is depicted as and waves mass body 2 only along the movement locus in drive electrode 31 direction; When there being additional angular velocity, wave mass body 2 and produce oscillating component along detecting electrode 32 direction CD, therefore in this case, waving mass body 2 vertex movements track is an oval ADBC.
As shown in Figure 6, be this example schematic cross-section, show the contact relation between various piece.Wherein four electrodes 3 are plated on piezo disc 1, and wave mass body 2 and be fixedly bonded in piezo disc 1 center, fixed clamping device 4 is tightly clipped in piezo disc 1 periphery.Four electrodes 3 are with the fritter uniform intervals 45 degree placement of fixed clamping device 4.
What the present embodiment was above-mentioned waves quality enhancing piezoelectric acoustic solid fluctuation disc micro-gyroscope, piezo disc 1 is utilized to drive, adopt MEMS fine process, with sacrifice layer i.e. spin coating thick photoresist on piezo disc face, the mask plate made is utilized to carry out photoetching, development, graphical, plated metal on photoresist mask again, forms electrode 3; After entirety being carried out to cutting and obtaining individual disk gyro, mass body 2 will be waved and be fixedly bonded in piezo disc 1 center; Finally, fix to clamp with fixed clamping device 4, and obtain GYROCHIP finished product for this gyro model machine welds peripheral circuit and carries out final encapsulation.
The above is only the preferred embodiment of the present invention, and protection scope of the present invention is not only confined to above-described embodiment, and all technical schemes belonged under thinking of the present invention all belong to protection category of the present invention.It should be pointed out that for those skilled in the art, some improvements and modifications without departing from the principles of the present invention, these improvements and modifications also all should be considered as protection scope of the present invention.
Claims (6)
1. wave quality and strengthen a piezoelectric acoustic solid fluctuation disc micro-gyroscope, it is characterized in that comprising:
A piezo disc;
One is waved mass body, and this waves mass body and is fixed on described piezo disc center, and waving mass body material is metal;
Four electrodes being uniformly distributed in described piezo disc surrounding, described four electrodes comprise two drive electrodes and two detecting electrodes, and drive electrode and detecting electrode interval are placed;
A fixed clamping device, this device even interval outside described piezo disc surrounding is fixed disk;
Two drive electrodes on described piezo disc are when being applied in anti-phase alternating voltage and frequency is modality-specific frequency, by inverse piezoelectric effect, piezo disc is made to produce vibration, excitation bulk acoustic wave produces, form resonance mode outside piezo disc two antinode face, be be driven-mode vibration, and wave mass body and vibrate thereupon, and strengthen this effect; When there is edge and waving the turning rate input in mass body cylindricality direction, by Ke Shi effect, wave mass body and upwards occur oscillating component detection side, drive piezo disc on this angle detecting electrode position, produce the vibration of sensed-mode outside face, by direct piezo electric effect, by producing the electric signal being proportional to additional angular velocity size on detecting electrode, the signal that detecting electrode detects is utilized namely to obtain the detection of additional angular velocity.
2. quality of waving according to claim 1 strengthens piezoelectric acoustic solid fluctuation disc micro-gyroscope, it is characterized in that: described microthrust test utilizes the inverse piezoelectric effect of described piezo disc on driving direction to drive, utilize detection side upwards described in wave described piezo disc deformation that mass body causes and the direct piezo electric effect produced detects.
3. quality of waving according to claim 1 strengthens piezoelectric acoustic solid fluctuation disc micro-gyroscope, it is characterized in that: described two drive electrode materials are metal, subtend is distributed on piezo disc, for applying alternating voltage, drive gyro, make piezo disc on drive electrode position, produce the vibration of driven-mode on Verticle disk direction.
4. quality of waving according to claim 1 strengthens piezoelectric acoustic solid fluctuation disc micro-gyroscope, it is characterized in that: described two detecting electrode materials are metal, and subtend is distributed on piezo disc, for detecting the signal that gyro exports under sensed-mode.
5. the quality of waving according to any one of claim 1-4 strengthens piezoelectric acoustic solid fluctuation disc micro-gyroscope, it is characterized in that: described four electrodes are metal material, all evenly be produced in described piezo disc surrounding by the mode of plating, described in wave mass body and be fixedly bonded in described piezo disc center.
6. the quality of waving according to any one of claim 1-4 strengthens piezoelectric acoustic solid fluctuation disc micro-gyroscope, it is characterized in that: described fixed clamping device is clipped in disk periphery surrounding, and the fritter of fixed clamping device is placed with four electrode uniform intervals.
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| CN104457725B (en) * | 2014-11-14 | 2017-04-05 | 六安市华海电子器材科技有限公司 | High sensitivity bulk acoustic wave silicon micro-gyroscope |
| CN106403921B (en) * | 2016-08-23 | 2020-11-06 | 上海交通大学 | Metal structure multi-ring vibrating disk micro gyroscope and preparation method thereof |
| CN108332731B (en) * | 2018-01-26 | 2020-05-19 | 珠海全志科技股份有限公司 | Micro-mechanical single-vibrator three-axis gyroscope |
| CN111854723B (en) * | 2020-06-17 | 2022-06-17 | 中国船舶重工集团公司第七0七研究所 | Method for fixedly connecting harmonic oscillator and electrode suitable for high vacuum environment |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102305627A (en) * | 2011-07-22 | 2012-01-04 | 上海交通大学 | All solid dual-axis gyroscope with discoid piezoelectric vibrator |
| CN102679967A (en) * | 2012-05-07 | 2012-09-19 | 上海交通大学 | Piezoelectric biaxial micro gyroscope with rocking mass block |
| CN102706337A (en) * | 2012-05-07 | 2012-10-03 | 上海交通大学 | Piezoelectric disc micromechanical gyroscope |
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| JP5630267B2 (en) * | 2008-12-09 | 2014-11-26 | 株式会社村田製作所 | Vibrating gyro element and manufacturing method thereof |
| JP2010145122A (en) * | 2008-12-16 | 2010-07-01 | Murata Mfg Co Ltd | Piezoelectric vibrator and vibrating gyroscope device |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102305627A (en) * | 2011-07-22 | 2012-01-04 | 上海交通大学 | All solid dual-axis gyroscope with discoid piezoelectric vibrator |
| CN102679967A (en) * | 2012-05-07 | 2012-09-19 | 上海交通大学 | Piezoelectric biaxial micro gyroscope with rocking mass block |
| CN102706337A (en) * | 2012-05-07 | 2012-10-03 | 上海交通大学 | Piezoelectric disc micromechanical gyroscope |
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