CN103575262A - Swing quality enhanced piezoelectric acoustic solid fluctuation disc micro-gyroscope - Google Patents
Swing quality enhanced piezoelectric acoustic solid fluctuation disc micro-gyroscope Download PDFInfo
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- CN103575262A CN103575262A CN201310473448.0A CN201310473448A CN103575262A CN 103575262 A CN103575262 A CN 103575262A CN 201310473448 A CN201310473448 A CN 201310473448A CN 103575262 A CN103575262 A CN 103575262A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/567—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
- G01C19/5677—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional vibrators, e.g. ring-shaped vibrators
- G01C19/5684—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional vibrators, e.g. ring-shaped vibrators the devices involving a micromechanical structure
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5698—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using acoustic waves, e.g. surface acoustic wave gyros
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Abstract
The invention discloses a swing quality enhanced piezoelectric acoustic solid fluctuation disc micro-gyroscope which comprises a piezoelectric disc, a swing quality body, four electrodes and a fixed clamping device, wherein the electrodes comprise two detection electrodes and two drive electrodes; the swing quality body is positioned in the center of the piezoelectric disc and is vertically fixed; the four electrodes are uniformly distributed along the periphery of the surface of the disc; the drive electrodes and the detection electrodes are arranged at intervals; the fixed clamping device is used for fixing the disc at the uniform intervals of the outer side at the periphery of the disc and is tightly clamped at the periphery of the disc. The disc structure is highly symmetrical, and a driving mode and a detection mode are just in the directions of the drive electrodes and the detection electrodes respectively. Only one pair of detection electrodes is used, and detection of angular velocity along the columnar direction of the swing quality body is promoted. The swing quality enhanced piezoelectric acoustic solid fluctuation disc micro-gyroscope is simple in structure and small in size, has the characteristics of high Q value and the like, and vacuum encapsulation is not needed.
Description
Technical field
What the present invention relates to is a kind of solid ripple gyro of field of micro electromechanical technology, and specifically, it is a kind of Piezoelectric Driving piezoelectric detection disc micromechanical top based on solid ripple principle.
Background technology
Gyroscope be a kind of can sensitive carrier angle or the inertia device of angular velocity, controlling and there is very important effect in the field such as navigator fix.Along with science and techniques of defence and aerospace development, inertial navigation system for gyrostatic requirement also to low cost, small size, high precision, multiaxis detection, high reliability, can adapt to the future development of various rugged surroundings.Based on MEMS(Micro Electro Mechanical Systems, Micro-Opto-Electro-Mechanical Systems) gyroscope of technology adopts micro-nano fabrication technique in batches, its cost, size, power consumption are all very low, and environmental suitability, mission life, reliability, integrated level compared great raising with conventional art, thereby the micro-gyro of MEMS has become an important directions of MEMS technology broad research and application and development in the last few years.
Solid ripple is a kind of mechanical wave in solid, and the deformation certain a bit or part is stressed or the disturbance of other reasons causes in solid, as volume deformation or shearing deformation, propagates into other parts of solid with the form fluctuating.In wave propagation process, the particle in solid, except having small vibration on its original position, does not produce permanent displacement.Because solid is flexible, elastic force has the deformation that the disturbance of making causes to return to the ability of deformation-free state, so form fluctuation.Elasticity is the main cause that can form fluctuation in solid.
Through the literature search of prior art is found, the article Design and Fabrication of a Novel Biaxial Piezoelectric Micro-Gyroscope that Ran Guan in 2012 delivers on Key Engineering Materials periodical has introduced the piezoelectric micromotor gyro that mass body is waved in a kind of square having.Article utilizes MEMS micro fabrication to produce this piezoelectric micromotor gyro.Eight electrodes of square surrounding distribution, are divided into four drive electrodes and four detecting electrodes, and four drive electrodes are in outside, and four detecting electrodes are in inner side.By apply the voltage signal of certain frequency on drive electrode, encourage square piezoelectric patches to produce the vibration under driven-mode.(x of original text or y direction when there is the acceleration input of vertically waving mass body direction, wave mass body in the z-direction), wave mass body and will produce the sensed-mode vibration of degeneracy under the effect of Ke Shi effect, drive square piezoelectric patches to produce once per revolution vibration, on detecting electrode, will because of this vibration, have the output of electric signal, the size of electric signal is proportional to the size of additional angular velocity.Signal by peripheral circuit is processed, and just can obtain additional angular velocity.
This technology exists following not enough: this contains micro-gyro of waving mass body and symmetricly requires highly to processing, once there is a point tolerance, operation mode will depart from expection greatly; The vibration of driven-mode and sensed-mode is always vibrated along the direction of rigidity maximum, so the vibration antinode of these two mode is or not place, square limit, but at four jiaos, this is extremely unfavorable for driving and detecting; In addition, this twin shaft detection mode is extremely unfavorable for decoupling zero, once the angular velocity of both direction is coupled, because the antinode of modal vibration is at square four jiaos, is the component that cannot distinguish and detect all directions on detecting electrode; Also have, this gyro volume is excessive, has limited its application under much necessary small size condition.
Summary of the invention
The object of the invention is the deficiency for above-mentioned design, a kind of simple in structure, small size, shock resistance are provided and do not need the quality of waving of Vacuum Package to strengthen the micro-gyro of piezoelectric sound wave solid fluctuation disk.
For realizing above-mentioned object, the quality of waving of the present invention strengthens the micro-gyro of piezoelectric sound wave solid fluctuation disk, comprising:
A piezoelectricity disk;
One is waved mass body, and this waves mass body and is fixed on described piezoelectricity disc centre;
Four electrodes that are uniformly distributed in described piezoelectricity disk surrounding, described four electrodes comprise two drive electrodes and two detecting electrodes, and drive electrode and the placement of detecting electrode interval;
A fixed clamping device, this device is evenly fixed disk at interval in described piezoelectricity disk surrounding outside.
In the present invention, described disc material is piezoelectrics, waving mass body material is metal, utilizes the inverse piezoelectric effect of piezoelectricity disk on driving direction to drive, and utilizes detection side upwards to wave the piezoelectricity disk deformation that mass body causes and the direct piezo electric effect producing detected.
In the present invention, four described electrodes are that metal material is all that mode by electroplating is evenly produced in piezoelectricity disk surrounding.
In the present invention, fixed clamping device device materials is organic glass, and the fritter of fixed clamping device is placed with four even intervals of electrode.
In the present invention, two drive electrode materials in four described electrodes are metal, and subtend is distributed on piezoelectricity disk, for applying alternating voltage, drive gyro, make piezoelectricity disk on drive electrode position, produce the vibration of driven-mode in Verticle disk direction.
In the present invention, two detecting electrode materials in four described electrodes are metal, and subtend is distributed on piezoelectricity disk, for detection of the signal of the output of gyro under sensed-mode.
Two drive electrodes in the present invention on piezoelectricity disk are when being applied in anti-phase alternating voltage and frequency and being modality-specific frequency, by inverse piezoelectric effect, make piezoelectricity disk produce vibration, excitation bulk acoustic wave produces, form the outer resonance mode of piezoelectricity disk two antinode faces, and wave mass body, vibrate thereupon, and strengthened this effect.When existing edge to wave the turning rate input of mass body cylindricality direction, by Ke Shi effect, wave mass body and upwards occur oscillating component detection side, drive the vibration of sensed-mode outside generation face on this direction detecting electrode position of piezoelectricity disk, by direct piezo electric effect, on detecting electrode, generation is proportional to the electric signal of additional angular velocity size, utilizes the signal detecting on detecting electrode can obtain the detection of additional angular velocity.
Compared with prior art, the present invention has following beneficial effect: disc structure height is symmetrical, and driven-mode and sensed-mode are just respectively in the direction of drive electrode and detecting electrode; Only use a pair of detecting electrode, very favourable for the angular velocity detecting along waving mass body cylindricality direction; Resonance frequency, in 100kHz left and right, can make machinery (Blang) low noise reduce; By utilizing MEMS micro fabrication, disk is realized highly symmetrical, electrode is uniformly distributed, and has improved accuracy; Driven-mode and sensed-mode frequency splitting are little, have reduced the impact of temperature variation for driven-mode and sensed-mode, have therefore reduced temperature sensitivity; Size is little, and shock resistance is good, at atmospheric pressure or approach and maintain high Q value under atmospheric pressure, thereby this simplified gyrostatic encapsulation and reduced manufacturing cost, usable range is wide, is beneficial to batch production.
Accompanying drawing explanation
By reading the detailed description of non-limiting example being done with reference to the following drawings, it is more obvious that other features, objects and advantages of the present invention will become, and in accompanying drawing, identical label represents identical structural detail, wherein:
Fig. 1 is perspective view of the present invention;
Fig. 2 is ANSYS emulation mode figure of the present invention, is that the micro-gyro driven-mode of quality enhancing piezoelectric sound wave solid fluctuation disk vibration shape schematic diagram is waved in this invention;
Fig. 3 is principle of work of the present invention, explanation be the in the situation that of input angular velocity, wave mass body because of Ke Shi effect produce detection side to oscillating component schematic diagram;
Fig. 4 is ANSYS emulation mode figure of the present invention, is that the micro-gyro sensed-mode of quality enhancing piezoelectric sound wave solid fluctuation disk vibration shape schematic diagram is waved in this invention;
Fig. 5 waves mass body summit movement locus schematic diagram, and wherein (a) and (b) are waving mass body summit movement locus respectively without additional angular velocity with have additional angular velocity in the situation that;
Fig. 6 is schematic cross-section of the present invention, has shown the contact relation between various piece;
In figure: 1 is piezoelectricity disk, 2 for waving mass body, and 3 is electrode, and 4 is fixed clamping device.Wherein, in electrode 3,31 is drive electrode, and 32 is detecting electrode.
Embodiment
Below in conjunction with specific embodiment, the present invention is described in detail.Following examples will contribute to those skilled in the art further to understand the present invention, but not limit in any form the present invention.It should be pointed out that to those skilled in the art, without departing from the inventive concept of the premise, can also make some distortion and improvement.These all belong to protection scope of the present invention.
As shown in Figure 1, the present embodiment comprises:
A piezoelectricity disk 1;
One is waved mass body 2, and this waves mass body 2 and is fixed on described piezoelectricity disk 1 center;
Four electrodes 3 that are uniformly distributed in disk surrounding, described four electrodes 3 comprise two drive electrodes 31 and two detecting electrodes 32, and drive electrode 31 is placed with detecting electrode 32 intervals;
A fixed clamping device 4, this device is evenly fixed disk at interval in described piezoelectricity disk 1 surrounding outside.
In the present embodiment, described piezoelectricity disk 1 material is piezoelectric.Piezoelectric externally can produce electric field under the effect of power, and on the contrary, when this crystal can stretch or shrink under impressed voltage effect, this specific character is called as piezoelectric effect.Piezoelectric effect is due to the charge asymmetry in some material crystals original unit, thereby causes forming electric dipole, and in whole crystal, the stack of these dipole effect produces the polarization of whole crystal, thereby produces electric field at material internal.The crystal that only lacks symcenter just shows piezoelectric property.Conventional piezoelectric has quartz, piezoelectric ceramics (as LiNbO3, BaTiO3), PZT(lead zirconate titanate), ZnO, PVDF(polyvinyladine floride) etc.In the present embodiment, use piezoelectric to obtain maximum vibration displacement, choose the PZT material that piezoelectric modulus is larger, utilize the inverse piezoelectric effect of piezoelectricity disk 1 on gyro driving direction to drive, utilize detection side upwards to wave piezoelectricity disk 1 deformation that mass body 2 causes and the direct piezo electric effect producing detected.
In the present embodiment, fixed clamping device 4 is evenly fixed disk 1 at interval in disk surrounding outside, is tightly clipped in disk periphery surrounding, interval 90 degree, and device materials is organic glass.
In the present embodiment, described in to wave mass body 2 materials be carbon steel, described four electrodes 3 for metal material nickel be all that mode by electroplating is evenly produced in piezoelectricity disk 1 surrounding, interval 90 degree, wave mass body 2 and are fixedly bonded in piezoelectricity disk 1 center.Four electrodes 3 are placed with the even interval of fritter 45 degree of fixed clamping device 4.
In the present embodiment, two drive electrodes 31 in four electrodes 3 adopt metal material nickel, and subtend is positioned on piezoelectricity disk 1, interval 180 degree, be used for applying alternating voltage, drive gyro, make piezoelectricity disk 1 on drive electrode 31 positions, produce the vibration of driven-mode in vertical piezoelectricity disk direction.
In the present embodiment, two detecting electrodes 32 in four electrodes 3 adopt metal material nickel, and subtend is positioned on piezoelectricity disk 1, interval 180 degree; Signal for detection of the output of gyro under sensed-mode.
In the present embodiment, when applying anti-phase alternating voltage and frequency on two drive electrodes 31 on piezoelectricity disk 1 and being modality-specific frequency, by inverse piezoelectric effect, make piezoelectricity disk 1 produce vibration, excitation bulk acoustic wave produces, and forms the outer resonance mode of piezoelectricity disk 1 two antinode faces, is to be driven-mode, and wave mass body 2, vibrate thereupon, and strengthened this effect.When existing edge to wave the turning rate input of mass body 2 cylindricality directions, by Ke Shi effect, wave mass body 2 and upwards occur oscillating component detection side, drive 1 vibration of sensed-mode outside generation face on these direction detecting electrode 32 positions of piezoelectricity disk, by direct piezo electric effect, on detecting electrode 32, generation is proportional to the electric signal of additional angular velocity size, utilizes the signal detecting on detecting electrode 32 can obtain the detection of additional angular velocity.
As shown in Figure 2, the ANSYS Simulation drive mode figure of this example of obtaining by Finite Element Method, wave quality and strengthen the micro-gyro driven-mode of piezoelectric sound wave solid fluctuation disk vibration shape schematic diagram, on drive electrode 31, apply sine voltage signal, make piezoelectricity disk 1 because inverse piezoelectric effect produces the out-of-plane vibration of disk on this position, excitation bulk acoustic wave produces, and forms the driven-mode of this gyro, and wave mass body 2, vibrate thereupon, and strengthened this effect.
As shown in Figure 3, the principle of work of this example, what illustrate is the in the situation that of input angular velocity, wave mass body 2 because of Ke Shi effect produce detection side to oscillating component schematic diagram, when existing edge to wave the turning rate input of mass body 2 cylindricality directions, by Ke Shi effect, wave mass body 2 and upwards occur oscillating component detection side.
As shown in Figure 4, the ANSYS emulation sensed-mode figure of this example of obtaining by Finite Element Method, wave quality and strengthen the micro-gyro sensed-mode of piezoelectric sound wave solid fluctuation disk vibration shape schematic diagram, when existing edge to wave the turning rate input of mass body 2 cylindricality directions, by Ke Shi effect, wave mass body 2 and upwards occur oscillating component detection side, drive 1 vibration of sensed-mode outside generation face on these direction detecting electrode 32 positions of piezoelectricity disk, by direct piezo electric effect, on detecting electrode 32, generation is proportional to the electric signal of additional angular velocity size, utilize the signal detecting on detecting electrode 32 can obtain the detection of additional angular velocity.
As shown in Figure 5, wherein a) (b) is respectively this example without additional angular velocity with have additional angular velocity in the situation that, waves mass body 2 summit movement locus schematic diagram; When without additional angular velocity, AB is depicted as and waves 2 movement locus along drive electrode 31 directions of mass body; When having additional angular velocity, wave the oscillating component that mass body 2 produces along detecting electrode 32 direction CD, therefore in this case, waving mass body 2 summit movement locus is an oval ADBC.
As shown in Figure 6, be this example schematic cross-section, shown the contact relation between various piece.Wherein four electrodes 3 are plated on piezoelectricity disk 1, wave mass body 2 and are fixedly bonded in piezoelectricity disk 1 center, and fixed clamping device 4 is tightly clipped in the peripheral surrounding of piezoelectricity disk 1.Four electrodes 3 are placed with the even interval of fritter 45 degree of fixed clamping device 4.
The quality of waving that the present embodiment is above-mentioned strengthens the micro-gyro of piezoelectric sound wave solid fluctuation disk, utilize piezoelectricity disk 1 to drive, adopt MEMS fine process, with the i.e. spin coating thick photoresist in piezoelectricity disc face of sacrifice layer, the mask plate that utilization is made carries out photoetching, development, graphical, plated metal on photoresist mask, forms electrode 3 again; After integral body cutting being obtained to individual disk gyro, will wave mass body 2 and fixedly be bonded in piezoelectricity disk 1 center; Finally, with fixed clamping device 4, fix to clamp, and obtain GYROCHIP finished product for this gyro model machine welds peripheral circuit and carries out final encapsulation.
The above is only the preferred embodiment of the present invention, and protection scope of the present invention is not only confined to above-described embodiment, and all technical schemes belonging under thinking of the present invention all belong to protection category of the present invention.It should be pointed out that for those skilled in the art, some improvements and modifications without departing from the principles of the present invention, these improvements and modifications also all should be considered as protection scope of the present invention.
Claims (7)
1. wave quality and strengthen the micro-gyro of piezoelectric sound wave solid fluctuation disk, it is characterized in that comprising:
A piezoelectricity disk;
One is waved mass body, and this waves mass body and is fixed on described piezoelectricity disc centre, and waving mass body material is metal;
Four electrodes that are uniformly distributed in described piezoelectricity disk surrounding, described four electrodes comprise two drive electrodes and two detecting electrodes, and drive electrode and the placement of detecting electrode interval;
A fixed clamping device, this device is evenly fixed disk at interval in described piezoelectricity disk surrounding outside.
2. the quality of waving according to claim 1 strengthens the micro-gyro of piezoelectric sound wave solid fluctuation disk, it is characterized in that: described micro-gyro utilizes the inverse piezoelectric effect of the above piezoelectricity disk of driving direction to drive, utilize detection side to wave the described piezoelectricity disk deformation that mass body causes and the direct piezo electric effect producing detected to the above.
3. the quality of waving according to claim 1 strengthens the micro-gyro of piezoelectric sound wave solid fluctuation disk, it is characterized in that: described two drive electrode materials are metal, subtend is distributed on piezoelectricity disk, be used for applying alternating voltage, drive gyro, make piezoelectricity disk on drive electrode position, produce the vibration of driven-mode in Verticle disk direction.
4. the quality of waving according to claim 1 strengthens the micro-gyro of piezoelectric sound wave solid fluctuation disk, it is characterized in that: described two detecting electrode materials are metal, and subtend is distributed on piezoelectricity disk, for detection of the signal of the output of gyro under sensed-mode.
5. according to the quality of waving described in claim 1-4 any one, strengthen the micro-gyro of piezoelectric sound wave solid fluctuation disk, it is characterized in that: described four electrodes are metal material, all that mode by electroplating is evenly produced in described piezoelectricity disk surrounding, described in wave mass body and be fixedly bonded in described piezoelectricity disc centre.
6. according to the quality of waving described in claim 1-4 any one, strengthen the micro-gyro of piezoelectric sound wave solid fluctuation disk, it is characterized in that: described fixed clamping device is clipped in disk periphery surrounding, the fritter of fixed clamping device is placed with four even intervals of electrode.
7. according to the quality of waving described in claim 1-4 any one, strengthen the micro-gyro of piezoelectric sound wave solid fluctuation disk, it is characterized in that two drive electrodes on described piezoelectricity disk are when being applied in anti-phase alternating voltage and frequency and being modality-specific frequency, by inverse piezoelectric effect, make piezoelectricity disk produce vibration, excitation bulk acoustic wave produces, and forms the outer resonance mode of piezoelectricity disk two antinode faces, is to be driven-mode vibration, and wave mass body, vibrate thereupon, and strengthen this effect; When existing edge to wave the turning rate input of mass body cylindricality direction, by Ke Shi effect, wave mass body and upwards occur oscillating component detection side, drive the vibration of sensed-mode outside generation face on this direction detecting electrode position of piezoelectricity disk, by direct piezo electric effect, on detecting electrode, generation is proportional to the electric signal of additional angular velocity size, utilizes the signal detecting on detecting electrode to obtain the detection of additional angular velocity.
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| CN104457725A (en) * | 2014-11-14 | 2015-03-25 | 司红康 | High-sensitivity bulk acoustic wave silicon microgyroscope |
| CN106403921A (en) * | 2016-08-23 | 2017-02-15 | 上海交通大学 | Metal structure multi-ring vibrating disk micro gyroscope and preparation method thereof |
| CN108332731A (en) * | 2018-01-26 | 2018-07-27 | 珠海全志科技股份有限公司 | Micromechanics simple oscialltor three-axis gyroscope |
| CN111854723A (en) * | 2020-06-17 | 2020-10-30 | 中国船舶重工集团公司第七0七研究所 | Method for fixedly connecting harmonic oscillator and electrode suitable for high vacuum environment |
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