CN103697873B - Prop drawing shape micromechanics solid fluctuation mode vectors correlation gyro - Google Patents
Prop drawing shape micromechanics solid fluctuation mode vectors correlation gyro Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
- G01C19/5733—Structural details or topology
- G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion
- G01C19/5747—Structural details or topology the devices having two sensing masses in anti-phase motion each sensing mass being connected to a driving mass, e.g. driving frames
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Abstract
The invention provides a kind of prop drawing shape micromechanics solid fluctuation mode vectors correlation gyro, containing the prominent prop drawing shape harmonic oscillator of square, four drive electrodes being distributed on prop drawing shape harmonic oscillator top square is prominent or near it, four detecting electrodes being distributed along harmonic oscillator side on prop drawing shape harmonic oscillator top square is prominent or near it along harmonic oscillator side including corner, a top, the locus of four drive electrodes is orthogonal with four detecting electrodes.The present invention utilizes the driven-mode of prop drawing shape harmonic oscillator and sensed-mode to match each other and be operated；Two drive electrodes given back in cylindricality harmonic oscillator apply alternating voltage, inverse piezoelectric effect or capacitive sensing effect produce prop drawing shape harmonic oscillator and vibrate at driven-mode；When there is input angular velocity, the vibration shape of prop drawing shape harmonic oscillator changes to sensed-mode, utilizes the sensitive signal that at detecting electrode, piezoelectricity positive-effect or capacitive sensing effect produce, and processes through peripheral circuit and obtains input angular velocity signal.
Description
Technical field
The present invention relates to the solid fluctuation mode vectors correlation gyro of field of micro electromechanical technology, in particular it relates to a kind of prop drawing shape
Micromechanics solid fluctuation mode vectors correlation gyro.
Background technology
Gyroscope be a kind of can sensitive carrier angle or the inertia device of angular velocity, gesture stability and navigator fix etc. lead
There is very important effect in territory.Along with science and techniques of defence and Aeronautics and Astronautics industrial expansion, inertial navigation system is for top
The requirement of spiral shell instrument also to low cost, small size, in high precision, many shaft detection, high reliability, adapt to various adverse circumstances
Direction develop.Gyroscope based on MEMS technology use micro-nano batch fabrication techniques processing, its cost, size,
Power consumption is the lowest, and environmental suitability, working life, reliability, integrated level have compared with conventional art and carry greatly
Height, thus MEMS microthrust test has become as that MEMS technology in the last few years is widely studied and of application and development is important
Direction.
Solid ripple is a kind of mechanical wave in solid, and the disturbance of certain point in solid or part stress or other reasons is drawn
The deformation risen, such as volume deformation or shearing deformation, travels to other parts of solid with the form of fluctuation.At wave propagation
During, the particle in solid, in addition to having small vibration on the position original at it, does not produce permanent displacement.
Because solid is flexible, elastic force has the deformation making disturbance cause to return to the ability of deformation-free state, then forms ripple
Dynamic.Elasticity is the main cause that can form fluctuation in solid.
Through finding the literature search of prior art, Mochida Y, Tamura M, Ohwada K is at Sensors and
The 170-178 page A micromachined vibrating delivered of 80 (2) phases in 2000 of Actuators A:Physical
In rate gyroscope with independent beams for the drive and detection modes article, it is noted that one
Planting the microthrust test with spring mass system as principle, this gyro is mainly by utilizing two rotational oscillation patterns to z-axis
Angular velocity detects.When being positioned at the drive electrode input signal of x-axis, device is energized, and vibrates along x-axis, in section
Under the effect of Li Aolili, device produces the vibration along y-axis.Output signal pair is produced by being positioned at the detecting electrode of y-axis
The angular velocity of z-axis detects.
This technology exists following not enough: the fragile structure of this spring mass system microthrust test resonant body, limits it a lot
Must be in the application under the conditions of shock resistance；The processing technique of gyro is more complicated, and processing cost is higher, is not suitable for high-volume
Produce；Gyro driven-mode and sensed-mode frequency splitting are relatively big, and the bandwidth causing gyro is relatively big, and quality factor are difficult to carry
High；Gyro noise is relatively big, and the signal of generation is less, is not easy to improve the precision of detection.
Summary of the invention
For defect of the prior art, it is an object of the invention to provide a kind of prop drawing shape micromechanics solid fluctuation mode
Joining gyro, this gyro has less size, bigger bandwidth, impact resistance good, at atmospheric pressure or close to atmospheric pressure
The Q-value that lower maintenance is high, simplifies the encapsulation of gyroscope thus reduces manufacturing cost.
For realizing object above, the present invention provides a kind of prop drawing shape micromechanics solid fluctuation mode vectors correlation gyro, including:
The prop drawing shape harmonic oscillator that corner, one top highlights containing square；
Four on prop drawing shape harmonic oscillator top square is prominent or near it, along the driving of prop drawing shape harmonic oscillator side distribution
Electrode；
Four on prop drawing shape harmonic oscillator top square is prominent or near it, along the detection of prop drawing shape harmonic oscillator side distribution
Electrode；
Wherein: drive electrode contacts or noncontact with prop drawing shape harmonic oscillator according to the difference of driving method, detecting electrode according to
The difference of detection method contacts or noncontact with prop drawing shape harmonic oscillator, and the locus of four drive electrodes and four detections
The locus of electrode is orthogonal.
Preferably, the plane that described prop drawing shape harmonic oscillator is i.e. relative with the top surface prominent containing four squares in bottom is executed
It is fixed, or applies on the plane vertical center line that described four sidewalls of prop drawing shape harmonic oscillator are i.e. different with end face and bottom surface
Fixing.
Preferably, the material of described prop drawing shape harmonic oscillator is PZT or polysilicon, makes when prop drawing shape harmonic oscillator is PZT
Be driven by piezoelectric effect and detect, when prop drawing shape harmonic oscillator is polysilicon use capacitive sensing effect be driven and
Detection.
Preferably, the material of four described drive electrodes is metal, on prop drawing shape harmonic oscillator top square is prominent or
It is distributed near it, along harmonic oscillator side, parallel to each other in 2*2 array, is used for encouraging prop drawing shape harmonic oscillator to produce and drives
Dynamic Mode Shape.
Preferably, the material of four described detecting electrodes is metal, on prop drawing shape harmonic oscillator top square is prominent or
It is distributed and the most mutual with four drive electrodes near it, along harmonic oscillator side, parallel to each other in 2*2 array
Vertically, it is perpendicular to, for detection, the prop drawing shape that the angular velocity in JizZhou direction, prop drawing shape harmonic oscillator soffit plane direction causes humorous
The capacitance variations produced due to capacitive sensing effect on change in voltage or prop drawing shape harmonic oscillator and detecting electrode on oscillator.
Preferably, when two relative drive electrodes in four described drive electrodes are applied in alternating voltage, by inverse pressure
Electrical effect or capacitive sensing effect produce prop drawing shape harmonic oscillator and vibrate at driven-mode；When there is input angular velocity, prop drawing
The vibration shape of shape harmonic oscillator changes to sensed-mode, and utilize that piezoelectricity positive-effect at detecting electrode or capacitive sensing effect produce is quick
Sense signal carries out signal detection；Above-mentioned driven-mode and sensed-mode match each other.
The present invention utilizes the special mode i.e. driven-mode of prop drawing shape harmonic oscillator with sensed-mode mode vectors correlation as with reference to shaking
Dynamic, the square in this mode next time corner, cylindricality harmonic oscillator top is prominent along back-shaped four edge direction vibrations；By four
Apply sinusoidal voltage on a pair drive electrode in individual drive electrode, inverse piezoelectric effect or capacitive sensing effect produce
Prop drawing shape harmonic oscillator is vibrated at driven-mode；When there being the turning rate input being perpendicular to prop drawing shape harmonic oscillator soffit plane,
Under the effect of coriolis force, the resonance manner of prop drawing shape harmonic oscillator can change to sensed-mode from driven-mode, sensed-mode
It is directly proportional along back-shaped four edge direction resonance amplitudes to the size of input angular velocity；By detecting four inspections of prop drawing shape harmonic oscillator
Survey the change of inductance capacitance between the voltage on electrode or four detecting electrodes and prop drawing shape harmonic oscillator, so that it may detect and be perpendicular to
The size of prop drawing shape harmonic oscillator soffit plane angular velocity.
Compared with prior art, the present invention has a following beneficial effect:
1, utilizing the motion in prop drawing shape resonator width direction as driving and sensed-mode, resonator stiffness is relatively big, tool
There is preferable impact resistance；
2, prop drawing shape structural symmetry is good, difference on the frequency is little between mode, it is possible to increases the gain of gyro, improves sensitivity,
From the point of view of this solid-state gyro more weak to output signal particularly significant；
3, the duplicate driven-mode of the vibration shape and sensed-mode are used so that variations in temperature is for driven-mode and detection
The impact of mode is the same, therefore reduces temperature sensitivity；
4, concentrate on its top boss due to the vibration of prop drawing shape harmonic oscillator, therefore fixed form and the respective vibration of projection are not
Can impact driving detection；
5, no matter using PZT or polysilicon at the bottom of prop drawing shape Harmonic oscillator basis, processing technique is fine process, profit
In batch production.
Accompanying drawing explanation
The detailed description made non-limiting example with reference to the following drawings by reading, other of the present invention is special
Levy, purpose and advantage will become more apparent upon:
Fig. 1 is one embodiment of the invention perspective view；
Fig. 2 is another embodiment of the present invention perspective view；
Fig. 3 is the driven-mode vibration shape analogous diagram of prop drawing shape harmonic oscillator of the present invention；
Fig. 4 is Fig. 3 driven-mode vibration shape rough schematic view；
Fig. 5 is the three-dimensional vibration shape schematic diagram that the vibration shape of prop drawing shape harmonic oscillator of the present invention is changed to sensed-mode by driven-mode；
Fig. 6 is the sensed-mode vibration shape analogous diagram of prop drawing shape harmonic oscillator of the present invention；
Fig. 7 is Fig. 6 sensed-mode vibration shape rough schematic view；
Fig. 8 is that the voltage's distribiuting ANSYS of the driven-mode of the present invention emulates schematic diagram；
Fig. 9 is that the voltage's distribiuting ANSYS of the sensed-mode of the present invention emulates schematic diagram；
In figure: 1 is prop drawing shape harmonic oscillator, and 2 is square projection, 3 is contact metal driving electrode, and 4 is contact
Metal detection electrode, 5 is non contact metal drive electrode, and 6 is non contact metal detecting electrode.
Detailed description of the invention
Below in conjunction with specific embodiment, the present invention is described in detail.Following example will assist in those skilled in the art
Member is further appreciated by the present invention, but limits the present invention the most in any form.It should be pointed out that, the common skill to this area
For art personnel, without departing from the inventive concept of the premise, it is also possible to make some deformation and improvement.These broadly fall into
Protection scope of the present invention.
As it is shown in figure 1, first embodiment provides a kind of prop drawing shape micromechanics solid fluctuation mode vectors correlation gyro, including:
One prop drawing shape harmonic oscillator 1；
Four square projections 2 being positioned at corner, prop drawing shape harmonic oscillator 1 top；
Four contact metal driving electrodes 3 along square projection 2 arrangement；
Four contact metal detection electrodes 4 along square projection 2 arrangement.
In the present embodiment, the material of four drive electrodes 3 is metal, and four drive electrodes 3 push up in prop drawing shape harmonic oscillator 1
Proper cube highlights on 2, along prop drawing shape harmonic oscillator 1 side, parallel to each other is distributed in 2*2 array, is used for using
Piezoelectric effect excitation prop drawing shape harmonic oscillator 1 produces the driven-mode vibration shape.
In the present embodiment, the material of four detecting electrodes 4 is metal, and four detecting electrodes 4 push up in prop drawing shape harmonic oscillator 1
Proper cube highlights on 2, is distributed along prop drawing shape harmonic oscillator 1 side, parallel to each other in 2*2 array, and each inspection
Surveying electrode 4 and be positioned at the side of each drive electrode 3, four detecting electrodes 4 and four drive electrodes 3 are on locus
Orthogonal, it is used for using piezoelectric effect detection to be perpendicular to prop drawing shape harmonic oscillator 1 soffit plane direction (z-axis) deflection speed
The size of degree.
Conventional piezoelectric has: quartz, piezoelectric ceramics (such as LiNbO3, BaTiO3), PZT(lead zirconate titanate),
ZnO, PVDF(polyvinyladine floride) etc..Mechanical performance index and sensitivity for gyro, it is desirable to piezoelectric has
High piezoelectric constant and high electromechanical coupling factor；In order to prevent the broken of piezoelectric, it is desirable to piezoelectric has high
Static and dynamic tensile strength；In order to ensure the efficiency under oscillator temperature rising condition, it is desirable to piezoelectric has low Jie
Matter fissipation factor and high mechanical quality factor.Analyzing according to above, the first embodiment high drive characteristic of employing is good, coupling
The high piezoelectric PZT of syzygy number is as pendulum.
As in figure 2 it is shown, the second embodiment provides a kind of prop drawing shape micromechanics solid fluctuation mode vectors correlation gyro, including:
One prop drawing shape harmonic oscillator 1；
Four square projections 2 being positioned at corner, prop drawing shape harmonic oscillator 1 top；
Four and non contact metal drive electrodes 5 of square projection 2 parallel arrangement close with square projection 2；
Four and non contact metal detecting electrodes 6 of square projection 2 parallel arrangement close with square projection 2.
In second embodiment, the material of described prop drawing shape harmonic oscillator 1 is polysilicon.
As in figure 2 it is shown, the material of four drive electrodes 5 is metal, four drive electrodes 5 push up in prop drawing shape harmonic oscillator 1
Proper cube highlights near 2, along prop drawing shape harmonic oscillator 1 side, parallel with square projection 2, parallel to each other in 2*2
Array is distributed, and is used for using capacitive sensing effect excitation prop drawing shape harmonic oscillator 1 to produce the driven-mode vibration shape.
As in figure 2 it is shown, the material of four detecting electrodes 6 is metal, four detecting electrodes 6 push up in prop drawing shape harmonic oscillator 1
Proper cube highlights near 2, along prop drawing shape harmonic oscillator 1 side, parallel with square projection 2, parallel to each other in 2*2
Array is distributed, and each detecting electrode 6 is positioned at the side of each drive electrode 5, and four detecting electrodes 6 drive with four
Moving electrode 5 is orthogonal on locus, is perpendicular to prop drawing shape harmonic oscillator 1 bottom surface for capacitive sensing effect detection and puts down
The size of direction, face (z-axis) directional angular velocity.
In first embodiment and the second embodiment, described prop drawing shape harmonic oscillator 1 is all in bottom surface, i.e. prominent with containing four squares
The relative plane of top surface going out 2 applies fixing；Or four sidewalls, hanging down of i.e. different with end face and bottom surface plane
Apply fixing on straight centrage.
Piezoelectric can produce electric field under the effect of external force, on the contrary, when this crystal can stretch under applied voltage effect
Or shrink, this characteristic is referred to as piezoelectric effect.Piezoelectric effect is due to the electric charge in some material crystals original unit not
Symmetry, thus result in electric dipole, in whole crystal, the superposition of these dipole effect produces whole crystal
Polarization, thus material internal produce electric field.The crystal only lacking symmetrical centre just shows piezoelectric property.And lead to
Electric energy conversion is become fluctuation to form the mode of resonance by the inverse piezoelectric effect crossing piezoelectric membrane, referred to as solid fluctuation resonance skill
Art.
Varied clearance driving force refers to electrostatic drive power and is being perpendicular to the force component that electrode plane direction produces.If we make
Being perpendicular to electrode plane direction is standard, then electrode plane is applied on the active force that this side up and two electrode plane
Voltage squared be directly proportional, such that it is able to utilize this effect that pendulum is driven.
Tested mechanical quantity, it is referred to as capacitive sensing effect as displacement, pressure etc. are converted to the effect of electric capacitance change.Its
The most frequently used form is made up of two parallel poles, the interpolar capacitor with air as medium.If ignoring edge effect,
The electric capacity of plate condenser is ε A/ δ, and in formula, ε is the dielectric constant of contrasted between solid dielectric, A be two electrodes cover mutually effective
Area, δ is the distance between two electrodes.In tri-parameters of δ, A, ε, the change of any one all will cause electric capacitance change,
And can be used for measuring.Therefore capacitance type sensor can be divided into pole span change type, area change type, media variations type three class,
Wherein: pole span change type is generally used to the pole span change measured small displacement of the lines or cause due to power, pressure, vibration etc.
(see capacitance pressure transducer)；Area change type is generally used for measuring the displacement of the lines of angular displacement or bigger；Media variations type
It is usually used in level gauging and the temperature of various medium, density, the mensuration of humidity.First embodiment and the second embodiment use
Be exactly the capacitive sensing of pole span change type.
The method by finite element analysis that is illustrated in figure 3 obtains the driven-mode vibration shape analogous diagram of prop drawing shape harmonic oscillator 1；
It is illustrated in figure 4 the rough schematic view of the driven-mode vibration shape of Fig. 3: by off-diagonal in four drive electrodes 3
Anticipate and apply identical sine voltage signal on two relative drive electrodes 3, or by non-right in four drive electrodes 5
Apply identical sine voltage signal on the drive electrode 5 that any two at angle is relative so that prop drawing shape harmonic oscillator 1 due to
Inverse piezoelectric effect produces driven-mode vibration, and now four square protrusions 2 of prop drawing shape harmonic oscillator 1 are in back-shaped four limit sides
Upwards vibrate.
When there being the z-axis directional angular velocity input being perpendicular to prop drawing shape harmonic oscillator 1 soffit plane, gyro is on direction of vibration
Stress as shown in Figure 5.Under the effect of coriolis force, prop drawing shape harmonic oscillator 1 is vibrated by the driven-mode vibration shape to detection mould
The state vibration shape changes, and amplitude and the input angular velocity of vibration are directly proportional.
The method by finite element analysis that is illustrated in figure 6 obtains the sensed-mode vibration shape analogous diagram of prop drawing shape harmonic oscillator 1；
It is illustrated in figure 7 the rough schematic view of the sensed-mode vibration shape of Fig. 6: when being perpendicular to prop drawing shape harmonic oscillator 1 soffit plane
Z-axis directional angular velocity input time, prop drawing shape harmonic oscillator 1 produces the vibration of the sensed-mode vibration shape, by measure four inspections
Survey the piezoelectric effect voltage that electrode 4 produces, or the capacitive sensing effect electric capacity produced by measuring four detecting electrodes 6 becomes
Change, the size of directional angular velocity of prop drawing shape harmonic oscillator 1 substrate surface (z-axis) can be perpendicular in the place of detection.
As shown in Figure 3 and Figure 6, driven-mode and the sensed-mode of prop drawing shape harmonic oscillator 1 match each other, and it is meant that:
Driven-mode is similar with the vibration shape of sensed-mode, differs the most mutually certain angle；In the middle of driven-mode and sensed-mode not
Containing other mode of oscillation, frequency splitting is little.Top when the prop drawing shape harmonic oscillator 1 in first embodiment and the second embodiment
During space of planes symmetry, form mode vectors correlation；Top when the prop drawing shape harmonic oscillator 1 in first embodiment and the second embodiment
When space of planes is asymmetric, mode vectors correlation cannot be formed.
It is the voltage's distribiuting ANSYS emulation schematic diagram of the driven-mode of the present invention as shown in Figure 8；It is this as shown in Figure 9
The voltage's distribiuting ANSYS of the sensed-mode of invention emulates schematic diagram.Fig. 8,9 illustrate at driven-mode and sensed-mode
Under, the CHARGE DISTRIBUTION situation that prop drawing shape harmonic oscillator produces due to piezoelectric effect.
Piezoelectric Driving piezoelectric detection single shaft gyroscope described in first embodiment and the second embodiment, or capacitive sensing driving
Capacitive sensing detection single shaft gyroscope, utilizes PZT or polysilicon for matrix, uses MEMS fine process,
Utilize sacrifice layer process at substrate spin coating thick photoresist such as SU-8, utilize the mask plate made to carry out photoetching, show afterwards
Shadow, graphical, obtain back rectangle column monopole 1；Splash-proofing sputtering metal on patterned photoresist mask again, forms drive electrode
3, detecting electrode 4；Or drive electrode 5, detecting electrode 6 are fabricated separately；Finally, outside welding for prop drawing shape harmonic oscillator 1
Enclose circuit and carry out final encapsulation and obtain GYROCHIP finished product.
Above the specific embodiment of the present invention is described.It is to be appreciated that the invention is not limited in above-mentioned spy
Determining embodiment, those skilled in the art can make various deformation or amendment within the scope of the claims, this not shadow
Ring the flesh and blood of the present invention.
Claims (6)
1. a prop drawing shape micromechanics solid fluctuation mode vectors correlation gyro, including: drive electrode and detecting electrode, it is special
Levy and be, also include: the prop drawing shape harmonic oscillator that corner, a top highlights containing square；
Described drive electrode is four on prop drawing shape harmonic oscillator top square is prominent or near it, along prop drawing shape harmonic oscillator
The drive electrode of side distribution；
Described detecting electrode is four on prop drawing shape harmonic oscillator top square is prominent or near it, along prop drawing shape harmonic oscillator
The detecting electrode of side distribution；
Wherein: drive electrode contacts or noncontact with prop drawing shape harmonic oscillator according to the difference of driving method, detecting electrode according to
The difference of detection method contacts or noncontact with prop drawing shape harmonic oscillator, and the locus of four drive electrodes and four detections
The locus of electrode is orthogonal；
Utilizing the special mode of prop drawing shape harmonic oscillator as with reference to vibration, described special mode refers to the driving mould of mode vectors correlation
State and sensed-mode, the square in this special mode next time corner, cylindricality harmonic oscillator top is prominent along back-shaped four edge directions
Vibration；By applying sinusoidal voltage on a pair drive electrode in four drive electrodes, by inverse piezoelectric effect or electricity
Hold inductive effect and produce prop drawing shape harmonic oscillator in driven-mode vibration；When there being the angle being perpendicular to prop drawing shape harmonic oscillator soffit plane
During speed input, under the effect of coriolis force, the resonance manner of prop drawing shape harmonic oscillator can become to sensed-mode from driven-mode
Change, being directly proportional to the size of input angular velocity along back-shaped four edge direction resonance amplitudes of sensed-mode；By detection prop drawing shape
Voltage on four detecting electrodes of harmonic oscillator or the change of inductance capacitance between four detecting electrodes and prop drawing shape harmonic oscillator, just
Can detect that the size being perpendicular to prop drawing shape harmonic oscillator soffit plane angular velocity.
A kind of prop drawing shape micromechanics solid fluctuation mode vectors correlation gyro the most according to claim 1, it is characterised in that
The described prop drawing shape harmonic oscillator plane i.e. relative with the top surface prominent containing four squares in bottom applies fixing, or in institute
State and apply on the plane vertical center line that four sidewalls of prop drawing shape harmonic oscillator are i.e. different with end face and bottom surface to fix.
3. according to a kind of prop drawing shape micromechanics solid fluctuation mode vectors correlation gyro described in any one of claim 1-2, its
Being characterised by, the material of described prop drawing shape harmonic oscillator is PZT or polysilicon, uses when prop drawing shape harmonic oscillator is PZT
Piezoelectric effect is driven and detects, and uses capacitive sensing effect be driven and examine when prop drawing shape harmonic oscillator is polysilicon
Survey.
A kind of prop drawing shape micromechanics solid fluctuation mode vectors correlation gyro the most according to claim 1, it is characterised in that
The material of four described drive electrodes is metal, on prop drawing shape harmonic oscillator top square is prominent or near it, along resonance
Sub-side, the distribution in 2*2 array parallel to each other, be used for encouraging prop drawing shape harmonic oscillator to produce the driven-mode vibration shape.
A kind of prop drawing shape micromechanics solid fluctuation mode vectors correlation gyro the most according to claim 1, it is characterised in that
The material of four described detecting electrodes is metal, on prop drawing shape harmonic oscillator top square is prominent or near it, along resonance
Sub-side, parallel to each other in 2*2 array distribution and the most orthogonal with four drive electrodes, be used for detecting
The prop drawing shape harmonic oscillator that the angular velocity in the JizZhou direction, base plane direction being perpendicular to prop drawing shape harmonic oscillator causes powers on buckling
The capacitance variations changed or produce due to capacitive sensing effect on prop drawing shape harmonic oscillator and detecting electrode.
A kind of prop drawing shape micromechanics solid fluctuation mode vectors correlation gyro the most according to claim 4, it is characterised in that
When two relative drive electrodes in four described drive electrodes are applied in alternating voltage, by inverse piezoelectric effect or electric capacity sense
Answer effect to produce prop drawing shape harmonic oscillator to vibrate at driven-mode；When there is input angular velocity, the vibration shape of prop drawing shape harmonic oscillator
Change to sensed-mode, utilize the sensitive signal that at detecting electrode, piezoelectricity positive-effect or capacitive sensing effect produce to carry out signal
Detection；Above-mentioned driven-mode and sensed-mode match each other.
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| CN101398305B (en) * | 2008-10-30 | 2011-08-31 | 上海交通大学 | Piezo-electricity micro-solid mode gyroscope with concentrated mass blocks |
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