CN102980566B - Conical ring fluctuation micromechanical gyroscope and preparation method thereof - Google Patents
Conical ring fluctuation micromechanical gyroscope and preparation method thereof Download PDFInfo
- Publication number
- CN102980566B CN102980566B CN201210506574.7A CN201210506574A CN102980566B CN 102980566 B CN102980566 B CN 102980566B CN 201210506574 A CN201210506574 A CN 201210506574A CN 102980566 B CN102980566 B CN 102980566B
- Authority
- CN
- China
- Prior art keywords
- conical ring
- harmonic oscillator
- round metal
- metal conical
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Abstract
The invention discloses a conical ring fluctuation micromechanical gyroscope and a preparation method of the conical ring fluctuation micromechanical gyroscope. The conical ring fluctuation micromechanical gyroscope comprises a base, a metal conical ring harmonic oscillator, a piezoelectric film, two detection electrodes, two balance electrodes, four monitoring electrodes and eight capacitors, wherein the piezoelectric film is arranged on the inner wall of the metal conical ring harmonic oscillator and the piezoelectric film contains a driving electrode; the two detection electrodes are uniformly distributed on the periphery of a conical ring of the metal conical ring harmonic oscillator; the two balance electrodes are uniformly distributed on the periphery of the conical ring of the metal conical ring harmonic oscillator; the four monitoring electrodes are uniformly distributed on the periphery of the conical ring of the metal conical ring harmonic oscillator; and the eight capacitors are formed by the metal conical ring harmonic oscillator and eight electrodes and takes air as a dielectric medium. According to the conical ring fluctuation micromechanical gyroscope and the preparation method of the conical ring fluctuation micromechanical gyroscope, a four-wave-loop vibration mode of the conical ring is used for working to apply alternating-current voltage to the driving electrode of a piezoelectric film layer; and vibration is generated by inverse piezoelectric effects to drive the conical ring harmonic oscillator to vibrate at a driving mode. When an input angle speed exists, the vibration type of the conical ring harmonic oscillator is converted into a detection mode; and the change of a gap between the detection electrodes and the metal conical ring harmonic oscillator is utilized to process to obtain an input angle speed signal.
Description
Technical field
The present invention relates to a kind of solid ripple gyro of field of micro electromechanical technology, specifically, it is a kind of Piezoelectric Driving capacitance detecting circular cone ring micromechanical gyro based on solid ripple principle and preparation method thereof.
Background technology
Gyroscope be a kind of can the inertia device of sensitive carrier angle or angular velocity, have very important effect in the field such as gesture stability and navigator fix.Along with science and techniques of defence and Aeronautics and Astronautics industrial expansion, inertial navigation system for gyrostatic requirement also to low cost, small size, high precision, multiaxis detection, high reliability, the future development of various rugged surroundings can be adapted to.Gyroscope based on MEMS technology adopts the processing of micro-nano batch fabrication techniques, its cost, size, power consumption are all very low, and environmental suitability, mission life, reliability, integrated level have great raising compared with conventional art, thus MEMS microthrust test has become an important directions of the extensive investigation and application exploitation of MEMS technology in the last few years.
Solid ripple is a kind of mechanical wave in solid, the deformation that in solid, certain a bit or part is stressed or the disturbance of other reasons causes, as volume deformation or shearing deformation, propagates into other parts of solid with the form fluctuated.In wave propagation process, the particle in solid, except have small vibration on the position that it is original except, does not produce permanent displacement.Because solid is flexible, elastic force has the deformation that disturbance is caused to return to the ability of deformation-free state, so form fluctuation.Elasticity is the main cause that can form fluctuation in solid.
Through finding the literature search of prior art, Chinese patent " harmonic oscillator of solid fluctuation gyro and solid fluctuation gyro " (number of patent application: CN201010294912.6) utilizes high performance alloy to produce the solid fluctuation gyro with cup-shaped oscillator by mechanical precision machined method, cup-shaped oscillator chassis is bonded with piezoelectric patches as driving and detecting electrode, by applying the voltage signal of certain frequency on drive electrode, Piezoelectric Driving power is applied to cup-shaped oscillator, excitation oscillator produces the solid ripple under driven-mode, when there being cup-shaped oscillator axis direction turning rate input, oscillator transforms to the sensed-mode solid ripple of another degeneracy under corioliseffect, the angle that between the solid ripple of two degenerate modes, phase is certain, the change of input angular velocity can be detected by the change detecting detecting electrode output voltage on cup-shaped oscillator chassis.
This technology exists following not enough: this solid fluctuation gyro cup-shaped resonant body volume is excessive, limits it much must application under small size condition; The piezoelectric electrode on cup-shaped oscillator chassis is bonded on cup-shaped oscillator, and under dither, there is the possibility come off, reliability is not high; The processing technology more complicated of gyro, processing cost is higher, is not suitable for producing in enormous quantities.
Summary of the invention
The object of the invention is the deficiency for above-mentioned design, there is provided that a kind of structure is simple, small size, shock resistance, have high q-factor and high frequency solid ripple circular cone annular fluctuation micromechanical gyroscope not needing Vacuum Package and preparation method thereof, this gyro is applicable to producing in enormous quantities.
According to an aspect of the present invention, a kind of circular cone annular fluctuation micromechanical gyroscope is provided, comprises:
A substrate;
One is arranged on described suprabasil round metal conical ring harmonic oscillator;
One deck is located at the piezoelectric membrane on the inwall of described round metal conical ring harmonic oscillator, and this piezoelectric membrane contains drive electrode;
Two detecting electrodes be distributed in around described round metal conical ring harmonic oscillator circular cone ring;
Two counter electrodes be distributed in around described round metal conical ring harmonic oscillator circular cone ring; And
Four monitoring electrodes be distributed in around described round metal conical ring harmonic oscillator circular cone ring;
Wherein: two described detecting electrodes, two described counter electrodes are disposed between four described monitoring electrodes, eight electrodes and round metal conical ring harmonic oscillator form respectively eight electric capacity, electrode and harmonic oscillator are respectively as capacitor plate, and air serves as dielectric medium.
In the present invention, described round metal conical ring harmonic oscillator material is copper, uses piezoelectric effect to drive, and the gap of the electric capacity using electrode and metal harmonic oscillator to be formed changes to detect, and round metal conical ring harmonic oscillator lower end directly connects with substrate.
In the present invention, described four monitorings electrode, two detecting electrodes and two counter electrodes, each electrode is the circular cone annular of subtended angle 25 °, and the angle between adjacent electrode is 20 °.
In the present invention, described four monitoring electrode materials are metallic copper, and monitoring electrode divides equally circumference, for monitoring under whether round metal conical ring harmonic oscillator be operated in the driven-mode vibration shape.
In the present invention, described two detecting electrode materials are metal, and detecting electrode divides equally circumference, the round metal conical ring harmonic oscillator radial vibration that the angular velocity for detecting perpendicular to JizZhou direction, base plane direction causes.
In the present invention, described two counter electrode materials are metal, and counter electrode divides equally circumference, for recovering the driven-mode vibration shape of round metal conical ring harmonic oscillator, make gyroscope be operated in dynamic balance pattern.
In the present invention, described round metal conical ring harmonic oscillator and each electrode are all made on the glass substrate by the mode layering of plating, and described piezoelectric membrane uses the method for sputtering to make.
The present invention utilizes four antinode mode of oscillations of round metal conical ring harmonic oscillator as reference vibration, and under this mode, circular cone ring edge is along the radial vibration of circular cone ring.By applying sinusoidal voltage on the drive electrode of the piezoelectric membrane of round metal conical ring harmonic oscillator inwall, produce piezoelectric membrane by inverse piezoelectric effect to vibrate, thus drive round metal conical ring harmonic oscillator to vibrate at driven-mode, whether round metal conical ring harmonic oscillator is operated in four antinode vibration modes needs to use laser-Doppler vibration measurement instrument to detect.When there being the turning rate input perpendicular to substrate, under the effect of coriolis force, the resonance manner of round metal conical ring harmonic oscillator can change from driven-mode to sensed-mode, and sensed-mode resonance amplitude is directly proportional to the size of input angular velocity.By the capacitance variations that detection round metal conical ring harmonic oscillator and detecting electrode are formed, thus obtain the amplitude of round metal conical ring harmonic oscillator at sensed-mode, and then the size of input angular velocity can be obtained.
According to another aspect of the present invention, a kind of preparation method of above-mentioned gyro is provided, the method adopts MEMS fine process, utilize sacrifice layer process at substrate spin coating thick photoresist, the mask plate made is utilized to carry out photoetching, develop afterwards, graphical, then plated metal repeatedly on patterned photoresist mask, forms round metal conical ring harmonic oscillator, monitoring electrode, detecting electrode and counter electrode; Then sputtering technology is used to deposit one deck PZT piezoelectric membrane and electrode; Finally, GYROCHIP finished product is obtained for this gyro model machine welds peripheral circuit and carries out final encapsulation.
Compared with prior art, the present invention has following beneficial effect:
1, utilize the circular cone ring structure of grade range of size, resonator stiffness is comparatively large, has good impact resistance; 2, circular cone loop configuration, symmetry is good, and between mode, difference on the frequency is little, can increase the gain of gyro, improves sensitivity, facilitates subsequent conditioning circuit to design; 3, adopting the duplicate driven-mode of the vibration shape and sensed-mode, making temperature variation be the same for driven-mode with the impact of sensed-mode, because this reducing temperature sensitivity; 4, adopt MEMS processing technology, gyroscope structure is little, and usable range is wide, is beneficial to batch production.
Accompanying drawing explanation
By referring to the detailed description of the present invention carried out below in conjunction with accompanying drawing, can understand each feature and advantage of the present invention easily, label identical in accompanying drawing represents identical structural detail, wherein:
Fig. 1 is the perspective view of one embodiment of the invention;
In figure, 1 represents glass basis, and 2 is round metal conical ring harmonic oscillator, and 3 represent PZT piezoelectric membrane (band drive electrode), and 4 represent metal monitoring electrode, and 5 represent metal detection electrode, and 6 represent metal balance electrode.
Fig. 2 is that the ANSYS of one embodiment of the invention emulates bending vibation mode picture, is the driven-mode vibration shape schematic diagram of this invention circular cone ring harmonic oscillator;
Fig. 3 is the principle of work of one embodiment of the invention;
Fig. 4 is that the ANSYS of one embodiment of the invention emulates bending vibation mode picture, is the sensed-mode vibration shape schematic diagram of this invention circular cone ring harmonic oscillator;
Fig. 5 is the contact schematic diagram of one embodiment of the invention piezoelectric membrane and round metal conical ring harmonic oscillator;
In Fig. 5,2 is round metal conical ring harmonic oscillator, and 3 represent PZT piezoelectric membrane, and 7 represent drive electrode.
Embodiment
Below in conjunction with accompanying drawing, embodiments of the invention are elaborated: the present embodiment implements under technical solution of the present invention prerequisite, give detailed embodiment and concrete operating process, but protection scope of the present invention is not limited to following embodiment.
As shown in Figure 1, the present embodiment comprises:
A substrate 1;
One is arranged on described suprabasil round metal conical ring harmonic oscillator 2;
One deck is located at the piezoelectric membrane 3 on the inwall of described round metal conical ring harmonic oscillator 2;
Two detecting electrodes 5 be distributed in around described round metal conical ring harmonic oscillator 2 circular cone ring;
Two counter electrodes 6 be distributed in around described round metal conical ring harmonic oscillator 2 circular cone ring; And
Four monitoring electrodes 4 be distributed in around described round metal conical ring harmonic oscillator 2 circular cone ring;
Wherein: two described detecting electrodes, 5, two described counter electrodes 6 are disposed between four described monitoring electrodes 4, eight electrodes and round metal conical ring harmonic oscillator 2 define eight electric capacity, eight electrodes and round metal conical ring harmonic oscillator 2 are respectively as capacitor plate, and air serves as dielectric medium.
In the present embodiment, substrate 1 adopts substrate of glass.
In the present embodiment, described four monitoring electrodes divide equally round metal conical ring harmonic oscillator 2 circle distribution, whether are operated in the driven-mode vibration shape for monitoring round metal conical ring harmonic oscillator 2.
In the present embodiment, described two detecting electrodes divide equally round metal conical ring harmonic oscillator 2 circle distribution, and round metal conical ring harmonic oscillator 2 sensed-mode that the angular velocity for detecting perpendicular to JizZhou direction, base plane direction causes vibrates.
In the present embodiment, described two counter electrode material equal pitch cone ring harmonic oscillator 2 circle distribution, for recovering the driven-mode vibration shape of circular cone ring harmonic oscillator, make gyroscope be operated in dynamic balance pattern.
In the present embodiment, described round metal conical ring harmonic oscillator 2 material is metallic copper.This invention uses piezoelectric membrane to carry out exciting.Piezoelectric can produce electric field under the effect of external force, and on the contrary, when this crystal can stretch or shrink under impressed voltage effect, this characteristic is called as piezoelectric effect.Piezoelectric effect is due to the charge asymmetry in some material crystals original unit, thus causes forming electric dipole, and in whole crystal, the superposition of these dipole effect produces the polarization of whole crystal, thus produces electric field at material internal.The crystal only lacking symcenter just shows piezoelectric property.Conventional piezoelectric: quartz, piezoelectric ceramics (as LiNbO3, BaTiO3), PZT(lead zirconate titanate), ZnO, PVDF(polyvinyladine floride) etc.Use piezoelectric to obtain maximum vibration displacement in the present embodiment, choose the PZT material that piezoelectric modulus is larger, produce piezoelectric membrane by the technique of sputtering.
In the present embodiment, piezoelectric membrane 3 sputters on the inwall of round metal conical ring harmonic oscillator 2, and piezoelectric membrane 3 sticks in round metal conical ring harmonic oscillator 2, when the drive electrode on piezoelectric membrane 3 applies alternating voltage, piezoelectric membrane 3 produces vibration, thus drives round metal conical ring harmonic oscillator 2 to vibrate.Apply the alternating voltage of different frequency, the vibration mode that round metal conical ring harmonic oscillator 2 produces is different.Utilize laser-Doppler vibration analyzer, detect the circumference multiple spot of round metal conical ring harmonic oscillator 2, judge whether round metal conical ring is operated in four antinode vibration modes.
In the present embodiment, four monitoring electrode 4 materials are metal, be the circular cone annular of 25 °, divide equally round metal conical ring harmonic oscillator 2 girth (being namely positioned at circular cone ring girth quartern position) in subtended angle.Monitoring electrode, for monitoring round metal conical ring harmonic oscillator 2 whether normal starting of oscillation under the excitation of drive electrode, if the vibration under driven-mode does not meet design requirement, is adjusted by monitoring electrode.
In the present embodiment, two detecting electrode 5 materials are metal, be the circular cone annular of 25 °, divide equally round metal conical ring harmonic oscillator 2 girth (being namely positioned at circular cone ring diagonal position) in subtended angle.Each detecting electrode is used for detecting the size perpendicular to base plane direction (z-axis) directional angular velocity.
In the present embodiment, two counter electrode 6 materials are metal, be the circular cone annular of 25 °, divide equally round metal conical ring harmonic oscillator 2 girth (being namely positioned at circular cone ring diagonal position) in subtended angle.Each counter electrode is used for forcing and weakens round metal conical ring harmonic oscillator 2 sensed-mode vibration shape when there being turning rate input, and round metal conical ring harmonic oscillator 2 is just vibrated in the driven-mode vibration shape.
As shown in Figure 2, the driven-mode of circular cone ring oscillator 1 is obtained by the method for finite element analysis.By applying sine voltage signal on the drive electrode of piezoelectric membrane 3, piezoelectric membrane is made to produce radial vibration due to inverse piezoelectric effect, thus drive round metal conical ring harmonic oscillator 2 in generation vibration, frequency when reaching four antinode resonance by using laser doppler vibrometer measurement, thus know the frequency of operation of this round metal conical ring harmonic oscillator 2.
As shown in Figure 3, explanation be when input angular velocity, the three-dimensional vibration shape schematic diagram that the vibration shape of round metal conical ring harmonic oscillator 2 is changed to sensed-mode by driven-mode.When there being the z-axis directional angular velocity input perpendicular to base plane, round metal conical ring harmonic oscillator 2 is subject to coriolis force as is illustrated schematically under the vibration of radial direction.Under the effect of coriolis force, round metal conical ring harmonic oscillator 2 is vibrated and is changed to the sensed-mode vibration shape by the driven-mode vibration shape, and amplitude and the input angular velocity of vibration are directly proportional.
As shown in Figure 4, the sensed-mode of round metal conical ring harmonic oscillator 2 is obtained by the method for finite element analysis.When there being the z-axis directional angular velocity input perpendicular to base plane, round metal conical ring harmonic oscillator 2 produces the vibration of the sensed-mode vibration shape, changing and the capacitance variations caused by measuring spacing between two detecting electrodes 5 and round metal conical ring harmonic oscillator 2, the size of the directional angular velocity perpendicular to substrate 1 surface (z-axis) can be detected.
As shown in Figure 5, the contact relation of piezoelectric membrane 3 and round metal conical ring harmonic oscillator 2.There is layer of metal electrode 7 on piezoelectric membrane 3 upper strata.Piezoelectric membrane 3 lower floor and round metal conical ring harmonic oscillator 2 connect one piece, ensure that same electromotive force is 0V; When piezoelectric membrane vibrates, round metal conical ring harmonic oscillator 2 can be driven to vibrate; Metal electrode 7 and the round metal conical ring harmonic oscillator 2 on upper strata are isolated, and connect the drive electrode of alternating voltage as piezoelectric membrane 3.When round metal conical ring harmonic oscillator 2 connects 0 electromotive force, when the upper electrode 7 of piezoelectric membrane 3 connects alternating voltage, round metal conical ring harmonic oscillator 2 is vibrated.
The above-mentioned gyro of the present embodiment utilizes pzt thin film to drive, adopt MEMS fine process, utilize sacrifice layer process at substrate spin coating thick photoresist as SU-8, the mask plate made is utilized to carry out photoetching, develop afterwards, graphical, then plated metal repeatedly on patterned photoresist mask, forms round metal conical ring harmonic oscillator 2, monitoring electrode 4, detecting electrode 5 and counter electrode 6.Then sputtering technology is used to deposit one deck PZT piezoelectric membrane and electrode; Finally, GYROCHIP finished product is obtained for this gyro model machine welds peripheral circuit and carries out final encapsulation.
The present embodiment gyro is a kind of high frequency solid ripple gyro: machinery (Blang) low noise caused because resonance frequency adds 2-3 the order of magnitude (to more than 100kHz) reduces; By utilizing micro fabrication, decreasing piezoelectric bonding operation, improve accuracy.The advantage of the present embodiment gyro: 1, less size; 2, larger bandwidth; 3, impact resistance is good; 4, at atmospheric pressure or close to maintaining high Q value under atmospheric pressure, this simplify gyrostatic encapsulation thus reducing manufacturing cost.
Above specific embodiments of the invention are described.It is to be appreciated that the present invention is not limited to above-mentioned particular implementation, those skilled in the art can make various distortion or amendment within the scope of the claims, and this does not affect flesh and blood of the present invention.
Claims (8)
1. a circular cone annular fluctuation micromechanical gyroscope, is characterized in that comprising:
A substrate;
One is arranged on described suprabasil round metal conical ring harmonic oscillator;
One deck is located at the piezoelectric membrane on the inwall of described round metal conical ring harmonic oscillator, and this piezoelectric membrane contains drive electrode;
Two detecting electrodes be distributed in around described round metal conical ring harmonic oscillator circular cone ring;
Two counter electrodes be distributed in around described round metal conical ring harmonic oscillator circular cone ring; And
Four monitoring electrodes be distributed in around described round metal conical ring harmonic oscillator circular cone ring;
Wherein: two described detecting electrodes, two described counter electrodes are disposed between four described monitoring electrodes, these eight electrodes and described round metal conical ring harmonic oscillator define eight electric capacity, eight electrodes and described round metal conical ring harmonic oscillator are respectively as capacitor plate, and air serves as dielectric medium; Described round metal conical ring harmonic oscillator and each electrode are all made on the substrate by the mode layering of plating, and each electrode is multi-step shape structure from the bottom to top;
There is layer of metal electrode on described piezoelectric membrane upper strata, and described piezoelectric membrane lower floor is connected with round metal conical ring harmonic oscillator, ensures that same electromotive force is 0V; When described piezoelectric membrane vibration, described round metal conical ring harmonic oscillator is driven to vibrate; Metal electrode and the described round metal conical ring harmonic oscillator on upper strata are isolated, and connect the drive electrode of alternating voltage as described piezoelectric membrane; When described round metal conical ring harmonic oscillator connects 0 electromotive force, when the upper electrode of described piezoelectric membrane connects alternating voltage, described round metal conical ring harmonic oscillator vibration;
When the drive electrode of described piezoelectric membrane is applied in alternating voltage, vibration is produced by inverse piezoelectric effect, thus drive described round metal conical ring harmonic oscillator to vibrate, laser doppler vibrometer is utilized to detect four antinode mode of oscillations of described round metal conical ring harmonic oscillator, thus under allowing described round metal conical ring harmonic oscillator be operated in this vibration mode; When there is input angular velocity, the vibration shape of described round metal conical ring harmonic oscillator changes to sensed-mode, the gap of the electric capacity utilizing described detecting electrode and described metal harmonic oscillator to be formed changes, and detects described round metal conical ring harmonic oscillator at sensed-mode vibration sensing signal.
2. circular cone ring fluctuation micromechanical gyroscope according to claim 1, it is characterized in that described circular cone ring harmonic oscillator material is metal, utilize the inverse piezoelectric effect of described piezoelectric membrane to drive, the gap of the electric capacity utilizing eight electrodes and round metal conical ring harmonic oscillator to be formed changes to be detected.
3. circular cone ring fluctuation micromechanical gyroscope according to claim 1, is characterized in that, described piezoelectric membrane uses the method for sputtering to make.
4. circular cone ring fluctuation micromechanical gyroscope according to claim 1, it is characterized in that four described monitoring electrodes, two described detecting electrodes and two described counter electrodes, each electrode is the cirque structure of subtended angle 25 °, and the angle between adjacent electrode is 20 °.
5. the circular cone ring fluctuation micromechanical gyroscope according to any one of claim 1-4, is characterized in that described four monitoring electrode materials are metal, whether being operated in the driven-mode vibration shape for monitoring described round metal conical ring oscillator.
6. the circular cone ring fluctuation micromechanical gyroscope according to any one of claim 1-4, it is characterized in that described two detecting electrode materials are metal, the described round metal conical ring harmonic oscillator sensed-mode that the angular velocity for detecting perpendicular to JizZhou direction, described base plane direction causes vibrates.
7. the circular cone ring fluctuation micromechanical gyroscope according to any one of claim 1-4, is characterized in that described two counter electrode materials are metal, for recovering the driven-mode vibration shape of described circular cone ring harmonic oscillator, making gyroscope be operated in dynamic balance pattern.
8. the preparation method of gyro described in an any one of claim 1-7, it is characterized in that: adopt MEMS fine process, utilize sacrifice layer process at substrate spin coating thick photoresist, the mask plate made is utilized to carry out photoetching, develop afterwards, graphical, then plated metal repeatedly on patterned photoresist mask, forms round metal conical ring harmonic oscillator, monitoring electrode, detecting electrode and counter electrode; Then sputtering technology is used to deposit one deck PZT piezoelectric membrane and electrode; Finally, GYROCHIP finished product is obtained for this gyro model machine welds peripheral circuit and carries out final encapsulation.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210506574.7A CN102980566B (en) | 2012-11-30 | 2012-11-30 | Conical ring fluctuation micromechanical gyroscope and preparation method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210506574.7A CN102980566B (en) | 2012-11-30 | 2012-11-30 | Conical ring fluctuation micromechanical gyroscope and preparation method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102980566A CN102980566A (en) | 2013-03-20 |
| CN102980566B true CN102980566B (en) | 2015-05-20 |
Family
ID=47854807
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210506574.7A Expired - Fee Related CN102980566B (en) | 2012-11-30 | 2012-11-30 | Conical ring fluctuation micromechanical gyroscope and preparation method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102980566B (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103697875B (en) * | 2013-12-13 | 2016-11-16 | 上海交通大学 | Pin piezoelectric solid fluctuation mode vectors correlation gyro |
| CN104990546B (en) * | 2015-08-07 | 2018-03-30 | 中国人民解放军国防科学技术大学 | Honeycomb dish type oscillation gyro |
| CN109470231A (en) * | 2018-11-21 | 2019-03-15 | 中国船舶重工集团公司第七0七研究所 | Expand the piezoelectric electrode design structure of metal resonant gyroscope range |
| CN112629514B (en) * | 2021-02-24 | 2022-09-02 | 中北大学 | Shell vibrating gyro harmonic oscillator with multi-curved surface fused revolving body structure |
| CN113959422B (en) * | 2021-10-29 | 2023-03-14 | 重庆天箭惯性科技股份有限公司 | Solid wave gyroscope structure and preparation method thereof |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101910790A (en) * | 2008-01-29 | 2010-12-08 | 住友精密工业株式会社 | Vibrating gyroscope using piezoelectric film and method for manufacturing same |
| CN102297690A (en) * | 2011-07-22 | 2011-12-28 | 上海交通大学 | Piezoelectricity driven capacitance detecting two-axis gyroscope |
| CN102353370A (en) * | 2011-07-22 | 2012-02-15 | 上海交通大学 | Piezoelectric driven capacitance detection micro-solid modal gyroscope |
| CN102706337A (en) * | 2012-05-07 | 2012-10-03 | 上海交通大学 | Piezoelectric disc micromechanical gyroscope |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2011133682A1 (en) * | 2010-04-20 | 2011-10-27 | Guiti Zolfagharkhani | Microelectromechanical gyroscopes and related apparatus and methods |
-
2012
- 2012-11-30 CN CN201210506574.7A patent/CN102980566B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101910790A (en) * | 2008-01-29 | 2010-12-08 | 住友精密工业株式会社 | Vibrating gyroscope using piezoelectric film and method for manufacturing same |
| CN102297690A (en) * | 2011-07-22 | 2011-12-28 | 上海交通大学 | Piezoelectricity driven capacitance detecting two-axis gyroscope |
| CN102353370A (en) * | 2011-07-22 | 2012-02-15 | 上海交通大学 | Piezoelectric driven capacitance detection micro-solid modal gyroscope |
| CN102706337A (en) * | 2012-05-07 | 2012-10-03 | 上海交通大学 | Piezoelectric disc micromechanical gyroscope |
Non-Patent Citations (3)
| Title |
|---|
| A 3MHZ SPOKE GYROSCOPE WITH BANDWIDTH AND LARGE DYNAMIC RANGE;SUNG W K,DALAL M;《Proceedings of the IEEE International Coference on Micro Electro Mechanical Systems》;20101231;全文 * |
| MEMS微陀螺仪研究进展;成宇翔等;《微纳电子技术》;20110531;第48卷(第5期);全文 * |
| 基于科氏加速度的微陀螺;刘凯等;《压电与声光》;20100630;第32卷(第3期);全文 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102980566A (en) | 2013-03-20 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102980565B (en) | Circular ring fluctuation micromechanical gyroscope and preparation method thereof | |
| CN102706337B (en) | Piezoelectric disc micromechanical gyroscope | |
| CN104931030B (en) | Polycyclic gyro of a kind of fixed Piezoelectric Driving of inner and outer ring and preparation method thereof | |
| CN102297690B (en) | Piezoelectricity driven capacitance detecting two-axis gyroscope | |
| US8631700B2 (en) | Resonating sensor with mechanical constraints | |
| US10809061B2 (en) | Vibratory gyroscope including a plurality of inertial bodies | |
| CN102980566B (en) | Conical ring fluctuation micromechanical gyroscope and preparation method thereof | |
| CN104897145B (en) | Polycyclic gyro of a kind of fixed Piezoelectric Driving of outer rim and preparation method thereof | |
| CN104197917A (en) | Piezoelectric driven and detected miniature hemispherical resonant gyroscope and manufacturing method thereof | |
| CN102305627B (en) | All solid dual-axis gyroscope with discoid piezoelectric vibrator | |
| US20120210789A1 (en) | Physical quantity sensor and electronic device | |
| CN103697875B (en) | Pin piezoelectric solid fluctuation mode vectors correlation gyro | |
| CN105043369B (en) | A kind of outer rim fixed laser processing polycyclic gyro of Piezoelectric Driving and preparation method thereof | |
| CN104197909A (en) | Double-hemisphere-structured miniature resonant gyroscope and manufacturing method thereof | |
| CN104197920B (en) | The hemispherical resonator microthrust test of up/down perforation support | |
| Zotov et al. | 3-D micromachined spherical shell resonators with integrated electromagnetic and electrostatic transducers | |
| CN103575262B (en) | Wave quality and strengthen piezoelectric acoustic solid fluctuation disc micro-gyroscope | |
| CN102679967B (en) | Piezoelectric biaxial micro gyroscope with rocking mass block | |
| CN104197919B (en) | The glass metal hemispherical resonator microthrust test of up/down perforation support | |
| Zhou et al. | A novel ring vibrating gyroscope based on side piezo-electrodes | |
| Kou et al. | Design and fabrication of a novel MEMS vibrating ring gyroscope | |
| CN104197912A (en) | Both-end-fixed silicon-based miniature hemispherical resonant gyroscope and manufacturing method thereof | |
| JPH07120266A (en) | Vibrating-gyro sensor | |
| CN106441260B (en) | Silicon-on-silicon piezoelectric film multi-supporting-beam MEMS gyroscope and preparation method thereof | |
| CN103822621B (en) | Solid fluctuation gyro based on electromagnetic parameter excitation type of drive |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150520 Termination date: 20171130 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |