CN102297690B - Piezoelectricity driven capacitance detecting two-axis gyroscope - Google Patents
Piezoelectricity driven capacitance detecting two-axis gyroscope Download PDFInfo
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Abstract
The invention belongs to the technical field of micro-electro mechanic systems (MEMS), and relates to a piezoelectricity driven capacitance detecting two-axis gyroscope. According to the invention, a lower surface of a gyroscope oscillator with a shape of a round disc, a wheel spoke or a honeycomb is connected to a supporting cylinder. The other end of the supporting cylinder is fixed on a lower pole plate. The lower pole plate is fixed on a carrier. An upper pole plate signal detecting electrode is positioned on a lower end surface of the upper pole plate. A lower pole plate signal detecting electrode is positioned on an upper end surface of the lower pole plate. The upper pole plate, the lower pole plate and the gyroscope oscillator are assembled, and differential capacitance is formed for detecting output signals. According to the invention, a special modality of a round disc, a wheel spoke or a honeycomb shape is adopted in the gyroscope oscillator, the detection is driven by piezoelectricity effect, and the detection is carried out by using capacitance. Therefore, angular velocities parallel to the upper and the lower surfaces of the gyroscope oscillator can be sensitively detected. According to the invention, with an MEMS micromachining technology, two-axis detection can be realized, the machining technology is easy to realize, the reliability is high, the energy consumption is low, the impact resistance is high, and the gyroscope can operate well in severe environments.
Description
Technical field
What the present invention relates to is a kind of little gyro of micro-electromechanical system field, and specifically, what relate to is a kind of Piezoelectric Driving capacitance detecting dual spindle gyroscopes.
Background technology
Gyroscope is a kind ofly can accurately measure angle that moving object rotates or the instrument of angular velocity, is the core component of space object status control and inertial guidance.Along with science and techniques of defence and Aeronautics and Astronautics industrial expansion, inertial navigation system for gyrostatic requirement also, multiaxis little to volume detect, low in energy consumption, reliability is high, the life-span is long, can adapt to the future development of various rugged surroundings.
Find through the literature search to prior art, in January, 2006, in IEEE MEMS 2006 meetings that Turkey Istanbul holds, the people such as K.Maenaka of Japan Kobe university have delivered one piece and have been entitled as the paper of " novel little solid-state gyro ", this paper is incorporated in the 634th page to the 637th page, a kind of piezoelectric type full-solid-state minisize gyro has been proposed first, utilize square piezoelectrics mass under certain vibration frequency, to have a kind of special mode of oscillation, under this mode of oscillation, each particle is all along same axially-movable, so that the seamed edge of piezoelectrics is axially done to stretch or compression movement along certain on the piezoelectrics mass.Vibrate as reference with the vibration under this special mode, the polarised direction of supposing piezoelectrics is the Z direction, be directions X with reference to direction of vibration, when the angular velocity on external world's input Y-direction, because the effect of coriolis force, the piezoelectric quality piece can (being on the Z-direction) produce stretching or compression movement on its polarised direction.Because the piezoelectric effect of piezoelectrics, the vibration meeting of Z direction is at surface generation induced charge or the voltage of piezoelectrics perpendicular to the Z direction, the value of induced charge or voltage and extraneous input angular velocity are directly proportional, the size that the electric charge after amplifying by the detection peripheral circuit or voltage are measured extraneous input angular velocity.
Chinese patent " all solid state gyroscope with square surface cuboid piezoelectric vibrator " (number of patent application: 200810041675.5), to utilize new high order mode on the basis of the little solid-state gyro of Japan, novel structure, the twin shaft based on the square piezoelectric blocks of invention detects solid-state gyroscope, its ultimate principle is a kind of special high frequent vibration mode of utilizing the piezoelectrics mass to exist under certain vibration frequency, under this mode of oscillation, the specific position of piezoelectrics mass upper and lower surface produces respectively the motion of opposite direction in X axis and Y-axis.As with reference to vibration, when extraneous turning rate input was arranged, the position that direction of motion is opposite produced opposite coriolis force, causes the vibration of piezoelectrics Z direction with the vibration under this special mode.Because piezoelectric effect, the vibration meeting of Z direction is at surface generation induced charge or the voltage of piezoelectrics perpendicular to the Z direction, the value of induced charge or voltage and extraneous input angular velocity are directly proportional, the size that the electric charge after amplifying by the detection peripheral circuit or voltage are measured extraneous input angular velocity.
There is following deficiency in this technology: the first, because its upper and lower surface has a plurality of electrodes, its processing technology is complicated, and the double-face electrode positioning accuracy request is high, and the lead-in wire of a plurality of electrodes also can exert an influence to the gyro performance; The second, piezoelectric vibrator is square piezoelectric blocks, and its rigidity is larger, and effective vibration amplitude of generation is less; The 3rd, because piezoelectric vibrator is square piezoelectric blocks, there is right-angle side in it, can produce the stress concentration phenomenon in loading process, under the high-frequency work state, affects reliability and the life-span of gyro.
Summary of the invention
The objective of the invention is the deficiency for prior art, a kind of dual spindle gyroscopes of Piezoelectric Driving capacitance detecting is provided, that this gyroscope has is discoid, spoke-like or cellular gyrotron, adopt the discoid gyrotron with cylindrical body supports on the structure, adopt the mode of Piezoelectric Driving and capacitance detecting, utilize the special mode of vibration under discoid, spoke-like or the peculiar mode of cellular gyrotron, realize the function of gyroscope twin shaft sensitivity.The piezoelectric membrane drive electrode only is distributed in the upper surface of gyrotron, and processing technology is relatively simple, does not need double-sided alignment, and the gyro contact conductor is less.Gyrotron is discoid, spoke-like or cellular, the rigidity less, and vibration amplitude is larger, and sensitivity is higher, and has reduced the stress concentration phenomenon in the loading process, has preferably reliability and long life-span.Signal detecting mode adopts capacitance detecting, measures highly sensitively, and temperature drift is little, and the response time is short, is easy to realize that close-loop feedback controls.
The present invention is achieved by the following technical solutions, the present invention includes gyrotron, support cylinder, piezoelectric membrane drive electrode, top crown, bottom crown, top crown signal detection electrode, bottom crown signal detection electrode.The gyrotron upper surface is provided with the piezoelectric membrane drive electrode, the gyrotron lower surface links to each other with support cylinder, the support cylinder other end is fixed on the bottom crown, bottom crown is fixed on the carrier, the top crown signal detection electrode is positioned at the top crown lower surface, the bottom crown signal detection electrode is positioned at the bottom crown upper surface, and top crown, bottom crown and gyrotron assembling form differential capacitance for detection of output signal.
The material of described gyrotron is metal material, shape can be discoid, spoke-like or cellular, the structure of preferred embodiment is discoid, one end of disk is upper surface, the other end is lower surface, wherein lower surface is fixed on the bottom crown by cylindrical support, and the gyrotron upper surface is parallel with lower surface.
Described support cylinder is structural metallic materials, and support cylinder body upper end is vertical with the lower surface of disk, and support cylinder body lower end is fixed on the bottom crown.
Described piezoelectric membrane drive electrode is piezoelectric, and polarised direction is perpendicular to the upper and lower surface of discoid gyrotron, and structure is circular-arc, have four, be positioned at the upper surface of discoid gyrotron, the certain angle of being separated by, be evenly distributed in the concentric circumference of circular surface on.
Described top crown is the nonmetallic materials such as glass, and structure is discoid, and an end face that wherein is positioned at the disc structure lower end is the lower surface, and the another one end face that is positioned at the disc structure upper end is the upper surface, and the upper and lower end face is parallel.
Described bottom crown is the nonmetallic materials such as glass, and structure is discoid, and an end face that wherein is positioned at the disc structure lower end is the lower surface, and the another one end face that is positioned at the disc structure upper end is the upper surface, and the upper and lower end face is parallel.
Described top crown signal detection electrode is metal electrode, and structure is circular-arc, has four, is positioned on the lower surface of top crown, and the certain angle of being separated by is evenly distributed on the circumference of lower surface.
Described bottom crown signal detection electrode is metal electrode, and structure is circular-arc, has four, is positioned on the upper surface of bottom crown, and the certain angle of being separated by is evenly distributed on the circumference of upper surface.
The present invention utilizes the vibration of discoid gyrotron under special mode as the reference vibration, utilize simultaneously the piezoelectric effect driver plate shape gyrotron motion of piezoelectric, when applying the alternating voltage excitation of mating with selected model frequency at the piezoelectric membrane drive electrode, the disc oscillator can produce a kind of vibration of special mode.The disc oscillator is done respectively along the direction of first, second center line of upper surface and is stretched or compression movement, when stretching along upper surface the first centerline direction, compress along upper surface the second centerline direction, when compressing along upper surface the first centerline direction, stretch along upper and lower surface the second centerline direction.Suppose that discoid gyrotron upper surface the first centerline direction is X-direction, discoid gyrotron upper surface the first centerline direction is Y direction, direction perpendicular to discoid gyrotron upper and lower surface is made as Z-direction, oscillator is along X axis and Y-axis stretches and compression, when the angular velocity of external world's input and X axis or Y-axis, coriolis force opposite direction with oscillator mass formation corresponding to the piezoelectric membrane drive electrode of identical central line, produce a moment, the vibration on the Z direction changes.Oscillator can cause the variation of electric capacity between signal detection electrode is with gyrotron on the corresponding upper bottom crown in the variation of Z direction vibration, fixing funtcional relationship is arranged between the variation of electric capacity and input angular velocity, and when angular velocity output is arranged on different directions simultaneously, all can change in different signal detection electrode and the electric capacity between gyrotron, therefore can detect by detecting upper bottom crown unlike signal detecting electrode the output of angular velocity on two axles with the capacitance variations between gyrotron.
More than be the preferred embodiment structure, in certain embodiment, the structure of gyrotron can also be spoke-like, and its radial direction at disk is distributed with radial spoke.In another embodiment, the structure of gyrotron can also for cellular, reduce air-damped impact by adding damping hole on discoid gyrotron surface.
The present invention can realize that twin shaft detects, and processing technology is easy to realization, and reliability is high, and is low in energy consumption, and impact resistance is strong, can be good at work under rugged environment.The present invention utilizes the special vibration under the special mode of round metal plate-like gyrotron to vibrate as reference, the piezoelectric membrane drive electrode drive vibrator motion of high tension electricity coefficient, the capacitor that metal electrode on the upper bottom crown and gyrotron form detects output signal, can detect accurately the angular velocity on the extraneous biaxially oriented of inputting.The present invention can be used for the fields such as satellite, weapon, civil navigation.
Description of drawings
Fig. 1 is the structural representation of the discoid gyrotron of the present invention.
Fig. 2 is the discoid gyrotron of the present invention and plate signal detecting electrode assembling schematic diagram up and down.
Fig. 3 is the outside drawing after all element assemblings of the present invention.
Fig. 4 is that the selected operation mode total displacement of the discoid gyrotron of the present invention changes cloud atlas.
Fig. 5 is the discoid gyrotron of the present invention directions X change in displacement cloud atlas under driving condition.
Fig. 6 is the discoid gyrotron of the present invention Y-direction change in displacement cloud atlas under driving condition.
Fig. 7 is the spoke-like gyrotron structural representation in another embodiment of the present invention.
Fig. 8 is the cellular gyrotron structural representation in another embodiment of the present invention.
Embodiment
Below in conjunction with accompanying drawing a preferred embodiment of the present invention is elaborated: the present embodiment is implemented under take technical solution of the present invention as prerequisite; provided detailed embodiment and concrete operating process, but protection scope of the present invention is not limited to following embodiment.
Such as Fig. 1, Fig. 2, shown in Figure 3, the present embodiment comprises gyrotron 1, support cylinder 2, piezoelectric membrane drive electrode 3, top crown signal detection electrode 4, bottom crown signal detection electrode 5, top crown 6, bottom crown 7.
Gyrotron 1 material is metal material, and structure is disc, and discoid gyrotron 1 a wherein end is upper surface, and the other end with it parallel face is lower surface.
The material of piezoelectric membrane drive electrode 3 is PZT, the piezoelectrics such as ZnO, structure is circular arc, totally four, the a pair of arc piezoelectric membrane drive electrode that distributes along X-axis and a pair of arc piezoelectric membrane drive electrode that distributes along Y-axis, symmetrical be distributed in the concentric circumference of discoid gyrotron 1 rounded upper surface on.
Top crown signal detection electrode 4 materials are metal material of copper, and structure is circular-arc, totally four, and the symmetrical lower surface that is distributed in top crown.
Bottom crown signal detection electrode 5 materials are metal material of copper, and structure is circular-arc, totally four, and the symmetrical upper surface that is distributed in bottom crown.
Discoid gyrotron 1 distribution of upper surface piezoelectric membrane drive electrode 3 on disk is symmetrical about the oscillator upper surface center of circle.Through the discoid gyrotron 1 upper surface center of circle, be respectively upper surface the first center line and upper surface the second center line about the line of centres of two pairs of piezoelectric membrane drive electrodes 3 of center of circle symmetry, upper surface the first center line is vertical with upper surface the second center line.The upper end of support cylinder 2 connects with discoid gyrotron 1, and the lower end connects with bottom crown 7, and the outer face of bottom crown 7 is fixed on the carrier.Top crown 6 and bottom crown 7 cooperations are assembled into a hollow and sealed at both ends right cylinder.About the line of centres of two pairs of top crowns, 6 signal detection electrode 4 of center of circle symmetry through the center of circle, top crown 6 lower surface, be respectively top crown 6 lower surfaces the first center line and top crown 6 lower surfaces the second center line, top crown 6 lower surfaces the first center line is vertical with top crown 6 lower surfaces the second center line.About the line of centres of two pairs of bottom crowns, 7 signal detection electrode 5 of center of circle symmetry through the center of circle, bottom crown 7 upper surface, be respectively bottom crown 7 upper surfaces the first center line and bottom crown 7 upper surfaces the second center line, bottom crown 7 upper surfaces the first center line is vertical with bottom crown 7 upper surfaces the second center line.Top crown 6 lower surfaces the first center line, bottom crown 7 upper surfaces the first center line is parallel with gyrotron 1 surperficial the first center line and be positioned at same plane.Top crown 6 lower surfaces the second center line, bottom crown 7 upper surface pole plates the second center line is parallel with oscillator upper surface the second center line and be positioned at same plane.Top crown 6 signal detection electrode 4 and discoid gyrotron, bottom crown 7 signal detection electrode 5 and discoid gyrotron consist of differential capacitance.
As shown in Figure 4, find that by analog simulation there is the special mode of oscillation in certain rank in discoid gyrotron, under this rank mode of oscillation, discoid gyrotron is done stretching or compression movement along X-axis or Y-axis respectively, and when oscillator stretches along X-axis, along the Y direction compression, when oscillator compresses along X-axis, stretch along Y direction.By a pair of piezoelectric membrane drive electrode 7 on discoid gyrotron upper surface X-axis, 12 and Y-axis on a pair of piezoelectric membrane drive electrode 5,10 when applying respectively frequency with selected special model frequency coupling and anti-phase voltage signal, just can encourage discoid gyrotron to produce special modal vibration.
Show such as Fig. 5 and Fig. 6, because discoid gyrotron 1 is along X-axis or opposite along the direction of motion of Y-axis, therefore when the angular velocity of the extraneous X axis of inputting, can be subject to the coriolis force of opposite direction along the oscillator quality of Y direction elongation or compression, produce a moment, under the effect of moment, round metal plate-like gyrotron 1 centre of oscillation can be departed from, cause corresponding top crown lower surface, metal detection electrode on the second center line of bottom crown upper surface changes with electric capacity between discoid gyrotron, can detect the size of input X axis angular velocity by the variation of Detection capacitance value.Equally, when the external world inputs the angular velocity of Y direction, can be subject to the coriolis force of opposite direction along the oscillator quality of X-direction elongation or compression, produce a moment, under the effect of moment, the discoid gyrotron of piezoelectricity 1 centre of oscillation can be departed from, and causes that corresponding top crown lower surface, the metal detection electrode on the first center line of bottom crown upper surface change with electric capacity between discoid gyrotron, can detect the size of input Y-axis angular velocity by the variation of Detection capacitance value.Because when not loading angular velocity, the plate signal detecting electrode 4 up and down, 5 and the electric capacity of 1 of discoid gyrotron just doing periodic variation, and top crown signal detection electrode 4 and discoid gyrotron 1, bottom crown signal detection electrode 5 and discoid gyrotron 1 consist of differential capacitance, the top crown lower surface, two pairs of metal detection electrodes on the first center line of bottom crown upper surface consist of differential capacitance with 1 of discoid gyrotron, the top crown lower surface, two pairs of metal detection electrodes on the second center line of bottom crown upper surface consist of differential capacitance with 1 of discoid gyrotron, the variation of output signal is positive and negative opposite, therefore can remove the effect of signals that drives vibration by subtracting each other of signal.
All parts in the present embodiment can pass through the MEMS(MEMS (micro electro mechanical system)) the technique realization.Upper lower-glass pole plate can be made by substrate of glass being carried out photoresist mask wet-etching technology afterwards.Electrode on the upper bottom crown is by spin coating photoresist on top crown lower surface, bottom crown upper surface, and photoetching is developed, and the plated metal electrode is realized.Metallic support post and round metal plate-like gyrotron can pass through sacrifice layer process, utilize thick SU-8 glue as sacrifice layer, photoetching, and the splash-proofing sputtering metal material is made support column and oscillator.Piezoelectric membrane drive electrode on the oscillator can deposit by sol-gel process, and the plan perpendicular direction is in the upper surface of discoid gyrotron.
Because the inevitably impact of some errors in the defective that certainly exists of discoid gyrotron 1 material itself and the manufacture process, this actual frequency that just may cause gyro to produce special mode of oscillation does not mate with exciting signal frequency, thereby the performance of gyro is affected.Find by simulation analysis, there is an extreme value in the output of plate signal detecting electrode capacitance up and down when this modal vibration, whether these characteristics can be used to detect gyro and are operated under the resonant frequency that mates with selected special mode, reduce the error between theory and the practical devices, to guarantee the performance of gyro.
Above, preferred embodiment of the present invention is had been described in detail, but the present invention can be by carrying out various distortion to above-described embodiment or change is implemented.For example, as shown in Figure 7 and Figure 8, the structure of gyrotron can also be spoke-like and cellular, its structure relative complex.In addition, as tuning fork gyroscope, it can also add mass below four drive electrodes, increases the amplitude that the inertial force effect produces, and improves sensitivity and the detection efficiency of gyro.
The above only is preferred implementation of the present invention, and protection scope of the present invention not only is confined to above-described embodiment, and all technical schemes that belongs under the thinking of the present invention all belong to protection category of the present invention.Should be pointed out that for those skilled in the art, in the some improvements and modifications that do not break away under the principle of the invention prerequisite, these improvements and modifications also all should be considered as protection scope of the present invention.
Claims (9)
1. a Piezoelectric Driving capacitance detecting dual spindle gyroscopes is characterized in that comprising: gyrotron, support cylinder, piezoelectric membrane drive electrode, top crown, bottom crown, top crown signal detection electrode and bottom crown signal detection electrode; Described gyrotron is discoid, the gyrotron upper surface is provided with the piezoelectric membrane drive electrode, the gyrotron lower surface links to each other with support cylinder, the support cylinder other end is fixed on the bottom crown, bottom crown is fixed on the carrier, the top crown signal detection electrode is positioned at the top crown lower surface, and the bottom crown signal detection electrode is positioned at the bottom crown upper surface, and top crown, bottom crown and gyrotron assembling form differential capacitance for detection of output signal;
The distribution of piezoelectric membrane drive electrode on disk of described gyrotron upper surface is symmetrical about the oscillator upper surface center of circle; Through the discoid gyrotron upper surface center of circle, be respectively upper surface the first center line and upper surface the second center line about the line of centres of two pairs of piezoelectric membrane drive electrodes of center of circle symmetry, upper surface the first center line is vertical with upper surface the second center line;
The line of centres process center of circle, top crown lower surface about the described top crown signal detection electrode of two couple of center of circle symmetry, be respectively top crown lower surface the first center line and top crown lower surface the second center line, top crown lower surface the first center line is vertical with top crown lower surface the second center line;
About the line of centres of two pairs of bottom crown signal detection electrode of center of circle symmetry through the center of circle, bottom crown upper surface, be respectively bottom crown upper surface the first center line and bottom crown upper surface the second center line, bottom crown upper surface the first center line is vertical with bottom crown upper surface the second center line;
Top crown lower surface the first center line, bottom crown upper surface the first center line is parallel with gyrotron upper surface the first center line and be positioned at same plane; Top crown lower surface the second center line, bottom crown upper surface the second center line is parallel with gyrotron upper surface the second center line and be positioned at same plane;
Top crown signal detection electrode and discoid gyrotron, bottom crown signal detection electrode and discoid gyrotron consist of differential capacitance.
2. Piezoelectric Driving capacitance detecting dual spindle gyroscopes according to claim 1 is characterized in that, described gyrotron or be spoke-like or cellular.
3. Piezoelectric Driving capacitance detecting dual spindle gyroscopes according to claim 1 and 2 is characterized in that, the material of described gyrotron is metal material, and the gyrotron upper surface is parallel with lower surface.
4. Piezoelectric Driving capacitance detecting dual spindle gyroscopes according to claim 1, it is characterized in that, described top crown is nonmetallic materials, structure is discoid, an end face that wherein is positioned at the disc structure lower end is the lower surface, the another one end face that is positioned at the disc structure upper end is the upper surface, and the upper and lower end face is parallel.
5. Piezoelectric Driving capacitance detecting dual spindle gyroscopes according to claim 1, it is characterized in that, described bottom crown is nonmetallic materials, structure is discoid, an end face that wherein is positioned at the disc structure lower end is the lower surface, the another one end face that is positioned at the disc structure upper end is the upper surface, and the upper and lower end face is parallel.
6. Piezoelectric Driving capacitance detecting dual spindle gyroscopes according to claim 1 and 2 is characterized in that, described top crown signal detection electrode is metal electrode, structure is circular-arc, have four, be positioned on the lower surface of top crown, be evenly distributed on the circumference of lower surface.
7. Piezoelectric Driving capacitance detecting dual spindle gyroscopes according to claim 1 and 2 is characterized in that, described bottom crown signal detection electrode is metal electrode, structure is circular-arc, have four, be positioned on the upper surface of bottom crown, be evenly distributed on the circumference of upper surface.
8. Piezoelectric Driving capacitance detecting dual spindle gyroscopes according to claim 1 is characterized in that, described support cylinder is structural metallic materials, and support cylinder body upper end is vertical with the lower surface of disk, and support cylinder body lower end is fixed on the bottom crown.
9. Piezoelectric Driving capacitance detecting dual spindle gyroscopes according to claim 1, it is characterized in that, described piezoelectric membrane drive electrode is piezoelectric, polarised direction is perpendicular to the upper and lower surface of discoid gyrotron, structure is circular-arc, have four, be positioned at the upper surface of discoid gyrotron, be evenly distributed in the concentric circumference of circular surface on.
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| CN103017748B (en) * | 2012-12-04 | 2013-12-11 | 北京信息科技大学 | Method for extracting signal of campaniform vibrator type angular rate gyroscope |
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| CN104807452B (en) * | 2015-04-29 | 2017-07-18 | 东南大学 | Honeycomb fashion MEMS resonant silicon micro-gyroscope and its processing method |
| CN104897148A (en) * | 2015-05-29 | 2015-09-09 | 上海交通大学 | Cellular solid fluctuating micromechanical gyroscope and preparation method thereof |
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| CN108173451B (en) * | 2017-12-25 | 2019-08-06 | 上海交通大学 | A kind of composite piezoelectric containing liquid transmission and electrostatic drive vibrating diaphragm driver |
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| CN108332732B (en) * | 2018-01-26 | 2020-05-19 | 珠海全志科技股份有限公司 | Driving and detecting device of micro-mechanical single-vibrator three-axis gyroscope |
| CN108332733B (en) * | 2018-01-26 | 2020-05-19 | 珠海全志科技股份有限公司 | Driving and detecting device of micro-mechanical single-vibrator three-axis gyroscope |
| CN109556590B (en) * | 2018-11-02 | 2020-05-22 | 湖南天羿领航科技有限公司 | Resonance ring/multi-resonance ring six-axis inertial sensor |
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