CN1731089A - Disc micromechanical top based on acoustic levitation - Google Patents
Disc micromechanical top based on acoustic levitation Download PDFInfo
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- CN1731089A CN1731089A CN 200510028687 CN200510028687A CN1731089A CN 1731089 A CN1731089 A CN 1731089A CN 200510028687 CN200510028687 CN 200510028687 CN 200510028687 A CN200510028687 A CN 200510028687A CN 1731089 A CN1731089 A CN 1731089A
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- micromechanical
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- insulation course
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Abstract
The invention relates to a disc micro-engine gyroscope based on the sound suspension in the field of micro motor technique. The invention comprises: eight capacitance plates, a partition electrode, a electricity plate, a base plate, a insulating layer, four bracing columns and a micro rotors, wherein the base plate and the partition electrode are positioned on two sides of the electricity plate along with the sickness direction; the insulating layer is positioned on the base plate; the eight capacitance plates are positioned on the insulating layer evenly, which forms four bracing columns on the insulating layer; the micro rotor is positioned on the four bracing columns.
Description
Technical field
What the present invention relates to is a kind of device of field of micro electromechanical technology, specifically, is a kind of disc micromechanical top based on acoustic levitation.
Background technology
Micromechanical gyro is a kind of important inertial sensor, and it all has application very widely in national defense and military and civilian two big fields.In recent years, along with the development of micromechanics electronic system (MEMS) process technology, the development of micro-mechanical gyroscope is people's attention extremely.Yet, present research mainly is the micro mechanical vibration gyro, most of micro mechanical vibration gyros all adopt electrostatic force to excite with the method for capacitive sensing to come measured angular speed, because electrode gap can not be done very for a short time, generally about 1-2 μ m, and static excites the bigger driving voltage of requirement, and this and IC circuit are incompatible, and because the interference of electrostatic field, precision can obviously reduce.The Electromagnetic Drive gyro is because the requirement of magnetic gap and winding volume, and microminiaturization is subjected to certain restriction, and in the environment in magnetic field is arranged cisco unity malfunction.
Find by prior art documents, people such as K.Maenaka are at " Sensors and ActuatorsA ", (2005) the pp6-15 page or leaf is write articles: " Design; fabrication and operation of MEMS gimbalgyroscope " (" based on design of the universal joint gyro of MEMS; make and drive ", " sensor and actuator A "), this article has been introduced the gyro with inside and outside two gimbal structures, the electromagnetic force of Inside coil makes inner universal joint produce the benchmark vibration, Ge Shili makes displacement that outside universal joint produces detect by the electromotive force of external coil, thereby forms a micro gyroscope.The shortcoming of the gyro of this expulsion mechanism is: owing to adopted the electromagnetic force driving, therefore can not work having under the environment in magnetic field; And used planar coil, and structure is comparatively complicated, and precision and efficient are not high.
Summary of the invention
The objective of the invention is to overcome the deficiencies in the prior art and defective, a kind of disc micromechanical top based on acoustic levitation is proposed, make the sound wave energy of its excitation reach nanometer scale, obviously improve precision, life-span is long, the reliability height, and reaction velocity is fast, control characteristic is good, and has solved the work problem under the electromagnetic field environment.
The present invention is achieved by the following technical solutions, the present invention includes: eight capacitor plates, divisional electrode, piezoelectric board, base stage, insulation course, four support columns and little rotors, base stage and divisional electrode are located at the two sides of piezoelectric board along thickness direction, insulation course is located on the base stage, eight capacitor plates evenly are located on the insulation course, and on insulation course, forming four support columns, little rotor is located on four support columns.
Described four support columns are column.Support column is for preventing that little rotor from contacting and colliding with capacitor plate.
Described piezoelectric board polarizes along thickness direction.
Described little rotor is circular metal dish.
On divisional electrode, apply successively sin ω t, cos ω t ,-sin ω t ,-cos ω t etc. the alternating voltage of amplitude, when applying zero potential on the base stage, piezoelectric board is subjected to electric field action to produce flexural deformation, thereby between piezoelectric board and little rotor, form the row ripple, row wave sound field produces axially, radially with the power of circumferential three directions, axial power suspends the little rotor on the support column, radial force makes little rotor keep balance, not eccentric, tangential force makes little rotor produce rotation, and the rotation direction of little rotor is consistent with the row ripple.Little rotor could have high noise immunity after having only high speed rotating when producing gyroscopic effect, by increasing the hoverheight that driving voltage can improve rotating speed and little rotor of little rotor.Eight capacitor plates that evenly distributed on the insulation course, the combination by these capacitor plates and little rotor detect little rotor in the space residing position.Can detect the displacement that little rotor moves up and down by the electric capacity that forms between any one and the little rotor in eight capacitor plates in addition, the lateral shift that two relative arbitrarily capacitor plates and the electric capacity between little rotor can detect little rotor.
The present invention adopts new suspension driving mechanism, and the sound wave energy that is encouraged reaches nanometer scale, obviously improves precision, and the life-span is long, the reliability height, and reaction velocity is fast, and control characteristic is good, and has solved the work problem under the electromagnetic field environment; The present invention has adopted new simple gyro structure, thereby reduces volume, reduction weight, realizes microminiaturized; The present invention adopts the method manufacturing and the realization of microfabrication, is suitable for production in enormous quantities, has fabulous characteristics such as cost performance.
Description of drawings
Fig. 1 structural representation of the present invention
Embodiment
As shown in Figure 1, the present invention includes: eight capacitor plates 1,2,3,4,5,6,7,8, divisional electrode 9, piezoelectric board 10, base stage 11, insulation course 12, four support columns 13,14,15,16 and little rotors 17, base stage 11 and divisional electrode 9 are located at the two sides of piezoelectric board 10 along thickness direction, insulation course 12 is located on the base stage 11, eight capacitor plates 1,2,3,4,5,6,7,8 evenly are located on the insulation course 12, and on insulation course 12, forming four support columns 13,14,15,16, little rotor 17 is located on four support columns 13,14,15,16.
Described four support columns 13,14,15,16 are column.Support column is for preventing that little rotor from contacting and colliding with capacitor plate.
Described piezoelectric board 10 polarizes along thickness direction.
Described little rotor 17 is circular metal dish.
Claims (4)
1. disc micromechanical top based on acoustic levitation, comprise: eight capacitor plates (1,2,3,4,5,6,7,8), divisional electrode (9), piezoelectric board (10), base stage (11), insulation course (12), four support columns (13,14,15,16) and little rotor (17), it is characterized in that, base stage (11) and divisional electrode (9) are located at the two sides of piezoelectric board (10) along thickness direction, insulation course (12) is located on the base stage (11), eight capacitor plates (1,2,3,4,5,6,7,8) evenly be located on the insulation course (12), and at four support columns (13 of the last formation of insulation course (12), 14,15,16), little rotor (17) is located at four support columns (13,14,15,16) on.
2. the disc micromechanical top based on acoustic levitation according to claim 1 is characterized in that, described four support columns (13,14,15,16) are column.
3. the disc micromechanical top based on acoustic levitation according to claim 1 is characterized in that, described piezoelectric board (10) polarizes along thickness direction.
4. the disc micromechanical top based on acoustic levitation according to claim 1 is characterized in that, described little rotor (17) is circular metal dish.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005100286870A CN100494894C (en) | 2005-08-11 | 2005-08-11 | Disc micromechanical top based on acoustic levitation |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005100286870A CN100494894C (en) | 2005-08-11 | 2005-08-11 | Disc micromechanical top based on acoustic levitation |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1731089A true CN1731089A (en) | 2006-02-08 |
| CN100494894C CN100494894C (en) | 2009-06-03 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2005100286870A Expired - Fee Related CN100494894C (en) | 2005-08-11 | 2005-08-11 | Disc micromechanical top based on acoustic levitation |
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| CN (1) | CN100494894C (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100401071C (en) * | 2006-08-03 | 2008-07-09 | 上海交通大学 | Flexible vertical column seesaw type double-layer structural micro-accelerometer |
| CN100458366C (en) * | 2006-06-08 | 2009-02-04 | 上海交通大学 | Active suspension permanent magnet ring rotor acynchronous induction micro machinery gyroscope gyroscope |
| CN101602482B (en) * | 2009-07-13 | 2011-09-07 | 浙江大学 | Method for three-dimensionally capturing and rotating micromechanical member by using ultrasonic radiation force |
| CN102297690A (en) * | 2011-07-22 | 2011-12-28 | 上海交通大学 | Piezoelectricity driven capacitance detecting two-axis gyroscope |
| CN102384983A (en) * | 2011-10-14 | 2012-03-21 | 南京航空航天大学 | Ultrasonic levitation accelerometer |
| CN103363970A (en) * | 2013-06-20 | 2013-10-23 | 上海交通大学 | Electromagnetic-driving electromagnetic-detection triaxial microgyroscope with bulk acoustic wave resonance, and preparation method thereof |
| CN113063408A (en) * | 2021-03-15 | 2021-07-02 | 西安交通大学 | Ultrasonic suspended gyroscope based on planar holographic transducer |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102305627B (en) * | 2011-07-22 | 2013-02-27 | 上海交通大学 | All solid dual-axis gyroscope with discoid piezoelectric vibrator |
-
2005
- 2005-08-11 CN CNB2005100286870A patent/CN100494894C/en not_active Expired - Fee Related
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100458366C (en) * | 2006-06-08 | 2009-02-04 | 上海交通大学 | Active suspension permanent magnet ring rotor acynchronous induction micro machinery gyroscope gyroscope |
| CN100401071C (en) * | 2006-08-03 | 2008-07-09 | 上海交通大学 | Flexible vertical column seesaw type double-layer structural micro-accelerometer |
| CN101602482B (en) * | 2009-07-13 | 2011-09-07 | 浙江大学 | Method for three-dimensionally capturing and rotating micromechanical member by using ultrasonic radiation force |
| CN102297690A (en) * | 2011-07-22 | 2011-12-28 | 上海交通大学 | Piezoelectricity driven capacitance detecting two-axis gyroscope |
| CN102297690B (en) * | 2011-07-22 | 2013-02-27 | 上海交通大学 | Piezoelectricity driven capacitance detecting two-axis gyroscope |
| CN102384983A (en) * | 2011-10-14 | 2012-03-21 | 南京航空航天大学 | Ultrasonic levitation accelerometer |
| CN103363970A (en) * | 2013-06-20 | 2013-10-23 | 上海交通大学 | Electromagnetic-driving electromagnetic-detection triaxial microgyroscope with bulk acoustic wave resonance, and preparation method thereof |
| CN103363970B (en) * | 2013-06-20 | 2016-02-10 | 上海交通大学 | Electromagnetic Drive electromagnetic detection bulk acoustic resonance three axle microthrust test and preparation method thereof |
| CN113063408A (en) * | 2021-03-15 | 2021-07-02 | 西安交通大学 | Ultrasonic suspended gyroscope based on planar holographic transducer |
Also Published As
| Publication number | Publication date |
|---|---|
| CN100494894C (en) | 2009-06-03 |
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Granted publication date: 20090603 Termination date: 20120811 |