CN103322995A - Piezoelectric-drive electrostatic-detection bulk acoustic wave harmonic-vibration triaxial microgyroscope and preparation method thereof - Google Patents
Piezoelectric-drive electrostatic-detection bulk acoustic wave harmonic-vibration triaxial microgyroscope and preparation method thereof Download PDFInfo
- Publication number
- CN103322995A CN103322995A CN2013102455793A CN201310245579A CN103322995A CN 103322995 A CN103322995 A CN 103322995A CN 2013102455793 A CN2013102455793 A CN 2013102455793A CN 201310245579 A CN201310245579 A CN 201310245579A CN 103322995 A CN103322995 A CN 103322995A
- Authority
- CN
- China
- Prior art keywords
- electrode
- disc oscillator
- oscillator
- piezoelectric
- acoustic wave
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Landscapes
- Gyroscopes (AREA)
Abstract
The invention relates to a piezoelectric-drive electrostatic-detection bulk acoustic wave harmonic-vibration triaxial microgyroscope and a preparation method thereof. The piezoelectric-drive electrostatic-detection bulk acoustic wave harmonic-vibration triaxial microgyroscope comprises a piezoelectric disk vibrator without a release hole, a cylindrical support column, a drive electrode distributed on the disk vibrator, and a detection electrode, an equilibrium electrode and a common electrode which are distributed on a substrate, wherein the drive electrode is distributed on the disk vibrator; and the detection electrode, equilibrium electrode and common electrode are circumferentially distributed on the substrate and positioned below the disk vibrator, are parallel to the disk vibrator and respectively have a clearance with the disk vibrator. The microgyroscope is driven by utilizing the piezoelectric effect; and meanwhile, the non-contact equilibrium electrode is utilized to apply potential to the lower electrode, so that the gyroscope structure is optimized. By adopting an MEMS (micro-electromechanical systems) processing technique, the manufacturing method has the advantages of simple manufacturing technique and high reliability, and can ensure lower cost and higher yield. The microgyroscope has the advantages of small size and simple structure; and the processing technique is easy to implement and suitable for mass production.
Description
Technical field
What the present invention relates to is little gyro of a kind of field of micro electromechanical technology and preparation method thereof, specifically, relate to be a kind of utilize bulk acoustic wave saddle type resonance mode have three axle gyroscopes of dish type harmonic oscillator and preparation method thereof.
Background technology
Gyroscope be a kind of can the sensitive carrier angle or the inertia device of angular velocity, in fields such as attitude control and navigator fixs very important effect is arranged.Along with science and techniques of defence and Aeronautics and Astronautics industrial expansion, inertial navigation system for gyrostatic requirement also to low cost, small size, high precision, high reliability, can adapt to the future development of various rugged surroundings.
Find through the literature search to prior art, Chinese patent " double-shaft MEMS gyroscope " (number of patent application: 201020033300.7) utilize MEMS body silicon and bonding technology, process cantilever beam structure and the cavity structure with spring and mass at silicon chip.By up and down and side electrode and mass apply the voltage signal of single characteristic frequency, mass is applied electrostatic force so that mass vibrates.When extraneous turning rate input was arranged, under corioliseffect, vibration can be transferred to the another one axle and gets on, and can detect the variation of angular velocity by detecting electrode electric capacity.
There is following deficiency in this technology: this gyroscope adopts the structural model of traditional spring-mass, and resulting signal sensitivity is not high, and the Q value is lower, and drift is excessive, and impact resistance is poor, is difficult to reach high precision.
Summary of the invention
The objective of the invention is for the deficiencies in the prior art, little gyro of a kind of Piezoelectric Driving electrostatic detection bulk acoustic wave resonance three axles and preparation method thereof is provided.This gyro utilizes piezoelectric effect to carry out gyro and drives, and utilizes simultaneously contactless counter electrode to apply electromotive force to bottom electrode, so that gyroscope structure has obtained optimization.This gyro volume is little, simple in structure, and quality factor are large, and processing technology is easy to realization, can be with the CMOS process compatible, and shock resistance does not need Vacuum Package, is applicable to mass production.
According to an aspect of the present invention, provide a kind of Piezoelectric Driving electrostatic detection bulk acoustic wave resonance three axles little gyro, it comprises: not with the piezoelectricity disc oscillator of release aperture, and columniform support column, substrate, drive electrode, detecting electrode, counter electrode and public electrode.Described disc oscillator is fixed on the substrate by described columniform support column, and described disc oscillator is perpendicular to the z axle of described substrate; Described drive electrode is distributed on the described disc oscillator; Described detecting electrode, counter electrode and public electrode are circle distribution on described substrate and are positioned at described disc oscillator below, and be parallel with described disc oscillator and a gap arranged simultaneously; Described public electrode is distributed between counter electrode and the detecting electrode, and described detecting electrode, described counter electrode and described public electrode distribute according to the cross-circulation that puts in order of two counter electrodes, a public electrode, two detecting electrodes, a public electrode, two counter electrodes.
Preferably, the described disc oscillator upper surface described drive electrode that distributes, described disc oscillator lower surface is electric conductor, and is fixed on the described substrate by described support column.
Preferably, described drive electrode is distributed on the described disc oscillator, is circle distribution.
Preferably, the gap between described detecting electrode, described counter electrode and described public electrode and the described disc oscillator is the 2-3 micron.
Preferably, per two adjacent described counter electrodes are one group, apply respectively one group of driving DC voltage signal of equal and opposite in direction opposite in sign.Each is organized described counter electrode and forms an electric capacity, and the lower surface that is used for the described disc oscillator of balance keeps zero potential.
Preferably, per two adjacent described detecting electrodes are one group, apply respectively one group of driving DC voltage signal of equal and opposite in direction opposite in sign and a group of equal and opposite in direction single spin-echo and exchange carrier signal.Each is organized described drive electrode and forms an electric capacity, drives described disc oscillator for detection of piezoelectric forces and produces sensed-mode.
According to a further aspect in the invention, provide a kind of method for making of above-mentioned little gyro, its step is as follows:
(a) base-plate cleaning is clean, oven dry, by photoetching process, sputter forms metal electrode in the front;
(b) deposit spathic silicon layer on substrate, thickness is the 2-3 micron;
(c) by mask, the etch polysilicon layer keeps support column and restraining barrier;
(d) another piezoelectric substrate is cleaned up, oven dry, by mask technique, sputter forms metal electrode in the front;
(e) at piezoelectric substrate back spatter depositing metal layers;
(f) cut utilizes the method for bonding with two substrate bondings, forms integrated structure.
The saddle type resonance mode that the present invention utilizes disc oscillator is as with reference to vibration, and described disc oscillator simultaneously also can be along disk diameter to X-axis and the Y direction vibration along the Z-direction vibration perpendicular to its disc surfaces under this mode.When move perpendicular to the Z axis positive dirction of its disc surfaces in the described disc oscillator edge of X-direction, the described disc oscillator of Y direction is along moving perpendicular to the Z axis negative direction of its disc surfaces.This motion produces the effect that is similar to saddle type, is referred to as " bulk acoustic wave saddle type mode ".By applying driving voltage at described disc oscillator surface drive electrode, described disc oscillator is applied piezoelectric signal encourage described disc oscillator to produce driven-mode.Be mainly used in the angular velocity of responsive X, Y-axis along the vibration of Z axis.When the turning rate input of the X-axis that is parallel to described disc oscillator surface or Y-axis was arranged, under corioliseffect, described disc oscillator was subject to the effect of a turning moment, described disc oscillator can along perpendicular to Z-direction around described columniform support column rotation.Wherein, the angular dimension of rotation is directly proportional with the size of input angle.Radially the vibration of X, Y-axis is mainly used in the angular velocity of responsive Z axis.When the turning rate input that has perpendicular to the Z axis on described disc oscillator surface, under corioliseffect, described disc oscillator is subject to a turning moment effect, described disc oscillator can along perpendicular to Z-direction around described columniform support column rotation.This moment, near described detecting electrode capacitance size can change, and by applying carrier signal at described detecting electrode, and from described public electrode carrier signal was extracted.Carrier signal can obtain near the size variation of the electric capacity described detecting electrode by demodulation, namely can detect the anglec of rotation perpendicular to described disc oscillator, and then tries to achieve the turning rate input size of three axles.
Compared with prior art, the present invention has following beneficial effect:
The present invention utilizes bulk acoustic wave saddle type resonance mode to adopt the disc oscillator with the release aperture be not with, and simple in structure, symmetry is good.Counter electrode, detecting electrode and public electrode are micron order with the gap of disc oscillator, utilize bonding technology to finish, and processes is easy to realize.The disc oscillator lower surface is without receiving electrode, but utilizes one group of opposite counter electrode signal of size same-sign to keep its zero potential, and detects by carrier signal, reduced the complicacy of processing technology.The present invention utilizes the vibration under the bulk acoustic wave saddle type resonance mode to vibrate as reference, utilize disc oscillator with the capacitance variations between the detecting electrode as detection signal, by processing the carrier wave output signal of public electrode extraction, can detect accurately the size of three input shaft input angular velocities.The present invention adopts the MEMS processing technology, and manufacture craft is simple, and reliability is high, can guarantee lower cost and higher yield rate.
Description of drawings
By reading the detailed description of non-limiting example being done with reference to the following drawings, it is more obvious that other features, objects and advantages of the present invention will become:
Fig. 1 is the schematic diagram of structure of the present invention.
Fig. 2 is the 3 dimensional drawing of structure of the present invention.
Fig. 3 is the left view of structure of the present invention.
Fig. 4 is the bulk acoustic wave saddle type resonance mode schematic diagram of disc oscillator among the present invention.
Fig. 5 is the driven-mode schematic diagram of disc oscillator among the present invention.
Fig. 6 is the sensed-mode schematic diagram of disc oscillator among the present invention.
Among the figure: 1 disc oscillator, 2 support columns, 3 substrates, 4 drive electrodes, 5 detecting electrodes, 6 counter electrodes, 7 public electrodes.
Embodiment
The present invention is described in detail below in conjunction with specific embodiment.Following examples will help those skilled in the art further to understand the present invention, but not limit in any form the present invention.Should be pointed out that to those skilled in the art, without departing from the inventive concept of the premise, can also make some distortion and improvement.These all belong to protection scope of the present invention.
Such as Fig. 1, Fig. 2, shown in Figure 3, the present embodiment comprises:
One with the piezoelectricity disc oscillator 1 of release aperture;
Be positioned at the RC support column 2 in described disc oscillator 1 below;
Be positioned at the drive electrode 4 on the described disc oscillator 1;
With the detecting electrode 5, counter electrode 6 and the public electrode 7 that are positioned on the substrate 3;
Described detecting electrode 5, counter electrode 6 and public electrode 7 are circle distribution on described substrate 3 and are positioned at described disc oscillator 1 below, and be parallel with described disc oscillator 1 and a gap arranged simultaneously.
In the present embodiment, described disc oscillator 1 is to be made by piezoelectric to form, the upper surface described drive electrode 4 that distributes, and described disc oscillator 1 lower surface is electric conductor, and is fixed on the substrate 3 by described support column 2.
Oscillator lower surface plated metal conductive layer, and be fixed on the substrate 3 by support column 2.
In the present embodiment, totally eight of described drive electrodes 4 are distributed in the upper surface of piezoelectricity disc oscillator 1, are circle distribution.Apply on the drive electrode and exchange driving signal generation piezoelectric forces, be used for the excitation disc oscillator and produce driven-mode.
In the present embodiment, described detecting electrode 5, described counter electrode 6 and described public electrode 7 are distributed in described disc oscillator 1 below perpendicular to the z axle of described substrate 3, are positioned on the described substrate 3, are circle distribution.Described detecting electrode 5, described counter electrode 6 and described public electrode 7 and the gap of stating between the piezoelectricity disc oscillator 1 are the 2-3 micron, according to counter electrode, counter electrode 6, public electrode 7, detecting electrode, detecting electrode 5, public electrode 7, counter electrode, counter electrode 6, public electrode 7, detecting electrode, detecting electrode 5, public electrode 7 ... cross-circulation distributes.
In the present embodiment, described counter electrode 6 has four pairs, lays respectively at the positive negative direction of X-axis and the positive negative direction of Y-axis.Apply respectively one group of driving DC voltage signal of equal and opposite in direction opposite in sign on the every pair of described counter electrode 6.Every a pair of described counter electrode forms an electric capacity, and the lower surface that is used for the described disc oscillator of balance keeps zero potential.
In the present embodiment, described detecting electrode 5 has four pairs, and laying respectively at described counter electrode 6 has the 45° angle degree poor.The every pair of described detecting electrode 5 applies respectively one group of driving DC voltage signal of equal and opposite in direction opposite in sign and a group of equal and opposite in direction single spin-echo exchanges carrier signal.Each is organized described detecting electrode and forms an electric capacity, drives described disc oscillator for detection of piezoelectric forces and produces sensed-mode.
In the present embodiment, described public electrode 7 has eight, lays respectively between every pair of described counter electrode 6 and the detecting electrode 5, and all links together between the described public electrode 7.Described public electrode 7 is used for extracting the carrier signal that detects on the described detecting electrode 5, and by subsequent conditioning circuit, obtains the Detection capacitance size.
As shown in Figure 4, obtain the bulk acoustic wave saddle type resonance mode of described disc oscillator by the method for finite element analysis, described disc oscillator is along the Z-direction vibration perpendicular to described disc oscillator 1 surface under this mode.When move perpendicular to the Z axis positive dirction on described disc oscillator surface in described disc oscillator 1 edge of X-direction, the described disc oscillator 1 of Y direction is along moving perpendicular to the Z axis negative direction on described disc oscillator surface.
Such as Fig. 5, shown in Figure 6, apply driving voltage by the described drive electrode 4 at piezoelectricity disc oscillator 1 upper surface, described disc oscillator 1 is applied piezoelectric forces encourage described disc oscillator 1 to produce driven-mode.Be mainly used in the angular velocity of responsive X, Y-axis along the vibration of Z axis.When the turning rate input of the X-axis that is parallel to described disc oscillator 1 surface or Y-axis is arranged, under corioliseffect, described disc oscillator 1 is subject to the effect of a turning moment, and described disc oscillator 1 can be along rotating around described columniform support column 2 perpendicular to Z-direction.Wherein, the angular dimension of rotation is directly proportional with the size of input angle.Radially the vibration of X, Y-axis is mainly used in the angular velocity of responsive Z axis.When the turning rate input that has perpendicular to the Z axis on described disc oscillator 1 surface, under corioliseffect, described disc oscillator 1 is subject to a turning moment effect, and described disc oscillator 1 can be along described columniform support column 2 rotations.This moment, near described detecting electrode 5 capacitance size can change, and by applying carrier signal at described detecting electrode 5, and from described public electrode 7 carrier signal was extracted.Carrier signal can obtain near the size variation of described detecting electrode 5 electric capacity by demodulation, namely can detect the anglec of rotation perpendicular to described disc oscillator 1, and then tries to achieve the turning rate input size of three axles.
The present embodiment relates to the preparation technology of little gyro, mainly comprises following step:
(a) base-plate cleaning is clean, oven dry, by photoetching process, sputter forms metal electrode in the front;
(b) deposit spathic silicon layer on substrate, thickness is the 2-3 micron;
(c) by mask, the etch polysilicon layer keeps support column and restraining barrier;
(d) another piezoelectric substrate is cleaned up, oven dry, by mask technique, sputter forms metal electrode in the front;
(e) at piezoelectric substrate back spatter depositing metal layers;
(f) cut utilizes the method for bonding with two substrate bondings, forms integrated structure.
The present invention utilizes bulk acoustic wave saddle type resonance mode to adopt the disc oscillator with the release aperture be not with, and simple in structure, symmetry is good.Counter electrode, detecting electrode and public electrode are micron order with the gap of disc oscillator, utilize bonding technology to finish, and processes is easy to realize.The disc oscillator lower surface is without receiving electrode, but utilizes one group of opposite counter electrode signal of size same-sign to keep its zero potential, and detects by carrier signal, reduced the complicacy of processing technology.The present invention utilizes the vibration under the bulk acoustic wave saddle type resonance mode to vibrate as reference, utilize disc oscillator with the capacitance variations between the detecting electrode as detection signal, by processing the carrier wave output signal of public electrode extraction, can detect accurately the size of three input shaft input angular velocities.The present invention adopts the MEMS processing technology, and manufacture craft is simple, and reliability is high, can guarantee lower cost and higher yield rate.
Above specific embodiments of the invention are described.It will be appreciated that, the present invention is not limited to above-mentioned specific implementations, and those skilled in the art can make various distortion or modification within the scope of the claims, and this does not affect flesh and blood of the present invention.
Claims (8)
1. little gyro of Piezoelectric Driving electrostatic detection bulk acoustic wave resonance three axles is characterized in that comprising: not with the piezoelectricity disc oscillator of release aperture, and columniform support column, substrate, drive electrode, detecting electrode, counter electrode and public electrode; Described disc oscillator is fixed on the substrate by described columniform support column, and described disc oscillator is perpendicular to the z axle of described substrate; Described drive electrode is distributed on the described disc oscillator; Described detecting electrode, counter electrode and public electrode are circle distribution on described substrate and are positioned at described disc oscillator below, and be parallel with described disc oscillator and a gap arranged simultaneously; Described public electrode is distributed between counter electrode and the detecting electrode, and described detecting electrode, described counter electrode and described public electrode distribute according to the cross-circulation that puts in order of two counter electrodes, a public electrode, two detecting electrodes, a public electrode, two counter electrodes.
2. the little gyro of Piezoelectric Driving electrostatic detection bulk acoustic wave resonance three axles according to claim 1, it is characterized in that: the described disc oscillator upper surface described drive electrode that distributes, described disc oscillator lower surface is electric conductor, and is fixed on the described substrate by described support column.
3. the little gyro of Piezoelectric Driving electrostatic detection bulk acoustic wave resonance three axles according to claim 1, it is characterized in that: described drive electrode is distributed on the piezoelectricity disc oscillator, is circle distribution.
4. the little gyro of Piezoelectric Driving electrostatic detection bulk acoustic wave resonance three axles according to claim 1, it is characterized in that: the gap between described detecting electrode, described counter electrode and described public electrode and the described disc oscillator is the 2-3 micron.
5. the little gyro of Piezoelectric Driving electrostatic detection bulk acoustic wave resonance three axles according to claim 1, it is characterized in that: per two adjacent described counter electrodes are one group, apply respectively one group of driving DC voltage signal of equal and opposite in direction opposite in sign, each is organized described counter electrode and forms an electric capacity, is used for the described disc oscillator lower surface of balance and keeps zero potential.
6. the little gyro of Piezoelectric Driving electrostatic detection bulk acoustic wave resonance three axles according to claim 1, it is characterized in that: per two adjacent described detecting electrodes are one group, apply respectively one group of driving DC voltage signal of equal and opposite in direction opposite in sign and one group of ac-excited signal of equal and opposite in direction single spin-echo, each is organized described drive electrode and forms an electric capacity, drives described disc oscillator for detection of piezoelectric forces and produces sensed-mode.
7. the little gyro of each described Piezoelectric Driving electrostatic detection bulk acoustic wave resonance three axles according to claim 1-6, it is characterized in that: described gyro utilizes the saddle type resonance mode of disc oscillator as the reference vibration, described disc oscillator is along the Z-direction vibration perpendicular to its disc surfaces under this mode, simultaneously also can be along disk diameter to X-axis and the Y direction vibration, when move perpendicular to the Z axis positive dirction of its disc surfaces in the described disc oscillator edge of X-direction, the described disc oscillator of Y direction is along moving perpendicular to the Z axis negative direction of its disc surfaces; By applying driving voltage at described disc oscillator surface drive electrode, described disc oscillator is applied piezoelectric signal encourage described disc oscillator to produce driven-mode; When the turning rate input of the X-axis that is parallel to described disc oscillator surface or Y-axis is arranged, under corioliseffect, described disc oscillator is subject to the effect of a turning moment, described disc oscillator can be along rotating around described columniform support column perpendicular to Z-direction, wherein, the angular dimension of rotation is directly proportional with the size of input angle; When the turning rate input that has perpendicular to the Z axis on described disc oscillator surface, under corioliseffect, described disc oscillator is subject to a turning moment effect, described disc oscillator can be along rotating around described columniform support column perpendicular to Z-direction, this moment, near the capacitance size described detecting electrode can change, by applying carrier signal at described detecting electrode, and from described public electrode carrier signal is extracted, carrier signal obtains near the size variation of the electric capacity described detecting electrode by demodulation, namely detect the anglec of rotation perpendicular to described disc oscillator, and then try to achieve the turning rate input size of three axles.
8. the preparation method such as the little gyro of each described Piezoelectric Driving electrostatic detection bulk acoustic wave resonance three axles of claim 1-7 is characterized in that comprising the steps:
(a) base-plate cleaning is clean, oven dry, by photoetching process, sputter forms metal electrode in the front;
(b) deposit spathic silicon layer on substrate, thickness is the 2-3 micron;
(c) by mask, the etch polysilicon layer keeps support column and restraining barrier;
(d) another piezoelectric substrate is cleaned up, oven dry, by mask technique, sputter forms metal electrode in the front;
(e) at piezoelectric substrate back spatter depositing metal layers;
(f) cut utilizes the method for bonding with two substrate bondings, forms integrated structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310245579.3A CN103322995B (en) | 2013-06-20 | 2013-06-20 | Piezoelectric Driving electrostatic detection bulk acoustic resonance three axle microthrust test and preparation method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310245579.3A CN103322995B (en) | 2013-06-20 | 2013-06-20 | Piezoelectric Driving electrostatic detection bulk acoustic resonance three axle microthrust test and preparation method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103322995A true CN103322995A (en) | 2013-09-25 |
| CN103322995B CN103322995B (en) | 2016-04-13 |
Family
ID=49191895
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310245579.3A Active CN103322995B (en) | 2013-06-20 | 2013-06-20 | Piezoelectric Driving electrostatic detection bulk acoustic resonance three axle microthrust test and preparation method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103322995B (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103344230A (en) * | 2013-06-20 | 2013-10-09 | 上海交通大学 | Electrostatically driving electrostatic detection bulk acoustic wave resonance three-axis microgyroscope and manufacturing method thereof |
| CN103647475A (en) * | 2013-12-16 | 2014-03-19 | 厦门大学 | Wideband piezoelectric vibration energy collecting device |
| CN104457725A (en) * | 2014-11-14 | 2015-03-25 | 司红康 | High-sensitivity bulk acoustic wave silicon microgyroscope |
| CN105783901A (en) * | 2015-01-12 | 2016-07-20 | 波音公司 | Approach for control redistribution of coriolis vibratory gyroscope (cvg) for performance improvement |
| CN106441260A (en) * | 2016-08-23 | 2017-02-22 | 上海交通大学 | On-silicon piezoelectric film multi-supporting-beam MEMS gyroscope and preparation method thereof |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2006032895A1 (en) * | 2004-09-25 | 2006-03-30 | European Technology For Business Limited | Gyroscopes and accelerometers |
| CN101281209A (en) * | 2007-04-03 | 2008-10-08 | 索尼株式会社 | Inertial sensor and electrical or electronic device |
| CN101553734A (en) * | 2006-03-27 | 2009-10-07 | 佐治亚科技研究公司 | Capacitive bulk acoustic wave disk gyroscopes |
| CN101846517A (en) * | 2010-06-18 | 2010-09-29 | 中国人民解放军国防科学技术大学 | Cup-shaped harmonic oscillator of cup-shaped fluctuated gyroscope and mechanical balancing method thereof |
| CN102353371A (en) * | 2011-07-22 | 2012-02-15 | 上海交通大学 | Triaxial microgyroscope for capacitance detection through static driving |
| CN102706337A (en) * | 2012-05-07 | 2012-10-03 | 上海交通大学 | Piezoelectric disc micromechanical gyroscope |
| CN103105165A (en) * | 2011-11-10 | 2013-05-15 | 水木智芯科技（北京）有限公司 | Capacitance type three-axis micro gyroscope |
-
2013
- 2013-06-20 CN CN201310245579.3A patent/CN103322995B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2006032895A1 (en) * | 2004-09-25 | 2006-03-30 | European Technology For Business Limited | Gyroscopes and accelerometers |
| CN101553734A (en) * | 2006-03-27 | 2009-10-07 | 佐治亚科技研究公司 | Capacitive bulk acoustic wave disk gyroscopes |
| CN101281209A (en) * | 2007-04-03 | 2008-10-08 | 索尼株式会社 | Inertial sensor and electrical or electronic device |
| CN101846517A (en) * | 2010-06-18 | 2010-09-29 | 中国人民解放军国防科学技术大学 | Cup-shaped harmonic oscillator of cup-shaped fluctuated gyroscope and mechanical balancing method thereof |
| CN102353371A (en) * | 2011-07-22 | 2012-02-15 | 上海交通大学 | Triaxial microgyroscope for capacitance detection through static driving |
| CN103105165A (en) * | 2011-11-10 | 2013-05-15 | 水木智芯科技（北京）有限公司 | Capacitance type three-axis micro gyroscope |
| CN102706337A (en) * | 2012-05-07 | 2012-10-03 | 上海交通大学 | Piezoelectric disc micromechanical gyroscope |
Non-Patent Citations (2)
| Title |
|---|
| 关冉等: "《石英微机械陀螺的研究进展》", 《微纳电子技术》 * |
| 陈文元等: "《MEMS微陀螺仪研究进展》", 《微纳电子技术》 * |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103344230A (en) * | 2013-06-20 | 2013-10-09 | 上海交通大学 | Electrostatically driving electrostatic detection bulk acoustic wave resonance three-axis microgyroscope and manufacturing method thereof |
| CN103344230B (en) * | 2013-06-20 | 2016-04-13 | 上海交通大学 | Electrostatic drives electrostatic detection bulk acoustic resonance three axle microthrust test and preparation method thereof |
| CN103647475A (en) * | 2013-12-16 | 2014-03-19 | 厦门大学 | Wideband piezoelectric vibration energy collecting device |
| CN103647475B (en) * | 2013-12-16 | 2015-08-12 | 厦门大学 | A kind of broadband piezoelectric energy gathering apparatus |
| CN104457725A (en) * | 2014-11-14 | 2015-03-25 | 司红康 | High-sensitivity bulk acoustic wave silicon microgyroscope |
| CN104457725B (en) * | 2014-11-14 | 2017-04-05 | 六安市华海电子器材科技有限公司 | High sensitivity bulk acoustic wave silicon micro-gyroscope |
| CN105783901A (en) * | 2015-01-12 | 2016-07-20 | 波音公司 | Approach for control redistribution of coriolis vibratory gyroscope (cvg) for performance improvement |
| CN106441260A (en) * | 2016-08-23 | 2017-02-22 | 上海交通大学 | On-silicon piezoelectric film multi-supporting-beam MEMS gyroscope and preparation method thereof |
| CN106441260B (en) * | 2016-08-23 | 2020-12-01 | 上海交通大学 | Silicon-on-silicon piezoelectric film multi-supporting-beam MEMS gyroscope and preparation method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103322995B (en) | 2016-04-13 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103344227B (en) | Electrostatic drives piezoelectric detection bulk acoustic resonance three axle microthrust test and preparation method thereof | |
| CN103363970B (en) | Electromagnetic Drive electromagnetic detection bulk acoustic resonance three axle microthrust test and preparation method thereof | |
| CN103322996B (en) | Electromagnetic drive electrostatic detection bodies sound wave resonance three axle microthrust test and preparation method thereof | |
| CN102297690B (en) | Piezoelectricity driven capacitance detecting two-axis gyroscope | |
| CN103322995B (en) | Piezoelectric Driving electrostatic detection bulk acoustic resonance three axle microthrust test and preparation method thereof | |
| CN102353371B (en) | Triaxial microgyroscope for capacitance detection through static driving | |
| CN105004334B (en) | Electromagnetic type hemispherical gyroscope and preparation method thereof outside face | |
| CN111623762B (en) | Annular array type four-mass coupling six-axis micro-inertial sensor and processing method thereof | |
| CN104197909B (en) | A kind of pair of semiglobe miniature resonant gyroscope and preparation method thereof | |
| CN102980565B (en) | Circular ring fluctuation micromechanical gyroscope and preparation method thereof | |
| CN103344230B (en) | Electrostatic drives electrostatic detection bulk acoustic resonance three axle microthrust test and preparation method thereof | |
| CN104807452B (en) | Honeycomb fashion MEMS resonant silicon micro-gyroscope and its processing method | |
| CN104457725B (en) | High sensitivity bulk acoustic wave silicon micro-gyroscope | |
| CN104197910A (en) | Microsphere-based miniature hemispherical resonant gyroscope and manufacturing method thereof | |
| CN104197921A (en) | Pattern-transferred embossed miniature hemispherical resonant gyroscope and manufacturing method thereof | |
| CN105698780B (en) | Micro- hull vibration gyro and preparation method thereof | |
| CN102155944B (en) | Six-axis microtype inertial sensor integrating accelerometer and gyroscope and application method thereof | |
| CN105115486B (en) | The processing method of the axle spherical shell resonance gyroscope of electrostatic suspension three | |
| CN104897146B (en) | Piezoelectric type hemispherical gyroscope and preparation method thereof outside face | |
| CN104897148A (en) | Cellular solid fluctuating micromechanical gyroscope and preparation method thereof | |
| CN102980566B (en) | Conical ring fluctuation micromechanical gyroscope and preparation method thereof | |
| CN102353370B (en) | Piezoelectric driven capacitance detection of micro-solid modal gyroscope | |
| CN102278983A (en) | Silicon micro-gyroscope with triangular oscillator and manufacturing method thereof | |
| CN102679967B (en) | Piezoelectric biaxial micro gyroscope with rocking mass block | |
| CN103575262B (en) | Wave quality and strengthen piezoelectric acoustic solid fluctuation disc micro-gyroscope |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |