CN103322995B - Piezoelectric Driving electrostatic detection bulk acoustic resonance three axle microthrust test and preparation method thereof - Google Patents
Piezoelectric Driving electrostatic detection bulk acoustic resonance three axle microthrust test and preparation method thereof Download PDFInfo
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Abstract
The present invention relates to a kind of Piezoelectric Driving electrostatic detection bulk acoustic resonance three axle microthrust test and preparation method thereof, comprise: a piezo disc oscillator not with release aperture, a columniform support column, be distributed in the drive electrode on disc oscillator, and be distributed in detecting electrode, counter electrode and the public electrode on substrate.Described drive electrode is distributed on described disc oscillator; Described detecting electrode, counter electrode and public electrode to be circumferentially distributed on described substrate and to be positioned at below described disc oscillator, simultaneously parallel with described disc oscillator and have a gap; This gyro utilizes piezoelectric effect to carry out gyro driving.Utilize contactless counter electrode to apply electromotive force to bottom electrode simultaneously, make gyroscope structure obtain optimization.The method for making of this microthrust test adopts MEMS processing technology, and manufacture craft is simple, and reliability is high, can ensure lower cost and higher yield rate.Volume of the present invention is little, and structure is simple, and processing technology is easy to realize, and is applicable to mass production.
Description
Technical field
What the present invention relates to is microthrust test of a kind of field of micro electromechanical technology and preparation method thereof, and specifically, what relate to is a kind ofly utilize three axle gyroscopes with dish type harmonic oscillator of bulk acoustic wave saddle type resonance mode and preparation method thereof.
Background technology
Gyroscope be a kind of can the inertia device of sensitive carrier angle or angular velocity, have very important effect in the field such as gesture stability and navigator fix.Along with science and techniques of defence and Aeronautics and Astronautics industrial expansion, inertial navigation system for gyrostatic requirement also to low cost, small size, high precision, high reliability, the future development of various rugged surroundings can be adapted to.
Through finding the literature search of prior art, (number of patent application: 201020033300.7) utilize MEMS body silicon and bonding technology processes the cantilever beam structure and cavity structure with spring and mass to Chinese patent " double-shaft MEMS gyroscope " on silicon chip.By up and down and side electrode and mass apply the voltage signal of single characteristic frequency, to mass applying electrostatic force, mass is vibrated.When there being extraneous turning rate input, under corioliseffect, vibration can be transferred to another one axle and get on, can the change of detection angle speed by detecting electrode electric capacity.
This technology exists following not enough: this gyroscope adopts the structural model of traditional spring mass block, and the signal sensitivity obtained is not high, and Q value is lower, and drift is excessive, and impact resistance is poor, is difficult to reach high precision.
Summary of the invention
The object of the invention is for the deficiencies in the prior art, a kind of Piezoelectric Driving electrostatic detection bulk acoustic resonance three axle microthrust test and preparation method thereof is provided.This gyro utilizes piezoelectric effect to carry out gyro driving, utilizes contactless counter electrode to apply electromotive force to bottom electrode simultaneously, makes gyroscope structure obtain optimization.This gyro volume is little, and structure is simple, and quality factor are large, and processing technology is easy to realize, can be compatible with CMOS technology, and shock resistance, does not need Vacuum Package, is applicable to mass production.
According to an aspect of the present invention, provide a kind of Piezoelectric Driving electrostatic detection bulk acoustic resonance three axle microthrust test, it comprises: the piezo disc oscillator not with release aperture, columniform support column, substrate, drive electrode, detecting electrode, counter electrode and public electrode.Described disc oscillator is fixed on substrate by described columniform support column, and described disc oscillator is perpendicular to the z-axis of described substrate; Described drive electrode is distributed on described disc oscillator; Described detecting electrode, counter electrode and public electrode to be circumferentially distributed on described substrate and to be positioned at below described disc oscillator, simultaneously parallel with described disc oscillator and have a gap; Described public electrode is distributed between counter electrode and detecting electrode, and described detecting electrode, described counter electrode and described public electrode are according to the cross-circulation distribution that puts in order of two counter electrodes, a public electrode, two detecting electrodes, a public electrode, two counter electrodes.
Preferably, described disc oscillator upper surface distributes described drive electrode, and described disc oscillator lower surface is electric conductor, and fixing on the substrate by described support column.
Preferably, described drive electrode is distributed on described disc oscillator, circumferentially distributes.
Preferably, described detecting electrode, described counter electrode and the gap between described public electrode and described disc oscillator are 2-3 micron.
Preferably, every two adjacent described counter electrodes are one group, apply one group of contrary driving DC voltage signal of equal and opposite in direction symbol respectively.Each is organized described counter electrode and forms an electric capacity, keeps zero potential for the lower surface balancing described disc oscillator.
Preferably, every two adjacent described detecting electrodes are one group, apply one group of contrary driving DC voltage signal of equal and opposite in direction symbol and the contrary one group of AC carrier signal of equal and opposite in direction phase place respectively.Each is organized described drive electrode and forms an electric capacity, drives described disc oscillator to produce sensed-mode for detecting piezoelectric forces.
According to a further aspect in the invention, provide a kind of method for making of above-mentioned microthrust test, its step is as follows:
A () is clean by base-plate cleaning, dry, and in front by photoetching process, sputtering forms metal electrode;
B () be deposition of polysilicon layer on substrate, thickness is 2-3 micron;
C (), by mask, etches polycrystalline silicon layer, retains support column and restraining barrier;
D another piezoelectric substrate cleans up by (), dry, and in front by mask technique, sputtering forms metal electrode;
E () is at piezoelectric substrate back spatter depositing metal layers;
F () cut, utilizes the method for bonding by two pieces of substrate bondings, form the structure of integration.
The present invention utilizes the saddle type resonance mode of disc oscillator as reference vibration, and under this mode, described disc oscillator vibrates along the Z-direction perpendicular to its disc surfaces, simultaneously also can along disk diameter to X-axis and Y direction vibration.When the described disc oscillator of X-direction moves along the Z axis positive dirction perpendicular to its disc surfaces, the described disc oscillator of Y direction moves along the Z axis negative direction perpendicular to its disc surfaces.This motion produces the effect being similar to saddle type, is referred to as " bulk acoustic wave saddle type mode ".By applying driving voltage on described disc oscillator surface drive electrode, piezoelectric signal being applied to described disc oscillator and encourages described disc oscillator to produce driven-mode.Vibration along Z axis is mainly used in the angular velocity of responsive X, Y-axis.When there being the turning rate input of X-axis or the Y-axis being parallel to described disc oscillator surface, under corioliseffect, described disc oscillator is subject to the effect of a turning moment, and described disc oscillator can rotate along perpendicular to Z-direction around described columniform support column.Wherein, the angular dimension of rotation is directly proportional with the size of input angle.Radially the vibration of X, Y-axis is mainly used in the angular velocity of responsive Z axis.When there being the turning rate input perpendicular to the Z axis on described disc oscillator surface, under corioliseffect, described disc oscillator is subject to a turning moment effect, and described disc oscillator can rotate along perpendicular to Z-direction around described columniform support column.Capacitance size now near described detecting electrode can change, and by applying carrier signal on described detecting electrode, and carrier signal is extracted from described public electrode.Carrier signal can obtain the size variation of electric capacity near described detecting electrode by demodulation, namely can detect the anglec of rotation perpendicular to described disc oscillator, and then tries to achieve the turning rate input size of three axles.
Compared with prior art, the present invention has following beneficial effect:
The present invention utilizes bulk acoustic wave saddle type resonance mode to adopt the disc oscillator had not with release aperture, and structure is simple, and symmetry is good.Counter electrode, detecting electrode and public electrode are micron order with the gap of disc oscillator, utilize bonding technology to complete, and processes is easy to realize.Disc oscillator lower surface is without receiving electrode, but the counter electrode signal utilizing one group of size same-sign contrary is to keep its zero potential, and is detected by carrier signal, decreases the complicacy of processing technology.The present invention utilizes the vibration under bulk acoustic wave saddle type resonance mode to vibrate as reference, utilize disc oscillator with the capacitance variations between detecting electrode as detection signal, the carrier wave output signal extracted by process public electrode, can detect the size of three input shaft input angular velocities accurately.The present invention adopts MEMS processing technology, and manufacture craft is simple, and reliability is high, can ensure lower cost and higher yield rate.
Accompanying drawing explanation
By reading the detailed description done non-limiting example with reference to the following drawings, other features, objects and advantages of the present invention will become more obvious:
Fig. 1 is the schematic diagram of structure of the present invention.
Fig. 2 is the 3 dimensional drawing of structure of the present invention.
Fig. 3 is the left view of structure of the present invention.
Fig. 4 is the bulk acoustic wave saddle type resonance mode schematic diagram of disc oscillator in the present invention.
Fig. 5 is the driven-mode schematic diagram of disc oscillator in the present invention.
Fig. 6 is the sensed-mode schematic diagram of disc oscillator in the present invention.
In figure: 1 disc oscillator, 2 support columns, 3 substrates, 4 drive electrodes, 5 detecting electrodes, 6 counter electrodes, 7 public electrodes.
Embodiment
Below in conjunction with specific embodiment, the present invention is described in detail.Following examples will contribute to those skilled in the art and understand the present invention further, but not limit the present invention in any form.It should be pointed out that to those skilled in the art, without departing from the inventive concept of the premise, some distortion and improvement can also be made.These all belong to protection scope of the present invention.
As shown in Figure 1, Figure 2, Figure 3 shows, the present embodiment comprises:
A piezo disc oscillator 1 not with release aperture;
Be positioned at RC support column 2 below described disc oscillator 1;
Substrate 3;
Be positioned at the drive electrode 4 on described disc oscillator 1;
With the detecting electrode 5 be positioned on substrate 3, counter electrode 6 and public electrode 7;
Described detecting electrode 5, counter electrode 6 and public electrode 7 to be circumferentially distributed on described substrate 3 and to be positioned at below described disc oscillator 1, simultaneously parallel with described disc oscillator 1 and have a gap.
In the present embodiment, described disc oscillator 1 is made by piezoelectric to form, and upper surface distributes described drive electrode 4, and described disc oscillator 1 lower surface is electric conductor, and fixing on the substrate 3 by described support column 2.
Oscillator lower surface plated metal conductive layer, and fixing on the substrate 3 by support column 2.
In the present embodiment, described drive electrode 4 totally eight, is distributed in the upper surface of piezo disc oscillator 1, circumferentially distributes.Drive electrode applying alternating current drive signal and produce piezoelectric forces, producing driven-mode for encouraging disc oscillator.
In the present embodiment, described detecting electrode 5, described counter electrode 6 and described public electrode 7 are distributed in below the described disc oscillator 1 perpendicular to the z-axis of described substrate 3, are positioned on described substrate 3, circumferentially distribute.Described detecting electrode 5, described counter electrode 6 and described public electrode 7 and the gap stated between piezo disc oscillator 1 are 2-3 micron, according to counter electrode, counter electrode 6, public electrode 7, detecting electrode, detecting electrode 5, public electrode 7, counter electrode, counter electrode 6, public electrode 7, detecting electrode, detecting electrode 5, public electrode 7 ... cross-circulation distributes.
In the present embodiment, it is four right that described counter electrode 6 has, and lays respectively at the positive negative direction of X-axis and the positive negative direction of Y-axis.Often pair of described counter electrode 6 applies respectively one group of driving DC voltage signal that equal and opposite in direction symbol is contrary.Counter electrode described in every a pair forms an electric capacity, keeps zero potential for the lower surface balancing described disc oscillator.
In the present embodiment, it is four right that described detecting electrode 5 has, and laying respectively at described counter electrode 6 has 45° angle degree poor.The often pair of described detecting electrode 5 applies one group of contrary driving DC voltage signal of equal and opposite in direction symbol and the contrary one group of AC carrier signal of equal and opposite in direction phase place respectively.Each is organized described detecting electrode and forms an electric capacity, drives described disc oscillator to produce sensed-mode for detecting piezoelectric forces.
In the present embodiment, described public electrode 7 has eight, lays respectively between often pair of described counter electrode 6 and detecting electrode 5, and all links together between described public electrode 7.Described public electrode 7 for extracting the carrier signal detected on described detecting electrode 5, and by subsequent conditioning circuit, obtains Detection capacitance size.
As shown in Figure 4, obtained the bulk acoustic wave saddle type resonance mode of described disc oscillator by the method for finite element analysis, under this mode, described disc oscillator vibrates along the Z-direction perpendicular to described disc oscillator 1 surface.When the described disc oscillator 1 of X-direction moves along the Z axis positive dirction perpendicular to described disc oscillator surface, the described disc oscillator 1 of Y direction moves along the Z axis negative direction perpendicular to described disc oscillator surface.
As shown in Figure 5, Figure 6, by applying driving voltage on the described drive electrode 4 of piezo disc oscillator 1 upper surface, piezoelectric forces being applied to described disc oscillator 1 and encourages described disc oscillator 1 to produce driven-mode.Vibration along Z axis is mainly used in the angular velocity of responsive X, Y-axis.When there being the turning rate input of X-axis or the Y-axis being parallel to described disc oscillator 1 surface, under corioliseffect, described disc oscillator 1 is subject to the effect of a turning moment, and described disc oscillator 1 can along rotating around described columniform support column 2 perpendicular to Z-direction.Wherein, the angular dimension of rotation is directly proportional with the size of input angle.Radially the vibration of X, Y-axis is mainly used in the angular velocity of responsive Z axis.When there being the turning rate input perpendicular to the Z axis on described disc oscillator 1 surface, under corioliseffect, described disc oscillator 1 is subject to a turning moment effect, and described disc oscillator 1 can rotate along described columniform support column 2.Capacitance size now near described detecting electrode 5 can change, and by applying carrier signal on described detecting electrode 5, and carrier signal is extracted from described public electrode 7.Carrier signal can obtain the size variation of electric capacity near described detecting electrode 5 by demodulation, namely can detect the anglec of rotation perpendicular to described disc oscillator 1, and then tries to achieve the turning rate input size of three axles.
The present embodiment relates to the preparation technology of microthrust test, mainly comprises following step:
A () is clean by base-plate cleaning, dry, and in front by photoetching process, sputtering forms metal electrode;
B () be deposition of polysilicon layer on substrate, thickness is 2-3 micron;
C (), by mask, etches polycrystalline silicon layer, retains support column and restraining barrier;
D another piezoelectric substrate cleans up by (), dry, and in front by mask technique, sputtering forms metal electrode;
E () is at piezoelectric substrate back spatter depositing metal layers;
F () cut, utilizes the method for bonding by two pieces of substrate bondings, form the structure of integration.
The present invention utilizes bulk acoustic wave saddle type resonance mode to adopt the disc oscillator had not with release aperture, and structure is simple, and symmetry is good.Counter electrode, detecting electrode and public electrode are micron order with the gap of disc oscillator, utilize bonding technology to complete, and processes is easy to realize.Disc oscillator lower surface is without receiving electrode, but the counter electrode signal utilizing one group of size same-sign contrary is to keep its zero potential, and is detected by carrier signal, decreases the complicacy of processing technology.The present invention utilizes the vibration under bulk acoustic wave saddle type resonance mode to vibrate as reference, utilize disc oscillator with the capacitance variations between detecting electrode as detection signal, the carrier wave output signal extracted by process public electrode, can detect the size of three input shaft input angular velocities accurately.The present invention adopts MEMS processing technology, and manufacture craft is simple, and reliability is high, can ensure lower cost and higher yield rate.
Above specific embodiments of the invention are described.It is to be appreciated that the present invention is not limited to above-mentioned particular implementation, those skilled in the art can make various distortion or amendment within the scope of the claims, and this does not affect flesh and blood of the present invention.
Claims (8)
1. a Piezoelectric Driving electrostatic detection bulk acoustic resonance three axle microthrust test, is characterized in that comprising: the piezo disc oscillator not with release aperture, columniform support column, substrate, drive electrode, detecting electrode, counter electrode and public electrode; Described disc oscillator is fixed on substrate by described columniform support column, and described disc oscillator is perpendicular to the z-axis of described substrate; Described drive electrode is distributed on described disc oscillator; Described detecting electrode, counter electrode and public electrode to be circumferentially distributed on described substrate and to be positioned at below described disc oscillator, simultaneously parallel with described disc oscillator and have a gap; Described public electrode is distributed between counter electrode and detecting electrode, and described detecting electrode, described counter electrode and described public electrode are according to the cross-circulation distribution that puts in order of two counter electrodes, a public electrode, two detecting electrodes, a public electrode, two counter electrodes.
2. Piezoelectric Driving electrostatic detection bulk acoustic resonance three axle microthrust test according to claim 1, it is characterized in that: described disc oscillator upper surface distributes described drive electrode, described disc oscillator lower surface is electric conductor, and fixing on the substrate by described support column.
3. Piezoelectric Driving electrostatic detection bulk acoustic resonance three axle microthrust test according to claim 1, is characterized in that: described drive electrode is distributed on piezo disc oscillator, circumferentially distributes.
4. Piezoelectric Driving electrostatic detection bulk acoustic resonance three axle microthrust test according to claim 1, is characterized in that: described detecting electrode, described counter electrode and the gap between described public electrode and described disc oscillator are 2-3 micron.
5. Piezoelectric Driving electrostatic detection bulk acoustic resonance three axle microthrust test according to claim 1, it is characterized in that: every two adjacent described counter electrodes are one group, apply one group of contrary driving DC voltage signal of equal and opposite in direction symbol respectively, each is organized described counter electrode and forms an electric capacity, for balancing the electromotive force of described disc oscillator lower surface, described disc oscillator lower surface is made to keep zero potential.
6. Piezoelectric Driving electrostatic detection bulk acoustic resonance three axle microthrust test according to claim 1, it is characterized in that: every two adjacent described detecting electrodes are one group, apply one group of contrary driving DC voltage signal of equal and opposite in direction symbol and the contrary one group of ac-excited signal of equal and opposite in direction phase place respectively, each is organized described drive electrode and forms an electric capacity, drives described disc oscillator to produce sensed-mode for detecting piezoelectric forces.
7. the Piezoelectric Driving electrostatic detection bulk acoustic resonance three axle microthrust test according to any one of claim 1-6, it is characterized in that: described gyro utilizes the saddle type resonance mode of disc oscillator as reference vibration, under this mode, described disc oscillator vibrates along the Z-direction perpendicular to its disc surfaces, simultaneously also can along disk diameter to X-axis and Y direction vibration, when the described disc oscillator of X-direction moves along the Z axis positive dirction perpendicular to its disc surfaces, the described disc oscillator of Y direction moves along the Z axis negative direction perpendicular to its disc surfaces, by applying driving voltage on described disc oscillator surface drive electrode, piezoelectric signal being applied to described disc oscillator and encourages described disc oscillator to produce driven-mode, when there being the turning rate input of X-axis or the Y-axis being parallel to described disc oscillator surface, under corioliseffect, described disc oscillator is subject to the effect of a turning moment, described disc oscillator can rotate along perpendicular to Z-direction around described columniform support column, wherein, the angular dimension of rotation is directly proportional with the size of input angle, when there being the turning rate input perpendicular to the Z axis on described disc oscillator surface, under corioliseffect, described disc oscillator is subject to a turning moment effect, described disc oscillator can rotate along perpendicular to Z-direction around described columniform support column, capacitance size now near described detecting electrode can change, by applying carrier signal on described detecting electrode, and from described public electrode, carrier signal is extracted, carrier signal obtains the size variation of electric capacity near described detecting electrode by demodulation, namely the anglec of rotation perpendicular to described disc oscillator is detected, and then try to achieve the turning rate input size of three axles.
8. a preparation method for the Piezoelectric Driving electrostatic detection bulk acoustic resonance three axle microthrust test as described in any one of claim 1-7, is characterized in that comprising the steps:
A () is clean by base-plate cleaning, dry, and in front by photoetching process, sputtering forms metal electrode;
B () be deposition of polysilicon layer on substrate, thickness is 2-3 micron;
C (), by mask, etches polycrystalline silicon layer, retains support column and restraining barrier;
D another piezoelectric substrate cleans up by (), dry, and in front by mask technique, sputtering forms metal electrode;
E () is at piezoelectric substrate back spatter depositing metal layers;
F () cut, utilizes the method for bonding by two pieces of substrate bondings, form the structure of integration.
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| CN103344230B (en) * | 2013-06-20 | 2016-04-13 | 上海交通大学 | Electrostatic drives electrostatic detection bulk acoustic resonance three axle microthrust test and preparation method thereof |
| CN103647475B (en) * | 2013-12-16 | 2015-08-12 | 厦门大学 | A kind of broadband piezoelectric energy gathering apparatus |
| CN104457725B (en) * | 2014-11-14 | 2017-04-05 | 六安市华海电子器材科技有限公司 | High sensitivity bulk acoustic wave silicon micro-gyroscope |
| US9709399B2 (en) * | 2015-01-12 | 2017-07-18 | The Boeing Company | Approach for control redistribution of coriolis vibratory gyroscope (CVG) for performance improvement |
| CN106441260B (en) * | 2016-08-23 | 2020-12-01 | 上海交通大学 | Silicon-on-silicon piezoelectric film multi-supporting-beam MEMS gyroscope and preparation method thereof |
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