CN114543782B - Micromechanical gyroscope structure with attitude correction function and built-in correction electrode - Google Patents
Micromechanical gyroscope structure with attitude correction function and built-in correction electrode Download PDFInfo
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- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
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Abstract
The invention relates to a micromechanical vibration gyroscope, in particular to a micromechanical gyroscope structure with an attitude correction function and a built-in correction electrode. The invention solves the problem of larger attitude error of the existing micromechanical vibration gyroscope. A micromechanical gyroscope structure with posture correction function and built-in correction electrode comprises a glass substrate, an electrode part and a harmonic oscillator part; the electrode part comprises a square electrode layer bonded on the upper surface of the glass substrate; the resonance sub-part comprises a cylindrical central anchor point bonded on the upper surface of the glass substrate, a circular ring resonance mass placed on the upper surface of the glass substrate, and eight spoke-shaped elastic support suspension beams which are distributed around the axis of the cylindrical central anchor point at equal angular intervals. The invention is suitable for the fields of weapon guidance, aerospace, biomedicine, consumer electronics and the like.
Description
Technical Field
The invention relates to a micromechanical vibration gyroscope, in particular to a micromechanical gyroscope structure with an attitude correction function and a built-in correction electrode.
Background
The micromechanical vibration gyroscope is an angular velocity sensitive device based on the Coriolis effect, has the advantages of small volume, light weight, low power consumption, long service life, batch production, low price and the like, is widely applied to the fields of weapon guidance, aerospace, biomedicine, consumer electronics and the like, and has extremely wide application prospect. The specific working principle of the micromechanical vibrating gyroscope is as follows: when no angular velocity is input, the harmonic oscillator of the micromechanical vibration gyroscope works in a driving mode, and the output of the micromechanical vibration gyroscope is zero. When the angular speed is input, the harmonic oscillator of the micromechanical vibration gyroscope works in the detection mode, and the micromechanical vibration gyroscope detects the input angular speed in real time. However, in actual operation, the existing micromechanical vibrating gyroscope generates an axial rotation error in the processing process, so that the point of the harmonic oscillator, which is acted by electrostatic force, deviates from an ideal position, and the attitude error is large. Therefore, it is necessary to invent a micro-mechanical gyroscope structure with an attitude correction function and built-in correction electrodes to solve the problem of large attitude error of the existing micro-mechanical vibration gyroscope.
Disclosure of Invention
The invention provides a micromechanical gyroscope structure with an attitude correction function and a built-in correction electrode, which aims to solve the problem of larger attitude error of the existing micromechanical vibration gyroscope.
The invention is realized by adopting the following technical scheme:
a micromechanical gyroscope structure with an attitude correction function and a built-in correction electrode comprises a glass substrate, an electrode part and a harmonic oscillator part;
the electrode part comprises a square electrode layer bonded on the upper surface of the glass substrate;
a central circular hole is formed between the center of the upper surface and the center of the lower surface of the square electrode layer in a penetrating manner; eight wedge-shaped radial isolation gaps which are distributed around the axis of the central round hole at equal angular intervals are arranged between the upper surface and the lower surface of the square electrode layer in a penetrating manner; the width of each wedge-shaped radial isolation gap is gradually increased from inside to outside, the inner end of each wedge-shaped radial isolation gap is communicated with the central circular hole, and the outer end of each wedge-shaped radial isolation gap penetrates through the side face of the square electrode layer; the eight wedge-shaped radial isolation gaps and the central round hole jointly divide the square electrode layer into eight wedge-shaped electrode layers; the shape of the first wedge-shaped electrode layer, the shape of the third wedge-shaped electrode layer, the shape of the fifth wedge-shaped electrode layer and the shape of the seventh wedge-shaped electrode layer are all consistent; the shape of the second wedge-shaped electrode layer, the shape of the fourth wedge-shaped electrode layer, the shape of the sixth wedge-shaped electrode layer and the shape of the eighth wedge-shaped electrode layer are all consistent;
a circumferential isolation gap, a rounded rectangular hole, a radial isolation gap A, a radial isolation gap B and a pair of oblique isolation gaps are respectively arranged between the upper surface and the lower surface of each wedge-shaped electrode layer in a penetrating manner; two ends of the circumferential isolation gap are respectively communicated with two adjacent wedge-shaped radial isolation gaps; the round-corner rectangular hole is positioned on the inner side of the circumferential isolation gap; two ends of the radial isolation gap A are respectively communicated with the central round hole and the round-corner rectangular hole; two ends of the radial isolation gap B are respectively communicated with the round-corner rectangular hole and the circumferential isolation gap; the pair of oblique isolation gaps are symmetrically distributed on two sides of the radial isolation gap B; the head ends of the pair of oblique isolation gaps are communicated with the outer end of the radial isolation gap B; the tail ends of the oblique isolation gaps are respectively communicated with the two adjacent wedge-shaped radial isolation gaps; the wedge-shaped electrode layer is divided into a pair of symmetrical correction electrodes, a pair of symmetrical control electrodes and a pair of measuring electrodes by the circumferential isolation gap, the round-corner rectangular hole, the radial isolation gap A, the radial isolation gap B and the pair of oblique isolation gaps; the pair of control electrodes are respectively positioned at the outer sides of the pair of correction electrodes; the measuring electrode is positioned at the outer side of the pair of control electrodes;
a measuring electrode corresponding to the first wedge-shaped electrode layer, a measuring electrode corresponding to the third wedge-shaped electrode layer, a measuring electrode corresponding to the fifth wedge-shaped electrode layer and a measuring electrode corresponding to the seventh wedge-shaped electrode layer are all used as driving mode displacement measuring electrodes; a measuring electrode corresponding to the second wedge-shaped electrode layer, a measuring electrode corresponding to the fourth wedge-shaped electrode layer, a measuring electrode corresponding to the sixth wedge-shaped electrode layer and a measuring electrode corresponding to the eighth wedge-shaped electrode layer are all used as detection mode displacement measuring electrodes;
the resonance part comprises a cylindrical central anchor point bonded on the upper surface of the glass substrate, a circular resonance mass placed on the upper surface of the glass substrate, and eight spoke-shaped elastic support suspension beams which are distributed around the axis of the cylindrical central anchor point at equal angular intervals;
the cylindrical central anchor point is coaxially arranged in the central circular hole;
the annular resonance mass is arranged in the eight circumferential isolation gaps simultaneously;
each spoke-shaped elastic supporting suspension beam is composed of a pair of U-shaped beam sections, a radial beam section A and a radial beam section B; the pair of U-shaped beam sections are enclosed together to form a closed round-corner rectangle, and the pair of U-shaped beam sections are arranged in the corresponding round-corner rectangle holes; the inner end of the radial beam section A is fixed with the side surface of the cylindrical central anchor point, the outer end of the radial beam section A is fixed with the head ends of the pair of U-shaped beam sections respectively, and the radial beam section A is arranged in the corresponding radial isolation gap A; the inner ends of the radial beam sections B are respectively fixed with the tail ends of the U-shaped beam sections, the outer ends of the radial beam sections B are fixed with the inner side surfaces of the circular resonance masses, and the radial beam sections B are arranged in the corresponding radial isolation gaps B;
the opposite surfaces of each pair of correction electrodes and the two outer side surfaces of the corresponding spoke-shaped elastic support suspension beams form a pair of micro capacitors A; eight pairs of micro-capacitors A are used as eight pairs of correction capacitors; the outer side surfaces of the eight pairs of control electrodes and the inner side surface of the circular resonance mass form eight pairs of micro capacitors B; four pairs of micro capacitors B corresponding to the four driving mode displacement measuring electrodes are used as four pairs of driving mode exciting capacitors, and four pairs of micro capacitors B corresponding to the four detection mode displacement measuring electrodes are used as four pairs of detection mode feedback capacitors; the inner side surfaces of the eight measuring electrodes and the outer side surface of the circular ring-shaped resonance mass jointly form eight micro-capacitors C.
When the device works, the eight pairs of correction electrodes, the eight pairs of control electrodes, the four driving mode displacement measuring electrodes and the four detection mode displacement measuring electrodes are all connected with a control system through metal leads. The specific working process is as follows: firstly, the control system determines a deviation angle between an action point of electrostatic force on the harmonic oscillator and an ideal position by detecting the distance between eight pairs of correction capacitors, and generates a correction voltage signal according to the deviation angle, and the correction voltage signal is transmitted to the eight pairs of correction capacitors through a metal wire, so that the action point of the electrostatic force on the harmonic oscillator rotates to the ideal position (the rotation angle is equal to the deviation angle) under the action of the electrostatic force. Then, the control system generates a driving voltage signal, and the driving voltage signal is transmitted to four pairs of driving mode excitation capacitors through metal wires, so that the circular ring-shaped resonant mass can maintain the circular ring to vibrate in four antinodes with the wave number of 2 under the action of electrostatic force. In the vibration process, the control system measures the displacement of the circular ring-shaped resonance mass in real time through the four drive mode displacement measurement electrodes and controls the drive voltage signal in real time according to the measurement result, so that the displacement amplitude of the circular ring-shaped resonance mass keeps constant on one hand, and the circular ring-shaped resonance mass vibrates on the resonance frequency point of the circular ring-shaped resonance mass on the other hand. When no angular velocity is input, the circular resonance mass is excited by four pairs of driving mode exciting capacitors to perform in-plane four-antinode bending vibration in the driving mode, and at the moment, the four detection mode displacement measurement electrodes are located at nodes of the four-antinode bending vibration, and no detection voltage signal is generated by the four detection mode displacement measurement electrodes. At this point, the output of the present invention is zero. When angular velocity is input, the annular resonance mass conducts in-plane four-antinode bending vibration in a detection mode under the coupling effect of the Coriolis force, at the moment, the four detection mode displacement measurement electrodes are located at antinodes of the four-antinode bending vibration, the four detection mode displacement measurement electrodes all generate detection voltage signals, and the detection voltage signals are related to the input angular velocity. At this time, the control system calculates the input angular velocity in real time based on the detected voltage signal. In the process, four pairs of detection mode feedback capacitors are used for controlling the circular ring resonance quality.
Based on the above process, the micromechanical gyroscope structure with the attitude correction function and the built-in correction electrode according to the invention realizes the attitude correction of the harmonic oscillator by adopting a brand new structure (namely, the harmonic oscillator is rotated to an ideal position under the action of electrostatic force by using a correction voltage signal under the action of the electrostatic force), thereby effectively reducing the attitude error.
The invention has reasonable structure and ingenious design, effectively solves the problem of larger attitude error of the existing micromechanical vibration gyroscope, and is suitable for the fields of weapon guidance, aerospace, biomedicine, consumer electronics and the like.
Drawings
Fig. 1 is a schematic structural view of the present invention.
Fig. 2 is a partial structural schematic diagram of the present invention.
Fig. 3 is a partial structural schematic diagram of the present invention.
In the figure: 11-correction electrode, 12-control electrode, 13-drive mode displacement measuring electrode, 14-detection mode displacement measuring electrode, 21-cylindrical center anchor point, 22-circular ring resonance mass, 23-spoke elastic support suspension beam, 231-U-shaped beam section, 232-radial beam section A and 233-radial beam section B.
Detailed Description
A micromechanical gyroscope structure with an attitude correction function and a built-in correction electrode comprises a glass substrate, an electrode part and a harmonic oscillator part;
the electrode part comprises a square electrode layer bonded on the upper surface of the glass substrate;
a central circular hole is formed between the center of the upper surface and the center of the lower surface of the square electrode layer in a penetrating manner; eight wedge-shaped radial isolation gaps which are distributed around the axis of the central round hole at equal angular intervals are arranged between the upper surface and the lower surface of the square electrode layer in a penetrating manner; the width of each wedge-shaped radial isolation gap is gradually increased from inside to outside, the inner end of each wedge-shaped radial isolation gap is communicated with the central circular hole, and the outer end of each wedge-shaped radial isolation gap penetrates through the side face of the square electrode layer; the eight wedge-shaped radial isolation gaps and the central round hole jointly divide the square electrode layer into eight wedge-shaped electrode layers; the shape of the first wedge-shaped electrode layer, the shape of the third wedge-shaped electrode layer, the shape of the fifth wedge-shaped electrode layer and the shape of the seventh wedge-shaped electrode layer are all consistent; the shape of the second wedge-shaped electrode layer, the shape of the fourth wedge-shaped electrode layer, the shape of the sixth wedge-shaped electrode layer and the shape of the eighth wedge-shaped electrode layer are all consistent;
a circumferential isolation gap, a rounded rectangular hole, a radial isolation gap A, a radial isolation gap B and a pair of oblique isolation gaps are respectively arranged between the upper surface and the lower surface of each wedge-shaped electrode layer in a penetrating manner; two ends of the circumferential isolation gap are respectively communicated with two adjacent wedge-shaped radial isolation gaps; the round-corner rectangular hole is positioned on the inner side of the circumferential isolation gap; two ends of the radial isolation gap A are respectively communicated with the central round hole and the round-corner rectangular hole; two ends of the radial isolation gap B are respectively communicated with the round-corner rectangular hole and the circumferential isolation gap; the pair of oblique isolation gaps are symmetrically distributed on two sides of the radial isolation gap B; the head ends of the pair of oblique isolation gaps are communicated with the outer end of the radial isolation gap B; the tail ends of the oblique isolation gaps are respectively communicated with the two adjacent wedge-shaped radial isolation gaps; the wedge-shaped electrode layer is divided into a pair of symmetrical correction electrodes 11, a pair of symmetrical control electrodes 12 and a measuring electrode by a circumferential isolation gap, a round-corner rectangular hole, a radial isolation gap A, a radial isolation gap B and a pair of oblique isolation gaps; the pair of control electrodes 12 are respectively positioned outside the pair of correction electrodes 11; the measuring electrodes are positioned outside the pair of control electrodes 12;
a measuring electrode corresponding to the first wedge-shaped electrode layer, a measuring electrode corresponding to the third wedge-shaped electrode layer, a measuring electrode corresponding to the fifth wedge-shaped electrode layer and a measuring electrode corresponding to the seventh wedge-shaped electrode layer are all used as driving mode displacement measuring electrodes 13; a measuring electrode corresponding to the second wedge-shaped electrode layer, a measuring electrode corresponding to the fourth wedge-shaped electrode layer, a measuring electrode corresponding to the sixth wedge-shaped electrode layer and a measuring electrode corresponding to the eighth wedge-shaped electrode layer are all used as detection mode displacement measuring electrodes 14;
the resonance sub-part comprises a cylindrical central anchor point 21 bonded on the upper surface of the glass substrate, a circular ring-shaped resonance mass 22 placed on the upper surface of the glass substrate, and eight spoke-shaped elastic support suspension beams 23 which are distributed around the axis of the cylindrical central anchor point 21 at equal angular intervals;
the cylindrical central anchor point 21 is coaxially arranged in the central circular hole;
the annular resonance mass 22 is arranged in the eight circumferential isolation gaps simultaneously;
each spoke-shaped elastic supporting suspension beam 23 consists of a pair of U-shaped beam sections 231, a radial beam section A232 and a radial beam section B233; the pair of U-shaped beam sections 231 jointly enclose to form a closed rounded rectangle, and the pair of U-shaped beam sections 231 are arranged in the corresponding rounded rectangular holes; the inner end of the radial beam section A232 is fixed with the side surface of the cylindrical central anchor point 21, the outer end of the radial beam section A232 is fixed with the head ends of the pair of U-shaped beam sections 231 respectively, and the radial beam section A232 is arranged in the corresponding radial isolation gap A; the inner ends of the radial beam sections B233 are respectively fixed with the tail ends of the U-shaped beam sections 231, the outer ends of the radial beam sections B233 are fixed with the inner side faces of the circular ring-shaped resonance masses 22, and the radial beam sections B233 are arranged in the corresponding radial isolation gaps B;
the opposite surfaces of each pair of correction electrodes 11 and the two outer side surfaces of the corresponding spoke-shaped elastic support suspension beams 23 form a pair of micro capacitors A; eight pairs of micro-capacitors A are used as eight pairs of correction capacitors; the outer side surfaces of the eight pairs of control electrodes 12 and the inner side surface of the annular resonance mass 22 form eight pairs of micro capacitors B; wherein, four pairs of micro-capacitors B corresponding to the four driving mode displacement measuring electrodes 13 are used as four pairs of driving mode excitation capacitors, and four pairs of micro-capacitors B corresponding to the four detection mode displacement measuring electrodes 14 are used as four pairs of detection mode feedback capacitors; the inner sides of the eight measuring electrodes and the outer side of the circular resonance mass 22 together form eight micro-capacitors C.
The sizes of the eight pairs of correction electrodes 11 are consistent; the eight pairs of control electrodes 12 are of uniform size; the sizes of the four driving mode displacement measuring electrodes 13 are consistent; the four detection mode displacement measurement electrodes 14 are consistent in size; the height of the cylindrical central anchor point 21, the height of the annular resonant mass 22 and the height of the eight spoke-shaped elastic support suspension beams 23 are all consistent.
The cylindrical center anchor point 21, the annular resonance mass 22 and the eight spoke-shaped elastic support suspension beams 23 are all formed by machining monocrystalline silicon wafers, and the cylindrical center anchor point 21, the annular resonance mass 22 and the eight spoke-shaped elastic support suspension beams 23 are manufactured into a whole by adopting a bulk silicon machining process.
While specific embodiments of the invention have been described above, it will be understood by those skilled in the art that these are by way of example only, and that the scope of the invention is defined by the appended claims. Various changes and modifications to these embodiments may be made by those skilled in the art without departing from the spirit and scope of the invention, and these changes and modifications are within the scope of the invention.
Claims (3)
1. A micromechanical gyroscope structure with an attitude correction function and a built-in correction electrode is characterized in that: comprises a glass substrate, an electrode part and a harmonic oscillator part;
the electrode part comprises a square electrode layer bonded on the upper surface of the glass substrate;
a central circular hole is formed between the center of the upper surface and the center of the lower surface of the square electrode layer in a penetrating manner; eight wedge-shaped radial isolation gaps which are distributed around the axis of the central round hole at equal angular intervals are arranged between the upper surface and the lower surface of the square electrode layer in a penetrating manner; the width of each wedge-shaped radial isolation gap is gradually increased from inside to outside, the inner end of each wedge-shaped radial isolation gap is communicated with the central circular hole, and the outer end of each wedge-shaped radial isolation gap penetrates through the side face of the square electrode layer; the eight wedge-shaped radial isolation gaps and the central round hole jointly divide the square electrode layer into eight wedge-shaped electrode layers; the shape of the first wedge-shaped electrode layer, the shape of the third wedge-shaped electrode layer, the shape of the fifth wedge-shaped electrode layer and the shape of the seventh wedge-shaped electrode layer are all consistent; the shape of the second wedge-shaped electrode layer, the shape of the fourth wedge-shaped electrode layer, the shape of the sixth wedge-shaped electrode layer and the shape of the eighth wedge-shaped electrode layer are all consistent;
a circumferential isolation gap, a round-corner rectangular hole, a radial isolation gap A, a radial isolation gap B and a pair of oblique isolation gaps are respectively arranged between the upper surface and the lower surface of each wedge-shaped electrode layer in a penetrating manner; two ends of the circumferential isolation gap are respectively communicated with two adjacent wedge-shaped radial isolation gaps; the round-corner rectangular hole is positioned on the inner side of the circumferential isolation gap; two ends of the radial isolation gap A are respectively communicated with the central round hole and the round-corner rectangular hole; two ends of the radial isolation gap B are respectively communicated with the round-corner rectangular hole and the circumferential isolation gap; the pair of oblique isolation gaps are symmetrically distributed on two sides of the radial isolation gap B; the head ends of the pair of oblique isolation gaps are communicated with the outer end of the radial isolation gap B; the tail ends of the oblique isolation gaps are respectively communicated with the two adjacent wedge-shaped radial isolation gaps; the wedge-shaped electrode layer is divided into a pair of symmetrical correction electrodes (11), a pair of symmetrical control electrodes (12) and a measuring electrode by a circumferential isolation gap, a round-corner rectangular hole, a radial isolation gap A, a radial isolation gap B and a pair of oblique isolation gaps; the pair of control electrodes (12) are respectively positioned at the outer sides of the pair of correction electrodes (11); the measuring electrodes are positioned outside the pair of control electrodes (12);
a measuring electrode corresponding to the first wedge-shaped electrode layer, a measuring electrode corresponding to the third wedge-shaped electrode layer, a measuring electrode corresponding to the fifth wedge-shaped electrode layer and a measuring electrode corresponding to the seventh wedge-shaped electrode layer are all used as driving mode displacement measuring electrodes (13); a measuring electrode corresponding to the second wedge-shaped electrode layer, a measuring electrode corresponding to the fourth wedge-shaped electrode layer, a measuring electrode corresponding to the sixth wedge-shaped electrode layer and a measuring electrode corresponding to the eighth wedge-shaped electrode layer are all used as detection mode displacement measuring electrodes (14);
the resonance sub-part comprises a cylindrical central anchor point (21) bonded on the upper surface of the glass substrate, a circular ring-shaped resonance mass (22) placed on the upper surface of the glass substrate, and eight spoke-shaped elastic support suspension beams (23) which are distributed around the axis of the cylindrical central anchor point (21) at equal angular intervals;
the cylindrical central anchor point (21) is coaxially arranged in the central round hole;
the annular resonance masses (22) are arranged in the eight circumferential isolation gaps simultaneously;
each spoke-shaped elastic supporting suspension beam (23) is composed of a pair of U-shaped beam sections (231), a radial beam section A (232) and a radial beam section B (233); the pair of U-shaped beam sections (231) are enclosed together to form a closed round-corner rectangle, and the pair of U-shaped beam sections (231) are arranged in the corresponding round-corner rectangle holes; the inner end of the radial beam section A (232) is fixed with the side surface of the cylindrical central anchor point (21), the outer end of the radial beam section A is fixed with the head ends of the pair of U-shaped beam sections (231), and the radial beam section A (232) is arranged in the corresponding radial isolation gap A; the inner ends of the radial beam sections B (233) are respectively fixed with the tail ends of the U-shaped beam sections (231), the outer ends of the radial beam sections B (233) are fixed with the inner side faces of the circular ring-shaped resonance masses (22), and the radial beam sections B (233) are arranged in the corresponding radial isolation gaps B;
the opposite surfaces of each pair of correction electrodes (11) and the two outer side surfaces of the corresponding spoke-shaped elastic support suspension beams (23) form a pair of micro capacitors A together; eight pairs of micro capacitors A are used as eight pairs of correction capacitors; the outer side surfaces of the eight pairs of control electrodes (12) and the inner side surface of the annular resonance mass (22) jointly form eight pairs of micro capacitors B; four pairs of micro capacitors B corresponding to the four driving mode displacement measuring electrodes (13) are used as four pairs of driving mode exciting capacitors, and four pairs of micro capacitors B corresponding to the four detection mode displacement measuring electrodes (14) are used as four pairs of detection mode feedback capacitors; the inner side surfaces of the eight measuring electrodes and the outer side surface of the annular resonance mass (22) jointly form eight micro-capacitors C.
2. A micromechanical gyroscope structure with attitude correction function and built-in correction electrodes according to claim 1, characterized in that: the sizes of the eight pairs of correction electrodes (11) are consistent; the sizes of the eight pairs of control electrodes (12) are consistent; the sizes of the four driving mode displacement measuring electrodes (13) are consistent; the sizes of the four detection mode displacement measuring electrodes (14) are consistent; the height of the cylindrical central anchor point (21), the height of the annular resonant mass (22) and the height of the eight spoke-shaped elastic support suspension beams (23) are all consistent.
3. A micromechanical gyroscope structure with attitude correction function and built-in correction electrodes according to claim 1 or 2, characterized in that: the cylindrical center anchor point (21), the annular resonance mass (22) and the eight spoke-shaped elastic support suspension beams (23) are all formed by processing monocrystalline silicon wafers, and the cylindrical center anchor point (21), the annular resonance mass (22) and the eight spoke-shaped elastic support suspension beams (23) are manufactured into a whole by adopting a bulk silicon processing technology.
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| RU197374U1 (en) * | 2019-03-04 | 2020-04-23 | Пётр Колестратович Плотников | HYDRODYNAMIC GYROSCOPE |
| CN112857352A (en) * | 2021-04-15 | 2021-05-28 | 中北大学 | Redundant double-ring type micromechanical gyroscope structure with good impact resistance |
| CN112857351A (en) * | 2021-04-15 | 2021-05-28 | 中北大学 | Double-ring type micromechanical gyroscope structure with wide range and high precision |
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