CN110631569A - MEMS single-ring annular vibration gyro structure - Google Patents
MEMS single-ring annular vibration gyro structure Download PDFInfo
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- CN110631569A CN110631569A CN201910966992.6A CN201910966992A CN110631569A CN 110631569 A CN110631569 A CN 110631569A CN 201910966992 A CN201910966992 A CN 201910966992A CN 110631569 A CN110631569 A CN 110631569A
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- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims description 4
- 235000012431 wafers Nutrition 0.000 claims description 3
- 230000007613 environmental effect Effects 0.000 abstract description 3
- 238000001514 detection method Methods 0.000 description 3
- 239000000725 suspension Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
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- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Gyroscopes (AREA)
Abstract
The invention discloses an MEMS single-ring annular vibration gyro structure, which comprises a circular resonance mass, anchor points and an elastic supporting beam, wherein the anchor points are arranged on the circular resonance mass; the elastic support beams surround the circular resonance mass and are arranged on the outer circumference of the circular resonance mass at equal intervals, and two ends of each elastic support beam are fixed with the outer side surface of the circular resonance mass respectively; each elastic supporting beam is provided with an anchor point. The invention is structurally designed and optimized, and improves the adaptability and the environmental interference resistance of the gyroscope by adjusting the structure of the elastic supporting beam of the gyroscope harmonic oscillator and the distribution positions of the anchor points.
Description
Technical Field
The invention relates to an MEMS (micro-electromechanical systems) ring vibration gyro, in particular to an MEMS single-ring vibration gyro structure.
Background
The MEMS single-ring vibrating gyroscope has the advantages of small volume, high sensitivity, strong anti-interference capability and the like, so that the MEMS single-ring vibrating gyroscope is widely applied to various fields of satellite navigation, unmanned driving, aerospace and the like and has very wide application prospect. However, the support structure of the single ring gyroscope introduces a translation mode into the vibration mode of the gyroscope, and the frequency of the translation mode of the currently existing single ring gyroscope structure is lower than the working mode for detecting the angular velocity. Therefore, when the mass and the rigidity of the gyroscope are asymmetric, the sensitivity of the gyroscope to the random vibration of the environment can be improved, and the normal work of the gyroscope is influenced.
Disclosure of Invention
The purpose of the invention is as follows: in order to overcome the defects in the prior art, the invention provides an MEMS single-ring annular vibration gyro structure which is strong in disturbance resistance.
The technical scheme is as follows: the MEMS single-ring annular vibration gyro structure comprises a circular resonance mass, anchor points and an elastic supporting beam; the elastic support beams surround the circular resonance mass and are arranged on the outer circumference of the circular resonance mass at equal intervals, and two ends of each elastic support beam are fixed with the outer side surface of the circular resonance mass respectively; each elastic supporting beam is provided with an anchor point. The MEMS single-ring annular vibration gyro structure is a symmetrical structure, and the anchor point can be located in the middle of the elastic support beam.
The elastic support beam comprises a left elastic support beam and a right elastic support beam, and the left elastic support beam and the right elastic support beam are respectively fixed on the left side and the right side of the anchor point and connected with the circular resonance mass. The anchor points are all located in the middle of the elastic supporting beam.
Preferably, the plurality of elastic support beams are all uniform in size and completely independent; namely, each elastic supporting beam is an independent beam without being mutually connected and is an independent beam without mutual influence.
The number of the elastic support beams is eight, and eight identical elastic support beams are uniformly distributed on the outer side of the circular resonant mass.
Preferably, the circular resonance mass, the anchor point and the elastic support beam are all processed by monocrystalline silicon wafers. Wherein, the micro-processing process by using monocrystalline silicon is the prior art.
The working mode of the vibration gyro structure is in a first-order mode, and the working orders of the translation mode and other modes of the vibration gyro structure are higher than those of the translation mode and other modes of the vibration gyro structure.
The invention principle is as follows: the environment adaptability of the MEMS single-ring annular vibration gyroscope is improved, the key point is that the response of the translation mode to the vibration of the external environment is inhibited, and the influence of the translation mode on the operation of the gyroscope is reduced; according to the gyroscope, the gyroscope modal sequence is structurally optimized, the working mode of the gyroscope is adjusted to a first-order mode by adjusting the structure of the elastic support beam of the gyroscope harmonic oscillator and the distribution positions of the anchor points, the working orders of the translational mode and other modes are higher than those of the working mode, the response of the translational mode to the random vibration of the environment is inhibited, and therefore the robustness and the working precision of the gyroscope are improved.
Has the advantages that: compared with the prior art, the method has the advantages that,
(1) according to the MEMS single-ring annular vibration gyro structure, the environmental vibration resistance of the gyro is improved by structurally designing and optimizing, and the disturbance resistance is strong;
(2) the working mode is designed to be the first-order mode, the order of the translation mode is behind the working mode, and therefore the response of the MEMS single-ring vibrating gyroscope to the random vibration of the external environment is effectively inhibited, and when the random vibration interference exists in the external environment, the response of the translation mode is greatly reduced, so that the influence of the translation mode on the work of the MEMS single-ring vibrating gyroscope is greatly reduced, and the adaptability and the environmental interference resistance of the gyroscope are improved.
Drawings
FIG. 1 is a schematic diagram of a MEMS single ring vibrating gyroscope according to the present invention;
FIG. 2 is a schematic structural view of a sprung suspension beam;
fig. 3 is a schematic view of the working mode 1;
fig. 4 is a schematic view of the working mode 2;
fig. 5 is a schematic view of a translation mode 1;
fig. 6 is a schematic view of the translational mode 2.
Detailed Description
The invention will be further explained with reference to the drawings.
As shown in fig. 1 and 2, the MEMS single-ring annular vibration gyro structure of the present embodiment is a symmetric structure, and includes a circular resonant mass 1, an anchor point 2, and an elastic support beam 3; the number of the elastic supporting beams 3 is eight, each elastic supporting beam 3 is independent and has an equal gap, the eight completely identical elastic supporting beams 3 surround the circular resonance mass 1 and are arranged on the outer circumference of the circular resonance mass 1 at equal intervals, and two ends of each elastic supporting beam 3 are respectively fixed with the outer side surface of the circular resonance mass 1; the eight resilient support beams are parallel to the outer circumference of the circular resonant mass 1.
Moreover, an anchor point 2 is arranged in the middle of each elastic support beam 3, the eight anchor points 2 are completely the same, that is, the eight identical elastic support beams 3 correspond to the eight anchor points 2, and each elastic support beam 3 is composed of a left elastic support beam 31 and a right elastic support beam 32; the left end of the left elastic supporting beam 31 is fixedly connected with the outer side surface of the circular resonance mass 1, and the right end of the left elastic supporting beam is fixedly connected with the left end of the anchor point 2; the right end of the right elastic supporting beam 32 is fixedly connected with the outer side face of the circular resonance mass 1, and the left end of the right elastic supporting beam is fixedly connected with the right end of the anchor point 2.
The circular resonance mass 1, the anchor points 2 and the elastic support suspension beam 3 are all processed by monocrystalline silicon wafers. And the circular resonance mass 1, the eight anchor points 2 and the eight elastic support suspension beams 3 are manufactured into a whole by adopting a bulk silicon processing technology.
The MEMS ring gyroscope is a MEMS vibrating gyroscope based on the coriolis effect, and the MEMS single ring vibrating gyroscope structure of the present embodiment is controlled by a corresponding control system to perform four-antinode vibration to detect the input angular velocity, and the corresponding control system is the prior art and is not described in detail herein. The detection result shows that: when the gyroscope is in a zero state, as shown in fig. 3, the MEMS single-ring annular vibrating gyroscope structure is in a driving mode, and four-antinode vibration is performed under the driving action of the driving electrode; when the gyroscope rotates, a detection mode of the gyroscope is excited, and the amplitude of the gyroscope is measured to obtain the magnitude of the input angular velocity, as shown in fig. 4. Fig. 5 and 6 show the translation mode of the single-ring gyroscope, the order of the single-ring gyroscope is higher than that of the working mode, and the response to external random vibration is suppressed. Wherein, the working mode 1 is a driving mode of a four-antinode elliptic type 0-degree direction; the translational mode 1 is a Rigid body translational motion (raised body motion) of the circular harmonic oscillator mass in a shape keeping unchanged in the direction of 0 degree under the deformation action of the supporting beam; the working mode 2 is a detection mode in a four-antinode elliptic 45-degree direction; the translational mode 2 is a Rigid body translational motion (raised body motion) of the circular harmonic oscillator mass in which the shape is kept unchanged in the 45-degree direction under the deformation action of the supporting beam.
Claims (7)
1. A MEMS single ring vibration gyro structure is characterized in that: the device comprises a circular resonance mass (1), anchor points (2) and elastic supporting beams (3); the elastic support beams (3) surround the circular resonance mass (1) and are arranged on the outer circumference of the circular resonance mass (1) at equal intervals, and two ends of each elastic support beam (3) are fixed with the outer side surface of the circular resonance mass (1) respectively; each elastic supporting beam (3) is provided with an anchor point (2).
2. The MEMS single ring vibrating gyroscope structure of claim 1, wherein: the elastic supporting beam (3) comprises a left elastic supporting beam (31) and a right elastic supporting beam (32), and the left elastic supporting beam (31) and the right elastic supporting beam (32) are respectively fixed on the left side and the right side of the anchor point (2) and connected with the circular resonant mass (1).
3. The MEMS single ring vibrating gyroscope structure of claim 1, wherein: the anchor point (2) is located in the middle of the elastic support beam (3).
4. The MEMS single ring vibrating gyroscope structure of claim 1, wherein: the elastic support beams (3) are all uniform in size and completely independent.
5. The MEMS single ring vibrating gyroscope structure of claim 1, wherein: the number of the elastic supporting beams (3) is eight, and eight identical elastic supporting beams (3) are uniformly distributed on the outer side of the circular resonant mass (1).
6. The MEMS single ring vibrating gyroscope structure of claim 1, wherein: the circular resonance mass (1), the anchor points (2) and the elastic supporting beam (3) are all processed by monocrystalline silicon wafers.
7. The MEMS single ring vibrating gyroscope structure of claim 1, wherein: the working mode of the vibration gyro structure is in a first-order mode, and the working orders of the translation mode and other modes of the vibration gyro structure are higher than those of the translation mode and other modes of the vibration gyro structure.
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| CN201910966992.6A CN110631569A (en) | 2019-10-12 | 2019-10-12 | MEMS single-ring annular vibration gyro structure |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114485600A (en) * | 2022-03-15 | 2022-05-13 | 重庆天箭惯性科技股份有限公司 | Integrated gyro with multi-anchor-point high-strength multi-fluctuation annular structure |
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|---|---|---|---|---|
| DE102007058951A1 (en) * | 2007-12-07 | 2009-06-10 | Epcos Ag | MEMS Package |
| US7640803B1 (en) * | 2004-05-26 | 2010-01-05 | Siimpel Corporation | Micro-electromechanical system inertial sensor |
| CN103822621A (en) * | 2014-02-20 | 2014-05-28 | 上海交通大学 | Solid fluctuation gyro based on driving mode of electromagnetic parameter excitation |
| CN109900262A (en) * | 2019-04-08 | 2019-06-18 | 瑞声科技(新加坡)有限公司 | Gyroscope |
| CN110120795A (en) * | 2019-05-16 | 2019-08-13 | 西华大学 | A kind of ellipsoid resonator of high quality factor |
-
2019
- 2019-10-12 CN CN201910966992.6A patent/CN110631569A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7640803B1 (en) * | 2004-05-26 | 2010-01-05 | Siimpel Corporation | Micro-electromechanical system inertial sensor |
| DE102007058951A1 (en) * | 2007-12-07 | 2009-06-10 | Epcos Ag | MEMS Package |
| CN103822621A (en) * | 2014-02-20 | 2014-05-28 | 上海交通大学 | Solid fluctuation gyro based on driving mode of electromagnetic parameter excitation |
| CN109900262A (en) * | 2019-04-08 | 2019-06-18 | 瑞声科技(新加坡)有限公司 | Gyroscope |
| CN110120795A (en) * | 2019-05-16 | 2019-08-13 | 西华大学 | A kind of ellipsoid resonator of high quality factor |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114485600A (en) * | 2022-03-15 | 2022-05-13 | 重庆天箭惯性科技股份有限公司 | Integrated gyro with multi-anchor-point high-strength multi-fluctuation annular structure |
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Application publication date: 20191231 |