CN108173451B - A kind of composite piezoelectric containing liquid transmission and electrostatic drive vibrating diaphragm driver - Google Patents
A kind of composite piezoelectric containing liquid transmission and electrostatic drive vibrating diaphragm driver Download PDFInfo
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- CN108173451B CN108173451B CN201711421042.2A CN201711421042A CN108173451B CN 108173451 B CN108173451 B CN 108173451B CN 201711421042 A CN201711421042 A CN 201711421042A CN 108173451 B CN108173451 B CN 108173451B
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- 239000002131 composite material Substances 0.000 title claims abstract description 23
- 230000005540 biological transmission Effects 0.000 title claims abstract description 17
- 239000012530 fluid Substances 0.000 claims abstract description 17
- 239000011159 matrix material Substances 0.000 claims abstract description 12
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims abstract description 8
- 239000010410 layer Substances 0.000 claims description 23
- 239000000919 ceramic Substances 0.000 claims description 14
- 239000004020 conductor Substances 0.000 claims description 9
- 239000002184 metal Substances 0.000 claims description 7
- 238000004544 sputter deposition Methods 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 6
- 230000001360 synchronised effect Effects 0.000 claims description 6
- 239000004696 Poly ether ether ketone Substances 0.000 claims description 4
- 230000002146 bilateral effect Effects 0.000 claims description 4
- 238000009413 insulation Methods 0.000 claims description 4
- 229920002530 polyetherether ketone Polymers 0.000 claims description 4
- 239000004205 dimethyl polysiloxane Substances 0.000 claims description 3
- 235000013870 dimethyl polysiloxane Nutrition 0.000 claims description 3
- 239000011521 glass Substances 0.000 claims description 3
- 239000007769 metal material Substances 0.000 claims description 3
- CXQXSVUQTKDNFP-UHFFFAOYSA-N octamethyltrisiloxane Chemical compound C[Si](C)(C)O[Si](C)(C)O[Si](C)(C)C CXQXSVUQTKDNFP-UHFFFAOYSA-N 0.000 claims description 3
- 238000004987 plasma desorption mass spectroscopy Methods 0.000 claims description 3
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 claims description 3
- 239000011241 protective layer Substances 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 claims description 3
- 239000011248 coating agent Substances 0.000 claims description 2
- 238000000576 coating method Methods 0.000 claims description 2
- 239000010720 hydraulic oil Substances 0.000 claims description 2
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- 229920003223 poly(pyromellitimide-1,4-diphenyl ether) Polymers 0.000 claims description 2
- 238000004140 cleaning Methods 0.000 claims 1
- 238000005530 etching Methods 0.000 claims 1
- 229920002120 photoresistant polymer Polymers 0.000 claims 1
- 238000007747 plating Methods 0.000 claims 1
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- 238000003466 welding Methods 0.000 claims 1
- 239000012528 membrane Substances 0.000 abstract description 4
- 125000004122 cyclic group Chemical group 0.000 abstract 1
- 239000000203 mixture Substances 0.000 abstract 1
- 239000010408 film Substances 0.000 description 31
- 230000000694 effects Effects 0.000 description 8
- 238000000034 method Methods 0.000 description 5
- 238000000151 deposition Methods 0.000 description 4
- 230000008021 deposition Effects 0.000 description 4
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- 239000004642 Polyimide Substances 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- 238000003486 chemical etching Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000009713 electroplating Methods 0.000 description 2
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- 238000001259 photo etching Methods 0.000 description 2
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- 229920001721 polyimide Polymers 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
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- 238000006073 displacement reaction Methods 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
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- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
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- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 1
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
- H02N2/001—Driving devices, e.g. vibrators
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
- F04B43/046—Micropumps with piezoelectric drive
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
- H02N2/0075—Electrical details, e.g. drive or control circuits or methods
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/22—Methods relating to manufacturing, e.g. assembling, calibration
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/87—Electrodes or interconnections, e.g. leads or terminals
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Reciprocating Pumps (AREA)
Abstract
The invention discloses a kind of composite piezoelectrics containing liquid transmission and electrostatic drive vibrating diaphragm driver, comprising: the composition such as piezoelectric actuators, electrostatic actuator, incompressible fluid, pedestal, matrix, fixed wall.The driving part of structure is piezoelectric actuators and electrostatic actuator.Under alternating driving voltages signal, piezoelectric actuator generates cyclic drive power, this driving force is transferred to fexible film by incompressible fluid, fexible film is made to obtain certain driving force；Fexible film is bonded under static-electronic driving to fixed wall simultaneously, realizes electrostatic drive.The above piezoelectricity and electrostatic carry out simultaneously, by adjusting piezoelectric actuator and transmitting contact area of the contact area greater than fexible film and liquid of liquid, amplify the driving force of piezoelectric membrane driver to a certain extent, it can be obtained biggish driving force, the present invention has composite drive structural response speed fast, the high feature of driving force.
Description
Technical field
The present invention relates to power drive device technical field more particularly to a kind of composite piezoelectrics containing liquid transmission and quiet
Electric drive vibrating diaphragm driver.
Background technique
Mini drive is the power source in fluid device, and common driver such as compressor or pump, they are belonged to
Core component in power circulation system.The market demand of mini drive is very big, is advantageously implemented by mini drive and is
The micromation of system keeps system more compact, fast response time, and control precision with higher, and wechat driver has been at present
It is widely used in the fields such as medicine, chemical industry, space flight and electrical cooling.
The driving method of mini drive mainly includes Piezoelectric Driving, electrostatic drive, electromagnetic drive, hot pneumatic actuation at present
And memorial alloy etc..From the point of view of reliability and response speed, piezoelectricity and electrostatic drive have preferable advantage.Piezoelectric actuator
Using the inverse piezoelectric effect of piezoelectric ceramics, under alternating electric field, piezoelectric ceramics generates in vertical field strength direction to be stretched, by compound
Piezoelectric ceramics deformation is amplified and is converted to longitudinal direction by elastic basic unit, generates certain driving force or displacement.Electrostatic actuator utilizes
Electrostatic force between electrode wall surface and membrane electrode realizes driving effect so that film generates deformation.It is driven compared to conventional motors
The driving method of structure, piezoelectricity and electrostatic has the characteristics that structure is simple, small in size and high-efficient.
The use scope of current miniature viberation membrane compressor is also narrow, limits miniature viberation membrane compressor in minisize refrigeration system
Application in system or hydrogen compressibility causes compressor pressure to rise water main reason is that the driving force of compressor drive is insufficient
It puts down lower.It is former in terms of causing its compressor pressure liter level is lower to be primarily present two according to current existing miniature vibrating diaphragm driving structure
Cause: on the one hand since the driving force of driver is insufficient, the deformation such as piezoelectric actuators is smaller, the pressure loading overcome also compared with
Low, for electrostatic actuator, due to being difficult to reduce medium thickness in real process, electrostatic drive power is difficult to be promoted, and drives
Easy unstability when dynamic vibrating diaphragm.On the other hand, compressor volumetric efficiency is lower, is primarily present in film piezo-electric driving micro-compressor
In, since piezoelectric actuators are under voltage signal driving, the deformation function of generation is complex, and therefore, it is difficult to design back
Turning curved face type cavity closes driver with cavity wall face paste completely at the end of exhaust, leads to the volumetric efficiency of micro-compressor
It is lower, thus how to be promoted driver driving force and volumetric efficiency be promoted micro-compressor pressure rise Main way.
Therefore, those skilled in the art is dedicated to developing a kind of composite piezoelectric containing liquid transmission and electrostatic drive vibration
Film driver.
Summary of the invention
In view of the above drawbacks of the prior art, the technical problem to be solved by the present invention is to how promote mini drive
Driving force and volumetric efficiency.
To achieve the above object, the present invention provides a kind of composite piezoelectrics containing liquid transmission and electrostatic drive vibrating diaphragm to drive
Dynamic device.
In better embodiment of the invention, a kind of composite piezoelectric containing liquid transmission and the driving of electrostatic drive vibrating diaphragm
Device includes: piezoelectric actuators, electrostatic actuator, incompressible fluid, pedestal, matrix, fixed wall.
Further, electrostatic actuator includes fexible film, fixed wall, fixed wall dielectric layer.
Further, fexible film is equipped with film surface electrode, the elasticity modulus < 3GPa of fexible film, fexible film
Thickness < 1mm.
Further, fixed wall is equipped with inlet hole and outlet opening.
Further, piezoelectric actuators include: flexible substrates, piezoelectric ceramic piece and piezoelectric ceramic piece surface electrode.
Further, piezoelectric actuators are driven with electrostatic actuator by synchronous drive voltage signal.
Further, piezoelectric actuators and the contact area of incompressible fluid be greater than fexible film with it is incompressible
The contact area of fluid.
Further, it is welded in the piezoelectric ceramic piece surface electrode layer and described matrix respectively in piezoelectric actuators
Conducting wire is connect, to receive drive voltage signal.
Further, apply synchronous alternation between the film surface electrode and fixed wall dielectric layer on fexible film surface
Voltage drive signals.
Further, the manufacture craft of film surface electrode and lead includes:
1. film is cleaned and is fixed on substrate, pass through sputtering, the kind for being 0.1 μm in film surface deposition thickness
Sublayer (Cr)；
2. carrying out secondary sputtering electrode layer (Cu), deposition thickness is 0.8 μm, then obtains contact conductor by photoetching；It is anti-
Only electrode layer is oxidized, and is needed at its electroplating surface protective layer (Au), with a thickness of 0.1 μm；
3. removing excess metal layer by chemical etching.
Further, matrix uses hard insulation, including polyether-ether-ketone and organic glass.
Further, fixed wall uses conductive material, including silicon or big rigid metal material.
Further, fixed wall is process using electric conductor, and electrode can be directly welded in its side wall；Fixed wall
Dielectric layer is made by physical vapour deposition (PVD) or high temperature dry-oxygen oxidation in housing surface, and thickness is lower than 1 μm；
Further, fexible film includes elastic metal coating, Kapton or PDMS film.
Further, the practical structures of the composite drive vibrating diaphragm driver can be unilateral or bilateral driving structure, structure
Size is not limited to miniature vibrating diaphragm driver, and amplified structure is also within the scope of protection of the invention.
Further, incompressible fluid is the liquid that can transmit pressure, including hydraulic oil.
Further, the fixing means of the pedestal of composite piezoelectric and electrostatic drive vibrating diaphragm driver, matrix and fixed wall
Including being fixed by circumferential uniformly screw or screw, bonding assembly can also be carried out using bonding glue and is fixed.
Technical effect:
Compared with existing vibrating diaphragm driving structure, the present invention transmits by liquid and is exaggerated the driving force of piezoelectric actuator,
Simultaneously electrostatic drive and Piezoelectric Driving are easier to compound, improve the driving force of vibrating diaphragm driver, keeps vibrating diaphragm driving more steady
It is fixed.Therefore vibrating diaphragm driver of the invention has higher driving force, and application range is more extensive.
It is described further below with reference to technical effect of the attached drawing to design of the invention, specific structure and generation, with
It is fully understood from the purpose of the present invention, feature and effect.
Detailed description of the invention
Fig. 1 is the unilateral driving structure schematic diagram of a preferred embodiment of the invention；
Fig. 2 is the bilateral driving structure schematic diagram of a preferred embodiment of the invention；
Wherein, 1. pedestal, 2. matrixes, 3. flexible substrates, 4. piezoelectric ceramic pieces, 5. piezoelectric ceramic surface electrodes, 6. can not
Compression fluid, 7. fexible films, 8. fexible film surface electrodes, 9. inlet holes, 10. outlet openings, 11. fixed wall dielectric layers,
12. fixed wall, 13. wire guides.
Specific embodiment
Embodiment 1
As shown in Figure 1, the unilateral composite piezoelectric containing liquid transmitting driving and electrostatic drive diaphragm structure are mainly by film
Piezoelectric actuator, electrostatic actuator, incompressible fluid 6, pedestal 1, matrix 2, fixed wall 12 form, and set on fixed wall 12
There are inlet hole 9 and outlet opening 10.
Piezoelectric actuators include: flexible substrates 3, piezoelectric ceramic piece 4 and piezoelectric ceramic piece surface electrode 5, alternately
Under voltage drive signals, due to the inverse piezoelectric effect of piezoelectric ceramic piece, so that piezoelectric actuators generate periodical transverse-vibration
It is dynamic, realize driving effect.
Electrostatic actuator includes fexible film 7, fixed wall 12, fixed wall dielectric layer 11, and fexible film is equipped with thin
Film surface electrode, the elasticity modulus < 3GPa of fexible film, the thickness < 1mm of fexible film, under alternate voltages driving signal,
Alternate electrostatic force is formed between fexible film surface electrode 8 and fixed wall dielectric layer 11, driving fexible film is pasted to wall surface
It closes, realizes driving effect, in unilateral driving structure, the electrode of piezoelectric actuators is placed on outside, is driven to access
Dynamic signal conductor.
For the compound of piezoelectricity and electrostatic, acted on by the transmitting of intermediate incompressible fluid 6, by piezoelectric actuators
The driving force of generation is transferred to fexible film 7, and electrostatic actuator coordinated drive, therefore it is required that piezoelectric actuators and electrostatic
The voltage drive signals of driver are synchronous, and piezoelectric actuators are driven with electrostatic actuator by synchronous drive voltage signal
Dynamic, piezoelectric actuators are greater than the contact of fexible film 7 and incompressible fluid 6 with the contact area of incompressible fluid 6
Area.
Pedestal 1 and 2 material of matrix use hard insulation, such as polyether-ether-ketone (PEEK) and organic glass (PMMA), Gu
Wall surface 12 is determined using conductive material, such as silicon and the biggish metal material of other rigidity, by gas phase physical deposition, on wall surface surface
Form the SiO with a thickness of 1 μm2Dielectric layer.
7 material of fexible film is polyimides (PI) or PDMS film, and side is machined with the electrode layer with a thickness of 1 μm, should
The processing technology of electrode layer are as follows: fexible film 7 is cleaned first and is fixed on substrate, by sputtering, in fexible film 7
The seed layer (Cr) that surface deposition thickness is 0.1 μm；Secondly, carrying out secondary sputtering electrode layer (Cu), deposition thickness is 0.8 μm,
Contact conductor is obtained by photoetching again；To prevent electrode layer to be oxidized, need at its electroplating surface protective layer (Au), with a thickness of
0.1μm；Excess metal layer is removed finally by chemical etching.
The fixing means of the pedestal of composite piezoelectric and electrostatic drive vibrating diaphragm driver, matrix and fixed wall includes passing through week
It is fixed to uniform screw or screw, bonding assembly can also be carried out using bonding glue and is fixed.
Embodiment 2
As shown in Fig. 2, the present invention can also use bilateral driving structure, two sides share a piezoelectric actuators, often
Side includes an electrostatic actuator, laterally convinces string holes (13), conveniently accessible driving by patient analysis in the matrix 2 containing piezoelectric electrode side
Signal conductor, the wire guide are sealed using oil resistant sealant, guarantee the leakproofness of incompressible fluid.
The preferred embodiment of the present invention has been described in detail above.It should be appreciated that the ordinary skill of this field is without wound
The property made labour, which according to the present invention can conceive, makes many modifications and variations.Therefore, all technician in the art
Pass through the available technology of logical analysis, reasoning, or a limited experiment on the basis of existing technology under this invention's idea
Scheme, all should be within the scope of protection determined by the claims.
Claims (10)
1. a kind of composite piezoelectric containing liquid transmission and electrostatic drive vibrating diaphragm driver, which is characterized in that including film piezo-electric
Driver, electrostatic actuator, incompressible fluid, pedestal, matrix, fixed wall, in which:
The electrostatic actuator includes fexible film, fixed wall, fixed wall dielectric layer；
The fexible film is equipped with film surface electrode, the elasticity modulus < 3GPa of the fexible film, the fexible film
Thickness < 1mm；
The fixed wall is equipped with inlet hole and outlet opening；
The piezoelectric actuators include: flexible substrates, piezoelectric ceramic piece and piezoelectric ceramic piece surface electrode；
The piezoelectric actuators are driven with the electrostatic actuator by synchronous drive voltage signal；
The piezoelectric actuators and the contact area of incompressible fluid be greater than the fexible film with it is described incompressible
The contact area of fluid.
2. a kind of composite piezoelectric containing liquid transmission according to claim 1 and electrostatic drive vibrating diaphragm driver, special
Sign is, the welding lead in piezoelectric ceramic piece surface electrode layer and described matrix respectively in the piezoelectric actuators,
To receive drive voltage signal.
3. a kind of composite piezoelectric containing liquid transmission according to claim 1 and electrostatic drive vibrating diaphragm driver, special
Sign is, applies synchronous friendship between the film surface electrode and the fixed wall dielectric layer on the fexible film surface
Time variant voltage driving signal.
4. a kind of composite piezoelectric containing liquid transmission according to claim 1 and electrostatic drive vibrating diaphragm driver, special
Sign is that the manufacture craft of the film surface electrode and lead includes: the cleaning of film, and photoresist is fixed, film surface
Sputtering electrode seed layer, splash-proofing sputtering metal electrode layer, plating metal protective layer, etching remove the metal layer in non-electrode region.
5. a kind of composite piezoelectric containing liquid transmission according to claim 1 and electrostatic drive vibrating diaphragm driver, special
Sign is that described matrix uses hard insulation, and the hard insulation includes polyether-ether-ketone and organic glass.
6. a kind of composite piezoelectric containing liquid transmission according to claim 1 and electrostatic drive vibrating diaphragm driver, special
Sign is that the fixed wall uses conductive material, and the conductive material is silicon or metal material.
7. a kind of composite piezoelectric containing liquid transmission according to claim 1 and electrostatic drive vibrating diaphragm driver, special
Sign is that the fixed wall medium thickness is lower than 1 μm.
8. a kind of composite piezoelectric containing liquid transmission according to claim 1 and electrostatic drive vibrating diaphragm driver, special
Sign is that the fexible film is elastic metal coating, Kapton or PDMS film.
9. a kind of composite piezoelectric containing liquid transmission according to claim 1 and electrostatic drive vibrating diaphragm driver, special
Sign is: the structure of composite drive vibrating diaphragm driver is unilateral or bilateral driving structure.
10. a kind of composite piezoelectric containing liquid transmission according to claim 1 and electrostatic drive vibrating diaphragm driver, special
Sign is that the incompressible fluid is the liquid that can transmit pressure, and the liquid for transmitting pressure includes hydraulic oil.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711421042.2A CN108173451B (en) | 2017-12-25 | 2017-12-25 | A kind of composite piezoelectric containing liquid transmission and electrostatic drive vibrating diaphragm driver |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201711421042.2A CN108173451B (en) | 2017-12-25 | 2017-12-25 | A kind of composite piezoelectric containing liquid transmission and electrostatic drive vibrating diaphragm driver |
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| CN108173451A CN108173451A (en) | 2018-06-15 |
| CN108173451B true CN108173451B (en) | 2019-08-06 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN111151311B (en) * | 2018-11-07 | 2021-10-12 | 研能科技股份有限公司 | Method for manufacturing micro-channel structure |
| CN111262474B (en) * | 2020-03-20 | 2021-01-19 | 清华大学 | Driving force calculation method of plane hydraulic amplification self-healing electrostatic actuator |
| CN112478009B (en) * | 2020-11-13 | 2022-02-08 | 燕山大学 | Magnetic control bidirectional movement soft robot |
| CN113266541B (en) * | 2021-05-19 | 2022-05-31 | 上海芯物科技有限公司 | Thermally-driven micro gas pumping device and pumping device processing method |
| CN114630244B (en) * | 2022-03-28 | 2024-04-19 | 歌尔微电子股份有限公司 | Sensor and wearable equipment |
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|---|---|---|---|---|
| JP2004308554A (en) * | 2003-04-07 | 2004-11-04 | Alps Electric Co Ltd | Fluid pump |
| EP1947339A4 (en) * | 2005-11-09 | 2012-07-18 | Nitto Kohki Co | Pump using unimorph vibration diaphragm |
| CN103344227A (en) * | 2013-06-20 | 2013-10-09 | 上海交通大学 | Electrostatically driving piezoelectric detection bulk acoustic wave resonance three-axis microgyroscope and manufacturing method thereof |
| CN104302913A (en) * | 2012-05-29 | 2015-01-21 | 欧姆龙健康医疗事业株式会社 | Piezoelectric pump and blood-pressure-information measurement device provided therewith |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100365278C (en) * | 2005-06-04 | 2008-01-30 | 胡军 | Prezoelectric ceramics sheet for mfg. mini-pump and mini air pump |
| CN102297690B (en) * | 2011-07-22 | 2013-02-27 | 上海交通大学 | Piezoelectricity driven capacitance detecting two-axis gyroscope |
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2017
- 2017-12-25 CN CN201711421042.2A patent/CN108173451B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004308554A (en) * | 2003-04-07 | 2004-11-04 | Alps Electric Co Ltd | Fluid pump |
| EP1947339A4 (en) * | 2005-11-09 | 2012-07-18 | Nitto Kohki Co | Pump using unimorph vibration diaphragm |
| CN104302913A (en) * | 2012-05-29 | 2015-01-21 | 欧姆龙健康医疗事业株式会社 | Piezoelectric pump and blood-pressure-information measurement device provided therewith |
| CN103344227A (en) * | 2013-06-20 | 2013-10-09 | 上海交通大学 | Electrostatically driving piezoelectric detection bulk acoustic wave resonance three-axis microgyroscope and manufacturing method thereof |
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| CN108173451A (en) | 2018-06-15 |
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