JPH07163162A - Ultrasonic oscillator - Google Patents
Ultrasonic oscillatorInfo
- Publication number
- JPH07163162A JPH07163162A JP5300401A JP30040193A JPH07163162A JP H07163162 A JPH07163162 A JP H07163162A JP 5300401 A JP5300401 A JP 5300401A JP 30040193 A JP30040193 A JP 30040193A JP H07163162 A JPH07163162 A JP H07163162A
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- Prior art keywords
- ultrasonic transducer
- ultrasonic
- piezoelectric
- piezoelectric plate
- view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Apparatuses For Generation Of Mechanical Vibrations (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、超音波振動子、詳しく
は、超音波モータに使用される超音波振動子に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ultrasonic vibrator, and more particularly to an ultrasonic vibrator used in an ultrasonic motor.
【０００２】[0002]
【従来の技術】近年、電磁型モータに代わる新しいモー
タとして超音波モータが注目されている。この超音波モ
ータは、従来の電磁型モータに比べ以下のような利点を
有している。2. Description of the Related Art In recent years, ultrasonic motors have attracted attention as new motors to replace electromagnetic motors. This ultrasonic motor has the following advantages over conventional electromagnetic motors.
【０００３】（１）ギヤーなしで低速高推力が得られ
る。 （２）保持力が大きい。 （３）ストロークが長く、高分解能である。 （４）静粛性にとんでいる。 （５）磁気的ノイズを発せず、また、ノイズの影響もう
けない。 また、本出願人は先に特願平４−３２１０９６号におい
て、従来の超音波振動子と該振動子を用いた超音波リニ
アモータを提案している。以下、図を参照して該従来の
超音波振動子と該振動子を用いた超音波リニアモータに
ついて説明する。(1) A low speed and high thrust can be obtained without a gear. (2) Large holding power. (3) The stroke is long and the resolution is high. (4) It is extremely quiet. (5) Does not emit magnetic noise and is not affected by noise. Further, the present applicant has previously proposed in Japanese Patent Application No. 4-321096 a conventional ultrasonic oscillator and an ultrasonic linear motor using the oscillator. Hereinafter, the conventional ultrasonic oscillator and an ultrasonic linear motor using the oscillator will be described with reference to the drawings.
【０００４】図２４は、上記従来の技術手段における超
音波振動子の構成を示した正面図である。FIG. 24 is a front view showing the structure of the ultrasonic transducer in the above-mentioned conventional technical means.
【０００５】この図に示すように、超音波振動子１１０
は、基本弾性体１１１の上部の、２次の共振屈曲振動の
ほぼ腹に対応する部分に積層型圧電素子１１３が配設さ
れている。該積層型圧電素子１１３は、保持用弾性体１
１２により上記基本弾性体１１１上に固定されている。
すなわち、図示しないが該基本弾性体１１１には３か所
にネジのタップが穿設されており、さらに、上記保持用
弾性体１１２は３本のビス１１４により基本弾性体１１
１に固定され、これにより、上記積層型圧電素子１１３
は保持用弾性体１１２に側方から押圧されて保持され
る。As shown in this figure, the ultrasonic transducer 110
In the upper part of the basic elastic body 111, the laminated piezoelectric element 113 is arranged in a portion substantially corresponding to the antinode of the secondary resonant bending vibration. The laminated piezoelectric element 113 is a holding elastic body 1.
It is fixed on the basic elastic body 111 by 12.
That is, although not shown, the basic elastic body 111 is provided with screw taps at three locations, and the holding elastic body 112 is further provided with three screws 114.
1 to thereby fix the laminated piezoelectric element 113.
Is held by being pressed laterally by the holding elastic body 112.
【０００６】また、上記積層型圧電素子１１３と保持用
弾性体１１２とが接触する部分はエポキシ系の接着剤で
固定され、該積層型圧電素子１１３におけるその他の部
分は樹脂等により被覆されている。さらに、上記保持用
弾性１１２と基本弾性体１１１とが接触する部分もエポ
キシ系の接着剤により接合される。The portion where the laminated piezoelectric element 113 and the holding elastic body 112 contact each other is fixed with an epoxy adhesive, and the other portion of the laminated piezoelectric element 113 is covered with resin or the like. . Further, a portion where the holding elastic 112 and the basic elastic body 111 are in contact with each other is also joined by an epoxy adhesive.
【０００７】上記基本弾性体１１１において上記積層型
圧電素子１１３が配置されている面（図中、上面）に対
して反対側の面、すなわち、被駆動体と接触する側の面
における屈曲振動の腹に対応する部分には、アモルファ
スカーボンで構成された駆動子１１６がエポキシ系の接
着剤を用いて接合されている。The bending vibration of the surface of the basic elastic body 111 opposite to the surface (the upper surface in the drawing) on which the laminated piezoelectric element 113 is arranged, that is, the surface contacting the driven body is A driver element 116 made of amorphous carbon is bonded to a portion corresponding to the antinode using an epoxy adhesive.
【０００８】このような構成をなす上記超音波振動子の
摺動部材に対し、ステンレス材等の被駆動体（図示せ
ず）をある一定の押圧力で直線移動可能な如く保持する
ことで超音波リニアモータが構成できる。By holding a driven body (not shown) such as a stainless steel material so as to be linearly movable with a certain pressing force against the sliding member of the ultrasonic vibrator having the above-mentioned structure, A sound wave linear motor can be constructed.
【０００９】次に、上記超音波振動子１１０の動作につ
いて説明する。Next, the operation of the ultrasonic transducer 110 will be described.
【００１０】上記超音波振動子１１０の寸法を適当にと
ることで１次の共振縦振動、および２次の共振屈曲振動
がほぼ同一周波数で励起できる。図２４において左側の
積層型圧電素子１１３から取り出されている図示しない
電気端子をＡ，Ｇ（Ａ相と呼ぶ）とし、右側の積層型圧
電素子１１３から取り出されている図示しない電気端子
をＢ，Ｇ（Ｂ相と呼ぶ）とする。まず、上記Ａ相および
Ｂ相に３０Ｖの直流電圧を印加する。こうすることで、
積層型圧電素子１１３にほぼ７０Ｎの圧縮力（与圧）を
かけることができる。By appropriately dimensioning the ultrasonic vibrator 110, the primary resonant longitudinal vibration and the secondary resonant bending vibration can be excited at substantially the same frequency. In FIG. 24, electric terminals (not shown) taken out from the laminated piezoelectric element 113 on the left side are designated as A and G (A phase), and electric terminals (not shown) taken out from the laminated piezoelectric element 113 on the right side are taken as B and G (referred to as phase B). First, a DC voltage of 30 V is applied to the A phase and the B phase. By doing this,
A compressive force (pressurization) of about 70 N can be applied to the laminated piezoelectric element 113.
【００１１】その後、上記Ａ相に周波数Ｆｒで振幅１０
Ｖｐ−ｐの交番電圧を印加し、Ｂ相に同一周波数、同振
幅で同位相の交番電圧を印加すると一次の共振縦振動が
励起できる。次に、Ａ相に周波数Ｆｒで振幅１０Ｖｐ−
ｐの交番電圧を印加し、Ｂ相に同一周波数、同振幅で逆
位相の交番電圧を印加すると２次の共振屈曲振動が励起
できる。After that, an amplitude of 10 at the frequency Fr is added to the A phase.
When an alternating voltage of Vp-p is applied and an alternating voltage of the same frequency and the same amplitude and the same phase is applied to the B phase, primary resonant longitudinal vibration can be excited. Next, for the A phase, the amplitude is 10 Vp-at the frequency Fr.
When an alternating voltage of p is applied and an alternating voltage of the same frequency, the same amplitude and the opposite phase is applied to the B phase, secondary resonant bending vibration can be excited.
【００１２】さて、Ａ相及びＢ相に周波数Ｆｒで振幅１
０Ｖｐ−ｐの交番電圧を印加し、その位相差を９０度又
は−９０度にすると駆動子１１６の位置において、時計
廻り又は反時計廻りの超音波楕円振動が励起できる。こ
のとき駆動子１１６に押圧された被駆動体は右方向また
は左方向に駆動される。Amplitude 1 is applied to the A and B phases at the frequency Fr.
When an alternating voltage of 0 Vp-p is applied and the phase difference is set to 90 degrees or -90 degrees, clockwise or counterclockwise ultrasonic elliptical vibration can be excited at the position of the driver element 116. At this time, the driven body pressed by the driver 116 is driven rightward or leftward.
【００１３】[0013]
【発明が解決しようとする課題】しかしながら、上述し
た従来の超音波モータは、黄銅等の弾性体と積層型圧電
素子を接着剤を用いて接合しているため、制作工程が複
雑であり、また、各部品の相対的な位置が狂い易く、振
動特性がばらつき易い。さらに、共振状態で接着剥がれ
が起き易い等の問題点があった。However, in the above-mentioned conventional ultrasonic motor, since the elastic body such as brass and the laminated piezoelectric element are bonded with the adhesive, the manufacturing process is complicated, and the manufacturing process is complicated. The relative position of each component is likely to be misaligned, and the vibration characteristics are likely to vary. Further, there is a problem that the adhesive peels easily in the resonance state.
【００１４】本発明はかかる問題点に鑑みてなされたも
のであり、接着工程が少なく制作工程が単純な、振動特
性のばらつきが小さい、接着剥がれが起き難い超音波振
動子を提供することを目的とする。The present invention has been made in view of the above problems, and an object thereof is to provide an ultrasonic transducer having a small number of bonding steps, a simple manufacturing process, a small variation in vibration characteristics, and an adhesive peeling resistant. And
【００１５】[0015]
【課題を解決するための手段】上記の目的を達成するた
めに本発明による超音波振動子は、電気−機械エネルギ
ー変換素子に駆動信号を印加することにより、縦振動と
屈曲振動とを励起する超音波振動子において、上記電気
−機械エネルギー変換素子を交互に積層された、該電気
−機械エネルギー変換素子に上記駆動信号を印加するた
めの複数の電極と、この複数の電極の内、上記縦振動に
よって生じる伸縮歪成分の符号と上記屈曲振動によって
生じる伸縮歪成分の符号とが同一になる少なくとも一つ
の領域に設けられた第１の電極群と、上記複数の電極の
内、上記縦振動によって生じる伸縮歪成分の符号と上記
屈曲振動によって生じる歪成分とが異なる少なくとも一
つの領域に設けられた第２の電極群と、上記両電極群の
各電極を一層おきに接続する２つの電気接続手段とを具
備する。In order to achieve the above object, the ultrasonic vibrator according to the present invention excites longitudinal vibration and bending vibration by applying a drive signal to an electro-mechanical energy conversion element. In the ultrasonic vibrator, a plurality of electrodes for alternately applying the drive signal to the electro-mechanical energy conversion element, in which the electro-mechanical energy conversion element is alternately laminated, and the vertical electrode among the plurality of electrodes The first electrode group provided in at least one region where the sign of the stretching strain component caused by the vibration and the sign of the stretching strain component caused by the bending vibration are the same, and among the plurality of electrodes, due to the longitudinal vibration. A second electrode group provided in at least one region in which the sign of the stretching strain component generated and the strain component generated by the bending vibration are different, and one electrode of each of the two electrode groups are provided. ; And a two electrical connection means for connecting.
【００１６】[0016]
【作用】本発明による超音波振動子は、電気−機械エネ
ルギー変換素子に駆動信号を印加し、上記第１の電極群
が設けられた領域には、縦振動によって生じる伸縮歪成
分の符号と屈曲振動によって生じる伸縮歪成分の符号と
が同一になる振動が生じ、また、上記第２の電極群が設
けられた領域には、縦振動によって生じる伸縮歪成分の
符号と屈曲振動によって生じる歪成分とが異なる振動が
生じる。The ultrasonic transducer according to the present invention applies a drive signal to the electromechanical energy conversion element, and in the region where the first electrode group is provided, the sign and bending of the stretching strain component caused by the longitudinal vibration. Vibration occurs in which the sign of the stretching strain component caused by the vibration is the same, and the sign of the stretching strain component caused by the longitudinal vibration and the strain component caused by the bending vibration are generated in the region where the second electrode group is provided. But different vibrations occur.
【００１７】[0017]
【実施例】以下、図面を参照して本発明の実施例を説明
する。Embodiments of the present invention will be described below with reference to the drawings.
【００１８】図１は、本発明の第１実施例を示す超音波
振動子の正面図であり、また、図２は、該超音波振動子
の上面図である。FIG. 1 is a front view of an ultrasonic vibrator showing a first embodiment of the present invention, and FIG. 2 is a top view of the ultrasonic vibrator.
【００１９】図に示すように、本第１実施例の超音波振
動子１０の基本的な部分は、内部電極処理が施された矩
形状のＰＺＴ−ＰＭＮ系の圧電板１１が積層されて構成
された２つの圧電体積層部１８が、同じく矩形状のＰＺ
Ｔ−ＰＭＮ系の３つの絶縁板１２に図に示すように挟設
され構成されている。As shown in the drawing, the basic portion of the ultrasonic transducer 10 of the first embodiment is constructed by laminating rectangular PZT-PMN-based piezoelectric plates 11 which have been subjected to internal electrode treatment. The two piezoelectric laminated portions 18 formed are the same as each other in the rectangular PZ.
As shown in the drawing, it is sandwiched between three T-PMN-based insulating plates 12.
【００２０】図３は、上記超音波振動子１０の基本的な
部分を詳しく示した要部分解斜視図である。また、図４
は、上記超音波振動子１０における一圧電板１１の両側
面を示した要部斜視図であり、図５は、上記図４に示す
圧電板１１に隣接する圧電板１１の両側面を示した要部
斜視図である。FIG. 3 is a main part exploded perspective view showing in detail the basic part of the ultrasonic transducer 10. Also, FIG.
5 is a perspective view of an essential part showing both side surfaces of one piezoelectric plate 11 in the ultrasonic transducer 10, and FIG. 5 shows both side surfaces of the piezoelectric plate 11 adjacent to the piezoelectric plate 11 shown in FIG. It is a principal part perspective view.
【００２１】上記圧電板１１は高さ１０ｍｍ、奥行き４
ｍｍ、厚さ１００μｍの形状を有する圧電素子であり、
その一側面上部には内部電極１７ａが、さらに該内部電
極１７ａの裏面側上部には内部電極１７ｂがそれぞれ配
設されている。The piezoelectric plate 11 has a height of 10 mm and a depth of 4 mm.
a piezoelectric element having a shape of mm and a thickness of 100 μm,
An internal electrode 17a is provided on the upper side of one side surface, and an internal electrode 17b is provided on the upper side on the back side of the internal electrode 17a.
【００２２】上記内部電極１７ａは、厚さ１０μｍ程度
の銀−パラジウム合金が矩形状に塗布された薄膜電極で
あり、図４，図５に示すように、圧電板１１の一側面に
図中、背面側端部に１ｍｍ程度、上面側端部に１ｍｍ、
下部に該圧電板１１の高さの約２／３程度の絶縁部をそ
れぞれ有するように配置されている。一方、上記内部電
極１７ｂは、上記圧電板１１において上記内部電極１７
ａの裏面がわに配設されており、同様に厚さ１０μｍ程
度の銀−パラジウム合金が塗布された薄膜電極である。
そして、該裏面に図中、正面側端部に１ｍｍ程度、上面
側端部に１ｍｍ、下部に該圧電板１１の高さの約２／３
程度の絶縁部をそれぞれ有するように配置されている。The internal electrode 17a is a thin-film electrode in which a silver-palladium alloy having a thickness of about 10 μm is applied in a rectangular shape. As shown in FIGS. About 1 mm on the back side edge, 1 mm on the top side edge,
The piezoelectric plates 11 are arranged so as to have an insulating portion at a lower portion of about ⅔ of the height of the piezoelectric plate 11. On the other hand, the internal electrode 17b is the same as the internal electrode 17b in the piezoelectric plate 11.
The back surface of a is a crocodile, and is a thin-film electrode similarly coated with a silver-palladium alloy having a thickness of about 10 μm.
Then, in the figure, about 1 mm at the end on the front side, 1 mm at the end on the top side, and about 2/3 of the height of the piezoelectric plate 11 at the bottom on the back side in the drawing
It is arranged so that each has a certain degree of insulation.
【００２３】上記圧電板１１における内部電極１７ａ，
１７ｂの塗布位置は、図４，図５に示すように、互いに
隣接する圧電板１１で塗布位置が一側面とその裏面とで
逆になっている。このような内部電極１７ａ，１７ｂが
施された２種類の圧電板１１（図４，図５）を交互に１
００層程度積層して、本第１実施例の圧電板積層部１８
（図１参照）が構成されている。The internal electrodes 17a on the piezoelectric plate 11 are
As shown in FIGS. 4 and 5, the coating positions of 17b are opposite on the one side surface and the back surface of the piezoelectric plates 11 adjacent to each other. Two kinds of piezoelectric plates 11 (FIGS. 4 and 5) provided with such internal electrodes 17a and 17b are alternately arranged.
About 100 layers are laminated to form the piezoelectric plate laminated portion 18 of the first embodiment.
(See FIG. 1).
【００２４】図１に戻って、上記絶縁板１２は矩形状の
ＰＺＴ−ＰＭＮ系の素子であり、高さ１０ｍｍ、奥行き
４ｍｍ、厚さ３ｍｍの形状をなしている。また、上記２
つの圧電体積層部１８を挟むように３か所に設けられた
該絶縁板１２のうち、中央部の絶縁板には、その中心部
に直径φ１ｍｍの穿孔１５が正面から背面に向けて穿設
されている。Returning to FIG. 1, the insulating plate 12 is a rectangular PZT-PMN-based element having a height of 10 mm, a depth of 4 mm and a thickness of 3 mm. Also, the above 2
Of the insulating plates 12 provided at three places so as to sandwich one piezoelectric laminated portion 18, the central insulating plate is provided with a perforation 15 having a diameter of 1 mm from the front to the back. Has been done.
【００２５】また、超音波振動子１０の圧電体積層部１
８における正面上部および背面上部には、上記内部電極
１７ａ，１７ｂの一部が露呈しており、４つの露呈部群
を形成している（図示せず）。この４つの露呈部群に
は、それぞれ導電性銀ペーストからなる４つの外部電極
１４が、該内部電極１７ａあるいは内部電極１７ｂと導
通するように互いに独立して設けられている。Further, the piezoelectric laminated portion 1 of the ultrasonic transducer 10
A part of the internal electrodes 17a and 17b is exposed at the upper front portion and the upper rear surface in FIG. 8 to form four exposed portion groups (not shown). In each of the four exposed portion groups, four external electrodes 14 made of a conductive silver paste are provided independently of each other so as to be electrically connected to the internal electrodes 17a or 17b.
【００２６】上記外部電極１４からはぞれぞれリード線
が延出しており、超音波振動子１０の正面に配設された
２つの外部電極１４は、図１，図２に示すように電気端
子Ａ，Ｂとして、また、超音波振動子１０の背面に配設
された外部電極１４はグランド（ＧＮＤ）端子として、
図示しない圧電板１１の駆動回路に接続されている。A lead wire extends from each of the external electrodes 14, and the two external electrodes 14 arranged in front of the ultrasonic transducer 10 are electrically connected to each other as shown in FIGS. As the terminals A and B, and the external electrode 14 arranged on the back surface of the ultrasonic transducer 10 is a ground (GND) terminal.
It is connected to a drive circuit for the piezoelectric plate 11 (not shown).
【００２７】一方、上記超音波振動子１０底部におい
て、長手方向端部から９ｍｍの位置には幅４ｍｍ、奥行
き４ｍｍ、厚さ１ｍｍの駆動子１６が接着剤により該底
部に接合されている。なお、該駆動子１６は、高分子材
料にアルミナを分散して形成されている。また、上記中
央の絶縁板１２の穿孔１５には、ステンレス材よりなる
ピン１９が貫通して接着されている（図２参照）。On the other hand, in the bottom portion of the ultrasonic transducer 10, a driver element 16 having a width of 4 mm, a depth of 4 mm and a thickness of 1 mm is joined to the bottom portion by an adhesive at a position 9 mm from the end in the longitudinal direction. The driver element 16 is formed by dispersing alumina in a polymer material. Further, a pin 19 made of a stainless material penetrates and is bonded to the hole 15 of the insulating plate 12 at the center (see FIG. 2).
【００２８】このように構成された上記超音波振動子１
０の全体の寸法は、幅３０ｍｍ、高さ１０ｍｍ、奥行き
４ｍとなっている。The ultrasonic transducer 1 having the above structure
The overall size of 0 is 30 mm in width, 10 mm in height, and 4 m in depth.
【００２９】次に、上記超音波振動子１０の基本的な部
分の製造方法について説明する。Next, a method of manufacturing the basic portion of the ultrasonic transducer 10 will be described.
【００３０】上記矩形状の圧電板１１および絶縁板１２
は、上述したようにＰＺＴ−ＰＭＮ系の材料で構成され
ている。まず、圧電板１１の製造方法を説明する。すな
わち、上記ＰＺＴ−ＰＭＮ系の材料の仮焼結粉末とバイ
ンダーとを混合して泥しょうを作成し、この泥しょうを
ドクターブレード法によりフィルム状にキャスティング
してグリーンシートとする。そして、グリーンシートを
乾燥した後、フィルムから剥離して矩形状の圧電板１１
を作成する。その後、上述したように該圧電板１１の両
面には内部電極１７ａ，１７ｂがそれぞれ塗布される。
一方、絶縁板１２は、型を用いた方法により作成する。The rectangular piezoelectric plate 11 and insulating plate 12
Is composed of a PZT-PMN-based material as described above. First, a method of manufacturing the piezoelectric plate 11 will be described. That is, the pre-sintered powder of the PZT-PMN-based material is mixed with a binder to prepare mud, and the mud is cast into a film by a doctor blade method to obtain a green sheet. Then, after the green sheet is dried, it is peeled off from the film and the rectangular piezoelectric plate 11 is formed.
To create. Then, as described above, the internal electrodes 17a and 17b are applied to both surfaces of the piezoelectric plate 11, respectively.
On the other hand, the insulating plate 12 is produced by a method using a mold.
【００３１】次に、これらの圧電板１１と絶縁板１２と
を図３に示すように積層し、熱をかけつつ押圧する。そ
の後、１２００℃で本焼成を行い、超音波振動子１０の
基本的な部分を作成する。その後、上述したように外部
電極１４を配設し、上記電気端子Ａ，Ｂ，ＧＮＤに直流
電圧を１０分間程度印加し、内部電極１７ａ，１７ｂが
施された部分の圧電板１１を分極する。Next, the piezoelectric plate 11 and the insulating plate 12 are laminated as shown in FIG. 3 and pressed while applying heat. After that, main firing is performed at 1200 ° C. to form a basic portion of the ultrasonic transducer 10. After that, the external electrodes 14 are arranged as described above, and a DC voltage is applied to the electric terminals A, B, and GND for about 10 minutes to polarize the piezoelectric plate 11 in the portions provided with the internal electrodes 17a and 17b.
【００３２】次に、上記第１実施例の超音波振動子１０
の動作について説明する。Next, the ultrasonic transducer 10 of the first embodiment described above.
The operation of will be described.
【００３３】該第１実施例の超音波振動子１０の寸法形
状を上述したように設定すると、１次の共振縦振動、お
よび２次の共振屈曲振動がほぼ同一周波数Ｆｒ（５３ｋ
Ｈｚ〜５６ｋＨｚ）で励起できる。また、本出願人は、
これらの振動を有限要素法を用いてコンピュータ解析し
た結果、図６（Ａ）に示すような共振縦振動状態、およ
び図６（Ｂ）に示すような共振屈曲振動状態が予想さ
れ、かつ、振動測定の結果、それが実証された。以下、
該振動測定について説明する。When the dimensions and shape of the ultrasonic transducer 10 of the first embodiment are set as described above, the primary resonant longitudinal vibration and the secondary resonant bending vibration have substantially the same frequency Fr (53k).
It can be excited in the range of Hz to 56 kHz. In addition, the applicant is
As a result of computer analysis of these vibrations using the finite element method, a resonance longitudinal vibration state as shown in FIG. 6 (A) and a resonance bending vibration state as shown in FIG. 6 (B) are expected and As a result of the measurement, it was proved. Less than,
The vibration measurement will be described.
【００３４】まず、上記外部電極１４のうち、電気端子
Ａ（図１，図２参照）となる外部電極１４に周波数Ｆｒ
で振幅１０Ｖｐ−ｐの交番電圧を印加し、また、電気端
子Ｂとなる外部電極１４に同一周波数、同振幅で同位相
の交番電圧を印加すると図６（Ａ）に示すような１次の
共振縦振動が励起できた。次に、電気端子Ａに周波数Ｆ
ｒで振幅１０Ｖｐ−ｐの交番電圧を印加し、電気端子Ｂ
に同一周波数、同振幅で逆位相の交番電圧を印加すると
図６（Ｂ）に示すような２次の共振屈曲振動が励起でき
た。次に、電気端子Ａに周波数Ｆｒで振幅１０Ｖｐ−ｐ
の交番電圧を印加し、電気端子Ｂに同一周波数、同振幅
で位相が９０度異なった交番電圧を印加すると共振縦振
動と、共振屈曲振動が合成されて、駆動子１６の位置に
おいて楕円振動が励起できた。First, of the external electrodes 14, the frequency Fr is applied to the external electrode 14 to be the electric terminal A (see FIGS. 1 and 2).
When an alternating voltage having an amplitude of 10 Vp-p is applied at, and an alternating voltage having the same frequency and the same amplitude and the same phase is applied to the external electrode 14 serving as the electric terminal B, the primary resonance as shown in FIG. Longitudinal vibration could be excited. Next, the frequency F is applied to the electric terminal A.
An alternating voltage with an amplitude of 10 Vp-p is applied at r, and electrical terminal B
When an alternating voltage having the same frequency and the same amplitude and opposite phase was applied to the second electrode, a secondary resonance bending vibration as shown in FIG. 6B could be excited. Next, at the frequency Fr, the electric terminal A has an amplitude of 10 Vp-p.
When an alternating voltage is applied to the electric terminal B and an alternating voltage having the same frequency and the same amplitude but different phase by 90 degrees is applied, the resonance longitudinal vibration and the resonance bending vibration are combined, and the elliptical vibration is generated at the position of the driver 16. I was excited.
【００３５】次に、図７を参照して上記超音波振動子１
０を適用した超音波リニアモータ５０について説明す
る。Next, with reference to FIG. 7, the ultrasonic transducer 1 will be described.
The ultrasonic linear motor 50 to which 0 is applied will be described.
【００３６】図７に示すように、該超音波リニアモータ
５０は、上記超音波振動子１０がそのピン１９の部分で
２つの保持板２１により両面から保持されている。上記
保持板２１はピン１９の直径とほぼ同径の孔が穿設され
ていて、該孔と超音波振動子１０のピン１９とが係合す
るようになっている。該超音波振動子１０をこのように
保持することで、同超音波振動子１０はピン１９まわり
の回転に対してのみ自由度を有する。As shown in FIG. 7, in the ultrasonic linear motor 50, the ultrasonic vibrator 10 is held from both sides by two holding plates 21 at the pin 19 portion thereof. The holding plate 21 is provided with a hole having substantially the same diameter as the pin 19, and the hole and the pin 19 of the ultrasonic transducer 10 are engaged with each other. By holding the ultrasonic vibrator 10 in this way, the ultrasonic vibrator 10 has a degree of freedom only with respect to the rotation around the pin 19.
【００３７】一方、上記保持板２１はビス２３により保
持板固定部材２２に固定されている。該保持板固定部材
２２はリニアブッシュ２４により保持されていて、ま
た、このリニアブッシュ２４は軸２５に沿ってリニアに
移動するようになっている。さらに、上記軸２５は軸固
定部材２６に固定され、該軸固定部材２６はベース２７
にビスにより固定されている。また、上記軸固定部材２
６のほぼ中央部にはタップがきられていて、押圧ビス２
８がねじ込まれている。該押圧ビス２８と保持板固定部
材２２との間にはバネ２９が挿入されている。On the other hand, the holding plate 21 is fixed to the holding plate fixing member 22 with screws 23. The holding plate fixing member 22 is held by a linear bush 24, and the linear bush 24 moves linearly along a shaft 25. Further, the shaft 25 is fixed to a shaft fixing member 26, and the shaft fixing member 26 is a base 27.
It is fixed by screws. Further, the shaft fixing member 2
There is a tap in the center of 6, and the pressing screw 2
8 is screwed. A spring 29 is inserted between the pressing screw 28 and the holding plate fixing member 22.
【００３８】上記ベース２７にはクロスローラーガイド
の固定部３０が基台にビス３１により固定されている。
また、クロスローラーガイドの移動部３２には摺動部材
保持部３３が図示しないビスにより固定され、この摺動
部材保持部３３には摺動部材３４としてＨＩＰ処理され
たジルコニアセラミックスが接着されている。このよう
な構成にして、押圧ビス２８を調整することで超音波振
動子１０の摺動部材３４（被駆動部材）への押圧力を調
整することができる。A fixing portion 30 of the cross roller guide is fixed to the base 27 by screws 31 on the base.
A sliding member holding portion 33 is fixed to the moving portion 32 of the cross roller guide by a screw (not shown), and HIP-treated zirconia ceramics is adhered to the sliding member holding portion 33 as the sliding member 34. . With such a configuration, the pressing force on the sliding member 34 (driven member) of the ultrasonic transducer 10 can be adjusted by adjusting the pressing screw 28.
【００３９】先に示したように超音波振動子１０の電気
端子Ａと電気端子Ｂとに周波数Ｆｒ（５３ｋＨｚ〜５６
ｋＨｚの間の周波数）、振幅１０Ｖｐ−ｐ、位相差＋９
０度又は−９０度の交番電圧を印加する。すると被駆動
部材３４は右方向または左方向に駆動される。As described above, the frequency Fr (53 kHz to 56 kHz) is applied to the electrical terminals A and B of the ultrasonic transducer 10.
frequency between kHz), amplitude 10Vp-p, phase difference +9
An alternating voltage of 0 degree or -90 degree is applied. Then, the driven member 34 is driven rightward or leftward.
【００４０】この第１実施例の超音波振動子によると、
上記超音波振動子１０の基本的な部分が接着工程なしに
作成されているので振動特性のばらつきが小さい、信頼
性の高い超音波振動子が得られる。According to the ultrasonic transducer of the first embodiment,
Since the basic portion of the ultrasonic transducer 10 is formed without the bonding step, a highly reliable ultrasonic transducer with a small variation in vibration characteristics can be obtained.
【００４１】次に、本発明の第２実施例の超音波振動子
について説明する。Next, an ultrasonic transducer according to the second embodiment of the present invention will be described.
【００４２】図８ないし図１２は、本発明の第２実施例
の超音波振動子６０を示した説明図であり、図８は、該
超音波振動子６０の正面図であり、また、図９は、該超
音波振動子の上面図である。また、図１０は、上記超音
波振動子６０の基本的な部分を詳しく示した要部分解斜
視図である。また、図１１は、上記超音波振動子６０に
おける一圧電板１１の両側面を示した要部斜視図であ
り、図１２は、図１１に示す圧電板１１に隣接する圧電
板１１の両側面を示した要部斜視図である。8 to 12 are explanatory views showing an ultrasonic transducer 60 of the second embodiment of the present invention, FIG. 8 is a front view of the ultrasonic transducer 60, and FIG. 9 is a top view of the ultrasonic transducer. Further, FIG. 10 is an exploded perspective view of essential parts showing in detail the basic part of the ultrasonic transducer 60. Further, FIG. 11 is a perspective view of an essential part showing both side surfaces of one piezoelectric plate 11 in the ultrasonic transducer 60, and FIG. 12 is both side surfaces of the piezoelectric plate 11 adjacent to the piezoelectric plate 11 shown in FIG. It is a principal part perspective view which showed.
【００４３】この第２実施例の超音波振動子は、基本的
には上記第１実施例と同等な構成を有するので、ここで
は、該第１実施例と異なる点のみについて述べる。Since the ultrasonic transducer of the second embodiment has basically the same construction as that of the first embodiment, only the points different from the first embodiment will be described here.
【００４４】本第２実施例においても、圧電板１１の積
層体である圧電体積層部１８，絶縁板１２等が上記第１
実施例と同様に構成されているが、該圧電体積層部１８
に接合される外部電極１４の数が異なっている。Also in the second embodiment, the piezoelectric laminated portion 18, which is a laminated body of the piezoelectric plates 11, the insulating plate 12 and the like are the same as those in the first embodiment.
The piezoelectric layered portion 18 has the same structure as that of the embodiment.
The number of external electrodes 14 bonded to each other is different.
【００４５】図１１，図１２に示すように、圧電板１１
の内部電極は、その一側面および裏面の両面とも２つの
部分に設けられている。一側面がわは、第１の領域（１
７ｃ）と第２の領域（１７ｄ）との境の２ｍｍ程度の絶
縁部と、それぞれの領域の背面側端部に１ｍｍ程度の絶
縁部、上面または下面側端部の１ｍｍの絶縁部を残し
て、厚さ１０μｍ程度の銀−パラジウム合金が塗布され
ており、上記側面の裏面がわは、第１の領域（１７ｅ）
と第２の領域（１７ｆ）との境の２ｍｍ程度の絶縁部
と、それぞれの領域の正面側端部に１ｍｍ程度の絶縁
部、上面または下面側端部の１ｍｍの絶縁部を残して、
厚さ１０μｍ程度の銀−パラジウム合金が塗布されてい
る。As shown in FIGS. 11 and 12, the piezoelectric plate 11
The internal electrodes of are provided on two portions on both the one side surface and the back surface thereof. One side is the first area (1
7c) and the second region (17d) at the boundary between the insulating portion of about 2mm, the back side end of each region about 1mm insulating portion, the top or bottom side end 1mm insulating portion is left. , A silver-palladium alloy having a thickness of about 10 μm is applied, and the back surface of the side surface is the first region (17e).
And an insulating portion of about 2 mm between the second area (17f), an insulating portion of about 1 mm at the front end of each area, and an insulating portion of about 1 mm at the upper surface or the lower surface end,
A silver-palladium alloy having a thickness of about 10 μm is applied.
【００４６】上記圧電板１１の内部電極１７ｃ，１７ｄ
と内部電極１７ｅ，１７ｆとは、図１１，図１２に示す
ように、互いに隣接する圧電板１１同士で、塗布位置が
一側面がわとその裏面がわとで逆になっている。このよ
うな内部電極１７ｃ〜１７ｆが施された２種類の圧電板
（図１１，図１２）を交互に１００層程度積層して本第
２実施例の圧電板積層部１８（図８参照）が構成され
る。Internal electrodes 17c and 17d of the piezoelectric plate 11
As shown in FIGS. 11 and 12, the piezoelectric plates 11 adjacent to each other and the internal electrodes 17e and 17f have coating positions opposite to each other on one side and the back side. Two kinds of piezoelectric plates (FIGS. 11 and 12) provided with such internal electrodes 17c to 17f are alternately laminated to form a piezoelectric plate laminate portion 18 (see FIG. 8) of the second embodiment. Composed.
【００４７】また、図８，図９に示すように、超音波振
動子６０の圧電体積層部１８における正面上下部および
背面上下部には、上記第１実施例と同様に上記内部電極
１７ｃ〜１７ｆの一部が露呈しており、８つの露呈部群
を形成している（図示せず）。この８つの露呈部群に
は、それぞれ導電性銀ペーストからなる８つの外部電極
１４が、該内部電極１７ｃ，１７ｄ，１７ｅあるいは１
７ｆと導通するように互いに独立して設けられている。Further, as shown in FIGS. 8 and 9, in the upper and lower front and rear portions of the piezoelectric layered portion 18 of the ultrasonic transducer 60, the internal electrodes 17c to A part of 17f is exposed to form eight exposed part groups (not shown). In each of the eight exposed portion groups, eight external electrodes 14 each made of a conductive silver paste are provided, and the internal electrodes 17c, 17d, 17e or 1 are provided.
They are provided independently of each other so as to be electrically connected to 7f.
【００４８】上記外部電極１４からはぞれぞれリード線
が延出しており、超音波振動子６０の正面がわ，背面が
わ共に、対角線上にある外部電極１４同士はリード線に
より短絡されている。また、超音波振動子６０の正面が
わ，背面がわの上部に配設された４つの外部電極１４
は、図８，図９に示すように電気端子Ａ，Ｂ，グランド
（ＧＮＤ）端子として、図示しない圧電板１１の駆動回
路に接続されている。A lead wire extends from each of the external electrodes 14, and the external electrodes 14 on both the front and back sides of the ultrasonic transducer 60, which are on a diagonal line, are short-circuited by the lead wires. ing. In addition, the front surface of the ultrasonic transducer 60 and the rear surface of the four external electrodes 14 are disposed on the upper surface of the outer surface of the ultrasonic transducer 60.
Are connected to a drive circuit of the piezoelectric plate 11 (not shown) as electric terminals A and B and ground (GND) terminals as shown in FIGS.
【００４９】本超音波振動子６０のその他の部分の構成
については上記第１実施例と同様なので、ここでの説明
は省略する。The structure of the other parts of the ultrasonic transducer 60 is the same as that of the first embodiment, and the description thereof is omitted here.
【００５０】また、本第２実施例の超音波振動子の基本
的な部分の製造方法、動作、さらに、本第２実施例の超
音波振動子を用いた超音波リニアモータの構成と動作に
ついては上記第１実施例と同様なので、ここでの説明は
省略する。The manufacturing method and operation of the basic portion of the ultrasonic transducer of the second embodiment, and the configuration and operation of the ultrasonic linear motor using the ultrasonic transducer of the second embodiment. Is the same as that of the above-mentioned first embodiment, the description thereof is omitted here.
【００５１】この第２実施例の超音波振動子によると、
超音波振動子６０の圧電体積層部１８の部分の体積が大
きいので超音波振動子の出力が大きくなると共に、モー
タ出力の増大がはかれる。According to the ultrasonic transducer of the second embodiment,
Since the volume of the piezoelectric laminate portion 18 of the ultrasonic oscillator 60 is large, the output of the ultrasonic oscillator is increased and the motor output is increased.
【００５２】次に、本発明の第３実施例の超音波振動子
について説明する。Next, an ultrasonic transducer according to the third embodiment of the present invention will be described.
【００５３】図１３ないし図１７は、本発明の第３実施
例の超音波振動子を示す説明図であり、図１３は、該超
音波振動子の正面図，図１４は、該超音波振動子の上面
図である。13 to 17 are explanatory views showing an ultrasonic vibrator of the third embodiment of the present invention. FIG. 13 is a front view of the ultrasonic vibrator, and FIG. 14 is the ultrasonic vibration. It is a top view of a child.
【００５４】この第３実施例の超音波振動子７０は、そ
の基本的な部分は、内部電極処理を施された矩形状のＰ
ＺＴ−ＰＭＮ系の圧電板１１が積層されている圧電体積
層部１８、および矩形状のＰＺＴ−ＰＭＮ系の絶縁板１
２が図示の如く積層されて構成されている。The ultrasonic transducer 70 of the third embodiment has a basic portion of a rectangular P shape subjected to internal electrode treatment.
A piezoelectric laminated portion 18 in which a ZT-PMN-based piezoelectric plate 11 is laminated, and a rectangular PZT-PMN-based insulating plate 1.
2 are laminated as shown.
【００５５】図１５は、上記超音波振動子７０の基本的
な部分を詳しく示した要部分解斜視図である。また、図
１６は、上記超音波振動子７０における一圧電板１１の
上下面を示した要部斜視図であり、図１７は、図１６に
示す圧電板１１に隣接する圧電板１１の上下面を示した
要部斜視図である。FIG. 15 is an exploded perspective view of essential parts showing in detail the basic part of the ultrasonic transducer 70. 16 is a perspective view of the upper and lower surfaces of one piezoelectric plate 11 in the ultrasonic transducer 70, and FIG. 17 is an upper and lower surface of the piezoelectric plate 11 adjacent to the piezoelectric plate 11 shown in FIG. It is a principal part perspective view which showed.
【００５６】該第３実施例における圧電板１１は、幅３
０ｍｍ、奥行き４ｍｍ、１００μｍの厚さを有する圧電
素子である。該圧電板１１の上面（あるいは下面）に
は、上記第１実施例と同様に厚さ１０μｍ程度の銀−パ
ラジウム合金が塗布された内部電極１７ａが、背面側端
部、左および右側端部、幅方向の中央部にそれぞれ１ｍ
ｍの絶縁部を設け、さらに２つの領域に分割されるよう
に配置されている。The piezoelectric plate 11 in the third embodiment has a width of 3
The piezoelectric element has a thickness of 0 mm, a depth of 4 mm, and a thickness of 100 μm. On the upper surface (or the lower surface) of the piezoelectric plate 11, internal electrodes 17a coated with a silver-palladium alloy having a thickness of about 10 μm are formed on the back surface side end portions, the left and right end portions, as in the first embodiment. 1m each at the center in the width direction
m insulating portions are provided and arranged so as to be further divided into two regions.
【００５７】一方、圧電板１１における上記内部電極１
７ａの裏面がわには、上記同様厚さ１０μｍ程度の銀−
パラジウム合金が塗布された内部電極１７ｂが、正面側
端部、左および右端部、幅方向の中央部にそれぞれ１ｍ
ｍの絶縁部を設け、さらに２つの領域に分割されるよう
に配置されている。On the other hand, the internal electrode 1 on the piezoelectric plate 11
The back surface of 7a is formed of silver with a thickness of about 10 μm as described above.
Internal electrodes 17b coated with a palladium alloy have front end portions, left and right end portions, and a widthwise central portion of 1 m, respectively.
m insulating portions are provided and arranged so as to be further divided into two regions.
【００５８】上記内部電極１７ａ，１７ｂは図に示すよ
うに、互いに隣接する圧電板１１の電極塗布位置が上面
と下面とで逆になっている。このような内部電極１７
ａ，１７ｂが施された２種類の圧電板１１（図１６，図
１７）を交互に４０層程度積層したものが図１３に示す
圧電板積層部１８である。As shown in the figure, the electrode coating positions of the piezoelectric plates 11 adjacent to each other of the internal electrodes 17a and 17b are opposite on the upper surface and the lower surface. Such internal electrodes 17
The piezoelectric plate laminated portion 18 shown in FIG. 13 is formed by alternately laminating about 40 layers of two types of piezoelectric plates 11 (FIGS. 16 and 17) provided with a and 17b.
【００５９】この第３実施例の超音波振動子７０では、
矩形状のＰＺＴ−ＰＭＮ系の上部の絶縁板１２は幅３０
ｍｍ、奥行き４ｍｍ、１ｍｍの厚さを有する素子であ
る。また、下部の絶縁板１２は幅３０ｍｍ、奥行き４ｍ
ｍ、５ｍｍの厚さを有し、その上部に直径φ１ｍｍの穿
孔１５が設けられている。In the ultrasonic transducer 70 of the third embodiment,
The upper insulating plate 12 of the rectangular PZT-PMN system has a width of 30.
The element has a thickness of 4 mm, a depth of 4 mm, and a thickness of 1 mm. The lower insulating plate 12 has a width of 30 mm and a depth of 4 m.
m, 5 mm thick, and a perforation 15 having a diameter of 1 mm is provided on the upper part thereof.
【００６０】図１３，図１４において、上記超音波振動
子７０の圧電体積層部１８における正面および背面の両
側方部には、上記内部電極１７ａ，１７ｂの一部が露呈
しており、４つの露呈部群を形成している（図示せ
ず）。この４つの露呈部群には、それぞれ導電性銀ペー
ストからなる４つの外部電極１４が、該内部電極１７ａ
あるいは内部電極１７ｂと導通するように互いに独立し
て設けられている。13 and 14, a part of the internal electrodes 17a and 17b is exposed on both sides of the front surface and the back surface of the piezoelectric layered portion 18 of the ultrasonic transducer 70, and the four internal electrodes 17a and 17b are exposed. An exposed part group is formed (not shown). In each of the four exposed portion groups, four external electrodes 14 each made of a conductive silver paste are provided.
Alternatively, they are provided independently of each other so as to be electrically connected to the internal electrode 17b.
【００６１】上記外部電極１４からはぞれぞれリード線
が延出しており、超音波振動子７０の正面に配設された
２つの外部電極１４は、図１３，図１４に示すように電
気端子Ａ，Ｂとして、また、超音波振動子７０の背面に
配設された外部電極１４はグランド（ＧＮＤ）端子とし
て、図示しない圧電板１１の駆動回路に接続されてい
る。A lead wire extends from each of the external electrodes 14, and the two external electrodes 14 arranged in front of the ultrasonic transducer 70 are electrically connected to each other as shown in FIGS. The external electrodes 14 arranged on the back surface of the ultrasonic transducer 70 as the terminals A and B are connected to a drive circuit for the piezoelectric plate 11 (not shown) as ground (GND) terminals.
【００６２】一方、上記超音波振動子７０底部におい
て、長手方向端部から９ｍｍの位置には幅４ｍｍ、奥行
き４ｍｍ、厚さ１ｍｍの駆動子１６が接着剤により該底
部に接合されている。なお、該駆動子１６は、高分子材
料にアルミナを分散して形成されている。また、上記中
央の絶縁板１２の穿孔１５には、ステンレス材よりなる
ピン１９が貫通して接着されている（図２参照）。On the other hand, in the bottom portion of the ultrasonic transducer 70, a driver element 16 having a width of 4 mm, a depth of 4 mm and a thickness of 1 mm is bonded to the bottom portion at a position 9 mm from the end in the longitudinal direction by an adhesive. The driver element 16 is formed by dispersing alumina in a polymer material. Further, a pin 19 made of a stainless material penetrates and is bonded to the hole 15 of the insulating plate 12 at the center (see FIG. 2).
【００６３】このような構成をなす第３実施例の超音波
振動子７０の全体の寸法は、幅３０ｍｍ、高さ１０ｍ
ｍ、奥行き４ｍｍである。The overall dimensions of the ultrasonic transducer 70 of the third embodiment having such a configuration are 30 mm in width and 10 m in height.
m, depth 4 mm.
【００６４】本超音波振動子７０の基本的な部分の製造
方法については上記第１実施例と同様なので、ここでの
説明は省略する。また、該超音波振動子７０のその他の
構成動作、さらに該超音波振動子７０を用いた超音波リ
ニアモータの構成と動作については上記第１実施例と同
様なので、ここでの説明は省略する。The manufacturing method of the basic part of the ultrasonic transducer 70 is the same as that of the first embodiment, and the description thereof is omitted here. Further, other structural operations of the ultrasonic vibrator 70, and the structure and operation of the ultrasonic linear motor using the ultrasonic vibrator 70 are the same as those in the first embodiment, and therefore the description thereof is omitted here. .
【００６５】一般に、積層された超音波振動子は積層方
向の引張力により破壊し易いが、上述した第３実施例の
超音波振動子によると、上記第１，第２実施例の超音波
振動子に対し、積層方向が上下方向なので上下方向の押
圧力に強い超音波振動子が得られる。また、本第３実施
例は、上記第１，第２実施例の超音波振動子に比べて高
さの低い超音波振動子を作成するときに有利となる。Generally, the laminated ultrasonic vibrators are easily broken by the tensile force in the laminating direction. However, according to the ultrasonic vibrators of the third embodiment described above, the ultrasonic vibrations of the first and second embodiments are vibrated. Since the stacking direction is vertical with respect to the child, an ultrasonic transducer that is strong against vertical pressing force can be obtained. In addition, the third embodiment is advantageous when producing an ultrasonic transducer having a height lower than that of the ultrasonic transducers of the first and second embodiments.
【００６６】なお、本第３実施例の変形例として、上記
第１実施例に対する第２実施例のように、内部電極が施
された圧電板１１が積層されたものを下半分に設けても
よい。As a modification of the third embodiment, as in the second embodiment with respect to the first embodiment, the piezoelectric plate 11 having the internal electrodes laminated may be provided in the lower half. Good.
【００６７】次に、本発明の第４実施例の超音波振動子
について説明する。Next, an ultrasonic transducer according to the fourth embodiment of the present invention will be described.
【００６８】図１８ないし図２３は、本発明の第４実施
例の超音波振動子を示す説明図であり、図１８，図１
９，図２０は、それぞれ該超音波振動子８０の正面図，
上面図，側面図である。18 to 23 are explanatory views showing an ultrasonic transducer of the fourth embodiment of the present invention.
9 and 20 are front views of the ultrasonic transducer 80,
It is a top view and a side view.
【００６９】この第４実施例の超音波振動子７０は、そ
の基本的な部分は内部電極処理を施された矩形状のＰＺ
Ｔ−ＰＭＮ系の圧電板１１が積層されている圧電体積層
部１８、および矩形状のＰＺＴ−ＰＭＮ系の絶縁板１２
が図に示すように積層されて構成されている。The ultrasonic oscillator 70 according to the fourth embodiment has a rectangular PZ, the basic part of which has been subjected to internal electrode treatment.
A piezoelectric laminated portion 18 in which a T-PMN-based piezoelectric plate 11 is laminated, and a rectangular PZT-PMN-based insulating plate 12.
Are laminated as shown in the figure.
【００７０】図２１は、上記超音波振動子８０の基本的
な部分を詳しく示した要部分解斜視図である。また、図
２２は、上記超音波振動子８０における一圧電板１１の
前後面を示した要部斜視図であり、図２３は、図２２に
示す圧電板１１に隣接する圧電板１１の前後面を示した
要部斜視図である。FIG. 21 is an exploded perspective view of essential parts showing in detail the basic part of the ultrasonic transducer 80. 22 is a perspective view of the front and rear surfaces of one piezoelectric plate 11 in the ultrasonic transducer 80, and FIG. 23 is a front and rear surface of the piezoelectric plate 11 adjacent to the piezoelectric plate 11 shown in FIG. It is a principal part perspective view which showed.
【００７１】本第４実施例における圧電板１１は、幅３
０ｍｍ、高さ１０ｍｍ、厚さ１００μｍを有する圧電素
子であり、その前面（あるいは後面）には、厚さ１０μ
ｍ程度の銀−パラジウム合金が塗布された内部電極１７
ａが、上端部に１ｍｍ、下部に５ｍｍ、また、幅方向の
中央部に１ｍｍの絶縁部がそれぞれ設けられ、さらに、
２つの領域に分割されて配置されている。The piezoelectric plate 11 in the fourth embodiment has a width of 3
The piezoelectric element has a thickness of 0 mm, a height of 10 mm, and a thickness of 100 μm, and the front surface (or the rear surface) thereof has a thickness of 10 μm.
Internal electrode 17 coated with about m of silver-palladium alloy
a is provided with an insulating portion of 1 mm at the upper end, 5 mm at the lower portion, and 1 mm at the center in the width direction.
It is divided into two areas and arranged.
【００７２】一方、上記圧電板１１における上記内部電
極１７ａの裏面がわには、内部電極１７ｂが、左および
右端部に１ｍｍ、下部に５ｍｍ、また、幅方向の中央部
に１ｍｍの絶縁部がそれぞれ設けられ、さらに、２つの
領域に分割されて配置されている。On the other hand, on the back surface of the internal electrode 17a of the piezoelectric plate 11, the internal electrode 17b is provided with an insulating portion of 1 mm at the left and right end portions, 5 mm at the lower portion, and 1 mm at the center portion in the width direction. Each of them is provided and further divided into two regions.
【００７３】上記圧電板１１は、図２２，図２３に示す
ように、互いに隣接する圧電板１１同士の内部電極１７
ａ，１７ｂの塗布位置が逆になっている。このような内
部電極１７ａ，１７ｂが施された２種類の圧電板１１
（図２２，図２３）を交互に４０層程度積層して、本第
４実施例の圧電板積層部１８（図１８参照）が構成され
る。As shown in FIGS. 22 and 23, the piezoelectric plate 11 has internal electrodes 17 of the piezoelectric plates 11 adjacent to each other.
The application positions of a and 17b are reversed. Two kinds of piezoelectric plates 11 provided with such internal electrodes 17a and 17b
(FIGS. 22 and 23) are alternately laminated by about 40 layers to form the piezoelectric plate laminated portion 18 (see FIG. 18) of the fourth embodiment.
【００７４】本第４実施例においては、上記超音波振動
子８０の前後面に配設された矩形状の絶縁板１２は、幅
３０ｍｍ、高さ１０ｍｍ、厚さ０．５ｍｍを有する素子
である。また、超音波振動子８０の圧電体積層部１８に
おける上面両側方部および両側面上部には、上記内部電
極１７ａ，１７ｂの一部が露呈しており、４つの露呈部
群を形成している（図示せず）。この４つの露呈部群に
は、それぞれ導電性銀ペーストからなる４つの外部電極
１４が、該内部電極１７ａあるいは内部電極１７ｂと導
通するように互いに独立して設けられている。In the fourth embodiment, the rectangular insulating plate 12 disposed on the front and rear surfaces of the ultrasonic transducer 80 is an element having a width of 30 mm, a height of 10 mm and a thickness of 0.5 mm. . Further, a part of the internal electrodes 17a and 17b is exposed at both side portions of the upper surface and upper portions of both side surfaces of the piezoelectric body laminated portion 18 of the ultrasonic transducer 80, forming four exposed portion groups. (Not shown). In each of the four exposed portion groups, four external electrodes 14 made of a conductive silver paste are provided independently of each other so as to be electrically connected to the internal electrodes 17a or 17b.
【００７５】上記外部電極１４からはぞれぞれリード線
が延出しており、超音波振動子８０の上面に配設された
２つの外部電極１４は、図１８，図１９に示すように電
気端子Ａ，Ｂとして、また、超音波振動子８０の側面に
配設された外部電極１４はグランド（ＧＮＤ）端子とし
て、図示しない圧電板１１の駆動回路に接続されてい
る。A lead wire extends from each of the external electrodes 14, and the two external electrodes 14 provided on the upper surface of the ultrasonic transducer 80 are electrically connected to each other as shown in FIGS. The external electrodes 14 disposed on the side surfaces of the ultrasonic transducer 80 as the terminals A and B are connected to a drive circuit for the piezoelectric plate 11 (not shown) as ground (GND) terminals.
【００７６】一方、上記超音波振動子８０底部におい
て、長手方向端部から９ｍｍの位置には幅４ｍｍ、奥行
き４ｍｍ、厚さ１ｍｍの駆動子１６が接着剤により該底
部に接合されている。なお、該駆動子１６は、高分子材
料にアルミナを分散して形成されている。また、上記超
音波振動子８０のほぼ中央部には直径φ１ｍｍの穿孔が
穿設されており、該穿孔には、ステンレス材よりなるピ
ン１９が貫通して接着されている（図１９参照）。On the other hand, in the bottom portion of the ultrasonic transducer 80, a driver element 16 having a width of 4 mm, a depth of 4 mm and a thickness of 1 mm is bonded to the bottom portion at a position 9 mm from the end in the longitudinal direction by an adhesive. The driver element 16 is formed by dispersing alumina in a polymer material. In addition, a hole having a diameter of 1 mm is bored substantially in the center of the ultrasonic transducer 80, and a pin 19 made of a stainless material penetrates and is bonded to the hole (see FIG. 19).
【００７７】このように構成された上記超音波振動子８
０の全体の寸法は、幅３０ｍｍ、高さ１０ｍｍ、奥行き
４ｍとなっている。The ultrasonic transducer 8 thus configured
The overall size of 0 is 30 mm in width, 10 mm in height, and 4 m in depth.
【００７８】本第４実施例の超音波振動子８０における
基本的な部分の製造方法については上記第１実施例と同
様なので、ここでの説明は省略する。The manufacturing method of the basic parts of the ultrasonic transducer 80 of the fourth embodiment is the same as that of the first embodiment, so the explanation is omitted here.
【００７９】また、該第４実施例の超音波振動子８０の
その他の構成、動作、さらに本第４実施例の超音波振動
子８０を用いた超音波リニアモータの構成と動作につい
ては上記第１実施例と同様なので、ここでの説明は省略
する。The other constitution and operation of the ultrasonic oscillator 80 of the fourth embodiment, and the constitution and operation of the ultrasonic linear motor using the ultrasonic oscillator 80 of the fourth embodiment are as described above. Since it is the same as that of the first embodiment, the description thereof is omitted here.
【００８０】この第４実施例の超音波振動子によると、
上記第１，第２，第３実施例と比較してより奥行きの寸
法の小さい超音波振動子を提供することができる。According to the ultrasonic transducer of the fourth embodiment,
It is possible to provide an ultrasonic transducer having a smaller depth dimension as compared with the first, second and third embodiments.
【００８１】また、本第４実施例の変形例として、上記
第１実施例に対する第２実施例のように圧電板の下半分
にも内部電極を設けたものを積層してもよい。Further, as a modified example of the fourth embodiment, it is also possible to laminate the lower half of the piezoelectric plate provided with the internal electrodes as in the second embodiment with respect to the first embodiment.
【００８２】このように、上述した各実施例によると以
下に示す効果を得ることができる。 （１）弾性体と圧電体を一体的に同時に成形されている
ので、接着剥がれ等がおこらず、信頼性が高い。 （２）上と同じ理由により、振動特性のばらつきが小さ
い。 （３）製作工程が簡単である。As described above, according to the above-mentioned embodiments, the following effects can be obtained. (1) Since the elastic body and the piezoelectric body are integrally molded at the same time, the adhesive is not peeled off and the reliability is high. (2) For the same reason as above, variation in vibration characteristics is small. (3) The manufacturing process is simple.
【００８３】以上、本発明の実施例においてはリニア型
の超音波モータについてのみ応用を述べたが、本発明の
超音波振動子を用いて移動体を回転体とすれば回転型の
超音波モータに応用することも可能である。また、上記
各実施例においては電気−機械エネルギー変換素子とし
て圧電素子を用いて説明したが、電歪素子を用いても同
様の効果が得られるのはいうまでもない。Although the application of the linear ultrasonic motor has been described in the above embodiments of the present invention, the ultrasonic ultrasonic motor of the present invention is a rotary ultrasonic motor if the moving body is a rotating body. It is also possible to apply to. Further, in each of the above embodiments, the piezoelectric element is used as the electro-mechanical energy conversion element, but it is needless to say that the same effect can be obtained by using the electrostrictive element.
【００８４】[0084]
【発明の効果】以上説明したように本発明によれば、接
着工程が少なく制作工程が単純な、振動特性のばらつき
が小さい、接着剥がれが起き難い超音波振動子を提供で
きる。As described above, according to the present invention, it is possible to provide an ultrasonic transducer having a small number of bonding steps, a simple manufacturing process, a small variation in vibration characteristics, and an adhesive peeling resistant.
【図１】本発明の第１実施例を示す超音波振動子の正面
図である。FIG. 1 is a front view of an ultrasonic transducer showing a first embodiment of the present invention.
【図２】上記第１実施例を示す超音波振動子の正面図で
ある。FIG. 2 is a front view of the ultrasonic transducer showing the first embodiment.
【図３】上記超音波振動子の基本的な部分を詳しく示し
た要部分解斜視図である。FIG. 3 is an exploded perspective view of essential parts showing in detail a basic part of the ultrasonic transducer.
【図４】上記超音波振動子における一圧電板の両側面を
示した要部斜視図である。FIG. 4 is a perspective view of an essential part showing both side surfaces of one piezoelectric plate in the ultrasonic transducer.
【図５】上記図４に示す圧電板に隣接する圧電板の両側
面を示した要部斜視図である。5 is a perspective view of an essential part showing both side surfaces of a piezoelectric plate adjacent to the piezoelectric plate shown in FIG.
【図６】上記第１実施例の超音波振動子の、（Ａ）共振
縦振動状態、（Ｂ）共振屈曲振動状態を示す斜視図であ
る。FIG. 6 is a perspective view showing (A) a resonance longitudinal vibration state and (B) a resonance bending vibration state of the ultrasonic transducer of the first embodiment.
【図７】上記第１実施例の超音波振動子を適用した超音
波リニアモータを示す正面図である。FIG. 7 is a front view showing an ultrasonic linear motor to which the ultrasonic transducer of the first embodiment is applied.
【図８】本発明の第２実施例を示す超音波振動子の正面
図である。FIG. 8 is a front view of an ultrasonic transducer showing a second embodiment of the present invention.
【図９】上記第２実施例の超音波振動子の上面図であ
る。FIG. 9 is a top view of the ultrasonic transducer of the second embodiment.
【図１０】上記第２実施例の超音波振動子の基本的な部
分を詳しく示した要部分解斜視図である。FIG. 10 is an exploded perspective view of essential parts showing in detail a basic part of the ultrasonic transducer of the second embodiment.
【図１１】上記第２実施例の超音波振動子における一圧
電板の両側面を示した要部斜視図である。FIG. 11 is a perspective view of a main part showing both side surfaces of one piezoelectric plate in the ultrasonic transducer of the second embodiment.
【図１２】上記図１１に示す圧電板に隣接する圧電板の
両側面を示した要部斜視図である。12 is a perspective view of an essential part showing both side surfaces of a piezoelectric plate adjacent to the piezoelectric plate shown in FIG.
【図１３】本発明の第３実施例を示す超音波振動子の正
面図である。FIG. 13 is a front view of an ultrasonic transducer showing a third embodiment of the present invention.
【図１４】上記第３実施例を示す超音波振動子の上面図
である。FIG. 14 is a top view of the ultrasonic transducer showing the third embodiment.
【図１５】上記第３実施例の超音波振動子の基本的な部
分を詳しく示した要部分解斜視図である。FIG. 15 is an exploded perspective view of essential parts showing in detail a basic part of the ultrasonic oscillator of the third embodiment.
【図１６】上記第３実施例の超音波振動子における一圧
電板の上下面を示した要部斜視図である。FIG. 16 is a perspective view of an essential part showing the upper and lower surfaces of one piezoelectric plate in the ultrasonic vibrator of the third embodiment.
【図１７】上記図１６に示す圧電板に隣接する圧電板の
上下面を示した要部斜視図である。17 is a perspective view of relevant parts showing the upper and lower surfaces of a piezoelectric plate adjacent to the piezoelectric plate shown in FIG.
【図１８】本発明の第４実施例を示す超音波振動子の正
面図である。FIG. 18 is a front view of an ultrasonic transducer showing a fourth embodiment of the present invention.
【図１９】上記第４実施例を示す超音波振動子の上面図
である。FIG. 19 is a top view of the ultrasonic transducer showing the fourth embodiment.
【図２０】上記第４実施例を示す超音波振動子の側面図
である。FIG. 20 is a side view of the ultrasonic transducer showing the fourth embodiment.
【図２１】上記第４実施例の超音波振動子の基本的な部
分を詳しく示した要部分解斜視図である。FIG. 21 is an exploded perspective view of essential parts showing in detail a basic part of the ultrasonic transducer of the fourth embodiment.
【図２２】上記第４実施例の超音波振動子における一圧
電板の前後面を示した要部斜視図である。FIG. 22 is a perspective view of a main part showing the front and rear surfaces of one piezoelectric plate in the ultrasonic vibrator of the fourth embodiment.
【図２３】上記図２２に示す圧電板に隣接する圧電板の
前後面を示した要部斜視図である。23 is a perspective view of relevant parts showing front and back surfaces of a piezoelectric plate adjacent to the piezoelectric plate shown in FIG. 22.
【図２４】従来の一超音波振動子の構成を示した正面図
である。FIG. 24 is a front view showing the configuration of one conventional ultrasonic transducer.
１０…超音波振動子 １１…圧電板 １２…絶縁板 １４…外部電極 １６…駆動子 １７ａ〜１７ｆ…内部電極 １８…圧電体積層部 DESCRIPTION OF SYMBOLS 10 ... Ultrasonic vibrator 11 ... Piezoelectric plate 12 ... Insulating plate 14 ... External electrode 16 ... Driver 17a-17f ... Internal electrode 18 ... Piezoelectric laminated part
Claims (1)
を印加することにより、縦振動と屈曲振動とを励起する
超音波振動子において、 上記電気−機械エネルギー変換素子を交互に積層され
た、該電気−機械エネルギー変換素子に上記駆動信号を
印加するための複数の電極と、 この複数の電極の内、上記縦振動によって生じる伸縮歪
成分の符号と上記屈曲振動によって生じる伸縮歪成分の
符号とが同一になる少なくとも一つの領域に設けられた
第１の電極群と、 上記複数の電極の内、上記縦振動によって生じる伸縮歪
成分の符号と上記屈曲振動によって生じる歪成分とが異
なる少なくとも一つの領域に設けられた第２の電極群
と、 上記両電極群の各電極を一層おきに接続する２つの電気
接続手段と、 を具備したことを特徴とする超音波振動子。1. An ultrasonic transducer for exciting longitudinal vibration and bending vibration by applying a drive signal to the electro-mechanical energy conversion element, wherein the electro-mechanical energy conversion element is alternately laminated. A plurality of electrodes for applying the drive signal to the electro-mechanical energy conversion element, and among the plurality of electrodes, the sign of the stretching strain component generated by the longitudinal vibration and the sign of the stretching strain component generated by the bending vibration are A first electrode group provided in at least one region that is the same, and at least one region of the plurality of electrodes in which the sign of the stretching strain component caused by the longitudinal vibration and the strain component caused by the bending vibration are different. An ultrasonic wave vibrating apparatus, comprising: a second electrode group provided on the first electrode group; Child.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP30040193A JP3311446B2 (en) | 1993-11-30 | 1993-11-30 | Ultrasonic motor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP30040193A JP3311446B2 (en) | 1993-11-30 | 1993-11-30 | Ultrasonic motor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH07163162A true JPH07163162A (en) | 1995-06-23 |
| JP3311446B2 JP3311446B2 (en) | 2002-08-05 |
Family
ID=17884352
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP30040193A Expired - Lifetime JP3311446B2 (en) | 1993-11-30 | 1993-11-30 | Ultrasonic motor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3311446B2 (en) |
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