WO2015042192A1

WO2015042192A1 - Zipping actuator fluid motivation

Info

Publication number: WO2015042192A1
Application number: PCT/US2014/056165
Authority: WO
Inventors: Pratheev Sabaratnam Sreetharan; Zhi Ern TEOH
Original assignee: Pratheev Sabaratnam Sreetharan; Teoh Zhi Ern
Priority date: 2013-09-17
Filing date: 2014-09-17
Publication date: 2015-03-26

Abstract

A miniature blower is formed by cutting a plurality of patterns in a respective plurality of sheets of material, aligning the plurality of sheets of material so as to effect an operative alignment of the patterns and laminating the sheets of material to produce a zipping actuator assembly with a zipping membrane and integrated check valves. Cyclic activation of the zipping membrane within the assembly produces a flow of air through the check valves.

Description

ZIPPING ACTUATOR FLUID MOTIVATION

Cross-Reference to Related Applications

[0000] The present application claims the benefit United States provisional patent application number 61/878,979 filed n September 17, 2013; and of United States provisional patent; application number 61/930,359 filed on January 22, 2014; and of United States provisional patent application number 61/930,370 filed on January 22, 2014; and of United States provisional patent application number 61/955,614 filed on March 19, 2014; and is a Continuation of PCT application number PCT/US2014/D1809. The disclosures of all of the foregoing applications are incorporated by reference herewith in their entireties.

Field of the Invention

[0001] The present invention relates to fluid moving apparatus and more particularly to a zipping actuator to produce fluid motion.

Background

[0002] Zip devices usually have a fixed electrode and a moving electrode. As the moving electrode moves toward the fixed electrode, it gradually comes into contact from one end with the fixed electrode, so that the electrodes move together in a manner similar to a zip fastener. The 'zip' operating principle is as follows. The electrostatic pressure (Pel) between two parallel electrodes can be given by the following equation, where (V) is the voltage, (d) is the gap between the electrodes and (εο) is the permittivity of a vacuum,

[0003] As electrostatic force is proportional to the Inverse square of the distance between the electrodes, the maximum available force is produced when the gap between electrodes is at its smallest. It is possible to produce a large deflection by arranging the electrodes such that a small gap is always maintained at the point of closure between the moving and static electrodes. As the moving electrode deflects, the point of closure between it and the fixed electrode moves with it and the electrodes zip' together. By arranging the electrodes in this fashion it is possible to achieve much larger deflections than could otherwise be obtained with parallel electrodes.

[0004] The zipping effect may be achieved by use of a compliant moving electrode and a fixed electrode with a predefined shape or contour. For maximum effectiveness the surface of the fixed electrode desirably has a gentle continuous contour with no steps and desirably has the smoothest possible surface finish.

Summary

[0005] The present invention relates to the preparation and application of a fluid moving apparatus such as, for example, an active fluid pump. The pump, in its various embodiments, is well adapted to moving gases, liquids, and slurries in specialized environments and applications. As such, the active fluid pump of the invention can be applied to various mass transfer situations, and to other fluid moving applications such as, for example, the production of audible and inaudible sonic or otherwise vibratory signals, including cyclical and impulse or acyclical signals, arid combinations thereof.

[0006] An active fluid pump according to principles of the invention will also find important applications in areas such as, for example, the cooling of personal electronics, the ventilation of personal respiratory apparatus, and the transfer of material through portable chemical analysis apparatus, among many others.

[0007] For example, it is well-known that high component count, high frequency operation, and small device size are important commercial imperatives in the field of portable electronic equipment. As each of these constraints is tightened, however, the need to dissipate waste heat, so as to maintain acceptable operating temperatures, increases, as does the difficulty of maintaining effective dissipation.

[0008] Various modes of cooling have been applied historically including passive dissipation to the environment from the unmodified case of an electronic device, passive dissipation through optimized surface geometries such as, for example cooling fins, which provide increased surface area in contact with the environment. Active cooling regimes are known to increase the efficienc of conveetive cooling by exposing the heat source to a moving fluid. Accordingly, known devices employ, for example, active ooling fans that include, for example pivotally mounted rotating aerodynamic propeller blades and/or pivotally mounted rotating squirrel cage centrifugal fans.

Other turbine and non-turbine arrangements have been used to circulate open-air and/or constrained cooling fluid employing, for example, centrifugal impeller pumps, axial turbine blades piston and cylinder pumps and various configurations of diaphragm pump. [0009] In certain embodiments, an active fluid pump according to the present invention includes an electrostatic zipping mechanism having a generally flexible electrode membrane arranged to cyclically traverse a pump chamber. In some embodiments, the pump chamber is defined within a layered pump bod that includes a laminated assembly of generally flexible and generally rigid materials. Again, in certain embodiments, the layered pump body is formed to include integrated valve assemblies arranged to provide a substantially unidirectional fluid flow in response to cyclical and/or bidirectional activation of the electrostatic zipping mechanism.

[0010] A zipping actuator utilizes at least one, and generally two plane electrodes covered in a thin insulator and a central flexible

conductive membrane. One end of the membrane is adjacent to one electrode, while the other is held adjacent to the other electrode.

Applying appropriate voltages to the electrodes and the central

membrane will cause the membrane to electrostatically adhere to opposing electrodes at opposing ends, with a small 's-shaped" transition legion. Varying voltages will cause translation of the transition region along the electrode.

[0011] In certain embodiments, the invention includes a thin zipping actuator constructed using laminated udMECS™ techniques. The two planar electrodes have a thin insulator layer applied to them. One embodiment uses copper with a thin polyimide film layer insulator, another embodiment uses a parylene insulator on copper. The latter embodiment can result in an extremely thin insulation layer (below 0,5 microns thick)_/ extremely important for this kind of actuator. [0012] The membrane can be constructed from various conductive materials, such as aluminized polyester films, thin polyimide films, thin metal foils such as aluminum or nickel, and others. Such membranes are typically less than 0.001" thick.

[0013] Of particular importance for audio application is sealing the interface between the zipping membrane and the acoustic cavity wall. One option is to use an extremely small gap between membrane and cavity wall to inhibit air flow. Another option is using physical patterning or embedded fiber reinforcement to increase transverse

S iffness of the membrane. or thickening the edges of the membrane itself. A third option is to include additional electrode surfaces on the cavity wall, using the electrostatic force to draw the edge of the membrane towards the cavity wall. Another option is to physically embed the membrane in the cavity wall and rely on elastic deformation of the membrane to seal the edge,

[0014] These and other advantages and features of the invention will be more readily understood in relation to the following detailed description of the invention, which is provided in conjunction with the accompanying drawings. As to the drawings, it should be noted that, while the various figures show respective aspects of the invention, no one figure is intended to Show the entire invention. Rather, the figures together illustrate the invention in its various aspects and principles. As such, it should not be presumed that any particular figure is exclusively related to a discrete aspect or species of the invention. To the contrary, one of skill in the art would appreciate that the figures taken together reflect various embodiments exemplifying the invention. [0015] Correspondingly, reference throughout the specification to "one embodiment" or "an embodiment" means that a particular feature,, structure, or characteristic described in connection with tine embodiment is included in at least one embodiment of the present invention. Thus, the appearance of the phrases "in one embodiment" or "in an embodiment" in various places throughout the specification are not necessarily all referring to the same embodiment. Furthermore, the particular features, structures, or

characteristics may be combined in any suitable manner in one or more embodiments.

Brief Description of the Drawings

[0016] Fig. 1 shows, in schematic view, a zipping actuator mechanism according to principles of the invention;

[0017] Fig. 2 shows, in schematic perspective view, a zipping actuator mechanism according to principles of the invention

[0018] Fig's 3A and 3B show, in schematic perspective view, two exemplary operational states during the operation of a zipping fluid pump prepared according to principles of the invention;

[0019] Fig. 4 shows, in block diagram form, a method of preparing a laminated (iMECS™ device according to principles of the invention;

[0020] Fig's 5 A and 5B show respectively, in schematic perspective view, an arrangement of components during assembly of a laminated μ-VlECS™ device, and the resulting device, according to principles of the invention; [0021] Fig. 6 shows, in exploded schematic view, a portion of a zipping pump assembly prepared according to principles of the invention;

[0022] Fig, 7 shows, in partially assembled view, a portion of the zipping pump assembly of Fig. 6;

[0023] Fig. 8 shows, in schematic form, a portion of a zipping pump assembly according to principles of the invention, including input and output plenums;

[0024] Fig. 9 shows in schematic cross -section, a detail of a zipping pump assembly according to principles of the invention and

[0025] Fig. 10 shows in schematic view a portion of a zipping pump assembly for the cooling of an electronic device according to principles of the invention.

Detailed Description

[0026] The following description is provided to enable any person skilled in the art to make and use the disclosed inventions and sets forth the best modes presently contemplated by the inventors of carrying out their inventions. In the following description, for purposes of explanation, numerous specific details are set forth in order to provide a thorough understanding of the present invention. It will be apparent, however, to one skilled in the art that the present invention may be practiced without these specific details. In other instances, well-known structures and devices are shown in block diagram form in order to avoid unnecessarily obscuring the substance disclosed. [0027] The principal of the zipping actuator has been developed in the context of micro electronic mechanical (MEMS) devices, where lithographic techniques originally developed for integrated circuit production have been applied to the preparation of very small scale mechanical apparatus on silicon and other semiconductor substrates. At this scale of typical MEMS devices, electrostatic forces exert a large influence as compared with, e.g., magnetic forces. In addition, the electrode technology developed for integrated circuit capacitors have lent themselves to the development of electrostatically driven devices in MEMS.

[0028] Generally speaking, electrostatic forces are not employed outside the realm of MEMS devices because the forces involved are small and the requisite voltages quickly exceed practical limits. Even in MEMS, the distances over which electrostatic forces will drive a mechanical device are limited.

[0029] The zipping actuator is a mechanism mat has been developed in response to this limitation. As compared to a flat plate capacirive cantilever beam, where electrostatic forces are exerted substantially uniformly across the surface of the beam, a zipping actuator relies on high forces acting across a small gap to develop a tensile force within a generally flexible membrane. This tensile force tends to draw a relatively remote portion of the membrane into the region where the small gap exists, advancing a motion of the membrane through a cavity.

[0030] Fig. 1 shows, in schematic form, a vertical section through an exemplary zipping actuator 100. The zipping actuator 100 includes a fixed electrode 102. The electrode 102 is generally electrically conductive and Supports an insulating layer 104 that is substantially nonconduCfive of electricity. Typically, a second fixed electrode 106 is disposed in substantially parallel spaced relation to the first fixed electrode 102, Like the first fixed electrode 102, the second fixed electrode 106 supports an insulating layer 108. A generally open region 110 having a longitudinal axis 112 is thus defin d between respective surface regions 114, 116 of the insulating layers 104, 108.

[0031] A further electrode 118, designated the mobile electrode, is disposed within open region 110. The mobile electrode 118 is generally flexible, at least about an axis perpendicular to longitudinal axis 112 and generally parallel to surface regions 114 and 116. This flexibility allows a first surface region 120, and adjacent portion 122, of the mobile electrode 118 to be disposed in close proximity to surface region 114 of insulating layer 104 while a second surface region 124, and ad acent portion 126, of the mobile electrode 118 is disposed in close proximity to surface region 116 of insulating layer 108. A further portion 128 of the mobile electrode 18 is disposed generally transverse to the surface regions 114 and 116 across dimension 130, The flexibility of the mobile electrode 118 allows it to bend dynamically in rolling regions (shown instantaneously at 132, 134) so that a traversing portion 128 is displaceable 136 along the longitudinal axis 112 in a substantially continuous fashion. This displacement morion is commonly referred to as a "zipping" action of the mobile electrode 115. The assembly 100 as a whole is referred to as a zipping actuator.

[0032] When appropriate electrostatic charges are placed on the fixed electrode and the mobile electrode respectively (e.g., a positive charge on the fixed electrode 102 and a negative charge on the mobile electrode 118), the relatively close proximity between the surfaces 102, 106 of the mobile electrode and the fixed electrode at the rolling regions 132, 134 produce relatively high electrostatic forces 138 in those regions. These local electrostatic forces produce tensile forces within traversing portion 128 that cause the mobile electrode to traverse dimension 130 over a far larger distance than would result from the simple force between fixed plate electrodes disposed at a comparable distance. A further description of this mechanism can be found in United States patent publication number 2008/0292888 to Hucker et al., the disclosure of which is herewith incorporated by reference in its entirety.

[0033] Fig. 2 shows an exemplary zipping actuator 200 in schematic perspective view. Zipping actuator 200 includes a first fixed electrode 202 with a first insulating layer 204. A second fixed electrode 206 supports a second insulating layer 208. Electrodes 204 and 206 are disposed in spaced relation to one another across a distance 210, to define a cavity 212. A mobile electrode 214 is disposed within cavity 212 such that a Erst portion 216 of the mobile electrode 214 is relatively proximate to electrode 202 and a second portion 218 of the mobile electrode 214 is relatively proximate to electrode 206. A traversing portion 220 of the mobile electrode spans the distance 210 between the insulating layers 204 and 208 at a location that is dynamically adjustable along length 222 of the device. The traversing portion 220 of the mobile electrode 214 serves to divide the cavity 212 into a first region 224 and a second region 226.

[0034] It should be noted mat while insulating layers 204 and 208 axe, in the illustrated embodiment, coupled to the fixed electrode 204 and 206, in alternative embodiments insulating layers will be provided on the mobile electrode 214. Indeed, one of skill in the art will appreciate that alternative insulating mechanisms such as, for example, a proper arrangement of a plurality of insulating dots, ridges or other protrusions supported on a fixed electrode surface, the mobile electrode surface, or both, will serve to provide the requisite insulating function. This, or any insulating scheme appropriate to preserve a sufficient differential charge between corresponding regions of the fixed electrode and the mobile electrode, should be understood to fall within the scope of the present disclosure.

[0035] Whereas, as noted above, the zipping actuator has been employ ed in various MEMS devices, prepared by the lithographic deposition and removal of semiconductor material, the present inventor has discovered new and surprising benefits that accrue to the preparation, of a zipping style actuator by the laminar assembly of pre oat materials to produce a meso-scale device. The result is a variety of new apparatus and applications not previously possible with the techniques and structures of the prior art,

[0036] As discussed above in the summary section, various embodiments of the present invention include a fluid pump prepared with a μMECS™ layered technology to drive a fluid such as a cooling liquid or cooling gas in a substantially uniform direction in response to the cyclical operation of a zipping actuator,

[0037] Fig's 3A and 3B illustrate, in schematic perspective view, the operation of zipping fluid pump 300 prepared according to principles of the invention. Fig. 3A shows schematically the location of a first fixed electrode 302, a second fixed electrode 304, and a mobile electrode 306. Appropriate conductive and insulating regions are understood to be present, but are omitted here for simplicity. A cavity 308 between the fixed electrodes is divided into a first spatial region 3 0 and a second spatial region 312 by the traversing portion 314 of the mobile electrode 306, First 316 and second 318 check valves are operatively coupled between the spatial region 310 and appropriate connections and/or regions external to the cavity 308. [0038] Check valves 316 and 318 serve to promote relatively unidirectional fluid flow such that check valve 318 allows relatively easy flow of a fluid Outwardly from region 310 and substantially resists the reverse flow inwardly into region 310- Conversely, check valve 316 allows easy flow of a fluid inwardly into region 310, but substantially resists the reverse flow of the fluid outwardly from region 310.

[0039] Similarly, check valves 320 and 322 are operarively coupled between Spatial region 312 and appropriate Connections and/or regions external to cavity 308. In light of the foregoing, the operation of check valves 320 and 322 will be readily understood by one of ordinary skill in the art.

[0040] Accordingly, and as shown, when appropriate voltage levels are applied to the two fixed electrodes and the mobile electrode, a zipping motion 324 of the traversing portion 314 will tend to reduce the size of spatial region 310 while expanding the size of spatial region 312. This change in volume of regions 310 and 312 tends to drive a fluid (such as, e.g., air) out 326 of spatial region 310 through check valve 318 while allowing a corresponding entry of fluid 328 through check valve 320 into spatial region 312. It will be understood that check valves 316 and 322 resist the flow of fluid during this operation.

[0041] It should be appreciated that the operation described above will, in many embodiments, be implemented as one half of a pumping cycle where Fig. 3B shows a reverse portion of the cycle of Fig. 3A. Accordingly, Fig. 3B shows fluid pump 300 where fluid is ejected 350 from spatial region 312 through check valve 322 as traversing region 314 is moved in a direction 352 substantially antiparallel to direction 324. Correspondingly, fluid is able to enter 354 spatial region 310. During this portion of the cycle, check valves 318 and 320 resist fluid flow.

[0042] It should be noted that while, in many applications, the fluid flowing through spatial regions 310 and 312 is identical, and may be coupled to common reservoirs, in other applications separate fluids and or fluid circuits will be associated with these two spatial regions. In addition, in certain embodiments, check valves will be inoperative and or omitted from one of the spatial regions. In such a case, in various embodiments, fluid will be allowed to flow freely in and out of that region, or the region will be evacuated, or fluid will be captured within the region and respond more or less elastic-ally to compressive forces applied by the mobile electrode.

[0043] It should also be noted that in certain applications, check valves will be omitted entirely. In such applications, one or more of the spatial region 310 and 312 will include zero, one, or more apertures through which the Operating fluid flows bidinectionally providing an oscillating motion of the fluid into and out of the respective spatial region.

[0044] Advantageously, one or more of the check valves referred to above will be implemented as a flapper valve. As will be further described below, a flapper valve i readily prepared in μ ECS™ technology by the lamination of appropriately patterned rigid and flexible layers.

[0045] Other unidirectional valves are contemplated within the scope of the present disclosure, however, including, for example, a unidirectional valve with a mobile spherical checking element, a unidirectional valve with an elastic member provided to urge the checking device in an operative direction, and a unidirectional valve having no moving parts, as disclosed by Nikolai Tesla in United States patent number 1,329,559.

[0046] The ECS™ manufacturing technology has been described in detail in PCT patent application number PCT US 2014/0180% with an international riling date of February 24, 2013, the disclosure of which is incorporated herewith in its entirety. As disclosed in the application and described here, the μMECS™ process allows the preparation of complex passive and active mechanical, electromechanical, and optical components, among others by laminating patterned layers of more and less rigid materials in an integrated assembly.

[0047] Thus, Fig. 4 shows a block diagram corresponding to the steps of an exemplary manufacturing process 400 that can be employed to form a device according to principles of the invention. Beginning at step 402, the process involves forming 404 a partem in one or more generally planar sheets of a more or less rigid material. In a typical application, at least one of the sheets will be substantially rigid. In certain applications, the generally rigid material may have an anisotropic characteristic such that it is more or less rigid along one axis than along another.

[0048] In various applications, the sheet will include a material such as, for example, fiberglass reinforced polyester, carbon reinforced polyester, or any other filled or reinforced polymer material. Alternately or in combination, die generally rigid material may include a metallic material such any appropriate metal or metallic alloy. The forming of a pattern in such a sheet of material will include, in certain exemplary applications, the removal of material by photolithographic etching, the removal of material by laser machining, patterning of the material by the application of a die and/or the removal of material by the application of a cutting tool. In addition, additive processes may be used in forming the patterned sheet.

[0049] At step 406, a pattern is formed in one or more sheets of a generally planar flexible component material. In various applications, the generally flexible material may be substantially flexible. In certain applications, the flexible material may have an anisotropic characteristic such that it is more or less flexible along one axis than along another. Patterning of the generally flexible material will proceed in any manner appropriate to the material including, among others, any of the processes identified above with respect to the rigid material.

[0050] At step 408, a pattern is formed in one or more sheets of an adhesive component material. In various cases, the adhesive material may be substantially flexible. In other cases, the adhesive material will be

substantially rigid. In certain cases, the adhesive material may have an anisotropic characteristic such that it is more or less flexible or rigid along one axis than along another. Patterning of the adhesive material will proceed in any manner appropriate to the adhesive material including, among others, any of the processes identified above with respect to the rigid and flexible materials.

[0051] As indicated at step 410, fixturing apparatus is provided for alignment of the various sheets of rigid, flexible and adhesive material prepared in steps 304-308. In certain abundance, the fixturing apparatus will include alignment pins such as are known in the ar In other embodiments the fixturing apparatus will include active alignment actuators and/or optical alignment devices. [0052] As indicated in step 412, an assembly is thereafter prepared by applying the previously prepared and patterned (and in some cases unpattemed sheets of material) to the fixturmg apparatus. It will be appreciated that the patterns and materials will, in certain embodiments, differ from sheet to sheet according to the requirements of a particular application. Moreover, in certain cases, one or more sheets of adhesive material may be omitted in favor of applying adhesive individual sheets and/or surface regions. The adhesive material will be applied, in any manner that is known, or becomes known, in the art By way of example only, the adhesive material may be applied in liquid, powder, aerosol or gaseous form as individual sheets are added to the assembly.

[0053] As will be understood by one of ordinary skill in the art in light of the totality of the current presentation, the characteristics of the various layers and patterns will be chosen and applied according to the requirements of a particular assembly being prepared. Thus, for example, where a joint feature is required, a prepared void in substantially rigid sheets above and below a flexible layer will leave a portion of an intervening flexible layer exposed and ultimately able to flexibly support the adjacent more rigid materials.

[0054] As indicated in step 414, curing conditions are then applied to the assembled materials and/or fixturmg apparatus. In certain embodiments, the curing conditions wiU include the application of heat and/or pressure to the assembly of layers. In other embodiments, the curing conditions will include the application of physical or chemical additives such as, for example, catalytic chemicals, reduce temperatures, gaseous chemical components, or any other condition appropriate to secure a desirable unification of the various layers into an integrated assembly. [0055] As per step 416, the integrated assembly is, in certain embodiments, then removed from the fixturing apparatus. In some embodiments the integrated assembly is transferred thereafter to additional fixturing equipment. In other embodiments, and as will be understood by One of skill in the art, the integrated assembly remains on the fixturing apparatus for further processing.

[0056] In step 418, a method according to certain embodiments of the invention will include the removal of certain portions of one or more of the rigid and/or flexible layers. These portions will have served to support particular regions of the corresponding layer during the preceding processing steps, Their removal will allow one or more of those portions to translate, rotate, or otherwise reorient with respect to some additional portion of the assembly. This step may include the removal of individual assemblies from a larger sheet/assembly on which multiple assemblies of similar or different configurations have been prepared.

[0057] In certain embodiments, the removal of particular support regions will be effected by laser machining. In various other embodiments, the removal of support regions will be effected by mechanical machining, wet chemical etching, chemical vapor etching, scribing, cutting, die cutting, punching, and/or tearing, among others. One of skill in the art will appreciate that any combination of these methods {or other methods that are known or become known in the art) will be beneficially applied and will fall within the scope of the invention.

[0058] Once the removal of identified portions of the one or more rigid and/or flexible layers is complete, the assembly is activated, as per step 420 to transition from its existing status to a post-activation configuration. This activation wilt in certain embodiments, including reorientation of certain portions of one or more regions of one or more of the sheets of material. Thus, for example, in certain embodiments, a portion of the assembly will fold up out of its initial plane to form a three-dimensional assembly in the manner of a pop-up book.

[0059] The activation will incorporate various motions in corresponding embodiments of the invention mcluding various translations and rotations along and about one or more axes. In respective embodiments, the activation will be effected by active fix hiring apparatus, by the action of an individual worker, by a robotic device, by a device integrated within the assembly itself such as, for example, a spring, a motor, a piezoelectric actuator, a

bimetal/bimorph device, a magnetic actuator, electromagnetic actuator, a thermal expansive or contractive device, chemical reaction including, for example, a gas generating process, the crystallization process, a dehydration process, a polymerization process, or any other processor device appropriate to the requirements of a particular application.

[0060] In certain embodiments, and as indicated at step 422, a further process step will secure the apparatus in its activated configuration. Among other methods that will be evident to one of skill in the art in light of the present disclosure, this step of securing the apparatus in its activated configuration will include, in certain embodiments, point soldering, wave soldering, tip soldering, wire bonding, electrical welding, laser welding, ultrasonic welding, thermal bonding, chemical adhesive bonding, the activation of a ratchet and pawl device, the activation of a helical

unidirectional gripping device, the application of a snap, a hook and loop fastener, a rivet, or any other fastener or fastening method that is known or becomes known to those of skill in the art. [0061] Of course it will be understood by the reader that in certain embodiments, the process or mechanism that reorients the apparatus into its activated configuration will serve to maintain that configuration without any additional step 422 process or action. Moreover, while the securing indicated at step 422 is generally anticipated to be permanent, in certain applications it will be beneficially temporary and/or repeatable.

[0062] At step 424 additional scaffolding elements will be removed or Severed to release the activated and secured from any remaining scaffolding. One of skill in the art will appreciate that this step will be unnecessary where the device was completely released from any associated scaffolding prior to activation. Moreover, in other embodiments and applications the activated device will remain coupled to surrounding scaffolding for additional processing steps. To the extent that step 424 is applied any of the approaches and methodologies identified above at, for example, step 418 will be advantageously applied according to the instant circumstances.

[0063] Thereafter, again depending on the requirements of a particular apparatus or embodiment, various testing, packaging, systems integration and other manufacturing or application steps will be applied as indicated in step 426 after which the operation concludes with step 428. One of skill in the art will appreciate that, notwithstanding the preceding description, preparation of a zipping membrane, i.e, a mobile electrode, requires that a portion of the membrane will be arranged during manuf cturing to traverse from an upper layer to a lower layer within the pump chamber.

[0064] Fig. 5A shows certain elements 500 of an assembly consistent with, for example, process 400. The elements include a first patterned ubstantially rigid layer 502, a second patterned substantially rigid layer 504, a patterned substantially flexible layer 506, and first 508 and second 510 patterned adhesive layers,

[0065] s shown, the pattern of each exemplary layer includes apertures, e.g., 512, 514 for receiving corresponding fixturing pins or dowels, e.g., 516, 518. These fixturing dowels serve to maintain a desirable alignment of the various patterns while the assembly is compressed and curing of the adhesive layers 508, 510 is accomplished.

[0066] The result, as shown 530 in Fig. 5B is an exemplary hinged assembly 532 that has been released from a surrounding scaffolding material 534 by the severing of various support regions, e.g., 536. As is readily apparent the released assembly includes a hinge feature 538 coupled between first 540 and second 542 substantially rigid members. As further shown in the magnified portion region 544, each substantially rigid member includes an upper rigid portion 546 and a lower rigid portion 548 coupled to respective sides of the flexible portion 550 by respective layers of cured , or otherwise activated, adhesive material 552, 554. It will be further appreciated that, while no securing step is apparent in relation to the hinged assembly 532, other assemblies will benefit from such further processing.

[0067] Fig. 6 illustrates, in schematic exploded perspective view, a uMECS™ zipping pump assembly 600 prepared according to principles of the invention. In light of the foregoing disclosure, one of skill in the art will appreciate that the elements illustrated in Fig. 6 are limited to the structural elements, and omit the adhesive layers, to reduce complexity and improve me clarity of presentation. Appropriate use of layers is to be understood. In addition, the electrical insulation provided to isolate the fixed electrodes from one another and from the mobile zipping electrode is not expressly

illustrated, but will be understood by one of skill in the art to be present in a functional device. Moreover, it will be understood that while the fixed electrodes are presented as structural elements including conductive portions, in various embodiments additional structural elements will be provided to support the fixed electrodes and provide other features and functions that will be desirable in particular technical circumstances.

[0068] The zipping pump assembly 600 includes a top plate including upper fixed electrode 602, a zipping membrane including the mobile electrode 604, a top spacer 606 having an internal circumferential surface 608- The internal circumferential surface 60S defines an aperture 610. Aperture 610 forms a portion of a cavity within which a corresponding portion of the zipping membrane 604 is disposed, i.e., the pump chamber. In certain embodiments, the zipping membrane will include a polymer membrane supporting a metallic layer such as, for example, a plated-on metallic layer. In certain embodiments, the polymer membrane will include a polyester {e.g., mylar® ) material. It should be understood, however, that any appropriate material or combination of materials will be employed by one of skill in the art according to the requirements of a particular technical application.

[0069] Zipping pump assembly 600 also includes a check valve

Subassembly 612. The check valve subassembly includes first 614 and second 616 hinged flap-style inlet valves disposed within respective inlet apertures 618, 620. The check valve subassembly also includes first 622 and second 624 hinged flap-style outlet valves disposed within respective outlet apertures 626, 628. The check valve subassembly includes a further internal

circumferential surface 630 which defines a further aperture 632. Aperture 632 forms a further portion of the cavity within which the corresponding portion of the zipping membrane 604 is disposed.

[0070] Zipping pump assembly 600 also includes a ducting layer 634. The ducting layer includes a furth r internal d rcumf eren tia 1 surface 636 which defines a further aperture 638. Aperture 638 forms a further portion of the cavity within which the corresponding portion of the zipping membrane 604 is disposed,, i.e., a further portion of the pump chamber. In addition, the ducting layer includes surface regions 640 and 642 defining respective first 644 and second 646 inlet duct cavities. Likewise, Surface regions 648 and 650 define respective first 652 and se ond 654 outlet duct cavities.

[0071] Finally, the zipping pump assembly 600 includes a bottom plate including a lower fixed electrode 656. It will be evident that the upper 602 and lower 656 fixed electrodes serve to enclose the pump chamber when the assembly is laminated into an integral apparatus.

[0072] Fig. 7 shows, partially assembled 700, the zipping pump assembly 600 of figure 6. The partially assembled device 700 clearly shows the pump chamber 702 formed by the combination of apertures 610, 632 and 638, The mobile electrode 604 is disposed within the pump chamber 702 with a first end 704 of the mobile electrode 604 constrained (i.e., substantially fixed) at a corresponding first end of the pump chamber 702. A second end 706 of the mobile electrode 604 is likewise constrained at a corresponding second end of d e pump chamber.

[0073] In the illustrated embodiment, the first 708 and second 710 longitudinal edges of die mobile electrode 604 are not strictly constrained, but are placed in close proximity to the ad_jacent internal surface regions (e.g. 712) of the pump chamber formed by the assembly of internal circumferential surface regions 608, 630 and 636_*

[0074] In certain embodiments, the lack of a hermetic seal b tween longitudinal edges 70S and 710 and the adjacent surface regions (e.g., 712) will result in some leakage of a working fluid around the mobile electrode 604, with a corresponding reduction in the pumping efficiency of the device. In many applications, a reasonable working tolerance for the distance between longitudinal edges 708 and 710 and the adjacent surface regions, 712, will result in a device with practical characteristics, notwithstanding some leakage.

[0075] In other devices, additional features will improve the seal at the longitudinal edge region 708 and 710 up to and including complete closure. These additional features will, in respective embodiments, include a ferro- fluidic seal where a ferro-fluidic liquid seal material is substantially constrained to the desired edge region by one or more magnetic field producing devices disposed at the surface regions 712 and or within the mobile electrode 604. In other embodiments, further electrodes in the surface regions will provide electrostatic attraction between the edges of the mobile electrode 604 and the surface regions 712, increasing a tendency of the edge of the mobile electrode 604 to remain adjacent to the surface regions 712, and hence improving seal efficiency.

[0076] In still other embodiments, bristle or brush features will be provided at the edges 708 and 710 of the mobile electrode 604 and/or at surface regions 712 to improve the effectiveness of the seal between these two elements. In still further embodiments, edge regions 708 and 710 of the mobile electrode will be fixedly coupled to the surface regions 712, while an increased elasticity of the mobile electrode membrane and/or a bellows features of the mobile electrode membrane will allow the requisite zipping motion notwithstanding this substantially fixed coupling,

[0077] Fig. 7 further illustrates the ducts formed by ducting layer 634.

These provide respective open cavities between, e.g., inlet valves 614, 616 and respective inlet apertures 714, 716. Also evident is the traversing portion 718 of the mobile electrode 604, disposed between an upward configured portion 720 and a downward configured portion 722 of that electrode.

[0078] It will be appreciated that, in many practical devices, having the two sides of the pump chamber work in concert will be beneficial. Accordingly, Fig. 8 shows, in schematic form, a zipping pump apparatus 800 in which the respective inlet valves 802, 804 and outlet valves 806, 808 of the pump are coupled, respectively, to an inlet plenum 810 and an outlet plenum 812,

[0079] When the traversing portion 814 of the mobile electrode 816 moves in a first direction 818, the working fluid is forced through outlet valve 808, and outlet plenum 812, to an outlet port 820. Symmetrically, when the traversing portion 814 of the mobile electrode 806 moves in a second direction 822, the working fluid is forced through outlet valve 806 and outlet plenum 812 to outlet port 820. One of skill in the art will readily understand that the corresponding input flows take place with respect to inlet valves 802 and 804 as well as inlet plenum 810 and inlet port 824.

[0080] Fig. 9 illustrates, in schematic form, a spring clip assembly 900 employed in certain embodiments and applications of the invention. In such embodiments of the invention, it will be beneficial to reinforce the interface between the supporting edge f the pump chamber and the mobile electrode with an elastic device so as to prevent any weakening of the coupling between these two elements.

[0081] As illustrated, spring clip assembly 900 includes a top plate 902 and a bottom plate 904. An upper fixed electrode layer 906 is coupled to a lower surface of upper plate 902. A lower fixed electrode layer 90S is coupled to upper surface of bottom plate 904. Similarly, an upper insulating layer 910 is coupled to a lower surface of upper fixed electrode 906 and a lower insulating layer 912 is coupled to an upper surface of lower fixed electrode 908.

[0082] A mobile electrode 91 is disposed between the insulating layer 910 and an elastic/spring member referred to as a "guitar fret" 916 in a region adjacent to an end 918 of upper plate 902. Adhesive material and/or filler material is, in certain embodiments, provided 920 between the msulating layer 910 and the mobile electrode 914 and between 922 the mobile electrode 914 and the guitar fret 916.

[0083] In certain embodiments, the guitar fret 916 includes an elevation layer 924 coupled, for example, with an adhesive layer 926 to an upper surface of the guitar fret 916. As indicated, the guitar fret within the assembled device, is maintained in flexion, so that an edge 928 of the elevation layer 924 maintains a compressive force 930 that urges an adjacent region 932 of the mobile electrode 914 upwards against the assembly that includes insulating layer 910, upper fixed electrode 906 and upper plate 902. This pressure exerted by the edge 928 of the elevation layer 924 results in fractional forces that tend to resist any unwanted post-assembly displacement of the mobile electrode 914. [0084] It should be noted that in some embodiments, an end 934 of the mobile electrode 914 is exposed adjacent to the end of the upper plate 918, and available for the attachment of an electrical contact thereto.

[0085] In certain embodiments, the invention includes a procedure for preparing a fluid moving device including a guitar fret spring dip as described where: first, a sublaminate is created that contains a small region that stands proud from an exterior surface. This proud region is at the end of a cantilever. This structure is labelled the "guitar fret" in the above image. During a subsequent lamination of this sublaminate to ther layers, this structure will bend, applying a spring force. In one

embodiment, this guitar fret structure is used to eliminate an adhesive bond line between a conductive diaphragm membrane and an insulated electrode, enabling creatio of an electrostatic zipping "S-membrane." S- membranes Can be used to create |iMECS™ speakers and air pumps.

[0086] Fig. 10 shows a portion of a further exemplary embodiment of a cooling blower 1000 according to principles of the invention. The cooling blower is sized and configured to provide cooling for a miniature electronic device such as, for example a cellular telephone, a personal digital assistant, a wearable device such as, for example, an Apple Watch™, or any other miniature electronic apparatus.

[0087] The illustrated portion shows a multilayer assembly that includes a pump chamber 1002 adapted to receive a mobile electrode (not shown) there within. Guitar fret spring clips 1004, 1006 are available to ensure reliable fix ru ring of the end of the mobile electrode. [0088] One exemplary inlet check valve 1008 and one exemplary outlet check valve 1010 are visible including respective flexible hinge portions 1012, 1014 and 1016, 1018. Also visible are alignment apertures 1020, 1022, 1024, 1026 for receiving the fix hiring pins that allow alignment of layers during lamination.

[0089] Further alignment apertures 1028, 1030, 1032, 1034 are visible in a surrounding scaffolding material 1036. Upon inspection, the reader will perceive coupling portions, e.g. 1038, 1040 of the various layers that together make up the assembly- These coupling portions will be severed e-g., by laser, to remove the blower from the surrounding scaffolding once assembly of the device is complete.

[0090] A blower device such as blower 1000 is particularly useful for thermal cooling in thin devices, especially consumer electronics such as Cell phones and ultra-thin laptops- Such an ultra-thin fluid pump is applicable to air cooling of such consumer devices. Within consumer electronics, the blower can be arranged to pump air from an intake to an exhaust As shown, swing check valves, in particular, can be easily manufactured using μ-VfECS™ laminated techniques, enabling a fully monolithic design. A pump constructed this way can have a total thickness of 2 mm or less and can be far thinner, quieter, and more robust than fans typically used for such applications.

[0091] In some embodiments, the blower will be formed within the printed circuit board of a device itself. In certain embodiments, channels within the printed circuit board can be arranged to provide cooling to individual components, ie. to provide localized airflow/coolant flow. Also, distribution channels within the circuit board can circulate a working fluid to an edge located heat exchanger, phase change heatsink, or other cooling apparatus including conventional apparatus and other yet to be discovered devices.

[0092] Finally, it should be noted that the frequency response characteristics and large air volume that we move for the size of the device, open up an electrostatic zipping apparatus, as disclosed, to a variety of uses in the generation of acoustical and other signals. That is, by omitting the check valves, a speaker can be prepared to produce an audible or other sonic signal that would otherwise n t be possible within a comparably sized device.

[0093] While the exemplary embodiments described above have been chosen primarily from the field electronic device cooling, one of skill in the art will appreciate that the principles of the invention are equally well applied, and that the benefits of the present invention are equally well realized in a wide variety of other systems including, for example, personal ventilation systems, chemical testing systems and others. Further, while the invention has been described in detail in connection with the presently preferred embodiments, it should be readily understood that the invention is not limited to such disclosed embodiments. Rather, the invention can be modified to incorporate any number of variations, alterations, substitutions, or equivalent arrangements not heretofore described, but which are commensurate with the spirit and Scope of the invention. Accordingly, the invention is not to be seen as limited by the foregoing description, but is only limited by the scope of the appended claims.

Claims

1. A method of forming a ooling blower comprising:

cutting a plurality of patterns in a respective plurality of sheets of material;

aligning said plurality of sheets of material so as to effect an operative alignment of said patterns; and

laminating said sheets of material to produce a zipping actuator assembly with a zipping membrane and integrated check valves such that by cycling the zipping membrane within the assembly a flow of air is produced through the check valves.

2. A method of forming a cooling blower as defined in claim 1 further comprising coupling a plurality of electronic components to said zipping actuator assembly such that said actuator assembly serves as a printed circuit board supporting said plurality of electronic components.

3. A method of forming a cooling blower as defined in claim 2 further Comprising coupling a heat exchanger to a region of said zipping actuator assembly and providing channels within said assembly such that a working fluid motivated through said channels by said cycling of said zipping membrane conveys heat from at least one component of said plurality of electronic components to said heat exchanger.

4. A method of forming a cooling blower as defined in claim 2 further comprising coupling a heat sink device to a region of said zipping actuator assembly and providing channels within said assembly such that a working fluid motivated through said channels by said cycling of said zipping membrane conveys heat from at least one component of said plurality of electronic components to said heat sink device.

5. A method of forming a cooling blower as defined in claim 3 wherein said heat sink device comprises a phase change material heat sink device.

6. A method of forming a cooling blower as defined in claim 2 further comprising providing channels within said assembly such that a working fluid motivated through said channels by said cycling of said zipping membrane conveys heat from at least one component of said plurality of electronic components to an exhaust port of an electronic device containing said at least one component.

7. A method of forming a cooling blower as defined in claim 2 further comprising providing channels within said assembly such that relatively cool ambient air is drawn into an air inlet of an electronic device including said cooling blower and motivated through said channels by said cycling of said zipping membrane.

8. A method of forming a cooling blower as defined in claim 2 wherein at least one component of said plurality of electronic components serves to control said zipping membrane.

9. A miniature blower comprising:

a plurality of layers of material, said layers of material being

substantially permanently adhered to one another, said layers of material defining pump chamber therewithin; and

a generally flexible membrane disposed within said pump chamber, said generally flexible membrane including an electrically conductive portion, said electrically conductive portion being adapted to receive an electric charge so as causing portion of said generally flexible membrane to traverse said pump chamber and thereby displace a working fluid within said pump chamber.

10. A miniature blower as denned in claim nine wherein said generally flexible membrane includes a polymer membrane with a plated-on metallic electrically conductive portion.

11. An acoustical transducer comprising:

a first substantially rigid member having a first generally planar surface region; a second substantially rigid member having a second generally planar surface region, said second generally planar surface region being disposed in generally parallel spaced relation with respect to said first generally planar surface region; a third generally flexible member having third and fourth surface regions disposed on opposite sides of said generally flexible member and in substantially parallel spaced relation with respect to one another, said third generally flexible member having a first end substantially fixedly coupled adjacent to said first generally planar surface region and a second end substantially fixedly coupled adjacent to said second generally planar surface region such that said first generally planar surface region is disposed facing said third surface region and said second generally planar surface region is disposed acing said fourth surface region; whereby an intermediate portion of said generally flexible member between said first and second ends is adapted to traverse the space between said first generally planar surface region and said second generally planar surface region in response to respective electrical voltages applied to said firs second and third members so as to eject air from a region between said first and second generally planar surface regions and thereby produce an audible sound.

12. A fluid pump comprising:

a first substantially rigid member having a first generally planar surface region; a second substantially rigid member having a second generally planar surface region, said second generally planar surface region being disposed in generally parallel spaced relation with respect to said first generally planar surface region; a third generally flexible member having third and fourth surface regions disposed on opposite sides of said generally flexible member and in substantially parallel spaced relation with respect to one another, said third generally flexible member having a first end substantially fixedly coupled adjacent to said first generally planar surface region and a second end substantially fixedly coupled adjacent to said second generally planar surface region such that said first generally planar surface region is disposed facing said third surface region and said second generally planar surface region is disposed f cing said fourth surface region; whereby an intermediate portion of said generally flexible member between said first and second ends is adapted to traverse the space between said first generally planar surface region and said second generally planar surface region in response to respective electrical voltages applied to Said first, second and third members and, by so traversing, eject a fluid from between said first and second generally planar surface regions through a

unidirectional valve so as to result in a mass transfer of said fluid.