CN108278196B

CN108278196B - Fluid control device

Info

Publication number: CN108278196B
Application number: CN201710006875.6A
Authority: CN
Inventors: 黄哲威; 陈世昌; 廖家淯; 韩永隆; 黄启峰
Original assignee: Microjet Technology Co Ltd
Current assignee: Microjet Technology Co Ltd
Priority date: 2017-01-05
Filing date: 2017-01-05
Publication date: 2022-05-17
Anticipated expiration: 2037-01-05
Also published as: CN108278196A

Abstract

A fluid control device, comprising: the piezoelectric actuator includes a suspension plate; an outer frame; a support; a piezoelectric element; the shell comprises an outlet plate and a base, the outlet plate is used for the piezoelectric actuator to be arranged in, the base comprises an inlet plate and a resonance sheet, the inlet plate is provided with a confluence chamber communicated with the outside, and the resonance sheet is arranged and fixed on the inlet plate and provided with a hollow hole; the colloid is arranged between the outer frame of the piezoelectric actuator and the resonance sheet of the base so as to maintain a gap between the piezoelectric actuator and the resonance sheet of the base; the suspension plate is made of a material with a linear expansion coefficient smaller than that of the piezoelectric element, and has a hardness capable of keeping bending after being deformed by heat, and the linear expansion coefficients of the suspension plate and the resonance sheet are different, so that a gap between the suspension plate and the resonance sheet obtains a specific deformation displacement.

Description

Fluid control device

[ technical field ] A method for producing a semiconductor device

The present invention relates to a fluid control device suitable for use in a miniature, ultra-thin and silent fluid control device.

[ background of the invention ]

At present, in all fields, no matter in medicine, computer technology, printing, energy and other industries, products are developed towards refinement and miniaturization, wherein fluid conveying structures contained in products such as micropumps, sprayers, ink jet heads, industrial printing devices and the like are key technologies thereof, so that how to break through technical bottlenecks thereof by means of innovative structures is an important content of development.

For example, in the medical industry, many instruments or devices that require pneumatic power are often used with conventional motors and pneumatic valves for fluid delivery purposes. However, the volume of the conventional motor and the fluid valve is limited, so that it is difficult to reduce the volume of the whole device, i.e. to achieve the goal of thinning, and further, the portable purpose of the apparatus cannot be achieved. In addition, these conventional motors and fluid valves also generate noise when they are actuated, which causes inconvenience and discomfort in use.

Therefore, how to develop a fluid control device that can improve the above-mentioned shortcomings of the known technologies and make the conventional instruments or equipment using the fluid control device achieve small size, miniaturization and silence, thereby achieving the purpose of portable and comfortable use is a problem that needs to be solved.

As shown in fig. 1, a fluid control device includes a housing 1, a piezoelectric actuator 2, two

insulating sheets

3a and 3b, and a conductive sheet 4. The casing 1 includes an outlet plate 11 and a base 12, the outlet plate 11 is a frame structure with a side wall 111 at the periphery and a plate 112 at the bottom, and the side wall 111 and the plate 112 define a receiving space 113 together for the piezoelectric actuator 2 to be disposed in the receiving space 113, the plate 112 is recessed on a surface to form a temporary storage chamber 114, and the plate 112 is provided with at least one discharge hole 115 penetrating and communicating with the temporary storage chamber 114; the base 12 includes an inlet plate 121 and a resonator plate 122, the inlet plate 121 has at least one inlet hole 1211, at least one bus slot 1212 and a collecting chamber 1213, the inlet hole 1211 is correspondingly communicated with the bus slot 1212, and the other end of the at least one bus slot 1212 is communicated with the collecting chamber 1213, the collecting chamber 1213 forms a chamber for collecting fluid for temporary storage, the depth of the formed chamber is the same as the depth of the bus slot 1212, the resonator plate 122 is made of a flexible material, and has a hollow hole 1223 corresponding to the collecting chamber 1213 of the inlet plate 121, so that the fluid in the collecting chamber 1213 can flow through the hollow hole 1223 to the lower side of the resonator plate 122. Thus, the outlet plate 11, the insulating sheet 3b, the conductive sheet 4, the insulating sheet 3a, the piezoelectric actuator 2 and the base 12 are sequentially stacked and fixed upwards, and finally the accommodating spaces 113 on both sides of the sidewall 111 of the outlet plate 11 are coated with the sealant 6 to prevent leakage and seal, thereby forming the fluid control device.

The piezoelectric actuator 2 is disposed corresponding to the resonator plate 122, and is composed of a suspension plate 21, a piezoelectric element 22, an outer frame 23, and at least one support 24, and the resonator plate 122 is a movable portion 1221 corresponding to the bus chamber 1213, and a fixed portion 1222 is fixed and adhered to the base 12.

The equipment to which the above-described assembled fluid control devices are applied is always in a trend of miniaturization. Therefore, it is required to further reduce the size of the fluid control device without reducing the output capacity (discharge flow rate and discharge pressure) of the fluid control device. However, the more the fluid control device is miniaturized, the more the output capacity of the fluid control device is reduced. Therefore, there is a limit to the control of the conventional configuration in order to maintain the control output capability and to miniaturize the control output capability. Therefore, the present invention has studied the control of the structure shown below.

Fig. 1 is a sectional view showing a configuration of a main part of the fluid control device. The fluid control device is a structure formed by sequentially stacking and adhering an outlet plate 11, an insulating sheet 3a, a conductive sheet 4, an insulating sheet 3b, a piezoelectric actuator 2 and a base 12 upward. In the fluid control device, since the outer frame 23 of the piezoelectric actuator 2 is fixed to the fixing portion 1222 of the resonator plate 122 by bonding via the rubber 5, the suspension plate 21 is supported by the resonator plate 122 at a distance corresponding to the thickness of the rubber 5. Further, due to the pressure fluctuation of the fluid caused by the vibration of the piezoelectric actuator 2, a part of the resonance piece 122 can vibrate at substantially the same frequency as the piezoelectric actuator 2. That is, the portion of the movable portion 1221 facing the junction chamber 1213 can be caused to flexurally vibrate due to the structure of the resonance piece 122 and the base 12. In the above configuration, when a driving voltage is applied to the piezoelectric element 22, the suspension plate 21 is caused to vibrate in a bending manner by the expansion and contraction of the piezoelectric element 22, and the movable portion 1221 of the resonator plate 122 is caused to vibrate in accordance with the vibration of the suspension plate 21. Therefore, the fluid control device sucks fluid from the at least one inlet 1211 of the base 12, introduces the fluid into the at least one bus slot 1212 and then flows into the bus chamber 1213, introduces the fluid into the temporary storage chamber 114 through the hollow hole 1223, compresses the volume of the temporary storage chamber 114 by the vibration of the suspension plate 21 of the piezoelectric actuator 2 and the resonance effect of the resonator plate 122, and discharges the fluid from the at least one outlet hole 115 of the outlet plate 11, and the movable portion 1221 vibrates along with the vibration of the piezoelectric actuator 2, so that the fluid control device can substantially increase the vibration amplitude. Therefore, the fluid control device has a high discharge pressure and a large discharge flow rate, although it is small.

However, the piezoelectric actuator 2 of the fluid control device is fixed by the adhesive 5, and since the adhesive 5 needs to be heated and pressurized to firmly adhere the piezoelectric actuator 2, the piezoelectric actuator 2 and the piezoelectric element 22 are warped (thermally deformed) according to different linear expansion coefficients of the members, and as a result, the distance between the suspension plate 21 and the resonator plate 122 is changed. Here, the distance between the suspension plate 21 and the resonator plate 122 is an important factor that affects the pressure-flow characteristics of the fluid control device.

Therefore, in the fluid control device, there is a problem that the pressure-flow rate characteristics of the fluid control device fluctuate due to a temperature change. That is, the fluid control device has a problem of poor temperature characteristics.

[ summary of the invention ]

A main object of the present invention is to provide a fluid control device capable of suppressing a change in pressure-flow rate characteristics due to a temperature change.

Another objective of the present invention is to provide a fluid control device, wherein the piezoelectric element is formed of a material having a linear expansion coefficient greater than that of the suspension plate, the suspension plate is made of stainless steel and has an area and hardness to limit the amount of thermal deformation, and the linear expansion coefficients of the base and the suspension plate are different from each other, so that the fluid control device can control the most effective deformation displacement δ between the suspension plate and the resonant plate to generate the maximum performance and flow rate after the colloid between the base and the suspension plate is heated and pressurized, and the fluid control device can suppress the pressure-flow rate characteristic from changing due to temperature change, and can maintain a proper pressure-flow rate characteristic within a wide temperature range to achieve the purposes of overall volume reduction, thinning, portability and comfort.

To achieve the above objective, in one broad aspect, the present invention provides a fluid control device, comprising: a piezoelectric actuator includes a suspension plate; an outer frame surrounding the suspension plate; at least one bracket connected between the suspension plate and the outer frame; the piezoelectric element is provided with a side length which is not more than that of the suspension plate and is attached to the suspension plate; the shell comprises an outlet plate, a piezoelectric actuator and a shell body, wherein the periphery of the outlet plate is provided with a side wall and a plate to form a frame structure of an accommodating space, and the piezoelectric actuator is arranged in the accommodating space; a base, including an inlet plate and a resonance plate, covering the containing space of the outlet plate to seal the piezoelectric actuator, the inlet plate having a confluence chamber communicated with the outside, the resonance plate being fixed on the inlet plate and having a hollow hole opposite to the confluence chamber of the inlet plate; the colloid is arranged between the outer frame of the piezoelectric actuator and the resonance sheet of the base so as to maintain a gap between the piezoelectric actuator and the resonance sheet of the base; the suspension plate is made of a material with a linear expansion coefficient smaller than that of the piezoelectric element, has a hardness capable of keeping bending after being subjected to thermal deformation, and has different linear expansion coefficients from the resonator plate, so that a gap between the suspension plate and the resonator plate obtains a specific deformation displacement.

[ description of the drawings ]

Fig. 1 is a schematic cross-sectional view of a fluid control device.

FIG. 2A is an exploded front view of the components associated with the fluid control device.

FIG. 2B is an exploded rear view of the components associated with the fluid control device.

FIG. 3 is a partial cross-sectional view of a base and a piezoelectric actuator of a fluid control device.

Fig. 4 is a partial cross-sectional view of the base and the piezoelectric actuator of the fluid control device shown in fig. 3 in a heated and pressurized state.

[ detailed description ] embodiments

Exemplary embodiments that embody features and advantages of this disclosure are described in detail below in the detailed description. It will be understood that the present disclosure is capable of various modifications without departing from the scope of the disclosure, and that the description and drawings are to be regarded as illustrative in nature, and not as restrictive.

As shown in fig. 1, 2A, B and 3, the fluid control device of the present invention includes a housing 1, a piezoelectric actuator 2, two

insulating sheets

3a and 3b and a conductive sheet 4. The housing 1 includes an outlet plate 11 and a base 12, and the base 12 includes an inlet plate 121 and a resonator plate 122, but not limited thereto. The piezoelectric actuator 2 is disposed corresponding to the resonator plate 122, and the outlet plate 11, the piezoelectric actuator 2, the resonator plate 122 of the base 12, the inlet plate 121, and the like are sequentially stacked upward, and the piezoelectric actuator 2 is assembled by the suspension plate 21, the piezoelectric element 22, the outer frame 23, and at least one bracket 24.

In the embodiment, the outlet plate 11 of the housing 1 is a frame structure having a side wall 111 at the periphery and a plate 112 at the bottom, and the side wall 111 and the plate 112 together define an accommodating space 113 for the piezoelectric actuator 2 to be disposed in the accommodating space 113, the plate 112 is recessed on a surface to form a temporary storage chamber 114, and the plate 112 is provided with at least one discharge hole 115 penetrating and communicating with the temporary storage chamber 114. The base 12 includes an inlet plate 121 and a resonant plate 122, wherein the inlet plate 121 has at least one inlet hole 1211, and in the present embodiment, the number of the inlet holes 1211 is 4, but not limited thereto, and the inlet holes 1211 penetrate through the upper and lower surfaces of the inlet plate 121, and are mainly used for allowing the fluid to flow from the at least one inlet hole 1211 into the fluid control device under the action of the atmospheric pressure from the outside of the device; the inlet plate 121 has at least one bus slot 1212, each bus slot 1212 is correspondingly connected to an inlet 1211, a bus chamber 1213 is disposed at a central portion of the bus slot 1212, and the bus chamber 1213 is connected to the bus slot 1212, so that the fluid entering the bus slot 1212 from the at least one inlet 1211 can be guided and collected to the bus chamber 1213.

In the present embodiment, the inlet plate 121 has an inlet 1211, a bus groove 1212 and a junction chamber 1213 formed integrally, and after the inlet plate 121 and the resonator plate 122 are assembled correspondingly, a chamber for collecting the fluid is formed at the junction chamber 1213 for temporary storage of the fluid.

In some embodiments, the inlet plate 121 is made of a stainless steel material, but not limited thereto. In other embodiments, the depth of the chamber formed by the bus chamber 1213 is the same as the depth of the bus slots 1212, but not limited thereto.

The piezoelectric actuator 2 is disposed corresponding to the resonator plate 122 and is composed of a suspension plate 21, a piezoelectric element 22, an outer frame 23 and at least one support 24, wherein the resonator plate 122 is a movable portion 1221 corresponding to the collecting chamber 1213, and a portion fixedly adhered to the base 12 is a fixed portion 1222, and the resonator plate 122 has a hollow hole 1223 disposed corresponding to the collecting chamber 1213 of the inlet plate 121, so as to allow fluid to flow therethrough. In the present embodiment, the resonator plate 122 is made of a flexible material, but not limited thereto. In other embodiments, the resonator plate 122 is a copper material, but not limited thereto.

The piezoelectric element 22 has a square plate-like structure, has a side length no greater than that of the suspension plate 21, and can be attached to the suspension plate 21. In the present embodiment, the suspension plate 21 is a flexible square plate structure, an outer frame 23 is disposed around the outer side of the suspension plate 21, and the configuration of the outer frame 23 also substantially corresponds to the configuration of the suspension plate 21. In the present embodiment, the outer frame 23 is also a square hollow frame structure; and the suspension plate 21 is connected with the outer frame 23 by four brackets 24 and provides elastic support. Referring to fig. 2A and fig. 2B, the suspension plate 21, the outer frame 23 and the four brackets 24 are integrally formed, and may be made of a metal plate, such as stainless steel, but not limited thereto, and the piezoelectric actuator 2 of the fluid control device of the present invention is formed by bonding the piezoelectric element 22 and the metal plate, but not limited thereto. The outer frame 23 is disposed around the outer side of the suspension board 21, and has a conductive pin 231 protruding outward for electrical connection, but not limited thereto; and the four brackets 24 are connected between the suspension plate 21 and the outer frame 23 to provide elastic support. In the present embodiment, one end of each of the brackets 24 is connected to the side of the suspension plate 21, the other end is connected to the inner side of the outer frame 23, and at least one gap 25 is further provided between the bracket 24, the suspension plate 21 and the outer frame 23 for fluid flow, and the type and number of the suspension plate 21, the outer frame 23 and the brackets 24 are various. Through the bracket 24 spanning between the suspension plate 21 and the outer frame 23, the uneven offset angle of the suspension plate 21 during operation is reduced, which is helpful to increase the amplitude of the suspension plate 21 on the Z axis, so that the suspension plate 21 can have a better displacement state during vertical vibration, i.e. the suspension plate 21 is more stable and consistent during actuation, thereby facilitating the improvement of the stability and efficiency of the actuation of the piezoelectric actuator 2. In the embodiment, the suspension plate 21 is a square structure with a step surface, that is, a protrusion 26 is further disposed on a surface of the suspension plate 21, and the protrusion 26 may be a circular protrusion structure, but not limited thereto.

The two

insulating sheets

3a and 3b are provided so as to sandwich the conductive sheet 4 from above and below. In addition, in some embodiments, the insulating

sheets

3a and 3b are made of an insulating material, such as: plastic, but not limited to this, for insulation; in other embodiments, the conductive sheet 4 is made of a conductive material, such as: but not limited to, metals for electrical conduction. In the embodiment, a conductive pin 41 may be disposed on the conductive sheet 4 for electrical conduction.

When the fluid control device is assembled, the outlet plate 11, an insulating plate 3b, a conductive plate 4, an insulating plate 3a, a piezoelectric actuator 2, and a base 12 are sequentially stacked, assembled, and fixed upwards, and are accommodated in the accommodating space 113 of the outlet plate 11, and finally the accommodating space 113 on both sides of the sidewall 111 of the outlet plate 11 is coated with the sealant 6 for leak-proof sealing, so as to form the fluid control device with small flow volume and miniaturized shape. In the above-described configuration, when the driving voltage is applied to the piezoelectric element 22, the suspension plate 21 is subjected to bending vibration due to the expansion and contraction of the piezoelectric element 22, and the movable portion 1221 of the resonator plate 122 is vibrated along with the vibration of the suspension plate 21, whereby the fluid control device sucks fluid from the at least one inlet hole 1211 of the base 12, introduces the fluid into the at least one bus groove 1212 and into the bus chamber 1213, introduces the fluid into the buffer chamber 114 through the hollow hole 1223, compresses the volume of the buffer chamber 114 by the vibration of the suspension plate 21 of the piezoelectric actuator 2 and the resonance effect of the resonator plate 122, and discharges the fluid through the at least one discharge hole 115 of the outlet plate 11, thereby configuring an operation of the fluid control device for transferring the fluid.

As shown in fig. 1 and 3, a gap h is formed between the resonator plate 122 and the piezoelectric actuator 2, and a glue 5 is filled in the gap h between the resonator plate 122 and the outer frame 23 of the piezoelectric actuator 2, for example: the conductive adhesive, but not limited thereto, can maintain the depth of the gap h between the resonator plate 122 and the suspension plate 21 of the piezoelectric actuator 2, so as to guide the air flow to flow more rapidly; and, the compression chamber 116 is formed between the resonator plate 122 and the piezoelectric actuator 2 in response to the depth of the gap h, so that the fluid can be guided to flow between the chambers more rapidly through the hollow hole 1223 of the resonator plate 122, and the noise generation can be reduced because the floating plate 21 and the resonator plate 122 maintain a proper distance to reduce contact interference therebetween.

When the colloid 5 is adhered, it is necessary to use heating and pressing to firmly adhere the piezoelectric actuator 2 for positioning, and the colloid 5 is heated and pressed, so that the piezoelectric actuator 2 and the piezoelectric element 22 are heated to generate warpage (thermal deformation) according to different linear expansion coefficients of the members, and as a result, the distance between the suspension plate 21 and the resonator plate 122 is changed. Here, the distance between the suspension plate 21 and the resonator plate 122 is an important factor that affects the pressure-flow characteristics of the fluid control device.

Therefore, it is very important how to increase the pressure and flow rate of the fluid control device, that is, how to control the gap h, which is generated by the colloid 5, and the colloid 5 needs to be heated and pressurized to achieve the adhesion effect, and the heated metal piezoelectric actuator 2 will generate thermal deformation, in order to maintain the sufficient gap h, the piezoelectric actuator 2 made of metal material is used to make some thermal deformation limits, so as to control the most effective deformation displacement δ between the suspension plate 21 and the resonator plate 122, so as to generate the maximum performance and flow rate.

In the present invention, the material condition of the suspension plate 21 is changed by fixing the thermal deformation amount of the piezoelectric element 22 by using the assembly relationship between the suspension plate 21 and the piezoelectric element 22, that is, the piezoelectric element 22 needs to be formed by a material having a linear expansion coefficient larger than that of the suspension plate 21, and in the condition that the piezoelectric actuator 2 is fixed on the base 12 by using the adhesive 5, after the adhesive 5 is heated and pressed to be bonded, the suspension plate 21 is warped convexly toward the piezoelectric element 22 side due to the difference in the linear expansion coefficients of the piezoelectric element 22 and the suspension plate 21 at normal temperature, as shown in fig. 4, the resonator plate 122 on the base 12 is warped upwardly as shown in fig. 4, that is, the resonator plate 122 is warped convexly toward the side away from the suspension plate 21, so as to control the most effective deformation displacement amount δ between the suspension plate 21 and the resonator plate 122, to provide the maximum performance and flow rate, so that the fluid control device can restrain the pressure and flow rate characteristics from changing due to temperature change. That is, the fluid control device is able to maintain proper pressure-flow characteristics over a wide temperature range.

In addition, in the present embodiment, the suspension plate 21 is made of stainless steel for experiments, that is, the thermal deformation amount is limited according to the area and hardness conditions of the suspension plate 21 made of stainless steel, so as to control the most effective deformation displacement amount δ between the suspension plate 21 and the resonator plate 122, thereby providing the maximum performance and flow rate.

The experimental results are as follows:

as shown in the above table, the suspension plate 21 is square, the dimension of the side is 4-10mm, the hardness H of the stainless steel material is 370HV-410HV, the hardness H/2 of the stainless steel material used for the suspension plate 21 is 310HV-350HV, so that different bending amounts can be achieved during the heating and pressing process of the colloid 5, for example, the hardness H of the stainless steel material used for the suspension plate 21 can keep the deformation displacement (delta) between the suspension plate 21 and the resonator plate 122 at 15-17 μm when being heated, the hardness H/2 of the stainless steel material used for the suspension plate 21 can keep the deformation displacement delta between the suspension plate 21 and the resonator plate 122 at 20-25 μm, therefore, the hardness H/2 of the stainless steel material used for the suspension plate 21 can be increased by 3-10 μm compared with the hardness H of the stainless steel material used for the suspension plate 21, and the driving frequency of the piezoelectric element 22 is 27-29.5kHz to drive the suspension plate 21 to generate vibration deformation, the suspension plate 21 is made of stainless steel material with hardness H, so that the output air pressure of the fluid control device is 300-400mmHg and the flow rate is 50-100ml/min, the suspension plate 21 is made of stainless steel material with hardness H/2, so that the output air pressure of the fluid control device is 30-400mmHg and the flow rate is 90-160 ml/min.

In summary, the fluid control device provided in the present application requires that the piezoelectric element be formed of a material having a linear expansion coefficient larger than that of the suspension plate, the suspension plate adopts the area and hardness conditions of stainless steel materials to limit the amount of thermal deformation, and the linear expansion coefficients of the base and the suspension plate are different, so that after the colloid between the base and the suspension plate is heated and pressurized by the fluid control device, the maximum performance and flow rate can be generated by controlling the most effective deformation displacement between the suspension plate and the resonance plate, so that the fluid control device can inhibit the pressure and flow rate characteristics from changing due to temperature change, the fluid control device can maintain proper pressure and flow rate characteristics in a wide temperature range, therefore, the portable device is light and comfortable, has great industrial application value and is applied by the following methods.

While the present invention has been described in detail with respect to the above embodiments, it will be apparent to those skilled in the art that various modifications can be made without departing from the scope of the invention as defined in the appended claims.

[ description of symbols ]

1: shell body

11: outlet plate

111: side wall

112: plate member

113: containing space

114: temporary storage chamber

115: discharge hole

116: compression chamber

12: base seat

121: entrance plate

1211: feed inlet

1212: bus bar groove

1213: confluence chamber

122: resonance sheet

1221: movable part

1222: fixing part

1223: hollow hole

2: piezoelectric actuator

21: suspension plate

22: piezoelectric element

23: outer frame

231. 41: conductive pin

24: support frame

25: voids

26: convex part

3a, 3 b: insulating sheet

4: conductive sheet

5: colloid

6: sealing compound

h: gap

δ: deformation displacement

Claims

1. A fluid control device, comprising:

a piezoelectric actuator, comprising:

a suspension plate;

an outer frame surrounding the suspension plate;

at least one bracket connected between the suspension plate and the outer frame; and

the piezoelectric element is provided with a side length which is not more than that of the suspension plate and is attached to the suspension plate; and

a housing, comprising:

the periphery of the outlet plate is provided with a side wall and a plate to form a frame structure of an accommodating space, and the piezoelectric actuator is arranged in the accommodating space; and

a base, including an inlet plate and a resonance plate, covering the containing space of the outlet plate to seal the piezoelectric actuator, the inlet plate having a confluence chamber communicated with the outside, the resonance plate being fixed on the inlet plate and having a hollow hole opposite to the confluence chamber of the inlet plate; and

the colloid is arranged between the outer frame of the piezoelectric actuator and the resonance sheet of the base so as to maintain a gap between the piezoelectric actuator and the resonance sheet of the base;

the suspension plate is made of a material with a linear expansion coefficient smaller than that of the piezoelectric element, and has a hardness capable of keeping bending after being heated and deformed, the linear expansion coefficients of the suspension plate and the resonator are different, the resonator and the suspension plate are respectively warped towards different directions under a normal-temperature non-actuated state, and the resonator is warped towards the side far away from the suspension plate in a convex manner, so that the gap between the suspension plate and the resonator obtains a deformation displacement with the maximum performance and flow.

2. The fluid control device according to claim 1, wherein the suspension plate is stainless steel and has a hardness of preferably 310HV to 350 HV.

3. The fluid control device according to claim 2, wherein the suspension plate is deformed by heating to maintain a deformation displacement between the suspension plate and the resonator plate of 20-25 μm, so as to provide an output pressure of the fluid control device of 300-400mmHg at a flow rate of 90-160 ml/min.

4. The fluid control device according to claim 1, wherein the suspension plate is a stainless steel material having a hardness of 370HV-410 HV.

5. The fluid control device according to claim 4, wherein the suspension plate is deformed by heating and the displacement between the suspension plate and the resonator plate is maintained at 15-17 μm to provide the fluid control device with an output pressure of 300-400mmHg and a flow rate of 50-100 ml/min.

6. The fluid control device according to claim 1, wherein the suspension plate is square in configuration.

7. The fluid control device defined in claim 6, wherein the suspension plate has a side length of between 4mm and 10 mm.

8. The fluid control device according to claim 1, wherein the piezoelectric element has a driving frequency of 27 to 29.5 kHz.

9. The fluid control device according to claim 1, wherein the suspension plate is formed of a material having a coefficient of linear expansion smaller than that of the electric element, and after the adhesive is bonded under heat and pressure, the suspension plate is warped convexly toward the piezoelectric element side due to a difference in coefficient of linear expansion between the piezoelectric element and the suspension plate at normal temperature.

10. The fluid control device according to claim 9, wherein the suspension plate and the resonator plate have different linear expansion coefficients, and the resonator plate is warped in a convex shape toward a side away from the suspension plate at normal temperature after the colloid is heated and pressed for bonding.

11. The fluid control device according to claim 1, wherein the gel is a conductive gel.

12. The fluid control device as claimed in claim 1, wherein the inlet plate has at least one inlet hole penetrating through upper and lower surfaces of the inlet plate, and the inlet plate has at least one bus slot, each bus slot is disposed in communication with the at least one inlet hole, a bus chamber is disposed at a central communication position of the bus slot, and the bus chamber is in communication with the at least one bus slot, thereby guiding and collecting the fluid entering the at least one bus slot from the at least one inlet hole to the bus chamber.

13. The fluid control device according to claim 1, wherein the suspension plate has a protrusion corresponding to the hollow hole of the resonator plate.

14. The fluid control device according to claim 1, wherein the resonator plate is a movable portion corresponding to the manifold chamber, and the fixedly bonded base portion is a fixed portion.

15. The fluid control device as claimed in claim 1, further comprising two insulating sheets and a conducting sheet, wherein the two insulating sheets are disposed by vertically sandwiching the conducting sheet, and the outlet plate, the insulating sheet, the conducting sheet, another insulating sheet, the piezoelectric actuator and the base are sequentially stacked and assembled and fixed upward, and accommodated in the accommodating space of the outlet plate, thereby forming the fluid control device.