TWI706082B - Actuator structure and micro-fluid control device using the same - Google Patents

Abstract

An actuator structure for using in a micro-fluid control device is disclosed and comprises a suspension plate, a frame, at plurality of supporting parts and a piezoelectric ceramic, the suspension plate is square and has a first surface and a second surface, a protruding potion is disposed on the second surface, the frame is disposed surrounding the outside of the suspension plate, and also has a first surface and a second surface, the second surface of the frame is coplanar with the second surface of the suspension plate except the area of the protruding portion, the plurality of supporting parts are disposed between the square suspension plate and the frame, and the length of each supporting part is between 1.11mm to 1.21mm, and the width is between 0.2mm to 0.6mm, and the side length of the piezoelectric ceramic is not larger than the side length of the suspension plate, and the piezoelectric ceramic sticks on the first surface of the suspension plate.

Description

Piezoelectric actuator and its applicable micro fluid control device

This case is about a piezoelectric actuator, especially a piezoelectric actuator suitable for a micro, ultra-thin and silent micro fluid control device.

At present, in various fields, whether it is medicine, computer technology, printing, energy and other industries, products are developing in the direction of refinement and miniaturization. Among them, products such as micro pumps, sprayers, inkjet heads, and industrial printing devices include Fluid transport structure is its key technology, so how to break through its technical bottleneck through innovative structure is an important content of development.

For example, in the pharmaceutical industry, many instruments or equipment that need to be driven by pneumatic power usually use traditional motors and pneumatic valves to achieve the purpose of gas delivery. However, limited by the volume limitations of these traditional motors and gas valves, it is difficult for this type of equipment to reduce the volume of its overall device, that is, it is difficult to achieve the goal of thinning, and it is also impossible to make it portable. In addition, these conventional motors and gas valves also generate noise problems when they are in operation, resulting in inconvenience and uncomfortable use.

Therefore, how to develop a miniature fluid control device and its pressure control device that can improve the above-mentioned lack of conventional technology, and make the traditional instrument or equipment using the fluid control device small, miniaturized and silent, thereby achieving the purpose of being portable and comfortable. Electric actuators are indeed a problem that needs to be solved urgently.

The main purpose of this case is to provide a miniature fluid control device suitable for portable or wearable instruments or equipment and the piezoelectric actuator used in it. The piezoelectric actuator has a suspension plate and an outer frame. And four brackets, each bracket is vertically connected between the suspension board and the outer frame to provide elastic support, and the brackets vertically straddling between the suspension board and the outer frame can reduce the uneven swing of the suspension board. It is helpful to increase the amplitude of the suspension plate on the Z axis, so that the suspension plate is more stable and consistent when moving, which is beneficial to improve the stability and performance of the piezoelectric actuator.

Another purpose of the present case is to provide a micro fluid control device suitable for portable or wearable instruments or equipment. The suspension plate, outer frame, and bracket of the piezoelectric actuator are integrated into a metal plate structure, and through The convex part of the suspension board and the required type of support are etched at the same depth, so that the second surface of the outer frame, the second surface of the support and the second surface of the suspension board are all coplanar structures, which can simplify the need to respond to the outer frame in the past. Perform multiple etching processes at different depths, and at the same time, through the adhesive layer disposed between the outer frame and the resonance plate, apply to the rough surface of the outer frame after etching, so as to increase the bonding between the adhesive layer and the outer frame Strength, and because the thickness of the outer frame is reduced compared to the previous manufacturing method, the thickness of the adhesive layer coating the gap is increased, and the thickness of the adhesive layer is increased, which can effectively improve the unevenness of the adhesive layer. Reduce the horizontal assembly error during the suspension board assembly, and improve the kinetic energy utilization efficiency in the vertical direction of the suspension board. At the same time, it can also assist in absorbing vibration energy and reduce noise to achieve mute effect. The miniaturized piezoelectric actuator can be more The overall volume of the micro fluid control device is reduced and thinner, so as to achieve the purpose of being portable and comfortable.

Another purpose of this case is to provide a micro fluid control device used in portable or wearable instruments or equipment, by means of the square-shaped design of the suspension plate of the piezoelectric actuator and the suspension plate has more convex parts The action allows fluid to flow in from the air inlet hole of the air inlet plate of the base, and flow along the connected busbar holes and the bus chamber, through the holes in the resonant plate to make the fluid flow in the resonant plate and piezoelectric actuator A pressure gradient is generated in the compression chamber formed between, and then the fluid flows at a high speed, the flow rate of the fluid will not decrease, and no pressure loss will occur, and the transmission can be continued to obtain a higher discharge pressure.

In order to achieve the above-mentioned purpose, one of the broader implementation aspects of this case is to provide a piezoelectric actuator, which includes a suspension plate, is in the form of a square, and can be flexurally vibrated from a central part to an outer periphery; an outer frame surrounds Is arranged on the outer side of the suspension board; a plurality of brackets, each of the brackets is vertically connected between the suspension board and the outer frame to provide elastic support, and the bracket has a length between 1.11mm to 1.21mm and a width between Between 0.2mm and 0.6mm; and a piezoelectric ceramic plate, in the form of a square, with a side length not greater than the side length of the suspension board, attached to the first surface of the suspension board for applying voltage to Drive the suspension plate to bend and vibrate.

In order to achieve the above objective, another broad implementation aspect of this case is to provide a micro fluid control device, which includes a piezoelectric actuator with a suspension plate, an outer frame, four brackets, and a piezoelectric ceramic plate. The suspension board is in a square shape and has a first surface and a corresponding second surface. The second surface has a convex part. The outer frame is arranged around the outer side of the suspension board and also has a first surface. A surface and a corresponding second surface, and the second surface of the outer frame and the area outside the convex portion of the second surface of the suspension board are coplanar, the bracket is connected to the suspension board and Between the outer frame, the length is between 1.11mm to 1.21mm, and the width is between 0.2mm and 0.6mm. The piezoelectric ceramic plate has a side length not greater than the side length of the suspension board, and is attached to the suspension board. On the first surface; and a housing, including a gas collecting plate and a base, the gas collecting plate is a frame structure with a side wall on the periphery to form an accommodating space, so that the piezoelectric actuator is arranged in In the accommodating space, the base is formed by joining an air inlet plate and a resonance sheet, and is combined in the accommodating space of the air collecting plate to close the piezoelectric actuator, the air inlet plate There is at least one air inlet hole and at least one busbar hole communicating with it to form a confluence chamber. The resonance plate is arranged and fixed on the air inlet plate and has a hollow hole opposite to the air inlet plate. The confluence chamber corresponds to the convex portion of the suspension plate; wherein, a glue layer is arranged between the second surface of the outer frame of the piezoelectric actuator and the resonant sheet of the base, so that the A gap depth of the required compression chamber is maintained between the piezoelectric actuator and the resonant plate of the base.

1: Micro fluid control device

1a: shell

10: Base

11: intake plate

11a: The second surface of the intake plate

11b: The first surface of the intake plate

110: air inlet

111: Confluence chamber

112: bus hole

12: Resonance film

12a: movable part

12b: Fixed part

120: Hollow hole

121: Compression chamber

13: Piezo actuator

130: hoverboard

130a: The second surface of the suspension board

130b: The first surface of the suspension board

130c: convex

130d: center

130e: Peripheral

130f: side

131: Outer Frame

131a: The second surface of the outer frame

131b: the first surface of the outer frame

131c: inner side

132: Bracket

132a: The second surface of the bracket

132b: The first surface of the bracket

133: Piezoelectric ceramic plate

134, 151: conductive pins

135: Gap

136: Glue layer

141, 142: Insulation sheet

15: conductive sheet

16: Gas collecting plate

16a: accommodation space

160: Surface

161: Reference surface

162: Gathering Chamber

163: first through hole

164: second through hole

165: The first pressure relief chamber

166: The first out of the oral cavity

167: Convex structure

168: Sidewall

h: gap

Figure 1A is a schematic diagram of the front exploded structure of the micro fluid control device of the preferred embodiment.

Figure 1B is a schematic view of the front assembly structure of the micro fluid control device shown in Figure 1A.

Fig. 2A is a schematic diagram of the rear exploded structure of the micro fluid control device shown in Fig. 1A.

Fig. 2B is a schematic diagram of the back assembly structure of the micro fluid control device shown in Fig. 2A.

Figure 3A is a schematic diagram of the front structure of the piezoelectric actuator of the micro fluid control device shown in Figure 1A.

Figure 3B is a schematic diagram of the backside structure of the piezoelectric actuator of the micro fluid control device shown in Figure 1A.

Figure 3C is a schematic cross-sectional structure diagram of the piezoelectric actuator of the micro fluid control device shown in Figure 1A.

Figures 4A to 4E are schematic diagrams of partial operations of the micro fluid control device shown in Figure 1A.

Figure 5 is a schematic cross-sectional enlarged view of the micro fluid control device shown in Figure 1B.

Some typical embodiments embodying the features and advantages of this case will be described in detail in the following description. It should be understood that the case can have various changes in different aspects, which do not depart from the scope of the case, and the descriptions and diagrams therein are essentially for illustrative purposes, rather than being constructed to limit the case.

The piezoelectric actuator 13 in this case is applied to the micro fluid control device 1, and the micro fluid control device 1 can be applied to industries such as medicine and biotechnology, energy, computer technology, or printing, etc., to transfer fluid, but Not limited to this. Please refer to Figure 1A, Figure 1B, Figure 2A and Figure 2B. Figure 1A is a schematic diagram of the front exploded structure of the micro fluid control device of the preferred embodiment of the present invention, and Figure 1B is the micro fluid shown in Figure 1A. A schematic diagram of the front combined structure of the control device. Figure 2A is a schematic diagram of the back side of the micro fluid control device shown in Figure 1A. Figure 2B is a schematic diagram of the back side combined structure of the micro fluid control device shown in Figure 2A. The figure is an enlarged cross-sectional structure diagram of the micro fluid control device shown in Figure 1B. As shown in Fig. 1A, Fig. 2A and Fig. 5, the micro fluid control device 1 of this case has a housing 1a, a piezoelectric actuator 13, insulating sheets 141, 142, and a conductive sheet 15. The housing The 1a series includes an air collecting plate 16 and a base 10, and the base 10 includes an air intake plate 11 and a resonance sheet 12, but not limited to this. The piezoelectric actuator 13 is arranged corresponding to the resonant sheet 12, and the air intake plate 11, the resonant sheet 12, the piezoelectric actuator 13, the insulating sheet 141, the conductive sheet 15, the other insulating sheet 142, and the gas collecting plate 16 and so on are stacked in sequence, and the piezoelectric actuator 13 is assembled by a suspension plate 130 and a piezoelectric ceramic plate 133. In this embodiment, as shown in FIGS. 1A and 5, the air collecting plate 16 is not only a single plate structure, but also a frame structure with a side wall 168 on the periphery, and the side wall 168 formed by the periphery A accommodating space 16a is defined together with the plate at the bottom for the piezoelectric actuator 13 to be disposed in the accommodating space 16a. As mentioned above, the gas collecting plate 16 of this embodiment has a surface 160 which is recessed to form a gas collecting chamber 162, and the gas conveyed downward by the micro fluid control device 1 is temporarily accumulated here The gas collecting chamber 162 and the gas collecting plate 16 have a first through hole 163 and a second through hole 164. One end of the first through hole 163 and the second through hole 164 communicates with the gas collecting chamber 162 , The other end is respectively connected to the first pressure relief chamber 165 and the first outlet chamber 166 on the reference surface 161 of the air collecting plate 16. And, a convex structure 167 is further added to the first outlet chamber 166, for example, but not limited to a cylindrical structure.

As shown in Figure 2A, the piezoelectric actuator 13 includes a piezoelectric ceramic plate 133, a suspension plate 130, an outer frame 131, and four brackets 132. The piezoelectric ceramic plate 133 is a square plate structure with a side length It is not larger than the side length of the suspension board 130 and can be attached to the suspension board 130. In this embodiment, the suspension board 130 is a flexible square plate structure; an outer frame 131 is arranged around the outer side of the suspension board 130, and the shape of the outer frame 131 also roughly corresponds to the shape of the suspension board 130, so In this embodiment, the outer frame 131 is also a square hollow frame structure; and four brackets 132 are connected between the floating board 130 and the outer frame 131 to provide elastic support. And, as shown in Figures 1A and 2A, the micro fluid control device 1 of this case can further include an insulating sheet 14 and a conductive sheet 15. The insulating sheet 14 can be two insulating sheets 141, 142, and the two insulating sheets The sheets 141 and 142 are provided by sandwiching the conductive sheet 15 up and down. When the micro fluid control device 1 of this case is assembled, as shown in Figure 1A, Figure 1B, Figure 2A and Figure 2B, the insulating sheet 142, the conductive sheet 15, the insulating sheet 141, and the piezoelectric actuator are sequentially The structure of the device 13 and the base 10 are assembled and housed in the accommodating space 16a in the air collecting plate 16, so that they can be assembled as shown in Figures 1B and 2B to form a body Miniature fluid control device 1 with small size and miniaturized appearance.

Please refer to FIGS. 1A and 2A. The air inlet plate 11 of the micro fluid control device 1 has a first surface 11b, a second surface 11a and at least one air inlet hole 110. In this embodiment, the air inlet The number of holes 110 is four, but it is not limited to this. They penetrate the first surface 11b and the second surface 11a of the inlet plate 11, and are mainly used for supplying gas from outside the device to comply with atmospheric pressure. At least one air inlet 110 flows into the micro fluid control device 1. And as shown in Figure 2A, it can be seen from the first surface 11b of the air inlet plate 11, which has at least one busbar hole 112 for connecting with the at least one air inlet hole 110 of the second surface 11a of the air inlet plate 11. Corresponding settings. There is a confluence chamber 111 at the central communication place of the busbar holes 112, and the confluence chamber 111 is connected to the busbar hole 112, so that the at least one air inlet hole 110 can enter the busbar hole 112. The gas is guided and concentrated to the confluence chamber 111 for downward transmission. Therefore, in this embodiment, the air inlet plate 11 has an integrally formed air inlet hole 110, a bus bar hole 112, and a confluence chamber 111, and when the inlet plate 11 and the resonance plate 12 are assembled correspondingly, the confluence chamber The place 111 constitutes a fluid-converging chamber for temporary storage of fluid. In some embodiments, the material of the air intake plate 11 can be, but is not limited to, made of a stainless steel material, and its thickness is between 0.4mm and 0.6mm, and its preferred value is 0.5mm, but Not limited to this. In other embodiments, the depth of the chamber formed by the confluence chamber 111 is the same as the depth of the busbar holes 112, but it is not limited thereto.

In this embodiment, the resonance sheet 12 is made of a flexible material, but it is not limited to this, and the resonance sheet 12 has a hollow hole 120 corresponding to the first surface 11b of the air inlet plate 11 The confluence chamber 111 is set to allow gas to circulate. In other embodiments, the resonance sheet 12 may be made of a copper material, but it is not limited to this, and its thickness is between 0.03mm and 0.08mm, and its preferred value is 0.05mm, but it is not Limit this.

As shown in Figures 4A and 5, there is a gap h between the resonant plate 12 and the piezoelectric actuator 13. In this embodiment, it is outside the resonant plate 12 and the piezoelectric actuator 13. A glue layer 136, such as conductive glue, is filled in the gap h between the frames 131, but not limited to this, so that the gap h can be maintained between the resonance plate 12 and the suspension plate 130 of the piezoelectric actuator 13 Depth, which can guide the airflow more quickly Flow quickly; and, in response to the depth of the gap h, a compression chamber 121 can be formed between the resonance plate 12 and the piezoelectric actuator 13, and the fluid can be guided between the chambers through the cavity 120 in the resonance plate 12 It flows more quickly, and because the suspension plate 130 and the resonance plate 12 keep a proper distance, the contact interference with each other is reduced, and the noise generation can be reduced.

In addition, please refer to Figures 1A and 2A at the same time. The micro fluid control device 1 further has an insulating sheet 141, a conductive sheet 15 and another insulating sheet 142, which are sequentially sandwiched between the piezoelectric actuator Between 13 and the air collecting plate 16, and its shape roughly corresponds to the shape of the outer frame 131 of the piezoelectric actuator 13. In some embodiments, the insulating sheets 141, 142 are made of insulating materials, such as plastic, but not limited to this, for insulation purposes. In other embodiments, the conductive sheets 15 are made of insulating materials. It is made of conductive materials, such as metal, but not limited to this, for electrical conduction. Moreover, in this embodiment, a conductive pin 151 can also be provided on the conductive sheet 15 for electrical conduction.

Please refer to Fig. 3A, Fig. 3B and Fig. 3C at the same time, which are the front structure diagram, back structure diagram and cross-sectional diagram of the piezoelectric actuator of the micro fluid control device shown in Fig. 1A, respectively. As shown, the piezoelectric actuator 13 is assembled by a suspension plate 130, an outer frame 131, a plurality of brackets 132, and a piezoelectric ceramic plate 133. In this embodiment, the plurality of brackets 132 are There are four brackets 132, but it is not limited to this. The number can be changed according to the actual implementation situation; and, the suspension plate 130, the outer frame 131 and the four brackets 132 can be but not limited to be integrally formed The structure can be composed of a metal plate, such as stainless steel, but not limited to this. Therefore, the piezoelectric actuator 13 of the micro fluid control device 1 in this case is composed of a piezoelectric ceramic plate 133 It is bonded with a metal plate, but not limited to this. And as shown in the figure, the suspension plate 130 has a first surface 130b and a corresponding second surface 130a, wherein the piezoelectric ceramic plate 133 is attached to the first surface 130b of the suspension plate 130 for applying voltage to drive the The suspension plate 130 flexes and vibrates. As shown in Figure 3A, the floating plate 130 has a central portion 130d and an outer peripheral portion 130e, so when the piezoelectric ceramic plate 133 is driven by voltage, the floating plate 130 can bend and vibrate from the central portion 130d to the outer peripheral portion 130e; the outer frame 131 It is arranged around the outer side of the suspension board 130, and has a conductive pin 134 protruding outwards for power connection, but Not limited to this.

In this embodiment, the four brackets 132 are respectively connected vertically between the suspension plate 130 and the outer frame 131 to provide elastic support, that is, the side 130f of the suspension plate 130 and the inner side 131c of the outer frame 131 are They are arranged in parallel, and one end of each bracket 132 is vertically connected to the side 130f of the suspension board 130, and the other end is vertically connected to the inner side 131c of the outer frame 131, so that the four brackets 132 and the side 130f of the suspension board 130 The inner side 131c of the outer frame 131 is coaxially connected at a right angle, and there is at least one gap 135 between the bracket 132, the suspension plate 130, and the outer frame 131 for fluid circulation, and the suspension plate 130 and the outer frame 131 And the type and quantity of the bracket 132 have many changes. Through the bracket 132 that is vertically arranged between the suspension plate 130 and the outer frame 131, the uneven deviation angle of the suspension plate 130 during operation is reduced, which helps to increase the amplitude of the suspension plate 130 on the Z axis, so that the suspension The plate 130 can have a better displacement state when it vibrates up and down, that is, the suspension plate 130 is more stable and consistent when it is actuated, which helps to improve the stability and performance of the piezoelectric actuator 13.

In the piezoelectric actuator 13 of this case, the different length and width of the bracket 132 will cause the performance of the piezoelectric actuator 13 to be different. The data of each performance is shown in Table 1:

As can be seen from the data in Table 1, in this embodiment, the length of each bracket 132 is between 1.11mm and 1.21mm, and its performance is better, and the preferred length of the bracket 132 is 1.16mm. The performance can be significantly improved, and the width of each bracket 132 is between 0.2 mm and 0.6 mm, and the preferred value is 0.4 mm, but it is not limited thereto.

As shown in Figures 3A and 3C, the second surface 130a of the suspension plate 130, the second surface 131a of the outer frame 131, and the second surface 132a of the bracket 132 are flat and coplanar, and take this embodiment as For example, the suspension plate 130 has a square structure, and the length of each side of the suspension plate 130 is between 7.5mm and 12mm, and its preferred value is between 7.5 and 8.5mm, and the thickness is between 0.1mm and Between 0.4mm, the preferred value is 0.27mm, but not limited to this. And the thickness of the outer frame is also between 0.1mm and 0.4mm, but not limited to this. And, the side length of the piezoelectric ceramic plate 133 is not greater than the side length of the suspension plate 130, and is also designed as a square plate structure corresponding to the suspension plate 130, and the thickness of the piezoelectric ceramic plate 133 is between 0.05 mm and 0.3 mm, and its preferred value is 0.10mm. Through the design of the square piezoelectric ceramic plate 131 and the square suspension plate 130 used in this case, the reason is that compared with the circular suspension of the conventional piezoelectric actuator The board design, the square suspension board 130 of the piezoelectric actuator 13 in this case obviously has the advantage of saving electricity, and the comparison of its power consumption is shown in Table 2 below:

Therefore, from the above table of the experiment, we know that the side length (8mm to 10mm) of the square suspension plate of the piezoelectric actuator is compared with the diameter of the circular suspension plate (8mm to 10mm) of the piezoelectric actuator. It is more power-saving. The reason for the power-saving can be inferred as: because of the capacitive load operating at the resonance frequency, the power consumption will increase with the increase of the frequency, and the resonance frequency of the square suspension plate 130 with side length is obviously higher than The circular suspension plate of the same diameter is low, so its relative power consumption is also significantly lower. That is, the square design of the suspension plate 130 used in this case has the advantage of power saving compared with the previous circular suspension plate design. The micro-fluid control device 1 adopts the design trend of miniature, ultra-thin and quiet, and can reach low The power consumption design is especially useful for wearable devices, and power saving is a very important design focus.

As mentioned above, in this embodiment, the suspension board 130, the outer frame 131, and the four brackets 132 arranged perpendicular to the suspension board 130 and the outer frame 131 can be, but not limited to, an integrally formed structure. The manufacturing method can be made by traditional processing, or yellow light etching, or laser processing, or electroforming processing, or electric discharge processing, etc., and they are not limited to this. However, taking this embodiment as an example, the suspension plate 130, the outer frame 131, and the four brackets 132 of the piezoelectric actuator 13 in this case are integrally formed, that is, a metal plate, and by making the outer frame 131, the four brackets 132 and the suspension board 130 are etched at the same depth, so that the second surface 131a of the outer frame 131, the second surface 132a of the four brackets 132, and the second surface 130a of the suspension board 130 are all coplanar structures; The deep etching process can simplify the multiple etching processes that had to be done in the past according to the different depths of the outer frame 131. At the same time, the adhesive layer 136 provided between the outer frame 131 and the resonant plate 12 is applied to the outer frame 131. The rough surface produced after etching can increase the bonding strength between the adhesive layer and the outer frame, and since the thickness of the outer frame 131 is lower than that of the previous manufacturing method, the thickness of the adhesive layer 136 coated with the gap h By increasing the thickness of the adhesive layer 136, the uneven coating of the adhesive layer 136 can be effectively improved, the horizontal assembly error during the assembly of the suspension board 130 can be reduced, and the vertical kinetic energy utilization efficiency of the suspension board 130 can be improved. Help absorb vibration energy and reduce noise.

In the micro fluid control device 1 of this case, the different thickness of the adhesive layer 136 will cause the performance and defect rate of the micro fluid control device to be different. The data of each performance and defect rate are shown in Table 3 below:

It is obvious from the data in Table 3 that the thickness of the adhesive layer 136 can significantly affect the microfluidic control device. For the performance of setting 1, if the thickness of the glue layer 136 is too thick, although the gap h can maintain a thicker depth, the compression chamber 121 has a deeper depth and a larger volume, and its compression action performance will change. If the thickness of the adhesive layer 136 is too thin, the depth of the gap h that it can provide will also be insufficient, which will easily cause the protrusion 130c of the suspension plate 130 and the resonance sheet 12 to contact and collide with each other. , Which in turn reduces performance and produces noise, and noise is also one of the reasons for product failure. Therefore, in the embodiment of this case, after sampling 25 micro fluid control devices 1 products, the thickness of the glue layer 136 is between 50 and 60 μm. In this numerical range, not only the performance is significantly improved, but also The defect rate is relatively low, and the preferred value is 55μm, the performance is better, and the defect rate is the lowest, but it is not limited to this.

As shown in Figure 3B, in this embodiment, the suspension plate 130 is a square with a stepped surface structure, that is, there is a convex portion 130c on the second surface 130a of the suspension plate 130, and the convex portion 130c It is disposed at the central portion 130d of the second surface 130a, and can be, but is not limited to, a circular convex structure. In some embodiments, the height of the protrusion 130c is between 0.02 mm and 0.08 mm, preferably 0.03 mm, and its diameter is 4.4 mm, but it is not limited thereto.

Therefore, please refer to Fig. 1A, Fig. 4A to Fig. 4E and Fig. 5, the base 10, the piezoelectric actuator 13, the insulating sheet 141, the conductive sheet 15, the other insulating sheet 142 and the gas collecting plate After 16 pieces are stacked and assembled in sequence, as shown in Fig. 4A and Fig. 5, it can be seen that the micro fluid control device 1 can form a chamber for confluent gas at the cavity 120 in the resonant plate 12 and the inlet plate 11 on it. , That is, the chamber at the confluence chamber 111 on the first surface 11b of the intake plate 11, and a compression chamber 121 is formed between the resonant plate 12 and the piezoelectric actuator 13 to temporarily store gas, and The compression chamber 121 communicates with the chamber at the confluence chamber 111 of the first surface 11b of the air inlet plate 11 through the cavity 120 in the resonant sheet 12. The micro fluid control device 1 controls and drives the piezoelectric actuator 13 below. A partial schematic diagram of an implementation state of the floating plate 130 performing vertical reciprocating vibration is illustrated.

As shown in Figure 4B, when the suspension plate 130 of the piezoelectric actuator 13 is controlled to drive the vertical reciprocating vibration and the bending deformation is displaced downward, the gas will be generated from at least one of the inlet plate 11 The air inlet 110 enters and passes through at least one bus hole 112 on the first surface 11b to converge to the central bus chamber 111. At this time, because the resonance sheet 12 is a light and thin sheet structure, it will be affected by the fluid Bringing in and pushing, and vertical reciprocating vibration will follow the resonance of the suspension plate 130, that is, the movable part 12a of the resonance plate 12 corresponding to the confluence chamber 111 will also be deformed by bending vibration, as shown in Figure 4C It is shown that when the vertical reciprocating vibration of the suspension plate 130 is displaced to a position, the movable part 12a of the resonance plate 12 can be very close to the convex part 130c of the suspension plate 130, and the fluid enters the channel of the compression chamber 121. If the distance between the compression chamber 121 between the area other than the convex portion 130c of the suspension plate 130 and the fixed portion 12b on both sides of the resonant plate 12 does not decrease, the flow rate of the fluid flowing between them does not decrease. There is no pressure loss, so the volume of the compression chamber 121 can be compressed more effectively. As shown in Fig. 4D, when the piezoelectric actuator 13 continues to perform vertical reciprocating vibration and the bending deformation moves upward, it is sufficient. The fluid in the compression chamber 121 is forced to flow to both sides, and flows downward through the gap 136 between the brackets 132 of the piezoelectric actuator 13 to obtain a higher discharge pressure. As shown in Figure 4E, as the convex portion 130c of the suspension plate 130 of the piezoelectric actuator 13 pushes upward, the movable portion 12a of the resonant plate 12 is also deformed by bending and vibration upward, causing the confluence chamber 111 The volume of is compressed, and the fluid in the busbar hole 112 flows to the bus chamber 111 to become smaller. Finally, when the suspension plate 130 of the piezoelectric actuator 13 continues to vibrate vertically, you can repeat the 4B Figure to Figure 4E shows the implementation state. In this embodiment, it can be seen that the design of the suspension plate 130 of the piezoelectric actuator 13 with the convex portion 130c can achieve good fluid transmission efficiency when applied to the micro-fluid control device 1 of this case, but the design of the convex portion 130c The state, quantity and location can be changed according to the actual implementation situation, and it is not limited to this.

In addition, in some embodiments, the vertical reciprocating vibration frequency of the resonant plate 12 can be the same as the vibration frequency of the piezoelectric actuator 13, that is, both can be upward or downward at the same time, which can be based on actual implementation conditions. Any change is not limited to the action mode shown in this embodiment.

In summary, the piezoelectric actuator provided in this case is applied to a micro fluid control device. The piezoelectric actuator has a suspension plate, an outer frame and four brackets, and each bracket is vertically connected to the suspension plate and the outer frame. Between the frames, the brackets vertically straddling between the suspension board and the outer frame provide elastic support, And reduce the uneven swing of the suspension plate, which helps to increase the amplitude of the suspension plate on the Z axis, so that the suspension plate can have a better displacement state when the suspension plate vibrates up and down, that is, the suspension plate is more stable and consistent when moving, which is beneficial Improve the stability and performance of the piezoelectric actuator; at the same time, the suspension plate, outer frame, and bracket of the piezoelectric actuator are integrated into a metal plate structure, and the convex part and the suspension plate are etched through the same depth The bracket needs type, so that the second surface of the outer frame, the second surface of the bracket and the second surface of the suspension board are all coplanar structures, which can simplify the multiple etching processes that needed to be done in the past according to the different depths of the outer frame , At the same time, through the adhesive layer arranged between the outer frame and the resonance film, the rough surface of the outer frame after etching is applied to increase the bonding strength between the adhesive layer and the outer frame, and the thickness of the outer frame Compared with the previous manufacturing method, it is lower, because the thickness of the glue layer coating the gap is increased, and the thickness of the penetrating glue layer is increased, which can effectively improve the unevenness of the glue layer coating and reduce the horizontal assembly of the suspension board. Error, and improve the efficiency of the kinetic energy utilization in the vertical direction of the suspension plate. It can also assist in absorbing vibration energy and reduce noise to achieve the effect of silence. The miniaturized piezoelectric actuator can also reduce the overall volume of the micro fluid control device. Small and thin to achieve the purpose of light and comfortable portability; and, by the design of the square shape of the suspension plate of the piezoelectric actuator and the operation of the convex part on the suspension plate, the fluid can enter the base The air inlet hole of the air plate flows in and flows along the connected busbar holes and the bus chamber, passing through the holes in the resonance plate to make the fluid generate pressure in the compression chamber formed between the resonance plate and the piezoelectric actuator Gradient, which makes the fluid flow at a high speed, the flow rate of the fluid will not decrease, and there will be no pressure loss, and can continue to transmit to obtain a higher discharge pressure; therefore, the micro fluid control device in this case can reduce the overall volume and thin In order to achieve the purpose of being portable and comfortable, it has great industrial use value, and the application is submitted in accordance with the law.

Even though the present invention has been described in detail by the above-mentioned embodiments, it can be modified in many ways by those skilled in the art, but it does not deviate from the scope of the attached patent application.

1: Micro fluid control device

11: intake plate

110: air inlet

111: Confluence chamber

112: bus hole

12: Resonance film

12a: movable part

12b: Fixed part

120: Hollow hole

13: Piezo actuator

130: hoverboard

130a: The second surface of the suspension board

130b: The first surface of the suspension board

130c: convex

131: Outer Frame

131a: The second surface of the outer frame

133: Piezoelectric ceramic plate

132: Bracket

135: Gap

136: Glue layer

16: Gas collecting plate

160: Surface

161: Reference surface

162: Gathering Chamber

163: first through hole

164: second through hole

165: The first pressure relief chamber

166: The first out of the oral cavity

167: Convex structure

168: Sidewall

h: gap

Claims (9)

A piezoelectric actuator includes: a suspension plate, in a square shape, with a first surface and a corresponding second surface, the second surface has a convex portion, and the suspension plate can be formed by a center Part to an outer peripheral part bending vibration; an outer frame, arranged around the outer side of the suspension plate, has a first surface and a corresponding second surface; a plurality of brackets, each of the brackets has a corresponding end point , One of the end points is vertically connected to the suspension plate, the other end is vertically connected to the outer frame to provide elastic support, and the bracket has a length ranging from 1.11mm to 1.21mm and a width ranging from 0.2mm to 0.6 mm, where the suspension board, the outer frame, and the bracket are made by etching at the same depth, so that the second surface of the outer frame and the second surface of the suspension board are outside the convex portion The areas are all coplanar; and a piezoelectric ceramic plate, in the form of a square, with a side length not greater than the side length of the floating plate, attached to the first surface of the floating plate for applying voltage to drive The suspension plate flexes and vibrates. The piezoelectric actuator according to claim 1, wherein the brackets are four brackets. The piezoelectric actuator according to claim 1, wherein one end of each bracket is vertically connected to one side of the suspension plate, and the other end is vertically connected to an inner side of the outer frame. The piezoelectric actuator according to claim 1, wherein the length of the bracket is 1.16 mm. The piezoelectric actuator according to claim 1, wherein the width of the bracket is 0.4 mm. The piezoelectric actuator according to claim 1, wherein the piezoelectric ceramic plate has a thickness between 0.05 mm and 0.3 mm. The piezoelectric actuator according to claim 6, wherein the thickness of the piezoelectric ceramic plate is 0.10 mm. The piezoelectric actuator according to claim 1, wherein the length of each side of the suspension plate is between 7.5 mm and 12 mm, and the thickness is between 0.1 mm and 0.4 mm. The piezoelectric actuator according to claim 8, wherein the length of each side of the suspension plate is between 7.5 mm and 8.5 mm, and the thickness is 0.27 mm.

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