TWI721419B - Micro piezoelectric pump - Google Patents

Abstract

A micro piezoelectric pump is disclosed and includes a tube plate, a cover plate and a pump core module. The tube plate includes an inlet tube, an outlet tube, an inlet passage, an outlet passage, a positive pressure chamber, a negative pressure chamber and an accommodation chamber. The inlet passage is disposed in the inlet tube and penetrates the inlet tube. The outlet passage is disposed in the outlet tube and penetrates the outlet tube. The inlet passage is in communication with the negative pressure chamber and the outlet passage is in communication with the positive pressure chamber. The accommodation chamber is disposed between the positive pressure chamber and the negative pressure chamber. The cover plate covers the tube plate. The pump core module is disposed in the accommodation chamber of the tube plate. The pump core module draws the fluid in the negative pressure chamber to flow therein, and then the fluid flows into the positive pressure chamber and flows out from the outlet passage. Meanwhile, the external fluid also flows into the negative pressure chamber form the inlet passage, and the transportation of the fluid is achieved.

Description

Miniature piezoelectric pump

This case is about a micro-pump, especially a micro-piezoelectric pump that is micro, quiet and fast to transmit high-flow fluids.

At present, in various fields, whether it is medicine, computer technology, printing, energy and other industries, products are developing in the direction of refinement and miniaturization. Among them, micro pumps, sprayers, inkjet heads, industrial printing devices and other products include Fluid actuator is its key technology.

With the rapid development of science and technology, the applications of fluid transport structures are becoming more and more diversified. For example, industrial applications, biomedical applications, medical care, electronic heat dissipation, etc., and even the recent popular wearable devices can be seen in its shadow. Traditional fluid actuators have gradually become smaller and larger in flow rate.

Therefore, how to increase the versatility of fluid actuators through innovative packaging structures is an important development topic at present.

The main purpose of this case is to provide a miniature piezoelectric pump with a shell structure, so that when a pump core module is arranged in the shell structure, it can not only achieve the effect of protecting the pump core module, but also produce negative effects in the shell structure. The effect of air pressure and positive air pressure to transfer fluid.

A broad implementation aspect of this case is a miniature piezoelectric pump, which includes a tube plate, a cover plate, and a pump core module. The tube plate has an inflow tube, an outflow tube, an inflow channel, an outflow channel, a positive pressure chamber, a negative pressure chamber, and an accommodating chamber. The inflow channel is arranged in the inflow pipe and runs through the inflow pipe. The outflow channel is arranged in the outflow pipe and runs through the outflow pipe. The inflow channel is in communication with the negative pressure chamber, and the outflow channel is in communication with the positive pressure chamber. The accommodating chamber is arranged between the positive pressure chamber and the negative pressure chamber. The cover plate is closed on the tube plate and has a concave part and an outer peripheral part surrounding the concave part. The pump core module is accommodated in the accommodating chamber of the tube plate, and is enclosed in the tube plate by the cover plate, whereby a positive pressure chamber is formed between the pump core module and the tube plate. The pump core module draws the fluid in the negative pressure chamber into the pump core module, flows into the positive pressure chamber, and then flows out of the tube sheet from the outflow channel. At the same time, external fluid will also flow into the negative pressure chamber from the inflow channel. To complete the transmission of fluid.

The embodiments embodying the features and advantages of this case will be described in detail in the later description. It should be understood that this case can have various changes in different aspects, all of which do not depart from the scope of the case, and the descriptions and diagrams therein are essentially for illustrative purposes, rather than limiting the case.

Please refer to FIG. 1 to FIG. 3. In this case, a miniature piezoelectric pump 10 is provided, which includes a tube plate 1, a cover plate 2 and a pump core module 3. The pump core module 3 is covered by the cover plate 2 in the tube plate 1 to form a miniature piezoelectric pump 10.

Please refer to Figures 3A to 3C, Figure 7A and Figure 7B. In the first embodiment of the present case, the tube sheet 1 has an inlet tube 11, an outlet tube 12, a plurality of pin openings 13, and a ridge Section 14, a positive pressure chamber C1, a containing chamber C2, a negative pressure chamber C3, an inlet opening h1 and an outlet opening h2. The inflow pipe 11 has an inflow channel 11 a, which is arranged in the inflow pipe 11 and penetrates the inflow pipe 11. The outflow tube 12 has an outflow channel 12 a, which is arranged in the outflow tube 12 and penetrates the outflow tube 12. The inflow channel 11a communicates with the negative pressure chamber C3. The outflow channel 12a communicates with the positive pressure chamber C1. The accommodating chamber C2 is disposed between the positive pressure chamber C1 and the negative pressure chamber C3. The ridge 14 is convexly provided in the tube sheet 1, and the accommodating cavity C2 is formed in the ridge 14. In the first embodiment of the present invention, the ridge 14 has a ring shape, but it is not limited to this, and the shape of the ridge 14 can be changed in other embodiments according to design requirements. In the first embodiment of the present invention, the inflow channel 11a is a bent channel, but it is not limited to this. The shape of the inflow channel 11a in other embodiments can be changed according to design requirements. The inflow opening h1 is connected between the inflow channel 11a and the negative pressure chamber C3, and due to the bending design of the inflow channel 11a, the inflow opening h1 is provided on the ridge 14. The outflow opening h2 is connected between the outflow channel 12a and the positive pressure chamber C1.

It is worth noting that in the first embodiment of the present case, the inlet pipe 11 and the outlet pipe 12 are arranged on the same side of the tube sheet 1, but not limited to this. The arrangement of the inlet pipe 11 and the outlet pipe 12 is in other implementations. The example can be changed according to design requirements.

Please refer to Figure 3A, Figure 4A, Figure 4B, Figure 7A and Figure 7B. In the first embodiment of the present invention, the cover plate 2 is closed on the tube plate 1 and has an outer peripheral portion 21 and a recessed portion twenty two. The outer peripheral portion 21 surrounds the concave portion 22 and the ridge portion 14 of the tube sheet 1, whereby the ridge portion 14 of the tube sheet 1 protrudes into the concave portion 22 of the cover plate 2. In addition, in the first embodiment of the present invention, the depth of the recess 22 of the cover plate 2 is greater than the height of the ridge 14 of the tube plate 1, so that the negative pressure chamber C3 can be formed between the cover plate 2 and the tube plate 1. .

Please refer to Figure 2, Figure 5A, Figure 5B, Figure 6A, and Figure 7A. In the first embodiment of this case, the pump core module 3 is accommodated in the accommodating chamber C2 of the tube plate 1, and The cover plate 2 is enclosed in the tube sheet 1. Thereby, the positive pressure chamber C1 is formed between the pump core module 3 and the tube plate 1, and the negative pressure chamber C3 is formed between the cover plate 2 and the pump core module 3. In the first embodiment of the present case, the pump core module 3 is composed of an inlet plate 31, a resonance sheet 32, a piezoelectric actuator 33, a first insulating sheet 35, a conductive sheet 36, and a second insulating sheet. 37 stacked in sequence. The inlet plate 31 has at least one inlet hole 31a, at least one busbar groove 31b, and a bus chamber 31c. The inlet hole 31a is for introducing fluid, and passes through the busbar groove 31b. The busbar groove 31b communicates with the busbar chamber 31c, whereby the fluid introduced by the inlet hole 31a can pass through the busbar groove 31b and then flow into the busbar chamber 31c. In the first embodiment of the present case, the number of inlet holes 31a and busbar grooves 31b is the same, four respectively, but not limited to this. The number of inlet holes 31a and busbar grooves 31b can be changed according to design requirements . In this way, the four inlet holes 31a respectively penetrate the four busbar grooves 31b, and the four busbar grooves 31b are in communication with the busbar chamber 31c.

In the first embodiment of the present invention, the resonance sheet 32 is joined to the inlet plate 31 and has a hollow hole 32a, a movable portion 32b, and a fixed portion 32c. The hollow hole 32 a is located at the center of the resonance plate 32 and corresponds to the position of the confluence chamber 31 c of the inlet plate 31. The movable portion 32b is provided around the hollow hole 32a, and the fixed portion 32c is provided on the outer peripheral edge portion of the resonance plate 32 and fixedly joined to the air inlet plate 31.

In the first embodiment of the present invention, the piezoelectric actuator 33 is joined to the resonant plate 32, and includes a suspension plate 33a, an outer frame 33b, at least one bracket 33c, a piezoelectric element 34, at least one gap 33d, and a The first conductive pin 33e. The suspension plate 33a has a square shape and can be flexurally vibrated. The reason why the suspension board 33a adopts a square shape is that compared with the circular design, the structure of the square suspension board 33a has obvious advantages in power saving. Because of the capacitive load operating at the resonance frequency, its power consumption will increase as the frequency rises, and because the resonance frequency of the square-shaped suspension plate 33a is significantly lower than that of the circular-shaped suspension plate, its relative power consumption is also significantly higher. Low, that is, the suspension board 33a with a square design adopted in this case has the advantage of power saving. The outer frame 33b is arranged around the outer side of the floating plate 33a. At least one bracket 33c is connected between the suspension plate 33a and the outer frame 33b to provide a supporting force for elastic support of the suspension plate 33a. The piezoelectric element 34 has one side length which is less than or equal to one side length of the suspension plate 33a, and the piezoelectric element 34 is attached to a surface of the suspension plate 33a to be applied with a voltage to drive the suspension plate 33a to bend and vibrate. At least one gap 33d is formed between the suspension plate 33a, the outer frame 33b and the bracket 33c for the passage of fluid. The first conductive pins 33e protrude from the outer edge of the outer frame 33b.

In the first embodiment of the present invention, the conductive sheet 36 protrudes from the inner edge with an electrode 36a in a curved shape, and protrudes from the outer edge with a second conductive pin 36b. The electrode 36 a is electrically connected to the piezoelectric element 34 of the piezoelectric actuator 33. The first conductive pin 33e of the piezoelectric actuator 33 and the second conductive pin 36b of the conductive sheet 36 are connected to an external current to drive the piezoelectric element 34 of the piezoelectric actuator 33. The first conductive pin 33e and the second conductive pin 36b respectively protrude from the pin opening 13 of the tube plate 1 to the outside of the tube plate 1. In addition, the arrangement of the first insulating sheet 35 and the second insulating sheet 37 can prevent the occurrence of short circuits.

Please refer to FIG. 6A. In the first embodiment of the present invention, a resonance chamber 38 is formed between the suspension plate 33a and the resonance plate 32. The resonance cavity 38 can be formed by filling the gap between the resonance sheet 32 and the outer frame 33b of the piezoelectric actuator 33 with a material, such as conductive glue, but not limited to this, so that the resonance sheet 32 and the outer frame 33b A certain depth can be maintained between the suspended plates 33a, which can guide the fluid to flow more quickly. In addition, since the suspension plate 33a and the resonance plate 32 are kept at an appropriate distance, the contact interference with each other is reduced, and the generation of noise is reduced. In other embodiments, the thickness of the gap filling material between the resonant plate 32 and the outer frame 33b of the piezoelectric actuator 33 can also be reduced by adding the height of the outer frame 33b of the high-voltage electric actuator 33. In this way, when the pump core module 3 is assembled as a whole, the filling material will not be indirectly affected due to changes in the hot pressing temperature and cooling temperature, which can prevent the filling material from affecting the actual shape of the resonant cavity 38 after forming due to thermal expansion and contraction. Spacing, but not limited to this. In addition, the size of the resonance chamber 38 will affect the transmission effect of the pump core module 3, so maintaining a fixed size of the resonance chamber 38 is very important for the pump core module 3 to provide stable transmission efficiency. Therefore, as shown in FIG. 6B, in another embodiment, the suspension plate 33a can be formed by a stamping process to extend upward a distance, and the upward extension distance can be formed at least between the suspension plate 33a and the outer frame 33b. A bracket 33c is adjusted so that the surface of the suspension plate 33a and the surface of the outer frame 33b are non-coplanar. By applying a small amount of filling material, such as conductive glue, on the assembly surface of the outer frame 33b, the piezoelectric actuator 33 is attached to the fixing portion 32c of the resonant plate 32 by hot pressing, thereby making the piezoelectric actuator 33 It can be assembled and joined with the resonance sheet 32. In this way, by directly adopting the above-mentioned floating plate 33a of the piezoelectric actuator 33 to form the resonant cavity 38 by a stamping and forming process, the required resonant cavity 38 can be punched by adjusting the floating plate 33a of the piezoelectric actuator 33 The molding distance is completed, which effectively simplifies the structural design of adjusting the resonance chamber 38, and also simplifies the manufacturing process and shortens the manufacturing time. In addition, the first insulating sheet 35, the conductive sheet 36, and the second insulating sheet 37 are all frame-shaped thin sheets that are sequentially stacked on the piezoelectric actuator 33 to form the overall structure of the pump core module 3.

In order to understand the operation mode of the pump core module 3, please continue to refer to Figures 6C to 6E. In the first embodiment of the present case, as shown in Figure 6C, the piezoelectric element 34 of the piezoelectric actuator 33 is applied Deformation occurs after the driving voltage, which drives the suspension plate 33a to move away from the inlet plate 31. At this time, the volume of the resonance chamber 38 increases, a negative pressure is formed in the resonance chamber 38, and the fluid in the confluence chamber 31c is drawn It flows through the hollow 32a of the resonance plate 32 and enters the resonance chamber 38. At the same time, the resonance plate 32 is synchronously displaced away from the inlet plate 31 under the influence of the principle of resonance, which in turn increases the volume of the confluence chamber 31c, and due to the confluence cavity The fluid in the chamber 31c enters the resonance chamber 38, resulting in a negative pressure in the confluence chamber 31c, and the fluid is sucked into the confluence chamber 31c through the inlet hole 31a and the busbar groove 31b. Next, as shown in Figure 6D, the piezoelectric element 34 drives the suspension plate 33a to move closer to the inlet plate 31 and compresses the resonance chamber 38. Similarly, the resonance plate 32 is driven by the suspension plate 33a due to resonance to move closer to the inlet. The direction displacement of the plate 31 pushes the fluid in the resonance chamber 38 out of the pump core module 3 through the gap 33d to achieve the effect of fluid transmission. Finally, as shown in Figure 6E, when the suspension plate 33a is displaced away from the inlet plate 31 and returns to the initial position, the resonance plate 32 is also driven to move away from the inlet plate 31 at the same time. The resonance plate at this time 32 compresses the resonance chamber 38, moves the fluid in the resonance chamber 38 to the gap 33d, and increases the volume in the confluence chamber 31c, so that the fluid can continuously pass through the inlet hole 31a and the busbar groove 31b to converge in the confluence chamber Room 31c. By continuously repeating the operation steps of the pump core module 3 shown in Figures 6C to 6E above, the pump core module 3 can continuously guide the fluid from the inlet hole 31a into the inlet plate 31 and the resonance plate 32 The formed flow channel generates a pressure gradient and is discharged from the gap 33d to make the fluid flow at a high speed to reach the operation of the pump core module 3 to transfer the fluid.

Please refer to Figure 7C and Figure 7D. When the pump core module 3 is activated, the pump core module 3 sucks the fluid in the negative pressure chamber C3 into the pump core module 3, flows into the positive pressure chamber C1, and then again The outflow channel 12a of the outflow tube 12 flows out of the micro piezoelectric pump 10 through the outflow opening h2. At the same time, the external fluid is sucked in from the inflow channel 11a of the inflow tube 11 and enters the negative pressure chamber C3 after passing through the inflow opening h1. In order to complete the transmission of fluid.

Please refer to Figures 8 to 10D. In the second embodiment of this case, only the structure of the tube sheet 1'is different from the structure of the tube sheet 1 in the first embodiment, and the difference lies in the inlet pipe 11 and the outlet pipe. The configuration of tube 12. In the second embodiment of the present case, the inlet pipe 11 and the outlet pipe 12 are arranged on opposite sides of the tube sheet 1, but it is not limited thereto. It is worth noting that the inlet pipe 11 and the outlet pipe 12 in other embodiments may only be arranged on different sides of the tube sheet 1, for example, adjacent two sides. The action mode of the second embodiment of this case is the same as that of the first embodiment, so it will not be repeated. Since the outflow tube 12 in the second embodiment is arranged on the opposite side of the inflow tube 11, the outflow direction of the fluid in Figure 10D is different from the outflow direction of the fluid in the first embodiment, that is, the fluid in the first embodiment is the same Side inflow and outflow; while the fluid in the second embodiment flows in and out on different sides, but does not affect the transmission of fluid.

It is worth noting that, in the first embodiment of the present case, by arranging the inlet pipe 11 and the outlet pipe 12 of the micro piezoelectric pump 10 on the side of the tube plate 1, the fluid can be removed from the micro piezoelectric The side transmission of pump 1 achieves the purpose of thinning. In addition, the overall structure of the tube sheet 1 presents a multi-directional stepped chamber design, which can utilize the cooperation of negative pressure and positive pressure to complete fluid transmission. Furthermore, in the first embodiment and the second embodiment of the present invention, the overall thickness of the micro piezoelectric pump 10 is 2 to 5 microns, but it is not limited to this.

To sum up, the miniature piezoelectric pump provided in this case can not only achieve the effect of thinning and protect the core module of the pump, but also generate negative and positive air in the tube sheet through the design of a multi-directional stepped chamber. The effect of pressure to transfer fluid.

This case can be modified in many ways by those who are familiar with this technology, but none of them deviates from the protection of the scope of the patent application.

10, 10': miniature piezoelectric pump 1, 1': tube sheet 11: Inflow pipe 11a: Inflow channel 12: Outflow pipe 12a: Outflow channel 13: Pin opening 14: spine 2: cover 21: Peripheral 22: recess 3: Pump core module 31: Inflow plate 31a: Intake hole 31b: Busbar groove 31c: Confluence chamber 32: Resonance film 32a: Hollow hole 32b: movable part 32c: fixed part 33: Piezo Actuator 33a: Suspension board 33b: Outer frame 33c: bracket 33d: gap 33e: the first conductive pin 34: Piezoelectric element 35: The first insulating sheet 36: conductive sheet 36a: Electrode 36b: second conductive pin 37: second insulating sheet 38: Resonance Chamber C1: Positive pressure chamber C2: containing chamber C3: negative pressure chamber h1: Inflow opening h2: Outflow opening A-A, B-B, C-C, D-D: section line

Figure 1 is a three-dimensional schematic diagram of the first embodiment of the miniature piezoelectric pump of the present invention. Figure 2 is a three-dimensional exploded schematic view of the first embodiment of the miniature piezoelectric pump of the present invention. Fig. 3A and Fig. 3B are the front and back schematic diagrams of the tube sheet of the first embodiment of the present invention, respectively. Figure 3C is a perspective view of a three-dimensional part of the tube sheet of the first embodiment of the present invention. Fig. 4A and Fig. 4B are schematic diagrams of the front and back of the cover plate of the first embodiment of the present invention, respectively. Figure 5A is a three-dimensional exploded schematic diagram of the pump core module of the first embodiment of the present invention. Figure 5B is another three-dimensional exploded schematic view of the pump core module of the first embodiment of the present invention. Figure 6A is a schematic cross-sectional view of the core module of the pump. Figure 6B is a schematic cross-sectional view of another embodiment of the core module of the pump. Figures 6C to 6E are schematic diagrams of the operation of the pump core module of the project. Figure 7A is a schematic cross-sectional view taken from the section line A-A in Figure 3A. Figure 7B is a schematic cross-sectional view taken from the section line B-B in Figure 3A. Figure 7C is a schematic diagram of the inlet action of the first embodiment of the project. Figure 7D is a schematic diagram of the leakage action of the first embodiment of the project. Figure 8 is a three-dimensional schematic diagram of the tube plate of the second embodiment of the miniature piezoelectric pump of the present invention. Figure 9 is a front view of the tube plate of the second embodiment of the present invention. Figure 10A is a schematic cross-sectional view taken from the section line C-C in Figure 9. Figure 10B is a schematic cross-sectional view taken from the section line D-D in Figure 9. Figure 10C is a schematic diagram of the inlet action of the second embodiment of the project. Figure 10D is a schematic diagram of the leakage action of the second embodiment of the project.

1: Tube plate

2: cover

3: Pump core module

Claims (10)

A miniature piezoelectric pump includes: a tube plate with an inlet tube, an outlet tube, an inlet channel, an outlet channel, a positive pressure chamber, a negative pressure chamber, an accommodating chamber, A ridge, an inflow opening and an outflow opening, the inflow channel is arranged in the inflow tube and penetrates the inflow tube, the outflow channel is arranged in the outflow tube and penetrates through the outflow tube, and the inflow opening is in communication Between the inflow channel and the negative pressure chamber, the inflow opening is provided on the ridge, and the outflow channel is in communication with the positive pressure chamber, and the containing chamber is provided in the positive pressure chamber and Between the negative pressure chambers, the ridge is protrudingly provided in the tube plate, and the accommodating chamber is formed in the ridge; a cover plate, which covers the tube plate, has a recess and a surrounding The outer circumference of the recess, wherein the outer circumference of the cover plate surrounds the ridge, and a depth of the recess of the cover plate is greater than a height of the ridge of the tube plate, whereby the negative pressure chamber is formed in Between the cover plate and the pump core module; and a pump core module housed in the accommodating chamber of the tube plate and enclosed in the tube plate by the cover plate, whereby the front A pressure chamber is formed between the pump core module and the tube sheet; wherein the pump core module draws fluid in the negative pressure chamber into the pump core module, flows into the positive pressure chamber, and then from The outflow channel flows out of the tube sheet, and at the same time, external fluid will also flow into the negative pressure chamber from the inflow channel to complete fluid transmission. The miniature piezoelectric pump according to claim 1, wherein the inflow channel is a bent channel. The miniature piezoelectric pump according to claim 1, wherein the inlet pipe and the outlet pipe are arranged on the same side of the tube plate. The miniature piezoelectric pump according to claim 1, wherein the inlet pipe and the outlet pipe are arranged on different sides of the tube plate. The miniature piezoelectric pump according to claim 4, wherein the inlet pipe and the outlet pipe are arranged on opposite sides of the tube plate. The miniature piezoelectric pump according to claim 1, wherein the pump core module includes: an inlet plate having at least one inlet hole, at least one busbar groove and a confluence chamber, wherein the inlet hole provides Introduce fluid and pass through the busbar groove, the busbar groove is connected with the busbar chamber, whereby the fluid introduced by the inlet hole can pass through the busbar groove and then flow into the busbar chamber; a resonance The plate is joined to the inlet plate and has a hollow hole, a movable part and a fixed part. The hollow hole is located at the center of the resonance plate and corresponds to the position of the confluence chamber of the inlet plate. The movable part is arranged around the hollow hole, and the fixed part is arranged on the outer peripheral portion of the resonant plate and fixedly joined to the inlet plate; and a piezoelectric actuator joined to the resonant plate; wherein the resonance plate A resonance chamber is formed between the plate and the piezoelectric actuator, whereby when the piezoelectric actuator is driven, the piezoelectric actuator and the movable part of the resonant plate resonate, and the fluid flows from the The inlet hole of the inlet plate is introduced, passes through the busbar groove, and then converges into the flow chamber, and then flows through the hollow hole of the resonance plate to achieve fluid transmission. The miniature piezoelectric pump according to claim 6, wherein the piezoelectric actuator comprises: a suspension plate in a square shape capable of bending vibration; an outer frame arranged around the outer side of the suspension plate; at least one A bracket is connected between the suspension board and the outer frame to provide a supporting force for elastic support of the suspension board; and a piezoelectric element having a side length which is less than or equal to the side length of the suspension board, and The piezoelectric element is attached to a surface of the suspension plate for being applied with a voltage to drive the suspension plate to bend and vibrate. The miniature piezoelectric pump according to claim 7, wherein the pump core module further includes a first insulating sheet, a conductive sheet, and a second insulating sheet, wherein the inlet plate, the resonance sheet, and the piezoelectric The actuator, the first insulating sheet, the conductive sheet and the second insulating sheet are stacked in sequence. The miniature piezoelectric pump according to claim 8, wherein the piezoelectric actuator further includes a first conductive pin protruding from the outer edge of the outer frame, and the conductive sheet has a second conductive pin, It protrudes from the outer edge of the conductive sheet, and the tube sheet has a plurality of pin openings, and the first conductive pins and the second conductive pins respectively protrude from the pin openings to the outside of the tube sheet. The miniature piezoelectric pump according to claim 6, wherein the piezoelectric actuator comprises: a suspension plate in a square shape capable of bending vibration; an outer frame arranged around the outer side of the suspension plate; at least one The bracket is connected between the suspension board and the outer frame to provide elastic support for the suspension board, and make a surface of the suspension board and a surface of the outer frame form a non-coplanar structure, and make the suspension board A cavity space is formed between a surface and the resonant plate; and a piezoelectric element has a side length that is less than or equal to a side length of the suspension plate, and the piezoelectric element is attached to the suspension plate On a surface, a voltage is applied to drive the floating plate to bend and vibrate.

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