CN112240280B

CN112240280B - Micro pump

Info

Publication number: CN112240280B
Application number: CN201910646072.6A
Authority: CN
Inventors: 莫皓然; 陈世昌; 廖家淯; 廖鸿信; 高中伟; 韩永隆; 黄启峰; 蔡长谚; 李伟铭
Original assignee: Microjet Technology Co Ltd
Current assignee: Microjet Technology Co Ltd
Priority date: 2019-07-17
Filing date: 2019-07-17
Publication date: 2023-01-13
Anticipated expiration: 2039-07-17
Also published as: CN112240280A

Abstract

A micro pump includes a flow collecting plate, a valve plate, an outflow plate, and a pump core module. The flow collecting plate comprises an inner groove, a convex part and at least one flow collecting hole, wherein the convex part is arranged at the center of the inner groove, and the flow collecting hole is arranged in the inner groove and at the outer edge of the convex part. The valve plate comprises a valve hole which is arranged at the center of the valve plate. The convex part of the current collecting plate is propped against the valve hole. A collecting chamber is formed between the valve plate and the collecting plate. The outflow plate has an annular shape and includes an outflow channel. The valve hole of the valve plate is communicated with the outflow channel. After the pump core module draws fluid and enters the pump core module, the fluid flows into the collecting cavity through the at least one collecting hole, and then the fluid pushes away the valve plate and enters the outflow channel of the outflow plate through the valve hole to finish the transmission of the fluid.

Description

Micro pump

Technical Field

The present invention relates to a pump, and more particularly, to a miniature pump for silencing and fast delivering high-flow fluid.

Background

At present, in various fields, no matter in medicine, computer technology, printing, energy and other industries, products are developed toward refinement and miniaturization, wherein fluid actuators included in products such as micropumps, sprayers, ink jet heads, industrial printing devices and the like are key technologies.

With the increasing development of science and technology, the applications of fluid transport structures are becoming more diversified, such as industrial applications, biomedical applications, medical care, electronic heat dissipation, etc., and even recently, its image of 36392is seen in wearable devices, which is a popular trend toward miniaturization and maximization of flow rate of conventional fluid actuators.

Therefore, how to increase the application range of the fluid actuator by the innovative packaging structure is an important development issue at present.

Disclosure of Invention

The main purpose of the present disclosure is to provide a micro pump, which utilizes a flow outlet plate combined with a flow collecting plate and a valve plate sandwiched therebetween to form a one-way output concentric non-return symmetrical structure, and has a pressure relief function, thereby achieving the effects of substantially reducing the structure of the valve plate, improving the overall air-tight reliability, increasing the freedom of output direction, and substantially reducing the flow resistance of pressure relief.

One broad aspect of the present disclosure is a micropump including a flow collecting plate, a valve plate, an outlet plate, and a pump core module. The collector plate has a collector plate first surface and a collector plate second surface. The first surface of the collector plate and the second surface of the collector plate are two oppositely arranged surfaces. The flow collecting plate comprises an outer groove, an inner groove, a convex part, at least one flow collecting hole and a peripheral part, wherein the outer groove is arranged on the first surface of the flow collecting plate, the convex part is arranged on the first surface of the flow collecting plate and is surrounded by the outer groove, the first surface of the flow collecting plate is arranged at the center of the inner groove, the at least one flow collecting hole penetrates from the first surface of the flow collecting plate to the second surface of the flow collecting plate, the flow collecting hole is arranged in the inner groove and the outer edge of the convex part, the peripheral part is arranged on the second surface of the flow collecting plate, and a flow collecting space is defined. The valve plate is arranged in the groove in the collector plate and comprises a valve hole which is arranged at the center of the valve plate. The convex part of the current collecting plate is abutted against the valve hole. A collecting chamber is formed between the valve plate and the collecting plate. The outflow plate has an annular shape and includes an outflow channel disposed at a center of the outflow plate, at least one discharge channel, and an outflow peripheral wall defining an outflow space. The outflow space is communicated with the outflow channel and the at least one discharge channel. The valve hole of valve block with flow out the space and flow out the passageway and be linked together. The outflow peripheral wall is arranged in the groove outside the flow collecting plate, so that the valve plate is accommodated in the outflow space. The pump core module is accommodated in the flow collecting space of the flow collecting plate. After the pump core module draws fluid and enters the pump core module, the fluid flows into the collecting cavity through the at least one collecting hole, and then the fluid pushes away the valve plate and enters the outflow channel of the outflow plate through the valve hole to finish the transmission of the fluid.

Drawings

In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in detail below, wherein:

FIG. 1 is a perspective view of a first embodiment of the present micropump.

Fig. 2A is a schematic exploded perspective view of a first embodiment of the present disclosure.

Fig. 2B is a schematic exploded perspective view of the first embodiment of the present disclosure from another perspective.

Fig. 3A and 3B are a top view and a bottom view of the flow outlet plate according to the first embodiment of the disclosure, respectively.

Fig. 4A and 4B are a top view and a bottom view of the valve plate according to the first embodiment of the disclosure, respectively.

Fig. 5A and 5B are a top view and a bottom view of a current collecting plate according to a first embodiment of the present disclosure, respectively.

Fig. 6A is a schematic perspective exploded view of a pump core module according to a first embodiment of the disclosure.

Fig. 6B is a perspective exploded view of the pump core module according to the first embodiment of the disclosure from another perspective.

Fig. 7A is a schematic cross-sectional view of the pump core module of the present application.

Fig. 7B is a schematic cross-sectional view of another embodiment of the present pump core module.

Fig. 7C to 7E are schematic operation diagrams of the pump core module according to the present invention.

Fig. 8A is a top view of the first embodiment of the present disclosure.

FIG. 8B isbase:Sub>A cross-sectional view taken along line A-A in FIG. 8A.

FIG. 8C is a schematic view illustrating the operation of the first embodiment of the present invention.

Fig. 8D is a schematic view illustrating the operation of the leakage flow according to the first embodiment of the present disclosure.

Fig. 9 is a perspective view of a second embodiment of the present micro-pump.

Fig. 10A is a top view of the second embodiment of the present disclosure.

FIG. 10B is a cross-sectional view taken along line B-B in FIG. 10A.

FIG. 10C is a schematic view of the second embodiment of the present invention.

FIG. 10D is a schematic view illustrating the operation of the leakage flow according to the second embodiment of the present invention.

Description of the reference numerals

10. 10': micro pump

1. 1': outlet board

11: outflow peripheral wall

12: space for outflow

13: outflow channel

14: drain channel

2: valve plate

21: valve block peripheral wall

22: valve plate space

23: valve bore

3: collector plate

3a: first surface of collector plate

3b: second surface of collector plate

31: outer groove

32: inner groove

33: convex part

34: flow collecting hole

35: afflux peripheral wall

36: flow-collecting space

37: pin opening

4: pump core module

41: intake plate

41a: inlet orifice

41b: bus bar groove

41c: confluence chamber

42: resonance sheet

42a: hollow hole

42b: movable part

42c: fixing part

43: piezoelectric actuator

43a: suspension plate

43b: outer frame

43c: support frame

43d: gap between the two plates

43e: first conductive pin

44: piezoelectric element

45: first insulating sheet

46: conductive sheet

46a: electrode for electrochemical cell

46b: second conductive pin

47: second insulating sheet

48: resonance chamber

C: flow-collecting chamber

A-A, B-B: section line

Detailed Description

Embodiments that embody the features and advantages of this disclosure will be described in detail in the description that follows. It will be understood that the present disclosure is capable of various modifications in various forms without departing from the scope of the disclosure, and that the description and drawings are to be taken as illustrative in nature and not as restrictive.

Referring to fig. 1 to 2B, a micro pump 10 is provided, which includes an outlet plate 1, a valve plate 2, a collecting plate 3 and a pump core module 4. The pump core module 4 is accommodated in the collector plate 3.

Referring to fig. 3A to 3B, in the first embodiment of the present invention, the outflow plate 1 includes an outflow peripheral wall 11, an outflow space 12, an outflow channel 13 and at least one discharge channel 14. An outflow peripheral wall 11 projects from one side of the outflow plate 1 and defines an outflow space 12. The outflow channel 13 is arranged in the center of the outflow plate 1. The outlet space 12 communicates with an outlet channel 13 and at least one drain channel 14.

It should be noted that, in the first embodiment of the present invention, the outflow plate 1 includes 4 drain channels 14, which are arranged at equal intervals and surround the outflow channel 13. In addition, the flow plate 1 has a circular shape, so that the flow plate 1 forms a concentric symmetrical structure. In other embodiments, the number and arrangement of the drainage channels 14 and the type of the outflow plate 1 are not limited by the disclosure, and may be changed according to design requirements.

It should be noted that, in the first embodiment of the present invention, the outflow channel 13 is a straight channel, so that the fluid can be transmitted along the direction perpendicular to the valve plate 2, but not limited thereto.

Referring to fig. 4A, 4B, 8A and 8B, in the first embodiment of the present invention, the valve plate 2 includes a plate peripheral wall 21, a plate space 22 and a valve hole 23. The valve plate peripheral wall 21 is disposed on a side of the valve plate 2 away from the flow outlet plate 1 and protrudes from the valve plate 2 away from the flow outlet plate 1 to define a valve plate space 22. The valve hole 23 is provided at the center of the valve sheet 2. The valve hole 23 communicates with the outflow space 12 of the outflow plate 1 and the outflow channel 13. In the first embodiment of the present disclosure, the valve plate 2 has a circular shape, so that the valve plate 2 forms a concentric symmetric structure, and the valve plate 2 is a silicone sheet, but not limited thereto. In other embodiments, the type and material of the valve plate 2 are not limited by the disclosure, and may be changed according to the design requirement.

Referring to fig. 5A, 5B, 8A and 8B, in the first embodiment of the present invention, the current collecting plate 3 has a current collecting plate first surface 3a and a current collecting plate second surface 3B, and the current collecting plate first surface 3a and the current collecting plate second surface 3B are two surfaces disposed opposite to each other. The current collecting plate 3 includes an outer groove 31, an inner groove 32, a protrusion 33, at least one current collecting hole 34, a current collecting peripheral wall 35, a current collecting space 36 and two pin openings 37. The outer groove 31 is disposed on the first surface 3a of the current collecting plate and has a ring shape. The inner groove 32 is provided to the first surface 3a of the collecting plate and surrounded by the outer groove 31. The convex portion 33 is provided at the collector plate first surface 3a and at the center of the inner recess 32. The inner recess 32 and the protrusion 33 are each in a circular configuration so that the collector plates 3 form a concentric symmetrical structure. At least one collecting hole 34 penetrates from the first surface 3a to the second surface 3b of the collecting plate, and is disposed in the inner groove 32 and at the outer edge of the protrusion 33. The collecting peripheral wall 35 is disposed on the collecting plate second surface 3b and protrudes from the collecting plate second surface 3b away from the valve plate 2 to define a collecting space 36. Valve plate 2 is disposed in inner recess 32, whereby projection 33 abuts against valve opening 23 of valve plate 2 and a collecting chamber C is formed between valve plate 2 and collecting plate 3.

It should be noted that, in the first embodiment of the present invention, the collecting plate 3 includes 4 collecting holes 34, which are disposed at equal intervals and surround the protrusion 33. In other embodiments, the number and arrangement of the collecting holes 34 are not limited by the disclosure, and may be changed according to design requirements.

It should be noted that, in the first embodiment of the present invention, the outflow peripheral wall 11 of the outflow plate 1 is engaged with the outer groove 31 of the flow collecting plate 3, so that the valve sheet 2 is accommodated in the outflow space 12 of the outflow plate 1. Thereby, the outflow plate 1 can be directly bonded to the collecting plate 3, so that the valve sheet 2 is firmly sandwiched between the outflow plate 1 and the collecting plate 3. In other embodiments, the combination of the outflow plate 1 and the collecting plate 3 is not limited to the adhesion described in the present disclosure, and may be changed according to the design requirement.

It should be noted that, in the first embodiment of the present invention, the micro-pump 10 has a total thickness (the portion not including the outflow channel 13) between 1 millimeter (mm) and 6 mm, but not limited thereto. In other embodiments, the total thickness may vary according to design requirements.

Referring to fig. 2A, fig. 2B, fig. 5B, and fig. 6A to fig. 7A, in the first embodiment of the present invention, the pump core module 4 is accommodated in the collecting space 36 of the collecting plate 3. The pump core module 4 is formed by sequentially stacking a flow inlet plate 41, a resonant plate 42, a piezoelectric actuator 43, a first insulating plate 45, a conductive plate 46 and a second insulating plate 47. The intake plate 41 has at least one intake hole 41a, at least one bus groove 41b and a bus chamber 41c. The inflow hole 41a is for introducing a fluid and penetrates the bus groove 41b. The bus bar groove 41b is communicated with the bus bar chamber 41c, so that the fluid introduced from the inflow hole 41a can flow into the bus bar chamber 41c after passing through the bus bar groove 41b. In the first embodiment, the number of the inflow holes 41a and the number of the bus grooves 41b are the same, and are 4 respectively, but not limited thereto, and the number of the inflow holes 41a and the number of the bus grooves 41b may be changed according to design requirements. Thus, the four intake holes 41a penetrate the four bus bar grooves 41b, respectively, and the four bus bar grooves 41b communicate with the bus bar chamber 41c.

In the first embodiment, the resonator plate 42 is coupled to the flow plate 41 and has a hollow hole 42a, a movable portion 42b and a fixed portion 42c. The hollow hole 42a is located at the center of the resonance plate 42 and corresponds to the position of the confluence chamber 41c of the inflow plate 41. The movable portion 42b is provided around the hollow hole 42a, and the fixed portion 42c is provided at an outer peripheral portion of the resonator plate 42 and fixedly coupled to the flow inlet plate 41.

In the first embodiment, the piezoelectric actuator 43 is mounted on the resonator plate 42 and includes a suspension plate 43a, an outer frame 43b, at least one bracket 43c, a piezoelectric element 44, at least one gap 43d and a first conductive pin 43e. The suspension plate 43a has a square shape and can be bent and vibrated. The square shape of the suspension plate 43a is advantageous in that the square shape of the suspension plate 43a has a significantly lower power consumption than the circular shape. Because the capacitive load operating under the resonant frequency increases with the increase of the frequency, and because the resonant frequency of the square-shaped suspension plate 43a is significantly lower than that of the circular-shaped suspension plate, the power consumption is also significantly lower, i.e., the square-shaped suspension plate 43a has the advantage of power saving. The outer frame 43b is disposed around the suspension plate 43 a. At least one bracket 43c is connected between the suspension plate 43a and the outer frame 43b for providing a supporting force for elastically supporting the suspension plate 43 a. The piezoelectric element 44 has a side length less than or equal to a side length of the suspension plate 43a, and the piezoelectric element 44 is attached to a surface of the suspension plate 43a for being applied with a voltage to drive the suspension plate 43a to vibrate in a bending manner. At least one gap 43d is formed between the suspension plate 43a, the outer frame 43b and the bracket 43c for the fluid to pass through. The first conductive pins 43e protrude from the outer edge of the outer frame 43 b.

In the first embodiment, the conductive plate 46 protrudes an electrode 46a from the inner edge, and a second conductive pin 46b from the outer edge. The electrode 46a is electrically connected to the piezoelectric element 44 of the piezoelectric actuator 43. The first conductive pin 43e of the piezoelectric actuator 43 and the second conductive pin 46b of the conductive plate 46 are connected to an external current, so as to drive the piezoelectric element 44 of the piezoelectric actuator 43. The first conductive pin 43e and the second conductive pin 46b protrude from the pin opening 37 of the current collecting plate 3 to the outside of the current collecting plate 3, respectively. In addition, the first insulating sheet 45 and the second insulating sheet 47 are provided to prevent short-circuiting.

Referring to fig. 7A, in the first embodiment of the present invention, a resonant cavity 48 is formed between the suspension plate 43a and the resonant plate 42. The resonant cavity 48 may be formed by filling a gap between the resonator plate 42 and the outer frame 43b of the piezoelectric actuator 43 with a material, such as: the conductive paste, but not limited thereto, maintains a certain depth between the resonator plate 42 and the suspension plate 43a, thereby guiding the fluid to flow more rapidly. Further, since the levitation plate 43a and the resonator plate 42 are kept at an appropriate distance from each other, contact interference therebetween is reduced, and noise generation is promoted to be reduced. In other embodiments, the thickness of the gap filling material between the resonator plate 42 and the outer frame 43b of the piezoelectric actuator 43 can be reduced by increasing the height of the outer frame 43b of the piezoelectric actuator 43. Thus, when the pump core module 4 is integrally assembled, the filling material is not indirectly affected by the change of the hot pressing temperature and the cooling temperature, and the actual distance between the resonance cavities 48 after molding due to the expansion and contraction of the filling material can be avoided, but not limited thereto. In addition, the size of the resonant cavity 48 affects the transmission efficiency of the pump core module 4, so it is important to maintain a fixed size of the resonant cavity 48 to provide stable transmission efficiency of the pump core module 4. Therefore, as shown in fig. 7B, in another embodiment, the suspension plate 43a can be formed by a stamping process to extend upward by a distance, and the upward extending distance can be adjusted by at least one bracket 43c formed between the suspension plate 43a and the outer frame 43B, so that the surface of the suspension plate 43a and the surface of the outer frame 43B are both non-coplanar. By applying a small amount of filling material, for example: the piezoelectric actuator 43 is attached to the fixing portion 42c of the resonator plate 42 by a thermal compression method using a conductive adhesive, so that the piezoelectric actuator 43 can be assembled and bonded to the resonator plate 42. Thus, the structural improvement of the resonant cavity 48 is directly achieved by adopting the stamping forming process to form the floating plate 43a of the piezoelectric actuator 43, and the required resonant cavity 48 can be achieved by adjusting the stamping forming distance of the floating plate 43a of the piezoelectric actuator 43, thereby effectively simplifying the structural design of adjusting the resonant cavity 48, simplifying the process and shortening the process time. In addition, the first insulating sheet 45, the conducting sheet 46 and the second insulating sheet 47 are frame-shaped thin sheets, and are sequentially stacked on the piezoelectric actuator 43 to form the overall structure of the pump core module 4.

To understand the operation of the pump core module 4, please refer to fig. 7C to 7E, in the first embodiment of the present disclosure, as shown in fig. 7C, the piezoelectric element 44 of the piezoelectric actuator 43 is deformed after being applied with the driving voltage, so as to drive the floating plate 43a to displace in the direction away from the intake plate 41, at this time, the volume of the resonant chamber 48 is increased, so as to form a negative pressure in the resonant chamber 48, so that the fluid in the collecting chamber 41C flows through the hollow hole 42a of the resonant plate 42 into the resonant chamber 48, and the resonant plate 42 is simultaneously displaced in the direction away from the intake plate 41 under the influence of the resonance principle, thereby increasing the volume of the collecting chamber 41C, and the fluid in the collecting chamber 41C is also in the negative pressure state due to the fluid in the collecting chamber 41C entering the resonant chamber 48, so as to further suck the fluid into the collecting chamber 41C through the intake hole 41a and the collecting groove 41b. As shown in fig. 7D, the piezoelectric element 44 drives the floating plate 43a to displace in a direction approaching the intake plate 41, thereby compressing the resonance chamber 48, and similarly, the resonance plate 42 is driven by the floating plate 43a to displace in a direction approaching the intake plate 41 due to resonance, thereby pushing the fluid in the resonance chamber 48 out of the pump core module 4 through the gap 43D, thereby achieving the effect of fluid transmission. Finally, as shown in fig. 7E, when the suspension plate 43a moves back to the initial position in the direction away from the flow inlet plate 41, the resonator plate 42 is also driven to move in the direction away from the flow inlet plate 41, and the resonator plate 42 compresses the resonance chamber 48 at this time, so that the fluid in the resonance chamber 48 moves to the gap 43d, and the volume in the confluence chamber 41c is increased, so that the fluid can continuously pass through the flow inlet hole 41a and the confluence groove 41b to be converged in the confluence chamber 41c. By continuously repeating the above-mentioned operation steps of the pump core module 4 shown in fig. 7C to 7E, the pump core module 4 can continuously guide the fluid from the inflow hole 41a into the flow channel formed by the inflow plate 41 and the resonance plate 42, generate a pressure gradient, and then discharge the pressure gradient through the gap 43d, so that the fluid flows at a high speed, thereby achieving the operation of the pump core module 4 for transferring the fluid.

Referring to fig. 8A to 8D, when the micro pump 10 is activated, the pump core module 4 is activated to draw the fluid outside the micro pump 10 into the pump core module 4, and then into the collecting chamber C after passing through the collecting hole 34 of the collecting plate 3, and then the valve plate 2 is pushed away from the protrusion 33 of the collecting plate 3 and then enters the outflow channel 13 of the outflow plate 1 through the valve hole 23 to complete the fluid delivery. When the micro pump 10 stops operating, the pump core module 4 is not actuated, the fluid flows back into the micro pump 10 from the outflow channel 13, and the portion of the valve plate 2 corresponding to the collecting chamber C is pushed away to leave the outflow plate 1, so that the fluid is discharged out of the micro pump 10 after entering the outflow channel 14 through the space between the valve plate 2 and the outflow plate 1, and the operation of outflow is completed.

Referring to fig. 9 to 10D, in the second embodiment of the present invention, the structure of the flow outlet plate 1' is different from that of the flow outlet plate 1 of the first embodiment, and the difference is in the form of the outflow channel 13. In the second embodiment, the outflow channel 13 is a curved channel. Thereby, fluid is transferred laterally from the micro-pump 10'. It should be noted that, since the outlet flow plate 1' is a concentric symmetrical structure, the outlet direction of the fluid can have 360 ° freedom, that is, the outlet direction of the outlet flow channel 13 can rotate 360 ° around the protrusion 33 of the collecting plate 3, so that the outlet direction of the outlet flow channel 13 can be easily adjusted according to the desired outlet direction when the user uses the device.

In conclusion, the micropump provided by the scheme forms a one-way output concentric circle non-return symmetrical structure and has a pressure relief function, so that the effects of greatly reducing the structure of the valve plate, improving the overall air tightness reliability, increasing the freedom degree of the output direction and greatly reducing the pressure relief flow resistance are achieved.

Various modifications may be made by those skilled in the art without departing from the scope of the invention as defined by the appended claims.

Claims

1. A micropump, comprising:

a collector plate having a collector plate first surface and a collector plate second surface, the collector plate first surface and the collector plate second surface being oppositely disposed surfaces, the collector plate comprising:

an outer groove arranged on the first surface of the collector plate;

the inner groove is arranged on the first surface of the collector plate and is surrounded by the outer groove;

the convex part is arranged on the first surface of the collector plate and arranged in the center of the inner groove;

at least one flow collecting hole, which penetrates from the first surface to the second surface of the flow collecting plate and is arranged in the inner groove and at the outer edge of the convex part; and

a current collecting peripheral wall arranged on the second surface of the current collecting plate and defining a current collecting space;

the valve plate is arranged in the inner groove of the current collecting plate and comprises a valve hole, the valve hole is arranged at the center of the valve plate, the convex part of the current collecting plate is propped against the valve hole, and a current collecting cavity is formed between the valve plate and the current collecting plate;

the outflow plate comprises an outflow channel, at least one outflow channel and an outflow peripheral wall, the outflow channel is arranged at the center of the outflow plate, an outflow space is defined by the outflow peripheral wall, the outflow space is communicated with the outflow channel and the at least one outflow channel, the valve hole of the valve block is communicated with the outflow space and the outflow channel, and the outflow peripheral wall is clamped in the outer groove of the flow collecting plate, so that the valve block is accommodated in the outflow space; and

the pump core module is accommodated in the flow collecting space of the flow collecting plate;

the pump core module draws fluid to enter the pump core module, then flows into the collecting chamber through the at least one collecting hole, pushes away the valve plate, and then enters the outflow channel of the outflow plate through the valve hole to finish the transmission of the fluid.

2. The micropump of claim 1, wherein the manifold plate comprises a plurality of manifold holes disposed at equal intervals in the inner recess and surrounding the protrusion.

3. The micropump of claim 2, wherein the outer channel of the manifold plate is of an annular configuration, and the inner channel and the protrusion are each of a circular configuration, such that the manifold plate forms a concentrically symmetrical structure.

4. The micropump of claim 1, wherein the outlet plate includes a plurality of outlet channels, equally spaced, and surrounding the outlet channels.

5. The micropump of claim 4, wherein the outlet plate has a circular configuration such that the outlet plate forms a concentric symmetrical configuration.

6. The micropump of claim 1, wherein the valve plate further comprises a peripheral wall of the valve plate disposed on a side of the valve plate adjacent to the collecting plate and received in the inner recess of the collecting plate.

7. The micropump of claim 1, wherein the outflow channel is a linear channel.

8. The micropump of claim 1, wherein the outlet flow channel is a tortuous channel.

9. The micropump of claim 1, wherein the pump core module comprises:

the inflow plate is provided with at least one inflow hole, at least one bus groove and a confluence chamber, wherein the inflow hole is used for leading in fluid and penetrates through the bus groove, and the bus groove is communicated with the confluence chamber, so that the fluid led in by the inflow hole can flow into the confluence chamber after passing through the bus groove;

a resonance sheet, which is connected on the flow inlet plate and is provided with a hollow hole, a movable part and a fixed part, wherein the hollow hole is positioned at the center of the resonance sheet and corresponds to the position of the confluence chamber of the flow inlet plate, the movable part is arranged around the hollow hole, and the fixed part is arranged at the outer peripheral part of the resonance sheet and is fixedly connected on the flow inlet plate; and

a piezoelectric actuator jointed on the resonance sheet;

the fluid is guided in from the inflow hole of the inflow plate, collected into the confluence chamber after passing through the bus groove, and then flows through the hollow hole of the resonance plate, thus achieving the transmission of the fluid.

10. The micropump of claim 9, wherein the piezoelectric actuator comprises:

the suspension plate is in a square shape and can be bent and vibrated;

an outer frame disposed around the outer side of the suspension plate;

at least one bracket connected between the suspension plate and the outer frame for providing a supporting force for the suspension plate to elastically support; and

the piezoelectric element is attached to one surface of the suspension plate and is used for being applied with voltage to drive the suspension plate to vibrate in a bending mode.

11. The micropump of claim 10, wherein the pump core module further comprises a first insulating sheet, a conductive sheet, and a second insulating sheet, wherein the flow inlet plate, the resonator plate, the piezoelectric actuator, the first insulating sheet, the conductive sheet, and the second insulating sheet are sequentially stacked.

12. The micropump of claim 11, wherein the piezoelectric actuator further comprises a first conductive pin protruding from an outer edge of the outer frame, the conductive plate has a second conductive pin protruding from an outer edge of the conductive plate, and the manifold further comprises a plurality of pin openings, the first conductive pin and the second conductive pin protruding from the plurality of pin openings to the outside of the manifold, respectively.

13. The micropump of claim 9, wherein the piezoelectric actuator comprises:

a suspension plate which is in a square shape and can be bent and vibrated;

an outer frame surrounding the suspension plate;

at least one support connected between the suspension plate and the outer frame for providing the suspension plate with elastic support, forming a non-coplanar structure between one surface of the suspension plate and one surface of the outer frame, and forming a cavity space between one surface of the suspension plate and the resonator plate; and

the piezoelectric element is attached to one surface of the suspension plate and used for applying voltage to drive the suspension plate to vibrate in a bending mode.