TWM542099U - Fluid control device - Google Patents

Description

Fluid control device

This case relates to a fluid control device suitable for miniature ultra-thin and silent.

At present, in various fields, such as medicine, computer technology, printing, energy and other industries, the products are developing in the direction of refinement and miniaturization. Among them, products such as micro-pumps, sprayers, inkjet heads, industrial printing devices, etc. The fluid transport structure is its key technology, which is how to break through its technical bottleneck with innovative structure and be an important part of development.

For example, in the pharmaceutical industry, many instruments or equipment that require pneumatic power drive are usually used with conventional motors and pneumatic valves to achieve their fluid delivery. However, limited by the volume limitations of conventional motors and fluid valves, it is difficult for such instruments to reduce the size of their overall devices, that is, it is difficult to achieve the goal of thinning, and it is impossible to achieve portable purposes. In addition, these conventional motors and fluid valves also cause noise problems when they are actuated, resulting in inconvenience and discomfort in use.

Therefore, how to develop a fluid control device that can improve the above-mentioned conventional technology and make the instrument or device using the conventional fluid control device small, miniaturized and muted, thereby achieving a portable and portable purpose, is currently There is an urgent need to solve the problem.

As shown in FIG. 1, a fluid control device includes a housing 1 and a piezoelectric actuator 2, two insulating sheets 3a and 3b, and a conductive sheet 4. The housing 1 includes an outlet plate 11 and a base 12. The outlet plate 11 has a frame structure having a side wall 111 at the periphery and a plate member 112 at the bottom, and the side wall 111 and the plate member 112 define a housing together. a space 113 for the piezoelectric actuator 2 to be disposed in the accommodating space 113, wherein the plate member 112 is recessed on a surface to form a temporary storage chamber 114, and at least one of the plate member 112 is disposed on the plate member 112. The discharge hole 115 is connected to the temporary storage chamber 114. The base 12 includes an inlet plate 121 and a resonant plate 122. The inlet plate 121 has at least one inlet hole 1211, at least one bus bar groove 1212 and a confluence chamber 1213. The inlet hole 1211 is correspondingly connected to the bus bar slot 1212, and the other end of the at least one bus bar slot 1212 is connected to the confluence chamber 1213. The confluence chamber 1213 forms a chamber for the confluent fluid for temporarily suspending the fluid. The cavity is formed to have the same depth as the bus bar 1212, and the resonator piece 122 is a flexible material having a hollow hole 1223 corresponding to the confluence chamber 1213 of the inlet plate 121. So that the fluid of the confluence chamber 1213 can pass through the hollow hole 1223 flows to the lower side of the resonator piece 122. Thus, an outlet plate 11, an insulating sheet 3b, a conductive sheet 4, an insulating sheet 3a, a piezoelectric actuator 2, and a base 12 are sequentially stacked and fixed, and finally the side walls 111 of the outlet plate 11 are accommodated on both sides. The space 113 is coated with the sealant 6 to prevent leakage sealing and is provided to form a fluid control device. Thus, the fluid control device has a simple structure and can be configured to be thin.

Further, the piezoelectric actuator 2 is disposed corresponding to the resonator piece 122, and is composed of a suspension plate 21, a piezoelectric element 22, an outer frame 23, and at least one bracket 24, and the resonance piece 122 is movable corresponding to the confluence chamber 1213. The portion 1221 is fixedly bonded to the base 12 as a fixing portion 1222.

The equipment to which the above-described assembled fluid control device is applied is always in a trend of miniaturization. Therefore, it is required to further reduce the size of the fluid control device without reducing the output capacity (discharge flow rate and discharge pressure) of the fluid control device. However, the smaller the fluid control device described above, the lower the output capability of the fluid control device. Therefore, if the control output capability is to be maintained and miniaturized, there is a limit in the above-described control of the existing structure. Therefore, this creation has studied the control of the structure shown below.

Fig. 1 is a cross-sectional view showing the configuration of a main part of the fluid control device. The fluid control device is a structure in which an outlet plate 11, an insulating sheet 3a, a conductive sheet 4, an insulating sheet 3b, a piezoelectric actuator 2, and a base 12 are sequentially stacked and fixed. In the fluid control device, the outer frame 23 of the piezoelectric actuator 2 is bonded and fixed to the fixing portion 1222 of the resonant piece 122 via the colloid 5, and therefore, the suspension plate 21 and the resonant piece 122 are separated from the colloid 5. The thickness is supported by the distance. Further, a part of the resonance piece 122 can vibrate at substantially the same frequency as the piezoelectric actuator 2 due to a pressure fluctuation of the fluid generated by the vibration of the piezoelectric actuator 2. That is, with the configuration of the resonator piece 122 and the base 12, the portion where the movable portion 1221 faces the confluence chamber 1213 is bendable. Further, in the above configuration, when the driving voltage is applied to the piezoelectric element 22, the suspension plate 21 is bent and vibrated by the expansion and contraction of the piezoelectric element 22, and the movable portion 1221 of the resonance piece 122 is vibrated with the vibration of the suspension plate 21. . Thereby, the fluid control device sucks the fluid from the at least one inlet hole 1211 of the base 12, and the fluid enters the at least one bus bar groove 1212 and flows into the confluence chamber 1213, and is introduced into the temporary storage chamber 114 through the hollow hole 1223. The volume of the temporary storage chamber 114 is compressed by the vibration of the suspension plate 21 of the piezoelectric actuator 2 and the resonance effect of the resonant plate 122, and is discharged by at least one discharge hole 115 of the outlet plate 11, as it is actuated by the piezoelectric The vibration of the device 2 causes the movable portion 1221 to vibrate, so that the fluid control device can substantially increase the vibration amplitude. Therefore, the fluid control device is small in size but has a high discharge pressure and a large discharge flow rate.

However, the piezoelectric actuator 2 of the above fluid control device is bonded and fixed by the colloid 5, and since the adhesive colloid 5 needs to be heated and pressurized to firmly adhere the piezoelectric actuator 2, the piezoelectric actuator is thus caused. 2 and the piezoelectric element 22 generate warpage (thermal deformation) according to the respective linear expansion coefficients of the members, and as a result, the distance between the suspension plate 21 and the resonance piece 122 changes. Here, the distance between the suspension plate 21 and the resonance plate 122 is an important factor affecting the pressure-flow characteristics of the fluid control device.

Therefore, in the fluid control device, there is a problem in that the pressure-flow characteristic of the fluid control device fluctuates due to temperature changes. That is, in the fluid control device, there is a problem that the temperature characteristics are poor.

The main object of the present invention is to provide a fluid control device capable of suppressing fluctuations in pressure-flow characteristics due to temperature changes.

Another object of the present invention is to provide a fluid control device in which a piezoelectric element is required to be formed of a material having a linear expansion coefficient larger than a linear expansion coefficient of a suspension plate, and the suspension plate is limited in area and hardness of the stainless steel material to suppress thermal deformation. The amount, and the linear expansion coefficient of the base and the suspension plate are different, so that the fluid control device is heated and pressurized between the base and the suspension plate to control the maximum effective deformation displacement δ between the suspension plate and the resonance plate. Maximum performance and flow rate allow the fluid control device to suppress fluctuations in pressure-flow characteristics due to temperature changes. The fluid control device maintains proper pressure-flow characteristics over a wide temperature range to achieve overall volume reduction and thinness. Portable, lightweight and comfortable portable.

In order to achieve the above object, a generalized embodiment of the present invention provides a fluid control device comprising: a piezoelectric actuator comprising: a suspension plate; an outer frame disposed around the outer side of the suspension plate; at least one bracket Connected between the suspension plate and the outer frame; a piezoelectric element having a side length not greater than the side length of the suspension plate attached to the suspension plate; and a casing comprising: an exit plate, a peripheral edge a housing having a side wall and a plate member to form a receiving space for the piezoelectric actuator to be disposed in the accommodating space; a base comprising an inlet plate and a resonating plate, the cover In the accommodating space of the outlet plate, the piezoelectric actuator is closed, the inlet plate has a confluence chamber connected to the outside, the resonance piece is fixedly fixed to the inlet plate, and has a hollow hole. a confluence chamber relative to the inlet plate; a colloid disposed between the outer frame of the piezoelectric actuator and the resonating plate of the base to maintain the resonance between the piezoelectric actuator and the base There is a gap between the sheets; wherein the suspension plate is provided by The linear expansion coefficient is formed by a material having a smaller coefficient of linear expansion than that of the piezoelectric element, and has a hardness that is heated and deformed to maintain bending, and a coefficient of linear expansion of the suspension plate and the resonance piece is different to allow the suspension plate and the resonance piece to The gap obtains a specific amount of deformation displacement.

Some exemplary embodiments embodying the features and advantages of the present invention are described in detail in the following description. It is to be understood that the present invention is capable of various modifications in various aspects, and is not to be construed as a limitation.

As shown in FIG. 1, FIG. 2A, B and FIG. 3, the fluid control device of the present invention comprises a housing 1, a piezoelectric actuator 2, two insulating sheets 3a, 3b and a conductive sheet 4. The housing 1 includes an exit plate 11 and a base 12, and the base 12 includes an inlet plate 121 and a resonant plate 122, but is not limited thereto. The piezoelectric actuator 2 is disposed corresponding to the resonator piece 122, and the outlet plate 11, the piezoelectric actuator 2, and the resonance plate 122 of the base 12, the inlet plate 121, and the like are sequentially stacked upward, and piezoelectrically actuated. The device 2 is assembled from a suspension plate 21, a piezoelectric element 22, an outer frame 23, and at least one bracket 24.

In the present embodiment, the exit plate 11 of the housing 1 has a frame structure having a side wall 111 at the periphery and a plate member 112 at the bottom, and an accommodating space 113 is defined by the side wall 111 and the plate member 112 for The piezoelectric actuator 2 is disposed in the accommodating space 113, and the plate member 112 is recessed on a surface to form a temporary storage chamber 114, and the plate member 112 is provided with at least one discharge hole 115 extending through the temporary connection. The chamber 114 is stored. The base 12 includes an inlet plate 121 and a resonant plate 122. The inlet plate 121 has at least one access hole 1211. In this embodiment, the number of the access holes 1211 is four, but not limited thereto. The upper surface of the inlet plate 121 is mainly for allowing fluid to flow from the at least one inlet hole 1211 into the fluid control device from the outside of the device, and the inlet plate 121 has at least one bus bar groove 1212, each confluence The trough 1212 is disposed to communicate with an access hole 1211. The center of the bus bar 1212 has a confluence chamber 1213, and the confluence chamber 1213 communicates with the bus trough 1212. A fluid entering the orifice 1211 entering the busbar groove 1212 is directed and confluently concentrated to the confluence chamber 1213.

In the present embodiment, the inlet plate 121 has an integrally formed inlet hole 1211, a bus bar groove 1212, and a confluence chamber 1213. When the inlet plate 121 is assembled corresponding to the resonator piece 122, a confluence is formed at the confluence chamber 1213. a chamber of fluid for temporary storage of fluid.

In some embodiments, the material of the inlet plate 121 is made of stainless steel, but is not limited thereto. In other embodiments, the depth of the chamber formed by the confluence chamber 1213 is the same as the depth of the busbar slots 1212, but is not limited thereto.

Further, the piezoelectric actuator 2 described above is provided corresponding to the resonator piece 122, and is composed of a suspension plate 21, a piezoelectric element 22, an outer frame 23, and at least one bracket 24, and the resonance piece 122 corresponds to the confluence chamber 1213. The movable portion 1221 is fixedly bonded to the base 12 as a fixed portion 1222, and has a hollow hole 1223 on the resonant plate 122 corresponding to the confluence chamber 1213 of the inlet plate 121 to allow fluid to flow. In this embodiment, the resonator piece 122 is a flexible material, but is not limited thereto. In other embodiments, the resonant plate 122 is made of a copper material, but is not limited thereto.

The piezoelectric element 22 described above has a square plate-like structure, and its side length is not larger than the side length of the suspension plate 21, and can be attached to the suspension plate 21. In the present embodiment, the suspension plate 21 is a flexible square plate-like structure, and the outer frame 23 is disposed around the outer side of the suspension plate 21. The shape of the outer frame 23 also substantially corresponds to the shape of the suspension plate 21. In the present embodiment, the outer frame 23 is also a square hollow frame structure; and the suspension plate 21 and the outer frame 23 are connected by four brackets 24 and provide elastic support. Please refer to FIG. 2A and FIG. 2B at the same time, the suspension plate 21, the outer frame 23 and the four brackets 24 are integrally formed, and may be composed of a metal plate, for example, may be made of stainless steel, but not For this reason, the piezoelectric actuator 2 of the fluid control device of the present invention is formed by bonding the piezoelectric element 22 to the metal plate, but is not limited thereto. The outer frame 23 is disposed on the outer side of the suspension plate 21 and has an outwardly protruding conductive pin 231 for power connection, but not limited thereto; and the four brackets 24 are connected to the suspension plate 21 and Between the outer frames 23 to provide elastic support. In this embodiment, one end of each of the brackets 24 is connected to the side of the suspension plate 21, and the other end is connected to the inner side of the outer frame 23, and between the bracket 24, the suspension plate 21 and the outer frame 23. There is at least one gap 25 for fluid circulation, and the type and number of the suspension plate 21, the outer frame 23 and the bracket 24 are varied. Through the bracket 24 disposed between the suspension plate 21 and the outer frame 23, the uneven angle of the suspension plate 21 during operation is reduced, which helps to increase the amplitude of the suspension plate 21 on the Z-axis, so that the suspension plate 21 can have a better displacement state when vibrating up and down, that is, the suspension plate 21 is more stable and consistent when it is actuated, which is beneficial to improve the stability and performance of the piezoelectric actuator 2. In this embodiment, the suspension plate 21 is a square and has a stepped surface structure, that is, a surface of the suspension plate 21 has a convex portion 26, and the convex portion 26 can be a circular convex structure, but Not limited to this.

Further, the two insulating sheets 3a and 3b are provided with the conductive sheets 4 interposed therebetween. In addition, in some embodiments, the insulating sheets 3a, 3b are made of an insulating material, such as plastic, but not limited thereto for insulation; in other embodiments, the conductive sheets 4 are electrically conductive. Material, for example: metal, but not limited to it for electrical conduction. Moreover, in the embodiment, a conductive pin 41 may be disposed on the conductive sheet 4 for electrical conduction.

When the fluid control device of the present invention is assembled, the structure of the outlet plate 11, an insulating sheet 3b, a conductive sheet 4, an insulating sheet 3a, a piezoelectric actuator 2, and a base 12 are stacked and assembled upward. And disposed in the accommodating space 113 of the outlet plate 11, and finally the space 113 on both sides of the side wall 111 of the outlet plate 11 is coated with the sealant 6 to be leakproof and sealed to form a small flow volume and miniaturized shape. Fluid control device. In the above configuration, when the driving voltage is applied to the piezoelectric element 22, the suspension plate 21 is bent and vibrated by the expansion and contraction of the piezoelectric element 22, and the movable portion 1221 of the resonance piece 122 is vibrated by the vibration of the suspension plate 21, The fluid control device draws fluid from at least one of the access holes 1211 of the base 12, and the fluid flows into the at least one bus bar 1212 and flows into the confluence chamber 1213 through the hollow hole 1223 into the temporary storage chamber 114. The suspension plate 21 of the piezoelectric actuator 2 vibrates and the resonance effect of the resonance plate 122 compresses the volume of the temporary storage chamber 114, and is discharged from at least one discharge hole 115 of the outlet plate 11 to constitute a fluid control device for transferring fluid. .

Further, as shown in FIGS. 1 and 3, the resonator piece 122 and the piezoelectric actuator 2 have a gap h therebetween in the gap h between the resonator piece 122 and the frame 23 outside the piezoelectric actuator 2. The filling is provided with a colloid 5, such as a conductive adhesive, but not limited thereto, so that the depth of the gap h can be maintained between the resonant plate 122 and the suspension plate 21 of the piezoelectric actuator 2, thereby guiding the airflow more. Flowing rapidly; and, in response to the depth of the gap h, a compression chamber 116 can be formed between the resonator piece 122 and the piezoelectric actuator 2, and the fluid can be guided between the chambers through the hollow hole 1223 of the resonator piece 122. The flow is more rapid, and since the suspension plate 21 and the resonator piece 122 are kept at an appropriate distance, the mutual contact interference is reduced, and the noise generation can be reduced.

Further, when the above-mentioned colloid 5 is adhered, it is necessary to use heat and pressure to firmly adhere the piezoelectric actuator 2, and in the case where the colloid 5 is subjected to heating and pressurization, the piezoelectric actuator 2 and the piezoelectric element 22 are caused. The heating causes a warp (thermal deformation) depending on the respective linear expansion coefficients of the members, and as a result, the distance between the suspension plate 21 and the resonance piece 122 changes. Here, the distance between the suspension plate 21 and the resonance plate 122 is an important factor affecting the pressure-flow characteristics of the fluid control device.

Therefore, how to increase the pressure and flow rate of the fluid control device of the present case, that is, it is necessary to control the gap h, which is generated by the colloid 5, and the colloid 5 needs to be heated and pressurized to achieve the adhesion effect, and After heating, the piezoelectric actuator 2 of the metal must be thermally deformed. In order to maintain a sufficient gap h, the piezoelectric actuator 2 of the metal material is used to define some thermal deformation to control the suspension plate. The most effective deformation displacement δ is achieved between the 21 and the resonator 122 to achieve maximum performance and flow.

In the present invention, the material relationship of the suspension plate 21 is changed by fixing the thermal deformation amount of the piezoelectric element 22 by using the combination relationship of the suspension plate 21 and the piezoelectric element 22, that is, the piezoelectric element 22 needs to have a linear expansion coefficient ratio suspension plate 21 The material having a large coefficient of linear expansion is formed, and in the case where the piezoelectric actuator 2 is joined to the base 12 by the colloid 5, after the heat and pressure bonding of the colloid 5, at a normal temperature, the piezoelectric element 22 and the suspension plate 21 are used. The coefficient of linear expansion is different, so that the suspension plate 21 is convexly warped toward the piezoelectric element 22 side, as shown in FIG. 4, and is in a downwardly warped state as shown in FIG. 4, and further, the linear expansion of the resonance piece 122 and the suspension plate 21 of the base 12 The coefficient is different, so that the resonant plate 122 on the base 12 is warped upward as shown in FIG. 4, that is, the resonant piece 122 is convexly warped toward the side away from the suspension plate 21 to control the suspension plate 21 and the resonant plate 122. The most effective deformation displacement δ is reached to provide maximum performance and flow, so that the fluid control device can suppress fluctuations in pressure-flow characteristics due to temperature changes. That is, the fluid control device can maintain an appropriate pressure-flow characteristic over a wide temperature range.

In addition, in this case, the suspension plate 21 is made of stainless steel for experiment, that is, the area and hardness condition of the stainless steel material for the suspension plate 21 is used to limit the amount of thermal deformation to control the maximum between the suspension plate 21 and the resonance plate 122. Effective displacement displacement δ to provide maximum performance and flow.

The experimental results are as follows:         <TABLE border="1" borderColor="#000000" width="_0002"><TBODY><tr><td> The square length of the suspension plate</td><td> 4-10mm </td>< /tr><tr><td> Material hardness of the suspension plate</td><td> Stainless steel material (hardness H) </td><td> Stainless steel material (hardness H/2) </td></tr> <tr><td> Piezoelectric element driving frequency</td><td> 27-29.5kHz </td></tr><tr><td> Output air pressure (mmHg) </td><td> 300- 400 mmHg </td><td> 300-400 mmHg </td></tr><tr><td> Output flow rate (ml/min) </td><td> 50-100 ml/min </ Td><td> 90-160 ml/min </td></tr></TBODY></TABLE>

As shown in the above table, the suspension plate 21 has a square shape with a side length of 4-10 mm, and the hardness H of the stainless steel material is 370HV-410HV, and the suspension plate 21 has a hardness of stainless steel H/2 of 310HV. -350HV, so that different bending amounts can be achieved during the heating and pressing process of the colloid 5, for example, the suspension plate 21 is made of stainless steel material hardness H, and when heated, the suspension plate 21 and the resonance piece 122 can be maintained at 15 ~17μm deformation displacement (δ), using stainless steel hardness H/2, can maintain the displacement displacement δ between the suspension plate 21 and the resonance plate 122 at 20~25μm, so the suspension plate 21 is made of stainless steel material hardness H/2 ratio The hardness H of the stainless steel material can be increased by 3~10μm deformation displacement δ, and then the driving frequency of the piezoelectric element 22 is driven in the range of 27-29.5 kHz to drive the suspension plate 21 to generate vibration deformation, and the suspension plate 21 is made of stainless steel hardness H material. The fluid control device has a performance air pressure of 300-400 mmHg and a flow rate of 50-100 ml/min, while the suspension plate 21 has a stainless steel hardness of H/2, which allows the fluid control device to output a gas pressure of 30-. 400mmHg, while the flow rate is 90-160 Ml/min, in the performance of the fluid control device, the value of the output pressure is close, and the flow rate is greatly different, so the suspension plate 21 uses the hardness of the stainless steel material H/2 to reach the suspension of the fluid control device. The spacing between the plate 21 and the resonator piece 122 is the position of the most effective deformation displacement amount δ.

In summary, in the fluid control device provided by the present invention, the piezoelectric element needs to be formed of a material having a linear expansion coefficient larger than that of the suspension plate, and the suspension plate is limited in area and hardness of the stainless steel material to limit the suppression. The amount of thermal deformation, and the coefficient of linear expansion of the base and the suspension plate are different, so that the fluid control device is heated and pressurized between the base and the suspension plate to control the most effective deformation displacement between the suspension plate and the resonance plate. Produces maximum performance and flow, allowing the fluid control device to suppress fluctuations in pressure-flow characteristics due to temperature changes. The fluid control device maintains proper pressure-flow characteristics over a wide temperature range to achieve overall volume reduction and Thin, lightweight and comfortable portable, highly industrial use value, 提出 apply in accordance with the law.

Even though the present invention has been described in detail by the above-described embodiments, it can be modified by those skilled in the art, and is not intended to be protected as claimed.

1‧‧‧shell

11‧‧‧Export board

111‧‧‧ side wall

112‧‧‧ boards

113‧‧‧ accommodating space

114‧‧‧Storage chamber

115‧‧‧Exhaust hole

116‧‧‧Compression chamber

12‧‧‧Base

121‧‧‧ entrance board

1211‧‧‧ access hole

1212‧‧‧ busbar slot

1213‧‧‧Confluence chamber

122‧‧‧Resonance film

1221‧‧‧movable department

1222‧‧‧Fixed Department

1223‧‧‧ hollow holes

2‧‧‧ Piezoelectric Actuator

21‧‧‧suspension board

22‧‧‧Piezoelectric components

23‧‧‧Front frame

231, 41‧‧‧ conductive pins

24‧‧‧ bracket

25‧‧‧ gap

26‧‧‧ convex

3a, 3b‧‧ ‧ insulating sheet

4‧‧‧Conductor

5‧‧‧colloid

6‧‧‧Packing

H‧‧‧ gap

Δ‧‧‧ deformation displacement

Figure 1 is a schematic cross-sectional view of the fluid control device. Fig. 2A is a schematic exploded front view showing the components of the fluid control device. Fig. 2B is a schematic exploded perspective view of the fluid control device related components. Figure 3 is a partial cross-sectional view showing the position of the fluid control device base and the piezoelectric actuator. Fig. 4 is a partial cross-sectional view showing the position of the base and the piezoelectric actuator in the state of colloid heating and pressurization of the fluid control device shown in Fig. 3.

12‧‧‧Base

121‧‧‧ entrance board

1211‧‧‧ access hole

1212‧‧‧ busbar slot

1213‧‧‧Confluence chamber

122‧‧‧Resonance film

1221‧‧‧movable department

1222‧‧‧Fixed Department

1223‧‧‧ hollow holes

2‧‧‧ Piezoelectric Actuator

21‧‧‧suspension board

22‧‧‧Piezoelectric components

23‧‧‧Front frame

24‧‧‧ bracket

26‧‧‧ convex

5‧‧‧colloid

Δ‧‧‧ deformation displacement

Claims (15)

A fluid control device comprising: a piezoelectric actuator comprising: a suspension plate; an outer frame disposed around the outer side of the suspension plate; at least one bracket coupled between the suspension plate and the outer frame; a piezoelectric element having a side length not greater than a side length of the suspension plate attached to the suspension plate; and a casing comprising: an outlet plate having a side wall and a plate member at the periphery to form an accommodation space a frame structure for the piezoelectric actuator to be disposed in the accommodating space; and a base, comprising an inlet plate and a resonating plate, the cover is disposed in the accommodating space of the outlet plate, Enclosing the piezoelectric actuator, the inlet plate has a confluence chamber connected to the outer portion, the resonating plate is fixedly fixed to the inlet plate, and has a hollow hole opposite to the confluence chamber of the inlet plate; And a colloid disposed between the outer frame of the piezoelectric actuator and the resonant plate of the base to maintain a gap between the piezoelectric actuator and the resonant plate of the base; The suspension plate is formed of a material having a coefficient of linear expansion that is smaller than a coefficient of linear expansion of the piezoelectric element, and has a hardness that is heated and deformed to maintain bending, and a coefficient of linear expansion of the suspension plate and the resonator plate is different to allow the suspension to be suspended. The gap between the plate and the resonator sheet provides a maximum amount of deformation displacement of the performance and flow. The fluid control device according to claim 1, wherein the suspension plate is made of stainless steel and has a hardness of 310 HV to 350 HV. The fluid control device of claim 2, wherein the suspension plate is thermally deformed to maintain a displacement displacement of 20 to 25 μm between the suspension plate and the resonance plate to provide a fluid control device output air pressure of 300 to 400 mmHg, The flow rate is 90 to 160 ml/min. The fluid control device according to claim 1, wherein the suspension plate is made of stainless steel and has a hardness of 370 HV-410 HV. The fluid control device of claim 4, wherein the suspension plate is thermally deformed and maintained at a displacement displacement of 15 to 17 μm between the suspension plate and the resonance plate to provide an output pressure of the fluid control device of 300 to 400 mmHg. The flow rate is 50 to 100 ml/min. The fluid control device of claim 1, wherein the suspension plate is in a square shape. The fluid control device of claim 6, wherein the suspension plate has a side length of between 4 mm and 10 mm. The fluid control device of claim 1, wherein the piezoelectric element has a driving frequency of 27 to 29.5 kHz. The fluid control device according to claim 1, wherein the suspension plate is formed of a material having a linear expansion coefficient smaller than a linear expansion coefficient of the electric component, and after the colloid is heated and pressurized, at a normal temperature, the piezoelectric element And the suspension plate has a different linear expansion coefficient, and the suspension plate is convexly warped toward the piezoelectric element side. The fluid control device according to claim 9, wherein the suspension plate and the resonance piece have different linear expansion coefficients, and after the gel is heated and pressurized, the resonance piece is oriented away from the suspension plate at normal temperature. The side is convexly warped. The fluid control device of claim 1, wherein the colloid is a conductive paste. The fluid control device of claim 1, wherein the inlet plate has at least one inlet hole extending through the upper surface of the inlet plate, and the inlet plate has at least one bus bar groove, and each of the bus bar grooves corresponds to Provided to communicate with the at least one access hole, having a confluence chamber at a central AC of the bus bar slot, and the confluence chamber is in communication with the at least one bus bar slot, thereby entering from the at least one access hole The fluid of the at least one bus bar is guided and concentrated to the confluence chamber. The fluid control device of claim 1, wherein the suspension plate has a convex portion corresponding to the hollow hole of the resonance piece. The fluid control device of claim 1, wherein the resonant piece corresponds to the confluent chamber as a movable portion, and the fixed portion is fixed to the base portion as a fixed portion. The fluid control device of claim 1, further comprising two insulating sheets and a conductive sheet, wherein the two insulating sheets are disposed to sandwich the conductive sheet up and down, and sequentially the outlet plate, the insulating sheet, and the conductive sheet The sheet, the other insulating sheet, the piezoelectric actuator and the base are stacked and assembled upwardly, and are accommodated in the accommodating space of the outlet plate to constitute the fluid control device.