WO2013187271A1 - Blower - Google Patents

Blower Download PDF

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Publication number
WO2013187271A1
WO2013187271A1 PCT/JP2013/065321 JP2013065321W WO2013187271A1 WO 2013187271 A1 WO2013187271 A1 WO 2013187271A1 JP 2013065321 W JP2013065321 W JP 2013065321W WO 2013187271 A1 WO2013187271 A1 WO 2013187271A1
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WO
WIPO (PCT)
Prior art keywords
blower
piezoelectric
suction port
actuator
central axis
Prior art date
Application number
PCT/JP2013/065321
Other languages
French (fr)
Japanese (ja)
Inventor
竹内進
Original Assignee
株式会社村田製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社村田製作所 filed Critical 株式会社村田製作所
Priority to CN201380030418.0A priority Critical patent/CN104364526B/en
Priority to JP2014521269A priority patent/JP5692465B2/en
Publication of WO2013187271A1 publication Critical patent/WO2013187271A1/en
Priority to US14/548,431 priority patent/US10626861B2/en

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/0009—Special features
    • F04B43/0054—Special features particularities of the flexible members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/0009—Special features
    • F04B43/0027—Special features without valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/047—Pumps having electric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F7/00—Pumps displacing fluids by using inertia thereof, e.g. by generating vibrations therein

Definitions

  • the present invention relates to a blower that transports gas.
  • Patent Document 1 discloses a microblower for cooling the heat generated inside a portable electronic device or supplying oxygen necessary for power generation by a fuel cell.
  • FIG. 12 is a cross-sectional view of a micro blower 900 according to Patent Document 1.
  • the micro blower 900 includes an inner case 2, an elastic metal plate 5 ⁇ / b> A, a piezoelectric element 5 ⁇ / b> B, an outer case 3 that covers the outer side of the inner case 2, and a lid member 9.
  • the inner case 2 is elastically supported with respect to the outer case 3 by a plurality of connecting portions 4.
  • the inner case 2 has a U-shaped cross section with an opening at the bottom, and an elastic metal plate 5A is joined so as to close the opening. Thereby, the inner case 2 forms the blower chamber 6 together with the elastic metal plate 5A.
  • the inner case 2 is formed with an opening 8 that communicates the inside and outside of the blower chamber 6.
  • a piezoelectric element 5B is attached to the main surface of the elastic metal plate 5A opposite to the blower chamber 6.
  • a discharge port 3 ⁇ / b> A is formed in the region of the outer case 3 facing the opening 8.
  • the outer case 3 has a lid member 9 so as to accommodate the inner case 2.
  • a suction port 9 ⁇ / b> A is formed in the center of the lid member 9.
  • the central axis passing through the center of the suction port 9A extending in the thickness direction of the lid member 9 coincides with the central axis passing through the center of the piezoelectric element 5B extending in the thickness direction of the lid member 9.
  • An air inflow passage 7 is formed between the joined body of the inner case 2, the elastic metal plate 5A and the piezoelectric element 5B and the outer case 3.
  • the piezoelectric element 5B when an AC drive voltage is applied to the piezoelectric element 5B, the piezoelectric element 5B expands and contracts, and the elastic metal plate 5A bends and vibrates due to the expansion and contraction of the piezoelectric element 5B. And the volume of the blower chamber 6 changes periodically by the bending deformation of the elastic metal plate 5A.
  • the air flow discharged from the blower chamber 6 is discharged from the discharge port 3A while drawing air outside the micro blower 900 through the suction port 9A and the inflow passage 7. Therefore, the flow rate of the air discharged from the discharge port 3A increases by the flow rate of the drawn air.
  • the discharge flow rate per power consumption is increased.
  • an object of the present invention is to provide a blower that can greatly increase the discharge flow rate per power consumption and can secure a necessary discharge flow rate with low power consumption.
  • the blower of the present invention has the following configuration in order to solve the above problems.
  • an actuator having a driving body and bending and oscillating concentrically by applying a voltage to the driving body;
  • a first housing that forms a blower chamber together with the actuator, and has a vent hole that communicates the inside and the outside of the blower chamber;
  • a suction port is formed, and a wall portion facing the actuator;
  • a second housing that covers the actuator and the first housing together with the wall to form a ventilation path between the actuator and the first housing by covering the actuator and the first housing;
  • a discharge port is formed at a location of the second casing facing the vent hole, The central axis of the suction port does not coincide with the central axis of the driving body.
  • the driving body when a driving voltage is applied to the driving body, the driving body causes the actuator to bend and vibrate concentrically.
  • the volume of the blower chamber periodically changes due to the deformation of the actuator, and the gas in the blower chamber flows out from the vent hole. Then, the airflow flowing out from the blower chamber through the vent hole is discharged from the discharge port while drawing the gas existing outside the blower through the vent passage. Thereby, the discharge flow rate of the blower is increased by the flow rate of the drawn gas.
  • the central axis of the suction port passing through the center of the suction port does not match the central axis of the drive body passing through the center of the drive body. For this reason, compared with the conventional blower in which the central axis of the suction port and the central axis of the driving body coincide with each other, the area of the suction port facing the region where the vibration energy is high in the actuator (that is, the region where the displacement amount is large in the actuator). The percentage of decrease. That is, when the actuator is in bending vibration, the flow rate of the gas leaking from the ventilation path to the outside of the blower through the suction port decreases, and the flow rate of the gas colliding with the wall portion increases.
  • the discharge flow rate per power consumption can be greatly increased, and the necessary discharge flow rate can be ensured with low power consumption.
  • the center of the driving body is opposed to a region other than the suction port of the wall portion.
  • the center of the actuator having the highest vibration energy faces the region other than the suction port of the wall portion. Therefore, when the actuator is bending and vibrating, the flow rate of the gas leaking from the air passage through the suction port to the outside of the blower is further reduced, and the flow rate of the gas colliding with the wall portion is further increased.
  • the diameter of the suction port is 1 ⁇ 2 or less of the diameter of the driving body.
  • the discharge flow rate per power consumption can be significantly increased more effectively, and the required discharge flow rate can be secured while maintaining low power consumption.
  • the actuator bends and vibrates in an odd-order vibration mode equal to or higher than a third-order mode that forms a plurality of vibration antinodes by the driving body,
  • the suction port is formed in a region outside the wall portion facing the vibration node having the shortest distance from the center of the actuator among the vibration nodes formed by the bending vibration of the actuator. Is preferred.
  • the wall portion faces all of the high vibration energy region in the actuator. Therefore, when the actuator bends and vibrates in the vibration mode described above, the flow rate of the gas leaking from the air passage through the suction port to the outside of the blower is further reduced, and the flow rate of the gas colliding with the wall portion is further increased.
  • the said wall part in which the said suction port is formed is detachably attached with respect to the said 2nd housing.
  • the discharge pressure and the discharge flow rate can be adjusted without changing the configuration other than the wall portion by adjusting the shape of the wall portion attached to the second casing.
  • the discharge flow rate per power consumption can be greatly increased, and the necessary discharge flow rate can be ensured with low power consumption.
  • FIG. 1 is an external perspective view of a piezoelectric blower 100 according to a first embodiment of the present invention. It is a disassembled perspective view of the piezoelectric blower 100 shown in FIG. It is a bottom view of the piezoelectric blower 100 shown in FIG.
  • FIG. 2 is a sectional view taken along line SS of the piezoelectric blower 100 shown in FIG. 5A and 5B are cross-sectional views taken along the line SS of the piezoelectric blower 100 when the piezoelectric blower 100 shown in FIG. 1 is operated at the frequency (fundamental wave) of the primary mode.
  • FIG. 5A is a diagram when the volume of the blower chamber 36 is increased
  • FIG. 5B is a diagram when the volume of the blower chamber 36 is decreased.
  • FIG. 6 (A) and 6 (B) show the SS line of the piezoelectric blower 200 when the piezoelectric blower 200 according to the second embodiment of the present invention is operated at the third-order mode frequency (third harmonic wave).
  • FIG. 6A is a diagram when the volume of the blower chamber 36 is increased
  • FIG. 6B is a diagram when the volume of the blower chamber 36 is decreased. It is a schematic sectional drawing of the piezoelectric actuator 41 shown to FIG. 6 (B).
  • FIG. 6A and 6B shows the relationship between the distance of the central axis of the suction port 253 relative to the central axis of the piezoelectric element 40 and the pump characteristics (discharge pressure and discharge flow rate) of the piezoelectric blower 200 in the piezoelectric blower 200 shown in FIGS. FIG. It is an external appearance perspective view of the piezoelectric blower 300 which concerns on 3rd Embodiment of this invention.
  • FIG. 10 is a cross-sectional view taken along line TT of the piezoelectric blower 300 shown in FIG. 9.
  • FIGS. 11A and 11B are cross-sectional views taken along the line TT of the piezoelectric blower 300 when the piezoelectric blower 300 shown in FIG.
  • FIG. 9 is operated at a primary mode frequency (fundamental wave).
  • 11A is a diagram when the volume of the blower chamber 36 is increased
  • FIG. 11B is a diagram when the volume of the blower chamber 36 is decreased. It is sectional drawing of the micro blower 900 which concerns on patent document 1.
  • FIG. 11A is a diagram when the volume of the blower chamber 36 is increased
  • FIG. 11B is a diagram when the volume of the blower chamber 36 is decreased.
  • FIG. 1 is an external perspective view of the piezoelectric blower 100 according to the first embodiment of the present invention.
  • FIG. 2 is an exploded perspective view of the piezoelectric blower 100 shown in FIG.
  • FIG. 3 is a bottom view of the piezoelectric blower 100 shown in FIG.
  • FIG. 4 is a cross-sectional view taken along line SS of the piezoelectric blower 100 shown in FIG.
  • the piezoelectric blower 100 includes a housing 17, a top plate 37, a side plate 38, a vibration plate 39, a piezoelectric element 40, and a cap 42 in order from the top, and has a structure in which these are stacked in order.
  • the top plate 37, the side plate 38, and the diaphragm 39 constitute a blower chamber 36.
  • the piezoelectric blower 100 has dimensions of a width of 20 mm ⁇ a length of 20 mm ⁇ a height of 1.85 mm in a region other than the nozzle 18.
  • the housing 17 has a nozzle 18 formed around a discharge port 24 through which air is discharged.
  • the nozzle 18 has a size of an outer diameter of 2.0 mm ⁇ an inner shape (that is, a discharge port 24) of a diameter of 0.8 mm ⁇ a height of 1.6 mm.
  • Screw holes 56A to 56D are formed in the square of the housing 17.
  • the housing 17 is formed in a U-shaped cross-section with an opening at the bottom, and the housing 17 houses the top plate 37 of the blower chamber 36, the side plate 38 of the blower chamber 36, the vibration plate 39, and the piezoelectric element 40.
  • the housing 17 is made of, for example, resin.
  • the top plate 37 of the blower chamber 36 has a disk shape and is made of, for example, metal.
  • the top plate 37 is formed with a central portion 61, a key-like protruding portion 62 that protrudes horizontally from the central portion 61 and contacts the inner wall of the housing 17, and an external terminal 63 for connecting to an external circuit. ing.
  • the central portion 61 of the top plate 37 is provided with a vent hole 45 that allows the inside and outside of the blower chamber 36 to communicate with each other.
  • the vent hole 45 is formed at a position facing the discharge port 24 of the housing 17.
  • the top plate 37 is joined to the upper surface of the side plate 38.
  • the side plate 38 of the blower chamber 36 has an annular shape, and is made of, for example, metal.
  • the side plate 38 is joined to the upper surface of the diaphragm 39. Therefore, the thickness of the side plate 38 is the height of the blower chamber 36.
  • the piezoelectric element 40 has a disk shape, and is made of, for example, lead zirconate titanate ceramic.
  • the diameter of the piezoelectric element 40 is 13.8 mm, and the area of the main surface on the wall 43 side of the piezoelectric element 40 is 150 mm 2 .
  • the piezoelectric element 40 is bonded to the main surface of the diaphragm 39 opposite to the blower chamber 36 and expands and contracts according to the applied AC voltage.
  • the joined body of the piezoelectric element 40 and the diaphragm 39 constitutes a piezoelectric actuator 41.
  • the joined body of the top plate 37, the side plate 38, the vibration plate 39, and the piezoelectric element 40 is elastically supported with respect to the housing 17 by the four protrusions 62 provided on the top plate 37. .
  • the electrode conduction plate 70 includes an internal terminal 73 for connection to the piezoelectric element 40 and an external terminal 72 for connection to an external circuit.
  • the tip of the internal terminal 73 is soldered to the flat surface of the piezoelectric element 40. By setting the soldering position to a position corresponding to the bending vibration node of the piezoelectric element 40, the vibration of the internal terminal 73 can be further suppressed.
  • the diameter of the suction port 53 is 1/2 or less of the diameter of the piezoelectric element 40, and is 5 mm in this embodiment.
  • the area of the opening surface of the suction port 53 is 19.6 mm 2 .
  • the ratio (area ratio) of the area of the opening surface of the suction port 53 to the area of the main surface on the wall 43 side of the piezoelectric element 40 is about 0.13.
  • the cap 42 has a protruding portion 52 that protrudes toward the top plate 37 on the outer peripheral edge.
  • the cap 42 holds the casing 17 with the protruding portion 52, and stores the top plate 37 of the blower chamber 36, the side plate 38 of the blower chamber 36, the vibration plate 39, and the piezoelectric element 40 together with the casing 17.
  • the cap 42 is made of, for example, a glass epoxy resin.
  • FIG. 5A and 5B are cross-sectional views of the SS line of the piezoelectric blower 100 when the piezoelectric blower 100 shown in FIG. 1 is operated at a primary mode frequency (hereinafter, fundamental wave).
  • FIG. 5A is a diagram when the volume of the blower chamber 36 is increased
  • FIG. 5B is a diagram when the volume of the blower chamber 36 is decreased.
  • the arrows in the figure indicate the flow of air.
  • the top plate 37 is concentric in the primary mode with the bending vibration of the piezoelectric actuator 41 (in this embodiment, the vibration phase is delayed by 180 °) due to the pressure fluctuation of the blower chamber 36 accompanying the bending vibration of the piezoelectric actuator 41. Bends and vibrates.
  • the air flow discharged from the blower chamber 36 is discharged from the discharge port 24 while drawing air outside the piezoelectric blower 100 through the suction port 53 and the air passage 31. Therefore, if the pressure applied to the discharge hole from the outside of the piezoelectric blower 100 is 0 (hereinafter referred to as no load), the flow rate of the air discharged from the discharge port 24 increases by the flow rate of the drawn air.
  • the central axis X passing through the center of the suction port 53 does not coincide with the central axis Y passing through the center of the piezoelectric element 40 (see FIG. 4). . Therefore, in the piezoelectric blower 100 of this embodiment, in the piezoelectric actuator 41, compared to the conventional micro blower 900 (see FIG. 12) in which the central axis passing through the center of the suction port coincides with the central axis passing through the center of the piezoelectric element. The ratio of the area of the suction port 53 facing the region with high vibration energy (that is, the region with a large displacement amount in the piezoelectric actuator 41) is reduced.
  • the center of the piezoelectric actuator 41 having the highest vibration energy faces the region other than the suction port 53 of the wall 43. ing.
  • the discharge flow rate per power consumption can be greatly increased, and the necessary discharge flow rate can be ensured with low power consumption.
  • FIG. 6 (A) and 6 (B) show the SS line of the piezoelectric blower 200 when the piezoelectric blower 200 according to the second embodiment of the present invention is operated at the third-order mode frequency (third harmonic wave).
  • FIG. 6A is a diagram when the volume of the blower chamber 36 is increased
  • FIG. 6B is a diagram when the volume of the blower chamber 36 is decreased.
  • FIG. 7 is a schematic cross-sectional view of the piezoelectric actuator 41 shown in FIG. In FIG. 7, the bending of the piezoelectric actuator 41 shown in FIG.
  • the difference between the piezoelectric blower 200 of the second embodiment and the piezoelectric blower 100 of the first embodiment is a cap 242.
  • Other configurations are the same.
  • the cap 242 has a circular shape in a region outside the portion facing the vibration node F having the shortest distance from the center of the piezoelectric actuator 41 among the vibration nodes formed by the bending vibration of the piezoelectric actuator 41.
  • a plate-shaped suction port 253 is formed. The central axis X passing through the center of the suction port 253 and the central axis Y passing through the center of the piezoelectric element 40 do not match. The other points are the same as the cap 42.
  • the piezoelectric actuator 41 when an AC driving voltage having a third-order mode frequency (third harmonic wave) is applied from the external terminals 63 and 72 to the piezoelectric element 40, the piezoelectric actuator 41 has one node. B and vibrate in a concentric manner in a third-order mode that produces F and two antinodes.
  • a third-order mode frequency third harmonic wave
  • the top plate 37 is also in the third-order mode according to the bending vibration of the piezoelectric actuator 41 (in this embodiment, the vibration phase is delayed by 180 °) due to the pressure fluctuation of the blower chamber 36 accompanying the bending vibration of the piezoelectric actuator 41. Bend and vibrate concentrically.
  • the air flow discharged from the blower chamber 36 is discharged from the discharge port 24 while drawing air outside the piezoelectric blower 200 through the suction port 253 and the air passage 31. Therefore, if the pressure applied to the discharge hole from the outside of the piezoelectric blower 200 is unloaded, the flow rate of air discharged from the discharge port 24 increases by the flow rate of drawn air.
  • the central axis X passing through the center of the suction port 253 and the central axis Y passing through the center of the piezoelectric element 40 do not coincide (FIGS. 6A and 6B). )reference). Therefore, also in the piezoelectric blower 200 of this embodiment, compared with the conventional micro blower 900 (see FIG. 12) in which the central axis passing through the center of the suction port and the central axis passing through the center of the piezoelectric element coincide, The ratio of the area of the suction port 253 facing the region with high vibration energy (that is, the region with a large displacement amount in the piezoelectric actuator 41) is decreased.
  • a high vibration region that is, vibration energy of the wall portion 243 inside the vibration node F of the piezoelectric actuator 41.
  • the suction port 253 is not formed in a region facing the high region.
  • the center of the piezoelectric actuator 41 having the highest vibration energy faces the region other than the suction port 253 of the wall portion 243. ing.
  • the piezoelectric blower 200 of the second embodiment the same effect as that of the piezoelectric blower 200 of the first embodiment can be obtained.
  • FIG. 8 shows the distance of the central axis of the suction port 253 relative to the central axis of the piezoelectric element 40 and the pump characteristics (discharge pressure and discharge flow rate) of the piezoelectric blower 200 in the piezoelectric blower 200 shown in FIGS. It is a figure which shows the relationship.
  • FIG. 8 shows the result of measuring the discharge pressure and the discharge flow rate of the piezoelectric blower 200 by changing the distance from the center axis Y of the piezoelectric element 40 to the center axis X of the suction port 253.
  • the fact that the distance from the central axis Y of the piezoelectric element 40 to the central axis X of the suction port 253 is 0 means that the central axis X of the suction port 253 and the piezoelectric element shown in FIGS. It means that the central axis Y of 40 coincides.
  • the central axis Y of the piezoelectric element 40 is compared with the discharge pressure and discharge flow rate of the piezoelectric blower 200 in which the distance from the central axis Y of the piezoelectric element 40 to the central axis X of the suction port 253 is zero. It became clear that the discharge pressure and the discharge flow rate of the piezoelectric blower 200 that increased the distance from the suction port 253 to the central axis X of the suction port 253 increased.
  • the discharge pressure and the discharge flow rate of the piezoelectric blower 200 in which the distance from the central axis Y of the piezoelectric element 40 to the central axis X of the suction port 253 is set to 100%
  • the suction port from the central axis Y of the piezoelectric element 40 is set. It was revealed that the discharge pressure of the piezoelectric blower 200 with the distance to the central axis X of 253 being 4 mm increased to 155% and the discharge flow rate also increased to 125%.
  • the reason for the above results is that in the piezoelectric blower 200 in which the central axis X of the suction port 253 and the central axis Y of the piezoelectric element 40 do not coincide with each other, the central axis of the suction port and the central axis of the piezoelectric element are This is considered to be because the ratio of the area of the suction port 253 facing the region with high vibration energy in the piezoelectric actuator 41 (that is, the region with a large displacement amount in the piezoelectric actuator 41) is reduced compared to the corresponding conventional piezoelectric blower. .
  • FIG. 9 is an external perspective view of the piezoelectric blower 300 according to the third embodiment of the present invention.
  • FIG. 10 is a cross-sectional view taken along line TT of the piezoelectric blower 300 shown in FIG.
  • the differences between the piezoelectric blower 300 of the third embodiment and the piezoelectric blower 100 of the first embodiment are a cap 342, a discharge side case 301, and a suction side case 302. Other configurations are the same.
  • the piezoelectric blower 300 includes a main body 310, a discharge side case 301, and a suction side case 302.
  • the main body 310 is a laminated body including the housing 17, the top plate 37, the side plate 38, the vibration plate 39, the piezoelectric element 40, and the cap 342.
  • the cap 342 is formed with a disk-shaped first suction port 353 and a first wall portion 343 whose center axis coincides with the center axis Y passing through the center of the piezoelectric element 40.
  • the diameter of the first suction port 353 is 11 mm, and the area of the opening surface of the first suction port 353 is 95 mm 2 .
  • the ratio (area ratio) of the area of the opening surface of the first suction port 353 to the area of the main surface on the first wall 343 side of the piezoelectric element 40 is 0.63. The other points are the same as the cap 42.
  • the diameter of the piezoelectric element 40 is 13.8 mm, and the area of the main surface on the wall 43 side of the piezoelectric element 40 is 150 mm 2 .
  • the discharge-side case 301 has a nozzle 305 formed with a cylindrical second discharge port 306 for discharging air at the center.
  • the nozzle 305 surrounds the nozzle 18, and the second discharge port 306 communicates with the first discharge port 24.
  • the discharge side case 301 is made of, for example, acrylic resin.
  • the suction side case 302 has a nozzle 307 formed around a cylindrical second suction port 308 for sucking air and a second wall portion 303 facing the piezoelectric actuator 41.
  • the central axis X of the second suction port 308 formed in the second wall portion 303 of the suction side case 302 and the central axis Y of the piezoelectric element 40 coincide with each other. Absent.
  • the suction side case 302 is made of acrylic resin, for example.
  • the diameter of the second suction port 308 is preferably less than or equal to 1 ⁇ 2 of the diameter of the piezoelectric element 40, and in this embodiment is 5 mm.
  • the area of the opening surface of the second suction port 308 is 19.6 mm 2 .
  • the ratio of the area of the opening surface of the second suction port 308 to the area of the main surface of the piezoelectric element 40 on the first wall 343 side is 0.13.
  • the distance between the central axis X of the second suction port 308 and the central axis Y of the piezoelectric element 40 is 4 mm.
  • the discharge-side case 301 and the suction-side case 302 are joined to each other so as to be detachable and house the main body 310. As shown in FIG. 10, a ventilation path is formed between the joined body of the top plate 37, the side plate 38 and the piezoelectric actuator 41 and the joined body of the casing 17, the cap 342, the discharge side case 301 and the suction side case 302. 331 is formed.
  • the joined body of the top plate 37 and the side plate 38 corresponds to the “first housing” of the present invention
  • the joined body of the housing 17 and the cap 342 corresponds to the “second housing” of the present invention.
  • the second wall portion 303 corresponds to the “wall portion” of the present invention.
  • FIGS. 11A and 11B are cross-sectional views taken along line TT of the piezoelectric blower 300 when the piezoelectric blower 300 shown in FIG. 9 is operated at the primary mode frequency (fundamental wave).
  • 11A is a diagram when the volume of the blower chamber 36 is increased
  • FIG. 11B is a diagram when the volume of the blower chamber 36 is decreased.
  • the air flow discharged from the blower chamber 36 is discharged from the second discharge port 306 while drawing air outside the piezoelectric blower 300 through the second suction port 308 and the air passage 331. Therefore, if the pressure applied to the discharge hole from the outside of the piezoelectric blower 300 is unloaded, the flow rate of the air discharged from the second discharge port 306 increases by the flow rate of the drawn air.
  • the central axis X passing through the center of the second suction port 308 of the suction side case 302 does not coincide with the central axis Y passing through the center of the piezoelectric element 40.
  • the region of higher vibration energy in the piezoelectric actuator 41 (see FIG. 12) compared to the conventional micro blower 900 (see FIG. 12) in which the central axis of the suction port and the central axis of the piezoelectric element coincide. That is, the ratio of the area of the suction port facing the region where the displacement amount in the piezoelectric actuator 41 is large) is reduced.
  • the center of the piezoelectric actuator 41 having the highest vibration energy faces the second wall portion 303.
  • the piezoelectric blower 300 of the third embodiment the same effect as that of the piezoelectric blower 100 of the first embodiment can be obtained.
  • the relationship between the distance from the central axis Y of the piezoelectric element 40 to the central axis X of the second suction port 308 and the pump characteristics of the piezoelectric blower 300 is described in the second embodiment.
  • the same measurement result (see FIG. 8) as that of the piezoelectric blower 200 of the embodiment is obtained.
  • the piezoelectric blower 300 of the third embodiment by adjusting the shape of the second wall portion 303 of the suction side case 302 attached to the main body 310, the configuration other than the second wall portion 303 (the main body 310 and the like). ) Can be changed without changing the distance from the central axis Y of the piezoelectric element 40 to the central axis X of the second suction port 308. That is, by adjusting the shape of the second wall portion 303, the discharge pressure and the discharge flow rate can be adjusted without changing the configuration other than the second wall portion 303 (main body 310, etc.).
  • the discharge side case 301 and the suction side case 302 having any shape can be selected without changing the pump characteristics of the main body 310, the versatility of the piezoelectric blower 300 is enhanced.
  • air is used as the fluid, but the present invention is not limited to this. It can be applied even if the fluid is a gas other than air.
  • the piezoelectric element 40 is provided as a blower drive source, but the present invention is not limited to this.
  • it may be configured as a blower that performs pumping by electromagnetic driving.
  • the piezoelectric element 40 is made of a lead zirconate titanate ceramic, but is not limited thereto.
  • a unimorph type piezoelectric vibrator is used, but the present invention is not limited to this.
  • a bimorph type piezoelectric vibrator in which the piezoelectric elements 40 are attached to both surfaces of the vibration plate 39 may be used.
  • the disk-shaped piezoelectric element 40, the disk-shaped diaphragm 39, and the disk-shaped top plate 37 are used, but the present invention is not limited to this.
  • these shapes may be rectangular or polygonal.
  • the vibration plate of the piezoelectric blower is bent and vibrated at the frequency of the primary mode and the tertiary mode.
  • the present invention is not limited to this.
  • the diaphragm may be bent and vibrated in an odd-order vibration mode that is a third-order mode or more that forms a plurality of vibration antinodes.
  • the top plate 37 bends and vibrates concentrically with the bending vibration of the diaphragm 39.
  • the present invention is not limited to this. At the time of implementation, only the diaphragm 39 is flexibly vibrated, and the top plate 37 may not be flexibly vibrated with the flexural vibration of the diaphragm 39.

Abstract

A piezoelectric blower (100) is provided with a housing (17), a top panel (37), a side panel (38), a diaphragm (39), a piezoelectric element (40), and a cap (42). The top panel (37), the side panel (38), and the diaphragm (39) constitute a blower chamber (36). A ventilation hole (45) is provided in the top panel (37). The diaphragm (39) and the piezoelectric element (40) constitute a piezoelectric actuator (41). Wall sections (43) and a disc-shaped suction port (53), which face the piezoelectric actuator (41), are formed in the cap (42). Herein, a central axis (X) of the suction port (53), which extends in the thickness direction of the wall section (43), and a central axis (Y) of the piezoelectric element (40), which extends in the thickness direction of the wall section (43), do not coincide. A ventilation path (31) is formed between the housing (17) and cap (42) and a junction for the top panel (37), the side panel (38) and the piezoelectric actuator (41).

Description

ブロアBlower
　本発明は、気体の輸送を行うブロアに関するものである。 The present invention relates to a blower that transports gas.
　特許文献１には、携帯型電子機器の内部で発生する熱を冷却するため、あるいは燃料電池で発電するのに必要な酸素を供給するためのマイクロブロアが開示されている。 Patent Document 1 discloses a microblower for cooling the heat generated inside a portable electronic device or supplying oxygen necessary for power generation by a fuel cell.
　図１２は、特許文献１に係るマイクロブロア９００の断面図である。マイクロブロア９００は、内ケース２と、弾性金属板５Ａと、圧電素子５Ｂと、内ケース２の外側を覆う外ケース３と、蓋部材９と、を備えている。内ケース２は複数個の連結部４によって外ケース３に対して弾性的に支持されている。 FIG. 12 is a cross-sectional view of a micro blower 900 according to Patent Document 1. The micro blower 900 includes an inner case 2, an elastic metal plate 5 </ b> A, a piezoelectric element 5 </ b> B, an outer case 3 that covers the outer side of the inner case 2, and a lid member 9. The inner case 2 is elastically supported with respect to the outer case 3 by a plurality of connecting portions 4.
　内ケース２は下方が開口した断面コの字形状であり、開口を閉じるように、弾性金属板５Ａが接合されている。これにより、内ケース２は、弾性金属板５Ａとともにブロア室６を構成している。そして、内ケース２には、ブロア室６の内部と外部を連通する開口部８が形成されている。また、弾性金属板５Ａのブロア室６とは逆側の主面には、圧電素子５Ｂが貼付されている。 The inner case 2 has a U-shaped cross section with an opening at the bottom, and an elastic metal plate 5A is joined so as to close the opening. Thereby, the inner case 2 forms the blower chamber 6 together with the elastic metal plate 5A. The inner case 2 is formed with an opening 8 that communicates the inside and outside of the blower chamber 6. A piezoelectric element 5B is attached to the main surface of the elastic metal plate 5A opposite to the blower chamber 6.
　開口部８に対向する外ケース３の領域には、吐出口３Ａが形成されている。外ケース３は、内ケース２を収納するよう、蓋部材９を有している。蓋部材９の中央には、吸引口９Ａが形成されている。ここで、蓋部材９の厚み方向に延びる吸引口９Ａの中心を通る中心軸と、蓋部材９の厚み方向に延びる圧電素子５Ｂの中心を通る中心軸とは一致している。 A discharge port 3 </ b> A is formed in the region of the outer case 3 facing the opening 8. The outer case 3 has a lid member 9 so as to accommodate the inner case 2. A suction port 9 </ b> A is formed in the center of the lid member 9. Here, the central axis passing through the center of the suction port 9A extending in the thickness direction of the lid member 9 coincides with the central axis passing through the center of the piezoelectric element 5B extending in the thickness direction of the lid member 9.
　そして、内ケース２、弾性金属板５Ａ及び圧電素子５Ｂの接合体と外ケース３との間には、空気の流入通路７が形成されている。 An air inflow passage 7 is formed between the joined body of the inner case 2, the elastic metal plate 5A and the piezoelectric element 5B and the outer case 3.
　以上の構成において、交流駆動電圧が圧電素子５Ｂに印加されると、圧電素子５Ｂが伸縮し、圧電素子５Ｂの伸縮により弾性金属板５Ａが屈曲振動する。そして、弾性金属板５Ａの屈曲変形によりブロア室６の体積が周期的に変化する。 In the above configuration, when an AC drive voltage is applied to the piezoelectric element 5B, the piezoelectric element 5B expands and contracts, and the elastic metal plate 5A bends and vibrates due to the expansion and contraction of the piezoelectric element 5B. And the volume of the blower chamber 6 changes periodically by the bending deformation of the elastic metal plate 5A.
　詳述すると、交流駆動電圧が圧電素子５Ｂに印加されて弾性金属板５Ａが圧電素子５Ｂ側へ屈曲すると、ブロア室６の容積が増大する。これに伴い、マイクロブロア９００の外部の空気が吸引口９Ａ、流入通路７、及び開口部８を介してブロア室６内に吸引される。このとき、ブロア室６からの空気の流出は無いものの、吐出口３Ａからマイクロブロア９００の外部への空気の流れの慣性力が働いている。 More specifically, when an AC drive voltage is applied to the piezoelectric element 5B and the elastic metal plate 5A is bent toward the piezoelectric element 5B, the volume of the blower chamber 6 increases. Accordingly, air outside the micro blower 900 is sucked into the blower chamber 6 through the suction port 9 </ b> A, the inflow passage 7, and the opening 8. At this time, although there is no outflow of air from the blower chamber 6, the inertial force of the air flow from the discharge port 3A to the outside of the micro blower 900 is working.
　次に、交流駆動電圧が圧電素子５Ｂに印加されて弾性金属板５Ａがブロア室６側へ屈曲すると、ブロア室６の容積が減少する。これに伴い、ブロア室６内の空気が開口部８、流入通路７を介して吐出口３Ａから吐出される。 Next, when an AC drive voltage is applied to the piezoelectric element 5B and the elastic metal plate 5A is bent toward the blower chamber 6, the volume of the blower chamber 6 decreases. Accordingly, the air in the blower chamber 6 is discharged from the discharge port 3 </ b> A via the opening 8 and the inflow passage 7.
　このとき、ブロア室６から吐出される気流は，マイクロブロア９００の外部の空気を吸引口９Ａ及び流入通路７を介して引き込みながら吐出口３Ａから吐出される。そのため、吐出口３Ａから吐出される空気の流量は、引き込まれる空気の流量分増大する。 At this time, the air flow discharged from the blower chamber 6 is discharged from the discharge port 3A while drawing air outside the micro blower 900 through the suction port 9A and the inflow passage 7. Therefore, the flow rate of the air discharged from the discharge port 3A increases by the flow rate of the drawn air.
　以上により、マイクロブロア９００では、消費電力あたりの吐出流量を増大させている。 As described above, in the micro blower 900, the discharge flow rate per power consumption is increased.
特開２０１１－２７０７９号公報JP 2011-27079 A
　しかしながら、本願の発明者は、前記特許文献１のマイクロブロア９００において、弾性金属板５Ａが圧電素子５Ｂ側へ屈曲する時、吸引口９Ａからマイクロブロア９００の外部へ漏れる気流ＢＦが生じているという知見を得た。 However, when the elastic metal plate 5A is bent toward the piezoelectric element 5B in the micro blower 900 of Patent Document 1, the inventor of the present application says that an air flow BF leaking from the suction port 9A to the outside of the micro blower 900 is generated. Obtained knowledge.
　すなわち、この気流ＢＦによりマイクロブロア９００の外部へ漏れる空気の流量分、流入通路７に引き込まれる空気の流量が減少するため、吐出口３Ａから吐出される吐出流量が減少してしまうことが分かった。 That is, it was found that the flow rate of the air drawn into the inflow passage 7 is reduced by the amount of air leaking to the outside of the micro blower 900 due to the air flow BF, so that the discharge flow rate discharged from the discharge port 3A is reduced. .
　一方、近年、前述の図１２に示すような構造のマイクロブロアを搭載する電子機器には、低消費電力化の傾向がある。そのため、低消費電力で吐出流量の多いマイクロブロアが求められている。 On the other hand, in recent years, electronic devices equipped with the micro-blower having the structure shown in FIG. Therefore, there is a demand for a micro blower with low power consumption and a large discharge flow rate.
　そこで本発明は、消費電力あたりの吐出流量を大幅に増大させ、低消費電力でありながら必要な吐出流量を確保できるブロアを提供することを目的とする。 Therefore, an object of the present invention is to provide a blower that can greatly increase the discharge flow rate per power consumption and can secure a necessary discharge flow rate with low power consumption.
　本発明のブロアは、前記課題を解決するために以下の構成を備えている。 The blower of the present invention has the following configuration in order to solve the above problems.
（１）駆動体を有し、前記駆動体への電圧の印加により同心円状に屈曲振動するアクチュエータと、
　前記アクチュエータとともにブロア室を構成し、前記ブロア室の内部と外部とを連通させる通気孔を有する第１筐体と、
　吸引口が形成され、前記アクチュエータに対向する壁部と、
　前記壁部とともに前記アクチュエータ及び前記第１筐体を、間隔を設けて被覆して前記アクチュエータ及び前記第１筐体との間に通気路を形成する第２筐体と、を備え、
　前記通気孔に対向する前記第２筐体の箇所には、吐出口が形成され、
　前記吸引口の中心軸と前記駆動体の中心軸とは、一致していない。 (1) an actuator having a driving body and bending and oscillating concentrically by applying a voltage to the driving body;
A first housing that forms a blower chamber together with the actuator, and has a vent hole that communicates the inside and the outside of the blower chamber;
A suction port is formed, and a wall portion facing the actuator;
A second housing that covers the actuator and the first housing together with the wall to form a ventilation path between the actuator and the first housing by covering the actuator and the first housing;
A discharge port is formed at a location of the second casing facing the vent hole,
The central axis of the suction port does not coincide with the central axis of the driving body.
　この構成では、駆動電圧が駆動体に印加されると、駆動体によりアクチュエータが同心円状に屈曲振動する。そして、このアクチュエータの変形によりブロア室の体積が周期的に変化し、ブロア室の気体が通気孔から流出する。そして、ブロア室から通気孔を介して流出する気流が、通気路を介してブロアの外部に存在する気体を引き込みながら吐出口から吐出される。これにより、ブロアの吐出流量が引き込まれる気体の流量分増大する。 In this configuration, when a driving voltage is applied to the driving body, the driving body causes the actuator to bend and vibrate concentrically. The volume of the blower chamber periodically changes due to the deformation of the actuator, and the gas in the blower chamber flows out from the vent hole. Then, the airflow flowing out from the blower chamber through the vent hole is discharged from the discharge port while drawing the gas existing outside the blower through the vent passage. Thereby, the discharge flow rate of the blower is increased by the flow rate of the drawn gas.
　この構成では、吸引口の中心を通る吸引口の中心軸と、駆動体の中心を通る駆動体の中心軸とが、一致していない。このため、吸引口の中心軸と駆動体の中心軸とが一致する従来のブロアに比べて、アクチュエータにおける振動エネルギーの高い領域（即ち、アクチュエータにおける変位量の大きい領域）に対向する吸引口の面積の割合が減少する。すなわち、アクチュエータが屈曲振動をしているとき、通気路から吸引口を介してブロアの外部へ漏れる気体の流量が減少し、壁部に衝突する気体の流量が増加する。 In this configuration, the central axis of the suction port passing through the center of the suction port does not match the central axis of the drive body passing through the center of the drive body. For this reason, compared with the conventional blower in which the central axis of the suction port and the central axis of the driving body coincide with each other, the area of the suction port facing the region where the vibration energy is high in the actuator (that is, the region where the displacement amount is large in the actuator). The percentage of decrease. That is, when the actuator is in bending vibration, the flow rate of the gas leaking from the ventilation path to the outside of the blower through the suction port decreases, and the flow rate of the gas colliding with the wall portion increases.
　なお、壁部に衝突して分散する気流は通気路内に残留する。このため、アクチュエータが屈曲振動をしているとき、ブロア室から通気孔を介して流出する気流に引き込まれる気体の流量が増加する。すなわち、吐出口から吐出される吐出流量が増加する。 Note that the airflow that collides with the wall and disperses remains in the air passage. For this reason, when the actuator is in bending vibration, the flow rate of the gas drawn into the airflow flowing out from the blower chamber through the vent hole increases. That is, the discharge flow rate discharged from the discharge port increases.
　したがって、この構成によれば、消費電力あたりの吐出流量を大幅に増大させ、低消費電力でありながら必要な吐出流量を確保できる。 Therefore, according to this configuration, the discharge flow rate per power consumption can be greatly increased, and the necessary discharge flow rate can be ensured with low power consumption.
（２）前記駆動体の中心は、前記壁部の前記吸引口以外の領域と対向していることが好ましい。 (2) It is preferable that the center of the driving body is opposed to a region other than the suction port of the wall portion.
　この構成では、振動エネルギーの最も高いアクチュエータの中心（即ち、変位量の最も大きいアクチュエータの中心）が、壁部の吸引口以外の領域に対向する。そのため、アクチュエータが屈曲振動をしているとき、通気路から吸引口を介してブロアの外部へ漏れる気体の流量がより減少し、壁部に衝突する気体の流量がより増加する。 In this configuration, the center of the actuator having the highest vibration energy (that is, the center of the actuator having the largest amount of displacement) faces the region other than the suction port of the wall portion. Therefore, when the actuator is bending and vibrating, the flow rate of the gas leaking from the air passage through the suction port to the outside of the blower is further reduced, and the flow rate of the gas colliding with the wall portion is further increased.
　この結果、アクチュエータが屈曲振動をしているとき、ブロア室から通気孔を介して流出する気流に引き込まれる気体の流量がより増加し、吐出口から吐出される吐出流量がより増加する。 As a result, when the actuator is in bending vibration, the flow rate of the gas drawn into the airflow flowing out from the blower chamber through the vent hole is further increased, and the discharge flow rate discharged from the discharge port is further increased.
（３）前記吸引口の直径は、前記駆動体の直径の１／２以下であることが好ましい。 (3) It is preferable that the diameter of the suction port is ½ or less of the diameter of the driving body.
　この構成では、より効果的に消費電力あたりの吐出流量を大幅に増大させ、低消費電力でありながら必要な吐出流量を確保できる。 In this configuration, the discharge flow rate per power consumption can be significantly increased more effectively, and the required discharge flow rate can be secured while maintaining low power consumption.
（４）前記アクチュエータは、前記駆動体により、複数の振動の腹を形成する３次モード以上の奇数次の振動モードで屈曲振動し、
　前記吸引口は、前記アクチュエータの屈曲振動により形成される振動の節のうち、前記アクチュエータの中心から最も距離が短い振動の節に対向する前記壁部の箇所より外側の領域に形成されていることが好ましい。 (4) The actuator bends and vibrates in an odd-order vibration mode equal to or higher than a third-order mode that forms a plurality of vibration antinodes by the driving body,
The suction port is formed in a region outside the wall portion facing the vibration node having the shortest distance from the center of the actuator among the vibration nodes formed by the bending vibration of the actuator. Is preferred.
　この構成では、壁部が、アクチュエータにおける振動エネルギーの高い領域の全てに対向する。そのため、前述の振動モードでアクチュエータが屈曲振動をした場合、通気路から吸引口を介してブロアの外部へ漏れる気体の流量がより減少し、壁部に衝突する気体の流量がより増加する。 In this configuration, the wall portion faces all of the high vibration energy region in the actuator. Therefore, when the actuator bends and vibrates in the vibration mode described above, the flow rate of the gas leaking from the air passage through the suction port to the outside of the blower is further reduced, and the flow rate of the gas colliding with the wall portion is further increased.
　この結果、前述の振動モードでアクチュエータが屈曲振動をした場合、ブロア室から通気孔を介して流出する気流に引き込まれる気体の流量がより増加し、吐出口から吐出される吐出流量がより増加する。 As a result, when the actuator bends and vibrates in the vibration mode described above, the flow rate of the gas drawn into the airflow flowing out from the blower chamber through the vent hole is further increased, and the discharge flow rate discharged from the discharge port is further increased. .
（５）前記吸引口が形成されている前記壁部は、前記第２筺体に対して着脱自在に取り付けられていることが好ましい。 (5) It is preferable that the said wall part in which the said suction port is formed is detachably attached with respect to the said 2nd housing.
　この構成では、第２筺体に装着する壁部の形状を調整することによって、壁部以外の構成を変更せずに、吐出圧力および吐出流量を調整することができる。 In this configuration, the discharge pressure and the discharge flow rate can be adjusted without changing the configuration other than the wall portion by adjusting the shape of the wall portion attached to the second casing.
　この発明によれば、消費電力あたりの吐出流量を大幅に増大させ、低消費電力でありながら必要な吐出流量を確保できる。 According to the present invention, the discharge flow rate per power consumption can be greatly increased, and the necessary discharge flow rate can be ensured with low power consumption.
本発明の第１実施形態に係る圧電ブロア１００の外観斜視図である。1 is an external perspective view of a piezoelectric blower 100 according to a first embodiment of the present invention. 図１に示す圧電ブロア１００の分解斜視図である。It is a disassembled perspective view of the piezoelectric blower 100 shown in FIG. 図１に示す圧電ブロア１００の底面図である。It is a bottom view of the piezoelectric blower 100 shown in FIG. 図１に示す圧電ブロア１００のＳ－Ｓ線の断面図である。FIG. 2 is a sectional view taken along line SS of the piezoelectric blower 100 shown in FIG. 図５（Ａ）（Ｂ）は、図１に示す圧電ブロア１００を１次モードの周波数（基本波）で動作させた場合における圧電ブロア１００のＳ－Ｓ線の断面図である。図５（Ａ）は、ブロア室３６の容積が増大したときの図であり、図５（Ｂ）は、ブロア室３６の容積が減少したときの図である。5A and 5B are cross-sectional views taken along the line SS of the piezoelectric blower 100 when the piezoelectric blower 100 shown in FIG. 1 is operated at the frequency (fundamental wave) of the primary mode. FIG. 5A is a diagram when the volume of the blower chamber 36 is increased, and FIG. 5B is a diagram when the volume of the blower chamber 36 is decreased. 図６（Ａ）（Ｂ）は、本発明の第２実施形態に係る圧電ブロア２００を３次モードの周波数（基本波の３倍波）で動作させた場合における圧電ブロア２００のＳ－Ｓ線の断面図である。図６（Ａ）は、ブロア室３６の容積が増大したときの図であり、図６（Ｂ）は、ブロア室３６の容積が減少したときの図である。6 (A) and 6 (B) show the SS line of the piezoelectric blower 200 when the piezoelectric blower 200 according to the second embodiment of the present invention is operated at the third-order mode frequency (third harmonic wave). FIG. 6A is a diagram when the volume of the blower chamber 36 is increased, and FIG. 6B is a diagram when the volume of the blower chamber 36 is decreased. 図６（Ｂ）に示す圧電アクチュエータ４１の概略断面図である。It is a schematic sectional drawing of the piezoelectric actuator 41 shown to FIG. 6 (B). 図６（Ａ）（Ｂ）に示す圧電ブロア２００における、圧電素子４０の中心軸に対する吸引口２５３の中心軸の距離と、圧電ブロア２００のポンプ特性（吐出圧力および吐出流量）との関係を示す図である。6A and 6B shows the relationship between the distance of the central axis of the suction port 253 relative to the central axis of the piezoelectric element 40 and the pump characteristics (discharge pressure and discharge flow rate) of the piezoelectric blower 200 in the piezoelectric blower 200 shown in FIGS. FIG. 本発明の第３実施形態に係る圧電ブロア３００の外観斜視図である。It is an external appearance perspective view of the piezoelectric blower 300 which concerns on 3rd Embodiment of this invention. 図９に示す圧電ブロア３００のＴ－Ｔ線の断面図である。FIG. 10 is a cross-sectional view taken along line TT of the piezoelectric blower 300 shown in FIG. 9. 図１１（Ａ）（Ｂ）は、図９に示す圧電ブロア３００を１次モードの周波数（基本波）で動作させた場合における圧電ブロア３００のＴ－Ｔ線の断面図である。図１１（Ａ）は、ブロア室３６の容積が増大したときの図であり、図１１（Ｂ）は、ブロア室３６の容積が減少したときの図である。FIGS. 11A and 11B are cross-sectional views taken along the line TT of the piezoelectric blower 300 when the piezoelectric blower 300 shown in FIG. 9 is operated at a primary mode frequency (fundamental wave). 11A is a diagram when the volume of the blower chamber 36 is increased, and FIG. 11B is a diagram when the volume of the blower chamber 36 is decreased. 特許文献１に係るマイクロブロア９００の断面図である。It is sectional drawing of the micro blower 900 which concerns on patent document 1. FIG.
《本発明の第１実施形態》
　以下、本発明の第１実施形態に係る圧電ブロア１００について説明する。 << First Embodiment of the Invention >>
Hereinafter, the piezoelectric blower 100 according to the first embodiment of the present invention will be described.
　図１は、本発明の第１実施形態に係る圧電ブロア１００の外観斜視図である。図２は、図１に示す圧電ブロア１００の分解斜視図である。図３は、図１に示す圧電ブロア１００の底面図である。図４は、図１に示す圧電ブロア１００のＳ－Ｓ線の断面図である。 FIG. 1 is an external perspective view of the piezoelectric blower 100 according to the first embodiment of the present invention. FIG. 2 is an exploded perspective view of the piezoelectric blower 100 shown in FIG. FIG. 3 is a bottom view of the piezoelectric blower 100 shown in FIG. FIG. 4 is a cross-sectional view taken along line SS of the piezoelectric blower 100 shown in FIG.
　圧電ブロア１００は、上から順に、筐体１７、天板３７、側板３８、振動板３９、圧電素子４０、及びキャップ４２を備え、それらを順に積層した構造を有している。天板３７、側板３８、及び振動板３９は、ブロア室３６を構成している。圧電ブロア１００は、幅２０ｍｍ×長さ２０ｍｍ×ノズル１８以外の領域の高さ１．８５ｍｍの寸法となっている。 The piezoelectric blower 100 includes a housing 17, a top plate 37, a side plate 38, a vibration plate 39, a piezoelectric element 40, and a cap 42 in order from the top, and has a structure in which these are stacked in order. The top plate 37, the side plate 38, and the diaphragm 39 constitute a blower chamber 36. The piezoelectric blower 100 has dimensions of a width of 20 mm × a length of 20 mm × a height of 1.85 mm in a region other than the nozzle 18.
　なお、この実施形態では、天板３７及び側板３８の接合体が本発明の「第１筐体」に相当し、筐体１７が本発明の「第２筐体」に相当する。また、圧電素子４０が本発明の「駆動体」に相当する。 In this embodiment, the joined body of the top plate 37 and the side plate 38 corresponds to the “first casing” of the present invention, and the casing 17 corresponds to the “second casing” of the present invention. The piezoelectric element 40 corresponds to the “driving body” of the present invention.
　筐体１７は、空気が吐出される吐出口２４が中心に形成されたノズル１８を有する。このノズル１８は、外形の直径２．０ｍｍ×内形（即ち吐出口２４）の直径０．８ｍｍ×高さ１．６ｍｍの寸法となっている。筐体１７の四角には、ネジ穴５６Ａ～５６Ｄが形成されている。 The housing 17 has a nozzle 18 formed around a discharge port 24 through which air is discharged. The nozzle 18 has a size of an outer diameter of 2.0 mm × an inner shape (that is, a discharge port 24) of a diameter of 0.8 mm × a height of 1.6 mm. Screw holes 56A to 56D are formed in the square of the housing 17.
　筐体１７は、下方が開口した断面コ字状に形成されており、筐体１７は、ブロア室３６の天板３７、ブロア室３６の側板３８、振動板３９及び圧電素子４０を収納する。筐体１７は、例えば樹脂から構成されている。 The housing 17 is formed in a U-shaped cross-section with an opening at the bottom, and the housing 17 houses the top plate 37 of the blower chamber 36, the side plate 38 of the blower chamber 36, the vibration plate 39, and the piezoelectric element 40. The housing 17 is made of, for example, resin.
　ブロア室３６の天板３７は、円板状であり、例えば金属から構成されている。天板３７には、中央部６１と、中央部６１から水平方向に突出し、筐体１７の内壁に当接する鍵状の突出部６２と、外部回路に接続するための外部端子６３とが形成されている。 The top plate 37 of the blower chamber 36 has a disk shape and is made of, for example, metal. The top plate 37 is formed with a central portion 61, a key-like protruding portion 62 that protrudes horizontally from the central portion 61 and contacts the inner wall of the housing 17, and an external terminal 63 for connecting to an external circuit. ing.
　また、天板３７の中央部６１には、ブロア室３６の内部と外部とを連通させる通気孔４５が設けられている。この通気孔４５は、筐体１７の吐出口２４と対向する位置に形成されている。天板３７は、側板３８の上面に接合する。 Further, the central portion 61 of the top plate 37 is provided with a vent hole 45 that allows the inside and outside of the blower chamber 36 to communicate with each other. The vent hole 45 is formed at a position facing the discharge port 24 of the housing 17. The top plate 37 is joined to the upper surface of the side plate 38.
　ブロア室３６の側板３８は、円環状であり、例えば金属から構成されている。側板３８は、振動板３９の上面に接合する。そのため、側板３８の厚みは、ブロア室３６の高さとなる。 The side plate 38 of the blower chamber 36 has an annular shape, and is made of, for example, metal. The side plate 38 is joined to the upper surface of the diaphragm 39. Therefore, the thickness of the side plate 38 is the height of the blower chamber 36.
　振動板３９は、円板状であり、例えば金属から構成されている。振動板３９は、ブロア室３６の底面を構成する。 The diaphragm 39 has a disk shape and is made of, for example, metal. The diaphragm 39 constitutes the bottom surface of the blower chamber 36.
　圧電素子４０は、円板形状であり、例えばチタン酸ジルコン酸鉛系セラミックスから構成されている。圧電素子４０の直径は、１３．８ｍｍであり、圧電素子４０の壁部４３側の主面の面積は、１５０ｍｍ２である。圧電素子４０は、振動板３９のブロア室３６とは逆側の主面に接合されており、印加された交流電圧に応じて伸縮する。圧電素子４０及び振動板３９の接合体は、圧電アクチュエータ４１を構成する。 The piezoelectric element 40 has a disk shape, and is made of, for example, lead zirconate titanate ceramic. The diameter of the piezoelectric element 40 is 13.8 mm, and the area of the main surface on the wall 43 side of the piezoelectric element 40 is 150 mm 2 . The piezoelectric element 40 is bonded to the main surface of the diaphragm 39 opposite to the blower chamber 36 and expands and contracts according to the applied AC voltage. The joined body of the piezoelectric element 40 and the diaphragm 39 constitutes a piezoelectric actuator 41.
　そして、天板３７、側板３８、振動板３９、及び圧電素子４０の接合体は、天板３７に設けられている４個の突出部６２によって筐体１７に対して弾性的に支持されている。 The joined body of the top plate 37, the side plate 38, the vibration plate 39, and the piezoelectric element 40 is elastically supported with respect to the housing 17 by the four protrusions 62 provided on the top plate 37. .
　電極導通用板７０は、圧電素子４０に接続するための内部端子７３と、外部回路に接続するための外部端子７２とで構成されている。内部端子７３の先端は圧電素子４０の平板面にはんだ付けされている。はんだ付け位置を圧電素子４０の屈曲振動の節に相当する位置とすることにより、内部端子７３の振動がより抑制できる。 The electrode conduction plate 70 includes an internal terminal 73 for connection to the piezoelectric element 40 and an external terminal 72 for connection to an external circuit. The tip of the internal terminal 73 is soldered to the flat surface of the piezoelectric element 40. By setting the soldering position to a position corresponding to the bending vibration node of the piezoelectric element 40, the vibration of the internal terminal 73 can be further suppressed.
　キャップ４２には、圧電アクチュエータ４１に対向する壁部４３と円板形状の吸引口５３とが形成されている。この実施形態において、壁部４３と圧電素子４０との間隔は０．３ｍｍであり、壁部４３の厚みは０．１ｍｍである。 The cap 42 is formed with a wall 43 facing the piezoelectric actuator 41 and a disk-shaped suction port 53. In this embodiment, the space | interval of the wall part 43 and the piezoelectric element 40 is 0.3 mm, and the thickness of the wall part 43 is 0.1 mm.
　また、吸引口５３の直径は、圧電素子４０の直径の１／２以下であることが好ましく、この実施形態では５ｍｍである。吸引口５３の開口面の面積は、１９．６ｍｍ２である。また、圧電素子４０の壁部４３側の主面の面積に対する吸引口５３の開口面の面積の割合（面積比）は、約０．１３である。 Moreover, it is preferable that the diameter of the suction port 53 is 1/2 or less of the diameter of the piezoelectric element 40, and is 5 mm in this embodiment. The area of the opening surface of the suction port 53 is 19.6 mm 2 . The ratio (area ratio) of the area of the opening surface of the suction port 53 to the area of the main surface on the wall 43 side of the piezoelectric element 40 is about 0.13.
　そして、図４に示すように、壁部４３の厚み方向に延びる吸引口５３の中心を通る中心軸Ｘと、壁部４３の厚み方向に延びる圧電素子４０の中心を通る中心軸Ｙとは、一致していない。また、キャップ４２には、筐体１７のネジ穴５６Ａ～５６Ｄに対応する位置に切欠き５５Ａ～５５Ｄが形成されている。 As shown in FIG. 4, the central axis X passing through the center of the suction port 53 extending in the thickness direction of the wall 43 and the central axis Y passing through the center of the piezoelectric element 40 extending in the thickness direction of the wall 43 are: Does not match. The cap 42 has notches 55A to 55D formed at positions corresponding to the screw holes 56A to 56D of the housing 17.
　また、キャップ４２は、外周縁に、天板３７側へ突出する突出部５２を有する。キャップ４２は、突出部５２で筐体１７を挟持することで、筐体１７とともに、ブロア室３６の天板３７、ブロア室３６の側板３８、振動板３９及び圧電素子４０を収納する。キャップ４２は、例えばガラスエポキシ樹脂から構成されている。 The cap 42 has a protruding portion 52 that protrudes toward the top plate 37 on the outer peripheral edge. The cap 42 holds the casing 17 with the protruding portion 52, and stores the top plate 37 of the blower chamber 36, the side plate 38 of the blower chamber 36, the vibration plate 39, and the piezoelectric element 40 together with the casing 17. The cap 42 is made of, for example, a glass epoxy resin.
　そして、図４に示すように、天板３７、側板３８及び圧電アクチュエータ４１の接合体と筐体１７及びキャップ４２との間には通気路３１が形成されている。 As shown in FIG. 4, an air passage 31 is formed between the joined body of the top plate 37, the side plate 38, and the piezoelectric actuator 41 and the housing 17 and the cap 42.
　以下、圧電ブロア１００が動作しているときにおける空気の流れについて説明する。 Hereinafter, the flow of air when the piezoelectric blower 100 is operating will be described.
　図５（Ａ）（Ｂ）は、図１に示す圧電ブロア１００を１次モードの周波数（以下、基本波）で動作させた場合における圧電ブロア１００のＳ－Ｓ線の断面図である。図５（Ａ）は、ブロア室３６の容積が増大したときの図であり、図５（Ｂ）は、ブロア室３６の容積が減少したときの図である。ここで、図中の矢印は、空気の流れを示している。 5A and 5B are cross-sectional views of the SS line of the piezoelectric blower 100 when the piezoelectric blower 100 shown in FIG. 1 is operated at a primary mode frequency (hereinafter, fundamental wave). FIG. 5A is a diagram when the volume of the blower chamber 36 is increased, and FIG. 5B is a diagram when the volume of the blower chamber 36 is decreased. Here, the arrows in the figure indicate the flow of air.
　図４に示す状態において、１次モードの周波数（基本波）の交流駆動電圧が外部端子６３，７２から圧電素子４０に印加されると、圧電アクチュエータ４１は１次モードで同心円状に屈曲振動する。 In the state shown in FIG. 4, when an AC driving voltage having a primary mode frequency (fundamental wave) is applied to the piezoelectric element 40 from the external terminals 63 and 72, the piezoelectric actuator 41 bends and vibrates concentrically in the primary mode. .
　同時に、天板３７は、圧電アクチュエータ４１の屈曲振動に伴うブロア室３６の圧力変動により、圧電アクチュエータ４１の屈曲振動に伴って（この実施形態では振動位相が１８０°遅れて）１次モードで同心円状に屈曲振動する。 At the same time, the top plate 37 is concentric in the primary mode with the bending vibration of the piezoelectric actuator 41 (in this embodiment, the vibration phase is delayed by 180 °) due to the pressure fluctuation of the blower chamber 36 accompanying the bending vibration of the piezoelectric actuator 41. Bends and vibrates.
　これにより、図５（Ａ）（Ｂ）に示すように、振動板３９及び天板３７が屈曲変形してブロア室３６の体積が周期的に変化する。 Thereby, as shown in FIGS. 5A and 5B, the diaphragm 39 and the top plate 37 are bent and deformed, and the volume of the blower chamber 36 is periodically changed.
　図５（Ａ）に示すように、圧電素子４０に交流電圧を印加して振動板３９を圧電素子４０側へ屈曲させると、ブロア室３６の容積が増大する。これに伴い、圧電ブロア１００の外部の空気が吸引口５３、通気路３１、及び通気孔４５を介してブロア室３６内に吸引される。このとき、ブロア室３６からの空気の流出は無いものの、吐出口２４から圧電ブロア１００の外部への空気の流れの慣性力が働いている。 As shown in FIG. 5A, when an alternating voltage is applied to the piezoelectric element 40 and the diaphragm 39 is bent toward the piezoelectric element 40, the volume of the blower chamber 36 increases. Along with this, air outside the piezoelectric blower 100 is sucked into the blower chamber 36 through the suction port 53, the vent path 31, and the vent hole 45. At this time, although there is no outflow of air from the blower chamber 36, the inertial force of the air flow from the discharge port 24 to the outside of the piezoelectric blower 100 works.
　図５（Ｂ）に示すように、圧電素子４０に交流電圧を印加して振動板３９をブロア室３６側へ屈曲させると、ブロア室３６の容積が減少する。これに伴い、ブロア室３６内の空気が通気孔４５、通気路３１を介して吐出口２４から吐出される。 As shown in FIG. 5B, when an alternating voltage is applied to the piezoelectric element 40 and the diaphragm 39 is bent toward the blower chamber 36, the volume of the blower chamber 36 decreases. Accordingly, the air in the blower chamber 36 is discharged from the discharge port 24 through the vent hole 45 and the vent path 31.
　このとき、ブロア室３６から吐出される気流は，圧電ブロア１００の外部の空気を吸引口５３及び通気路３１を介して引き込みながら吐出口２４から吐出される。そのため、圧電ブロア１００の外部から吐出孔に付与される圧力を０（以下、無負荷）とすると、吐出口２４から吐出される空気の流量は、引き込まれる空気の流量分増大する。 At this time, the air flow discharged from the blower chamber 36 is discharged from the discharge port 24 while drawing air outside the piezoelectric blower 100 through the suction port 53 and the air passage 31. Therefore, if the pressure applied to the discharge hole from the outside of the piezoelectric blower 100 is 0 (hereinafter referred to as no load), the flow rate of the air discharged from the discharge port 24 increases by the flow rate of the drawn air.
　ここで、この実施形態の圧電ブロア１００では前述したように、吸引口５３の中心を通る中心軸Ｘと、圧電素子４０の中心を通る中心軸Ｙとは、一致していない（図４参照）。そのため、この実施形態の圧電ブロア１００では、吸引口の中心を通る中心軸と圧電素子の中心を通る中心軸とが一致する従来のマイクロブロア９００（図１２参照）に比べて、圧電アクチュエータ４１における振動エネルギーの高い領域（即ち、圧電アクチュエータ４１における変位量の大きい領域）に対向する吸引口５３の面積の割合が減少している。 Here, in the piezoelectric blower 100 of this embodiment, as described above, the central axis X passing through the center of the suction port 53 does not coincide with the central axis Y passing through the center of the piezoelectric element 40 (see FIG. 4). . Therefore, in the piezoelectric blower 100 of this embodiment, in the piezoelectric actuator 41, compared to the conventional micro blower 900 (see FIG. 12) in which the central axis passing through the center of the suction port coincides with the central axis passing through the center of the piezoelectric element. The ratio of the area of the suction port 53 facing the region with high vibration energy (that is, the region with a large displacement amount in the piezoelectric actuator 41) is reduced.
　特に、この実施形態の圧電ブロア１００では、振動エネルギーの最も高い圧電アクチュエータ４１の中心（即ち、変位量の最も大きい圧電アクチュエータ４１の中心）が、壁部４３の吸引口５３以外の領域に対向している。 In particular, in the piezoelectric blower 100 of this embodiment, the center of the piezoelectric actuator 41 having the highest vibration energy (that is, the center of the piezoelectric actuator 41 having the largest displacement amount) faces the region other than the suction port 53 of the wall 43. ing.
　そのため、圧電アクチュエータ４１が屈曲振動をしているとき、通気路３１から吸引口５３を介して圧電ブロア１００の外部へ漏れる空気の流量が減少し、壁部４３に衝突する空気の流量が増加する。 Therefore, when the piezoelectric actuator 41 is bending and vibrating, the flow rate of air leaking from the ventilation path 31 to the outside of the piezoelectric blower 100 via the suction port 53 is decreased, and the flow rate of air colliding with the wall 43 is increased. .
　この結果、図５（Ａ）に示すように壁部４３に衝突して分散する気流が通気路３１内に残留する。このため、ブロア室３６から通気孔４５を介して流出する気流に引き込まれる空気の流量が増加する。すなわち、吐出口２４から吐出される吐出流量が増加する。 As a result, as shown in FIG. 5A, the airflow that collides with the wall 43 and disperses remains in the air passage 31. For this reason, the flow rate of the air drawn into the airflow flowing out from the blower chamber 36 through the vent hole 45 increases. That is, the discharge flow rate discharged from the discharge port 24 increases.
　従って、この実施形態の圧電ブロア１００によれば、消費電力あたりの吐出流量を大幅に増大させ、低消費電力でありながら必要な吐出流量を確保できる。 Therefore, according to the piezoelectric blower 100 of this embodiment, the discharge flow rate per power consumption can be greatly increased, and the necessary discharge flow rate can be ensured with low power consumption.
《本発明の第２実施形態》
　以下、本発明の第２実施形態に係る圧電ブロア２００について説明する。 << Second Embodiment of the Invention >>
Hereinafter, a piezoelectric blower 200 according to a second embodiment of the present invention will be described.
　図６（Ａ）（Ｂ）は、本発明の第２実施形態に係る圧電ブロア２００を３次モードの周波数（基本波の３倍波）で動作させた場合における圧電ブロア２００のＳ－Ｓ線の断面図である。図６（Ａ）は、ブロア室３６の容積が増大したときの図であり、図６（Ｂ）は、ブロア室３６の容積が減少したときの図である。図７は、図６（Ｂ）に示す圧電アクチュエータ４１の概略断面図である。図７では、図６（Ｂ）に示す圧電アクチュエータ４１の屈曲を強調して示している。 6 (A) and 6 (B) show the SS line of the piezoelectric blower 200 when the piezoelectric blower 200 according to the second embodiment of the present invention is operated at the third-order mode frequency (third harmonic wave). FIG. 6A is a diagram when the volume of the blower chamber 36 is increased, and FIG. 6B is a diagram when the volume of the blower chamber 36 is decreased. FIG. 7 is a schematic cross-sectional view of the piezoelectric actuator 41 shown in FIG. In FIG. 7, the bending of the piezoelectric actuator 41 shown in FIG.
　この第２実施形態の圧電ブロア２００が前記第１実施形態の圧電ブロア１００と相違する点は、キャップ２４２である。その他の構成については同じである。 The difference between the piezoelectric blower 200 of the second embodiment and the piezoelectric blower 100 of the first embodiment is a cap 242. Other configurations are the same.
　詳述すると、キャップ２４２には、圧電アクチュエータ４１の屈曲振動により形成される振動の節のうち、圧電アクチュエータ４１の中心から最も距離が短い振動の節Ｆに対向する箇所より外側の領域に、円板形状の吸引口２５３が形成されている。そして、この吸引口２５３の中心を通る中心軸Ｘと、圧電素子４０の中心を通る中心軸Ｙとが一致していない。その他の点についてはキャップ４２と同じである。 More specifically, the cap 242 has a circular shape in a region outside the portion facing the vibration node F having the shortest distance from the center of the piezoelectric actuator 41 among the vibration nodes formed by the bending vibration of the piezoelectric actuator 41. A plate-shaped suction port 253 is formed. The central axis X passing through the center of the suction port 253 and the central axis Y passing through the center of the piezoelectric element 40 do not match. The other points are the same as the cap 42.
　以下、圧電ブロア２００が動作しているときにおける空気の流れについて説明する。 Hereinafter, the flow of air when the piezoelectric blower 200 is operating will be described.
　この実施形態の圧電ブロア２００では、３次モードの周波数（基本波の３倍波）の交流駆動電圧が外部端子６３，７２から圧電素子４０に印加されると、圧電アクチュエータ４１は、１つの節Ｆと２つの腹を生じる３次モードで同心円状に屈曲振動する。 In the piezoelectric blower 200 of this embodiment, when an AC driving voltage having a third-order mode frequency (third harmonic wave) is applied from the external terminals 63 and 72 to the piezoelectric element 40, the piezoelectric actuator 41 has one node. B and vibrate in a concentric manner in a third-order mode that produces F and two antinodes.
　同時に、天板３７は、圧電アクチュエータ４１の屈曲振動に伴うブロア室３６の圧力変動により、圧電アクチュエータ４１の屈曲振動に伴って（この実施形態では振動位相が１８０°遅れて）同じく３次モードで同心円状に屈曲振動する。 At the same time, the top plate 37 is also in the third-order mode according to the bending vibration of the piezoelectric actuator 41 (in this embodiment, the vibration phase is delayed by 180 °) due to the pressure fluctuation of the blower chamber 36 accompanying the bending vibration of the piezoelectric actuator 41. Bend and vibrate concentrically.
　これにより、圧電ブロア２００においても、図６（Ａ）（Ｂ）に示すように、振動板３９及び天板３７が屈曲変形してブロア室３６の体積が周期的に変化する。 Thereby, also in the piezoelectric blower 200, as shown in FIGS. 6A and 6B, the vibration plate 39 and the top plate 37 are bent and deformed, and the volume of the blower chamber 36 is periodically changed.
　図６（Ａ）に示すように、圧電素子４０に交流電圧を印加して振動板３９を圧電素子４０側へ屈曲させると、ブロア室３６の容積が増大する。これに伴い、圧電ブロア２００の外部の空気が吸引口２５３、通気路３１、及び通気孔４５を介してブロア室３６内に吸引される。このとき、ブロア室３６からの空気の流出は無いものの、吐出口２４から圧電ブロア２００の外部への空気の流れの慣性力が働いている。 As shown in FIG. 6A, when an alternating voltage is applied to the piezoelectric element 40 and the diaphragm 39 is bent toward the piezoelectric element 40, the volume of the blower chamber 36 increases. Along with this, air outside the piezoelectric blower 200 is sucked into the blower chamber 36 through the suction port 253, the vent path 31, and the vent hole 45. At this time, although there is no outflow of air from the blower chamber 36, the inertial force of the air flow from the discharge port 24 to the outside of the piezoelectric blower 200 is working.
　図６（Ｂ）に示すように、圧電素子４０に交流電圧を印加して振動板３９をブロア室３６側へ屈曲させると、ブロア室３６の容積が減少する。これに伴い、ブロア室３６内の空気が通気孔４５、通気路３１を介して吐出口２４から吐出される。 As shown in FIG. 6B, when an alternating voltage is applied to the piezoelectric element 40 to bend the diaphragm 39 toward the blower chamber 36, the volume of the blower chamber 36 decreases. Accordingly, the air in the blower chamber 36 is discharged from the discharge port 24 through the vent hole 45 and the vent path 31.
　このとき、ブロア室３６から吐出される気流が，圧電ブロア２００の外部の空気を吸引口２５３及び通気路３１を介して引き込みながら吐出口２４から吐出される。そのため、圧電ブロア２００の外部から吐出孔に付与される圧力を無負荷とすると、吐出口２４から吐出される空気の流量は、引き込まれる空気の流量分増大する。 At this time, the air flow discharged from the blower chamber 36 is discharged from the discharge port 24 while drawing air outside the piezoelectric blower 200 through the suction port 253 and the air passage 31. Therefore, if the pressure applied to the discharge hole from the outside of the piezoelectric blower 200 is unloaded, the flow rate of air discharged from the discharge port 24 increases by the flow rate of drawn air.
　ここで、この実施形態の圧電ブロア２００においても、吸引口２５３の中心を通る中心軸Ｘと、圧電素子４０の中心を通る中心軸Ｙとは、一致していない（図６（Ａ）（Ｂ）参照）。そのため、この実施形態の圧電ブロア２００でも、吸引口の中心を通る中心軸と圧電素子の中心を通る中心軸とが一致する従来のマイクロブロア９００（図１２参照）に比べて、圧電アクチュエータ４１における振動エネルギーの高い領域（即ち、圧電アクチュエータ４１における変位量の大きい領域）に対向する吸引口２５３の面積の割合が減少している。 Here, also in the piezoelectric blower 200 of this embodiment, the central axis X passing through the center of the suction port 253 and the central axis Y passing through the center of the piezoelectric element 40 do not coincide (FIGS. 6A and 6B). )reference). Therefore, also in the piezoelectric blower 200 of this embodiment, compared with the conventional micro blower 900 (see FIG. 12) in which the central axis passing through the center of the suction port and the central axis passing through the center of the piezoelectric element coincide, The ratio of the area of the suction port 253 facing the region with high vibration energy (that is, the region with a large displacement amount in the piezoelectric actuator 41) is decreased.
　この実施形態の圧電ブロア２００では、図６（Ａ）（Ｂ）と図７に示すように、壁部２４３のうち、圧電アクチュエータ４１における振動の節Ｆより内側の高振動領域（即ち振動エネルギーの高い領域）に対向している領域に吸引口２５３が形成されていない。 In the piezoelectric blower 200 of this embodiment, as shown in FIGS. 6A and 6B and FIG. 7, a high vibration region (that is, vibration energy of the wall portion 243 inside the vibration node F of the piezoelectric actuator 41). The suction port 253 is not formed in a region facing the high region.
　また、この実施形態の圧電ブロア２００でも、振動エネルギーの最も高い圧電アクチュエータ４１の中心（即ち、変位量の最も大きい圧電アクチュエータ４１の中心）は、壁部２４３の吸引口２５３以外の領域に対向している。 Also in the piezoelectric blower 200 of this embodiment, the center of the piezoelectric actuator 41 having the highest vibration energy (that is, the center of the piezoelectric actuator 41 having the largest displacement amount) faces the region other than the suction port 253 of the wall portion 243. ing.
　そのため、圧電アクチュエータ４１が屈曲振動をしているとき、通気路３１から吸引口２５３を介して圧電ブロア２００の外部へ漏れる空気の流量が減少し、壁部２４３に衝突する空気の流量が増加する。 Therefore, when the piezoelectric actuator 41 is bending and vibrating, the flow rate of air leaking from the ventilation path 31 to the outside of the piezoelectric blower 200 through the suction port 253 decreases, and the flow rate of air colliding with the wall portion 243 increases. .
　この結果、図６（Ａ）に示すように壁部２４３に衝突して分散する気流が通気路３１内に残留する。このため、ブロア室３６から通気孔４５を介して流出する気流に引き込まれる空気の流量が増加する。すなわち、吐出口２４から吐出される吐出流量が増加する。 As a result, as shown in FIG. 6A, the airflow that collides with the wall portion 243 and is dispersed remains in the air passage 31. For this reason, the flow rate of the air drawn into the airflow flowing out from the blower chamber 36 through the vent hole 45 increases. That is, the discharge flow rate discharged from the discharge port 24 increases.
　従って、この第２実施形態の圧電ブロア２００によれば、前記第１実施形態の圧電ブロア２００と同様の効果を奏する。 Therefore, according to the piezoelectric blower 200 of the second embodiment, the same effect as that of the piezoelectric blower 200 of the first embodiment can be obtained.
　次に、圧電ブロア２００の圧電素子４０の中心軸Ｙを基準としたときの、圧電素子４０の中心軸Ｙから吸引口２５３の中心軸Ｘまでの距離と圧電ブロア２００のポンプ特性（即ち吐出圧力および吐出流量）との関係について説明する。 Next, the distance from the central axis Y of the piezoelectric element 40 to the central axis X of the suction port 253 with respect to the central axis Y of the piezoelectric element 40 of the piezoelectric blower 200 and the pump characteristics (that is, discharge pressure) of the piezoelectric blower 200. And the discharge flow rate) will be described.
　図８は、図６（Ａ）（Ｂ）に示す圧電ブロア２００における、圧電素子４０の中心軸に対する吸引口２５３の中心軸の距離と、圧電ブロア２００のポンプ特性（吐出圧力および吐出流量）との関係を示す図である。図８では、圧電素子４０の中心軸Ｙから吸引口２５３の中心軸Ｘまでの距離を変化させて、圧電ブロア２００の吐出圧力および吐出流量を測定した結果を示している。 FIG. 8 shows the distance of the central axis of the suction port 253 relative to the central axis of the piezoelectric element 40 and the pump characteristics (discharge pressure and discharge flow rate) of the piezoelectric blower 200 in the piezoelectric blower 200 shown in FIGS. It is a figure which shows the relationship. FIG. 8 shows the result of measuring the discharge pressure and the discharge flow rate of the piezoelectric blower 200 by changing the distance from the center axis Y of the piezoelectric element 40 to the center axis X of the suction port 253.
　ここで、圧電素子４０の中心軸Ｙから吸引口２５３の中心軸Ｘまでの距離が０であるということは、図６（Ａ）（Ｂ）に示した吸引口２５３の中心軸Ｘと圧電素子４０の中心軸Ｙとが一致していることを意味する。 Here, the fact that the distance from the central axis Y of the piezoelectric element 40 to the central axis X of the suction port 253 is 0 means that the central axis X of the suction port 253 and the piezoelectric element shown in FIGS. It means that the central axis Y of 40 coincides.
　図８に示す測定結果より、圧電素子４０の中心軸Ｙから吸引口２５３の中心軸Ｘまでの距離を０にした圧電ブロア２００の吐出圧力および吐出流量に比べて、圧電素子４０の中心軸Ｙから吸引口２５３の中心軸Ｘまでの距離を増加させた圧電ブロア２００の吐出圧力および吐出流量は増大することが明らかとなった。 From the measurement result shown in FIG. 8, the central axis Y of the piezoelectric element 40 is compared with the discharge pressure and discharge flow rate of the piezoelectric blower 200 in which the distance from the central axis Y of the piezoelectric element 40 to the central axis X of the suction port 253 is zero. It became clear that the discharge pressure and the discharge flow rate of the piezoelectric blower 200 that increased the distance from the suction port 253 to the central axis X of the suction port 253 increased.
　特に、圧電素子４０の中心軸Ｙから吸引口２５３の中心軸Ｘまでの距離を０にした圧電ブロア２００の吐出圧力および吐出流量を１００％としたとき、圧電素子４０の中心軸Ｙから吸引口２５３の中心軸Ｘまでの距離を４ｍｍにした圧電ブロア２００の吐出圧力は１５５％まで増大し、吐出流量も１２５％まで増大することが明らかとなった。 In particular, when the discharge pressure and the discharge flow rate of the piezoelectric blower 200 in which the distance from the central axis Y of the piezoelectric element 40 to the central axis X of the suction port 253 is set to 100%, the suction port from the central axis Y of the piezoelectric element 40 is set. It was revealed that the discharge pressure of the piezoelectric blower 200 with the distance to the central axis X of 253 being 4 mm increased to 155% and the discharge flow rate also increased to 125%.
　以上のような結果になった理由は、吸引口２５３の中心軸Ｘと圧電素子４０の中心軸Ｙとが一致していない圧電ブロア２００では、吸引口の中心軸と圧電素子の中心軸とが一致する従来の圧電ブロアに比べて、圧電アクチュエータ４１における振動エネルギーの高い領域（即ち、圧電アクチュエータ４１における変位量の大きい領域）に対向する吸引口２５３の面積の割合が減少したためであると考えられる。 The reason for the above results is that in the piezoelectric blower 200 in which the central axis X of the suction port 253 and the central axis Y of the piezoelectric element 40 do not coincide with each other, the central axis of the suction port and the central axis of the piezoelectric element are This is considered to be because the ratio of the area of the suction port 253 facing the region with high vibration energy in the piezoelectric actuator 41 (that is, the region with a large displacement amount in the piezoelectric actuator 41) is reduced compared to the corresponding conventional piezoelectric blower. .
《本発明の第３実施形態》
　以下、本発明の第３実施形態に係る圧電ブロア３００について説明する。 << Third Embodiment of the Invention >>
Hereinafter, a piezoelectric blower 300 according to a third embodiment of the present invention will be described.
　図９は、本発明の第３実施形態に係る圧電ブロア３００の外観斜視図である。図１０は、図９に示す圧電ブロア３００のＴ－Ｔ線の断面図である。 FIG. 9 is an external perspective view of the piezoelectric blower 300 according to the third embodiment of the present invention. FIG. 10 is a cross-sectional view taken along line TT of the piezoelectric blower 300 shown in FIG.
　この第３実施形態の圧電ブロア３００が前記第１実施形態の圧電ブロア１００と相違する点は、キャップ３４２、吐出側ケース３０１、及び吸引側ケース３０２である。その他の構成については同じである。 The differences between the piezoelectric blower 300 of the third embodiment and the piezoelectric blower 100 of the first embodiment are a cap 342, a discharge side case 301, and a suction side case 302. Other configurations are the same.
　詳述すると、圧電ブロア３００は、本体３１０と、吐出側ケース３０１と、吸引側ケース３０２とを備える。この本体３１０は、筐体１７、天板３７、側板３８、振動板３９、圧電素子４０、及びキャップ３４２からなる積層体である。 Specifically, the piezoelectric blower 300 includes a main body 310, a discharge side case 301, and a suction side case 302. The main body 310 is a laminated body including the housing 17, the top plate 37, the side plate 38, the vibration plate 39, the piezoelectric element 40, and the cap 342.
　キャップ３４２には、圧電素子４０の中心を通る中心軸Ｙと中心軸が一致する円板形状の第１吸引口３５３と第１壁部３４３とが形成されている。第１吸引口３５３の直径は１１ｍｍであり、第１吸引口３５３の開口面の面積は、９５ｍｍ２である。また、圧電素子４０の第１壁部３４３側の主面の面積に対する第１吸引口３５３の開口面の面積の割合（面積比）は、０．６３である。その他の点についてはキャップ４２と同じである。 The cap 342 is formed with a disk-shaped first suction port 353 and a first wall portion 343 whose center axis coincides with the center axis Y passing through the center of the piezoelectric element 40. The diameter of the first suction port 353 is 11 mm, and the area of the opening surface of the first suction port 353 is 95 mm 2 . The ratio (area ratio) of the area of the opening surface of the first suction port 353 to the area of the main surface on the first wall 343 side of the piezoelectric element 40 is 0.63. The other points are the same as the cap 42.
　なお、前述したように、圧電素子４０の直径は、１３．８ｍｍであり、圧電素子４０の壁部４３側の主面の面積は、１５０ｍｍ２である。 As described above, the diameter of the piezoelectric element 40 is 13.8 mm, and the area of the main surface on the wall 43 side of the piezoelectric element 40 is 150 mm 2 .
　また、吐出側ケース３０１には、空気を吐出するための円柱形状の第２吐出口３０６が中心に形成されたノズル３０５を有する。ここで、ノズル３０５はノズル１８を囲み、第２吐出口３０６は第１吐出口２４に連通している。吐出側ケース３０１は例えばアクリル樹脂から構成されている。 The discharge-side case 301 has a nozzle 305 formed with a cylindrical second discharge port 306 for discharging air at the center. Here, the nozzle 305 surrounds the nozzle 18, and the second discharge port 306 communicates with the first discharge port 24. The discharge side case 301 is made of, for example, acrylic resin.
　また、吸引側ケース３０２には、空気を吸引するための円柱形状の第２吸引口３０８が中心に形成されたノズル３０７と圧電アクチュエータ４１に対向する第２壁部３０３とを有する。ここで、この実施形態の圧電ブロア３００では、吸引側ケース３０２の第２壁部３０３に形成されている第２吸引口３０８の中心軸Ｘと、圧電素子４０の中心軸Ｙとは一致していない。吸引側ケース３０２は例えばアクリル樹脂から構成されている。 Further, the suction side case 302 has a nozzle 307 formed around a cylindrical second suction port 308 for sucking air and a second wall portion 303 facing the piezoelectric actuator 41. Here, in the piezoelectric blower 300 of this embodiment, the central axis X of the second suction port 308 formed in the second wall portion 303 of the suction side case 302 and the central axis Y of the piezoelectric element 40 coincide with each other. Absent. The suction side case 302 is made of acrylic resin, for example.
　また、第２吸引口３０８の直径は、圧電素子４０の直径の１／２以下であることが好ましく、この実施形態では５ｍｍである。第２吸引口３０８の開口面の面積は、１９．６ｍｍ２である。また、圧電素子４０の第１壁部３４３側の主面の面積に対する第２吸引口３０８の開口面の面積の割合は、０．１３である。また、この実施形態における第２吸引口３０８の中心軸Ｘと圧電素子４０の中心軸Ｙとの距離は４ｍｍである。 The diameter of the second suction port 308 is preferably less than or equal to ½ of the diameter of the piezoelectric element 40, and in this embodiment is 5 mm. The area of the opening surface of the second suction port 308 is 19.6 mm 2 . In addition, the ratio of the area of the opening surface of the second suction port 308 to the area of the main surface of the piezoelectric element 40 on the first wall 343 side is 0.13. In this embodiment, the distance between the central axis X of the second suction port 308 and the central axis Y of the piezoelectric element 40 is 4 mm.
　吐出側ケース３０１及び吸引側ケース３０２は、互いに接合して本体３１０に着脱自在に装着され、本体３１０を収納する。そして、図１０に示すように、天板３７、側板３８及び圧電アクチュエータ４１の接合体と、筐体１７、キャップ３４２、吐出側ケース３０１及び吸引側ケース３０２の接合体との間には通気路３３１が形成されている。 The discharge-side case 301 and the suction-side case 302 are joined to each other so as to be detachable and house the main body 310. As shown in FIG. 10, a ventilation path is formed between the joined body of the top plate 37, the side plate 38 and the piezoelectric actuator 41 and the joined body of the casing 17, the cap 342, the discharge side case 301 and the suction side case 302. 331 is formed.
　なお、この実施形態では、天板３７及び側板３８の接合体が本発明の「第１筐体」に相当し、筐体１７及びキャップ３４２の接合体が本発明の「第２筐体」に相当する。また、第２壁部３０３が本発明の「壁部」に相当する。 In this embodiment, the joined body of the top plate 37 and the side plate 38 corresponds to the “first housing” of the present invention, and the joined body of the housing 17 and the cap 342 corresponds to the “second housing” of the present invention. Equivalent to. The second wall portion 303 corresponds to the “wall portion” of the present invention.
　以下、圧電ブロア３００が動作しているときにおける空気の流れについて説明する。 Hereinafter, the flow of air when the piezoelectric blower 300 is operating will be described.
　図１１（Ａ）（Ｂ）は、図９に示す圧電ブロア３００を１次モードの周波数（基本波）で動作させた場合における圧電ブロア３００のＴ－Ｔ線の断面図である。図１１（Ａ）は、ブロア室３６の容積が増大したときの図であり、図１１（Ｂ）は、ブロア室３６の容積が減少したときの図である。 FIGS. 11A and 11B are cross-sectional views taken along line TT of the piezoelectric blower 300 when the piezoelectric blower 300 shown in FIG. 9 is operated at the primary mode frequency (fundamental wave). 11A is a diagram when the volume of the blower chamber 36 is increased, and FIG. 11B is a diagram when the volume of the blower chamber 36 is decreased.
　図１０に示す状態において、１次モードの周波数（基本波）の交流駆動電圧が外部端子６３，７２から圧電素子４０に印加されると、圧電アクチュエータ４１は同心円状に屈曲振動する。同時に、天板３７は、圧電アクチュエータ４１の屈曲振動に伴うブロア室３６の圧力変動により、圧電アクチュエータ４１の屈曲振動に伴って（この実施形態では振動位相が１８０°遅れて）同心円状に屈曲振動する。 In the state shown in FIG. 10, when an AC drive voltage having a primary mode frequency (fundamental wave) is applied to the piezoelectric element 40 from the external terminals 63 and 72, the piezoelectric actuator 41 bends and vibrates concentrically. At the same time, the top plate 37 bends concentrically with the bending vibration of the piezoelectric actuator 41 (in this embodiment, the vibration phase is delayed by 180 °) due to the pressure fluctuation of the blower chamber 36 accompanying the bending vibration of the piezoelectric actuator 41. To do.
　これにより、図１１（Ａ）（Ｂ）に示すように、振動板３９及び天板３７が屈曲変形してブロア室３６の体積が周期的に変化する。 Thereby, as shown in FIGS. 11A and 11B, the diaphragm 39 and the top plate 37 are bent and deformed, and the volume of the blower chamber 36 is periodically changed.
　図１１（Ａ）に示すように、圧電素子４０に交流電圧を印加して振動板３９を圧電素子４０側へ屈曲させると、ブロア室３６の容積が増大する。これに伴い、圧電ブロア３００の外部の空気が第２吸引口３０８、通気路３３１、及び通気孔４５を介してブロア室３６内に吸引される。このとき、ブロア室３６からの空気の流出は無いものの、第２吐出口３０６から圧電ブロア３００の外部への空気の流れの慣性力が働いている。 As shown in FIG. 11A, when an alternating voltage is applied to the piezoelectric element 40 and the diaphragm 39 is bent toward the piezoelectric element 40, the volume of the blower chamber 36 increases. Accordingly, the air outside the piezoelectric blower 300 is sucked into the blower chamber 36 through the second suction port 308, the ventilation path 331, and the ventilation hole 45. At this time, although there is no outflow of air from the blower chamber 36, the inertial force of the air flow from the second discharge port 306 to the outside of the piezoelectric blower 300 is working.
　図１１（Ｂ）に示すように、圧電素子４０に交流電圧を印加して振動板３９をブロア室３６側へ屈曲させると、ブロア室３６の容積が減少する。これに伴い、ブロア室３６内の空気が通気孔４５、通気路３３１を介して第２吐出口３０６から吐出される。 As shown in FIG. 11B, when an AC voltage is applied to the piezoelectric element 40 to bend the diaphragm 39 toward the blower chamber 36, the volume of the blower chamber 36 decreases. Accordingly, the air in the blower chamber 36 is discharged from the second discharge port 306 via the vent hole 45 and the vent path 331.
　このとき、ブロア室３６から吐出される気流が，圧電ブロア３００の外部の空気を第２吸引口３０８及び通気路３３１を介して引き込みながら第２吐出口３０６から吐出される。そのため、圧電ブロア３００の外部から吐出孔に付与される圧力を無負荷とすると、第２吐出口３０６から吐出される空気の流量は、引き込まれる空気の流量分増大する。 At this time, the air flow discharged from the blower chamber 36 is discharged from the second discharge port 306 while drawing air outside the piezoelectric blower 300 through the second suction port 308 and the air passage 331. Therefore, if the pressure applied to the discharge hole from the outside of the piezoelectric blower 300 is unloaded, the flow rate of the air discharged from the second discharge port 306 increases by the flow rate of the drawn air.
　ここで、この実施形態の圧電ブロア３００では、吸引側ケース３０２の第２吸引口３０８の中心を通る中心軸Ｘと、圧電素子４０の中心を通る中心軸Ｙとが一致していない。そのため、この実施形態の圧電ブロア３００でも、吸引口の中心軸と圧電素子の中心軸とが一致する従来のマイクロブロア９００（図１２参照）に比べて、圧電アクチュエータ４１における振動エネルギーの高い領域（即ち、圧電アクチュエータ４１における変位量の大きい領域）に対向する吸引口の面積の割合が減少している。 Here, in the piezoelectric blower 300 of this embodiment, the central axis X passing through the center of the second suction port 308 of the suction side case 302 does not coincide with the central axis Y passing through the center of the piezoelectric element 40. For this reason, even in the piezoelectric blower 300 of this embodiment, the region of higher vibration energy in the piezoelectric actuator 41 (see FIG. 12) compared to the conventional micro blower 900 (see FIG. 12) in which the central axis of the suction port and the central axis of the piezoelectric element coincide. That is, the ratio of the area of the suction port facing the region where the displacement amount in the piezoelectric actuator 41 is large) is reduced.
　特に、この実施形態の圧電ブロア３００では、振動エネルギーの最も高い圧電アクチュエータ４１の中心（即ち、変位量の最も大きい圧電アクチュエータ４１の中心）が、第２壁部３０３に対向している。 In particular, in the piezoelectric blower 300 of this embodiment, the center of the piezoelectric actuator 41 having the highest vibration energy (that is, the center of the piezoelectric actuator 41 having the largest displacement amount) faces the second wall portion 303.
　そのため、圧電アクチュエータ４１が屈曲振動をしているとき、通気路３３１から第２吸引口３０８を介して圧電ブロア３００の外部へ漏れる空気の流量が減少し、第２壁部３０３に衝突する空気の流量が増加する。 Therefore, when the piezoelectric actuator 41 is bending and vibrating, the flow rate of air leaking from the ventilation path 331 to the outside of the piezoelectric blower 300 through the second suction port 308 is reduced, and the air that collides with the second wall portion 303 is reduced. The flow rate increases.
　この結果、図１１（Ａ）に示すように第２壁部３０３に衝突して分散する気流が通気路３３１内に残留する。このため、ブロア室３６から通気孔４５を介して流出する気流に引き込まれる空気の流量が増加する。すなわち、第２吐出口３０６から吐出される吐出流量が増加する。 As a result, as shown in FIG. 11A, the airflow that collides with the second wall 303 and disperses remains in the air passage 331. For this reason, the flow rate of the air drawn into the airflow flowing out from the blower chamber 36 through the vent hole 45 increases. That is, the discharge flow rate discharged from the second discharge port 306 increases.
　従って、この第３実施形態の圧電ブロア３００によれば、前記第１実施形態の圧電ブロア１００と同様の効果を奏する。なお、この第３実施形態の圧電ブロア３００においても、圧電素子４０の中心軸Ｙから第２吸引口３０８の中心軸Ｘまでの距離と圧電ブロア３００のポンプ特性との関係について、前記第２実施形態の圧電ブロア２００と同様の測定結果（図８参照）が得られている。 Therefore, according to the piezoelectric blower 300 of the third embodiment, the same effect as that of the piezoelectric blower 100 of the first embodiment can be obtained. In the piezoelectric blower 300 of the third embodiment as well, the relationship between the distance from the central axis Y of the piezoelectric element 40 to the central axis X of the second suction port 308 and the pump characteristics of the piezoelectric blower 300 is described in the second embodiment. The same measurement result (see FIG. 8) as that of the piezoelectric blower 200 of the embodiment is obtained.
　さらに、この第３実施形態の圧電ブロア３００によれば、本体３１０に装着する吸引側ケース３０２の第２壁部３０３の形状を調整することによって、第２壁部３０３以外の構成（本体３１０など）を変更せずに、圧電素子４０の中心軸Ｙから第２吸引口３０８の中心軸Ｘまでの距離を変化させることができる。即ち、第２壁部３０３の形状を調整することによって、第２壁部３０３以外の構成（本体３１０など）を変更せずに、吐出圧力および吐出流量を調整することができる。 Furthermore, according to the piezoelectric blower 300 of the third embodiment, by adjusting the shape of the second wall portion 303 of the suction side case 302 attached to the main body 310, the configuration other than the second wall portion 303 (the main body 310 and the like). ) Can be changed without changing the distance from the central axis Y of the piezoelectric element 40 to the central axis X of the second suction port 308. That is, by adjusting the shape of the second wall portion 303, the discharge pressure and the discharge flow rate can be adjusted without changing the configuration other than the second wall portion 303 (main body 310, etc.).
　したがって、本体３１０のポンプ特性を変化させることなく、任意の形状の吐出側ケース３０１及び吸引側ケース３０２を選択することができるため、圧電ブロア３００の汎用性が高まる。 Therefore, since the discharge side case 301 and the suction side case 302 having any shape can be selected without changing the pump characteristics of the main body 310, the versatility of the piezoelectric blower 300 is enhanced.
《その他の実施形態》
　前記実施形態では流体として空気を用いているが、これに限るものではない。当該流体が、空気以外の気体であっても適用できる。 << Other Embodiments >>
In the embodiment, air is used as the fluid, but the present invention is not limited to this. It can be applied even if the fluid is a gas other than air.
　また、前記実施形態ではブロアの駆動源として圧電素子４０を設けたが、これに限るものではない。例えば、電磁駆動でポンピングを行うブロアとして構成されていても構わない。 In the above embodiment, the piezoelectric element 40 is provided as a blower drive source, but the present invention is not limited to this. For example, it may be configured as a blower that performs pumping by electromagnetic driving.
　また、前記実施形態では、圧電素子４０はチタン酸ジルコン酸鉛系セラミックスから構成されているが、これに限るものではない。例えば、ニオブ酸カリウムナトリウム系及びアルカリニオブ酸系セラミックス等の非鉛系圧電体セラミックスの圧電材料などから構成してもよい。 In the above embodiment, the piezoelectric element 40 is made of a lead zirconate titanate ceramic, but is not limited thereto. For example, you may comprise from the piezoelectric material of lead-free piezoelectric ceramics, such as potassium sodium niobate type | system | group and alkali niobic acid type | system | group ceramics.
　また、前記実施形態ではユニモルフ型の圧電振動子を使用しているが、これに限るものではない。振動板３９の両面に圧電素子４０を貼着したバイモルフ型の圧電振動子を使用してもよい。 In the above embodiment, a unimorph type piezoelectric vibrator is used, but the present invention is not limited to this. A bimorph type piezoelectric vibrator in which the piezoelectric elements 40 are attached to both surfaces of the vibration plate 39 may be used.
　また、前記実施形態では円板状の圧電素子４０、円板状の振動板３９及び円板状の天板３７を用いたが、これに限るものではない。例えば、これらの形状が矩形や多角形であってもよい。 In the above embodiment, the disk-shaped piezoelectric element 40, the disk-shaped diaphragm 39, and the disk-shaped top plate 37 are used, but the present invention is not limited to this. For example, these shapes may be rectangular or polygonal.
　また、前記実施形態では、１次モード及び３次モードの周波数で圧電ブロアの振動板を屈曲振動させたが、これに限るものではない。実施の際は、複数の振動の腹を形成する、３次モード以上の奇数次の振動モードで振動板を屈曲振動させても良い。 In the above embodiment, the vibration plate of the piezoelectric blower is bent and vibrated at the frequency of the primary mode and the tertiary mode. However, the present invention is not limited to this. In implementation, the diaphragm may be bent and vibrated in an odd-order vibration mode that is a third-order mode or more that forms a plurality of vibration antinodes.
　また、前記実施形態では、天板３７が、振動板３９の屈曲振動に伴って同心円状に屈曲振動するが、これに限るものではない。実施の際は、振動板３９のみが屈曲振動し、天板３７が、振動板３９の屈曲振動に伴って屈曲振動しなくても良い。 In the above embodiment, the top plate 37 bends and vibrates concentrically with the bending vibration of the diaphragm 39. However, the present invention is not limited to this. At the time of implementation, only the diaphragm 39 is flexibly vibrated, and the top plate 37 may not be flexibly vibrated with the flexural vibration of the diaphragm 39.
　最後に、前記実施形態の説明は、すべての点で例示であって、制限的なものではないと考えられるべきである。本発明の範囲は、上述の実施形態ではなく、特許請求の範囲によって示される。さらに、本発明の範囲には、特許請求の範囲と均等の意味および範囲内でのすべての変更が含まれることが意図される。 Finally, the description of the embodiment should be considered as illustrative in all points and not restrictive. The scope of the present invention is shown not by the above embodiments but by the claims. Furthermore, the scope of the present invention is intended to include all modifications within the meaning and scope equivalent to the scope of the claims.
　２…内ケース
　３…外ケース
　３Ａ…吐出口
　４…連結部
　５Ａ…弾性金属板
　５Ｂ…圧電素子
　６…ブロア室
　７…流入通路
　８…開口部
　９…蓋部材
　９Ａ…吸引口
　１７…筐体
　１８…ノズル
　２４…吐出口
　３１…通気路
　３６…ブロア室
　３７…天板
　３８…側板
　３９…振動板
　４０…圧電素子
　４１…圧電アクチュエータ
　４２…キャップ
　４３…壁部
　４５…通気孔
　５２…突出部
　５３…吸引口
　５５Ａ～５５Ｄ…切欠き
　５６Ａ～５６Ｄ…ネジ穴
　６１…中央部
　６２…突出部
　６３…外部端子
　７０…電極導通用板
　７２…外部端子
　７３…内部端子
　１００、２００、３００…圧電ブロア
　２４２…キャップ
　２４３…壁部
　２５３…吸引口
　３０１…吐出側ケース
　３０２…吸引側ケース
　３０３…第２壁部
　３０５…ノズル
　３０６…第２吐出口
　３０７…ノズル
　３０８…第２吸引口
　３１０…本体
　３３１…通気路
　３４２…キャップ
　３４３…第１壁部
　３５３…第１吸引口
　９００…マイクロブロア DESCRIPTION OF SYMBOLS 2 ... Inner case 3 ... Outer case 3A ... Discharge port 4 ... Connection part 5A ... Elastic metal plate 5B ... Piezoelectric element 6 ... Blower chamber 7 ... Inflow passage 8 ... Opening part 9 ... Lid member 9A ... Suction port 17 ... Case 18 ... Nozzle 24 ... Discharge port 31 ... Ventilation path 36 ... Blower chamber 37 ... Top plate 38 ... Side plate 39 ... Vibration plate 40 ... Piezoelectric element 41 ... Piezoelectric actuator 42 ... Cap 43 ... Wall 45 ... Vent hole 52 ... Protrusion 53 ... Suction port 55A to 55D ... Notch 56A to 56D ... Screw hole 61 ... Center part 62 ... Projection part 63 ... External terminal 70 ... Electrode conduction plate 72 ... External terminal 73 ... Internal terminal 100, 200, 300 ... Piezoelectric blower 242 ... Cap 243 ... Wall 253 ... Suction port 301 ... Discharge side case 302 ... Suction side case 303 ... Second wall 305 ... Nozzle 306 ... Second discharge port 307 ... Nozzle 308 ... Second suction port 310 ... body 331 ... vent passage 342 ... Cap 343 ... first wall portion 353 ... first suction port 900 ... micro-blower

Claims (5)

  1. 　駆動体を有し、前記駆動体への電圧の印加により同心円状に屈曲振動するアクチュエータと、
    　前記アクチュエータとともにブロア室を構成し、前記ブロア室の内部と外部とを連通させる通気孔を有する第１筐体と、
    　吸引口が形成され、前記アクチュエータに対向する壁部と、
    　前記壁部とともに前記アクチュエータ及び前記第１筐体を、間隔を設けて被覆して前記アクチュエータ及び前記第１筐体との間に通気路を形成する第２筐体と、を備え、
    　前記通気孔に対向する前記第２筐体の箇所には、吐出口が形成され、
    　前記吸引口の中心軸と前記駆動体の中心軸とは、一致していない、ブロア。     An actuator having a driving body, and bending and vibrating concentrically by application of a voltage to the driving body;
    A first housing that forms a blower chamber together with the actuator, and has a vent hole that communicates the inside and the outside of the blower chamber;
    A suction port is formed, and a wall portion facing the actuator;
    A second housing that covers the actuator and the first housing together with the wall to form a ventilation path between the actuator and the first housing by covering the actuator and the first housing;
    A discharge port is formed at a location of the second casing facing the vent hole,
    A blower in which a central axis of the suction port and a central axis of the driving body do not coincide with each other.
  2. 　前記駆動体の中心は、前記壁部の前記吸引口以外の領域と対向している、請求項１に記載のブロア。 The blower according to claim 1, wherein a center of the driving body is opposed to a region other than the suction port of the wall portion.
  3. 　前記吸引口の直径は、前記駆動体の直径の１／２以下である、請求項１又は２に記載のブロア。 The blower according to claim 1 or 2, wherein a diameter of the suction port is 1/2 or less of a diameter of the driving body.
  4. 　前記アクチュエータは、前記駆動体により、複数の振動の腹を形成する３次モード以上の奇数次の振動モードで屈曲振動し、
    　前記吸引口は、前記アクチュエータの屈曲振動により形成される振動の節のうち、前記アクチュエータの中心から最も距離が短い振動の節に対向する前記壁部の箇所より外側の領域に形成されている、請求項１から３のいずれか１項に記載のブロア。     The actuator bends and vibrates in an odd-order vibration mode that is a third-order mode or more that forms a plurality of vibration antinodes by the driver,
    The suction port is formed in a region outside the location of the wall portion facing the vibration node having the shortest distance from the center of the actuator among the vibration nodes formed by the bending vibration of the actuator. The blower according to any one of claims 1 to 3.
  5. 　前記吸引口が形成されている前記壁部は、前記第２筺体に対して着脱自在に取り付けられている、請求項１から４のいずれか１項に記載のブロア。 The blower according to any one of claims 1 to 4, wherein the wall portion in which the suction port is formed is detachably attached to the second casing.
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JP5692465B2 (en) 2015-04-01
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