WO2017059660A1

WO2017059660A1 - Miniature piezoelectric air pump structure

Info

Publication number: WO2017059660A1
Application number: PCT/CN2016/076684
Authority: WO
Inventors: 杨才源; 覃东; 康雄兵; 付浩
Original assignee: 广东奥迪威传感科技股份有限公司
Priority date: 2015-10-08
Filing date: 2016-03-18
Publication date: 2017-04-13

Abstract

Disclosed is a miniature piezoelectric air pump structure, comprising an outer housing (10), a pump chamber (20) and a first vibration structure (30). The outer housing (10) is provided with an air inlet (121) and an air outlet (11). An inner cavity of the outer housing (10) is in communication with the external environment via the air inlet (121) and the air outlet (11). The pump chamber (20) is provided inside the inner cavity of the outer housing (10), and is connected to the outer housing (10). The pump chamber (20) is provided with a first through hole (211), and an inner cavity of the pump chamber is in communication with the inner cavity of the outer housing (10) via the first through hole (211), and the first through hole (211) is arranged opposite to the air outlet (11). The first vibration structure (30) is connected to one side of the pump chamber (20). The miniature piezoelectric air pump structure uses the outer housing (10) to protect the first vibration structure (30), thereby improving the safety performance and prolonging the service life. By means of the increase or decrease of the inner cavity of the pump chamber (20), the function of generating a high-pressure and high-speed airflow at the air outlet (11) is realized.

Description

Piezoelectric micro air pump structure

Technical field

The present invention relates to the field of piezoelectric devices, and more particularly to a piezoelectric micro air pump structure.

Background technique

Piezoelectric micro-pumps mainly use the inverse piezoelectric effect of piezoelectric ceramics, which is driven by electrical signals to be mechanically deformed, resulting in rapid changes in gas volume in a confined space, generating high-pressure, high-speed airflow in tiny vents, using the Venturi effect. Stable airflow output.

For the existing piezoelectric micro-pump using the Venturi effect, the silver pieces in the device are mostly exposed, and there is no effective protection during the working process, which will cause damage and the gas ejected in the air source air holes. There will be a certain divergence effect and it cannot be ejected efficiently.

Summary of the invention

Based on this, the present invention overcomes the deficiencies of the prior art and provides a piezoelectric micro air pump structure which is high in safety, is not easily damaged, and can effectively increase the air volume and air pressure of the air pump.

Its technical solutions are as follows:

A piezoelectric micro-pump structure includes: an outer casing having an air inlet and an air outlet, wherein the inner cavity of the outer casing communicates with an external environment through the air inlet and the air outlet; The pump chamber is disposed in the inner cavity of the outer casing, the pump chamber is connected to the outer casing, the pump chamber is provided with a first through hole, and the inner chamber of the pump passes through the first through hole and the The inner cavity of the outer casing communicates with the first through hole opposite to the air outlet; and the first vibration structure is connected to one side of the pump chamber.

In one embodiment, the first through hole, the exhaust passage, and the air outlet are coaxially disposed, and a diameter of the first through hole is smaller than an inner diameter of the exhaust passage.

In one embodiment, a second vibrating structure is further included, the second vibrating structure being coupled to the other side of the pump chamber, wherein the first vibrating structure is located in the pump chamber having the first pass One side of the hole, and the first vibrating structure is provided with an exhaust passage, and the exhaust passage is disposed opposite to the air outlet.

In one embodiment, further comprising a conductive member, the first vibrating structure being away from a side of the second vibrating structure and the second vibrating structure being away from a side of the first vibrating structure by the conductive member Connecting, the conductive member is electrically connected to the negative pole or the positive pole of the power source; the side of the first vibrating structure adjacent to the second vibrating structure is electrically connected to the side of the second vibrating structure close to the first vibrating structure And the side of the first vibrating structure adjacent to the second vibrating structure and the side of the second vibrating structure close to the first vibrating structure are electrically connected to the positive or negative pole of the power source.

In one embodiment, the pump chamber includes a first vibrating plate, a second vibrating plate, and a support ring, the support ring including an annular plate and a plurality of supports connected to sides of the annular plate, the support The first vibrating plate, the second vibrating plate and the annular plate are stacked together, and the first vibrating plate and the second vibrating plate are respectively located in the ring On both sides of the board, the first vibrating plate is provided with the first through hole.

In one embodiment, the first vibrating structure includes a third vibrating plate and a first silver plate, and the third vibrating plate and the first silver plate are stacked on the first vibrating plate, a second through hole and a third through hole are respectively defined in the third vibrating plate and the first through hole, wherein the second through hole communicates with the third through hole and forms the exhaust passage; The second vibrating structure includes a fourth vibrating plate and a second silver plate, and the fourth vibrating plate and the second silver plate are stacked on the second vibrating plate.

In one embodiment, the first vibrating plate, the second vibrating plate, the third vibrating plate, and the fourth vibrating plate are metal materials, the third vibrating plate, the first vibrating plate, and the The support ring, the second vibrating plate and the fourth vibrating plate are electrically connected to each other, and the conductive member is a conductive wire, a conductive tape or a flexible circuit board.

In one embodiment, the support member is electrically connected to the first metal piece, and the second silver piece is electrically connected to the side of the first silver piece to be electrically connected to the second metal piece.

In one embodiment, an air inlet on the outer casing is disposed opposite to the air outlet, and an inner diameter of the inner cavity of the outer casing gradually decreases in a direction from the air inlet to the air outlet.

In one embodiment, the outer casing is detachably mounted with a cover plate on which the air inlet is disposed.

In one embodiment, the inner side wall of the outer casing has a first annular flange disposed around the air outlet and disposed opposite the pump chamber, the first annular flange The cross-sectional size gradually decreases in the direction from the air outlet to the pump chamber.

In one embodiment, the pump chamber includes a first vibrating plate and a second vibrating plate, the first vibrating plate has a second annular flange, and is provided with the first through hole, the second vibration A plate is coupled to the second annular flange and the outer casing.

The principle and effect of the present invention will be further described below in conjunction with the above technical solutions:

1. The piezoelectric micro air pump structure described above protects the first vibrating structure through the outer casing, so that the device of the invention has high safety performance and long service life. In addition, when the first vibrating structure is in operation, the chamber interior of the pump is enlarged or contracted, and during the process of reducing the chamber of the pump chamber, the gas in the pump chamber can be discharged to the external environment through the first through hole, the exhaust passage and the air outlet. In this way, high pressure and high speed airflow can be generated at the air outlet.

2. When the first vibrating structure and the second vibrating structure vibrate in opposite directions synchronously, the degree of expansion or contraction of the pump chamber is larger than that when only the first vibrating structure is set, so that the air outlet of the outer casing can be generated. The phenomenon of high pressure and high speed airflow is more obvious.

3. The first through hole, the exhaust passage and the air outlet are coaxially arranged, and during the process of reducing the cavity inside the pump chamber, the air flow is linearly discharged from the first through hole, the exhaust passage and the air outlet. . The gas discharge direction is concentrated, the gas flow rate is fast, and the gas flow pressure is high. Since the inner diameter of the exhaust passage is larger than the diameter of the first through hole, when the chamber of the pump is enlarged, the pump chamber inhales, the gas enters from the outer casing inlet, and enters the pump through the exhaust passage and the first through hole. In the room, the exhaust port will not be affected at this time.

4. After the first silver piece and the second silver piece are applied with a certain frequency, the first silver piece and the second silver piece may have radial shrinkage deformation due to the inverse piezoelectric effect, the first silver piece and the second silver piece. The third vibrating plate is respectively connected to the fourth vibrating body, and the radial contraction is converted into an upward or downward bending. By controlling the arrangement of the positive and negative electrodes of the first silver sheet and the second silver sheet, the first silver sheet and the second silver sheet can be bent or reversely bent to achieve contraction or expansion of the chamber inside the pump.

5. The side of the first vibrating structure adjacent to the second vibrating structure is electrically connected to the side of the second vibrating structure adjacent to the first vibrating structure, and is electrically connected to the positive pole or the negative pole of the power source, and the first vibrating structure is another The side surface and the other side of the second vibration structure are electrically connected by a conductive member, and the conductive member is electrically connected to a negative electrode or a positive electrode of the power source. In this way, the first vibrating structure and the second vibrating structure can be connected to the power source without respectively connecting the first vibrating structure and the second vibrating structure to the power source through the wire lead. It can be seen that the invention reduces the conductive lead, saves the internal space of the piezoelectric micro-pump structure, and makes the piezoelectric micro-pump structure compact.

DRAWINGS

1 is a schematic structural view of a piezoelectric micro air pump according to Embodiment 1 of the present invention;

2 is an exploded structural view of a piezoelectric micro air pump according to Embodiment 1 of the present invention;

3 is a schematic structural view of a piezoelectric micro air pump according to Embodiment 2 of the present invention;

4 is an exploded structural view of a piezoelectric micro air pump according to Embodiment 2 of the present invention;

5 is a schematic structural view of a piezoelectric micro air pump according to Embodiment 3 of the present invention;

FIG. 6 is an exploded structural view of a piezoelectric micro air pump according to Embodiment 3 of the present invention.

Description of the reference signs:

10. outer casing, 11, air outlet, 12, cover plate, 121, air inlet, 13, first annular flange, 20, pump chamber, 21, first vibrating plate, 211, first through hole, 22, Second vibrating plate, 23, support ring, 231, annular plate, 232, support member, 24, second annular flange, 30, first vibrating structure, 31, third vibrating plate, 311, second through hole, 32 , first silver piece, 321, third through hole, 40, second vibration structure, 41, fourth vibration plate, 42, second silver piece, 50, conductive member, 60, first metal piece, 70, second Metal sheets.

detailed description

The embodiments of the present invention are described in detail below:

As shown in any of FIGS. 1-6, the piezoelectric micro air pump structure according to the embodiment of the invention includes an outer casing 10, a pump chamber 20 and a first vibrating structure 30.

The outer casing 10 is provided with an air inlet 121 and an air outlet 11. The inner cavity of the outer casing 10 communicates with the external environment through the air inlet 121 and the air outlet 11. The pump chamber 20 is disposed in the inner cavity of the outer casing 10, and the pump chamber 20 is connected to the outer casing 10. The pump chamber 20 is provided with a first through hole 211 through which the inner cavity of the pump chamber 20 communicates with the inner cavity of the outer casing 10, and the first through hole 211 and the outer hole The ports 11 are oppositely arranged. The first vibrating structure 30 is coupled to one side of the pump chamber 20. When the first vibrating structure 30 vibrates on the pump chamber 20, the inner chamber of the pump chamber 20 can be enlarged or contracted. During the process of reducing the cavity in the pump chamber 20, the gas in the pump chamber 20 is discharged to the external environment through the first through hole 211 and the air outlet 11, thereby discharging high-pressure, high-speed airflow at the air outlet 11.

The piezoelectric micro air pump structure described above protects the first vibrating structure 30 through the outer casing 10, so that the safety performance of the device of the present invention is improved and the service life is prolonged. In addition, when the first vibrating structure 30 is in operation, the inner cavity of the pump chamber 20 is enlarged or contracted. During the narrowing of the cavity in the pump chamber 20, the gas in the pump chamber 20 is discharged through the first through hole 211 and the air outlet 11 to In the external environment, high pressure and high-speed airflow can be generated at the air outlet 11.

Referring again to FIG. 1 or 2, the pump chamber 20 includes a first vibrating plate 21 and a second vibrating plate 22. The first vibrating plate 21 has a second annular flange 24 and is provided with the first through hole 211. The second vibrating plate 22 is connected to the second annular flange 24 and the outer casing 10.

Referring to FIG. 3 or 5, the piezoelectric micro air pump structure of the present invention further includes a second vibration structure 40. The first vibrating structure 30 is located at a side of the pump chamber 20 having the first through hole 211, and the first vibrating structure 30 is provided with an exhaust passage. The exhaust passage is disposed opposite to the air outlet 11 . The second vibrating structure 40 is coupled to the other side of the pump chamber 20. Thus, when the first vibrating structure 30 and the second vibrating structure 40 vibrate in opposite directions in synchronization, the gas in the pump chamber 20 is discharged to the external environment through the first through hole 211, the exhaust passage, and the air outlet 11, the pump chamber 20 The degree of enlargement or reduction of the inner cavity is larger than that when only the first vibrating structure 30 is provided, so that the phenomenon of high-pressure, high-speed airflow generated at the air outlet 11 of the outer casing 10 can be more apparent.

Referring to FIG. 5 again, the piezoelectric micro air pump structure of the present invention further includes a conductive member 50. The side of the first vibrating structure 30 adjacent to the second vibrating structure 40 is electrically connected to the side of the second vibrating structure 40 adjacent to the first vibrating structure 30, and the first vibrating structure 30 is adjacent to the The side surface of the second vibrating structure 40 and the side surface of the second vibrating structure 40 adjacent to the first vibrating structure 30 are electrically connected to the positive or negative pole of the power source. The side of the first vibrating structure 30 away from the second vibrating structure 40 and the side of the second vibrating structure 40 away from the first vibrating structure 30 are electrically connected by a conductive member, and the conductive member 50 is electrically connected. To the negative or positive side of the power supply.

The first vibrating structure 30 is electrically connected to the side of the second vibrating structure 40 adjacent to the side of the second vibrating structure 40 and is electrically connected to the positive or negative pole of the power source, and the first vibrating structure is The other side of the second vibrating structure 40 is electrically connected to the other side of the second vibrating structure 40 through the conductive member 50, and electrically connects the conductive member 50 to the negative pole or the positive pole of the power source. In this way, the first vibrating structure 30 and the second vibrating structure 40 can be connected to the power source without respectively connecting the first vibrating structure 30 and the second vibrating structure 40 to the power source through the wire leads. It can be seen that the invention reduces the conductive lead and saves the piezoelectric micro gas. The internal space of the pump structure makes the piezoelectric micro-pump structure compact.

Referring to FIG. 3 or 5, the pump chamber 20 includes a first vibrating plate 21, a second vibrating plate 22, and a support ring 23 (as distinguished from the flange 24 in FIG. 1). The support ring 23 includes an annular plate 231 and a plurality of support members 232 attached to the side of the annular plate 231. The support member 232 is connected to the outer casing 10, the first vibrating plate 21, the second vibrating plate 22, and the annular plate 231 are stacked together, and the first vibrating plate 21, the The second vibrating plates 22 are respectively located on both sides of the annular plate 231. The first vibrating plate 21 is provided with the first through hole 211.

The first vibrating structure 30 includes a third vibrating plate 31 and a first silver plate 32. The third vibrating plate 31 and the first silver plate 32 are stacked on the first vibrating plate 21, and the third vibrating plate 31 and the first silver plate 32 are respectively provided with second through holes. 311 and a third through hole 321 . The second through hole 311 communicates with the third through hole 321 and forms the exhaust passage. The second vibrating structure 40 includes a fourth vibrating plate 41 and a second silver plate 42. The fourth vibrating plate 41 and the second silver plate 42 are stacked on the second vibrating plate 22.

After the first silver piece 32 and the second silver piece 42 are applied with a voltage of a certain frequency, the first silver piece 32 and the second silver piece 42 may undergo radial contraction deformation due to the inverse piezoelectric effect, and the first silver piece 32, the first silver piece 32 The two silver plates 42 are respectively connected to the third vibrating plate 31 and the fourth vibrating plate 41, and the radial contraction of the first silver plate 32 and the second silver plate 42 is converted into upward or downward bending, thereby correspondingly driving the third vibrating plate. 31. The fourth vibrating plate 41 vibrates upward or downward, respectively. After the first silver piece 32 and the second silver piece 42 are applied with a voltage of a predetermined frequency, the first silver piece 32 and the second silver piece 42 are bent or reversely bent, so that the inner cavity of the pump chamber 20 can be contracted or Swell.

The first diaphragm 21, the second diaphragm 22, the third diaphragm 31, the fourth diaphragm 41, and the support ring 23 are all made of a metal material. The third vibrating plate 31, the first vibrating plate 21, the support ring 23, the second vibrating plate 22, and the fourth vibrating plate 41 are electrically connected, and the conductive member 50 is a conductive wire. Conductive tape or flexible circuit board. In addition, the support member 232 is electrically connected to the first metal piece 60, and the second silver piece 42 is electrically connected to the side of the first silver piece 32 to be electrically connected to the second metal piece 70. The power cord extends into the interior of the piezoelectric pump through the air inlet 121, and is connected to the first metal piece 60 and the second metal piece 70, thereby respectively connecting the positive and negative poles of the first silver piece 32 and the second silver piece 42 to the power source. By electrically connecting the wires, a voltage of a predetermined frequency is applied to the first silver plate 32 and the second silver plate 42.

The inner side wall of the outer casing 10 has a first annular flange 13. The first annular flange 13 is disposed around the air outlet 11 and opposite to the pump chamber 20, and the first annular flange 13 has a cross-sectional size at the air outlet 11 to the pump chamber The direction of 20 gradually decreases. Provided in this way, it is advantageous to collect gas in the outer casing 10 so that the gas is not easily discharged from the air outlet 11, so that the internal air pressure of the outer casing 10 can be correspondingly enhanced, and the airflow ejection speed of the air outlet 11 can be increased.

The first through hole 211, the exhaust passage, and the air outlet 11 are coaxially disposed. Thus, during the narrowing of the cavity in the pump chamber 20, the airflow is linearly ejected from the first through hole 211, the exhaust passage, and the air outlet 11, and the gas discharge direction is concentrated, and the airflow pressure is high, and the airflow is high. The spray speed is fast. The diameter of the first through hole 211 is smaller than the inner diameter of the exhaust passage. During the expansion of the inner chamber of the pump chamber 20, the pump chamber 20 draws in air, and the gas enters from the air inlet 121 of the outer casing 10 and passes through the exhaust passage. The through hole 211 enters the pump chamber 20, at which time the air outlet 11 is not affected.

An air inlet 121 on the outer casing 10 is disposed opposite to the air outlet 11, and an inner diameter of the inner cavity of the outer casing 10 gradually decreases in a direction from the air inlet 121 to the air outlet 11. The outer casing 10 is detachably provided with a cover plate 12, and the air inlet 121 is disposed on the cover plate 12. Thus, after the cover 12 is opened, the pump chamber 20, the first vibrating structure 30, and the second vibrating structure 40 are conveniently removed.

The technical features of the above-described embodiments may be arbitrarily combined. For the sake of brevity of description, all possible combinations of the technical features in the above embodiments are not described. However, as long as there is no contradiction between the combinations of these technical features, All should be considered as the scope of this manual.

The above-described embodiments are merely illustrative of several embodiments of the present invention, and the description thereof is more specific and detailed, but is not to be construed as limiting the scope of the invention. It should be noted that a number of variations and modifications may be made by those skilled in the art without departing from the spirit and scope of the invention. Therefore, the scope of the invention should be determined by the appended claims.

Claims

A piezoelectric micro air pump structure, comprising:

An outer casing, the outer casing is provided with an air inlet and an air outlet, and the inner cavity of the outer casing communicates with the external environment through the air inlet and the air outlet;

a pump chamber, the pump chamber is disposed in the outer casing cavity, the pump chamber is connected to the outer casing, the pump chamber is provided with a first through hole, and the pump chamber passes through the first through hole Communicating with the inner cavity of the outer casing, the first through hole is opposite to the air outlet; and

a first vibrating structure, the first vibrating structure being coupled to one side of the pump chamber.
A piezoelectric micro air pump structure according to claim 1, further comprising a second vibrating structure connected to the other side of said pump chamber, wherein said first vibrating structure is located The pump chamber has one side of the first through hole, and the first vibration structure is provided with an exhaust passage, and the exhaust passage is disposed opposite to the air outlet.
The piezoelectric micro air pump structure according to claim 2, wherein the first through hole, the exhaust passage and the air outlet are coaxially disposed, and a diameter of the first through hole is smaller than the row The inner diameter of the gas passage.
The piezoelectric micro air pump structure according to claim 2, further comprising a conductive member, wherein the first vibration structure is away from a side of the second vibration structure and the second vibration structure is away from the first vibration The side of the structure is electrically connected by the conductive member, the conductive member is electrically connected to the negative pole or the positive pole of the power source; the first vibrating structure is adjacent to the side of the second vibrating structure and the second vibrating structure is adjacent to the side The side surface of the first vibrating structure is electrically connected, and the side of the first vibrating structure adjacent to the second vibrating structure and the side of the second vibrating structure close to the first vibrating structure are electrically connected to the positive pole of the power source. Or negative.
The piezoelectric micro air pump structure according to claim 4, wherein said pump chamber comprises a first vibrating plate, a second vibrating plate, and a support ring, and said support ring includes an annular plate and a plurality of rings connected thereto a support member on a side of the plate, the support member is connected to the outer casing, the first vibrating plate, the second vibrating plate and the annular plate are stacked together, and the first vibrating plate and the The second vibrating plates are respectively located at two sides of the annular plate, and the first vibrating plate is provided with the first through holes.
The piezoelectric micro air pump structure according to claim 5, wherein the first vibrating structure comprises a third vibrating plate and a first silver plate, and the third vibrating plate is overlapped with the first silver plate The first a second through hole and a third through hole are respectively defined in the third vibration plate and the first silver plate, and the second through hole communicates with the third through hole and forms the An exhaust passage; the second vibrating structure includes a fourth vibrating plate and a second silver plate, and the fourth vibrating plate and the second silver plate are stacked on the second vibrating plate.
The piezoelectric micro air pump structure according to claim 6, wherein the first vibrating plate, the second vibrating plate, the third vibrating plate and the fourth vibrating plate are metal materials, and the third vibrating plate The first vibrating plate, the support ring, the second vibrating plate and the fourth vibrating plate are electrically connected to each other, and the conductive member is a conductive wire, a conductive tape or a flexible circuit board.
The piezoelectric micro air pump structure according to claim 7, wherein the support member is electrically connected to the first metal piece, and the second silver piece is electrically connected to the side of the first silver piece to be electrically connected to the second side. Metal sheets.
The piezoelectric micro air pump structure according to claim 1, wherein an air inlet on the outer casing is disposed opposite to the air outlet, and an inner diameter of the inner cavity of the outer casing is at the air inlet to the The direction of the air outlet gradually decreases.
The piezoelectric micro air pump structure according to claim 1, wherein the outer casing is detachably mounted with a cover plate, and the air inlet is provided on the cover plate.
The piezoelectric micro air pump structure according to claim 1, wherein said inner casing side wall has a first annular flange, said first annular flange being disposed around said air outlet and said pump chamber In a relative arrangement, the cross-sectional size of the first annular flange gradually decreases in a direction from the air outlet to the pump chamber.
The piezoelectric micro air pump structure according to claim 1, wherein said pump chamber comprises a first vibrating plate and a second vibrating plate, said first vibrating plate having a second annular flange and provided with said a first through hole, the second vibrating plate being connected to the second annular flange and the outer casing.