TWM553498U - Actuator - Google Patents

Actuator Download PDF

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Publication number
TWM553498U
TWM553498U TW106212406U TW106212406U TWM553498U TW M553498 U TWM553498 U TW M553498U TW 106212406 U TW106212406 U TW 106212406U TW 106212406 U TW106212406 U TW 106212406U TW M553498 U TWM553498 U TW M553498U
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Taiwan
Prior art keywords
plate
air inlet
suspension plate
actuator
piece
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TW106212406U
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Chinese (zh)
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Hao Jan Mou
li pang Mo
Shih Chang Chen
Yung Lung Han
Chi Feng Huang
Chang Yen Tsai
Wei Ming Lee
Hsuan Kai Chen
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Microjet Technology Co Ltd
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Priority to TW106212406U priority Critical patent/TWM553498U/en
Publication of TWM553498U publication Critical patent/TWM553498U/en

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  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Description

致動器Actuator

本案係關於一種致動器,尤指一種適微型、超薄且靜音之致動器。This case relates to an actuator, especially an actuator that is suitable for micro, ultra-thin and silent.

目前於各領域中無論是醫藥、電腦科技、列印、能源等工業,產品均朝精緻化及微小化方向發展,其中微幫浦、噴霧器、噴墨頭、工業列印裝置等產品所包含之致動器為其關鍵技術,是以,如何藉創新結構突破其技術瓶頸,為發展之重要內容。At present, in various fields, such as medicine, computer technology, printing, energy and other industries, the products are developing in the direction of refinement and miniaturization. Among them, products such as micro-pumps, sprayers, inkjet heads, industrial printing devices, etc. Actuator is its key technology, which is how to break through its technical bottleneck with innovative structure and is an important part of development.

舉例來說,於醫藥產業中,許多需要採用氣壓動力驅動之儀器或設備,例如:血壓計、或是可攜式、穿戴式儀器或設備,此類儀器設備通常採以傳統馬達及氣壓閥來達成其流體輸送之目的。然而,受限於此等傳統馬達以及流體閥之體積限制,使得此類的儀器設備難以縮小其整體裝置的體積,即難以實現薄型化之目標,更無法使之達成可攜式之目的。此外,該等傳統馬達及流體閥於作動時亦會產生噪音、散熱差之問題,導致使用上的不便利及不舒適。For example, in the pharmaceutical industry, many instruments or devices that require pneumatic power, such as sphygmomanometers, or portable, wearable instruments or equipment, are usually equipped with conventional motors and pneumatic valves. Achieve the purpose of its fluid transport. However, limited by the volume limitations of conventional motors and fluid valves, it is difficult for such instruments to reduce the size of their overall devices, that is, it is difficult to achieve the goal of thinning, and it is impossible to achieve portable purposes. In addition, these conventional motors and fluid valves also cause noise and poor heat dissipation during operation, resulting in inconvenience and discomfort in use.

因此,如何發展一種可改善上述習知技術缺失,可使傳統採用氣壓動力驅動的儀器或設備達到體積小、微型化且靜音、更能提升導熱性快速散熱,進而達成輕便舒適之可攜式目的之致動器,實為目前迫切需要解決之問題。Therefore, how to develop a kind of conventional technology that can improve the above-mentioned conventional technology, can make the traditional instrument or equipment driven by pneumatic power to achieve small size, miniaturization and mute, and can further improve the thermal conductivity and heat dissipation, thereby achieving portable and portable purposes. The actuator is an urgent problem to be solved.

本案之主要目的在於提供一種致動器,具有一壓電片結合一懸浮板設計,藉由壓電片高頻作動產生的流體波動,於設計後之流道中產生壓力梯度,而使流體高速流動,且透過流道進出方向之阻抗差異,將流體由吸入端傳輸至排出端,俾解決習知技術之採用氣壓動力驅動的儀器或設備所具備之體積大、難以薄型化、無法達成可攜式之目的,以及噪音大等缺失。The main purpose of the present invention is to provide an actuator having a piezoelectric plate combined with a suspension plate design, and the fluid fluctuation generated by the high-frequency operation of the piezoelectric piece generates a pressure gradient in the designed flow channel, so that the fluid flows at a high speed. And the fluid is transmitted from the suction end to the discharge end through the difference in the impedance of the flow path in and out, and the apparatus or equipment using the pneumatic power drive of the prior art has a large volume, is difficult to be thin, and cannot achieve a portable type. The purpose, as well as the lack of noise and so on.

本案之另一目的在於提供一種致動器,該壓電片具有摻雜石墨烯材所合成銀鈀合金之兩電極,能夠降低阻抗增加電荷移動速度、提升導熱性達成快速散熱,且其中一電極之表層塗佈一摻雜石墨烯材所合成塗料之導熱層,也可升導熱性達成快速散熱,而另一電極塗佈一摻雜石墨烯材所合成環氧樹脂膠之黏貼層,供與該懸浮板之第一表面貼附黏著,也可以降低阻抗增加電荷移動速度、提升導熱性達成快速散熱,如此構成致動器能夠最佳導電驅動性,也能提升導熱性而達成快速散熱之目的。Another object of the present invention is to provide an actuator having two electrodes of a silver-palladium alloy doped with a graphene material, which can reduce the impedance, increase the charge moving speed, and improve the thermal conductivity to achieve rapid heat dissipation, and one of the electrodes The surface layer is coated with a heat-conducting layer of a paint doped with a graphene-doped material, and the thermal conductivity can be increased to achieve rapid heat dissipation, and the other electrode is coated with an adhesive layer of epoxy resin glue synthesized by the doped graphene material. The first surface of the suspension plate is adhered to the adhesive, and the impedance can be increased to increase the speed of charge movement and the thermal conductivity can be improved to achieve rapid heat dissipation. Thus, the actuator can optimally drive and improve thermal conductivity for rapid heat dissipation. .

為達上述目的,本案之較廣義實施態樣為提供一種致動器,包含:一懸浮板,具有一第一表面及一第二表面,且可彎曲振動;一外框,環繞設置於該懸浮板之外側;至少一支架,連接於該懸浮板與該外框之間,以提供彈性支撐;以及一壓電片,由鋯鈦酸鉛系列的壓電粉末摻雜石墨烯製成,且石墨烯之重量百分比介於0.1%至20%之間,供與該懸浮板之第一表面貼附黏著施加電壓得以驅動該懸浮板彎曲振動。In order to achieve the above object, a broader embodiment of the present invention provides an actuator comprising: a suspension plate having a first surface and a second surface and being bendable and vibrating; and an outer frame surrounding the suspension An outer side of the plate; at least one bracket connected between the suspension plate and the outer frame to provide elastic support; and a piezoelectric piece made of piezoelectric powder doped graphene of lead zirconate titanate series, and graphite The weight percentage of the olefin is between 0.1% and 20%, and the adhesion voltage is applied to the first surface of the suspension plate to drive the suspension plate to bend and vibrate.

體現本案特徵與優點的一些典型實施例將在後段的說明中詳細敘述。應理解的是本案能夠在不同的態樣上具有各種的變化,其皆不脫離本案的範圍,且其中的說明及圖示在本質上當作說明之用,而非用以限制本案。Some exemplary embodiments embodying the features and advantages of the present invention are described in detail in the following description. It is to be understood that the present invention is capable of various modifications in various embodiments, and is not intended to limit the scope of the invention.

請參閱第1圖、第2圖及第4圖所示,致動器1主要包括一懸浮板11、一外框12、至少一支架13以及一壓電片14。其中,懸浮板11具有一第一表面11c及一第二表面11b,且可彎曲振動;一外框12,環繞設置於懸浮板11之外側;以及至少一支架13連接於懸浮板11與外框12之間,於本實施例中,每一個支架13 之兩端點係分別連接於外框12、懸浮板11之間,以提供彈性支撐,且於支架13、懸浮板11及外框12之間更具有至少一空隙15,該至少一空隙15係用以供氣體流通。應強調的是,懸浮板11、外框12以及支架13之型態及數量不以前述實施例為限,且可依實際應用需求變化。另外,外框12係環繞設置於懸浮板11之外側,且具有一向外凸設之導電接腳12c,用以供電連接之用,但不以此為限。Referring to FIGS. 1 , 2 , and 4 , the actuator 1 mainly includes a suspension plate 11 , an outer frame 12 , at least one bracket 13 , and a piezoelectric piece 14 . The suspension plate 11 has a first surface 11c and a second surface 11b and is bendable and vibrating; an outer frame 12 is disposed around the outer side of the suspension plate 11; and at least one bracket 13 is connected to the suspension plate 11 and the outer frame. 12, in this embodiment, the two ends of each bracket 13 are respectively connected between the outer frame 12 and the suspension plate 11 to provide elastic support, and are disposed on the bracket 13, the suspension plate 11 and the outer frame 12. There is at least one gap 15 between the openings 15 for gas circulation. It should be emphasized that the type and number of the suspension plate 11, the outer frame 12 and the bracket 13 are not limited to the foregoing embodiments, and may be changed according to actual application requirements. In addition, the outer frame 12 is disposed on the outer side of the suspension plate 11 and has an outwardly protruding conductive pin 12c for power connection, but is not limited thereto.

本實施例之懸浮板11係為一階梯面之結構(如第3圖所示),意即於懸浮板11之第二表面11b更具有一凸部11a,該凸部11a可為但不限為一圓形凸起結構。懸浮板11之凸部11a係與外框12之第二表面12a共平面,且懸浮板11之第二表面11b及支架13之第二表面13a亦為共平面,且該懸浮板11之凸部11a及外框12之第二表面12a與懸浮板11之第二表面11b及支架13之第二表面13a之間係具有一特定深度。懸浮板11之第一表面11c,其與外框12之第一表面12b及支架13之第一表面13b為平整之共平面結構,但均不以此為限。The suspension plate 11 of the embodiment is a stepped surface structure (as shown in FIG. 3), that is, the second surface 11b of the suspension plate 11 further has a convex portion 11a, which may be, but is not limited to, It is a circular convex structure. The convex portion 11a of the suspension plate 11 is coplanar with the second surface 12a of the outer frame 12, and the second surface 11b of the suspension plate 11 and the second surface 13a of the bracket 13 are also coplanar, and the convex portion of the suspension plate 11 11a and the second surface 12a of the outer frame 12 and the second surface 11b of the suspension plate 11 and the second surface 13a of the bracket 13 have a specific depth. The first surface 11c of the suspension plate 11 is flush with the first surface 12b of the outer frame 12 and the first surface 13b of the bracket 13, but is not limited thereto.

本實施例之壓電片14則貼附於此平整之懸浮板11之第一表面11c處,但不以此為限。於另一些實施例中,懸浮板11之型態亦可為一雙面平整之板狀正方形結構,並不以此為限,可依照實際施作情形而任施變化。於一些實施例中,懸浮板11、支架13以及外框12係可為一體成型之結構,且可由一金屬板所構成,例如但不限於不鏽鋼材質所構成。又於另一些實施例中,壓電片14之邊長係小於該懸浮板11之邊長。再於另一些實施例中,壓電片14之邊長係等於懸浮板11之邊長,且同樣設計為與懸浮板11相對應之正方形板狀結構,但並不以此為限。又,本實施例之壓電片14係由鋯鈦酸鉛 (Lead Zirconate Titanate, PZT) 系列的壓電粉末摻雜石墨烯(Graphene)混和製成,且石墨烯係以重量百分比介於0.1%至20%之間進行混和摻雜為較佳,透過鋯鈦酸鉛的優良壓電特性,可使懸浮板11達到極佳的壓電驅動效果。本實施例之壓電片14具有摻雜石墨烯材所合成銀鈀合金之兩電極14a、14b,且兩電極14a、14b能夠降低阻抗增加電荷移動速度、提升導熱性達成快速散熱,其中一電極14a之表層塗佈一摻雜石墨烯材所合成塗料之導熱層14c,也可提升導熱性達成快速散熱,而另一電極14b塗佈一摻雜石墨烯材所合成環氧樹脂膠之黏貼層14d,供與懸浮板11之第一表面11c貼附黏著,也可以降低阻抗增加電荷移動速度、提升導熱性達成快速散熱,而電極14a、14b施加電壓得以驅動懸浮板11彎曲振動。The piezoelectric sheet 14 of the present embodiment is attached to the first surface 11c of the flat suspension plate 11, but is not limited thereto. In other embodiments, the shape of the suspension plate 11 may also be a double-sided flat plate-like square structure, and is not limited thereto, and may be changed according to actual application conditions. In some embodiments, the suspension plate 11, the bracket 13 and the outer frame 12 may be an integrally formed structure, and may be composed of a metal plate such as, but not limited to, a stainless steel material. In still other embodiments, the length of the side of the piezoelectric sheet 14 is smaller than the length of the side of the suspension plate 11. In other embodiments, the length of the piezoelectric sheet 14 is equal to the length of the side of the suspension plate 11, and is also designed as a square plate structure corresponding to the suspension plate 11, but is not limited thereto. Moreover, the piezoelectric sheet 14 of the present embodiment is made of a piezoelectric powder doped graphene (Graphene) of Lead Zirconate Titanate (PZT) series, and the graphene is 0.1% by weight. It is preferable to carry out the mixed doping to 20%, and the excellent piezoelectric characteristics of the lead zirconate titanate can make the suspension plate 11 achieve an excellent piezoelectric driving effect. The piezoelectric sheet 14 of the present embodiment has two electrodes 14a, 14b doped with a silver-palladium alloy synthesized by a graphene material, and the two electrodes 14a, 14b can reduce the impedance, increase the charge moving speed, and improve the thermal conductivity to achieve rapid heat dissipation, wherein one electrode The surface layer of 14a is coated with a heat conductive layer 14c of a paint doped with a graphene material, which can also improve thermal conductivity to achieve rapid heat dissipation, and the other electrode 14b is coated with an adhesive layer of epoxy resin glue synthesized by doping graphene material. 14d, for adhering to the first surface 11c of the suspension plate 11, the impedance can be increased to increase the speed of charge movement, and the thermal conductivity can be improved to achieve rapid heat dissipation, and the electrodes 14a, 14b apply a voltage to drive the suspension plate 11 to bend and vibrate.

請同時参閱第1圖、第2圖,如圖所示,本案之致動器1進一步包含一進氣板16、一共振片17、絕緣片18a、18b及導電片19等結構,其中懸浮板11對應於共振片17而設置,並使進氣板16、共振片17、外框12、絕緣片18a、導電片19及另一絕緣片18b等依序堆疊設置,其組裝完成之剖面圖係如第4圖所示。Please refer to FIG. 1 and FIG. 2 at the same time. As shown in the figure, the actuator 1 of the present invention further includes an air inlet plate 16, a resonance piece 17, insulating sheets 18a and 18b, and a conductive piece 19, and the like. The plate 11 is disposed corresponding to the resonance plate 17, and the air intake plate 16, the resonance plate 17, the outer frame 12, the insulating sheet 18a, the conductive sheet 19, and the other insulating sheet 18b are sequentially stacked, and the assembly is completed. As shown in Figure 4.

請繼續參閱第1圖、第2圖,如第1圖所示,於本實施例中,進氣板16具有至少一進氣孔16a,其中進氣孔16a之數量以4個為較佳,但不以此為限。進氣孔16a係貫穿進氣板16,用以供氣體自裝置外順應大氣壓力之作用而自該至少一進氣孔16a流入。如第2圖所示,進氣板16上具有至少一匯流排孔16b,於匯流排孔16b的中心交流處係具有中心凹部16c,且中心凹部16c係與匯流排孔16b相連通,而進氣板16具有表面塗佈一摻雜石墨烯材所合成塗料之第一表面16d,可提升導熱性達成快速散熱,且在第一表面16d之至少一進氣孔16a對應設置至少一匯流排孔16b,藉此可將自該至少一進氣孔16a進入匯流排孔16b之氣體引導並匯流集中至中心凹部16c,以實現氣體傳遞。於本實施例中,進氣板16具有一體成型的進氣孔16a、匯流排孔16b及中心凹部16c,且於中心凹部16c處即對應形成一匯流氣體的匯流腔室,以供氣體暫存。於一些實施例中,進氣板16之材質可為不鏽鋼材質所構成,但不以此為限。於另一些實施例中,由該中心凹部16c處所構成之匯流腔室之深度與匯流排孔16b之深度相同,但不以此為限。共振片17係由一可撓性材質所構成,但不以此為限,且於共振片17上具有一中空孔洞17c,係對應於進氣板16之中心凹部16c而設置,以使氣體流通。於另一些實施例中,共振片17係可由一銅材質所構成,但不以此為限。Please refer to FIG. 1 and FIG. 2 . As shown in FIG. 1 , in the embodiment, the air inlet plate 16 has at least one air inlet hole 16 a , and the number of the air inlet holes 16 a is preferably four. But not limited to this. The air inlet hole 16a penetrates through the air inlet plate 16 for allowing gas to flow from the at least one air inlet hole 16a from the outside of the device in response to atmospheric pressure. As shown in FIG. 2, the air inlet plate 16 has at least one bus bar hole 16b, and has a central recess 16c at the center AC of the bus bar hole 16b, and the central recess 16c communicates with the bus bar hole 16b. The gas plate 16 has a first surface 16d coated with a surface of a doped graphene material, which can improve the thermal conductivity to achieve rapid heat dissipation, and at least one inlet hole 16a of the first surface 16d is correspondingly provided with at least one bus hole. 16b, whereby the gas entering the busbar hole 16b from the at least one intake hole 16a is guided and concentrated to the central recess 16c to effect gas transfer. In the present embodiment, the air inlet plate 16 has an integrally formed air inlet hole 16a, a bus bar hole 16b and a central recess 16c, and a confluent chamber corresponding to a confluent gas is formed at the central recess 16c for temporary gas storage. . In some embodiments, the material of the air inlet plate 16 may be made of stainless steel, but not limited thereto. In other embodiments, the depth of the confluence chamber formed by the central recess 16c is the same as the depth of the bus bar hole 16b, but is not limited thereto. The resonator piece 17 is made of a flexible material, but not limited thereto, and has a hollow hole 17c in the resonance piece 17, which is disposed corresponding to the central recess 16c of the air inlet plate 16 to allow gas to circulate. . In other embodiments, the resonator 17 can be made of a copper material, but is not limited thereto.

於本實施例中,如第1圖、第2圖及第4A圖所示,本實施例之絕緣片18a、導電片19及另一絕緣片18b係依序對應設置於外框12之下,且其形態大致上對應於外框12之形態。於一些實施例中,絕緣片18a、134b係由絕緣材質所構成,例如但不限於塑膠,俾提供絕緣功能。於另一些實施例中,導電片19可由導電材質所構成,例如但不限於金屬材質,以提供電導通功能。於本實施例中,導電片19上亦可設置一導電接腳19a,以實現電導通功能,上述之導電接腳12c與壓電片14之一電極14a電性連接,而導電接腳19a與壓電片14之另一電極14b電性連接,但不以此為限。In the present embodiment, as shown in FIG. 1 , FIG. 2 , and FIG. 4A , the insulating sheet 18 a , the conductive sheet 19 , and the other insulating sheet 18 b of the present embodiment are sequentially disposed under the outer frame 12 , And its shape substantially corresponds to the form of the outer frame 12. In some embodiments, the insulating sheets 18a, 134b are made of an insulating material such as, but not limited to, plastic, which provides an insulating function. In other embodiments, the conductive sheet 19 may be formed of a conductive material such as, but not limited to, a metal material to provide an electrical conduction function. In this embodiment, a conductive pin 19a may be disposed on the conductive sheet 19 to achieve an electrical conduction function. The conductive pin 12c is electrically connected to one of the electrodes 14a of the piezoelectric piece 14, and the conductive pin 19a is electrically connected. The other electrode 14b of the piezoelectric piece 14 is electrically connected, but not limited thereto.

於本實施例中,如第4圖所示,依序以進氣板16、共振片17、外框12、絕緣片18a、導電片19及另一絕緣片18b堆疊形成一可供流體輸送之裝置,且於共振片17與外框12之間係具有一間隙h,於本實施例中,係於共振片17及外框12周緣之間的間隙h中填入一填充材質,例如但不限於導電膠,以使共振片17與懸浮板11之凸部11a之間可維持該間隙h之深度,進而可導引氣流更迅速地流動,且因懸浮板11之凸部11a與共振片17保持適當距離使彼此接觸干涉減少,促使噪音產生可被降低。於另一些實施例中,亦可藉由加高外框12之高度,以使其與共振片17組裝時增加一間隙,但不以此為限。In the present embodiment, as shown in FIG. 4, the air intake plate 16, the resonance plate 17, the outer frame 12, the insulating sheet 18a, the conductive sheet 19 and the other insulating sheet 18b are sequentially stacked to form a fluid transportable body. The device has a gap h between the resonator 17 and the outer frame 12. In the embodiment, a gap h is filled between the resonator 17 and the periphery of the outer frame 12, for example, but not The conductive paste is limited to maintain the depth of the gap h between the resonator piece 17 and the convex portion 11a of the suspension plate 11, thereby guiding the airflow to flow more rapidly, and the convex portion 11a and the resonance piece 17 of the suspension plate 11 Maintaining an appropriate distance reduces contact interference with each other, causing noise generation to be reduced. In other embodiments, the height of the outer frame 12 can be increased to increase a gap when assembled with the resonant piece 17, but not limited thereto.

請參閱第1圖及第2圖、第4圖所示,於本實施例中,當進氣板16、共振片17與外框12依序對應組裝後,於共振片17具有一可動部17a及一固定部17b,可動部17a處可與其上的進氣板16共同形成一匯流氣體的腔室,且在共振片17與懸浮板11、支架13、外框12之間更形成一第一腔室10,用以暫存氣體,且第一腔室10係透過共振片17之中空孔洞17c而與進氣板16之中心凹部16c處的匯流腔室相連通,且第一腔室10之兩側則由支架13的空隙15而與流體通道相連通。Referring to FIG. 1 and FIG. 2 and FIG. 4, in the present embodiment, after the air inlet plate 16, the resonance piece 17, and the outer frame 12 are sequentially assembled, the movable piece 17 has a movable portion 17a. And a fixing portion 17b, the movable portion 17a can form a chamber for the confluent gas together with the air inlet plate 16 thereon, and form a first between the resonance piece 17 and the suspension plate 11, the bracket 13, and the outer frame 12. The chamber 10 is configured to temporarily store gas, and the first chamber 10 is transmitted through the hollow hole 17c of the resonator piece 17 to communicate with the confluence chamber at the central recess 16c of the air inlet plate 16, and the first chamber 10 is Both sides communicate with the fluid passage by the gap 15 of the bracket 13.

請參閱第1圖、第2圖、第4圖、第5A圖至第5E圖,當壓電片14受電壓致動而以支架13為支點,進行垂直方向之往復式振動。如第5A圖所示,當壓電片14受電壓致動而向下振動時,由於共振片17係為輕、薄之片狀結構,是以當壓電片14振動時,共振片17亦會隨之共振而進行垂直之往復式振動,即為共振片17對應中心凹部16c的部分亦會隨之彎曲振動形變,即該對應中心凹部16c的部分係為共振片17之可動部17a,是以當壓電片14向下彎曲振動時,此時共振片17對應中心凹部16c的可動部17a會因氣體的帶入及推壓以及壓電片14振動之帶動,而隨著壓電片14向下彎曲振動形變,則氣體由進氣板16上的至少一進氣孔16a進入,並透過至少一匯流排孔16b以匯集到中央的中心凹部16c處,再經由共振片17上與中心凹部16c對應設置的中空孔洞17c流入至第一腔室10中。其後,由於受壓電片14振動之帶動,共振片17亦會隨之共振而進行垂直之往復式振動,如第5B圖所示,此時共振片17之可動部17a亦隨之向下振動,並貼附抵觸於懸浮板11之凸部11a上,使懸浮板11之凸部11a以外的區域與共振片17兩側之固定部17b之間的匯流腔室的間距不會變小,並藉由此共振片17之形變,以壓縮第一腔室10之體積,並關閉第一腔室10中間流通空間,促使其內的氣體推擠向兩側流動,進而經過壓電片14之支架13之間的空隙15而向下穿越流動。之後,如第5C圖所示,共振片17之可動部17a向上彎曲振動形變,而回復至初始位置,且壓電片14受電壓驅動以向上振動,如此同樣擠壓第一腔室10之體積,惟此時由於懸浮板11係向上抬升,因而使得第一腔室10內的氣體會朝兩側流動,而氣體持續地自進氣板16上的至少一進氣孔16a進入,再流入中心凹部16c所形成之匯流腔室中。之後,如第5D圖所示,該共振片17受懸浮板11向上抬升的振動而共振向上,此時共振片17之可動部17a亦隨之向上振動,進而減緩氣體持續地自進氣板16上的至少一進氣孔16a進入,再流入中心凹部16c所形成之匯流腔室中。最後,如第5E圖所示,共振片17之可動部17a亦回復至初始位置,由此實施態樣可知,當共振片17進行垂直之往復式振動時,係可由其與外框12之間的間隙h以增加其垂直位移的最大距離,換句話說,於該兩結構之間設置間隙h可使共振片17於共振時可產生更大幅度的上下位移。是以,在經此流體致動器13之流道設計中產生壓力梯度,使氣體高速流動,並透過流道進出方向之阻抗差異,將氣體由吸入端傳輸至排出端,以完成氣體輸送作業,即使在排出端有氣壓之狀態下,仍有能力持續將氣體推入流體通道,並可達到靜音之效果,如此重覆第5A至5E圖之作動,即可產生一由外向內的氣體傳輸。Referring to Fig. 1, Fig. 2, Fig. 4, and Figs. 5A to 5E, when the piezoelectric piece 14 is actuated by voltage and the holder 13 is used as a fulcrum, reciprocating vibration in the vertical direction is performed. As shown in FIG. 5A, when the piezoelectric piece 14 is vibrated downward by the voltage, the resonance piece 17 is a light and thin sheet-like structure, and when the piezoelectric piece 14 vibrates, the resonance piece 17 is also The vertical reciprocating vibration is performed in response to the resonance, that is, the portion of the resonance piece 17 corresponding to the central concave portion 16c is also flexurally deformed, that is, the portion corresponding to the central concave portion 16c is the movable portion 17a of the resonance piece 17, When the piezoelectric piece 14 is bent downward and vibrated, the movable portion 17a of the resonance piece 17 corresponding to the central recessed portion 16c is driven by the introduction and pushing of the gas and the vibration of the piezoelectric piece 14 with the piezoelectric piece 14 The vibration is deformed downward, and the gas enters through at least one air inlet hole 16a of the air intake plate 16 and passes through at least one bus bar hole 16b to be collected at the central central recess 16c, and then via the resonance piece 17 and the central concave portion. The hollow hole 17c corresponding to the 16c flows into the first chamber 10. Thereafter, due to the vibration of the piezoelectric piece 14, the resonance piece 17 also resonates to perform vertical reciprocating vibration. As shown in Fig. 5B, the movable portion 17a of the resonance piece 17 is also downward. Vibrating and attaching against the convex portion 11a of the suspension plate 11 so that the distance between the region other than the convex portion 11a of the suspension plate 11 and the fixing portion 17b on both sides of the resonance piece 17 does not become small. And by the deformation of the resonance piece 17, the volume of the first chamber 10 is compressed, and the intermediate circulation space of the first chamber 10 is closed, so that the gas in the chamber is pushed to flow to both sides, and then passes through the piezoelectric sheet 14. The gap 15 between the brackets 13 flows downward through the flow. Thereafter, as shown in Fig. 5C, the movable portion 17a of the resonance piece 17 is bent and vibrated upward to return to the initial position, and the piezoelectric piece 14 is driven by the voltage to vibrate upward, so that the volume of the first chamber 10 is also pressed. However, at this time, since the suspension plate 11 is lifted upward, the gas in the first chamber 10 flows toward both sides, and the gas continuously enters from at least one intake hole 16a on the air inlet plate 16 and flows into the center. The recess 16c is formed in the confluence chamber. Thereafter, as shown in FIG. 5D, the resonance piece 17 is resonated upward by the vibration of the suspension plate 11 rising upward, and the movable portion 17a of the resonance piece 17 is also vibrated upward, thereby mitigating the gas continuously from the air intake plate 16. At least one of the upper intake holes 16a enters and flows into the confluent chamber formed by the central recess 16c. Finally, as shown in FIG. 5E, the movable portion 17a of the resonator piece 17 also returns to the initial position. From this embodiment, it can be seen that when the resonator piece 17 performs vertical reciprocating vibration, it can be between the frame and the outer frame 12. The gap h is increased by the maximum distance of the vertical displacement. In other words, the provision of the gap h between the two structures allows the resonator piece 17 to generate a larger vertical displacement when resonating. Therefore, a pressure gradient is generated in the flow path design of the fluid actuator 13 to make the gas flow at a high speed, and the gas is transmitted from the suction end to the discharge end through the difference in impedance of the flow path in and out of the flow path to complete the gas transfer operation. Even if there is air pressure at the discharge end, there is still the ability to continuously push the gas into the fluid passage, and the effect of mute can be achieved. Thus, the operation of the 5A to 5E is repeated to generate an externally-inward gas transmission. .

綜上所述,本案所提供之致動器,藉由壓電片高頻作動產生的流體波動,於設計後之流道中產生壓力梯度,而使流體高速流動,且透過流道進出方向之阻抗差異,將流體由吸入端傳輸至排出端,進而使流體高速流動,並可繼續傳遞,以達到可使流體迅速地傳輸,且同時達到靜音之功效,更可使致動器之整體體積減小及薄型化,以達到輕便舒適之可攜式目的。此外,本案透過於進氣板之表面、壓電板電極塗佈鋯鈦酸鉛摻雜石墨烯材所合成塗料,進而達到絕佳的散熱、壓電效果。是以,本案極具產業利用價值,爰依法提出申請。In summary, the actuator provided in the present invention generates a pressure gradient in the flow channel after design by the fluid fluctuation generated by the high-frequency operation of the piezoelectric piece, and causes the fluid to flow at a high speed and penetrates the impedance of the flow path. The difference is that the fluid is transferred from the suction end to the discharge end, so that the fluid flows at a high speed, and can continue to be transmitted, so that the fluid can be quickly transported, and at the same time, the effect of mute can be achieved, and the overall volume of the actuator can be reduced. And thin, to achieve the purpose of portable and lightweight. In addition, in this case, the coating of the lead zirconate titanate doped graphene material is coated on the surface of the air inlet plate and the piezoelectric plate electrode, thereby achieving excellent heat dissipation and piezoelectric effect. Therefore, this case is of great industrial use value and is submitted in accordance with the law.

本案得由熟習此技術之人士任施匠思而為諸般修飾,然皆不脫如附申請專利範圍所欲保護者。This case has been modified by people who are familiar with the technology, but it is not intended to be protected by the scope of the patent application.

1‧‧‧致動器
10‧‧‧第一腔室
11‧‧‧懸浮板
11a‧‧‧凸部
11b‧‧‧第二表面
11c‧‧‧第一表面
12‧‧‧外框
12a‧‧‧第二表面
12b‧‧‧第一表面
12c‧‧‧導電接腳
13‧‧‧支架
13a‧‧‧第二表面
13b‧‧‧第一表面
14‧‧‧壓電片
14a、14b‧‧‧電極
14c‧‧‧導熱層
14d‧‧‧黏貼層
15‧‧‧空隙
16‧‧‧進氣板
16a‧‧‧進氣孔
16b‧‧‧匯流排孔
16c‧‧‧中心凹部
16d‧‧‧第一表面
17‧‧‧共振片
17a‧‧‧可動部
17b‧‧‧固定部
17c‧‧‧中空孔洞
18a、18b‧‧‧絕緣片
19‧‧‧導電片
19a‧‧‧導電接腳
h‧‧‧間隙
1‧‧‧Actuator
10‧‧‧ first chamber
11‧‧‧suspension plate
11a‧‧‧ convex
11b‧‧‧ second surface
11c‧‧‧ first surface
12‧‧‧Front frame
12a‧‧‧second surface
12b‧‧‧ first surface
12c‧‧‧Electrical pins
13‧‧‧ bracket
13a‧‧‧ second surface
13b‧‧‧ first surface
14‧‧‧ Piezo Pieces
14a, 14b‧‧‧ electrodes
14c‧‧‧thermal layer
14d‧‧‧Adhesive layer
15‧‧‧ gap
16‧‧‧Air intake plate
16a‧‧‧Air intake
16b‧‧‧ bus bar hole
16c‧‧‧Center recess
16d‧‧‧ first surface
17‧‧‧Resonance film
17a‧‧‧movable department
17b‧‧‧Fixed Department
17c‧‧‧ hollow holes
18a, 18b‧‧‧Insulation
19‧‧‧Conductor
19a‧‧‧Electrical pins
H‧‧‧ gap

第1圖所示為本案致動器搭配進氣板、共振片、進氣板、第一絕緣片、導電片及第二絕緣片於正面視角視得分解結構示意圖。 第2圖所示為本案致動器搭配進氣板、共振片、進氣板、第一絕緣片、導電片及第二絕緣片於背面視角視得分解結構示意圖。 第3圖所示為本案致動器之壓電片及懸浮板、支架及外框相關配置關係之剖面結構及局部放大示意圖。 第4圖所示為本案致動器搭配進氣板、共振片、進氣板、第一絕緣片、導電片及第二絕緣片之剖面結構示意圖。 第5A至5E圖所示為第4圖所示之致動器之作動流程結構圖。Fig. 1 is a schematic view showing the exploded structure of the actuator in combination with the air inlet plate, the resonance plate, the air inlet plate, the first insulating sheet, the conductive sheet and the second insulating sheet in front view. Fig. 2 is a schematic view showing the exploded structure of the actuator in combination with the air inlet plate, the resonance plate, the air inlet plate, the first insulating sheet, the conductive sheet and the second insulating sheet in the back view. Fig. 3 is a cross-sectional view showing a cross-sectional structure and a partial enlarged view of the piezoelectric plate and the suspension plate, the bracket and the outer frame of the actuator of the present invention. Fig. 4 is a schematic cross-sectional view showing the actuator with the air inlet plate, the resonance plate, the air inlet plate, the first insulating sheet, the conductive sheet and the second insulating sheet. Fig. 5A to Fig. 5E are diagrams showing the operation flow chart of the actuator shown in Fig. 4.

11‧‧‧懸浮板 11‧‧‧suspension plate

11a‧‧‧凸部 11a‧‧‧ convex

11b‧‧‧第二表面 11b‧‧‧ second surface

11c‧‧‧第一表面 11c‧‧‧ first surface

12‧‧‧外框 12‧‧‧Front frame

12a‧‧‧第二表面 12a‧‧‧second surface

12b‧‧‧第一表面 12b‧‧‧ first surface

13‧‧‧支架 13‧‧‧ bracket

13a‧‧‧第二表面 13a‧‧‧ second surface

13b‧‧‧第一表面 13b‧‧‧ first surface

14‧‧‧壓電片 14‧‧‧ Piezo Pieces

14a、14b‧‧‧電極 14a, 14b‧‧‧ electrodes

14c‧‧‧導熱層 14c‧‧‧thermal layer

14d‧‧‧黏貼層 14d‧‧‧Adhesive layer

15‧‧‧空隙 15‧‧‧ gap

Claims (6)

一種致動器,包含: 一懸浮板,具有一第一表面及一第二表面,且可彎曲振動; 一外框,環繞設置於該懸浮板之外側; 至少一支架,連接於該懸浮板與該外框之間,以提供彈性支撐;以及 一壓電片,由鋯鈦酸鉛系列的壓電粉末摻雜石墨烯製成,且石墨烯之重量百分比介於0.1%至20%之間,供與該懸浮板之第一表面貼附黏著,施加電壓得以驅動該懸浮板彎曲振動。An actuator comprising: a suspension plate having a first surface and a second surface and being bendable and vibrating; an outer frame disposed around the outer side of the suspension plate; at least one bracket coupled to the suspension plate and Between the outer frames, to provide elastic support; and a piezoelectric sheet made of piezoelectric powder doped graphene of the lead zirconate titanate series, and the weight percentage of graphene is between 0.1% and 20%, Providing adhesion to the first surface of the suspension plate, and applying a voltage to drive the suspension plate to bend and vibrate. 如申請專利範圍第1項所述之致動器,其中該壓電片具有摻雜石墨烯材所合成銀鈀合金之兩電極,其中一電極之表層塗佈摻雜石墨烯材所合成塗料之一導熱層,而另一電極之表層塗佈摻雜石墨烯材所合成環氧樹脂膠之一黏貼層,供與該懸浮板之該第一表面貼附黏著。The actuator of claim 1, wherein the piezoelectric sheet has two electrodes of a silver-palladium alloy doped with a graphene material, wherein a surface layer of one electrode is coated with a coating material doped with a graphene material. a thermally conductive layer, and the surface layer of the other electrode is coated with an adhesive layer of the epoxy resin glue synthesized by the doped graphene material for adhering to the first surface of the suspension plate. 如申請專利範圍第1項所述之致動器,進一步包含:   一進氣板,設置於該懸浮板之該第二表面側,具有至少一進氣孔、至少一匯流排孔及構成一匯流腔室及一中心凹部,其中該至少一進氣孔供導入氣流,該匯流排孔對應該進氣孔,且引導該進氣孔之氣流匯流至該中心凹部所構成之該匯流腔室;   一共振片,設置於該進氣板與該懸浮板之間,具有一中空孔洞對應於該匯流腔室,且該中空孔洞之周圍為一可動部;以及   其中,該共振片與該懸浮板、該支架、該外框之間具有一間隙形成一第一腔室,以使該壓電片受驅動而彎曲該懸浮板振動時,使氣流由該進氣板之該至少一進氣孔導入,經該至少一匯流排孔匯集至該中心凹部,再流經該共振片之該中空孔洞,以進入該第一腔室內,由該懸浮板與該共振片之可動部產生共振傳輸氣流。The actuator of claim 1, further comprising: an air inlet plate disposed on the second surface side of the suspension plate, having at least one air inlet hole, at least one bus bar hole, and forming a confluence a chamber and a central recess, wherein the at least one air inlet is for introducing a gas flow, the bus hole corresponding to the air inlet, and the air flow guiding the air inlet is merged to the confluence chamber formed by the central recess; a resonance piece disposed between the air inlet plate and the suspension plate, having a hollow hole corresponding to the confluence chamber, wherein the hollow hole is surrounded by a movable portion; and wherein the resonance piece and the suspension plate, the a gap is formed between the bracket and the outer frame to form a first chamber, so that the piezoelectric piece is driven to bend the floating plate to vibrate, and the air flow is introduced from the at least one air inlet hole of the air inlet plate. The at least one bus bar hole is collected into the central recess and then flows through the hollow hole of the resonant piece to enter the first cavity, and the floating plate and the movable portion of the resonant piece generate a resonant transmission airflow. 如申請專利範圍第3項所述之致動器,其中該進氣板具有一第一表面,該第一表面塗佈一摻雜石墨烯材所合成塗料。The actuator of claim 3, wherein the air inlet plate has a first surface coated with a paint doped with a graphene-doped material. 如申請專利範圍第3項所述之致動器,其中該懸浮板為一正方形,並具有一凸部。The actuator of claim 3, wherein the suspension plate has a square shape and has a convex portion. 如申請專利範圍第3項所述之致動器,其中該致動器進一步包括:一導電片、一第一絕緣片以及一第二絕緣片,其中該進氣板、該共振片、該外框、該第一絕緣片、該導電片及該第二絕緣片係依序堆疊設置。The actuator of claim 3, wherein the actuator further comprises: a conductive sheet, a first insulating sheet, and a second insulating sheet, wherein the air inlet plate, the resonant plate, and the outer portion The frame, the first insulating sheet, the conductive sheet and the second insulating sheet are stacked in sequence.
TW106212406U 2017-08-22 2017-08-22 Actuator TWM553498U (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI650482B (en) * 2017-08-22 2019-02-11 研能科技股份有限公司 Actuator
TWI725602B (en) * 2019-11-04 2021-04-21 科際精密股份有限公司 Actuation device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI650482B (en) * 2017-08-22 2019-02-11 研能科技股份有限公司 Actuator
TWI725602B (en) * 2019-11-04 2021-04-21 科際精密股份有限公司 Actuation device

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