TWI725602B - Actuation device - Google Patents

Abstract

An actuating device includes an actuation part, a piezoelectric unit, a bearing part, an adjustment layer, a conduction unit and a perforated sheet. The actuation part includes a first actuation area, a second actuation area and at least one connecting section. The piezoelectric unit includes a first through hole, a first signal area and a second signal area, and the two signal areas are electrically insulated from each other. The bearing part and the piezoelectric unit are located on the same plane. The adjustment layer is located on the same side surface of the piezoelectric unit and the loading part. The conduction unit includes a first conduction area, a second conduction area, and a second through hole. The first signal area of the piezoelectric unit is electrically connected to the first conduction area of the conduction unit, and the second signal area of the piezoelectric unit is electrically connected to The second conduction area of the conduction unit. The perforated sheet is arranged at corresponding positions of the first through hole and the second through hole, and is fixed to the actuating portion after passing through the two through holes.

Description

Actuation device

The present invention relates to an actuating device, in particular to an adjustment layer design that enables the overall composition of the actuating device to have a consistent flatness.

Piezoelectric pump is a new type of fluid driver. It does not require an additional drive motor. The piezoelectric vibrator can be deformed only through the inverse piezoelectric effect of the electroceramic, and then the volume of the pump cavity is changed according to the aforementioned deformation to achieve fluid output, or The piezoelectric vibrator generates fluctuations to transmit fluid, so piezoelectric pumps have gradually replaced traditional pumps and are widely used in electronics, biomedical, aerospace, automotive, and petrochemical industries.

Generally speaking, a piezoelectric pump is composed of a piezoelectric unit and a pump body. When the piezoelectric unit is energized, the piezoelectric unit compresses radially under the action of an electric field, and generates tensile stress in the piezoelectric unit to bend and deform. When the piezoelectric unit is bent forward, the volume of the pump chamber (hereinafter referred to as the pump chamber) will increase, so that the pressure in the pump chamber will decrease, so that the fluid flows into the pump chamber from the inlet. On the other hand, when the piezoelectric unit is bent in the reverse direction, the volume of the pump cavity decreases, so that the pressure in the pump cavity increases, so that the fluid in the pump cavity is squeezed and discharged from the outlet. At present, the signal conductive layer used to supply power to the piezoelectric unit is usually a three-dimensional structure, and is added to the outside of the pump body. The overall volume is relatively large and easily damaged. When the positive and negative electrodes are used for the separate welding process, the reliability of the solder joints is inconsistent. , Changying It affects the quality and performance of the piezoelectric pump. In addition, the solder joint protrusions located on the outside of the pump body are easy to contact with foreign objects, resulting in abnormal pump body function and abnormal noise.

The present invention provides an actuating device, which is mainly provided with an adjustment layer between a bearing part, a piezoelectric unit, a conduction unit and a perforated sheet, and through the internal planar electrical connection of the pump body, the overall appearance and structure of the actuating device are highly flat. , Not only to overcome the problem of reduced reliability of the previous welding process, but also to achieve the purpose of flattening the appearance of the actuator device and miniaturizing the volume through the internal planar electrical connection technology

An actuating device of the present invention includes an actuating part, a piezoelectric unit, a bearing part, an adjustment layer, a conduction unit and a perforated sheet. The actuation part has a first actuation area, a second actuation area, and at least one connecting section between the first actuation area and the second actuation area. The piezoelectric unit has a first through hole, a first signal area and a second signal area, and the first signal area and the second signal area are electrically insulated from each other. The bearing portion and the piezoelectric unit are located on the same side surface of the actuating portion, and both are on the same plane. The piezoelectric unit is arranged in the first actuation area of the actuation portion, and the bearing portion is arranged in the second actuation area of the actuation portion . The adjustment layer is located on the same side of the piezoelectric unit and the loading part. The conduction unit includes a first conduction area, a second conduction area, and a second through hole. The first signal area of the piezoelectric unit is electrically connected to the first conduction area of the conduction unit, and the second signal area of the piezoelectric element is electrically connected. Sexually connected to the second conduction area of the conduction unit. The perforated sheet is arranged at the corresponding positions of the first through hole of the piezoelectric unit and the second through hole of the conductive unit, and is fixed to the actuating portion after being penetrated through the first through hole and the second through hole.

In an embodiment of the present invention, the aforementioned conductive unit further includes an insulating layer, a conductive layer, and a substrate, and the conductive unit is composed of a stack of the insulating layer, the conductive layer, and the substrate.

In an embodiment of the present invention, the aforementioned adjustment layer has conductive properties.

In an embodiment of the present invention, the above-mentioned adjustment layer is used to control the flatness of the overall structure of the actuating device.

In an embodiment of the present invention, the above-mentioned substrate is controlled by the adjustment layer, so that the substrate has a flat surface.

In an embodiment of the present invention, the above-mentioned piezoelectric unit, carrying part, adjustment layer, conductive unit and perforated sheet are all located in the same side direction of the actuating part.

In an embodiment of the present invention, the above-mentioned first conduction area and second conduction area are both located on the same plane.

In an embodiment of the present invention, the first signal area of the piezoelectric unit, the first actuation area of the actuation portion, at least one connecting section, the second actuation area, the carrying portion, the adjustment layer, and the first actuation area of the conduction unit A first conductive path is formed between the conductive regions.

In an embodiment of the present invention, a second conductive path is formed between the second signal region of the piezoelectric unit, the adjustment layer, and the second conductive region of the conductive unit.

Based on the above, the actuating device of the present invention arranges the piezoelectric unit, the carrying portion, the adjustment layer, the conductive unit, and the perforated sheet in the same side direction of the actuating portion, thereby reducing the overall structural height of the actuating device. The adjustment layer is used to control the flatness of the structure of each component of the actuation device, so that the substrate has a flat surface, and the working efficiency of the actuation device is improved and stabilized.

In order to make the above-mentioned features and advantages of the present invention more comprehensible, the following specific embodiments are described in detail in conjunction with the accompanying drawings.

100, 100a, 100b: Actuating device

110: Actuation Department

112: The first actuation zone

114: second actuation zone

116: connection segment

120: bearing part

130: Piezoelectric unit

131: First through hole

132: The first side

134: The first signal area

136: The second side

138: The second signal area

140: Conduction unit

141: first electrode

141a: first conduction zone

143: second electrode

143b: second conduction zone

144: Insulation layer

145: Conductive layer

146: Substrate

146a: flat surface

147: second through hole

150: perforated sheet

160: adjustment layer

Fig. 1 is a schematic diagram of an actuating device according to a first embodiment of the present invention.

Fig. 2 is an exploded schematic diagram of the actuating device of Fig. 1.

Fig. 3 is an exploded schematic view of the actuating device of Fig. 1 from another perspective.

Fig. 4 is a schematic cross-sectional view taken along the line A-A of the actuating device of Fig. 1.

Fig. 5 is a partial enlarged schematic view of Fig. 4.

Fig. 6 is a schematic cross-sectional view of an actuating device according to a second embodiment of the present invention.

Fig. 7 is a schematic cross-sectional view of an actuating device according to a third embodiment of the present invention.

Fig. 1 is a schematic diagram of an actuating device according to a first embodiment of the present invention. Fig. 2 is an exploded schematic diagram of the actuating device of Fig. 1. Fig. 3 is an exploded schematic view of the actuating device of Fig. 1 from another perspective. Fig. 4 is a schematic cross-sectional view taken along the line A-A of the actuating device of Fig. 1. Fig. 5 is a partial enlarged schematic view of Fig. 4. Referring to FIGS. 1 to 5, the actuating device 100 of this embodiment includes an actuating portion 110, a piezoelectric unit 130, a carrying portion 120, an adjustment layer 160, a conductive unit 140 and a perforated sheet 150. the following The actuation device 100 will be described in detail.

Please refer to FIG. 2, in this embodiment, the actuation portion 110 includes a first actuation area 112, a second actuation area 114, and at least one located between the first actuation area 112 and the second actuation area 114 A connection section 116. The first actuation zone 112 can act relative to the second actuation zone 114. In addition, in this embodiment, the material of the actuating portion 110 may be composed of a metal material or a conductive material, but the material of the actuating portion 110 is not limited thereto.

2 and 3, in this embodiment, the piezoelectric unit 130 has a first surface 132 and a second surface 136 corresponding to each other (see FIG. 3), the piezoelectric unit 130 includes an electrically isolated one The first signal area 134 and the second signal area 138 located on the opposite surface (please refer to FIG. 3). The first signal area 134 is located on the first surface 132, and the second signal area 138 is located on the second surface 136.

Referring to FIG. 2, in this embodiment, the first surface 132 of the piezoelectric unit 130 faces the actuation portion 110, and the piezoelectric unit 130 is fixed to the first actuation area 112 of the actuation portion 110, and the piezoelectric unit 130 is energized At this time, the first actuation zone 112 of the actuation part 110 is activated, which in turn drives the actuation device 100 to vibrate. In this embodiment, the overall shape of the piezoelectric unit 130 can be a hollow sheet or any geometric shape, and the outer peripheral contour of the piezoelectric unit 130 can be a circle, ring, arc, polygon, rectangle, polygon, etc., However, the shape of the piezoelectric unit 130 is not limited thereto.

Please refer to FIG. 2, in this embodiment, the actuating device 100 includes a supporting portion 120, and the supporting portion 120 is disposed on the opposite surface of the second actuating area 114 of the actuating portion 110. In this embodiment, the first signal area 134 of the piezoelectric unit 130 contacts the first actuation area 112 of the actuation portion 110 for electrical conduction, and the carrying portion 120 is fixed to the actuation portion 110 The second actuation area 114. The carrying portion 120 is composed of a metal material or a conductive material, or conductive material is coated on the carrying portion 120, but the material of the carrying portion 120 is not limited thereto.

4, in this embodiment, the actuating device 100 includes an adjustment layer 160, the adjustment layer 160 is disposed on the same side surface of the piezoelectric unit 130 and the carrying portion 120, wherein the adjustment layer 160 is selected to have conductive properties The material, such as: conductive body, colloid, powder, elastomer, anisotropic conductive material, etc., through controlling the thickness of the adjustment layer 160, so that the overall structure of the actuating device 100 has a high degree of flatness. The adjustment layer 160 of this embodiment is arranged in a liquid form between the piezoelectric unit 130, the carrying portion 120 and the conduction unit 140. The adjustment layer 160 is used to control the flatness of the structure of each component of the actuation device 100, so the adjustment layer 160 is The appearance shape presented is matched with the space formed by the piezoelectric unit 130, the carrying portion 120 and the conductive unit 140, and the appearance shape of the adjustment layer 160 is not limited by this embodiment.

Please refer to FIG. 2. In this embodiment, the actuating device 100 includes a conductive unit 140. The conductive unit 140 includes a first electrode 141, a second electrode 143 and a second through hole 147. Please refer to FIGS. 2 and 2 together. FIG. 3, in this embodiment, the conduction unit 140 is arranged at the bottom layer. When the conduction unit 140 is energized, electrical signals are respectively conducted and input to the first electrode 141 and the second electrode 143, wherein the first electrode 141 is connected to the first conduction Area 141a, the second electrode 143 is connected to the second conductive area 143b. According to the concept of the present invention, no matter how the order of the components such as the carrying portion 120, the piezoelectric unit 130, the adjustment layer 160, and the conductive unit 140 changes, as long as the pressure can be made The first signal area 134 of the electrical unit 130 is electrically connected to the first electrode 141 of the conductive unit 140, and the second signal area 138 is electrically connected to the second electrode 143, and the structure is not limited to this embodiment. example For example, the first electrode 141 forms a first conductive region 141a around the outer side of the conductive unit 140, and the first conductive region 141a is used as a medium to electrically connect the first signal region 134 of the piezoelectric unit 130 to the second conductive unit 140. An electrode 141; in this embodiment, the second electrode 143 forms a second conductive area 143b in the center of the conductive unit 140, and the second conductive area 143b is used as a medium to make the second signal area 138 of the piezoelectric unit 130 Electrically connected to the second electrode 143 of the conductive unit 140, the patterns of the two conductive regions can be arbitrarily changed to present the appearance form, such as: strip shape, arc shape, triangle, polygon and other shapes, the first conductive region 141a and The shape and number of the second conductive regions 143b are not limited to this embodiment. In summary, the configuration and configuration of the first conductive region 141a and the second conductive region 143b of the present invention are used in practical applications, as long as the first signal region 134 can be electrically connected to the first electrode 141 and the second signal region 138 It suffices to be electrically connected to the second electrode 143, and the arrangement shape and the number of the conductive patterns provided in the two conductive regions are not limited by this embodiment.

4, in this embodiment, the conductive unit 140 further includes an insulating layer 144, a conductive layer 145 and a substrate 146, wherein the conductive layer 145 is composed of a first electrode 141 and a second electrode 143, the conductive unit 140 is composed of an insulating layer 144, a conductive layer 145, and a substrate 146 stacked in sequence. The first electrode 141 and the second electrode 143 of this embodiment are all located on the same plane, but not limited to this. The thickness of the adjustment layer 160 is adjusted , So that the overall thickness and flatness of the conductive unit 140 are consistent. The thickness of the insulating layer 144 is less than or equal to (≦) 1 millimeter (mm). The thickness of the substrate 146 is adjusted through the adjustment layer 160, so that the substrate 146 has a flat surface 146a.

Please refer to FIG. 5, which is a partial enlarged schematic diagram of the circled area in FIG. 4. in In this embodiment, the conductive unit 140 is composed of an insulating layer 144, a conductive layer 145, and a substrate 146 in sequence. The thickness adjustment is performed through the adjustment layer 160 to make the overall structure thickness of the conductive unit 140 uniform. The conductive regions of the conductive layer 145 are isolated from each other through the insulating layer 144. The substrate 146 is located on the bottom surface of the conductive unit 140, and forms a flat surface 146a through the adjustment layer 160, so that the combined conductive unit 140 is smoothly combined with the surface of the corresponding component of the actuating device 100.

2 and 3, in this embodiment, the perforated sheet 150, the piezoelectric unit 130, the carrying portion 120, the adjustment layer 160, and the conductive unit 140 are all located in the same side direction of the actuating portion 110, and the perforated sheet 150 is disposed on the pressure At the corresponding positions of the first through hole 131 of the electric unit 130 and the second through hole 147 of the conductive unit 140, the perforated sheet 150 is sequentially inserted through the second through hole 147 and the first through hole 131 during assembly and then fixed to the actuator The first actuation area 112 of the section 110.

In addition, as shown in FIGS. 2 and 3, in this embodiment, the piezoelectric unit 130 is in the form of a hollow sheet, so that the perforated sheet 150 is firmly installed in the center of the piezoelectric unit 130 and positioned around the through hole 131. However, the appearance shape and the number of configurations of the piezoelectric unit 130 and the perforated sheet 150 are not limited by this, and the corresponding configuration relationship between the piezoelectric unit 130 and the perforated sheet 150 is not limited by this. The configuration number and appearance shape of the second through-holes 147 of the conductive unit 140 can be changed arbitrarily by synchronously matching the configuration number and appearance shape of the perforated sheet 150, and is not limited by this embodiment.

4, in this embodiment, the bottom surface of the perforated sheet 150 protrudes from the flat surface 146a of the substrate 146. According to the design concept of the present invention, whether the bottom surface of the perforated sheet 150 is flush with the flat surface 146a of the substrate 146 Flat or protruding, neither affects the adjustment The knot layer 160 implements the flatness adjustment of the flat surface 146a of the substrate 146. Therefore, whether the bottom surface of the perforated sheet 150 is flush with or protrudes from the flat surface 146a of the substrate 146 depends on the design of the actuating device 100. The changes are not limited to this embodiment.

In this embodiment, the first signal area 134 of the piezoelectric unit 130, the first actuation area 112 of the actuation portion 110, at least one connecting section 116, the second actuation area 114, and the carrying portion 120 are designed through the above configuration. A first conductive path is formed between the adjustment layer 160 and the first electrode 141 of the conductive unit 140. A second conductive path is formed between the second signal region 138 of the piezoelectric unit 130, the adjustment layer 160, and the second electrode 143 of the conductive unit 140.

The following describes other types of actuating device 100a. Elements that are the same or similar to those in the previous embodiment are represented by the same or similar symbols, and will not be repeated. The following only describes the main differences between the different embodiments. Fig. 6 is a schematic cross-sectional view of an actuating device according to a second embodiment of the present invention. 4 and 6 together, the main difference between the actuation device 100a of this embodiment and the actuation device 100 of the previous embodiment is that the second actuation area 114 of the actuation portion 110 and the carrying portion 120 are integrally formed The structure, that is, the actuation portion 110 and the carrying portion 120 are the same structure, so that the thickness of the second actuation area 114 of the actuation portion 110 is significantly increased compared to the thickness of the first actuation area 112, which is controlled by the adjustment layer 160 The overall appearance of the actuating device makes the structure highly flat.

Please refer to FIG. 6, in this embodiment, the thicknesses of the first actuation area 112 and the second actuation area 114 of the actuation portion 110 can correspond to the piezoelectric unit 130, the carrying portion 120, The configuration of the conductive path formed by the adjustment layer 160 and the conductive unit 140 is changed, and the respective structural thickness of the first actuation area 112 and the second actuation area 114 can be adjusted at any time. In the previous embodiment, please refer to FIG. 4 , The thickness of the first actuation area 112 and the second actuation area 114 are the same. In this embodiment, please refer to FIG. 6, because the actuation portion 110 and the carrying portion 120 are integrally formed, so the first actuation area 112 The thickness of the second actuation area 114 is different from that of the second actuation area 114, which shows that according to the design concept of the present invention, the thickness structure of the first actuation area 112 and the second actuation area 114 can be changed arbitrarily according to the structural design of the actuation device 100a.

The following describes other types of actuating device 100b. Elements that are the same or similar to those in the previous embodiment are represented by the same or similar symbols, and will not be repeated. The following only describes the main differences between the different embodiments. Fig. 7 is a schematic cross-sectional view of an actuating device according to a third embodiment of the present invention. Please refer to FIGS. 4 and 7 together. The main difference between the actuating device 100b of this embodiment and the actuating device 100 of the first embodiment is that the bottom surface of the perforated sheet 150 is flush with the flat surface 146a of the substrate 146.

Please refer to FIG. 7, in this embodiment, according to the design concept of the present invention, whether the bottom surface of the perforated sheet 150 is flush with the flat surface 146a of the substrate 146 or protrudes, it does not affect the adjustment layer 160 to the substrate 146 The flat surface 146a is implemented for flatness adjustment. Therefore, whether the bottom surface of the perforated sheet 150 is flush with the flat surface 146a of the base material 146 or protrudes depends on the design of the actuating device 100b. limit.

In summary, the actuating device of the present invention adopts the piezoelectric unit 130, carrying The design principle that the part 120, the adjustment layer 160, the conductive unit 140 and the perforated sheet 150 are arranged on the same side of the actuation part 110, the adjustment layer 160 controls the flatness of the overall composition structure of the actuation device, and makes the substrate 146 have a flat surface Compared with the conventional multi-layered actuating device structure, the actuating device of this embodiment has a thinner overall thickness and a miniaturized structure. In addition, the overall structure of the actuating device has high flatness characteristics, which can effectively increase the actuation. Device drive efficiency.

Although the present invention has been disclosed in the above embodiments, it is not intended to limit the present invention. Anyone with ordinary knowledge in the relevant technical field can make some changes and modifications without departing from the spirit and scope of the present invention. The scope of protection of the present invention shall be determined by the scope of the attached patent application.

100: Actuating device

110: Actuation Department

112: The first actuation zone

114: second actuation zone

116: connection segment

120: bearing part

130: Piezoelectric unit

131: First through hole

134: The first signal area

138: The second signal area

140: Conduction unit

141a: first conduction zone

143b: second conduction zone

147: second through hole

144: Insulation layer

145: Conductive layer

146: Substrate

146a: flat surface

150: perforated sheet

160: adjustment layer

Claims (9)

An actuating device comprising: an actuating portion having a first actuating area, a second actuating area, and at least one connection between the first actuating area and the second actuating area Section; a piezoelectric unit, the piezoelectric unit has a first through hole, a first signal area and a second signal area, and the first signal area and the second signal area are electrically insulated from each other; a bearing Portion, the bearing portion and the piezoelectric unit are located on the same plane, and the piezoelectric unit and the bearing portion are both located on the same side surface of the actuating portion, and the piezoelectric unit is disposed on the first portion of the actuating portion An actuation zone, the carrying part is arranged in the second actuation zone of the actuation part; an adjustment layer, the adjustment layer is located on the same side surface of the piezoelectric unit and the carrying part; a conduction unit, the conduction unit includes a A first conduction area, a second conduction area and a second through hole, the first signal area of the piezoelectric unit is electrically connected to the first conduction area of the conduction unit, and the second signal of the piezoelectric element The area is electrically connected to the second conduction area of the conduction unit; and a perforated sheet is disposed at the corresponding positions of the first through hole of the piezoelectric unit and the second through hole of the conduction unit, and penetrates Fixed to the actuating part after the first through hole and the second through hole. As the actuating device described in item 1 of the scope of patent application, the conduction unit further includes: An insulating layer, a conductive layer and a substrate, and the conductive unit is composed of a stack of the insulating layer, the conductive layer and the substrate. The actuating device according to the first item of the scope of patent application, wherein the adjustment layer has conductive properties. The actuating device as described in item 1 of the scope of patent application, wherein the adjustment layer is used to control the flatness of the overall structure of the actuating device. The actuating device according to item 2 of the scope of patent application, wherein the substrate is controlled by the adjustment layer, so that the substrate has a flat surface. The actuating device according to the first item of the scope of patent application, wherein the piezoelectric unit, the carrying portion, the adjustment layer, the conducting unit and the perforated sheet are all located in the same side direction of the actuating portion. The actuating device according to claim 1, wherein the conductive unit has a first electrode and a second electrode, and the first electrode and the second electrode are both located on the same plane. The actuating device according to item 1 of the scope of patent application, wherein the first signal area of the piezoelectric unit, the first actuation area of the actuation part, the at least one connecting section, and the second actuation area A first conductive path is formed between the carrying portion, the adjustment layer, and the first conductive region of the conductive unit. The actuating device according to the first item of the scope of patent application, wherein a second conductive path is formed between the second signal region of the piezoelectric unit, the adjustment layer, and the second conductive region of the conductive unit.

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