TWI717084B - Actuator - Google Patents

Abstract

An actuator includes an actuation part, a piezoelectric unit, a conduction unit and an adjustment part. The actuation part includes a first actuation zone, a second actuation zone, and at least one connecting section between the two actuation zones. The piezoelectric unit includes a first signal area and a second signal area. The first signal area and the second signal area are arranged between the same plane and have an isolation part. The piezoelectric unit is arranged on the first actuation part of the actuation part. The corresponding position of the dynamic zone. The conductive unit includes a first electrode and a second electrode. The first signal area of the piezoelectric unit is electrically connected to the first electrode of the conductive unit, and the second signal area of the piezoelectric unit is electrically connected to the second electrode of the conductive unit. . The adjustment part, the piezoelectric unit and the conduction unit are all located on the same side surface of the actuation part.

Description

Actuator

The present invention relates to an actuator, in particular to an actuator designed to make the overall composition structure of the actuator have a consistent flatness through the design of the adjusting part.

Piezoelectric pump is a new type of fluid driver. It does not require an additional drive motor. It only deforms the piezoelectric vibrator through the inverse piezoelectric effect of the electroceramic, and then changes the volume of the pump cavity according to the aforementioned deformation to achieve fluid output, or Piezoelectric vibrators produce fluctuations to transfer fluids. Therefore, piezoelectric pumps have gradually replaced traditional pumps and are widely used in electronics, biomedical, aerospace, automotive, and petrochemical industries.

Generally speaking, a piezoelectric pump is composed of a piezoelectric unit and a pump body. When the piezoelectric unit is energized, the piezoelectric unit compresses radially under the action of an electric field, and generates tensile stress in the piezoelectric unit to bend and deform. When the piezoelectric unit is bent forward, the volume of the cavity of the pump body (hereinafter referred to as the pump cavity) will increase, so that the pressure in the pump cavity will decrease, so that fluid flows into the pump cavity from the inlet. On the other hand, when the piezoelectric unit is bent in the reverse direction, the volume of the pump cavity decreases, so that the pressure in the pump cavity increases, so that the fluid in the pump cavity is squeezed and discharged from the outlet. At present, the signal conductive layer used to supply power to the piezoelectric unit is usually a three-dimensional structure and is added to the outside of the pump body. The overall volume is relatively large and easily damaged. When the positive and negative electrodes are used to separate the welding process, the reliability of the solder joints is not consistent. , It often affects the quality and performance of the piezoelectric pump. In addition, the solder joint protrusions located on the outside of the pump body are easy to contact with foreign objects, resulting in abnormal pump body function and abnormal noise.

The present invention provides an actuator. The adjustment part is mainly arranged between the bearing part, the piezoelectric unit and the conduction unit. Through the internal planar electrical connection of the pump body, the overall appearance and structure of the actuator are highly flat. In the past, the reliability of the welding process was reduced, and the internal planar electrical connection technology was used to achieve the purpose of flattening the appearance of the actuator and miniaturizing the volume.

An actuator of the present invention includes an actuation part, a piezoelectric unit, a conduction unit and an adjustment part. The actuation part has a first actuation area, a second actuation area, and at least one connecting section between the first actuation area and the second actuation area. The piezoelectric unit has a first signal area and a second signal area. The first signal area and the second signal area are arranged between the same plane, and an isolation part is arranged between the first signal area and the second signal area. The electric unit is arranged at the corresponding position of the first actuation area of the actuation part. The conductive unit includes a first electrode and a second electrode. The first signal area of the piezoelectric unit is electrically connected to the first electrode of the conductive unit, and the second signal area of the piezoelectric unit is electrically connected to the second electrode of the conductive unit. . The adjustment part, the piezoelectric unit and the conduction unit are all located on the same side surface of the actuation part.

In an embodiment of the present invention, the above-mentioned actuator further includes a bearing portion, the bearing portion and the piezoelectric unit are located on the same plane, and the bearing portion and the piezoelectric unit are both located in the same side direction of the actuating portion, and the bearing portion It is arranged at the corresponding position of the second actuation zone of the actuation part.

In the first embodiment of the present invention, the aforementioned conductive unit further includes an insulating layer, a conductive portion, and a substrate, and the conductive unit is composed of a stack of the insulating layer, the conductive portion and the substrate.

In the first embodiment of the present invention, the above-mentioned adjusting portion has conductive characteristics.

In the first embodiment of the present invention, the above-mentioned adjustment part is used to control the flatness of the overall structure of the actuator.

In the first embodiment of the present invention, the above-mentioned substrate is controlled by the adjusting part so that the substrate has a first flat surface.

In the first embodiment of the present invention, the piezoelectric unit, the conducting unit, the adjusting part and the carrying part are all located in the same side direction of the actuating part.

In the first embodiment of the present invention, the above-mentioned first electrode and second electrode are located on the same plane.

In the second and fourth embodiments of the present invention, the above-mentioned actuator further includes a perforated piece, and the perforated piece is disposed at a position corresponding to the first actuation area of the actuation part.

In the second and fourth embodiments of the present invention, the aforementioned piezoelectric unit includes a first channel, and the perforated sheet penetrates the first channel.

In the second and fourth embodiments of the present invention, the above-mentioned conductive unit includes a second channel corresponding to the perforated piece, and the perforated piece penetrates the second channel and is fixed to the first actuation area of the actuation part.

Based on the above, in the actuator of the present invention, the piezoelectric unit, the conduction unit and the adjustment part are uniformly arranged in the same side direction of the actuator part, thereby reducing the overall structural height of the actuator. The cooperating adjustment part controls the flatness of the structure of each component of the actuator, so that the substrate has a flat surface, and the working efficiency of the actuator is improved and stabilized.

In order to make the above-mentioned features and advantages of the present invention more comprehensible, the following specific embodiments are described in detail in conjunction with the accompanying drawings.

Fig. 1 is a schematic diagram of an actuator according to a first embodiment of the present invention. Fig. 2 is an exploded schematic diagram of the actuator of Fig. 1. Fig. 3 is an exploded schematic view of the actuator of Fig. 1 from another perspective. Fig. 4 is a schematic cross-sectional view taken along line A-A of the actuator of Fig. 1. Fig. 5 is a partial enlarged schematic view of Fig. 4. Please refer to FIGS. 1 to 5, the actuator 100 of this embodiment includes an actuating portion 110, a piezoelectric unit 130, a supporting portion 120, an adjusting portion 150 and a conducting unit 140. The actuator 100 will be described in detail below.

Referring to FIG. 2, in this embodiment, the actuating portion 110 includes a first actuating area 112, a second actuating area 114, and at least one located between the first actuating area 112 and the second actuating area 114 One link section 116.

2 to 4, in this embodiment, the piezoelectric unit 130 is disposed at a corresponding position of the first actuation area 112 of the actuation portion 110, and the piezoelectric unit 130 has a first surface 132 corresponding to each other. And a second surface 136 (please refer to FIG. 3), and a first signal area 134 and a second signal area 138 are both disposed on the second surface 136, that is, the first signal area 134 and the second signal area 138 Both are located between the same plane of the second surface 136. The first signal area 134 and the second signal area 138 are electrically isolated by an isolation portion 133, and the conductive area of the second signal area 138 extends to the first On the surface 132 (see FIG. 2), the shape formed by the first signal area 134 and the second signal area 138 is not limited to this embodiment.

2 and 3, in this embodiment, the conductive unit 140 includes a first electrode 141 and a second electrode 143, wherein the first electrode 141 and the second electrode 143 are located on the same plane and electrically insulated from each other, piezoelectric The first signal area 134 of the unit 130 is electrically connected to the first electrode 141 of the conductive unit 140, and the second signal area 138 of the piezoelectric unit 130 is electrically connected to the second electrode 143 of the conductive unit 140.

2 and 3, in this embodiment, the actuator 100 includes a bearing portion 120, the bearing portion 120 and the piezoelectric unit 130 are located on the same plane, wherein the bearing portion 120, the piezoelectric unit 130 and the conductive unit 140 are all Located on the same side direction of the actuating portion 110, the carrying portion 120 is disposed on the surface of the corresponding position of the second actuating area 114 of the actuating portion 110.

4, in this embodiment, the actuator 100 includes an adjustment portion 150, the adjustment portion 150, the piezoelectric unit 130, and the conduction unit 140 are all located on the same side of the actuation portion 110, wherein the adjustment portion 150 is selected Materials with conductive properties, such as conductors, colloids, powders, elastomers, anisotropic conductive materials, etc., are formed by controlling the thickness of the adjusting portion 150, so that the overall structure of the actuator 100 has excellent flatness. The appearance shape presented by the adjusting portion 150 is arranged in accordance with the space formed by the piezoelectric unit 130, the carrying portion 120 and the conductive unit 140, and the appearance shape of the adjusting portion 150 is not limited by this embodiment.

4, in this embodiment, the conductive unit 140 further includes an insulating layer 144, a conductive portion 145, and a substrate 146. The conductive portion 145 includes a first electrode 141 and a second electrode 143. The first electrode 141 and the second electrode 143 are both located on the same plane, but not limited to this. Through the adjustment of the thickness of the adjusting portion 150, the overall thickness and flatness of the conductive unit 140 are consistent. The thickness of the insulating layer 144 is less than or equal to (≦) 1 millimeter (mm). The thickness of the substrate 146 is adjusted through the adjusting portion 150 so that the substrate 146 has a flat surface 146a.

Please refer to FIG. 5, which is a partial enlarged schematic diagram of the circle selected in FIG. 4. In this embodiment, the conductive unit 140 is composed of an insulating layer 144, a conductive portion 145, and a substrate 146. The flatness adjustment of each element of the actuator 100 is performed through the adjustment portion 150, so that the flatness of the overall structure of the actuator 100 is consistent. In addition, the conductive portion 145 and the carrying portion 120 are isolated from each other through the insulating layer 144. The base material 146 is located on the bottom surface of the conductive unit 140 and forms a flat surface 146 a through the adjustment portion 150, so that the combined conductive unit 140 is smoothly combined with the component of the actuator 100.

2 and 3, in this embodiment, the conductive unit 140 is disposed at the bottom layer. When the conductive unit 140 is energized, electrical signals are respectively conducted and input to the first electrode 141 and the second electrode 143, wherein the first electrode 141 Connected to the first conductive area 141a, and the second electrode 143 connected to the second conductive area 143b. According to the concept of the present invention, regardless of the composition order of the carrying portion 120, the piezoelectric unit 130, the adjusting portion 150, and the conductive unit 140 changes As long as the first signal area 134 of the piezoelectric unit 130 is electrically connected to the first electrode 141 of the conductive unit 140, and the second signal area 138 is electrically connected to the second electrode 143, the structure is not in this embodiment. As a limit. For example, the first electrode 141 forms a first conductive region 141a near the center of the conductive unit 140, and uses the first conductive region 141a as a medium to electrically connect the first signal region 134 of the piezoelectric unit 130 to the second conductive unit 140. An electrode 141; in this embodiment, the second electrode 143 forms a second conductive area 143b at the center of the conductive unit 140, and the second conductive area 143b is used as a medium to make the second signal area 138 of the piezoelectric unit 130 Electrically connected to the second electrode 143 of the conductive unit 140, the patterns of the two conductive regions can be arbitrarily changed to present the appearance form, such as: strip, arc, triangle, polygon and other shapes, the first conductive region 141a and The shape and number of the second conductive regions 143b are not limited to this embodiment. In summary, the configuration and configuration of the first conductive region 141a and the second conductive region 143b of the present invention can be used in practical applications as long as the first signal region 134 is electrically connected to the first electrode 141 and the second signal region 138 It suffices to be electrically connected to the second electrode 143, and the configuration shape and the number of the conductive patterns provided in the two conductive regions are not limited by this embodiment.

The following describes other types of actuator 100a. Elements that are the same or similar to those of the first embodiment are represented by the same or similar symbols, and will not be repeated. The following only describes the main differences between the different embodiments. Fig. 6 is an exploded schematic diagram of an actuator according to the second embodiment of the present invention. Fig. 7 is an exploded schematic view of Fig. 6 from another perspective. Fig. 8 is a schematic cross-sectional view of the actuator of Fig. 6. Please refer to FIGS. 4 and 8 together. The main difference between the actuator 100 a of this embodiment and the actuator 100 of the previous embodiment is that the actuator 100 a further includes a perforated piece 160.

Referring to FIGS. 6 to 8, in this embodiment, the perforated sheet 160 is disposed at the center of the actuation portion 110 corresponding to the first actuation area 112. The piezoelectric unit 130 differs from the previous embodiment and includes There is a first channel 131, and the perforated sheet 160 penetrates the first channel 131. Therefore, the piezoelectric unit 130 is in the form of a hollow sheet. In addition, the conductive unit 140 also includes a second channel 142 corresponding to the perforated sheet 160. After the perforated sheet 160 penetrates through the second channel 142, it is fixed to the first actuation area 112 of the actuation part 110, and the actuator 100a is assembled. When the perforated sheet 160 is passed through the second channel 142 and the first channel 131 in sequence, it is fixed to the first actuation area 112 of the actuation part 110. In this embodiment, the perforated sheet 160 can be made of metal, ceramic, plastic, etc., and the material of the perforated sheet 160 is not limited thereto.

In addition, as shown in FIGS. 6 to 7, in this embodiment, the piezoelectric unit 130 is in the form of a hollow annular sheet, so that the perforated sheet 160 is firmly installed in the center of the piezoelectric unit 130 and positioned around the first channel 131. However, the appearance shape and the number of configurations of the piezoelectric unit 130 and the perforated sheet 160 are not limited by this, and the corresponding configuration relationship between the piezoelectric unit 130 and the perforated sheet 160 is not limited by this. The configuration number and appearance shape of the second passages 142 of the conductive unit 140 can be changed arbitrarily by synchronously matching the configuration number and appearance shape of the perforated sheet 160, and is not limited by this embodiment.

Please refer to FIG. 8, in this embodiment, the bottom surface of the perforated sheet 160 is flush with the flat surface 146a of the substrate 146. According to the design concept of the present invention, whether the bottom surface of the perforated sheet 160 is flush with the flat surface 146a of the substrate 146 Flatness or protrusions do not affect the implementation of the adjustment of the flatness of the flat surface 146a of the substrate 146 by the adjustment portion 150. Therefore, whether the bottom surface of the perforated sheet 160 is flush with or protrudes from the flat surface 146a of the substrate 146 depends on the overall design of the actuator, and is not limited by this embodiment.

According to the design concept of the present invention, no matter how the actuator 110, the piezoelectric unit 130, the carrying portion 120, the adjusting portion 150, the conductive unit 140, and the perforated sheet 160 are arranged differently, the first signal area 134 can be electrically operated. Connected to the first electrode 141, and the second signal area 138 is electrically connected to the second electrode 143. At the same time, regardless of whether the piezoelectric unit 130 is a solid sheet or a hollow sheet structure, the electrical conduction of the first signal area 134 and the second signal area 138 of the piezoelectric unit 130 is not affected.

Next, other types of actuator 100b will be described. Elements that are the same or similar to those of the first embodiment are represented by the same or similar symbols, and will not be repeated. The following only describes the main differences between the different embodiments. Fig. 9 is an exploded schematic diagram of an actuator according to the third embodiment of the present invention. Fig. 10 is an exploded schematic diagram of Fig. 9 from another perspective. Fig. 11 is a schematic cross-sectional view of the actuator of Fig. 9. Referring to FIGS. 4 and 11 together, the main difference between the actuator 100 b of this embodiment and the actuator 100 of the previous embodiment is that the conduction unit 140 is disposed between the actuating portion 110 and the piezoelectric unit 130.

Please refer to FIG. 10, the conductive unit 140 includes a first electrode 141 and a second electrode 143. The first electrode 141 and the second electrode 143 are both located on the same plane and electrically insulated from each other. Please refer to FIG. 9. In this embodiment, The piezoelectric unit 130 has a solid sheet structure. The first signal area 134 and the second signal area 138 of the piezoelectric unit 130 are also located on the same plane, and the first signal area 134 and the second signal area 138 pass through the isolation portion 133 Electrical isolation. The first signal area 134 of the piezoelectric unit 130 is electrically connected to the first electrode 141 of the conductive unit 140, and the second signal area 138 is electrically connected to the second electrode 143 of the conductive unit 140.

4 and 11 together, in this embodiment, the stacking direction of the insulating layer 144, the conductive portion 145, and the substrate 146 of the conductive unit 140 is opposite to the direction of the first embodiment. The conductive unit 140 of this embodiment is moved from above. The substrate 146, the conductive portion 145, and the insulating layer 144 are stacked in this order. Referring to FIGS. 9 and 10, the first signal area 134 and the second signal area 138 of the piezoelectric unit 130 of this embodiment are also arranged in opposite directions to the first embodiment. In this embodiment, the first signal area 134 and The second signal areas 138 are all located between the same plane of the first surface 132 and are also electrically isolated by the isolation portion 133. The conductive area of the second signal area 138 extends to the second surface 136. According to the design concept of the present invention, even if the positions of the piezoelectric unit 130 and the conductive unit 140 are replaced with each other, it will not affect the implementation of the adjustment part 150 on the flatness adjustment of the overall structure of the actuator. The signal area 134 is electrically connected to the first electrode 141 of the conductive unit 140, and the second signal area 138 is electrically connected to the second electrode 143 of the conductive unit 140.

The following describes other types of actuator 100c. Components that are the same or similar to those of the third embodiment are represented by the same or similar symbols, and will not be repeated. The following only describes the main differences between the different embodiments. Fig. 12 is a schematic cross-sectional view of an actuator according to a fourth embodiment of the present invention. Referring to FIGS. 11 and 12 together, the main difference between the actuator 100c of this embodiment and the actuator 100b of the third embodiment is that the actuator 100c further includes a perforated sheet 160, and the piezoelectric unit 130 is a hollow sheet体结构。 Body structure.

12, the conductive unit 140 is disposed between the actuating portion 110 and the piezoelectric unit 130, the perforated sheet 160 is disposed at the center of the actuating portion 110 corresponding to the first actuation area 112, and the piezoelectric unit 130 is correspondingly disposed A channel 131, the conduction unit 140 is also provided with a second channel 142, the adjustment part 150 is formed in the space formed by the piezoelectric unit 130, the carrying part 120, and the conduction unit 140 in accordance with the change of the arrangement position of the perforated sheet 160, the actuator 100c During assembly, the perforated sheet 160 is sequentially inserted through the second channel 142 and the first channel 131 and then fixed to the first actuation area 112 of the actuation part 110.

In addition, in this embodiment, the bottom surface of the perforated sheet 160 protrudes from the flat surface 146a of the substrate 146. According to the design concept of the present invention, it does not matter whether the bottom surface of the perforated sheet 160 is flush or convex with the flat surface 146a of the substrate 146. It does not affect the adjustment of the flatness of the flat surface 146a of the substrate 146 by the adjusting portion 150. Therefore, even if the bottom surface of the perforated sheet 160 protrudes from the flat surface 146a of the substrate 146, the actuator can be flattened. Degree adjustment, and the first signal area 134 of the piezoelectric unit 130 is also electrically connected to the first electrode 141 of the conductive unit 140, and the second signal area 138 is electrically connected to the second electrode 143 of the conductive unit 140.

According to the design concept of the present invention, no matter how the position of the actuator 110, the piezoelectric unit 130, the carrying portion 120, the adjusting portion 150, the conducting unit 140, and the perforated sheet 160 are changed and adjusted, the first signal area 134 can be adjusted. It is electrically connected to the first electrode 141, and the second signal area 138 is electrically connected to the second electrode 143. At the same time, regardless of whether the piezoelectric unit 130 is a solid sheet or a hollow sheet structure, the electrical conduction of the first signal area 134 and the second signal area 138 of the piezoelectric unit 130 is not affected.

In summary, the actuator of the present invention is designed by arranging the piezoelectric unit 130, the carrying portion 120, the adjusting portion 160, the conductive unit 140, and the perforated sheet 150 on the same side of the actuating portion 110, and the adjusting portion 160 controls the actuation. The overall structure of the actuator is flat, and the base material 146 of the conductive unit 140 has a flat surface. Compared with the conventional multilayer actuator structure, the actuator of this embodiment has a thinner overall thickness. The structure is miniaturized, and the overall structure of the actuator has high flatness characteristics, which can effectively increase the driving efficiency of the actuator.

Although the present invention has been disclosed in the above embodiments, it is not intended to limit the present invention. Anyone with ordinary knowledge in the technical field can make some changes and modifications without departing from the spirit and scope of the present invention. The scope of protection of the present invention shall be determined by the scope of the attached patent application.

100, 100a, 100b, 100c: actuator 110: Actuation Department 112: The first actuation zone 114: second actuation zone 116: link segment 120: bearing part 130: Piezoelectric unit 131: First channel 132: The first side 133: Isolation Department 134: The first signal area 136: The Second Side 138: The second signal area 140: Conduction unit 141: first electrode 141a: first conduction zone 142: Second Channel 143: second electrode 143b: second conduction zone 144: Insulation layer 145: Conduction 146: Substrate 146a: flat surface 150: adjustment part 160: perforated sheet

Fig. 1 is a schematic diagram of an actuator according to a first embodiment of the present invention. Fig. 2 is an exploded schematic diagram of the actuator of Fig. 1. Fig. 3 is an exploded schematic view of the actuator of Fig. 1 from another perspective. Fig. 4 is a schematic cross-sectional view taken along line A-A of the actuator of Fig. 1. Fig. 5 is a partial enlarged schematic view of Fig. 4. Fig. 6 is an exploded schematic diagram of an actuator according to the second embodiment of the present invention. Fig. 7 is an exploded schematic view of Fig. 6 from another perspective. Fig. 8 is a schematic cross-sectional view of the actuator of Fig. 6. Fig. 9 is an exploded schematic diagram of an actuator according to the third embodiment of the present invention. Fig. 10 is an exploded schematic diagram of Fig. 9 from another perspective. Fig. 11 is a schematic cross-sectional view of the actuator of Fig. 9. Fig. 12 is a schematic cross-sectional view of an actuator according to a fourth embodiment of the present invention.

100: Actuator

110: Actuation Department

112: The first actuation zone

114: second actuation zone

116: link segment

120: bearing part

130: Piezoelectric unit

133: Isolation Department

134: The first signal area

138: The second signal area

140: Conduction unit

141: first electrode

143: second electrode

144: Insulation layer

145: Conduction

146: Substrate

146a: flat surface

150: adjustment part

Claims (11)

An actuator including: An actuating portion, the actuating portion has a first actuation area, a second actuation area, and at least one connecting section between the first actuation area and the second actuation area; A piezoelectric unit having a first signal area and a second signal area, the first signal area and the second signal area are arranged between the same plane, and the first signal area and the second signal area An isolation portion is arranged between the signal areas, and the piezoelectric unit is arranged at a corresponding position of the first actuation area of the actuation portion; A conduction unit, the conduction unit includes a first electrode and a second electrode, the first signal region of the piezoelectric unit is electrically connected to the first electrode of the conduction unit, and the second signal of the piezoelectric unit The zone is electrically connected to the second electrode of the conductive unit; and An adjustment part, the piezoelectric unit, the conduction unit and the adjustment part are all located on the same side surface of the actuation part. The actuator described in item 1 of the scope of patent application further includes: A bearing portion, the bearing portion and the piezoelectric unit are located on the same plane, and the piezoelectric unit and the bearing portion are both located in the same side direction of the actuating portion, and the bearing portion is disposed on the second actuating portion of the actuating portion The corresponding position of the dynamic zone. As the actuator described in item 1 of the scope of patent application, the conduction unit further includes: An insulating layer, a conductive part and a substrate, and the conductive unit is composed of a stack of the insulating layer, the conductive part and the substrate. The actuator according to the first item of the scope of patent application, wherein the adjusting part has conductive characteristics. For the actuator described in item 1 of the scope of patent application, the adjustment part is used to control the flatness of the overall structure of the actuator. The actuator described in item 3 of the scope of patent application, wherein the substrate is controlled by the adjusting part so that the substrate has a flat surface. According to the actuator described in item 2 of the scope of patent application, the piezoelectric unit, the conduction unit, the adjustment portion and the bearing portion are all located in the same side direction of the actuation portion. According to the actuator described in claim 1, wherein the first electrode and the second electrode are located on the same plane. The actuator described in item 1 of the scope of patent application further includes: A perforated sheet, the perforated sheet is arranged at the corresponding position of the first actuation area of the actuation part. According to the actuator described in claim 9, wherein the piezoelectric unit includes a first channel, and the perforated sheet penetrates the first channel. The actuator according to claim 9, wherein the conduction unit includes a second channel corresponding to the perforated sheet, and the perforated sheet penetrates through the second channel and is fixed to the first of the actuating portion Unison zone.

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