TWI712739B - Actuation system - Google Patents

Abstract

An actuation system includes an actuation part, a piezoelectric unit, a bearing part, an adjustment layer and a conduction unit. The actuation part includes a first actuation zone, a second actuation zone, and at least one interface section between the two actuation zones. The piezoelectric unit includes a first signal area and a second signal area that are electrically insulated from each other. The bearing part and the piezoelectric unit are located between the same plane, the piezoelectric unit is arranged in the first actuation zone of the actuation part, and the bearing part is arranged in the second actuation zone of the actuation part. The adjustment layer is located on the same side surface of the piezoelectric unit and the carrying part. The conduction unit includes a first conduction area and a second conduction area. The first signal area of the piezoelectric unit is electrically connected to the first conduction area of the conduction unit, and the second signal area of the piezoelectric element is electrically connected to the conduction unit. The second conduction area.

Description

Actuation system

The present invention relates to an actuating system, in particular to an actuating device that makes the overall structure of the actuating system flat through the design of the adjustment layer.

Piezoelectric pump is a new type of fluid driver. It does not require an additional drive motor. It only deforms the piezoelectric vibrator through the inverse piezoelectric effect of the electroceramic, and then changes the volume of the pump cavity according to the aforementioned deformation to achieve fluid output, or Piezoelectric vibrators produce fluctuations to transfer fluids. Therefore, piezoelectric pumps have gradually replaced traditional pumps and are widely used in electronics, biomedical, aerospace, automotive, and petrochemical industries.

Generally speaking, a piezoelectric pump is composed of a piezoelectric unit and a pump body. When the piezoelectric unit is energized, the piezoelectric unit compresses radially under the action of an electric field, and generates tensile stress in the piezoelectric unit to bend and deform. When the piezoelectric unit is bent forward, the volume of the cavity of the pump body (hereinafter referred to as the pump cavity) will increase, so that the pressure in the pump cavity will decrease, so that fluid flows into the pump cavity from the inlet. On the other hand, when the piezoelectric unit is bent in the reverse direction, the volume of the pump cavity decreases, so that the pressure in the pump cavity increases, so that the fluid in the pump cavity is squeezed and discharged from the outlet. At present, the signal conductive layer used to supply power to the piezoelectric unit is usually a three-dimensional structure and is added to the outside of the pump body. The overall volume is relatively large and easily damaged. When the positive and negative electrodes are used to separate the welding process, the reliability of the solder joints is not consistent. , Changying It affects the quality and performance of the piezoelectric pump. In addition, the solder joint protrusions located on the outside of the pump body are easy to contact with foreign objects, resulting in abnormal pump body function and abnormal noise.

The present invention provides an actuation system, which is mainly connected with an adjustment layer provided between a bearing part, a piezoelectric unit and a conduction unit. Through the internal planar electrical connection of the pump body, the overall appearance of the actuation system is highly flat, which not only overcomes In the past, the reliability of the welding process was reduced, and the internal planar electrical connection technology was used to achieve the goal of smoothing the appearance of the actuator system and miniaturizing the volume.

An actuation system of the present invention includes an actuation part, a piezoelectric unit, a bearing part, an adjustment layer and a conduction unit. The actuation part includes a first actuation zone, a second actuation zone, and at least one interface section between the first actuation zone and the second actuation zone. The piezoelectric unit has a first signal area and a second signal area, and the first signal area and the second signal area are electrically insulated from each other. The bearing portion and the piezoelectric element are located on the same plane, and the piezoelectric unit and the bearing portion are located on the same side surface of the actuating portion. The piezoelectric unit is arranged in the first actuation area of the actuating portion, and the bearing portion is arranged in the actuating portion. Section of the second actuation zone. The adjustment layer is located on the same side surface of the piezoelectric unit and the carrying part. The conduction unit includes a first conduction area and a second conduction area. The first signal area of the piezoelectric unit is electrically connected to the first conduction area of the conduction unit, and the second signal area of the piezoelectric element is electrically connected to the conduction unit. The second conduction area.

In an embodiment of the present invention, the above-mentioned conductive unit further includes an insulating layer, a conductive layer, and a substrate. The conductive unit is composed of the insulating layer, the conductive layer, and the substrate. Stacked composition.

In an embodiment of the present invention, the aforementioned adjustment layer has conductive characteristics.

In an embodiment of the present invention, the above-mentioned adjustment layer is used to control the flatness of the overall structure of the actuation system.

In an embodiment of the present invention, the above-mentioned substrate is controlled by the adjustment layer so that the substrate has a flat surface.

In an embodiment of the present invention, the piezoelectric unit, the carrying portion, the adjustment layer, and the conductive unit are all located in the same side direction of the actuating portion.

In an embodiment of the present invention, the first signal area of the piezoelectric unit, the first actuation area of the actuation portion, at least one interface section, the second actuation area, the carrying portion, the adjustment layer, and the first actuation area of the conductive unit A first conductive path is formed between the conductive regions.

In an embodiment of the present invention, a second conductive path is formed between the second signal region of the piezoelectric unit, the adjustment layer, and the second conductive region of the conductive unit.

Based on the above, the actuation system of the present invention arranges the piezoelectric unit, the bearing part, the adjustment layer, and the conduction unit in the same side direction of the actuation part, thereby reducing the overall structural height of the actuation system. Cooperate with the adjustment layer to control the flatness of the structure of each component of the actuation system, so that the base material has a flat surface, which improves and stabilizes the working efficiency of the actuation system.

In order to make the above-mentioned features and advantages of the present invention more comprehensible, the following specific embodiments are described in detail in conjunction with the accompanying drawings.

100, 100a: Actuation system

110: Actuation Department

112: The first actuation zone

114: second actuation zone

116: interface segment

120: bearing part

130: Piezoelectric unit

132: The first side

134: The first signal area

136: The Second Side

138: The second signal area

140: Conduction unit

141: first electrode

141a: first conduction zone

143: second electrode

143b: second conduction zone

144: Insulation layer

145: Conductive layer

146: Substrate

146a: flat surface

150: adjustment layer

Fig. 1 is a schematic diagram of an actuation system according to a first embodiment of the present invention.

Fig. 2 is an exploded schematic diagram of the actuation system of Fig. 1.

Fig. 3 is an exploded schematic diagram of the actuation system of Fig. 1 from another perspective.

Fig. 4 is a schematic cross-sectional view taken along line A-A of the actuation system of Fig. 1.

Fig. 5 is a partial enlarged schematic view of Fig. 4.

Fig. 6 is a schematic cross-sectional view of an actuation system according to a second embodiment of the present invention.

Fig. 1 is a schematic diagram of an actuation system according to a first embodiment of the present invention. Fig. 2 is an exploded schematic diagram of the actuation system of Fig. 1. Fig. 3 is an exploded schematic diagram of the actuation system of Fig. 1 from another perspective. Fig. 4 is a schematic cross-sectional view taken along line A-A of the actuation system of Fig. 1. Fig. 5 is a partial enlarged schematic view of Fig. 4. Referring to FIGS. 1 to 5, the actuating system 100 of this embodiment includes an actuating portion 110, a piezoelectric unit 130, a carrying portion 120, an adjustment layer 150 and a conductive unit 140. The actuation system 100 will be described in detail below.

Please refer to FIG. 2, in this embodiment, the actuation portion includes a first actuation area 112, a second actuation area 114, and at least one located between the first actuation area 112 and the second actuation area 114 Interface section 116. The first actuation zone 112 can act relative to the second actuation zone 114. In addition, in this embodiment, the material of the actuating portion 110 may be composed of a metal material or a conductive material, but the material of the actuating portion 110 is not limited thereto.

2 and 3, in this embodiment, the piezoelectric unit 130 has mutual Corresponding to a first surface 132 and a second surface 136 (see FIG. 3), the piezoelectric unit 130 includes a first signal area 134 electrically isolated and a second signal area 138 on the opposite surface (see FIG. image 3). The first signal area 134 is located on the first surface 132 and the second signal area 138 is located on the second surface 136.

Referring to FIG. 2, in this embodiment, the first surface 132 of the piezoelectric unit 130 faces the actuating portion 110. More specifically, in this embodiment, the piezoelectric unit 130 is fixed to the first actuation area 112 of the actuation portion 110, and when the piezoelectric unit 130 is energized, the first actuation area 112 of the actuation portion 110 is activated. In turn, the actuation system 100 is driven to vibrate. In this embodiment, the overall shape of the piezoelectric unit 130 can be a sheet or any geometric shape, and the outer peripheral contour of the piezoelectric unit 130 can be a circle, ring, arc, polygon, rectangle, polygon, etc., but The shape of the piezoelectric unit 130 is not limited thereto.

Please refer to FIG. 2, in this embodiment, the actuating system 100 includes a supporting portion 120, and the supporting portion 120 is disposed on the opposite surface of the second actuating area 114 of the actuating portion 110. In this embodiment, the first signal area 134 of the piezoelectric unit 130 contacts the first actuation area 112 of the actuation portion 110 for electrical conduction, and the carrying portion 120 is fixed to the second actuation area 114 of the actuation portion 110 . The supporting portion 120 can be made of metal material or conductive material, or conductive material is coated on the supporting portion 120, but the material of the supporting portion 120 is not limited thereto.

4, in this embodiment, the actuation system 100 includes an adjustment layer 150, the adjustment layer 150 is disposed on the piezoelectric unit 130 and the carrier 120 on the same side surface, wherein the adjustment layer 150 is selected to have conductive characteristics Material, such as: conductive body, colloid, powder, elastomer, anisotropic conductive material and other materials, through The thickness of the adjustment layer 150 is controlled, so that the overall structure of the actuation system 100 has a high degree of flatness.

2 and 3, in this embodiment, the conductive unit 140 is disposed at the bottom layer. When the conductive unit 140 is energized, electrical signals are respectively conducted and input to the first electrode 141 and the second electrode 143, wherein the first electrode 141 Connected to the first conductive area 141a, and the second electrode 143 connected to the second conductive area 143b. According to the concept of the present invention, regardless of the composition order of the carrying portion 120, the piezoelectric unit 130, the adjusting portion 150, and the conductive unit 140 changes As long as the first signal area 134 of the piezoelectric unit 130 is electrically connected to the first electrode 141 of the conductive unit 140, and the second signal area 138 is electrically connected to the second electrode 143, the structure is not in this embodiment. As a limit. For example, the first electrode 141 has a first conductive region 141a around the outer side of the conductive unit 140, using the first conductive region 141a as a medium to electrically connect the first signal region 134 of the piezoelectric unit 130 to the first electrode of the conductive unit 140 141; In this embodiment, the second electrode 143 forms a second conductive region 143b in the center of the conductive unit 140, and the second conductive region 143b is used as a medium to make the second signal region 138 of the piezoelectric unit 130 electrically conductive Connected to the second electrode 143 of the conductive unit 140, the patterns of the two conductive regions can be arbitrarily changed to present the appearance form, such as: strip, arc, triangle, polygon and other shapes, the first conductive region 141a and the second conductive region 141a The shape and number of the conductive regions 143b are not limited to this embodiment. In summary, the configuration and configuration of the first conductive region 141a and the second conductive region 143b of the present invention can be used in practical applications as long as the first signal region 134 is electrically connected to the first electrode 141 and the second signal region 138 It is sufficient to be electrically connected to the second electrode 143, and the shape and number of the conductive patterns provided in the two conductive regions are not in accordance with the actual Examples are limitations.

4, in this embodiment, the conductive unit 140 further includes an insulating layer 144, a conductive layer 145, and a substrate 146. The conductive layer 145 is composed of a first conductive region 141a and a second conductive region 143b. The conductive unit 140 is composed of an insulating layer 144, a conductive layer 145, and a substrate 146 stacked in sequence. The first conductive region 141a and the second conductive region 143b of this embodiment are all located on the same plane, but not limited to this. The adjustment layer The thickness adjustment of 150 makes the overall thickness and flatness of the conductive unit 140 consistent. The thickness of the insulating layer 144 is less than or equal to (≦) 1 millimeter (mm). The thickness of the substrate 146 is adjusted through the adjustment layer 150 so that the substrate 146 has a flat surface 146a.

Please refer to FIG. 5, which is a partial enlarged schematic diagram of the circle selected in FIG. 4. In this embodiment, the conductive unit 140 is composed of an insulating layer 144, a conductive layer 145, and a substrate 146 in sequence. The thickness adjustment is performed through the adjustment layer 150 to make the overall structure thickness of the conductive unit 140 consistent. The conductive regions of the conductive layer 145 are isolated from each other through the insulating layer 144. The substrate 146 is located on the bottom surface of the conductive unit 140, and forms a flat surface 146a through the adjustment layer 150, so that the combined conductive unit 140 is smoothly combined with the surface of the components of the actuation system 100.

In this embodiment, the first signal area 134 of the piezoelectric unit 130, the first actuation area 112 of the actuation portion 110, at least one interface section 116, the second actuation area 114, and the carrying portion 120 are designed to A first conductive path is formed between the adjustment layer 150 and the first electrode 141 of the conductive unit 140. A second conductive path is formed between the second signal region 138 of the piezoelectric unit 130, the adjustment layer 150, and the second electrode 143 of the conductive unit 140.

Other types of actuation system 100a are described below. Elements that are the same or similar to those of the previous embodiment are represented by the same or similar symbols, and will not be repeated. The following only describes the main differences between the different embodiments. Fig. 6 is a schematic cross-sectional view of an actuation system according to a second embodiment of the present invention. 4 and 6 together, the main difference between the actuation system 100b of this embodiment and the actuation system 100 of the previous embodiment is that the second actuation area 114 of the actuation portion 110 and the carrying portion 120 are integrally formed The structure, that is, the actuating portion 110 and the carrying portion 120 are the same structure, so that the thickness of the second actuating area 114 of the actuating portion 110 is significantly increased compared to the thickness of the first actuating area 112. The conductive path of the conductive unit 140 can also enable the actuation system 100a to have a higher vibration efficiency.

Please refer to FIG. 6, in this embodiment, the thicknesses of the first actuation area 112 and the second actuation area 114 of the actuation portion 110 may correspond to the piezoelectric unit 130, the carrying portion 120, the adjustment layer 150, and the conduction unit 140 The configuration of the formed conductive path is changed, and the respective structural thickness of the first actuation area 112 and the second actuation area 114 can be adjusted at any time. In the previous embodiment, please refer to FIG. 4, the first actuation area 112 The thickness of the second actuation area 114 is the same as that of the second actuation area 114. In this embodiment, please refer to FIG. 6, because the actuation portion 110 and the carrying portion 120 are integrally formed, so the first actuation area 112 and the second actuation area 114 The thickness is different, which shows that according to the design concept of the present invention, the thickness structure of the first actuation area 112 and the second actuation area 114 can be changed arbitrarily.

In summary, the actuation system of the present invention disposes the piezoelectric unit 130, the carrying portion 120, the adjustment layer 150 and the conduction unit 140 on the same side of the actuation portion 110, and the adjustment layer 150 controls the overall structure of the actuation system 100 Flatness and make the substrate 146 It has a flat surface. Compared with the conventional multi-layer actuation system composition structure, the actuation system 100 of this embodiment has a thinner overall thickness and a miniaturized structure, and the overall structure of the actuation system 100 has high flatness characteristics. , Which can effectively increase the driving efficiency of the actuation system

Although the present invention has been disclosed in the above embodiments, it is not intended to limit the present invention. Anyone with ordinary knowledge in the technical field can make some changes and modifications without departing from the spirit and scope of the present invention. The scope of protection of the present invention shall be determined by the scope of the attached patent application.

100: Actuation system

110: Actuation Department

112: The first actuation zone

114: second actuation zone

116: interface segment

120: bearing part

130: Piezoelectric unit

134: The first signal area

138: The second signal area

140: Conduction unit

141a: first conduction zone

143b: second conduction zone

144: Insulation layer

145: Conductive layer

146: Substrate

146a: flat surface

150: adjustment layer

Claims (8)

An actuation system comprising: an actuation part having a first actuation zone, a second actuation zone and at least one interface between the first actuation zone and the second actuation zone segment; A piezoelectric unit, the piezoelectric unit has a first signal area and a second signal area, and the first signal area and the second signal area are electrically insulated from each other; A bearing portion, the bearing portion and the piezoelectric element are located on the same plane, and the piezoelectric unit and the bearing portion are both located on the same side surface of the actuating portion, and the piezoelectric unit is disposed on the actuating portion The first actuation zone, the bearing part is arranged in the second actuation zone of the actuation part; An adjustment layer located on the same side surface of the piezoelectric unit and the carrying portion; and A conductive unit, the conductive unit includes a first conductive region and a second conductive region, the first signal region of the piezoelectric unit is electrically connected to the first conductive region of the conductive unit, the piezoelectric element The second signal area is electrically connected to the second conduction area of the conduction unit. As the actuation system described in item 1 of the scope of patent application, the conduction unit further includes: An insulating layer, a conductive layer and a substrate, and the conductive unit is composed of a stack of the insulating layer, the conductive layer and the substrate. The actuation system according to the first item of the scope of patent application, wherein the adjustment layer has conductive properties. The actuation system as described in item 1 of the scope of patent application, wherein the adjustment layer is used to control the flatness of the overall structure of the actuation system. The actuating system according to item 2 of the scope of patent application, wherein the substrate is controlled by the adjustment layer, so that the substrate has a flat surface. According to the actuation system described in item 1 of the scope of patent application, the piezoelectric unit, the bearing portion, the adjustment layer and the conduction unit are all located in the same side direction of the actuation portion. The actuation system according to claim 1, wherein the first signal area of the piezoelectric unit, the first actuation area of the actuation part, the at least one interface section, and the second actuation area A first conductive path is formed between the carrying portion, the adjustment layer, and the first conductive region of the conductive unit. The actuation system according to the first item of the scope of patent application, wherein a second conductive path is formed between the second signal region of the piezoelectric unit, the adjustment layer, and the second conductive region of the conductive unit.

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