TWM591282U - Actuator - Google Patents

Abstract

An actuator includes an actuating part, a piezoelectric unit, a conducting unit and an adjusting part. The actuating part includes a first actuating area, a second actuating area, and at least one connecting section between the two actuating areas. The piezoelectric unit includes a first signal area and a second signal area, the first signal area and the second signal area are disposed between the same plane and have an isolation portion, and the piezoelectric unit is disposed on the first portion of the actuation portion The corresponding position of the dynamic zone. The conducting unit includes a first electrode and a second electrode, the first signal region of the piezoelectric unit is electrically connected to the first electrode of the conducting unit, and the second signal region of the piezoelectric unit is electrically connected to the second electrode of the conducting unit . The adjusting part, the piezoelectric unit and the conducting unit are all located on the same side direction surface of the actuating part.

Description

Actuator

The present invention relates to an actuator, in particular to a uniform flatness of the overall structure of the actuator through the design of the adjustment part.

The piezoelectric pump is a new type of fluid driver, which does not require an additional driving motor, and can only deform the piezoelectric vibrator through the inverse piezoelectric effect of the electroceramic, and then generates a volume change of the pump cavity according to the aforementioned deformation to achieve fluid output, or The piezoelectric vibrator generates waves to transmit fluid, so piezoelectric pumps have gradually replaced traditional pumps and are widely used in electronics, biomedicine, aerospace, automotive, petrochemical and other industries.

Generally speaking, a piezoelectric pump is composed of a piezoelectric unit and a pump body. When the piezoelectric unit is energized, the piezoelectric unit will be compressed radially under the action of an electric field, and a tensile stress will be generated inside it to bend and deform. When the piezoelectric unit is bent forward, the volume of the pump body cavity (hereinafter referred to as the pump cavity) will increase, so that the pressure in the pump cavity decreases, so that the fluid flows into the pump cavity from the inlet. On the other hand, when the piezoelectric unit bends in the reverse direction, the volume of the pump cavity decreases, so that the pressure in the pump cavity increases, so that the fluid in the pump cavity is squeezed and discharged from the outlet. At present, the signal conductive layer used to supply power to the piezoelectric unit is usually a three-dimensional structure, and is applied to the outside of the pump body. The overall volume is large and relatively easy to damage. When the positive and negative electrodes are used to separate the welding process, the reliability of the solder joint is inconsistent , Often affects the quality and performance of the piezoelectric pump. In addition, the solder joint protrusions located outside the pump body are prone to contact with foreign objects, resulting in abnormal pump body function and abnormal sound.

The present invention provides an actuator, which is mainly provided with an adjustment part between the bearing part, the piezoelectric unit and the conduction unit. Through the planar electrical connection inside the pump body, the overall appearance structure of the actuator is highly flat, which not only overcomes In the past, the reliability of the welding process has been reduced, and the internal planar electrical connection technology has been used to achieve the purpose of flattening the appearance of the actuator and miniaturizing the volume.

An actuator of the present invention includes an actuating part, a piezoelectric unit, a conducting unit and an adjusting part. The actuating part has a first actuating area, a second actuating area, and at least one connecting section between the first actuating area and the second actuating area. The piezoelectric unit has a first signal area and a second signal area. The first signal area and the second signal area are disposed between the same plane, and an isolation portion is provided between the first signal area and the second signal area. The electric unit is disposed at a corresponding position of the first actuating area of the actuating part. The conducting unit includes a first electrode and a second electrode, the first signal region of the piezoelectric unit is electrically connected to the first electrode of the conducting unit, and the second signal region of the piezoelectric unit is electrically connected to the second electrode of the conducting unit . The adjusting part, the piezoelectric unit and the conducting unit are all located on the same side direction surface of the actuating part.

In an embodiment of the present invention, the above-mentioned actuator further includes a bearing portion, the bearing portion and the piezoelectric unit are located on the same plane, and the bearing portion and the piezoelectric unit are located in the same side direction of the actuating portion, the bearing portion It is arranged at a corresponding position of the second actuation area of the actuation part.

In the first embodiment of the present invention, the above-mentioned conductive unit further includes an insulating layer, a conductive portion, and a substrate. The conductive unit is composed of a stack of insulating layer, conductive portion, and substrate.

In the first embodiment of the present invention, the above-mentioned adjusting portion has conductive properties.

In the first embodiment of the present invention, the above-mentioned adjustment part is used to control the flatness of the overall structure of the actuator.

In the first embodiment of the present invention, the above-mentioned base material is controlled by the adjustment part so that the base material has the first flat surface.

In the first embodiment of the present invention, the above-mentioned piezoelectric unit, conduction unit, adjusting portion and bearing portion are all located in the same direction of the actuating portion.

In the first embodiment of the present invention, the first electrode and the second electrode are located on the same plane.

In the second and fourth embodiments of the present invention, the above-mentioned actuator further includes a perforated sheet disposed at a position corresponding to the first actuating area of the actuating portion.

In the second and fourth embodiments of the present invention, the piezoelectric unit described above includes a first channel, and the perforated sheet penetrates the first channel.

In the second and fourth embodiments of the present invention, the above-mentioned conduction unit includes a second channel corresponding to the perforated sheet. The perforated sheet passes through the second channel and is fixed to the first actuating area of the actuating portion.

Based on the above, in the actuator of the present invention, the piezoelectric unit, the conducting unit, and the adjustment unit are arranged in the same direction of the actuation unit, reducing the overall structural height of the actuator. Cooperate with the adjustment part to control the flatness of the structure of each component of the actuator, so that the substrate has a flat surface, and improve and stabilize the working efficiency of the actuator.

In order to make the above-mentioned features and advantages of the present invention more obvious and understandable, the embodiments are specifically described below and described in detail in conjunction with the accompanying drawings.

FIG. 1 is a schematic diagram of an actuator according to the first embodiment of the present invention. Fig. 2 is an exploded schematic view of the actuator of Fig. 1. 3 is an exploded schematic view of the actuator of FIG. 1 from another perspective. 4 is a schematic cross-sectional view taken along line A-A of the actuator of FIG. 1. FIG. 5 is a partially enlarged schematic diagram of FIG. 4. Please refer to FIGS. 1 to 5. The actuator 100 of this embodiment includes an actuating portion 110, a piezoelectric unit 130, a bearing portion 120, an adjusting portion 150 and a conductive unit 140. The actuator 100 will be described in detail below.

Please refer to FIG. 2. In this embodiment, the actuating portion 110 includes a first actuating area 112, a second actuating area 114 and at least at least between the first actuating area 112 and the second actuating area 114.一连段116。 A connecting segment 116.

Please refer to FIGS. 2 to 4. In this embodiment, the piezoelectric unit 130 is disposed at a corresponding position of the first actuating region 112 of the actuating portion 110, and the piezoelectric unit 130 has a first surface 132 corresponding to each other And a second surface 136 (see FIG. 3), and a first signal area 134 and a second signal area 138 are both disposed on the second surface 136, namely the first signal area 134 and the second signal area 138 Both are located between the same plane of the second surface 136. The first signal area 134 and the second signal area 138 are electrically isolated by an isolation portion 133, wherein the conductive area of the second signal area 138 extends to the first The shape formed by the surface 132 (see FIG. 2), the first signal area 134 and the second signal area 138 is not limited by this embodiment.

2 and 3, in this embodiment, the conductive unit 140 includes a first electrode 141 and a second electrode 143, wherein the first electrode 141 and the second electrode 143 are located on the same plane and are electrically insulated from each other, piezoelectric The first signal region 134 of the unit 130 is electrically connected to the first electrode 141 of the conductive unit 140, and the second signal region 138 of the piezoelectric unit 130 is electrically connected to the second electrode 143 of the conductive unit 140.

Please refer to FIGS. 2 and 3. In this embodiment, the actuator 100 includes a bearing portion 120. The bearing portion 120 and the piezoelectric unit 130 are located on the same plane. The bearing portion 120, the piezoelectric unit 130 and the conductive unit 140 are all Located in the same side direction of the actuating portion 110, the bearing portion 120 is disposed on the surface of the corresponding position of the second actuating area 114 of the actuating portion 110.

Please refer to FIG. 4. In this embodiment, the actuator 100 includes an adjustment part 150. The adjustment part 150, the piezoelectric unit 130 and the conduction unit 140 are all located on the same side of the actuation part 110. The adjustment part 150 is selected Materials with conductive properties, such as conductors, colloids, powders, elastomers, anisotropic conductive materials and other materials, by controlling the thickness of the adjustment portion 150, the overall structure of the actuator 100 has excellent flatness. The appearance shape of the adjustment portion 150 is matched with the space formed by the piezoelectric unit 130, the bearing portion 120, and the conduction unit 140. The appearance shape of the adjustment portion 150 is not limited by this embodiment.

Please refer to FIG. 4. In this embodiment, the conductive unit 140 further includes an insulating layer 144, a conductive portion 145, and a substrate 146, wherein the conductive portion 145 includes a first electrode 141 and a second electrode 143. The first electrode 141 and the second electrode 143 are located on the same plane, but not limited to this. Through the thickness adjustment of the adjustment part 150, the overall thickness and flatness of the conductive unit 140 are consistent. The thickness of the insulating layer 144 is less than or equal to (≦) 1 mm (mm). The thickness of the base material 146 is adjusted through the adjusting portion 150 so that the base material 146 has a flat surface 146a.

Please refer to FIG. 5, which is a partially enlarged schematic view of the circled circle of FIG. 4. In this embodiment, the conductive unit 140 is composed of an insulating layer 144, a conductive portion 145, and a base material 146. The adjustment part 150 adjusts the flatness of each element of the actuator 100 to make the overall structure of the actuator 100 uniform. And through the insulating layer 144, the conductive portion 145 and the bearing portion 120 are isolated and insulated from each other. The base material 146 is located on the bottom surface of the conductive unit 140, and forms a flat surface 146a through the adjusting portion 150, so that the combined conductive unit 140 is flatly combined with the actuator 100 component.

Please refer to FIGS. 2 and 3. In this embodiment, the conducting unit 140 is disposed at the bottom layer. When the conducting unit 140 is energized, electrical signals are conducted to the first electrode 141 and the second electrode 143 respectively, of which the first electrode 141 Connected to the first conductive area 141a, the second electrode 143 is connected to the second conductive area 143b, according to the concept of the present invention, no matter how the order of the components of the bearing portion 120, the piezoelectric unit 130, the adjustment portion 150 and the conductive unit 140 changes As long as the first signal region 134 of the piezoelectric unit 130 can be electrically connected to the first electrode 141 of the conductive unit 140, and the second signal region 138 is electrically connected to the second electrode 143, the structure does not use this embodiment For restrictions. For example, the first electrode 141 forms a first conductive region 141a near the center of the conductive unit 140. Using the first conductive region 141a as a medium, the first signal region 134 of the piezoelectric unit 130 is electrically connected to the first An electrode 141; in this embodiment, the second electrode 143 forms a second conductive region 143b at the center of the conductive unit 140, using the second conductive region 143b as a medium to make the second signal region 138 of the piezoelectric unit 130 The second electrode 143 of the conductive unit 140 is electrically connected. The patterns of the two conductive regions can be arbitrarily changed in appearance. For example: strips, arcs, triangles, polygons and other shapes, the first conductive region 141a and The shape and number of the second conductive regions 143b are not limited to this embodiment. In summary, the shape and number of the first conductive area 141a and the second conductive area 143b of the present invention are practically applied, as long as the first signal area 134 can be electrically connected to the first electrode 141 and the second signal area 138 It suffices to be electrically connected to the second electrode 143, and the shape and the number of the conductive patterns provided in the two conductive regions are not limited by this embodiment.

The following describes other types of actuators 100a. Elements that are the same as or similar to the first embodiment are denoted by the same or similar symbols, and will not be described in detail, and only the main differences between the different embodiments will be described below. 6 is an exploded schematic view of an actuator according to the second embodiment of the present invention. 7 is an exploded schematic view of FIG. 6 from another perspective. 8 is a schematic cross-sectional view of the actuator of FIG. 6. Please refer to FIGS. 4 and 8 together. The main difference between the actuator 100 a of this embodiment and the actuator 100 of the previous embodiment is that the actuator 100 a further includes a perforated sheet 160.

Please refer to FIG. 6 to FIG. 8. In this embodiment, the perforated sheet 160 is disposed at the position of the actuating portion 110 corresponding to the center of the first actuating area 112. The piezoelectric unit 130 differs from the previous embodiment in further including A first channel 131, the perforated sheet 160 penetrates the first channel 131, therefore, the piezoelectric unit 130 is in the form of a hollow sheet. In addition, the conducting unit 140 also includes a second channel 142 corresponding to the perforated sheet 160. After the perforated sheet 160 is penetrated through the second channel 142 and fixed to the first actuating region 112 of the actuating portion 110, the actuator 100a is assembled At this time, after the perforated sheet 160 is sequentially passed through the second channel 142 and the first channel 131, it is fixed to the first actuating area 112 of the actuating portion 110. In this embodiment, the perforated sheet 160 may be made of metal, ceramic, plastic, etc. The material type of the perforated sheet 160 is not limited thereto.

In addition, as shown in FIGS. 6 to 7, in this embodiment, the piezoelectric unit 130 is in the form of a hollow ring-shaped sheet body, so that the perforated sheet 160 is firmly installed at the center of the piezoelectric unit 130 and the first channel 131 is positioned around. However, the appearance shape and the number of configurations of the piezoelectric unit 130 and the perforated sheet 160 are not limited thereto, and the corresponding configuration relationship between the piezoelectric unit 130 and the perforated sheet 160 is not limited thereby. The arrangement number and appearance shape of the second channel 142 of the conduction unit 140 are synchronously matched with the arrangement number and appearance shape of the perforated sheet 160, and are not limited by this embodiment.

Referring to FIG. 8, in this embodiment, the bottom surface of the perforated sheet 160 is flush with the flat surface 146a of the substrate 146. According to the design concept of the present invention, whether the bottom surface of the perforated sheet 160 is flush with the flat surface 146a of the substrate 146 The flatness or protrusion does not affect the flatness adjustment of the flat surface 146a of the base material 146 by the adjustment part 150. Therefore, whether the bottom surface of the perforated sheet 160 is flush or convex with the flat surface 146a of the base material 146 depends on the overall design of the actuator, and is not limited by this embodiment.

According to the design concept of the present invention, no matter how the arrangement of the actuating part 110, the piezoelectric unit 130, the bearing part 120, the adjusting part 150, the conducting unit 140 and the perforated sheet 160 are changed, the first signal area 134 can be made electrically It is connected to the first electrode 141, and the second signal region 138 is electrically connected to the second electrode 143. At the same time, regardless of whether the piezoelectric unit 130 is a solid piece or a hollow piece, the electrical conduction of the first signal region 134 and the second signal region 138 of the piezoelectric unit 130 is not affected.

The following describes other types of actuators 100b. Elements that are the same as or similar to the first embodiment are denoted by the same or similar symbols, and will not be described in detail, and only the main differences between the different embodiments will be described below. 9 is an exploded schematic view of an actuator according to a third embodiment of the present invention. FIG. 10 is an exploded schematic view of FIG. 9 from another perspective. 11 is a schematic cross-sectional view of the actuator of FIG. 9. Please refer to FIGS. 4 and 11 together. The main difference between the actuator 100 b of this embodiment and the actuator 100 of the previous embodiment is that the conducting unit 140 is disposed between the actuating portion 110 and the piezoelectric unit 130.

Referring to FIG. 10, the conductive unit 140 includes a first electrode 141 and a second electrode 143, wherein the first electrode 141 and the second electrode 143 are located on the same plane and are electrically insulated from each other. Please refer to FIG. 9, in this embodiment, The piezoelectric unit 130 is a solid sheet structure. The first signal area 134 and the second signal area 138 of the piezoelectric unit 130 are also located on the same plane, and the isolation portion 133 passes between the first signal area 134 and the second signal area 138 Electrical isolation. The first signal region 134 of the piezoelectric unit 130 is electrically connected to the first electrode 141 of the conductive unit 140, and the second signal region 138 is electrically connected to the second electrode 143 of the conductive unit 140.

Please refer to FIG. 4 and FIG. 11 together. In this embodiment, the stacking direction of the insulating layer 144, the conductive portion 145, and the substrate 146 of the conductive unit 140 is opposite to that of the first embodiment. The conductive unit 140 of this embodiment is from above Then, the substrate 146, the conductive portion 145, and the insulating layer 144 are sequentially stacked. Please refer to FIGS. 9 and 10. The arrangement direction of the first signal region 134 and the second signal region 138 of the piezoelectric unit 130 of this embodiment is also opposite to that of the first embodiment. In this embodiment, the first signal region 134 and The second signal areas 138 are located between the same plane of the first surface 132, and are also electrically isolated by the isolation portion 133, and the conductive area of the second signal area 138 extends to the second surface 136. According to the design concept of the present invention, even if the positions of the piezoelectric unit 130 and the conducting unit 140 are replaced with each other, the implementation of the adjustment of the adjustment structure 150 for the flatness of the overall structure of the actuator is not affected, and the first The signal area 134 is electrically connected to the first electrode 141 of the conductive unit 140, and the second signal area 138 is electrically connected to the second electrode 143 of the conductive unit 140.

The following describes other types of actuators 100c. Elements that are the same as or similar to the third embodiment are denoted by the same or similar symbols, and will not be described in detail, and only the main differences between the different embodiments will be described below. 12 is a schematic cross-sectional view of an actuator according to a fourth embodiment of the present invention. Please refer to FIGS. 11 and 12 together. The main difference between the actuator 100c of this embodiment and the actuator 100b of the third embodiment is that the actuator 100c further includes a perforated sheet 160, and the piezoelectric unit 130 is a hollow sheet.体结构。 Body structure.

Referring to FIG. 12, the conducting unit 140 is disposed between the actuating portion 110 and the piezoelectric unit 130, the perforated sheet 160 is disposed at the center of the actuating portion 110 corresponding to the first actuating region 112, and the piezoelectric unit 130 is correspondingly disposed A channel 131, a second channel 142 is also provided in the conducting unit 140, and the adjusting portion 150 cooperates with the change of the arrangement position of the perforated sheet 160, formed in the space formed by the piezoelectric unit 130, the bearing portion 120, and the conducting unit 140, the actuator 100c During assembly, the perforated sheet 160 is sequentially penetrated through the second channel 142 and the first channel 131, and then fixed to the first actuating area 112 of the actuating portion 110.

In addition, in this embodiment, the bottom surface of the perforated sheet 160 protrudes out of the flat surface 146a of the substrate 146. According to the design concept of the present invention, regardless of whether the bottom surface of the perforated sheet 160 is flush or convex with the flat surface 146a of the substrate 146 The flat surface 146a of the base material 146 is not affected by the adjustment part 150, so even if the bottom surface of the perforated sheet 160 protrudes from the flat surface 146a of the base material 146, the actuator can also be flattened The degree is adjusted, and the first signal region 134 of the piezoelectric unit 130 is also electrically connected to the first electrode 141 of the conductive unit 140, and the second signal region 138 is electrically connected to the second electrode 143 of the conductive unit 140.

According to the design concept of the present invention, the first signal area 134 can be adjusted irrespective of how the positions of the components such as the actuating part 110, the piezoelectric unit 130, the carrying part 120, the adjusting part 150, the conducting unit 140, and the perforated sheet 160 are adjusted. It is electrically connected to the first electrode 141, and the second signal region 138 is electrically connected to the second electrode 143. At the same time, regardless of whether the piezoelectric unit 130 is a solid piece or a hollow piece, the electrical conduction of the first signal region 134 and the second signal region 138 of the piezoelectric unit 130 is not affected.

In summary, the actuator of the present invention is designed by arranging the piezoelectric unit 130, the bearing portion 120, the adjustment portion 160, the conduction unit 140 and the perforated sheet 150 in the same direction of the actuation portion 110, and cooperates with the adjustment portion 160 to control the actuator The overall structure of the actuator is flat, and the substrate 146 of the conductive unit 140 has a flat surface. Compared with the conventional multilayer actuator structure, the actuator of this embodiment has a thinner overall thickness. The structure is miniaturized, and the overall structure of the actuator has high flatness characteristics, which can effectively increase the driving efficiency of the actuator.

Although the present invention has been disclosed as above with examples, it is not intended to limit the present invention. Anyone who has ordinary knowledge in the technical field can make some changes and retouching without departing from the spirit and scope of the present invention. The scope of protection of this new model shall be subject to the scope defined in the appended patent application.

100, 100a, 100b, 100c ‧‧‧ actuator 110‧‧‧Actuation Department 112‧‧‧First actuation zone 114‧‧‧Second actuation zone 116‧‧‧Link 120‧‧‧ Bearing Department 130‧‧‧ Piezoelectric unit 131‧‧‧ First channel 132‧‧‧The first side 133‧‧‧Isolation Department 134‧‧‧ First signal area 136‧‧‧Second side 138‧‧‧Second Signal Area 140‧‧‧Conduction unit 141‧‧‧First electrode 141a‧‧‧The first conduction zone 142‧‧‧Second channel 143‧‧‧Second electrode 143b‧‧‧Second conduction zone 144‧‧‧Insulation 145‧‧‧Transmission Department 146‧‧‧ Base material 146a‧‧‧Smooth surface 150‧‧‧Regulation Department 160‧‧‧Perforated film

FIG. 1 is a schematic diagram of an actuator according to the first embodiment of the present invention. Fig. 2 is an exploded schematic view of the actuator of Fig. 1. 3 is an exploded schematic view of the actuator of FIG. 1 from another perspective. 4 is a schematic cross-sectional view taken along line A-A of the actuator of FIG. 1. FIG. 5 is a partially enlarged schematic diagram of FIG. 4. 6 is an exploded schematic view of an actuator according to the second embodiment of the present invention. 7 is an exploded schematic view of FIG. 6 from another perspective. 8 is a schematic cross-sectional view of the actuator of FIG. 6. 9 is an exploded schematic view of an actuator according to a third embodiment of the present invention. FIG. 10 is an exploded schematic view of FIG. 9 from another perspective. 11 is a schematic cross-sectional view of the actuator of FIG. 9. 12 is a schematic cross-sectional view of an actuator according to a fourth embodiment of the present invention.

100‧‧‧Actuator

110‧‧‧Actuation Department

112‧‧‧First actuation zone

114‧‧‧Second actuation zone

116‧‧‧Link

120‧‧‧ Bearing Department

130‧‧‧ Piezoelectric unit

133‧‧‧Isolation Department

134‧‧‧ First signal area

138‧‧‧Second Signal Area

140‧‧‧Conduction unit

141‧‧‧First electrode

143‧‧‧Second electrode

144‧‧‧Insulation

145‧‧‧Transmission Department

146‧‧‧ Base material

146a‧‧‧Smooth surface

150‧‧‧Regulation Department

Claims (11)

An actuator including: An actuating part, the actuating part has a first actuating area, a second actuating area and at least one connecting section between the first actuating area and the second actuating area; A piezoelectric unit having a first signal area and a second signal area, the first signal area and the second signal area are disposed between the same plane, and the first signal area and the second signal area An isolation portion is provided between the signal areas, and the piezoelectric unit is disposed at a corresponding position of the first actuation area of the actuation portion; A conductive unit including a first electrode and a second electrode, the first signal area of the piezoelectric unit is electrically connected to the first electrode of the conductive unit, and the second signal of the piezoelectric unit Electrically connected to the second electrode of the conductive unit; and An adjusting part, the piezoelectric unit, the conducting unit and the adjusting part are all located on the same side direction surface of the actuating part. The actuator as described in item 1 of the patent application scope further includes: A bearing portion, the bearing portion and the piezoelectric unit are located on the same plane, and the piezoelectric unit and the bearing portion are located in the same side direction of the actuating portion, and the bearing portion is disposed on the second actuator of the actuating portion The corresponding position of the dynamic zone. The actuator according to item 1 of the patent application scope, wherein the conduction unit further includes: An insulating layer, a conductive portion and a base material, the conductive unit is composed of the insulating layer, the conductive portion and the base material stack. An actuator as described in item 1 of the patent application range, wherein the adjustment portion has conductive properties. The actuator as described in item 1 of the scope of the patent application, wherein the adjustment portion is used to control the flatness of the overall structure of the actuator. An actuator as described in item 3 of the patent application range, wherein the base material is controlled by the adjustment portion so that the base material has a flat surface. An actuator as described in item 2 of the patent application range, wherein the piezoelectric unit, the conduction unit, the adjustment portion, and the bearing portion are all located in the same side direction of the actuation portion. The actuator according to item 1 of the patent application scope, wherein the first electrode and the second electrode are located on the same plane. The actuator as described in item 1 of the patent application scope further includes: A perforated sheet, the perforated sheet is disposed at a position corresponding to the first actuating area of the actuating portion. The actuator according to item 9 of the patent application range, wherein the piezoelectric unit includes a first channel, and the perforated sheet penetrates the first channel. The actuator according to item 9 of the patent application range, wherein the conduction unit includes a second channel corresponding to the perforated sheet, the perforated sheet is fixed to the actuating portion after passing through the second channel Consistent action zone.

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