TWM590316U - Actuator device - Google Patents

Abstract

An actuating device includes an actuating part, a piezoelectric unit, a bearing part, an adjustment layer, a conducting unit and a perforated sheet. The actuating part includes a first actuating area, a second actuating area and at least one connecting section. The piezoelectric unit includes a first through hole, a first signal area and a second signal area, and the two signal areas are electrically insulated from each other. The bearing part and the piezoelectric unit are located on the same plane. The adjustment layer is located on the same side surface of the piezoelectric unit and the mounting portion. The conducting unit includes a first conducting region, a second conducting region and a second through hole, the first signal region of the piezoelectric unit is electrically connected to the first conducting region of the conducting unit, and the second signal region of the piezoelectric unit is electrically connected to The second conduction region of the conduction unit. The perforated sheet is disposed at the corresponding positions of the first through hole and the second through hole, and is fixed to the actuating portion after being penetrated through the two through holes.

Description

Actuating device

The present invention relates to an actuating device, in particular to a uniform leveling structure of the actuating device through the adjustment layer design.

The piezoelectric pump is a new type of fluid driver, which does not require an additional driving motor, and can only deform the piezoelectric vibrator through the inverse piezoelectric effect of the electroceramic, and then generates a volume change of the pump cavity according to the aforementioned deformation to achieve fluid output, or The piezoelectric vibrator generates waves to transmit fluid, so piezoelectric pumps have gradually replaced traditional pumps and are widely used in electronics, biomedicine, aerospace, automotive, petrochemical and other industries

Generally speaking, a piezoelectric pump is composed of a piezoelectric unit and a pump body. When the piezoelectric unit is energized, the piezoelectric unit will be compressed radially under the action of an electric field, and a tensile stress will be generated inside it to bend and deform. When the piezoelectric unit is bent forward, the volume of the pump body cavity (hereinafter referred to as the pump cavity) will increase, so that the pressure in the pump cavity decreases, so that the fluid flows into the pump cavity from the inlet. On the other hand, when the piezoelectric unit bends in the reverse direction, the volume of the pump cavity decreases, so that the pressure in the pump cavity increases, so that the fluid in the pump cavity is squeezed and discharged from the outlet. At present, the signal conductive layer used to supply power to the piezoelectric unit is usually a three-dimensional structure, and is applied to the outside of the pump body. The overall volume is large and relatively easy to damage. When the positive and negative electrodes are used to separate the welding process, the reliability of the solder joint is inconsistent , Often affects the quality and performance of the piezoelectric pump. In addition, the solder joint protrusions located outside the pump body are prone to contact with foreign objects, resulting in abnormal pump body function and abnormal sound.

The present invention provides an actuating device, which is mainly provided with an adjustment layer between the bearing part, the piezoelectric unit, the conducting unit and the perforated sheet, through the planar electrical connection inside the pump body, so that the overall appearance structure of the actuating device is highly flat , Not only to overcome the problem of reducing the reliability of the previous welding process, but also to achieve the purpose of flattening the appearance of the surface and miniaturizing the volume of the actuator through the internal planar electrical connection technology

The actuating device of the present invention includes an actuating part, a piezoelectric unit, a bearing part, an adjustment layer, a conducting unit and a perforated sheet. The actuating part has a first actuating area, a second actuating area and at least one connecting section between the first actuating area and the second actuating area. The piezoelectric unit has a first through hole, a first signal area and a second signal area. The first signal area and the second signal area are electrically insulated from each other. The carrying part and the piezoelectric unit are located on the same side surface of the actuating part, and are located on the same plane. The piezoelectric unit is disposed in the first actuating region of the actuating part, and the carrying part is disposed in the second actuating region of the actuating part . The adjustment layer is located on the same side of the piezoelectric unit and the mounting portion. The conducting unit includes a first conducting region, a second conducting region and a second through hole, the first signal region of the piezoelectric unit is electrically connected to the first conducting region of the conducting unit, and the second signal region of the piezoelectric element is electrically Sexually connected to the second conduction region of the conduction unit. The perforated sheet is disposed at a corresponding position of the first through hole of the piezoelectric unit and the second through hole of the conductive unit, and is fixed to the actuating portion after being penetrated through the first through hole and the second through hole.

In an embodiment of the present invention, the above-mentioned conductive unit further includes an insulating layer, a conductive layer and a substrate. The conductive unit is composed of a stack of insulating layer, conductive layer and substrate.

In an embodiment of the present invention, the aforementioned adjustment layer has conductive properties.

In an embodiment of the present invention, the above-mentioned adjustment layer is used to control the flatness of the overall composition structure of the actuating device.

In an embodiment of the present invention, the above-mentioned substrate is controlled by the adjustment layer so that the substrate has a flat surface.

In an embodiment of the present invention, the piezoelectric unit, the loading portion, the adjustment layer, the conductive unit, and the perforated sheet are all located on the same side of the actuating portion.

In an embodiment of the invention, the first conductive area and the second conductive area are located on the same plane.

In an embodiment of the present invention, the first signal area of the piezoelectric unit, the first actuation area of the actuation portion, at least one connecting section, the second actuation area, the bearing portion, the adjustment layer, and the first of the conduction unit A first conductive path is formed between the conductive regions.

In an embodiment of the present invention, a second conductive path is formed between the second signal region of the piezoelectric unit, the adjustment layer, and the second conductive region of the conductive unit.

Based on the above, the actuating device of the present invention uniformly arranges the piezoelectric unit, the bearing portion, the adjustment layer, the conducting unit and the perforated sheet in the same side direction of the actuating portion to reduce the overall structural height of the actuating device. The adjustment layer controls the structural flatness of each component of the actuating device, so that the substrate has a flat surface, and improves and stabilizes the working efficiency of the actuating device.

In order to make the above-mentioned features and advantages of the present invention more obvious and understandable, the embodiments are specifically described below and described in detail in conjunction with the accompanying drawings.

FIG. 1 is a schematic diagram of an actuating device according to the first embodiment of the present invention. 2 is an exploded schematic view of the actuation device of FIG. 3 is an exploded schematic view of the actuating device of FIG. 1 from another perspective. 4 is a schematic cross-sectional view taken along line A-A of the actuator of FIG. 1. FIG. 5 is a partially enlarged schematic diagram of FIG. 4. Please refer to FIGS. 1 to 5. The actuating device 100 of this embodiment includes an actuating portion 110, a piezoelectric unit 130, a bearing portion 120, an adjustment layer 160, a conductive unit 140 and a perforated sheet 150. The actuator device 100 will be described in detail below.

Please refer to FIG. 2. In this embodiment, the actuating portion 110 includes a first actuating area 112, a second actuating area 114 and at least at least between the first actuating area 112 and the second actuating area 114.一连接段116。 A connection section 116. The first actuation zone 112 can be actuated relative to the second actuation zone 114. In addition, in this embodiment, the material of the actuating portion 110 may be composed of a metal material or a conductive material, but the material of the actuating portion 110 is not limited thereto.

2 and 3, in this embodiment, the piezoelectric unit 130 has a first surface 132 and a second surface 136 corresponding to each other (see FIG. 3), the piezoelectric unit 130 includes an electrically isolated The first signal area 134 and a second signal area 138 located on the opposite surface (see FIG. 3). The first signal area 134 is located on the first surface 132 and the second signal area 138 is located on the second surface 136.

Referring to FIG. 2, in this embodiment, the first surface 132 of the piezoelectric unit 130 faces the actuating portion 110, and the piezoelectric unit 130 is fixed to the first actuating area 112 of the actuating portion 110, and the piezoelectric unit 130 is energized At this time, the first actuating area 112 of the actuating portion 110 will be actuated, which in turn drives the actuating device 100 to generate vibration. In this embodiment, the overall shape of the piezoelectric unit 130 may be a hollow sheet or any geometric shape, and the outline of the outer periphery of the piezoelectric unit 130 may be circular, circular, arc, polygonal, rectangular, polygonal, etc. However, the shape of the piezoelectric unit 130 is not limited thereto.

Please refer to FIG. 2. In this embodiment, the actuating device 100 includes a carrying portion 120. The carrying portion 120 is disposed on the opposite surface of the second actuating area 114 of the actuating portion 110. In this embodiment, the first signal area 134 of the piezoelectric unit 130 contacts the first actuation area 112 of the actuation portion 110 for electrical conduction, and the carrying portion 120 is fixed to the second actuation area 114 of the actuation portion 110 . The carrying portion 120 is made of metal material or conductive material, or conductive material is coated on the carrying portion 120, but the material of the carrying portion 120 is not limited thereto.

Please refer to FIG. 4. In this embodiment, the actuating device 100 includes an adjustment layer 160. The adjustment layer 160 is disposed on the same side direction surface of the piezoelectric unit 130 and the loading portion 120. The adjustment layer 160 is selected to have conductive properties. The materials, such as: conductors, colloids, powders, elastomers, anisotropic conductive raw materials, and other materials, by controlling the thickness of the adjustment layer 160, the overall structure of the actuator 100 is highly flat. The adjustment layer 160 of this embodiment is disposed between the piezoelectric unit 130, the bearing portion 120 and the conduction unit 140 in a liquid form. The adjustment layer 160 is used to control the flatness of the structure of each component of the actuating device 100. The appearance shape is matched with the space formed by the piezoelectric unit 130, the bearing portion 120 and the conduction unit 140, and the appearance shape of the adjustment layer 160 is not limited by this embodiment.

Please refer to FIG. 2. In this embodiment, the actuating device 100 includes a conductive unit 140. The conductive unit 140 includes a first electrode 141, a second electrode 143 and a second through hole 147. Please refer to FIG. 2 and 3, in this embodiment, the conducting unit 140 is disposed at the bottom layer, and when the conducting unit 140 is energized, electrical signals are conducted to the first electrode 141 and the second electrode 143 respectively, wherein the first electrode 141 communicates with the first conduction Region 141a, the second electrode 143 communicates with the second conductive region 143b. According to the concept of the present invention, no matter how the order of the components of the carrier 120, the piezoelectric unit 130, the adjustment layer 150 and the conductive unit 140 changes, as long as the pressure can be The first signal region 134 of the electrical unit 130 is electrically connected to the first electrode 141 of the conductive unit 140, and the second signal region 138 is only electrically connected to the second electrode 143. The structure is not limited to this embodiment. For example, the first electrode 141 forms a first conductive region 141a around the outer side of the conductive unit 140. Using the first conductive region 141a as a medium, the first signal region 134 of the piezoelectric unit 130 is electrically connected to the first An electrode 141; in this embodiment, the second electrode 143 forms a second conductive region 143b at the center of the conductive unit 140, using the second conductive region 143b as a medium to make the second signal region 138 of the piezoelectric unit 130 The second electrode 143 of the conductive unit 140 is electrically connected. The patterns of the two conductive regions can be arbitrarily changed in appearance. For example: strips, arcs, triangles, polygons and other shapes, the first conductive region 141a and The shape and number of the second conductive regions 143b are not limited to this embodiment. In summary, the shape and number of the first conductive area 141a and the second conductive area 143b of the present invention are practically applied, as long as the first signal area 134 can be electrically connected to the first electrode 141 and the second signal area 138 It suffices to be electrically connected to the second electrode 143, and the shape and the number of the conductive patterns provided in the two conductive regions are not limited by this embodiment.

Please refer to FIG. 4. In this embodiment, the conductive unit 140 further includes an insulating layer 144, a conductive layer 145 and a substrate 146. The conductive layer 145 is composed of the first electrode 141 and the second electrode 143. The conductive unit 140 is composed of an insulating layer 144, a conductive layer 145 and a substrate 146 stacked in sequence. The first electrode 141 and the second electrode 143 of this embodiment are located on the same plane, but not limited to this, the thickness of the adjustment layer 160 is adjusted To make the overall thickness and flatness of the conductive unit 140 uniform. The thickness of the insulating layer 144 is less than or equal to (≦) 1 mm (mm). The thickness of the substrate 146 is adjusted through the adjustment layer 160 so that the substrate 146 has a flat surface 146a.

Please refer to FIG. 5, which is a partially enlarged schematic view of the circled circle of FIG. 4. In this embodiment, the conductive unit 140 is composed of an insulating layer 144, a conductive layer 145, and a substrate 146 in this order. The thickness adjustment is performed through the adjustment layer 160 to make the overall structure thickness of the conductive unit 140 uniform. And through the insulating layer 144, the conductive regions of the conductive layer 145 are isolated and insulated from each other. The base material 146 is located on the bottom surface of the conductive unit 140, and a flat surface 146a is formed through the adjustment layer 160, so that the combined conductive unit 140 is flatly coupled to the surface of the corresponding component of the actuator 100.

2 and FIG. 3, in this embodiment, the perforated sheet 150 and the piezoelectric unit 130, the bearing portion 120, the adjustment layer 160 and the conductive unit 140 are all located in the same direction of the actuating portion 110, and the perforated sheet 150 is disposed at the pressure The first through hole 131 of the electrical unit 130 and the second through hole 147 of the conductive unit 140 are at corresponding positions. During assembly, the perforated sheet 150 is sequentially penetrated through the second through hole 147 and the first through hole 131 and then fixed to the actuation The first actuation zone 112 of the part 110.

In addition, as shown in FIGS. 2 and 3, in this embodiment, the piezoelectric unit 130 is in the form of a hollow sheet body, and the through-hole sheet 150 is stably installed at the through hole 131 at the center of the piezoelectric unit 130 to surround the positioning. However, the appearance shape and the number of configurations of the piezoelectric unit 130 and the perforated sheet 150 are not limited thereto, and the corresponding configuration relationship between the piezoelectric unit 130 and the perforated sheet 150 is not limited thereby. The arrangement number and appearance shape of the second through holes 147 of the conduction unit 140 are synchronously matched with the arrangement number and appearance shape of the perforated sheet 150, and are not limited by this embodiment.

Referring to FIG. 4, in this embodiment, the bottom surface of the perforated sheet 150 protrudes out of the flat surface 146a of the substrate 146. According to the design concept of the present invention, regardless of whether the bottom surface of the perforated sheet 150 is flush with the flat surface 146a of the substrate 146 Flatness or protrusion does not affect the adjustment of the flatness adjustment of the flat surface 146a of the substrate 146 by the adjustment layer 160. Therefore, whether the bottom surface of the perforated sheet 150 is flush or convex with the flat surface 146a of the substrate 146 It varies according to the design of the actuating device 100, and is not limited to this embodiment.

In this embodiment, through the above configuration design, the first signal area 134 of the piezoelectric unit 130, the first actuation area 112 of the actuation portion 110, at least one interface section 116, the second actuation area 114, the bearing portion 120 The first conductive path is formed between the adjustment layer 160 and the first electrode 141 of the conductive unit 140. A second conductive path is formed between the second signal region 138 of the piezoelectric unit 130, the adjustment layer 160, and the second electrode 143 of the conductive unit 140.

The following describes other types of actuating devices 100a. Elements that are the same as or similar to the previous embodiment are indicated by the same or similar symbols, and will not be described in detail, and only the main differences between the different embodiments will be described below. 6 is a schematic cross-sectional view of an actuating device according to a second embodiment of the present invention. Please refer to FIGS. 4 and 6 together. The main difference between the actuating device 100 a of this embodiment and the actuating device 100 of the previous embodiment is that the second actuating region 114 of the actuating part 110 and the bearing part 120 are integrally formed The structure, that is, the actuating portion 110 and the bearing portion 120 have the same structure, so that the thickness of the second actuating area 114 of the actuating portion 110 is significantly increased compared to the thickness of the first actuating area 112, and is controlled by the adjustment layer 160 The overall appearance of the actuating device makes the structure highly flat.

Please refer to FIG. 6. In this embodiment, the thicknesses of the first actuating area 112 and the second actuating area 114 of the actuating portion 110 can be determined by the piezoelectric unit 130, the bearing portion 120, the adjustment layer 160, and the conducting unit 140 The configuration of the formed conductive path is changed, and the thicknesses of the respective structures of the first actuating region 112 and the second actuating region 114 can be adjusted at any time. In the previous embodiment, please refer to FIG. 4, the first actuating region 112 The thickness of the second actuation area 114 is the same. In this embodiment, please refer to FIG. 6. Because the actuation portion 110 and the bearing portion 120 are formed as an integrated structure, the first actuation area 112 and the second actuation area 114 The thicknesses are different, which shows that according to the design concept of the present invention, the thickness structures of the first actuating area 112 and the second actuating area 114 can be arbitrarily changed according to the structural design of the actuating device 100a.

The following describes other forms of actuating device 100b. Elements that are the same as or similar to the previous embodiment are indicated by the same or similar symbols, and will not be described in detail, and only the main differences between the different embodiments will be described below. 7 is a schematic cross-sectional view of an actuating device according to a third embodiment of the present invention. Please refer to FIGS. 4 and 7 together. The main difference between the actuating device 100b of this embodiment and the actuating device 100 of the first embodiment is that the bottom surface of the perforated sheet 150 is flush with the flat surface 146a of the substrate 146.

Please refer to FIG. 7. In this embodiment, according to the design concept of the present invention, regardless of whether the bottom surface of the perforated sheet 150 is flush or convex with the flat surface 146 a of the substrate 146, the adjustment layer 160 does not affect the substrate 146. The flat surface 146a is implemented for flatness adjustment. Therefore, whether the bottom surface of the perforated sheet 150 is flush or convex with the flat surface 146a of the base material 146 is changed according to the design of the actuating device 100b. limit.

In summary, the actuation device of the present invention is designed through the piezoelectric layer 130, the bearing portion 120, the adjustment layer 160, the conductive unit 140 and the perforated sheet 150 are disposed in the same direction of the actuation portion 110, through the adjustment layer 160 Control the flatness of the overall structure of the actuating device, and make the substrate 146 have a flat surface. Compared with the conventional multi-layer actuating device structure, the actuating device of this embodiment has a thinner overall thickness and a micro structure In addition, the overall structure of the actuating device has high flatness characteristics, which can effectively increase the driving efficiency of the actuating device.

Although the present invention has been disclosed as above with examples, it is not intended to limit the present invention. Anyone who has ordinary knowledge in the technical field can make some changes and retouching without departing from the spirit and scope of the present invention. The scope of protection of this new model shall be subject to the scope defined in the appended patent application.

100, 100a, 100b‧‧‧actuator

110‧‧‧Actuation Department

112‧‧‧First actuation zone

114‧‧‧Second actuation zone

116‧‧‧ Connection

120‧‧‧ Bearing Department

130‧‧‧ Piezoelectric unit

131‧‧‧First through hole

132‧‧‧The first side

134‧‧‧ First signal area

136‧‧‧Second side

138‧‧‧Second Signal Area

140‧‧‧Conduction unit

141‧‧‧First electrode

141a‧‧‧The first conduction zone

143‧‧‧Second electrode

143b‧‧‧Second conduction zone

144‧‧‧Insulation

145‧‧‧ conductive layer

146‧‧‧ Base material

146a‧‧‧Smooth surface

147‧‧‧ Second through hole

150‧‧‧Perforated film

160‧‧‧Regulation layer

FIG. 1 is a schematic diagram of an actuating device according to the first embodiment of the present invention. 2 is an exploded schematic view of the actuation device of FIG. 3 is an exploded schematic view of the actuating device of FIG. 1 from another perspective. 4 is a schematic cross-sectional view taken along line A-A of the actuator of FIG. 1. FIG. 5 is a partially enlarged schematic diagram of FIG. 4. 6 is a schematic cross-sectional view of an actuating device according to a second embodiment of the present invention. 7 is a schematic cross-sectional view of an actuating device according to a third embodiment of the present invention.

100‧‧‧actuator

110‧‧‧Actuation Department

112‧‧‧First actuation zone

114‧‧‧Second actuation zone

116‧‧‧ Connection

120‧‧‧ Bearing Department

130‧‧‧ Piezoelectric unit

131‧‧‧First through hole

134‧‧‧ First signal area

138‧‧‧Second Signal Area

140‧‧‧Conduction unit

141a‧‧‧The first conduction zone

143b‧‧‧Second conduction zone

147‧‧‧ Second through hole

144‧‧‧Insulation

145‧‧‧ conductive layer

146‧‧‧ Base material

146a‧‧‧Smooth surface

150‧‧‧Perforated film

160‧‧‧Regulation layer

Claims (9)

An actuating device includes: an actuating portion, the actuating portion has a first actuating area, a second actuating area and at least one connection between the first actuating area and the second actuating area Segment; a piezoelectric unit, the piezoelectric unit has a first through hole, a first signal area and a second signal area, and the first signal area and the second signal area are electrically insulated from each other; a bearing Part, the carrying part and the piezoelectric unit are located on the same plane, and the piezoelectric unit and the loading part are located on the same side direction surface of the actuating part, the piezoelectric unit is disposed on the first part of the actuating part An actuation area, the bearing portion is disposed on the second actuation area of the actuation portion; an adjustment layer, the adjustment layer is located on the same side surface of the piezoelectric unit and the loading portion; a conduction unit, the conduction unit It includes a first conductive area, a second conductive area and a second through hole, the first signal area of the piezoelectric unit is electrically connected to the first conductive area of the conductive unit, the first of the piezoelectric element The two signal areas are electrically connected to the second conduction area of the conduction unit; and a perforated piece, the perforated piece is disposed at a position corresponding to the first through hole of the piezoelectric unit and the second through hole of the conduction unit, and The first through hole and the second through hole are fixed to the actuating part after passing through. The actuating device as described in item 1 of the patent application scope, wherein the conduction unit further includes: An insulating layer, a conductive layer and a substrate. The conductive unit is formed by stacking the insulating layer, the conductive layer and the substrate. The actuating device as described in item 1 of the patent application scope, wherein the adjustment layer has conductive properties. The actuating device as described in item 1 of the patent application scope, wherein the adjustment layer is used to control the flatness of the overall composition structure of the actuating device. The actuating device as described in item 2 of the patent application range, wherein the substrate is controlled by the adjustment layer so that the substrate has a flat surface. The actuating device according to item 1 of the patent application scope, wherein the piezoelectric unit, the loading portion, the adjustment layer, the conducting unit, and the perforated sheet are all located on the same side of the actuating portion. The actuating device as described in item 1 of the patent application range, wherein the conduction unit has a first electrode and a second electrode, and the first electrode and the second electrode are located on the same plane. The actuating device according to item 1 of the patent application scope, wherein the first signal area of the piezoelectric unit, the first actuating area of the actuating portion, the at least one connecting section, and the second actuating area , A first conductive path is formed between the bearing portion, the adjustment layer, and the first conductive region of the conductive unit. The actuating device according to item 1 of the patent application scope, wherein a second conductive path is formed between the second signal region of the piezoelectric unit, the adjustment layer, and the second conductive region of the conductive unit.

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