TWM570536U - Fluid driving system - Google Patents

Abstract

A fluid driving system includes a vibration unit, a piezoelectric element, a signal transmission layer, a plane unit and a protrusion. The piezoelectric element includes a first electrode and a second electrode insulated from each other. The signal transmission layer includes a first conductive zone and a second conductive zone. The first electrode of the piezoelectric element is electrically connected to the first conductive zone of the signal transmission layer, and the second electrode of the piezoelectric element is electrically connected to the second conductive zone of the signal transmission layer. The plane unit has at least one hole. The piezoelectric element, the signal transmission layer and the plane unit are located at a side of the vibration unit. The protrusion is located between the vibration unit and the plane unit, the protrusion corresponds to the hole and protrudes toward the hole.

Description

Fluid drive system

The present invention relates to a fluid drive system, and more particularly to a fluid drive system in which a signal conducting layer electrically connected to a piezoelectric element has better protection.

The piezoelectric pump is a new type of fluid driver, which does not require an additional driving motor. The piezoelectric vibrator can be deformed only by the inverse piezoelectric effect of the electric ceramic, and then the volume change of the pump chamber is generated according to the aforementioned deformation to realize the fluid output, or The piezoelectric vibrator generates fluctuations to transmit fluids, so piezoelectric pumps have gradually replaced traditional pumps and are widely used in electronics, biomedical, aerospace, automotive, and petrochemical industries.

In general, a piezoelectric pump is composed of a piezoelectric element and a pump body. When the piezoelectric element is energized, the piezoelectric element is radially compressed by an electric field, and tensile stress is generated inside the piezoelectric element to be bent and deformed. When the piezoelectric element is bent forward, the volume of the chamber of the pump body (hereinafter referred to as the pump chamber) is increased, so that the pressure in the pump chamber is reduced to allow fluid to flow from the inlet into the pump chamber. On the other hand, when the piezoelectric element is bent in the reverse direction, the volume of the pump chamber is reduced, so that the pressure in the pump chamber is increased, so that the fluid in the pump chamber is squeezed and discharged from the outlet. At present, the circuit structure for supplying power to the piezoelectric element is usually a multi-layer structure and is located outside the pump body, and the overall volume is large and easily damaged.

The present invention provides a fluid drive system for electrically connecting to a signal conducting layer of a piezoelectric element for better protection.

A fluid drive system of the present invention includes an actuating unit, a piezoelectric element, a signal conducting layer, a planar unit and a projection. The piezoelectric element includes a first electrode and a second electrode that are electrically isolated. The signal conducting layer comprises a first conducting region and a second conducting region, the first electrode of the piezoelectric element is conductive to the first conducting region of the signal conducting layer, and the second electrode of the piezoelectric element is conducting the second conducting of the signal conducting layer Area. The planar unit has at least one hole, wherein the piezoelectric element, the signal conducting layer and the planar unit are respectively located on the same side of the actuating unit. The projection is located between the actuating unit and the planar unit, the projection corresponding to the aperture and projecting toward the aperture.

In an embodiment of the present invention, the piezoelectric element has a through hole, and the protruding portion is bored in the through hole and fixed to the actuating unit.

In an embodiment of the invention, the projections are surrounded by the piezoelectric element.

In an embodiment of the present invention, the actuating unit, the piezoelectric element, the signal conducting layer and the planar unit are sequentially stacked.

In an embodiment of the present invention, the piezoelectric element has a first surface and a second surface opposite to each other, and the first electrode and the second electrode are respectively located on the first surface and the second surface, and the first of the piezoelectric elements The surface faces the actuating unit, and the actuating unit is a conductor, and the first electrode of the piezoelectric element is electrically connected to the first conducting region of the signal conducting layer through the actuating unit.

In an embodiment of the present invention, the fluid drive system further includes a frame, the actuation unit includes a first central zone, a first surrounding zone, and a plurality of first central zone and first surrounding zone The first connecting region, the protruding portion and the piezoelectric element are fixed to the first central portion of the actuating unit, and the frame is fixed to the first surrounding area of the actuating unit.

In an embodiment of the invention, the frame is coplanar with respect to a surface of the planar unit on a surface of the piezoelectric element facing the planar unit.

In an embodiment of the present invention, the actuating unit includes a first central area, a first surrounding area, and a plurality of first connecting areas connected to the first central area and the first surrounding area, and the first surrounding area A surface that faces the planar unit is coplanar with the piezoelectric element facing a surface of the planar unit.

In an embodiment of the present invention, the fluid drive system further includes a conducting unit between the piezoelectric element and the planar unit, the conducting unit including a second central region corresponding to the piezoelectric element and the second central region In addition to a second peripheral zone, a first conductive zone is formed in the second central zone of the conducting unit and a second conducting zone is formed in the second peripheral zone of the conducting unit.

In an embodiment of the present invention, the fluid drive system further includes a carrier disposed between a first surrounding area of the actuating unit and the planar unit, the carrier being coplanar with respect to a surface of the planar unit The portion is oriented toward a surface of the planar unit.

In an embodiment of the present invention, the fluid drive system further includes a conducting unit between the piezoelectric element and the planar unit, and the carrier is disposed between the conducting unit and the planar unit.

In an embodiment of the invention, the carrier is integral with the conducting unit.

In an embodiment of the present invention, the actuating unit, the signal conducting layer, the piezoelectric element and the planar unit are sequentially stacked.

In an embodiment of the present invention, the fluid drive system further includes a conductive unit, the first conductive region and the second conductive region are formed on the conductive unit, and the conductive unit is located between the actuating unit and the piezoelectric element, and the piezoelectric The component includes a first side facing the conductive unit, and the first electrode and the second electrode are located on the first side.

In an embodiment of the present invention, the conductive unit is a flexible printed circuit board (FPCB).

In an embodiment of the present invention, the actuating unit and the protruding portion are integrated.

Based on the above, the piezoelectric element, the signal conducting layer and the planar unit of the fluid drive system of the present invention are respectively located on the same side of the actuating unit. Since the signal conducting layer for electrically connecting the first electrode and the second electrode of the piezoelectric element is located between the actuating unit and the planar unit, the signal conducting layer is formed inside the fluid driving system to have better protection. . Moreover, in general, the central portion of the fluid drive system (i.e., where each layer corresponds to the orifice of the valve plate) is said to be the primary functional area of the fluid drive system. The fluid drive system of the present invention has a projection disposed between the actuating unit and the planar unit, the projection corresponding to the aperture and projecting toward the aperture. In this way, the movable member of the fluid drive system of the present invention can have only the actuating unit, the protruding portion and the planar unit in the central position. In other words, the fluid drive system of the present invention has a small number of movable members at the central position, so that The fluid drive system has small tolerances and thus good accuracy.

The above described features and advantages of the present invention will be more apparent from the following description.

1 is a schematic illustration of a fluid drive system in accordance with a first embodiment of the present invention. 2 is a schematic illustration of another perspective of the fluid drive system of FIG. 1. 3 is a schematic exploded view of the fluid drive system of FIG. 1. 4 is a schematic view of another perspective of FIG. 3. 5A is a schematic cross-sectional view of the fluid drive system of FIG. 1. 5B is a top plan view of the projection and piezoelectric element of the fluid drive system of FIG. 1. Referring to FIG. 1 to FIG. 5B , the fluid drive system 100 of the present embodiment includes an actuator unit 110 , a piezoelectric element 130 , a signal conducting layer 145 , a planar unit 160 , and a protrusion 155 . The fluid drive system 100 will be described in detail below.

Referring to FIG. 3 and FIG. 4 , in the embodiment, the actuation unit 110 includes a first central area 112 , a first surrounding area 114 , and a plurality of first central area 112 and first surrounding area 114 . A connection area 116. The first central zone 112 is moveable relative to the first peripheral zone 114. In addition, in the embodiment, the material of the actuation unit 110 may include a metal or an alloy, and has a flexible property, but the material of the actuation unit 110 is not limited thereto. Of course, in other embodiments, the actuation unit 110 may also have only partial electrical conductivity, such as a local location of the first central zone 112, the first peripheral zone 114, and the first surrounding zone 114.

In this embodiment, the piezoelectric element 130 has a first surface 132 and a second surface 136 opposite to each other, and includes a first electrode 134 (shown in FIG. 3) and a second electrode 138 (labeled) electrically isolated. Figure 4). The first electrode 134 and the second electrode 138 are located on the first surface 132 and the second surface 136, respectively. One of the first electrode 134 and the second electrode 138 is a positive electrode, and the other is a negative electrode.

In the present embodiment, the first face 132 of the piezoelectric element 130 faces the actuation unit 110. More specifically, in the present embodiment, the piezoelectric element 130 is fixed to the first central region 112 of the actuation unit 110, and moves when the piezoelectric element 130 is energized, and can drive the first center of the actuation unit 110. Zone 112 sports. In addition, in this embodiment, the shape of the piezoelectric element 130 may be a sheet shape or an arbitrary geometric shape, and the outline of the piezoelectric element 130 is curved, polygonal, rectangular, polygonal, etc., and the shape of the piezoelectric element 130 is not This is a limitation.

In this embodiment, the signal conducting layer 145 includes a first conductive region 149 and a second conductive region 148 that are electrically isolated. More specifically, in the present embodiment, the fluid drive system 100 further includes a conduction unit 140 between the piezoelectric element 130 and the planar unit 160. The conductive unit is made of a flexible or printed printed circuit board (FPCB). The conducting unit 140 includes a second central zone 141 surrounded by a plurality of slots 142 and corresponding to the piezoelectric element 130 and a second peripheral zone 143 located outside of the second central zone 141. The first conductive region 149 and the second conductive region 148 are formed on the conductive unit 140, respectively. More specifically, the second conductive region 148 is formed in the second central region 141 of the conductive unit 140, and the first conductive region 149 is formed in the second peripheral region 143 of the conductive unit 140. The first conductive region 149 and the second conductive region 148 on the conductive unit 140 are electrically isolated from each other and are not electrically connected.

In the present embodiment, the first electrode 134 of the piezoelectric element 130 is turned on the first conductive region 149 of the signal conducting layer 145, and the second electrode 138 of the piezoelectric element 130 is turned on the second conductive region 148 of the signal conducting layer 145. As shown in FIG. 4 and FIG. 5, in the present embodiment, the second conductive region 148 is electrically connected to the second electrode 138 of the piezoelectric element 130 through a second conductive region 146. In addition, as shown in FIG. 3 and FIG. 5, in the embodiment, the actuation unit 110 is a conductor, and the first electrode 134 of the piezoelectric element 130 is electrically connected to the first conductive region 149 of the signal conducting layer 145 through the actuation unit 110. .

More specifically, returning to FIG. 3, in the present embodiment, the fluid drive system 100 further includes a frame 120 positioned at the first surrounding area 114 of the actuation unit 110 and the second of the conducting unit 140. Between the surrounding area 143. In the present embodiment, the first electrode 134 of the piezoelectric element 130 is in contact with the first central region 112 of the electrically actuated actuation unit 110, and the frame 120 is fixed to the first peripheral region 114 of the actuation unit 110, the conduction unit The first conductive region 147 of the 140 is located in the second peripheral region 143 of the conductive unit 140, and the first conductive region 147 is coupled to the conductive region 149. The frame 120 is made of, for example, a metal material.

The above configuration is such that the first electrode 134 of the piezoelectric element 130, the first central region 112 of the actuation unit 110, the first connection region 116, the first surrounding region 114, the frame 120, the first conductive region 147, and the first conductive region A conduction path is formed between 149. Therefore, the first electrode 134 of the piezoelectric element 130 can be electrically connected to the first conduction region 149 of the conduction unit 140.

Of course, in other embodiments, the first conductive region 149 and the second conductive region 148 may also be two general-form wires, or may be directly connected to the first electrode 134 and the second electrode 138 of the piezoelectric element 130, first. The conductive region 149 and the second conductive region 148 are not necessarily formed on the conductive unit 140, and the first conductive region 149 and the second conductive region 148 are not necessarily formed in the same layer, and the first electrode 134 of the piezoelectric element 130 is The first conductive region 149 is not necessarily connected to the frame 120 through the driving unit 110, and is not limited by the above, as long as the first conductive region 149 and the second conductive region 148 are electrically connected to the piezoelectric element 130. The first electrode 134 and the second electrode 138 may be used.

Further, in the present embodiment, the piezoelectric element 130 has a through hole 131. The conducting unit 140 has an opening 144 corresponding to the through hole 131. The protruding portion 155 is disposed through the through hole 131 of the piezoelectric element 130 and the opening 144 of the conducting unit 140 and is fixed to the first central region 112 of the actuating unit 110. In the present embodiment, the projection 155 is surrounded by the piezoelectric element 130 and the conduction unit 140.

In general, the central portion of the fluid drive system (i.e., the portion of the movable layer that corresponds to the orifice of the valve plate) is said to be the primary functional area of the fluid drive system. As shown in FIG. 5A, the fluid drive system 100 of the present embodiment arranges the projection 155 between the actuation unit 110 and the planar unit 160. The projection 155 corresponds to the aperture 166 and projects toward the aperture 166. As such, the movable member of the fluid drive system 100 at the central position may have only the actuation unit 110, the projection 155, and the planar unit 160. Therefore, in the present embodiment, the fluid drive system 100 has a small number of movable members at a central position, so that the fluid drive system 100 can have a small tolerance in the main functional area, thereby having good precision.

Continuing to return to FIG. 3, in the present embodiment, the planar unit 160 is a valve plate, but the form of the planar unit 160 is not limited thereto. The planar unit 160 includes three arcuate shaped slots 163 that surround the circular fourth central zone 162 and define a fourth peripheral zone 164 that is external to the fourth central zone 162. The planar unit 160 also includes A hole 166 is formed in the fourth central zone 162. In the present embodiment, the position of the fourth central portion 162 corresponds to the position of the piezoelectric element 130. In other embodiments, the number and shape of the slots 163 of the planar unit 160 are not limited thereto. In addition, the material of the planar unit 160 may be a metal or a non-conductive material, but the material of the planar unit 160 is not limited thereto.

In addition, as shown in FIG. 3 , in the present embodiment, the fluid drive system 100 further includes a flow guide 170 , and the planar unit 160 is located between the piezoelectric element 130 and the flow guide 170 . In the present embodiment, the flow guiding member 170 includes a fifth central region 172 surrounded by the plurality of grooves 175 and corresponding to the piezoelectric element 130, and a fifth surrounding region 174 located outside the fifth central region 172. Three through holes 176 penetrating the flow guiding member 170 and three flow paths 178 respectively communicating with the three through holes 176. Of course, the number of the through holes 176 and the flow passages 178 of the flow guide 170 is not limited thereto.

In the present embodiment, the fifth peripheral zone 174 of the flow guide 170 is attached to the fourth peripheral zone 164 of the planar unit 160, and the fourth central zone 162 of the planar unit 160 is movable relative to the fourth surrounding zone 164. In addition, in this embodiment, the material of the flow guiding member 170 may include a metal or an alloy, but the material of the flow guiding member 170 is not limited thereto.

It is worth mentioning that, in this embodiment, the piezoelectric element 130, the signal conducting layer 145 and the planar unit 160 are respectively located on the same side of the actuating unit 110 and are sequentially stacked. In other words, in the present embodiment, the piezoelectric element 130 and the signal conducting layer 145 are located between the actuating unit 110 and the planar unit 160. Since the signal conducting layer 145 is primarily formed inside the fluid drive system 100. As such, the fluid drive system 100 of the present embodiment can provide better protection to the signal conducting layer 145.

In addition, as seen in FIG. 5A, in the present embodiment, the frame 120 is coplanar with respect to a surface of the planar unit 160 on a surface of the piezoelectric element 130 facing the planar unit 160. Since the lower surface of the frame 120 is flush with the lower surface of the piezoelectric element 130, the operator can attach the conductive unit 140 to the lower surface of the frame 120 and the lower surface of the piezoelectric element 130 at one time during assembly. Without segmentation, it is convenient to assemble and ensure the flatness of the conduction unit 140.

In addition, as seen in FIG. 5A, in the present embodiment, the fluid drive system 100 further includes a carrier 150 disposed between the first peripheral zone 114 of the actuation unit 110 and the fourth peripheral zone 164 of the planar unit 160. More specifically, the carrier 150 is disposed between the second peripheral zone 143 of the conductive unit 140 and the fourth surrounding zone 164 of the planar unit 160. In the present embodiment, the sum of the thickness of the frame 120, the thickness of the conductive unit 140, and the thickness of the carrier 150 is substantially the same as the thickness of the projection 155. Therefore, the carrier 150 is coplanar toward a surface of the planar unit 160 with the projection 155 facing a surface of the planar unit 160.

As such, after the fluid drive system 100 is assembled, the projection 155 can abut the portion of the planar unit 160 near the aperture 166, and can ensure that at a certain moment of actuation (eg, the time of FIG. 5), the projection 155 abuts aperture 166 such that fluid (not shown) does not pass through aperture 166.

It is to be noted that, in the fluid drive system 100 of the present embodiment, the signal conducting layer 145 that is conducted to the piezoelectric element 130 is disposed on the single-piece conducting unit 140 between the actuating unit 110 and the planar unit 160. Since the signal conducting layer 145 is formed on the single-piece conducting unit 140, the fluid-driven system 100 of the present embodiment also has a smaller overall thickness than the conventional fluid-driven system having multiple layers of signal-conducting layers. easy and convenient. Moreover, since the conductive unit 140 is primarily located inside the fluid drive system 100, the signal conducting layer 145 is preferably protected.

It is worth mentioning that, as shown in FIG. 5B, in the present embodiment, the piezoelectric element 130 is annular so that the projection 155 is continuously surrounded by the piezoelectric element 130. However, the shape and number of the piezoelectric element 130, and the arrangement relationship between the piezoelectric element 130 and the protruding portion 155 are not limited thereto.

5C-5D are top plan views of projections and piezoelectric elements, respectively, in accordance with various embodiments of the present invention. Referring first to Figure 5C, in the present embodiment, the piezoelectric element 130' is C-shaped and has an opening. The projection 155 is located within the piezoelectric element 130' and is discontinuously surrounded by the piezoelectric element 130'. Referring again to Figure 5D, in the present embodiment, the fluid drive system can have two piezoelectric elements 130'', each of which is curved. The projections 155 are located within the two piezoelectric elements 130'' and are discontinuously surrounded by the piezoelectric elements 130''.

Other forms of fluid drive systems 100a, 100b, 100c, 100d will be described below. The same or similar elements as those of the previous embodiment are denoted by the same or similar reference numerals and will not be described again. Only the main differences between the different embodiments will be described below.

Figure 6 is a schematic exploded view of a fluid drive system in accordance with a second embodiment of the present invention. 7 is a schematic illustration of another perspective of the fluid drive system of FIG. 6. Figure 8 is a schematic cross-sectional view of the fluid drive system of Figure 6. Referring to FIG. 6 to FIG. 8, the main difference between the fluid drive system 100a of the present embodiment and the fluid drive system 100 of the previous embodiment is that, in the previous embodiment, as shown in FIG. 5A, the conduction unit 140 is in the second The thickness of the central zone 141 is the same as the thickness of the second peripheral zone 143, and the carrier 150 is disposed between the second peripheral zone 143 of the conductive unit 140a and the planar unit 160.

In the present embodiment, as shown in FIG. 8, the conductive unit 140a has a different thickness, particularly the thickness of the second central portion 141 of the conductive unit 140a is smaller than the thickness of the second peripheral region 143a. In the present embodiment, the conducting unit 140a can be seen as a structure that integrates the second peripheral zone 143 of the conducting unit 140 of FIG. 5A with the carrier 150. Therefore, in the present embodiment, the lower surface of the projection 155 is flush with the conduction unit 140a at the lower surface of the second peripheral region 143a.

Figure 9 is a schematic exploded view of a fluid drive system in accordance with a third embodiment of the present invention. 10 is a schematic illustration of another perspective of the fluid drive system of FIG. 9. Figure 11 is a cross-sectional view of the fluid drive system of Figure 9. Referring to FIGS. 9-11, the fluid drive system 100b of the present embodiment differs from the fluid drive system 100 of the embodiment of FIG. 5A in that, in the embodiment of FIG. 5A, the first central region 112 of the actuation unit 110 The thickness is the same as the thickness of the first peripheral zone 114. Further, in the embodiment of FIG. 5A, the area in which the carrier 150 is distributed corresponds to the area in which the second surrounding area 143 of the conductive unit 140 is distributed. That is, in the embodiment of FIG. 5A, the carrier 150 is a second peripheral zone 143 that is superposed on the conductive unit 140.

As shown in FIG. 10, in the present embodiment, the actuating unit 110b has a boss 113b on the surface (lower surface) of the first central portion 112 facing the piezoelectric element 130. Further, as shown in FIG. 11, the lower surface of the first peripheral area 114b of the actuation unit 110b is flush with the lower surface of the boss 113b. In the present embodiment, the boss 113b passes through the through hole 131 of the piezoelectric element 130, and the lower surface of the piezoelectric element 130 is flush with the lower surface of the boss 113b.

Further, as shown in FIG. 11, in the present embodiment, the outer contour of the second peripheral area 143 of the conductive unit 140b is smaller than or equal to the inner contour of the carrier 150b, so that the conductive unit 140b can be located within the carrier 150b, The conducting unit 140b and the carrier 150b do not overlap in most of the area. The carrier 150b is in direct contact with the first peripheral zone 114b of the actuation unit 110b. In the present embodiment, the projection 155 is disposed on the boss 113b, and the lower surface of the projection 155 is flush with the lower surface of the carrier 150b. In the present embodiment, the thickness of the projection 155 is substantially the same as the thickness of the carrier 150b. Therefore, the projection 155 and the carrier 150b can be made of the same piece of material so that the projection 155 and the carrier 150b have high precision.

It is worth mentioning that, as shown in FIG. 9, in the embodiment, the carrier 150b has a recessed portion 152, and the thickness of the carrier 150b in the recessed portion 152 is smaller than the thickness of the other portion of the carrier 150b, and the recessed portion 152 It is used to place a portion of the conductive unit 140b thereon. Therefore, the reduced thickness of the depressed portion 152 is substantially the same as the thickness of the conductive unit 140b. Of course, in other embodiments, the carrier 150b may also be hollowed out (without this portion) in a region corresponding to the recess 152 for passage of a portion of the conductive unit 140b, and the form of the carrier 150b is not limited thereto.

Figure 12 is a cross-sectional view of a fluid drive system in accordance with a fourth embodiment of the present invention. Referring to Figure 12, the main difference between the fluid drive system 100c of the present embodiment and the fluid drive system 100b of Figure 11 is that in the fluid drive system 100b of Figure 11, the actuation unit 110b has a plurality of thicknesses. Further, in the central portion of the fluid drive system 100b of FIG. 11, the actuation unit 110b, the piezoelectric element 130, the conduction unit 140b having the signal conduction layer, and the planar unit 160 are sequentially stacked.

In the fluid drive system 100c of the present embodiment, the actuation unit 110 has a single thickness. Further, in the central portion of the fluid drive system 100c of FIG. 12, the conduction unit 140b is located between the actuation unit 110 and the piezoelectric element 130. That is, in the fluid drive system 100c of the present embodiment, the actuation unit 110, the conduction unit 140b having the signal conduction layer, the piezoelectric element 130, and the planar unit 160 are sequentially stacked.

Further, in the present embodiment, the first electrode 134 and the second electrode 138 of the piezoelectric element 130 are located toward the surface of the conduction unit 140b (the upper surface of the piezoelectric element 130), and the first electrode 134 and the second electrode 138 are in contact with each other. Electrically isolated. The conducting unit 140b includes a first conductive region 147 and a second conductive region 146 on the lower surface and insulated from each other, and the first conductive region 147 and the second conductive region 146 of the conductive unit 140b correspond to the first electrode of the piezoelectric element 130, respectively. The 134 and the second electrode 138 are such that the piezoelectric element 130 is electrically connected to the conduction unit 140.

In this embodiment, since the piezoelectric element 130 is in direct contact with and conductive to the conduction unit 140, the piezoelectric element 130 is not electrically connected to the conduction unit 140 through the actuation unit 110. Therefore, the material of the actuation unit 110 may not be metal, for example, The material of the moving unit 110 may be ceramic or plastic, but is not limited thereto.

Further, in the present embodiment, since the thickness of the projection 155 is substantially the same as the thickness of the carrier 150c. Therefore, the projection 155 and the carrier 150c can be made of the same piece of material so that the projection 155 and the carrier 150c have high precision.

Figure 13 is a cross-sectional view of a fluid drive system in accordance with a fifth embodiment of the present invention. Referring to FIG. 13, the main difference between the fluid drive system 100d of the present embodiment and the fluid drive system 100c of FIG. 12 is that, in the present embodiment, the actuation unit 110d can be regarded as the actuation unit 110 of FIG. The portion 155 and the carrier 150c are integrally formed. In this way, not only the portion of the actuating unit 110d corresponding to the boss 115 of the hole 166 but also the portion of the carrier 150c can be integrally formed with good height accuracy. The fluid drive system 100d may have fewer movable members in the central position (only the actuation unit 110d), such that the fluid drive system 100d has less tolerance and thus good accuracy.

In summary, the piezoelectric element, the signal conducting layer and the planar unit of the fluid drive system of the present invention are respectively located on the same side of the actuating unit. Since the signal conducting layer for electrically connecting the first electrode and the second electrode of the piezoelectric element is located between the actuating unit and the planar unit, the signal conducting layer is formed inside the fluid driving system to have better protection. . Moreover, in general, the central portion of the fluid drive system (i.e., where each layer corresponds to the orifice of the valve plate) is said to be the primary functional area of the fluid drive system. The fluid drive system of the present invention has a projection disposed between the actuating unit and the planar unit, the projection corresponding to the aperture and projecting toward the aperture. In this way, the fluid driving system of the present invention can have only the actuating unit, the protruding portion and the planar unit in the central position. In other words, the fluid driving system of the present invention has a small number of components in the central position, so that the fluid is driven. The system has small tolerances and thus good accuracy.

Although the present invention has been disclosed in the above embodiments, it is not intended to limit the present invention, and any person skilled in the art can make some changes and refinements without departing from the spirit and scope of the present invention. The scope of the present invention is defined by the scope of the appended claims.

100, 100a, 100b, 100c, 100d‧‧‧ fluid drive systems

110, 110b, 110d‧‧‧ actuation unit

112‧‧‧First Central District

113b, 115‧‧‧ boss

114, 114b‧‧‧ the first surrounding area

116‧‧‧First connection area

120‧‧‧ frame

130, 130', 130''‧‧‧ Piezoelectric components

131‧‧‧through hole

132‧‧‧ first side

134‧‧‧first electrode

136‧‧‧ second side

138‧‧‧second electrode

140, 140a, 140b‧‧‧ Conducting unit

141‧‧‧Second Central District

142‧‧‧through slot

143, 143a‧‧‧Second surrounding area

144‧‧‧opening

145‧‧‧Signal Conductive Layer

146‧‧‧Second conductive area

147‧‧‧First conductive area

148‧‧‧Second conduction zone

149‧‧‧First Conduction Zone

150, 150b, 150c‧‧‧ carriers

152‧‧‧Depression

155‧‧‧Protruding

160‧‧‧ planar unit

162‧‧‧ Fourth Central District

163‧‧‧through slot

164‧‧The fourth surrounding area

166‧‧‧ hole

170‧‧‧ deflector

172‧‧‧ Fifth Central District

174‧‧‧ Fifth surrounding area

175‧‧‧ Groove

176‧‧‧through holes

178‧‧‧ flow path

1 is a schematic illustration of a fluid drive system in accordance with a first embodiment of the present invention. 2 is a schematic illustration of another perspective of the fluid drive system of FIG. 1. 3 is a schematic exploded view of the fluid drive system of FIG. 1. 4 is a schematic view of another perspective of FIG. 3. 5A is a schematic cross-sectional view of the fluid drive system of FIG. 1. 5B is a top plan view of the projection and piezoelectric element of the fluid drive system of FIG. 1. 5C-5D are top plan views of projections and piezoelectric elements, respectively, in accordance with various embodiments of the present invention. Figure 6 is a schematic exploded view of a fluid drive system in accordance with a second embodiment of the present invention. 7 is a schematic illustration of another perspective of the fluid drive system of FIG. 6. Figure 8 is a schematic cross-sectional view of the fluid drive system of Figure 6. Figure 9 is a schematic exploded view of a fluid drive system in accordance with a third embodiment of the present invention. 10 is a schematic illustration of another perspective of the fluid drive system of FIG. 9. Figure 11 is a cross-sectional view of the fluid drive system of Figure 9. Figure 12 is a cross-sectional view of a fluid drive system in accordance with a fourth embodiment of the present invention. Figure 13 is a cross-sectional view of a fluid drive system in accordance with a fifth embodiment of the present invention.

Claims (16)

A fluid drive system comprising: an actuating unit; a piezoelectric element comprising a first electrode and a second electrode electrically isolated; a signal conducting layer comprising a first conducting region and a second conducting region, The first electrode of the piezoelectric element is electrically connected to the first conductive region of the signal conducting layer, the second electrode of the piezoelectric element is electrically connected to the second conductive region of the signal conducting layer; and a planar unit having at least one a hole, wherein the piezoelectric element, the signal conducting layer and the planar unit are respectively located on the same side of the actuating unit; and a protruding portion is located between the actuating unit and the planar unit, the protruding portion corresponding to The hole protrudes toward the hole. The fluid drive system of claim 1, wherein the piezoelectric element has a through hole, the protruding portion is disposed through the through hole and fixed to the actuating unit. The fluid drive system of claim 1, wherein the projection is surrounded by the piezoelectric element. The fluid drive system of claim 1, wherein the actuating unit, the piezoelectric element, the signal conducting layer and the planar unit are sequentially stacked. The fluid drive system of claim 4, wherein the piezoelectric element has a first surface and a second surface, wherein the first electrode and the second electrode are respectively located on the first surface and the second surface On the two sides, the first surface of the piezoelectric element faces the actuating unit, and the actuating unit is a conductor, and the first electrode of the piezoelectric element is electrically connected to the first conducting of the signal conducting layer through the actuating unit Area. The fluid drive system of claim 1, further comprising: a frame, the actuation unit including a first central zone, a first surrounding zone, and the first central zone and the first surrounding a plurality of first connecting regions of the region, the protruding portion and the piezoelectric element are fixed to the first central region of the actuating unit, and the frame is fixed to the first surrounding region of the actuating unit. The fluid drive system of claim 6, wherein the frame is coplanar with respect to a surface of the planar unit toward a surface of the piezoelectric element facing the planar unit. The fluid drive system of claim 1, wherein the actuating unit comprises a first central zone, a first surrounding zone, and a plurality of first ones connected to the first central zone and the first surrounding zone. a connection region, the first peripheral region being coplanar with a surface facing the planar unit at a surface of the piezoelectric element facing the planar unit. The fluid drive system of claim 1, further comprising: a conducting unit between the piezoelectric element and the planar unit, the conducting unit comprising a second central region corresponding to the piezoelectric element and a second peripheral zone located outside the second central zone, the first conductive zone being formed in the second central zone of the conductive unit, the second conductive zone being formed in the second peripheral zone of the conductive unit. The fluid drive system of claim 1, further comprising: a carrier disposed between a first surrounding area of the actuating unit and the planar unit, the carrier facing a surface of the planar unit The coplanar plane is at a surface of the projection that faces the planar unit. The fluid drive system of claim 10, further comprising: a conducting unit between the piezoelectric element and the planar unit, the carrier being disposed between the conducting unit and the planar unit. The fluid drive system of claim 11, wherein the carrier is integral with the conductive unit. The fluid drive system of claim 1, wherein the actuating unit, the signal conducting layer, the piezoelectric element, and the planar unit are sequentially stacked. The fluid drive system of claim 13, further comprising: a conducting unit, the first conducting zone and the second conducting zone being formed on the conducting unit, the conducting unit being located at the actuating unit and the pressing Between the electrical components, the piezoelectric component includes a first face toward the conductive unit, and the first electrode and the second electrode are located on the first face. The fluid drive system of claim 9, wherein the conductive unit is a flexible printed circuit board (FPCB). The fluid drive system of claim 1, wherein the actuating unit is integral with the projection.