CN109424525B - Actuator - Google Patents

Abstract

An actuator comprises a suspension plate, an outer frame and a piezoelectric patch, wherein the suspension plate is provided with a first surface and a second surface and can be bent and vibrated; the outer frame is arranged around the outer side of the suspension plate; the bracket is connected between the suspension plate and the outer frame to provide elastic support; the piezoelectric sheet is made of piezoelectric powder doped graphene of lead zirconate titanate series, the weight percentage of the graphene is between 0.1% and 20%, the graphene is attached and adhered to the first surface of the suspension plate, and the suspension plate is driven to bend and vibrate by applying voltage.

Description

Actuator

[ technical field ] A method for producing a semiconductor device

The present invention relates to an actuator, and more particularly, to an actuator suitable for miniaturization, ultra-thin and silence.

[ background of the invention ]

At present, in all fields, no matter in medicine, computer technology, printing, energy and other industries, products are developed toward refinement and miniaturization, wherein actuators included in products such as micropumps, sprayers, ink jet heads, industrial printing devices and the like are key technologies thereof, so that how to break through technical bottlenecks thereof by means of innovative structures is an important content of development.

For example, in the medical industry, many instruments or devices that require pneumatic power actuation are required, such as: blood pressure monitors, or portable, wearable devices or equipment that typically employ conventional motors and pneumatic valves for fluid delivery purposes. However, the volume of the conventional motor and the fluid valve is limited, so that it is difficult to reduce the volume of the whole device, i.e. to achieve the goal of thinning, and further, the portable purpose of the apparatus cannot be achieved. In addition, the conventional motors and fluid valves also generate noise and poor heat dissipation during operation, which causes inconvenience and discomfort in use.

Therefore, how to develop an actuator that can improve the above-mentioned drawbacks of the known technology, and can make the conventional pneumatic-driven apparatus or device achieve small size, miniaturization and silence, and further improve the thermal conductivity and fast heat dissipation, thereby achieving the purpose of portable portability is a problem that needs to be solved.

[ summary of the invention ]

The main objective of the present invention is to provide an actuator having a piezoelectric plate combined with a suspension plate, wherein a pressure gradient is generated in a designed flow channel by fluid fluctuation generated by high-frequency actuation of the piezoelectric plate, so that fluid flows at a high speed, and the fluid is transmitted from a suction end to a discharge end through impedance difference in the inlet and outlet directions of the flow channel, thereby solving the disadvantages of large volume, difficulty in thinning, incapability of achieving portable purpose, and loud noise of the prior art in an apparatus or equipment driven by pneumatic power.

Another objective of the present invention is to provide an actuator, in which the piezoelectric sheet has two electrodes doped with silver-palladium alloy synthesized by graphene material, and can reduce impedance and increase charge moving speed, and increase thermal conductivity to achieve rapid heat dissipation, and a thermal conductive layer doped with coating synthesized by graphene material is coated on a surface layer of one of the electrodes, and also can increase thermal conductivity to achieve rapid heat dissipation, and an adhesive layer doped with epoxy resin glue synthesized by graphene material is coated on the other electrode to adhere to the first surface of the suspension plate, and also can reduce impedance and increase charge moving speed, and increase thermal conductivity to achieve rapid heat dissipation, so that the actuator can achieve optimal driving performance, and also can increase thermal conductivity to achieve rapid heat dissipation.

To achieve the above object, a broader aspect of the present invention provides an actuator, including: a suspension plate having a first surface and a second surface and capable of bending and vibrating; an outer frame surrounding the suspension plate; at least one bracket connected between the suspension plate and the outer frame to provide elastic support; and the piezoelectric sheet is made of piezoelectric powder doped graphene of lead zirconate titanate series, the weight percentage of the graphene is between 0.1 and 20 percent, and the piezoelectric sheet is attached to the first surface of the suspension plate and is adhered with the first surface of the suspension plate to apply voltage so as to drive the suspension plate to bend and vibrate.

[ description of the drawings ]

Fig. 1 is a schematic view of an exploded structure of an actuator, which is matched with an air inlet plate, a resonator plate, an air inlet plate, a first insulating plate, a conductive plate and a second insulating plate, viewed from a front view angle.

Fig. 2 is a schematic view of an exploded structure of the actuator with an air inlet plate, a resonator plate, an air inlet plate, a first insulating plate, a conductive plate and a second insulating plate viewed from a back view.

Fig. 3 is a schematic cross-sectional view and a partially enlarged view of the piezoelectric plate, the suspension plate, the bracket and the outer frame of the actuator according to the present invention.

Fig. 4 is a schematic cross-sectional view of the actuator with the air inlet plate, the resonator plate, the air inlet plate, the first insulating plate, the conductive plate and the second insulating plate.

Fig. 5A to 5E are structural views illustrating an operation flow of the actuator shown in fig. 4.

[ detailed description ] embodiments

Exemplary embodiments that embody features and advantages of this disclosure are described in detail below in the detailed description. It will be understood that the present disclosure is capable of various modifications without departing from the scope of the disclosure, and that the description and drawings are to be regarded as illustrative in nature, and not as restrictive.

Referring to fig. 1, 2 and 4, the actuator 1 mainly includes a suspension plate 11, an outer frame 12, at least one support 13 and a piezoelectric sheet 14. Wherein, the suspension board 11 has a first surface 11c and a second surface 11b, and can be bent and vibrated; an outer frame 12 surrounding the suspension plate 11; in the embodiment, two end points of each bracket 13 are respectively connected between the outer frame 12 and the suspension plate 11 to provide an elastic support, and at least one gap 15 is further provided between the bracket 13, the suspension plate 11 and the outer frame 12, and the at least one gap 15 is used for air circulation. It should be emphasized that the shapes and the number of the suspension plate 11, the outer frame 12 and the bracket 13 are not limited to the above embodiments, and may be changed according to the requirements of practical applications. In addition, the outer frame 12 is disposed around the outer side of the suspension board 11, and has a conductive pin 12c protruding outward for power connection, but not limited thereto.

The suspension plate 11 of the present embodiment is a step-plane structure (as shown in fig. 3), that is, the second surface 11b of the suspension plate 11 further has a protrusion 11a, and the protrusion 11a may be, but is not limited to, a circular protrusion structure. The convex portion 11a of the suspension plate 11 is coplanar with the second surface 12a of the outer frame 12, the second surface 11b of the suspension plate 11 and the second surface 13a of the bracket 13 are also coplanar, and a certain depth is formed between the convex portion 11a of the suspension plate 11 and the second surface 12a of the outer frame 12, and the second surface 11b of the suspension plate 11 and the second surface 13a of the bracket 13. The first surface 11c of the suspension plate 11, the first surface 12b of the outer frame 12 and the first surface 13b of the bracket 13 are flat and coplanar, but not limited thereto.

The piezoelectric sheet 14 of the present embodiment is attached to the first surface 11c of the flat suspension plate 11, but not limited thereto. In other embodiments, the suspension plate 11 may also be a square structure with a flat surface and a flat surface, and the shape of the suspension plate may be changed according to the actual implementation. In some embodiments, the suspension plate 11, the bracket 13 and the outer frame 12 may be integrally formed, and may be made of a metal plate, such as but not limited to stainless steel. In still other embodiments, the length of the piezoelectric sheet 14 is less than the length of the suspension plate 11. In other embodiments, the length of the piezoelectric sheet 14 is equal to the length of the suspension plate 11, and the piezoelectric sheet is also designed to have a square plate-like structure corresponding to the suspension plate 11, but not limited thereto. The piezoelectric sheet 14 of the present embodiment is formed by mixing piezoelectric powder doped Graphene (Graphene) of Lead Zirconate Titanate (PZT) series, and the Graphene is preferably mixed and doped in a weight percentage of 0.1% to 20%, so that the suspension plate 11 can achieve an excellent piezoelectric driving effect through the excellent piezoelectric characteristics of the Lead Zirconate Titanate. The piezoelectric sheet 14 of this embodiment has two electrodes 14a and 14b doped with silver-palladium alloy synthesized by graphene, and the two electrodes 14a and 14b can reduce impedance to increase the charge moving speed and increase the thermal conductivity to achieve rapid heat dissipation, wherein the surface layer of one electrode 14a is coated with a heat conduction layer 14c doped with coating synthesized by graphene, and also can increase the thermal conductivity to achieve rapid heat dissipation, and the other electrode 14b is coated with an adhesive layer 14d doped with epoxy resin glue synthesized by graphene to adhere to the first surface 11c of the suspension plate 11, and also can reduce impedance to increase the charge moving speed and increase the thermal conductivity to achieve rapid heat dissipation, and the electrodes 14a and 14b apply voltage to drive the suspension plate 11 to vibrate in a bending manner.

Referring to fig. 1 and 2, as shown in the drawings, the actuator 1 further includes a gas inlet plate 16, a resonator plate 17, insulating plates 18a and 18b, and a conducting plate 19, wherein the suspension plate 11 is disposed corresponding to the resonator plate 17, and the gas inlet plate 16, the resonator plate 17, the outer frame 12, the insulating plate 18a, the conducting plate 19, and the other insulating plate 18b are sequentially stacked, and the assembled cross-sectional view is as shown in fig. 4.

Referring to fig. 1 and fig. 2, as shown in fig. 1, in the present embodiment, the air inlet plate 16 has at least one air inlet hole 16a, wherein the number of the air inlet holes 16a is preferably 4, but not limited thereto. The air inlet hole 16a penetrates the air inlet plate 16 for air to flow from the at least one air inlet hole 16a by the action of atmospheric pressure outside the device. As shown in fig. 2, the air inlet plate 16 has at least one bus hole 16b, a central concave portion 16c is disposed at a central communication position of the bus hole 16b, and the central concave portion 16c is communicated with the bus hole 16b, and the air inlet plate 16 has a first surface 16d coated with a coating synthesized by doped graphene material, which can improve thermal conductivity to achieve rapid heat dissipation, and at least one bus hole 16b is disposed corresponding to at least one air inlet hole 16a of the first surface 16d, so that the gas entering the bus hole 16b from the at least one air inlet hole 16a can be guided and converged and concentrated to the central concave portion 16c to achieve gas transmission. In the present embodiment, the air inlet plate 16 has an air inlet hole 16a, a bus hole 16b and a central recess 16c, and a converging chamber for converging air is formed at the central recess 16c for temporary storage of air. In some embodiments, the air inlet plate 16 may be made of stainless steel, but not limited thereto. In other embodiments, the depth of the bus chamber formed by the central recess 16c is the same as the depth of the bus bar hole 16b, but not limited thereto. The resonator plate 17 is made of a flexible material, but not limited thereto, and the resonator plate 17 has a hollow hole 17c corresponding to the central recess 16c of the inlet plate 16 for gas to flow through. In other embodiments, the resonator plate 17 may be made of a copper material, but not limited thereto.

In the present embodiment, as shown in fig. 1, fig. 2 and fig. 4, the insulating sheet 18a, the conductive sheet 19 and the another insulating sheet 18b of the present embodiment are sequentially and correspondingly disposed under the outer frame 12, and the shape thereof substantially corresponds to the shape of the outer frame 12. In some embodiments, the insulating sheets 18a, 18b are made of an insulating material, such as but not limited to plastic, to provide an insulating function. In other embodiments, the conductive sheet 19 may be made of a conductive material, such as but not limited to a metal material, to provide an electrical conduction function. In this embodiment, the conductive sheet 19 may also be provided with a conductive pin 19a to achieve an electrical conduction function, the conductive pin 12c is electrically connected to one electrode 14a of the piezoelectric sheet 14, and the conductive pin 19a is electrically connected to the other electrode 14b of the piezoelectric sheet 14, but not limited thereto.

In the present embodiment, as shown in fig. 4, the air inlet plate 16, the resonator plate 17, the outer frame 12, the insulating plate 18a, the conducting plate 19 and the other insulating plate 18b are sequentially stacked to form a device for fluid transportation, and a gap h is formed between the resonator plate 17 and the outer frame 12. in the present embodiment, a filling material, such as but not limited to a conductive adhesive, is filled into the gap h between the resonator plate 17 and the periphery of the outer frame 12, so that the depth of the gap h can be maintained between the resonator plate 17 and the convex portion 11a of the suspension plate 11, and further the air flow can be guided to flow more rapidly, and the contact interference between the convex portion 11a of the suspension plate 11 and the resonator plate 17 is reduced because the convex portion 11a of the suspension plate 11 and the resonator plate 17 maintain a proper distance, so that the noise. In other embodiments, the height of the outer frame 12 can be increased to increase a gap when the outer frame is assembled with the resonant plate 17, but not limited thereto.

Referring to fig. 1, 2 and 4, in the present embodiment, after the air inlet plate 16, the resonator plate 17 and the outer frame 12 are assembled in sequence, the resonator plate 17 has a movable portion 17a and a fixed portion 17b, the movable portion 17a and the air inlet plate 16 thereon form a chamber for collecting gas, and a first chamber 10 is further formed between the resonator plate 17 and the suspension plate 11, the bracket 13 and the outer frame 12 for temporarily storing gas, the first chamber 10 is communicated with the collecting chamber at the central recess 16c of the air inlet plate 16 through the hollow hole 17c of the resonator plate 17, and two sides of the first chamber 10 are communicated with the fluid channel through the gap 15 of the bracket 13.

Referring to fig. 1, 2, 4, and 5A to 5E, when the piezoelectric sheet 14 is actuated by voltage, the support 13 is used as a fulcrum to perform reciprocating vibration in the vertical direction. As shown in fig. 5A, when the piezoelectric sheet 14 is actuated by voltage to vibrate downwards, since the resonance sheet 17 is a light and thin sheet-like structure, when the piezoelectric sheet 14 vibrates, the resonance sheet 17 also vibrates vertically and reciprocally along with the resonance, that is, the portion of the resonator plate 17 corresponding to the central recess 16c is deformed by bending vibration, that is, the portion corresponding to the central recess 16c is the movable portion 17a of the resonator plate 17, so that when the piezoelectric plate 14 bends and vibrates downward, at this time, the movable portion 17a of the resonator plate 17 corresponding to the central recess 16c is brought by the gas and pushed and the piezoelectric sheet 14 is vibrated, and, as the piezoelectric sheet 14 is deformed by bending vibration downward, gas enters through at least one gas inlet hole 16a of the gas inlet plate 16, and then flows into the first chamber 10 through at least one bus bar hole 16b to be collected at the central concave portion 16c and then through the hollow hole 17c of the resonance sheet 17 corresponding to the central concave portion 16 c. Thereafter, the resonator plate 17 is driven by the vibration of the piezoelectric plate 14 to perform vertical reciprocating vibration along with the resonance, as shown in fig. 5B, at this time, the movable portion 17a of the resonator plate 17 also vibrates downward along with the vibration and is attached to and abutted against the convex portion 11a of the suspension plate 11, so that the distance between the confluence chamber between the region outside the convex portion 11a of the suspension plate 11 and the fixing portions 17B at both sides of the resonator plate 17 is not decreased, and the volume of the first chamber 10 is compressed by the deformation of the resonator plate 17, and the middle circulation space of the first chamber 10 is closed, so that the gas in the first chamber is pushed to flow to both sides, and further flows downward through the gap 15 between the brackets 13 of the piezoelectric plate 14. Then, as shown in fig. 5C, the movable portion 17a of the resonator plate 17 is bent and vibrated to return to the initial position, and the piezoelectric plate 14 is driven by the voltage to vibrate upwards, so as to press the volume of the first chamber 10, but at this time, since the suspension plate 11 is lifted upwards, the gas in the first chamber 10 flows towards both sides, and the gas continuously enters from the at least one gas inlet hole 16a of the gas inlet plate 16 and then flows into the confluence chamber formed by the central recess 16C. Then, as shown in fig. 5D, the resonator plate 17 resonates upward due to the upward vibration of the suspension plate 11, and the movable portion 17a of the resonator plate 17 also vibrates upward, so as to slow down the gas from continuously entering from the at least one gas inlet hole 16a of the gas inlet plate 16, and then flowing into the converging chamber formed by the central concave portion 16 c. Finally, as shown in fig. 5E, the movable portion 17a of the resonator plate 17 is also returned to the initial position, so that the maximum distance of the vertical displacement of the resonator plate 17 can be increased by the gap h between the resonator plate and the outer frame 12 when the resonator plate 17 performs vertical reciprocating vibration, in other words, the gap h is provided between the two structures to allow the resonator plate 17 to generate a larger vertical displacement at the time of resonance. Therefore, a pressure gradient is generated in the flow channel design of the fluid actuator 13, so that the gas flows at a high speed, and the gas is transmitted from the suction end to the discharge end through the impedance difference in the inlet and outlet directions of the flow channel to complete the gas transmission operation, even if the discharge end has air pressure, the gas can still be continuously pushed into the fluid channel, and the silencing effect can be achieved, so that the actions of the figures 5A to 5E are repeated, and the gas transmission from the outside to the inside can be generated.

In summary, the actuator provided by the present disclosure generates a pressure gradient in the designed flow channel by the fluid fluctuation generated by the high-frequency actuation of the piezoelectric plate, so that the fluid flows at a high speed, and the fluid is transmitted from the suction end to the discharge end through the impedance difference in the inlet and outlet directions of the flow channel, so that the fluid flows at a high speed and can be continuously transmitted, thereby achieving the effects of rapidly transmitting the fluid and muting the fluid, further reducing the overall volume and thinning the actuator, and achieving the portable purpose of being light and comfortable. In addition, the surface of the air inlet plate and the piezoelectric plate electrode are coated with the coating synthesized by the lead zirconate titanate doped graphene material, so that excellent heat dissipation and piezoelectric effects are achieved. Therefore, the present application has great industrial application value, and the application is provided by the method.

Various modifications may be made by those skilled in the art without departing from the scope of the invention as defined by the appended claims.

[ notation ] to show

1: actuator

10: the first chamber

11: suspension plate

11 a: convex part

11 b: second surface

11 c: first surface

12: outer frame

12 a: second surface

12 b: first surface

12 c: conductive pin

13: support frame

13 a: second surface

13 b: first surface

14: piezoelectric patch

14a, 14 b: electrode for electrochemical cell

14 c: heat conducting layer

14 d: adhesive layer

15: voids

16: air inlet plate

16 a: air intake

16 b: bus bar hole

16 c: central concave part

16 d: first surface

17: resonance sheet

17 a: movable part

17 b: fixing part

17 c: hollow hole

18a, 18 b: insulating sheet

19: conductive sheet

19 a: conductive pin

h: gap

Claims (4)

1. An actuator, comprising:

a suspension plate having a first surface and a second surface and capable of bending and vibrating;

an outer frame surrounding the suspension plate;

at least one bracket connected between the suspension plate and the outer frame to provide elastic support; and

the air inlet plate is arranged on the second surface side of the suspension plate and is provided with a first surface, at least one air inlet hole, at least one bus bar hole and a central concave part forming a confluence chamber, wherein the first surface is coated with a coating synthesized by doped graphene materials, the at least one air inlet hole is used for leading in air flow, the bus bar hole is opposite to the air inlet hole, and the air flow of the air inlet hole is guided to converge to the confluence chamber formed by the central concave part;

a resonance sheet arranged between the air inlet plate and the suspension plate, having a hollow hole corresponding to the confluence chamber, and a movable part around the hollow hole;

the piezoelectric sheet is made of piezoelectric powder doped graphene of lead zirconate titanate series, the weight percentage of the graphene is between 0.1% and 20%, and the piezoelectric sheet is attached and adhered to the first surface of the suspension plate and is used for driving the suspension plate to vibrate in a bending mode by applying voltage, wherein the piezoelectric sheet is provided with two electrodes of silver-palladium alloy synthesized by doped graphene materials, the surface layer of one electrode is coated with a heat conduction layer of paint synthesized by doped graphene materials, and the surface layer of the other electrode is coated with an adhesive layer of epoxy resin glue synthesized by doped graphene materials and is attached and adhered to the first surface of the suspension plate.

2. The actuator of claim 1, wherein a gap is formed between the resonator plate and the suspension plate, the bracket, and the outer frame to form a first chamber, such that when the piezoelectric plate is driven to bend the suspension plate and vibrate, airflow is guided through the at least one air inlet hole of the air inlet plate, collected to the central recess through the at least one bus hole, and then flows through the hollow hole of the resonator plate to enter the first chamber, and resonance transmission airflow is generated by the suspension plate and the movable portion of the resonator plate.

3. The actuator of claim 2, wherein the suspension plate is square and has a convex portion.

4. The actuator of claim 2, further comprising: the air inlet plate, the resonance plate, the outer frame, the first insulating plate, the conducting plate and the second insulating plate are sequentially stacked.

Images