CN205383064U

CN205383064U - Miniature gas pressure power unit

Info

Publication number: CN205383064U
Application number: CN201620094571.0U
Authority: CN
Inventors: 陈世昌; 廖家淯; 韩永隆; 黄启峰
Original assignee: Microjet Technology Co Ltd
Current assignee: Microjet Technology Co Ltd
Priority date: 2016-01-29
Filing date: 2016-01-29
Publication date: 2016-07-13
Anticipated expiration: 2026-01-29

Abstract

The utility model provides a miniature gas pressure power unit, includes: miniature gas transfer device including the board that admits air that piles up the setting, altogether vibration -damping sheet and piezoelectric actuator, has the first cavity that the clearance formed between vibration -damping sheet of its communist party of china and the piezoelectric actuator, gaseous leading -in by admitting air the board when making the piezoelectric actuator hand drive, transmits downwards with in getting into first cavity through vibration -damping sheet altogether again to it lasts release gas to form the pressure gradient runner, the miniature valve door gear is including the gas collection board, valve disc and the play oralia that pile up the setting, transmit downwards to the gas collecting chamber room after from miniature gas transfer device when gas, transmit again to the miniature valve door gear in to make valve disc's valve opening open or close in response to the uniflow of gas, in order to do carrying out album a pressure or a release.

Description

Micro pressure power set

[technical field]

This utility model is about a kind of Pneumatic propelling plant, espespecially a kind of micro ultrathin and quiet micro pressure power set.

[background technology]

No matter it is the industry such as medicine, computer technology, printing, the energy in each field at present, product all develops towards sophistication and microminiaturization direction, the fluid delivery structure that wherein product such as micro-side Pu, aerosol apparatus, ink gun, industrial printing devices comprises is its key technology, be with, innovation structure how is borrowed to break through its technical bottleneck, for the important content of development.

For example, in medicinal industry, many instruments needing to adopt Pneumatic pressure power to drive or equipment, generally adopt with conventional motor and air pressure valve to reach the purpose of its gas conveying.But, it is limited to the volumetric constraint of these conventional motor and gas trap so that this type of instrument and equipment is difficult to reduce the volume of its single unit system, is namely difficult to the target of slimming, what more cannot make reaches portable purpose.Additionally, these conventional motor and gas trap also can produce the problem of noise when start, cause use on not convenient and uncomfortable.

Therefore, how to develop one and can improve above-mentioned known technology disappearance, the instrument of conventionally employed charge delivery mechanism or equipment can be made to reach volume little, microminiaturized and quiet, and then reach the micro pressure power set of light comfortable portable purpose, problem actually in the urgent need to address at present.

[utility model content]

Main purpose of the present utility model is in that to provide a kind of micro pressure power set suitable in portable or Wearable instrument or equipment, by integrating micro charge delivery mechanism and micro valve device, in order to solving the instrument adopting Pneumatic pressure power to drive of known technology or the volume that possesses of equipment is big, be difficult to slimming, cannot reach portable purpose, and big grade of noise lacks.

For reaching above-mentioned purpose, a broader enforcement aspect of the present utility model is for providing a kind of micro pressure power set, including: a minitype gas transmitting device, including: an inlet plate, have at least one air inlet, at least one total string holes and and constitute a central recess confluxing chamber, this at least one air inlet supplies to import gas, this total string holes this air inlet corresponding, and guides the gas of this air inlet to converge into this chamber that confluxes that this central recess is constituted；One resonance plate, has a hollow bore, to should this chamber that confluxes of inlet plate；And a piezo-activator, there is a suspension board；One housing, has at least one support, is connected between this suspension board and this housing；And a piezoelectric ceramic plate, it is attached at a surface of this suspension board；Wherein, this above-mentioned inlet plate, this resonance plate and this piezo-activator sequentially arrange location to reply is folded, and there is between this resonance plate and this piezo-activator a gap g0, form one first chamber, so that produce the displacement of d when this piezo-activator is driven, and then make that there is between g0 and d an x difference, i.e. x=g0-d, especially as this difference x=1-5um, it is the gas producing maximum output pressure 350mmHg, this gas is to be imported by this at least one air inlet of this inlet plate, it is collected to this central recess through this at least one total string holes, pass through this hollow bore of this resonance plate, to enter in this first chamber, transmitted downwards by the space between this at least one support of this piezo-activator again, with lasting pushing out gas；And a micro valve device, including: a valve sheet, there is a valve opening, this valve sheet has the thickness between 0.1mm-0.3mm；One gas collection plate, there is one first through hole, one second through hole, one first release chamber and one first outlet chamber, and there is a reference surface, this first outlet chamber has a protuberance structure, with to should this valve opening of valve sheet and arrange, favourable this valve opening of conflicting forms a prestressing effect, this valve opening completely enclosed, the height of this protuberance structure is higher than this reference surface of this gas collection plate, this first through hole is connected with this first release chamber, and this second through hole is connected with this first outlet chamber；And an exit plate, there is one the 3rd through hole, one the 4th through hole, one second release chamber and one second outlet chamber and at least one position limiting structure, and there is a reference surface, 3rd through hole end has a protuberance structure, the height of this protuberance structure is higher than this reference surface of this exit plate, this valve sheet favourable is quickly conflicted and is formed a prestressing effect, completely enclosed 3rd through hole, 3rd through hole is corresponding to this first through hole of this gas collection plate, and be connected with this second release chamber, 4th through hole corresponds to this second through hole, and be connected with this second outlet chamber, it is indoor that this at least one position limiting structure is arranged at this second pressure-releasing cavity, the height of this position limiting structure is between 0.3mm-0.5mm, and between this second release chamber and this second outlet chamber, there is a connection runner；nullWherein，Above-mentioned gas collection plate、Valve sheet and exit plate are sequentially corresponding stacking arranges location，This valve sheet is arranged between this gas collection plate and this exit plate，And this valve opening of this valve sheet is correspondingly arranged between this second through hole and the 4th through hole，Gas is when this minitype gas transmitting device transmits downwards to this micro valve device，Entered by this first through hole and this second through hole in this first release chamber and this first outlet chamber，And import gas flowed into by this valve opening of this valve sheet carry out in the 4th through hole collection pressure operation，When collecting body of calming the anger more than when importing gas，Collect body of calming the anger to flow towards this second outlet chamber from the 4th through hole，So that this valve sheet displacement，And make this valve opening of this valve sheet be resisted against this gas collection plate and close，And this at least one position limiting structure auxiliary supports this valve sheet，To prevent this valve sheet from subsiding，Collect body of calming the anger simultaneously and can flow to this second pressure-releasing cavity indoor along connection runner in this second outlet chamber，Now in this valve sheet displacement indoor of the second pressure-releasing cavity，Collect body of calming the anger to be flowed out by the 3rd through hole，To carry out release operation.

For reaching above-mentioned purpose, another broader enforcement aspect of the present utility model is for providing a kind of micro pressure power set, including a minitype gas transmitting device, including: an inlet plate；One resonance plate；And a piezo-activator；Wherein, above-mentioned this inlet plate, this resonance plate and this piezo-activator are sequentially corresponding stacking arranges location, and there is between this resonance plate and this piezo-activator a gap g0, form one first chamber, so that produce the displacement of d when this piezo-activator is driven, and then make that there is between g0 and d an x difference, i.e. x=g0-d, especially as this difference x=1-5um, it is the gas producing maximum output pressure 350mmHg, this gas is former is entered by this inlet plate, flows through this resonance plate, transmits still further below to enter in this first chamber；And a micro valve device, including: a gas collection plate, there are at least two through holes and at least two chambers；One valve sheet, has a valve opening；And an exit plate, there are at least two through holes and at least two chambers；Wherein, above-mentioned gas collection plate, valve sheet and exit plate are sequentially corresponding stacking arranges location, a gas collection chamber is formed between this minitype gas transmitting device and this micro valve device, when gas transmits downwards to this gas collection chamber from this minitype gas transmitting device, it is transferred in this micro valve device again, at least two through holes being respectively provided with through this gas collection plate, this exit plate and at least two chambers, this valve opening correspondence making this valve sheet with the one-way flow in response to gas opens or closes, in order to carrying out collection pressure or release operation.

For reaching above-mentioned purpose, another broader enforcement aspect of the present utility model is for providing a kind of micro pressure power set, including: a minitype gas transmitting device, including sequentially stacking, an inlet plate is set, one resonance plate and a piezo-activator, wherein there is between this resonance plate and this piezo-activator a gap g0, form one first chamber, so that produce the displacement of d when this piezo-activator is driven, and then make that there is between g0 and d an x difference, i.e. x=g0-d, especially as this difference x=1-5um, it is the gas producing maximum output pressure, this gas is former is entered by this inlet plate, flow through this resonance plate, transmit again to enter in this first chamber；And a micro valve device, including sequentially stacking, a gas collection plate, a valve sheet and an exit plate are set, this valve sheet has a valve opening；Wherein, when gas is in this minitype gas transmitting device transmission to this micro valve device, in order to carrying out collection pressure or release operation.

[accompanying drawing explanation]

Figure 1A is this utility model is the front decomposition texture schematic diagram of micro pressure power set of preferred embodiment.

Figure 1B is the positive combination structural representation of the micro pressure power set shown in Figure 1A.

Fig. 2 A is the back side decomposition texture schematic diagram of the micro pressure power set shown in Figure 1A.

Fig. 2 B is the back side combinative structure schematic diagram of the micro pressure power set shown in Figure 1A.

Fig. 3 A is the positive combination structural representation of the piezo-activator of the micro pressure power set shown in Figure 1A.

Fig. 3 B is the back side combinative structure schematic diagram of the piezo-activator of the micro pressure power set shown in Figure 1A.

Fig. 3 C is the cross-sectional view of the piezo-activator of the micro pressure power set shown in Figure 1A.

Fig. 4 is the multiple enforcement aspect schematic diagram of the piezo-activator shown in Fig. 3 A.

Fig. 5 A to Fig. 5 E is the illustrative view of the minitype gas transmitting device of the micro pressure power set shown in Figure 1A.

Fig. 6 A is the collection pressure illustrative view of the micro valve device of the micro pressure power set shown in Figure 1A.

Fig. 6 B is the release illustrative view of the micro valve device of the micro pressure power set shown in Figure 1A.

Fig. 7 A to Fig. 7 E is the collection pressure illustrative view of the micro pressure power set shown in Figure 1A.

Fig. 8 is blood pressure lowering or the release illustrative view of the micro pressure power set shown in Figure 1A.

[symbol description]

1: micro pressure power set

1A: minitype gas transmitting device

1B: micro valve device

11: inlet plate

110: air inlet

111: central recess

112: total string holes

12: resonance plate

120: hollow bore

121: the first chambers

13: piezo-activator

130: suspension board

130a: the upper surface of suspension board

130b: the lower surface of suspension board

130c: protuberance

131: housing

131a: the upper surface of housing

131b: the lower surface of housing

132: support

132a: the upper surface of support

132b: the lower surface of support

133: piezoelectric ceramic plate

134,151: conductive connecting pin

135: space

141,142: insulating trip

15: conducting strip

16: gas collection plate

160: reference surface

161: the second surface of gas collection plate

162: gas collection chamber

163: the first through holes

164: the second through holes

165: the first release chambers

166: the first outlet chamber

167,181a: protuberance structure

17: valve sheet

170: valve opening

171: location hole

18: exit plate

180: reference surface

181: the three through holes

182: the four through holes

183: the second release chambers

184: the second outlet chamber

185: connection runner

186: pressure relief vent

187: the second surface of exit plate

188: position limiting structure

19: outlet

G0: gap

(a)～(l): the difference of conductive actuation device implements aspect

A0, i0, j0: suspension board

A1, i1, j1: housing

A2, i2: support

A3: space

[detailed description of the invention]

Some exemplary embodiments embodying this utility model feature and advantage will describe in detail in the explanation of back segment.Iting should be understood that this utility model can have various changes in different aspects, it is all without departing from scope of the present utility model, and explanation therein and be shown in and be substantially treated as purposes of discussion, and nand architecture is in restriction this utility model.

Micro pressure power set 1 of the present utility model are to can be applicable to the industry such as the raw skill of medicine, the energy, computer technology or printing, in order in order to transmit gas, but are not limited.Refer to Figure 1A, Figure 1B, Fig. 2 A and Fig. 2 B, Figure 1A is the front decomposition texture schematic diagram of the micro pressure power set of this utility model preferred embodiment, Figure 1B is the positive combination structural representation of the micro pressure power set shown in Figure 1A, Fig. 2 A is the back side decomposition texture schematic diagram of the micro pressure power set shown in Figure 1A, and Fig. 2 B is then for the back side combinative structure schematic diagram of the micro pressure power set shown in Figure 1A.As shown in Figure 1A and Fig. 2 A, micro pressure power set 1 of the present utility model are combined by minitype gas transmitting device 1A and micro valve device 1B, wherein minitype gas transmitting device 1A has inlet plate 11, resonance plate 12, piezo-activator 13, insulating trip 141, 142, the structures such as conducting strip 15, it is to be arranged corresponding to resonance plate 12 by piezo-activator 13, and make inlet plate 11, resonance plate 12, piezo-activator 13, insulating trip 141, the sequentially stacking settings such as conducting strip 15 and another insulating trip 142, and this piezo-activator 13 is to be assembled by a suspension board 130 and a piezoelectric ceramic plate 133；And micro valve device 1B is then formed by the sequentially stack assembly such as gas collection plate 16, valve sheet 17 and exit plate 18, but it is not limited.And in the present embodiment, as shown in Figure 1A, gas collection plate 16 is not only single plate structure, also the frame structure of sidewall can be had for periphery, and the sidewall being made up of this periphery with its bottom plate common definition go out an accommodation space, therefore after micro pressure power set 1 of the present utility model are completed, then its front schematic view can be as shown in Figure 1B, visible this minitype gas transmitting device 1A is located in the accommodation space of gas collection plate 16, and under it is and valve sheet 17 and exit plate 18 is stacking forms.Pressure relief vent 186 in its schematic rear view being completed then this exit plate 18 visible and outlet 19, outlet 19 is in order to be connected with a device (not shown), pressure relief vent 186 is then for so that the gas in micro valve device 1B is discharged, to reach effect of release.Assembling by this minitype gas transmitting device 1A and micro valve device 1B is arranged, so that at least one air inlet 110 air inlet that gas is on the inlet plate 11 of minitype gas transmitting device 1A, and through the start of piezo-activator 13, and flow through multiple pressure chamber (not shown), and transmit downwards, and then gas one-way flow in micro valve device 1B can be made, and by acute build up of pressure in the device (not shown) being connected with the port of export of micro valve device 1B, and when release need to be carried out, then regulate and control the output of minitype gas transmitting device 1A, gas is made to discharge via the pressure relief vent 186 in the exit plate 18 of micro valve device 1B, to carry out release.

Please continue and consult Figure 1A and Fig. 2 A, as shown in Figure 1A, the inlet plate 11 of minitype gas transmitting device 2A is to have at least one air inlet 110, in the present embodiment, the quantity of air inlet 110 is for 4, but being not limited, it is mainly complied with the effect of atmospheric pressure outside device in order to supplied gas and flows in minitype gas transmitting device 2A from this at least one air inlet 110.And again as shown in Figure 2 A, lower surface from inlet plate 11, it has at least one total string holes 112, it is correspondingly arranged in order to this at least one air inlet 110 with inlet plate 11 upper surface, and the gas entered from this at least one air inlet 110 can be guided and confluxes and be concentrated to a central recess 111, with going down.Being with in the present embodiment, inlet plate 11 has integrated air inlet 110, total string holes 112 and a central recess 111, and is namely correspondingly formed a chamber that confluxes confluxing gas in this central recess 111 place, keeps in supplied gas.In some embodiments, the material of inlet plate 11 be can by but be not limited to and be made up of a stainless steel, and its thickness preferred values is between 0.4mm-0.6mm, and its optimum is 0.5mm, but is not limited.In other embodiments, the degree of depth of the chamber that confluxes being made up of this central recess 111 place is identical with the degree of depth of these total string holes 112, and the preferred values of the degree of depth of this conflux chamber and this total string holes 112 is between 0.2mm-0.3mm, but is not limited.Resonance plate 12 is made up of a flexible materials, but is not limited, and has a hollow bore 120 on resonance plate 12, corresponds to the central recess 111 of the lower surface of inlet plate 11 and arranges, so that gas can circulate downwards.In other embodiments, resonance plate can be made up of a copper material, but is not limited, and the preferred values of its thickness is between 0.03mm-0.08mm, and its optimum is 0.05mm, but is also not limited.

nullPlease refer to Fig. 3 A、Fig. 3 B and Fig. 3 C，It is the Facad structure schematic diagram of the respectively piezo-activator of the micro pressure power set shown in Figure 1A、Structure schematic diagram and cross-sectional view，As shown in the figure，Piezo-activator 13 is by a suspension board 130、One housing 131、At least one support 132 and a piezoelectric ceramic plate 133 assemble jointly，Wherein，This piezoelectric ceramic plate 133 is attached at the lower surface 130b of suspension board 130，And this at least one support 132 is connected between suspension board 130 and housing 131，In the present embodiment，The two-end-point of this support 132 is connected to housing 131，Another end points is then connected to suspension board 130，And in support 132、At least one space 135 is had more between suspension board 130 and housing 131，Circulate in order to supplied gas，And this suspension board 130、The kenel of housing 131 and support 132 and quantity are to have multiple change.It addition, housing 131 has more the conductive connecting pin 134 of an outside projection, in order to for electrical connection, but it is not limited.In some embodiments, the thickness preferred values of piezo-activator 13 is between 0.28mm to 0.49mm, and its optimum is for 0.37mm, but is also not limited.

In the present embodiment, suspension board 130 is the structure for a cascaded surface, imply that and have more a protuberance 130c in the upper surface 130a of suspension board 130, this protuberance 130c can be but not be limited to a circular protrusions structure, and the height preferred values of protuberance 130c is between 0.02mm-0.08mm, and optimum is 0.03mm, its diameter is 5.5mm, but is not limited.It is visible please refer to Fig. 3 A and Fig. 3 C, the protuberance 130c of suspension board 130 is the upper surface 131a copline with housing 131, and the upper surface 132a of the upper surface 130a of suspension board 130 and support 132 is also copline, and it is that there is a certain depth between the upper surface 130a of the upper surface 131a of the protuberance 130c of this suspension board 130 and housing 131 and suspension board 130 and the upper surface 132a of support 132.Lower surface 130b as suspension board 130, then as shown in Fig. 3 B and Fig. 3 C, itself and the lower surface 132b of the lower surface 131b of housing 131 and support 132 are smooth coplanar structure, and piezoelectric ceramic plate 133 is then attached at the lower surface 130b place of this smooth suspension board 130.In some embodiments, suspension board 130, support 132 and housing 131 are the structures that can be formed in one, and can be made up of a metallic plate, for instance can be made up of stainless steel, but be not limited.And in some embodiments, the preferred values of this suspension board 130 thickness is between 0.2mm-0.29mm, and its optimum is 0.26mm, the length preferred values of this suspension board another is between 8mm-12mm, and its optimum be 10.1mm, width preferred values between 8mm-12mm, and its optimum is 10.1mm but is not limited.Preferred values as the thickness of this housing 131 is between 0.2mm-0.4mm, and its optimum is 0.3mm, but is not limited.

Again in other embodiments, the preferred values of the thickness of piezoelectric ceramic plate 133 is between 0.08mm-0.2mm, and its optimum is 0.10mm, and the length preferred values of this suspension board is between 8mm-12mm, and its optimum is that 10mm, width preferred values are between 8mm-12mm, and its optimum is 10mm, the preferred values of another length and width ratio is between 0.75 times-1.25 times, is so also not limited.

Please continuing and consult Fig. 4, it is the multiple enforcement aspect schematic diagram for the piezo-activator shown in Fig. 3 A.As shown in the figure, then the visible suspension board 130 of piezo-activator 13, housing 131 and support 132 are to have various kenel, and at least can have the multiple aspects such as (a) shown in Fig. 4～(l), for example, a the housing a1 and suspension board a0 of () aspect is for square structure, and be to link it between the two by multiple support a2, such as: 8, but it is not limited, and be that there is space a3 between support a2 and suspension board a0, housing a1, circulate with supplied gas.In another (i) aspect, its housing i1 and suspension board i0 is also similarly square structure, precisely because in only by 2 support i2 to link it；It addition, in (j)～(l) aspect, then its suspension board j0 etc. are can be circular structure, and housing j0 etc. also can be the frame structure of somewhat radian, but are all not limited.Therefore thus multiple enforcement aspect is visible, the kenel of suspension board 130 is can be square or circular, and similarly, the piezoelectric ceramic plate 133 being attached at the lower surface 130b of suspension board 130 also can be square or circular, is not limited thereto；And, the kenel of the support 132 being connected between suspension board 130 and housing 131 and quantity also can be complied with and actual apply situation and appoint and execute change, is not limited with the aspect shown in this utility model.And these suspension boards 130, housing 131 and support 132 are the structures that can be formed in one, but it is not limited, then can be processed by tradition as its manufacture or gold-tinted etches or laser machines or the mode such as eletroforming or electro-discharge machining is made, all be not limited.

In addition, please continue and consult Figure 1A and Fig. 2 A, having more insulating trip 141, conducting strip 15 and another insulating trip 142 in minitype gas transmitting device 1A is sequentially be correspondingly arranged under piezo-activator 13, and its form approximately corresponds to the form of housing of piezo-activator 13.In some embodiments, namely insulating trip 141,142 is made up of the material that can insulate, for instance: plastic cement, but be not limited, to carry out the use insulated；In other embodiments, namely conducting strip 15 is made up of conductive material, for instance: metal, but be not limited, to carry out the use conducted.And, in the present embodiment, conducting strip 15 also can arrange a conductive connecting pin 151, to carry out the use conducted.

Please refer to Figure 1A and Fig. 5 A to Fig. 5 E, wherein Fig. 5 A to Fig. 5 E is the illustrative view of the minitype gas transmitting device for the micro pressure power set shown in Figure 1A.nullFirst，As shown in Figure 5A，Visible minitype gas transmitting device 1A is sequentially by inlet plate 11、Resonance plate 12、Piezo-activator 13、Insulating trip 141、Conducting strip 15 and another insulating trip 142 etc. are stacking to be formed，And be that there is a gap g0 between resonance plate 12 and piezo-activator 13，In the present embodiment，It is that the gap g0 between the housing 131 of resonance plate 12 and piezo-activator 13 fills a material，Such as: conducting resinl，But it is not limited，So that the degree of depth of this gap g0 can be maintained between the protuberance 130c of the suspension board 130 of resonance plate 12 and piezo-activator 13，And then can more quickly flow by air-guiding，And because the protuberance 130c of suspension board 130 keeps suitable distance to make the interference minimizing that contacts with each other with resonance plate 12，Noise is promoted to produce to be lowered；In other embodiments, also by the height of the housing 131 of the electric actuator 13 that adds high pressure, so that increasing by a gap when itself and resonance plate 12 assemble, but can be not limited.

Please continue and consult Fig. 5 A to Fig. 5 E, as shown in the figure, when inlet plate 11, resonance plate 12 and piezo-activator 13 sequentially corresponding assemble after, then can be collectively forming a chamber confluxing gas with inlet plate 11 thereon in hollow bore 120 place of resonance plate 12, and between resonance plate 12 and piezo-activator 13, more form one first chamber 121, it is configured to temporarily store gas, and first chamber 121 be through the hollow bore 120 of resonance plate 12 and be connected with the chamber at central recess 111 place of inlet plate 11 lower surface, and first the both sides of chamber 121 be then connected with the micro valve device 1B being arranged under it by the space 135 between the support 132 of piezo-activator 13.

When the minitype gas transmitting device 1A start of micro pressure power set 1, mainly by piezo-activator 13 by voltage actuation with support 132 for fulcrum, carry out the reciprocating vibration of vertical direction.nullAs shown in Figure 5 B，When piezo-activator 13 is vibrated downwards by voltage actuation，Then gas is entered by least one air inlet 110 on inlet plate 11，And through its lower surface at least one total string holes 112 be pooled to central authorities central recess 111 place，Flow downwardly into the first chamber 121 then through by the central hole 120 being correspondingly arranged with central recess 111 on resonance plate 12，Thereafter，Due to the drive vibrated by piezo-activator 13，Resonance plate 12 also can with resonance and carry out vertical reciprocating vibration，As shown in Figure 5 C，Be then resonance plate 12 also with downward vibration，And attaching contacts on the protuberance 130c of suspension board 130 of piezo-activator 13，Deformation by this resonance plate 12，To compress the volume of the first chamber 121，And close the first chamber 121 middle flow space，Promote its interior gas to push to flow to both sides，And then space 135 between the support 132 of piezo-activator 13 and pass through downwards flowing.nullThen initial position is returned back to for its resonance plate 12 as Fig. 5 D，And piezo-activator 13 is driven by voltage upwards to vibrate，The so same volume extruding the first chamber 121，Only now owing to piezo-activator 13 is upwards lifting，The displacement of this lifting can be d，So that the gas in the first chamber 121 can flow towards both sides，And then drive the gas at least one air inlet 110 on inlet plate 11 constantly to enter，Flow into again in the chamber that central recess 111 is formed，Again as shown in fig. 5e，This resonance plate 12 is resonated upwards by the vibration of piezo-activator 13 upwards lifting，And then make the gas in central recess 111 be flowed in the first chamber 121 by the central hole 120 of resonance plate 12 again，And outflow minitype gas transmitting device 1A is passed through downwards via the space 135 between the support 132 of piezo-activator 13.Thus implement aspect visible, when resonance plate 12 carries out vertical reciprocating vibration, it is can by the gap g0 between itself and piezo-activator 13 to increase the ultimate range of its vertical displacement, in other words, gap g0 is set between this two structure resonance plate 12 can be made can to produce upper and lower displacement by a larger margin when resonance, and wherein the vibration displacement of this piezo-activator is d, it is x with the difference of this gap g0, i.e. x=g0-d, after tested as x 0um, for there being noise state；Working as x=1-5um, the maximum output pressure of pumping can reach 350mmHg；Working as x=5-10um, the maximum output pressure of pumping can reach 250mmHg；Working as x=10-15um, the maximum output pressure of pumping can reach 150mmHg, and its numerical value corresponding relation is as shown in the following Table I.Above-mentioned numerical value be at operation frequency be between 17K to 20K, operation voltage is between ± 10V to ± 20V.So, runner design through this minitype gas transmitting device 1A produces barometric gradient, make gas flow at high rates, and through the resistance difference in runner turnover direction, by gas by suction side transmission to outlet side, and when outlet side has air pressure, still have the ability to continue pushing out gas, and quiet effect can be reached.

(table one)

Additionally, in some embodiments, the vertical reciprocating type frequency of vibration of resonance plate 12 is can be identical with the frequency of vibration of piezo-activator 13, and namely both can simultaneously upwards or downwards simultaneously, it is can to apply situation according to actual and appoint and execute change, not with being limited as flowing mode shown in the present embodiment.

Please refer to Figure 1A, Fig. 2 A and Fig. 6 A, Fig. 6 B, wherein Fig. 6 A is the collection pressure illustrative view of the micro valve device for the micro pressure power set shown in Figure 1A, and Fig. 6 B is then for the release illustrative view of the micro valve device of the micro pressure power set shown in Figure 1A.As shown in Figure 1A and Fig. 6 A, the micro valve device 1B of micro pressure power set 1 of the present utility model is sequentially by gas collection plate 16, valve sheet 17 and exit plate 18 is stacking forms, in the present embodiment, gas collection plate 16 has a reference surface 160, this reference surface 160 is depression is to form a gas collection chamber 162, the gas transmitted downwards by minitype gas transmitting device 1A is then temporarily accumulated in this gas collection chamber 162, and be that there is the first through hole 163 and the second through hole 164 in gas collection plate 16, one end of first through hole 163 and the second through hole 164 is to be connected with gas collection chamber 162, the other end is then connected with the first release chamber 165 on the second surface 161 of gas collection plate 16 and the first outlet chamber 166 respectively.And, further set up a protuberance structure 167 at the first place of outlet chamber 166, for instance can be but not be limited to a column structure, and it is that the valve opening 170 with valve sheet 17 is correspondingly arranged.

Exit plate 18 also has two the 3rd through hole 181 and the 4th through holes 182 running through setting, and the 3rd through hole 181 and the 4th through hole 182 be correspond respectively to the first through hole 163 of gas collection plate 16 and the second through hole 164 and arrange, and in exit plate 18, there is a reference surface 180, corresponding to the 3rd through hole 181 place on this reference surface 180 is that depression forms one second release chamber 183, then cave in corresponding to the 4th through hole 182 place and form one second outlet chamber 184, and between the second release chamber 183 with the second outlet chamber 184, have more one connect runner 185, circulate in order to supplied gas.One end of 3rd through hole 181 is connected with the second release chamber 183, and the protuberance structure 181a that its end can be set up a protrusion further and be formed, can being such as but not be limited to column structure, the other end be then communicated in the pressure relief vent 186 of the second surface 187 of exit plate 18；And one end of the 4th through hole 182 is connected with the second outlet chamber 184, the other end is then connected with outlet 19, and in the present embodiment, outlet 19 is can be connected (not shown) with a device, for instance: forcing press, but be not limited.

And, exit plate 18 has more at least one position limiting structure 188, for the present embodiment, position limiting structure 188 is disposed in the second release chamber 183, and is an annular block structure, and is not limited, it is mainly when micro valve device 1B carries out collection pressure operation, it is provided with auxiliary and supports the use of valve sheet 17, to prevent valve sheet 17 from subsiding, and can make the valve sheet 17 can more quickly opening and closing of fault.

Valve sheet 17 has a valve opening 170 and multiple location hole 171, when valve sheet 17 assembles with gas collection plate 16 and exit plate 18 location, it is that its valve opening 170 is correspondingly arranged corresponding to the protuberance structure 167 of the first outlet chamber 166 of gas collection plate 16, by the design of this single valve opening 170, so that gas can reach the purpose of one-way flow in response to its pressure reduction.

nullWhen start pressed by micro valve device 1B collection，Mainly as shown in Figure 6A，It is can in response to coming from the pressure that the minitype gas transmitting device 1A gas transmitted downwards provides，Again or when extraneous atmospheric pressure is more than the internal pressure of the devices (not shown) being connected with outlet 19，Then gas can in minitype gas transmitting device 1A transmission to the gas collection chamber 162 of micro valve device 1B，Flow downwardly in the first release chamber 165 and the first outlet chamber 166 through the first through hole 163 and the second through hole 164 respectively again，Now，Downward gas pressure is to make flexual valve sheet 17 be bent downwardly deformation，Therefore the thickness preferred values of valve sheet 17 is between 0.1mm-0.3mm，And its optimum is 0.2mm，And then make the volume of the first release chamber 165 increase，And it is smooth downwards corresponding to the first through hole 163 place and be resisted against the end of the 3rd through hole 181，And then the 3rd through hole 181 of exit plate 18 can be closed，Therefore the gas in the second release chamber 183 will not flow out from the 3rd through hole 181 place.Certainly, the present embodiment, the design of a protuberance structure 181a is set up in available 3rd through hole 181 end, and this protuberance structure 181a is through improveing to increase its height, the height of this protuberance structure 181a is above the reference surface 180 of this exit plate 18, and the height preferred values of protuberance structure 181a is for being between 0.45mm-0.55mm, optimum is 0.5mm, valve sheet 17 is forced to conflict rapidly and close the 3rd through hole 181 to add, and reach the effect that a prestressing conflict effect fully seals, simultaneously and pass through the position limiting structure 188 being located on the 3rd through hole 181 periphery, to assist support valve sheet 17, make it will not produce to subside.On the other hand, owing to gas is to flow downwardly in the first outlet chamber 166 from the second through hole 164, and the valve sheet 17 corresponding to the first place of outlet chamber 166 is also bent downwardly deformation, so that the valve opening 170 of its correspondence is opened downwards, gas then can flow in the second outlet chamber 184 via valve opening 170 from the first outlet chamber 166, and it is flow in outlet 19 and the devices (not shown) that are connected with outlet 19 by the 4th through hole 182, whereby this device to be carried out the start of collection pressure.

Please continue and consult Fig. 6 B, when micro valve device 1B carries out release, it is can by the gas transmission amount of regulation and control minitype gas transmitting device 1A, make in gas no longer input set gas chamber 162, or when device (not shown) internal pressure being connected with outlet 19 is more than the atmospheric pressure in the external world, then micro valve device 1B can be made to carry out release.Now, gas will input to the second outlet chamber 184 from the 4th through hole 182 being connected with outlet 19, make the volumetric expansion of the second outlet chamber 184, and then promote flexual valve sheet 17 to be bent upwards deformation, and upwards smooth, be resisted against on gas collection plate 16, therefore the valve opening 170 of valve sheet 17 can close because being resisted against gas collection plate 16.nullCertainly，At the present embodiment，Available first outlet chamber 166 sets up the design of a protuberance structure 167，And this protuberance structure 167 is through improveing to increase its height，The height of this protuberance structure 167 is above the reference surface 160 of this gas collection plate 16，And the height preferred values of protuberance structure 167 is between 0.45mm-0.55mm，And its optimum is 0.50mm，Therefore be available for flexual valve sheet 17 and be bent upwards the more rapid conflict of deformation，Make valve opening 170 more favorably reach a prestressing conflict effect and attach the closed mode of sealing completely，Therefore，When being in original state，The valve opening 170 of valve sheet 17 can be resisted against this protuberance structure 167 and close because being close to，Then the gas in this second outlet chamber 184 will not adverse current to the first outlet chamber 166，To reach the effect better preventing gas from leaking outside.And, gas in second outlet chamber 184 is can to flow in the second release chamber 183 via connection runner 185, and then make the volume expanded of the second release chamber 183, and make to be bent upwards deformation equally corresponding to the valve sheet 17 of the second release chamber 183, now do not support due to valve sheet 17 and be closed in the 3rd through hole 181 end, therefore namely the 3rd through hole 181 is in opening, namely the gas in the second release chamber 183 can outwards be flow to pressure relief vent 186 by the 3rd through hole 181 and sentences and carry out release operation.Certainly, the present embodiment, may utilize the protuberance structure 181a set up the 3rd through hole 181 end or through the position limiting structure 188 being arranged in the second release chamber 183, the height preferred values of this position limiting structure 188 is between 0.3mm-0.5mm, and its optimum is 0.4mm, allow flexual valve sheet 17 be bent upwards deformation more rapid, more favorably depart from the state closing the 3rd through hole 181.So, then by this unidirectional release operation, the gas in the device (not shown) being connected with outlet 19 can be discharged and blood pressure lowering, or be completely exhausted out and complete release operation.

Please refer to Figure 1A, Fig. 2 A and Fig. 7 A to Fig. 7 E, wherein Fig. 7 A to Fig. 7 E is the collection pressure illustrative view for the micro pressure power set shown in Figure 1A.nullAs shown in Figure 7 A，Namely micro pressure power set 1 are combined by minitype gas transmitting device 1A and micro valve device 1B，Wherein minitype gas transmitting device 1A is as aforementioned，Sequentially by inlet plate 11、Resonance plate 12、Piezo-activator 13、Insulating trip 141、The build stack such as conducting strip 15 and another insulating trip 142 assemble location and form，And be that there is a gap g0 between resonance plate 12 and piezo-activator 13，And there is the first chamber 121 between resonance plate 12 and piezo-activator 13，And，Micro valve device 1B is then same by gas collection plate 16、The sequentially stack assembly such as valve sheet 17 and exit plate 18 location forms，And be that there is gas collection chamber 162 between the gas collection plate 16 and the piezo-activator 13 of minitype gas transmitting device 1A of micro valve device 1B、Second surface 161 in gas collection plate 16 has more the first release chamber 165 and the first outlet chamber 166，And have more the second release chamber 183 and the second outlet chamber 184 in the reference surface 180 of exit plate 18，Driving and resonance plate 12 by these multiple different pressure chamber's collocation piezo-activators 13、The vibration of valve sheet 17，So that gas transmits to next part pressure.

As shown in Figure 7 B, when the piezo-activator 13 of minitype gas transmitting device 1A is vibrated downwards by voltage actuation, then gas can enter in minitype gas transmitting device 1A by the air inlet 110 on inlet plate 11, and via at least one total string holes 112 to be pooled to its central recess 111 place, flow downwardly into the first chamber 121 then through by the hollow bore 120 on resonance plate 12.nullThereafter，Then as seen in figure 7 c，Due to the resonant interaction vibrated by piezo-activator 13，Resonance plate 12 also can with carry out reciprocating vibration，Namely it vibrates downwards，And on the protuberance 130c of the suspension board 130 of piezo-activator 13，Deformation by this resonance plate 12，The volume making the chamber at central recess 111 place of inlet plate 11 increases，And compress the volume of the first chamber 121 simultaneously，And then promote the gas in the first chamber 121 to push to both sides flowing，And then space 135 between the support 132 of piezo-activator 13 and pass through downwards circulation，To flow in the gas collection chamber 162 between minitype gas transmitting device 1A and micro valve device 1B，And again by with gas collection chamber 162 is connected the first through hole 163 and the second through hole 164 is corresponding downwards flow in the first release chamber 165 and the first outlet chamber 166，Thus implement aspect visible，When resonance plate 12 carries out vertical reciprocating vibration，It is can by the gap g0 between itself and piezo-activator 13 to increase the ultimate range of its vertical displacement，In other words，Arranging gap g0 between this two structure can make resonance plate 12 can produce upper and lower displacement by a larger margin when resonance.

Then, then as illustrated in fig. 7d, owing to the resonance plate 12 of minitype gas transmitting device 1A returns back to initial position, and piezo-activator 13 is driven by voltage upwards to vibrate, and wherein the vibration displacement of this piezo-activator is d, it is x, i.e. x=g0-d with the difference of this gap g0, after tested as x 0um, for there being noise state；Working as x=1-5um, the maximum output pressure of pumping can reach 350mmHg；Working as x=5-10um, the maximum output pressure of pumping can reach 250mmHg；Working as x=10-15um, the maximum output pressure of pumping can reach 150mmHg, all in shown in its previously listed table one, repeats no more.Above-mentioned numerical value be at operation frequency be between 17K to 20K, operation voltage is between ± 10V to ± 20V.Again in another embodiment, this operation frequency is 18.5k, operation voltage is ± 16V, and its maximum output pressure can reach 300mmHg, but is not limited.nullThe so same volume extruding the first chamber 121，Gas in first chamber 121 is flowed towards both sides，And inputted the gas collection chamber 162 to micro valve device 1B constantly by the space 135 between the support 132 of piezo-activator 13、In first release chamber 165 and the first outlet chamber 166，So more make the air pressure in the first release chamber 165 and the first outlet chamber 166 more big，And then promote flexual valve sheet 17 to produce downwards Bending Deformation，Then in the second release chamber 183，Valve sheet 17 is then smooth downwards and is resisted against the protuberance structure 181a of the 3rd through hole 181 end，And then make the 3rd through hole 181 close，And in the second outlet chamber 184，On valve sheet 17, the valve opening 170 corresponding to the 4th through hole 182 is to open downwards，Make the gas in the second outlet chamber 184 can be passed down to outlet 19 and any device (not shown) being connected with outlet 19 by the 4th through hole 182，And then to reach the purpose of collection pressure operation.nullFinally，Then as seen in figure 7e，Shift up when the resonance plate 12 of minitype gas transmitting device 1A resonates，And then make the gas in the central recess 111 of inlet plate 11 lower surface can be flowed in the first chamber 121 by the hollow bore 120 of resonance plate 12，It is transmitted continuously to downwards in micro valve device 1B then through by the space 135 between the support 132 of piezo-activator 13，Then owing to its gas pressure is to continue to increase downwards，Therefore gas still can constantly via the gas collection chamber 162 of micro valve device 1B、Second through hole 164、First outlet chamber 166、Second outlet chamber 184 and the 4th through hole 182 and flow in outlet 19 and any devices of being connected with outlet 19，This collection pressure operation is can via the pressure differential in extraneous atmospheric pressure and device to drive it，But it is not limited.

nullWhen the pressure internal with exporting 19 devices (not shown) being connected is more than the pressure in the external world，Then micro pressure power set 1 are the operations that can carry out blood pressure lowering or release as shown in Figure 8，Its blood pressure lowering or release make flowing mode mainly as previously mentioned，Can by the gas transmission amount of regulation and control minitype gas transmitting device 1A，Make in gas no longer input set gas chamber 162，Now，Gas will input to the second outlet chamber 184 from the 4th through hole 182 being connected with outlet 19，Make the volumetric expansion of the second outlet chamber 184，And then promote flexual valve sheet 17 to be bent upwards deformation，And it is upwards smooth、It is resisted against in the protuberance structure 167 of the first outlet chamber 166，And make the valve opening 170 of valve sheet 17 close，Namely the gas in the second outlet chamber 184 will not adverse current to the first outlet chamber 166；And, the gas in the second outlet chamber 184 is can to flow in the second release chamber 183 via connection runner 185, is more outwards flow to pressure relief vent 186 by the 3rd through hole 181 and sentence and carry out release operation；So by the unidirectional gas transmission operation of this micro valve structure 1B, the gas in the device being connected with outlet 19 can be discharged and blood pressure lowering, or be completely exhausted out and complete release operation.

In sum, micro pressure power set provided by the utility model, main being mutually assembled by minitype gas transmitting device and micro valve device, gas air inlet on minitype gas transmitting device is made to enter, and utilize the start of piezo-activator, make gas runner after design and pressure chamber produces barometric gradient, and then make gas flow at high rates be transferred in micro valve device, design through the one-way cock of micro valve device again, make gas with one way flow, and then can by pressure accumulated in any device being connected with outlet；And when being intended to carry out blood pressure lowering or release, then regulate and control the transmission quantity of minitype gas transmitting device, and make gas can be transmitted the second outlet chamber to micro valve device by the device being connected with outlet, and by connection runner by transmission to the second release chamber, flowed out by pressure relief vent again, and then to reach to make gas promptly transmit, and quiet effect can be reached simultaneously, the overall volume that more can make minitype gas power set reduces and slimming, and then make minitype gas power set reach light comfortable portable purpose, and can be widely used among medical device and relevant device.Therefore, the great industrial utilization of minitype gas power set of the present utility model, files an application in whence in accordance with the law.

Even if this utility model described in detail by above-described embodiment and can by be familiar with these those skilled in the art appoint execute craftsman think and be all as modify, so neither de-as attached claim be intended to protector.

Claims

1. micro pressure power set, it is characterised in that including:

One minitype gas transmitting device, including:

One inlet plate, there is at least one air inlet, at least one total string holes and constitute a central recess confluxing chamber, this at least one air inlet supplies to import gas, this total string holes this air inlet corresponding, and guides the gas of this air inlet to converge into this chamber that confluxes that this central recess is constituted；

One resonance plate, has a hollow bore, to should this chamber that confluxes of inlet plate；And

One piezo-activator, has:

One suspension board；

One housing, at least has a support, is connected between this suspension board and this housing and connects；And

One piezoelectric ceramic plate, is attached at a surface of this suspension board；

Wherein, this above-mentioned inlet plate, this resonance plate and this piezo-activator sequentially arrange location to reply is folded, and there is between this resonance plate and this piezo-activator a gap g0, form one first chamber, so that producing the displacement of d when this piezo-activator is driven, and then make that there is between g0 and d an x difference, i.e. x=g0-d, during difference x=1-5um, produce the gas of maximum output pressure 350mmHg, this gas is to be imported by this at least one air inlet of this inlet plate, it is collected to this central recess through this at least one total string holes, pass through this hollow bore of this resonance plate, to enter in this first chamber, transmitted downwards by the space between this at least one support of this piezo-activator again, with lasting pushing out gas；And

One micro valve device, including:

One valve sheet, has a valve opening, and this valve sheet has the thickness between 0.1mm-0.3mm；

One gas collection plate, there is one first through hole, one second through hole, one first release chamber and one first outlet chamber, and there is a reference surface, this first outlet chamber has a protuberance structure, with to should this valve opening of valve sheet and arrange, favourable this valve opening of conflicting forms a prestressing effect, this valve opening completely enclosed, the height of this protuberance structure is higher than this reference surface of this gas collection plate, this first through hole is connected with this first release chamber, and this second through hole is connected with this first outlet chamber；And

One exit plate, there is one the 3rd through hole, one the 4th through hole, one second release chamber, one second outlet chamber and at least one position limiting structure, and there is a reference surface, 3rd through hole end has a protuberance structure, the height of this protuberance structure is higher than this reference surface of this exit plate, this valve sheet favourable is quickly conflicted and is formed a prestressing effect, completely enclosed 3rd through hole, 3rd through hole is corresponding to this first through hole of this gas collection plate, and be connected with this second release chamber, 4th through hole corresponds to this second through hole, and be connected with this second outlet chamber, it is indoor that this at least one position limiting structure is arranged at this second pressure-releasing cavity, the height of this position limiting structure is between 0.3mm-0.5mm, and between this second release chamber and this second outlet chamber, there is a connection runner；

nullWherein，This above-mentioned gas collection plate、This valve sheet and this exit plate are sequentially corresponding stacking arranges location，This valve sheet is arranged between this gas collection plate and this exit plate，And this valve opening of this valve sheet is correspondingly arranged between this second through hole and the 4th through hole，Gas is when this minitype gas transmitting device transmits downwards to this micro valve device，Entered by this first through hole and this second through hole in this first release chamber and this first outlet chamber，And import gas flowed into by this valve opening of this valve sheet carry out in the 4th through hole collection pressure operation，Collect and calm the anger body more than importing gas，Collect body of calming the anger to flow towards this second outlet chamber from the 4th through hole，So that this valve sheet displacement，And make this valve opening of this valve sheet be resisted against this gas collection plate and close，And this at least one position limiting structure is that auxiliary supports this valve sheet，To prevent this valve sheet from subsiding，Collect body of calming the anger simultaneously and can flow to this second pressure-releasing cavity indoor along connection runner in this second outlet chamber，Now in this valve sheet displacement indoor of the second pressure-releasing cavity，Physical ability of calming the anger collection is flowed out by the 3rd through hole，To carry out release operation.

2. micro pressure power set as claimed in claim 1, it is characterised in that comprise operation frequency further and be between 17K-20K, operate voltage for ± 10V-± 20V.

3. micro pressure power set as claimed in claim 1, it is characterized in that, this the difference x=5-10um of the displacement that gap between this resonance plate and this piezo-activator of these micro pressure power set produces time driven with this piezo-activator, produces the gas of maximum output pressure 250mmHg.

4. micro pressure power set as claimed in claim 1, it is characterized in that, this the difference x=10-15um of the displacement that gap between this resonance plate and this piezo-activator of these micro pressure power set produces time driven with this piezo-activator, produces the gas of maximum output pressure 150mmHg.

5. micro pressure power set as claimed in claim 1, it is characterised in that the length of this suspension board between 8mm-12mm, width between 8mm-12mm, thickness is between 0.2mm-0.29mm.

6. micro pressure power set as claimed in claim 5, it is characterised in that the length of this suspension board is 10.1mm, width be 10.1mm, thickness is 0.26mm.

7. micro pressure power set as claimed in claim 1, it is characterized in that, this piezoelectric ceramic plate has the length between 8mm-12mm, the width between 8mm-12mm and the thickness between 0.08mm-0.2mm, and this length and this width ratio are between 0.75 times-1.25 times.

8. micro pressure power set as claimed in claim 7, it is characterised in that the length of this piezoelectric ceramic plate is 10mm, width be 10mm, thickness is 0.10mm.

9. micro pressure power set as claimed in claim 1, it is characterised in that this suspension board more includes a protuberance, and height is between 0.02mm-0.08mm.

10. micro pressure power set as claimed in claim 9, it is characterised in that the height of this protuberance is 0.03mm.

11. micro pressure power set as claimed in claim 9, it is characterised in that this protuberance is a circular protrusions structure, and diameter is 5.5mm.

12. micro pressure power set as claimed in claim 1, it is characterised in that this inlet plate of this minitype gas transmitting device is made up of a stainless steel, and thickness is between 0.4mm-0.6mm.

13. micro pressure power set as claimed in claim 12, it is characterised in that the thickness of this inlet plate is 0.5mm.

14. micro pressure power set as claimed in claim 1, it is characterised in that this resonance plate of this minitype gas transmitting device is made up of a copper material, and thickness is between 0.03mm-0.08mm.

15. micro pressure power set as claimed in claim 14, it is characterised in that the thickness of this resonance plate is 0.05mm.

16. micro pressure power set as claimed in claim 1, it is characterised in that this minitype gas transmitting device more includes at least one insulating trip and a conducting strip, and this at least one insulating trip and this conducting strip are sequentially arranged under this piezo-activator.

17. micro pressure power set as claimed in claim 1, it is characterised in that in this housing of this piezo-activator of this minitype gas transmitting device be made up of a stainless steel, thickness is between 0.2mm-0.4mm.

18. micro pressure power set as claimed in claim 17, it is characterised in that the thickness of this housing of this piezo-activator is 0.3mm.

19. micro pressure power set as claimed in claim 1, it is characterised in that the two-end-point of this support of this piezo-activator of this minitype gas transmitting device connects this housing, end point connects this suspension board.

20. micro pressure power set as claimed in claim 1, it is characterised in that the thickness of this valve sheet of this micro valve device is 0.2mm.

21. micro pressure power set as claimed in claim 1, it is characterised in that the height of this position limiting structure of this micro valve device is 0.4mm.

22. micro pressure power set as claimed in claim 1, it is characterised in that this protuberance structure height of this first outlet chamber of this gas collection plate of this micro valve device is between 0.45mm-0.55mm.

23. micro pressure power set as claimed in claim 22, it is characterised in that the height of this protuberance structure of this first outlet chamber is 0.5mm.

24. micro pressure power set as claimed in claim 1, it is characterised in that the height of this protuberance structure of the 3rd through hole of this exit plate of this micro valve device is between 0.45mm-0.55mm.

25. micro pressure power set as claimed in claim 24, it is characterised in that the height of this protuberance structure of the 3rd through hole is 0.5mm.

26. micro pressure power set as claimed in claim 1, it is characterised in that this gas collection plate of this micro valve device has more a gas collection chamber in a surface, and this gas collection chamber is connected with this first through hole and this second through hole.

27. micro pressure power set as claimed in claim 1, it is characterised in that this first release chamber and this first outlet chamber of this micro valve device are arranged on another surface of this relative gas collection chamber of this gas collection plate.

28. micro pressure power set as claimed in claim 1, it is characterised in that this second release chamber and this second outlet chamber are arranged on a surface of this exit plate, corresponding with this first release chamber of this gas collection plate and this first outlet chamber respectively.

29. micro pressure power set, it is characterised in that including:

One minitype gas transmitting device, including:

One inlet plate；

One resonance plate；And

One piezo-activator；

Wherein, above-mentioned this inlet plate, this resonance plate and this piezo-activator are sequentially corresponding stacking arranges location, and there is between this resonance plate and this piezo-activator a gap g0, form one first chamber, so that producing the displacement of d when this piezo-activator is driven, and then make that there is between g0 and d an x difference, i.e. x=g0-d, especially as this difference x=1-5um, produce the gas of maximum output pressure 350mmHg, this this inlet plate of gas reason enters, and flows through this resonance plate, transmits still further below to enter in this first chamber；And

One micro valve device, including:

One gas collection plate, has at least two through holes and at least two chambers；

One valve sheet, has a valve opening；And

One exit plate, has at least two through holes and at least two chambers；

Wherein, above-mentioned gas collection plate, valve sheet and exit plate are sequentially corresponding stacking arranges location, a gas collection chamber is formed between this minitype gas transmitting device and this micro valve device, gas transmits downwards to this gas collection chamber from this minitype gas transmitting device, it is transferred in this micro valve device again, at least two through holes being respectively provided with through this gas collection plate, this exit plate and at least two chambers, this valve opening correspondence making this valve sheet with the one-way flow in response to gas opens or closes, to carry out collection pressure or release operation.

30. micro pressure power set as claimed in claim 29, it is characterized in that, this inlet plate of this minitype gas transmitting device has at least one air inlet, at least one total string holes and a central recess, this at least one air inlet is for importing gas, this total string holes this air inlet corresponding, and guide the gas of this air inlet to converge into this central recess；This resonance plate has a hollow bore, to should this central recess of inlet plate；And this piezo-activator has a suspension board and a housing, this suspension board and connecting with at least one support between this housing, and attach a piezoelectric ceramic plate in a surface of this suspension board.

31. micro pressure power set as claimed in claim 29, it is characterized in that, this gas collection plate of this micro valve device has one first through hole, one second through hole, one first release chamber and one first outlet chamber, this first through hole is connected with this first release chamber, and this second through hole and the first outlet chamber are connected.

32. micro pressure power set as claimed in claim 31, it is characterized in that, this exit plate of this micro valve device has between one the 3rd through hole, one the 4th through hole, one second pressure-releasing cavity and one second outlet chamber wherein this second release chamber and this second outlet chamber and has a connection runner.

null33. micro pressure power set as claimed in claim 32，It is characterized in that，This valve sheet is arranged between this gas collection plate and this exit plate，And this valve opening of this valve sheet is correspondingly arranged between this second through hole and the 4th through hole，Gas is when this minitype gas transmitting device transmits downwards to this micro valve device，Entered by this first through hole and this second through hole in this first release chamber and this first outlet chamber，And import gas flowed into by this valve opening of this valve sheet carry out in the 4th through hole collection pressure operation，Collect and calm the anger body more than importing gas，Collect body of calming the anger to flow towards this second outlet chamber from the 4th through hole，So that this valve sheet displacement，And make this valve opening of this valve sheet be resisted against this gas collection plate and close，Collect body of calming the anger simultaneously and can flow to this second pressure-releasing cavity indoor along connection runner in this second outlet chamber，Now in this valve sheet displacement indoor of the second pressure-releasing cavity，Physical ability of calming the anger collection is flowed out by the 3rd through hole，Carry out release operation.

34. micro pressure power set as claimed in claim 29, it is characterised in that comprise operation frequency further and be between 17K-20K, operate voltage for ± 10V-± 20V.

35. micro pressure power set as claimed in claim 29, it is characterized in that, this the difference x=5-10um of the displacement that gap between this resonance plate and this piezo-activator of these micro pressure power set produces time driven with this piezo-activator, produces the gas of maximum output pressure 250mmHg.

36. micro pressure power set as claimed in claim 29, it is characterized in that, this the difference x=10-15um of the displacement that gap between this resonance plate and this piezo-activator of these micro pressure power set produces time driven with this piezo-activator, produces the gas of maximum output pressure 150mmHg.

37. micro pressure power set as claimed in claim 30, it is characterized in that, this piezoelectric ceramic plate has the length between 8mm-12mm, the width between 8mm-12mm and the thickness between 0.08mm-0.2mm, and this length and this width ratio are between 0.75 times-1.25 times.

38. micro pressure power set as claimed in claim 37, it is characterised in that the length of this piezoelectric ceramic plate is 10mm, width be 10mm, thickness is 0.10mm.

39. micro pressure power set, it is characterised in that including:

One minitype gas transmitting device, between an inlet plate, a resonance plate and this resonance plate of a piezo-activator and this piezo-activator, there is a gap g0 including sequentially stacking setting, form one first chamber, so that producing the displacement of d when this piezo-activator is driven, and then make that there is between g0 and d an x difference, i.e. x=g0-d, especially as this difference x=1-5um, produce the gas of maximum output pressure, this gas is former is entered by this inlet plate, flow through this resonance plate, transmit again to enter in this first chamber；

One micro valve device, arranges a gas collection plate, a valve sheet and an exit plate including sequentially stacking, and this valve sheet has a valve opening；

Wherein, gas is in this minitype gas transmitting device transmission to this micro valve device, to carry out collection pressure or release operation.

40. micro pressure power set as claimed in claim 39, it is characterized in that, form a gas collection chamber between this minitype gas transmitting device and this micro valve device, make this gas transmit to this gas collection chamber from this minitype gas transmitting device, then be transferred in this micro valve device.

41. micro pressure power set as claimed in claim 39, it is characterized in that, this gas collection plate of this micro valve device, this exit plate are respectively provided with at least two through holes and at least two chambers, make this valve opening correspondence of this valve sheet open or close with the one-way flow in response to gas.