CN107795467A - The manufacture method of fluid control device - Google Patents
The manufacture method of fluid control device Download PDFInfo
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- CN107795467A CN107795467A CN201610801490.4A CN201610801490A CN107795467A CN 107795467 A CN107795467 A CN 107795467A CN 201610801490 A CN201610801490 A CN 201610801490A CN 107795467 A CN107795467 A CN 107795467A
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- plate
- base construction
- deformable base
- control device
- fluid control
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- 239000012530 fluid Substances 0.000 title claims abstract description 104
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 34
- 238000000034 method Methods 0.000 title claims abstract description 34
- 238000009411 base construction Methods 0.000 claims abstract description 140
- 230000001360 synchronised effect Effects 0.000 claims abstract description 65
- 239000012190 activator Substances 0.000 claims abstract description 38
- 238000005452 bending Methods 0.000 claims description 19
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 7
- 230000001788 irregular Effects 0.000 claims description 6
- 238000010586 diagram Methods 0.000 description 18
- 239000000758 substrate Substances 0.000 description 9
- 238000005516 engineering process Methods 0.000 description 7
- 238000006073 displacement reaction Methods 0.000 description 5
- 230000005540 biological transmission Effects 0.000 description 4
- 238000013461 design Methods 0.000 description 3
- 238000007639 printing Methods 0.000 description 3
- 241000276425 Xiphophorus maculatus Species 0.000 description 2
- 230000004308 accommodation Effects 0.000 description 2
- 230000002950 deficient Effects 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 230000018109 developmental process Effects 0.000 description 2
- 239000003814 drug Substances 0.000 description 2
- 238000006748 scratching Methods 0.000 description 2
- 230000002393 scratching effect Effects 0.000 description 2
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000001012 protector Effects 0.000 description 1
- 230000034179 segment specification Effects 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
- F04B43/046—Micropumps with piezoelectric drive
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
- F04B53/22—Arrangements for enabling ready assembly or disassembly
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Reciprocating Pumps (AREA)
Abstract
A kind of manufacture method of fluid control device, comprising:(a) housing, piezo-activator and deformable base construction are provided, piezo-activator is made up of piezoelectric element and oscillating plate, oscillating plate has first surface and corresponding second surface, second surface has protuberance, deformable base construction includes flow plate and flex plate, and flex plate has movable part；(b) flex plate and flow plate are stacked with engagement and form deformable base construction；And after housing, piezo-activator and deformable base construction are sequentially stacked with locating engagement assembling by (c), and it is implemented on the outside synchronous deformation operation for applying an at least active force, flex plate and flow plate is produced synchronous deformation, allow between the movable part of composition flex plate and the protuberance of flow plate and define a certain depth.
Description
【Technical field】
This case is on a kind of manufacture method of fluid control device, espespecially a kind of fluid control with deformable pedestal
The manufacture method of device.
【Background technology】
The either industry such as medicine, computer technology, printing and energy in each field at present, product is towards sophistication and micro-
Smallization direction is developed, and the fluid delivery structure that wherein product such as Micropump, sprayer, ink gun and industrial printing devices is included is
Its key technology, therefore how by means of innovation structure its technical bottleneck is broken through, for the important content of development.
Refer to shown in Figure 1A and Figure 1B, Figure 1A is the part-structure schematic diagram of known fluid control device, and Figure 1B is
Know the part-structure assembling deviation schematic diagram of fluid control device.As illustrated, known fluid control device 100 makees kinetonucleus
The heart mainly includes substrate 101 and piezo-activator 102, and substrate 101 is to stack to set with piezo-activator 102, and substrate 101 with
Piezo-activator 102 has a gap 103, wherein, the gap 103 need to keep certain depth, remain certain by this gap 103
Depth, when piezo-activator 102 is activated by application voltage produces deformation, then fluid can be driven in fluid control device 100
Each chamber indoor moveable, so as to reach fluid transmission purpose.However, in this known fluid control device 100, wherein pressing
Electric actuator 102 and substrate 101 are flat overall structure, and have certain rigidity, on this condition, make this two
Individual entirety is that flat structure precisely aligns each other, to cause to produce with certain gap 103 between two flat board, that is, is tieed up
Certain depth is held, there can be certain degree of difficulty, is easy to produce error, because the certain rigid entirety of any of the above-described tool is put down
Plate, an angle, θ is tilted if any any side, then can produce the shift value that relative distance is multiplied by the angle, θ in relative position,
Such as a displacement d, and cause to increase d ' (as shown in Figure 1B) at the graticule in certain gap 103, or vice versa reduce d ' and (do not scheme
Show)；Particularly when fluid control device is towards the development of microminiaturization, the size of each element designs towards microminiaturization to be carried out, and is made
Obtain and be intended between two flat board maintain with certain gap 103, without increasing or decreasing d ', and then keep the certain of gap 103
Depth, its degree of difficulty more and more higher, and if the certain depth in gap 103 can not be kept, such as gap 103 is the above-mentioned d ' of increase
It is during the error of displacement, the distance for causing the gap 103 is excessive, and then make it that fluid efficiency of transmission is bad；Conversely, if gap is
In opposite direction so that reducing an above-mentioned d ' displacements (not shown), then make it that the distance in gap 103 is too small, and then piezoelectric actuated
The problem of interference is easily contacted during 102 start of device with other elements, and produces noise, and cause the fraction defective of fluid control device with
Lifting.
In other words, because the piezo-activator 102 and substrate 101 of known fluid control device 100 are with certain
Rigid flat overall structure, both are intended to, with overall alignment mode, to reach the purpose precisely aligned and shown for difficulty between flat board, especially
It more becomes small in component size, is more difficult to exactitude position during assembling, and then the efficiency for conveying fluid is low and produces noise
Problem, cause using upper not convenient and uncomfortable.
Therefore, above-mentioned known technology missing can be improved by how developing one kind, can make the instrument of conventionally employed fluid conveying device
Device or equipment reach small volume, miniaturization and Jing Yin, and the problem of be also easy to produce error when overcoming assembling, and then reach light comfortable
Portable purpose minisize fluid transmitting device, actually at present it is in the urgent need to address the problem of.
【The content of the invention】
The main purpose of this case is in fluid control device known to solution, and substrate is with piezo-activator because element is small
The design of change, be not easy to be precisely located and produce error when assembling, make its be difficult to maintain after assembling the demand in its gap away from
From and then the efficiency that causes fluid to convey is low and the problem of produce noise, causes not convenient and uncomfortable to ask using upper
Topic.
For the above-mentioned purpose, the one of this case broader pattern of implementing is to provide a kind of manufacture method of fluid control device,
Comprising:(a) housing, a piezo-activator and a deformable base construction be provided, the piezo-activator by a piezoelectric element and
One oscillating plate is formed, and the oscillating plate has first surface and corresponding second surface, and the second surface has a protuberance,
The deformable base construction includes a flow plate and a flex plate, and the flex plate has a movable part；(b) by the flex plate and should
Flow plate is stacked with engagement and forms the deformable base construction；And (c) sequentially by the housing, the piezo-activator and this can
Deformation base construction is stacked with carrying out locating engagement assembling, and is implemented on the outside synchronous deformation for applying an at least active force
Operation so that the flex plate of the deformable base construction and the flow plate produce synchronous deformation, allow the flex plate this is movable
A certain depth is defined between this of portion and the oscillating plate protuberance.
【Brief description of the drawings】
Figure 1A is the part-structure schematic diagram of known fluid control device.
Figure 1B is the part-structure assembling deviation schematic diagram of known fluid control device.
Fig. 2 is the manufacture method schematic flow sheet of the fluid control device of this case preferred embodiment.
Fig. 3 A are the cross-sectional view of the fluid control device of this case.
Fig. 3 B are the local illustrative view of the fluid control device of this case.
Fig. 4 A are the first embodiment aspect schematic diagram of the deformable base construction of the fluid control device of this case preferred embodiment.
Fig. 4 B are the second embodiment aspect schematic diagram of the deformable base construction of the fluid control device of this case preferred embodiment.
Fig. 4 C are the 3rd embodiment aspect schematic diagram of the deformable base construction of the fluid control device of this case preferred embodiment.
Fig. 4 D are the 4th embodiment aspect schematic diagram of the deformable base construction of the fluid control device of this case preferred embodiment.
Fig. 5 A are the 5th embodiment aspect schematic diagram of the deformable base construction of the fluid control device of this case preferred embodiment.
Fig. 5 B are the 6th embodiment aspect schematic diagram of the deformable base construction of the fluid control device of this case preferred embodiment.
Fig. 5 C are the 7th embodiment aspect schematic diagram of the deformable base construction of the fluid control device of this case preferred embodiment.
Fig. 5 D are the 8th embodiment aspect schematic diagram of the deformable base construction of the fluid control device of this case preferred embodiment.
Fig. 6 A are the 9th embodiment aspect schematic diagram of the deformable base construction of the fluid control device of this case preferred embodiment.
Fig. 6 B are the tenth embodiment aspect schematic diagram of the deformable base construction of the fluid control device of this case preferred embodiment.
Fig. 6 C are the 11st embodiment aspect schematic diagram of the deformable base construction of the fluid control device of this case preferred embodiment.
Fig. 6 D are the 12nd embodiment aspect schematic diagram of the deformable base construction of the fluid control device of this case preferred embodiment.
Fig. 7 is the 13rd embodiment aspect schematic diagram of the deformable base construction of the fluid control device of this case preferred embodiment.
【Embodiment】
Embodying some exemplary embodiments of this case features and advantages will describe in detail in the explanation of back segment.It should be understood that
This case can have various changes in different aspects, and it does not all depart from the scope of this case, and explanation therein and diagram
Inherently it is illustrated as being used, and nand architecture is in limitation this case.
The manufacture method of the fluid control device of this case be made fluid control device 2 can be applied to the raw skill of medicine,
The industry such as the energy, computer technology or printing, in order to transmit fluid, but it is not limited.Fig. 2 and Fig. 3 A are referred to, Fig. 2 is
The manufacture method schematic flow sheet of the fluid control device of this case preferred embodiment, Fig. 3 A are cuing open for the fluid control device of this case
Face structural representation.As shown in Fig. 2 in the manufacture method of the fluid control device of this case, and as shown in Figure 3A, first as walked
Shown in rapid S31, there is provided housing 26, piezo-activator 23 and deformable base construction 20.Wherein piezo-activator 23 is by a piezoelectricity
The oscillating plate 230 of element 233 and one is formed, and oscillating plate 230 has first surface 230b and corresponding second surface 230a, the
Two surface 230a have a protuberance 230c；And oscillating plate 230 can be but not be limited to flexible square platy structure, piezoelectricity member
Part 233 for can square platy structure, and its length of side is not more than the length of side of oscillating plate 230, and can be attached at the first of oscillating plate 230
On the 230b of surface, but it is not limited, the piezoelectric element 233 produces deformation after by application voltage and drives the oscillating plate 230 curved
Qu Zhendong, another piezo-activator 23 further include housing 231 and at least a support 232, and housing 231 surround and is arranged at oscillating plate
230 outside, and its kenel also corresponds roughly to the kenel of oscillating plate 230, i.e., its can be but not be limited to the hollow out frame of square
Type structure, and between oscillating plate 230 and housing 231 connected with an at least support 232, and resilient support is provided；It is and variable
Shape base construction 20 includes flow plate 21 and flex plate 22, but is not limited, and flow plate 21 has an at least surface, and this is at least
One surface includes an outer surface 21a, and further there is the flow plate 21 an at least access aperture 210, at least one to conflux groove
211 and one to conflux opening portion 212, the access aperture 210 is connected through the flow plate 21 and with least one groove 211 that confluxes,
And the other end for confluxing groove 211 is to be communicated in the opening portion 212 of confluxing, and flex plate 22 has a movable part 22a and one
Fixed part 22b, flex plate 22 set and are connected on flow plate 21, to be fixedly connected on so as to fixed part 22b on flow plate 21, and
Movable part 22a is corresponds in the part at the place for opening portion 212 of confluxing, and stream hole 220 is arranged on movable part 22a, and stream
Hole 220 corresponds to opening portion 212 of confluxing.Housing 26 has an at least tap 261, and housing 26 is not only single plate knot
Structure, it also can be the frame structure that periphery has side wall 260, be set wherein for the piezo-activator 23, i.e., housing 26 can cover and be placed on
Outside piezo-activator 23 and deformable base construction 20, and make to form fluid circulation between housing 26 and piezo-activator 23
Temporary chamber A, and tap 261 makes fluid circulate in outside housing 26 to connect temporary chamber A.
Thereafter, stated for another example shown in Fig. 2 step S32, it is variable that flex plate 22 and flow plate 21 are stacked with into engagement composition
Shape base construction 20.
Finally, it is sequentially that housing 26, piezo-activator 23 and deformable base construction 20 is mutual for another example described in step S33
Stack and carry out locating engagement assembling, and implement the outside synchronous deformation operation for applying an at least active force, so that deformable pedestal
The flex plate 22 and flow plate 21 of structure 20 produce synchronous deformation, form the movable part 22a and oscillating plate 230 of the flex plate 22
A certain depth δ is defined between protuberance 230c.This step makes housing 206 cover the outboard peripheries for being placed on the piezo-activator 23
(as shown in Figure 3A), though wherein deformable base construction 20 not yet carries out step S33 synchronous deformation, so in this mainly saying
The mode that the stacking of the fluid control device 2 of bright this case is set, as makes piezo-activator 23 be arranged at the accommodating sky of housing 26
Between in 26a, then so that deformable base construction 20 is corresponding assembles and be arranged at jointly in accommodation space 26a with piezo-activator 23,
Bottom so as to closing piezo-activator 23, and movable part 22a is relative to the protuberance 130c of oscillating plate 130 position；And
In the present embodiment, this outside synchronous deformation operation for applying an at least active force, promote deformable base construction 20 can direction
Synchronously deform close to or away from the protuberance 130c directions of the oscillating plate 230, i.e., as shown in Fig. 4 A to Fig. 7, and be not limited；
In the present embodiment, an at least active force can be that single only imposes an active force, or impose multiple active forces simultaneously, but not
As limit, i.e., on the surface of outside one for the flow plate 21 for being implemented on deformable base construction 20 through an at least active force, with
The flex plate 22 of deformable base construction 20 and flow plate 21 is caused to produce synchronous deformation, or an at least active force is a contact
Power, that is, pass through on the surface of outside one that the active force is contacted to the flow plate 21 for being implemented on deformable base construction 20, and direction
Exerted a force close to the direction of flex plate 22 of deformable base construction 20, so that the flex plate 22 and flow plate of deformable base construction 20
21 produce synchronous deformation, and the surface for being contacted deformable base construction 20 produces at least one force vestige (not shown), example
It can be such as a depression points, but be not limited, and an at least active force also can be between the surface holding necessarily with applying active force
Gap (not shown) surpasses away from power, for example, an at least active force is through suction or magnetic caused by a vacuum extractor
Property attraction etc., be not limited, deformable base imposed on away from power through these pull of vacuum or magnetic attracting force etc. are super
During the outer surface 21a of the flow plate 21 of holder structure 20, between an at least active force and the surface holding necessarily for applying active force
Gap (not shown), and the direction of flex plate 22 force of deformable base construction 20 is directed away from, so that deformable base construction 20
Flex plate 22 and flow plate 21 produce synchronous deformation, and make deformable base construction 20 surface can produce at least one force trace
Mark (not shown), such as can be a depression points, but be not limited.And in the present embodiment, it predominantly makes flex plate 22
Movable part 22a is close to defining a certain depth δ between the protuberance 230c of oscillating plate 230, and then so that this case fluid control is made
Device 2 processed.
Made fluid control device 2 as described above, as shown in Fig. 3 A and Fig. 3 B, when flow plate 21, flex plate 22 with
, then can be common with the opening portion 212 of confluxing of flow plate 21 at the stream hole 220 of flex plate 22 after the corresponding assembling of piezo-activator 23
With forming a chamber for confluxing fluid, and there is spacing h, Yu Yi between flex plate 22 and the housing 231 of piezo-activator 23
It is that can fill a medium in spacing h in a little embodiments, such as：Conducting resinl, but be not limited, engage and position through medium,
So that maintainable certain distance between the movable part 22a of flex plate 22 and the oscillating plate 230 of piezo-activator 23, such as spacing
H, it more may be such that and a certain depth δ formed between the movable part 22a of flex plate 22 and the protuberance 230c of oscillating plate 230, go forward side by side
One step in oscillating plate 230 in vibration when, can by the fluid compression (imply that and certain depth δ diminishes), and make fluid pressure and
Flow velocity increases；In addition, certain depth δ is for a suitable distance, to make the movable part 22a of reduction flex plate 22 and oscillating plate
Contact interference between 230 protuberance 230c, to reduce the problem of producing noise；And the movable part 22a of flex plate 22 with
Certain depth δ between the protuberance 230c of oscillating plate 230 form chamber through flex plate 22 stream hole 220 and with circulation
The chamber of fluid of confluxing at the opening portion 212 of confluxing of plate 21 is connected；When 2 start of fluid control device, mainly caused by piezoelectricity
The piezoelectric element 233 of dynamic device 23 is deformed the reciprocating vibration of the driving progress vertical direction of oscillating plate 230 by voltage actuation is applied,
When oscillating plate 230 vibrates upwards, because flex plate 22 is light, thin laminated structure, flex plate 22 also can with resonance and enter
The movable part 22a of the reciprocating vibration of row vertical direction, as flex plate 22 part also can with flexural vibrations deformation, and should
Stream hole 220 is arranged at the center of flex plate 22 or is adjacent at center, now flex plate 22 movable part 22a can because vibration
Drive that plate 230 vibrates upwards and fluid is up brought into and pushed with upward vibration, then fluid is by flow plate 21
At least an access aperture 210 enters, and confluxes groove 211 through at least one to be pooled at the opening portion 212 of confluxing in center, then passes through
By flowed upwardly on flex plate 22 with the stream hole 220 that opening portion 212 is correspondingly arranged of confluxing to the movable part 22a of flex plate 22 with
Certain depth δ between the protuberance 230c of oscillating plate 230 formed in chamber, by the movable part 22a of this flex plate 22
Deformation, to compress the volume that certain depth δ between the movable part 22a of flex plate 22 and piezo-activator 23 is formed chamber, add
Certain depth δ between the movable part 22a and oscillating plate 230 of strong flex plate 22 forms what chamber middle flow space was compressed
Kinetic energy, promote the fluid in it to push and flowed to both sides, so it is upward by the space between oscillating plate 230 and support 232
Pass through flowing, and when oscillating plate 230 is bent downwardly vibration, then the movable part 22a of flex plate 22 also with resonance be bent downwardly
Deformation is vibrated, fluid is pooled at the opening portion 212 of confluxing in center and tailed off, and the also vibration downwards of piezo-activator 23, and displacement
To flex plate 22 movable part 22a and oscillating plate 230 protuberance 230c between certain depth δ form cavity bottom and increase
The compressible volume of chamber, so repeat the implementation start shown in Fig. 3 B, you can increase flex plate 22 movable part 22a and
Certain depth δ forms the space that chamber middle flow space is compressed between the protuberance 230c of oscillating plate 230, reaches larger
Fluid soakage and discharge rate.
In the preferred embodiment of this case, as it was previously stated, the deformable base construction 20 of deformable base construction 20 is by flowing
Logical plate 21 and flex plate 22 are formed, and wherein flow plate 21 and flex plate 22 are and flow plate 21 and flex plate to be stacked with
22 both synchronous deformations, to form deformable base construction 20.Furthermore, foregoing synchronous deformation refers to flow plate 21
And flex plate 22, when when both, any one is deformed, then another one necessarily with deformation, and both deformation shapes be one
Cause, i.e., both corresponding surfaces are to engage and position each other, and do not have any gap or parallel mistake between the two
Position, for example, when the flow plate 21 of deformable base construction 20 is deformed, flex plate 22 also produces identical deformation；Phase
With ground, when the flex plate 22 of deformable base construction 20 is deformed, flow plate 21 also produces identical deformation.In addition, because such as
Described in preceding contents known, in known fluid control device 100, wherein piezo-activator 102 and substrate 101 are flat
Overall structure, and there is certain rigidity, on this condition, make this two be Integral flat-plate formula structure it is accurate each other
Contraposition, to cause to maintain certain gap between two flat board, maintenance certain depth is implied that, there can be certain degree of difficulty, pole holds
Error is also easy to produce, causes variety of problems.So preferred embodiment various in this case, its feature is to utilize a deformable pedestal
Structure 20, for flow plate 21 and the synchronous distressed structure of flex plate 22, substrate of the synchronous distressed structure equivalent to known technology
101 elements, the various embodiments that only flow plate 21 of the deformable base construction 20 and flex plate 22 are had in this case are defined
Various specific synchronous distressed structures, and the various specific synchronous distressed structures can be prominent with relative oscillating plate 230
Go out between portion 230c, be maintained within a required specific gap, therefore even if when fluid control device 2 is towards the hair of microminiaturization
Exhibition, the size of each element designs towards microminiaturization to be carried out, and remains to cause that this is above-mentioned easily by the deformable base construction 20
It is easy to be intended to maintain between the two with a certain depth δ, because the non-planar base reduced using its contraposition area is same
Walk distressed structure (no matter this is deformed into bending, tapered shape, various curved, irregular etc. shape) and a flat board pair
Position, and no longer it is the flat board contraposition of two large area, but the flat board of the small area of a non-planar base and a large area aligns, therefore meeting
Reduce gap error between the two easily, and then solve the problems, such as fluid conveying efficiency it is low and produce noise, make
Must solve using upper not convenient and uncomfortable known problem.
In foregoing schemes, the synchronous deformation aspect of deformable base construction 20 can be warp architecture, pyramidal structure, projection
Planar structure, curved-surface structure or irregular structure etc., but be not limited, these structures synchronously deformed and aspect will be in
Back segment specification is described in detail.
As shown in Fig. 4 A and Fig. 4 C, in this first embodiment aspect and the 3rd embodiment aspect, deformable base construction 20 is
The bending synchronization distressed structure being made up of flow plate 21 and flex plate 22, that is, the bending of deformable base construction 20 synchronously becomes
Shape region is that is, two embodiment aspect is prefabricated profiled in movable part 22a region and beyond other regions of movable part 22a
Synchronous distressed structure is a bending synchronization distressed structure, the direction that only only both bending synchronously deforms difference.Such as figure
Implement the synchronous deformation operation of bending in the first embodiment aspect shown in 4A, it is in the flow plate 21 of deformable base construction 20
Outer surface 21a towards the direction flexural deformation of the protuberance 230c close to the oscillating plate 230, while flex plate 22 is movable
Portion 22a region and beyond other regions of movable part 22a be also directed to close to the protuberance 230c of the oscillating plate 230 direction bending
Deformation, to form the bending synchronization distressed structure of deformable base construction 20；It is and real in the 3rd embodiment aspect as shown in Figure 4 C
The synchronous deformation operation of bending is applied, it is to be directed away from this in the outer surface 21a of the flow plate 21 of deformable base construction 20
The protuberance 230c of oscillating plate 230 direction flexural deformation, while the movable part 22a of flex plate 22 region and beyond movable part
Other regions of 22a are also directed to the direction flexural deformation of the protuberance 230c away from the oscillating plate 230, to form deformable pedestal knot
The bending synchronization distressed structure of structure 20；Therefore form scratching for deformable base construction 20 in the first embodiment aspect and the 3rd embodiment aspect
The model of a required certain depth δ is maintained between property plate 22 movable part 22a region and the protuberance 230c of oscillating plate 230
Within enclosing, and then the bending for forming this any flow plate 21 and flex plate 22 with deformable base construction 20 for applying aspect is same
Walk the fluid control device 2 of deformation.
As shown in Fig. 5 A and Fig. 5 C, in this 5th embodiment aspect and the 7th embodiment aspect, deformable base construction 20 is
The taper synchronization distressed structure being made up of flow plate 21 and flex plate 22, that is, the taper of deformable base construction 20 synchronously becomes
Shape region is in movable part 22a region and the synchronous distressed structure beyond other regions of movable part 22a, i.e. two embodiment aspect
It is a taper synchronization distressed structure, the direction that only only both taper synchronously deforms difference.And as shown in Figure 5A
The synchronization for implementing synchronously to be deformed into pyramidal structure in five embodiment aspects deforms operation, and it is in the circulation of deformable base construction 20
The outer surface 21a of plate 21 is towards the direction taper-deformation of protuberance 230c close to the oscillating plate 230, while flex plate 22
Movable part 22a region and it is also directed to beyond other regions of movable part 22a close to the protuberance 230c of the oscillating plate 230 direction
Taper-deformation, to form the taper synchronization distressed structure of deformable base construction 20；And the 7th embodiment aspect as shown in Figure 5 C
The middle synchronous deformation operation for implementing synchronously to be deformed into pyramidal structure, is in the external table of the flow plate 21 of deformable base construction 20
Face 21a is directed away from the protuberance 230c of the oscillating plate 230 direction taper-deformation, while the movable part 22a of flex plate 22
Region and the direction taper-deformation that the protuberance 230c away from the oscillating plate 230 is also directed to beyond other regions of movable part 22a, with
Form the taper synchronization distressed structure of deformable base construction 20；Therefore can with composition in the 5th embodiment aspect and the 7th embodiment aspect
Deform and be maintained at one between the movable part 22a region of the flex plate 22 of base construction 20 and the protuberance 230c of oscillating plate 230
Within the scope of required certain depth δ, and then form this any circulation with deformable base construction 20 for applying aspect
The fluid control device 2 that the taper of plate 21 and flex plate 22 synchronously deforms.
As shown in Fig. 6 A and Fig. 6 C, in this 9th embodiment aspect and the 11st embodiment aspect, deformable base construction 20
It is the projection plane synchronization distressed structure being made up of flow plate 21 and flex plate 22, that is, the projection of deformable base construction 20
Plane synchronization deformed region is that is, two embodiment aspect is same in movable part 22a region and beyond other regions of movable part 22a
It is a projection plane synchronization distressed structure to walk distressed structure, and only the direction of only both projection plane synchronization deformations is poor
It is different.And implement synchronously to be deformed into the synchronous deformation operation of projection planar structure in the 9th embodiment aspect as shown in Figure 6A, it is
In deformable base construction 20 flow plate 21 outer surface 21a in movable part 22a region and beyond movable part 22a other
Region is towards the direction projection plane deformation of the protuberance 230c close to the oscillating plate 230, while the movable part 22a of flex plate 22
Region and be also directed to the direction projection plane close to the protuberance 230c of the oscillating plate 230 beyond other regions of movable part 22a
Deformation, to form the taper synchronization distressed structure of deformable base construction 20；And in the 11st embodiment aspect as seen in figure 7 c
The synchronization for implementing synchronously to be deformed into projection planar structure deforms operation, and it is outside the flow plate 21 of deformable base construction 20
Portion surface 21a is directed away from the protuberance 230c of the oscillating plate 230 direction projection plane deformation, while flex plate 22 is movable
Portion 22a region and the direction projection that the protuberance 230c away from the oscillating plate 230 is also directed to beyond other regions of movable part 22a
Plane deformation, to form the projection plane synchronization distressed structure of deformable base construction 20；Therefore the 9th embodiment aspect and the 11st
To form the protrusion in the movable part 22a of the flex plate 22 of deformable base construction 20 region and oscillating plate 230 in embodiment aspect
Be maintained between portion 230c within the scope of a required certain depth δ, so form this it is any apply aspect have it is variable
The fluid control device 2 of the projection plane synchronization deformation of the flow plate 21 and flex plate 22 of shape base construction 20.
And for example foregoing, in some embodiments, deformable base construction 20 is that flow plate 21 and flex plate 22 also can be
Only Partial synchronization distressed structure, that is, the Partial synchronization deformed region of deformable base construction 20 be only in movable part 22a regions,
The Partial synchronization distressed structure of deformable base construction 20 can be warp architecture or tapered structure or projection planar structure, but not with
This is limited.
As shown in Fig. 4 B and Fig. 4 D, in the second embodiment aspect and the 4th embodiment aspect, deformable base construction 20 be for
The part that flow plate 21 and flex plate 22 are formed bends synchronous distressed structure, that is, the part bending of deformable base construction 20
Deformed region is that the synchronous distressed structure of i.e. two embodiment aspect is a bending synchronization distressed structure in movable part 22a regions,
The direction that only only both bending synchronously deforms difference.Implement synchronously to be deformed into the second embodiment aspect as shown in Figure 4 B
The synchronous deformation operation of part warp architecture, it is corresponded in the outer surface 21a of the flow plate 21 of deformable base construction 20
The movable part 22a regions confluxed at opening portion 212 towards the protuberance 230c close to the oscillating plate 230 direction flexural deformation,
The movable part 22a regions of flex plate 22 are also directed to the direction flexural deformation close to the protuberance 230c of the oscillating plate 230 simultaneously, with
Reach the deformable part of base construction 20 and bend synchronous distressed structure；And implement in the 4th embodiment aspect as shown in Figure 4 D synchronous
The synchronous deformation operation of part warp architecture is deformed into, it is in the outer surface of the flow plate 21 of deformable base construction 20
21a correspondingly conflux opening portion 212 movable part 22a regions be directed away from the oscillating plate 230 protuberance 230c direction bending
Deformation, while the movable part 22a regions of flex plate 22 are also directed to the direction bending change of the protuberance 230c away from the oscillating plate 230
Shape, synchronous distressed structure is bent to form the deformable part of base construction 20；Therefore in the second embodiment aspect and the 4th embodiment aspect
To form between the movable part 22a of the flex plate 22 of deformable base construction 20 region and the protuberance 230c of oscillating plate 230
It is maintained within the scope of a required certain depth δ, and then form this any embodiment aspect has deformable pedestal knot
The fluid control device 2 that the part bending of the flow plate 21 and flex plate 22 of structure 20 synchronously deforms.
As shown in Fig. 5 B and Fig. 5 D, in the 6th embodiment aspect and the 8th embodiment aspect, deformable base construction 20 be for
The part conic synchronization distressed structure that flow plate 21 and flex plate 22 are formed, that is, the part conic of deformable base construction 20
Deformed region is that the synchronous distressed structure of i.e. two embodiment aspect is a taper synchronization distressed structure in movable part 22a regions,
The direction that only only both taper synchronously deforms difference.Implement synchronously to be deformed into the 6th embodiment aspect as shown in Figure 5 B
The synchronous deformation operation of part conic structure, it is corresponded in the outer surface 21a of the flow plate 21 of deformable base construction 20
The movable part 22a regions confluxed at opening portion 212 towards the protuberance 230c close to the oscillating plate 230 direction taper-deformation,
The movable part 22a regions of flex plate 22 are also directed to the direction taper-deformation close to the protuberance 230c of the oscillating plate 230 simultaneously, with
Reach the deformable part conic synchronization distressed structure of base construction 20；And implement in the 8th embodiment aspect as shown in Figure 5 D synchronous
The synchronous deformation operation of part conic structure is deformed into, it is in the outer surface of the flow plate 21 of deformable base construction 20
21a correspondingly conflux opening portion 212 movable part 22a regions be directed away from the oscillating plate 230 protuberance 230c direction taper
Deformation, while the movable part 22a regions of flex plate 22 are also directed to the direction taper change of the protuberance 230c away from the oscillating plate 230
Shape, to form the part conic synchronization distressed structure of deformable base construction 20；Therefore the 6th embodiment aspect and the 8th embodiment aspect
In with form the protuberance 230c of the movable part 22a of the flex plate 22 of deformable base construction 20 region and oscillating plate 230 it
Between be maintained within the scope of a required certain depth δ, and then form this any embodiment aspect has deformable pedestal
The fluid control device 2 that the flow plate 21 of structure 20 and the part conic of flex plate 22 synchronously deform.
As shown in Fig. 6 B and Fig. 6 D, in the tenth embodiment aspect and the 12nd embodiment aspect, deformable base construction 20 is
The part projection plane synchronization distressed structure being made up of flow plate 21 and flex plate 22, that is, the portion of deformable base construction 20
It is that the synchronous distressed structure of i.e. two embodiment aspect is that a taper is same in movable part 22a regions to divide projection plane deformation region
Distressed structure is walked, the direction that only only both taper synchronously deforms difference.It is real in the tenth embodiment aspect as shown in Figure 6B
Apply the synchronous deformation operation for being synchronously deformed into part projection planar structure, its be in deformable base construction 20 flow plate 21 it
The movable part 22a regions that outer surface 21a correspondingly confluxes at opening portion 212 are towards the protuberance 230c close to the oscillating plate 230
Direction projection plane deformation, while the movable part 22a regions of flex plate 22 are also directed to the protuberance close to the oscillating plate 230
230c direction projection plane deformation, to form the part projection plane synchronization distressed structure of deformable base construction 20；And such as
Implement synchronously to be deformed into the synchronous deformation operation of part projection planar structure in the 12nd embodiment aspect shown in Fig. 6 D, its be in
The outer surface 21a of the flow plate 21 of deformable base construction 20 correspondingly conflux opening portion 212 movable part 22a regions towards remote
Movable part 22a regions from the protuberance 230c of the oscillating plate 230 direction projection plane deformation, while flex plate 22 are also directed to
The direction projection plane deformation of protuberance 230c away from the oscillating plate 230, it is convex to form the part of deformable base construction 20
Block plane synchronization distressed structure；Therefore to form scratching for deformable base construction 20 in the tenth embodiment aspect and the 12nd embodiment aspect
It is maintained at a required certain depth δ's between the movable part 22a region of property plate 22 and the protuberance 230c of oscillating plate 230
Within the scope of, and then form the flow plate 21 with deformable base construction 20 of this any embodiment aspect and the portion of flex plate 22
Divide the fluid control device 2 of projection plane synchronization deformation.
And for example foregoing, in some embodiments, deformable base construction 20 is made up of flow plate 21 and flex plate 22
Curved surface synchronization distressed structure aspect, the curved surface synchronization distressed structure is made up of the curved surface of multiple different curvatures, or phase
Curved surface with curvature is formed, and is referred to and is implemented the synchronous change for being synchronously deformed into curved-surface structure in Fig. 7 the 13rd embodiment aspect
Shape operation, its be in the flow plate 21 of deformable base construction 20 outer surface 21a for multiple different curvatures curved surface institute structure
Into deformation, while the deformation that the surface of flex plate 22 is also made up of the curved surface of multiple different curvatures, to form deformable base
The curved surface synchronization distressed structure of holder structure 20, so that the curved surface synchronization distressed structure of deformable base construction 20 and oscillating plate 230
Protuberance 230c between be maintained within the scope of required certain depth δ, and then form the tool of this any embodiment aspect
There is the fluid control device 2 that the flow plate 21 of deformable base construction 20 and the curved-surface structure of flex plate 22 synchronously deform.
In other embodiments, the synchronous distressed structure of deformable base construction 20, which differs, is set to conformation of rules synchronously change
Shape structure, it also can be irregular synchronous distressed structure, imply that the flow plate 21 and flex plate 22 of deformable base construction 20
Surface be irregular synchronous distressed structure, but be not limited.In other embodiments, deformable base construction 20
It can be protrusion synchronous distressed structure of the direction close to the protuberance 230c directions of the oscillating plate 230, or can be to be directed away from this
The synchronous distressed structure of protrusion in the protuberance 230c directions of oscillating plate 230, the protrusion synchronization distressed structure and the oscillating plate 230
A certain depth δ is defined between protuberance 230c.
Produced deformable base construction 20 can have many embodiments in numerous embodiment aspects described in this case, and can
Appoint according to situation is actually applied and apply change, be not limited by foregoing in a manner of these.
Through above-mentioned various embodiment aspects, assembled with the deformable base construction 20, deformable base construction can be made
Required certain depth δ model is maintained between the movable part 22a of 20 flex plate 22 and the protuberance 230c of oscillating plate 230
Within enclosing, limited through this certain depth δ scope, or the movable part of the flex plate 22 of deformable base construction 20 can be made
It is maintained between 22a and oscillating plate 230 within the scope of required certain depth δ, is limited through this certain depth δ scope
Fixed, then error when can avoid the fluid control device 2 from assembling causes gap excessive or too small and its caused flex plate 22 and pressure
Electric actuator 23 is in contact with each other interference, and then makes that fluid efficiency of transmission is bad, the problems such as avoiding producing noise.
In summary, this case passes through housing, piezo-activator and the mutual heap of deformable base construction in fluid control device
After folded progress locating engagement assembling, and the outside synchronous deformation operation for applying an at least active force is implemented on, so that deformable base
The flex plate and flow plate of holder structure produce synchronous deformation, form and are protected between the movable part of the flex plate and the protuberance of oscillating plate
Hold within the scope of required certain depth, so make the movable part and oscillating plate of the flex plate of deformable base construction
Between protuberance in the range of adjustment to the certain depth of demand, and then contact interference of the flex plate with piezo-activator is reduced,
In order to can lifting fluid transmission efficiency, more can reach can reduce the fraction defective of product the effect of reducing noise to reach, lifting stream
The quality of member control apparatus.
This case appointed as person familiar with the technology apply craftsman think and be it is all as modification, it is so neither de- such as attached claim
Be intended to Protector.
【Symbol description】
100：Known fluid control device
101：Substrate
102：Piezo-activator
103：Gap
2：Fluid control device
20：Deformable base construction
21：Flow plate
21a：Outer surface
210：Access aperture
211：Conflux groove
212：Conflux opening portion
22：Flex plate
22a：Movable part
22b：Fixed part
23：Piezo-activator
230：Oscillating plate
230a：Second surface
230b：First surface
230c：Protuberance
231：Housing
232：Support
233：Piezoelectric element
26：Housing
26a：Accommodation space
261：Tap
260：Side wall
A：Temporary chamber
δ：Certain depth
h：Spacing
d、d’：Displacement
θ：Angle
S31~S33：The step of manufacture method of fluid control device
Claims (23)
1. a kind of manufacture method of fluid control device, comprising:
(a) housing, a piezo-activator and a deformable base construction are provided, the piezo-activator is by a piezoelectric element and one
Oscillating plate is formed, and the oscillating plate has first surface and corresponding second surface, and the second surface has a protuberance, should
Deformable base construction includes a flow plate and a flex plate, and the flow plate has an outer surface, and the flex plate can with one
Dynamic portion；
(b) flex plate and the flow plate are stacked with engagement and form the deformable base construction；And
(c) sequentially the housing, the piezo-activator and the deformable base construction are stacked with after carrying out locating engagement assembling,
And be implemented on the outside synchronous deformation operation for applying an at least active force so that the flex plate of the deformable base construction and
The flow plate produces synchronous deformation, allows between the movable part of the flex plate and the protuberance of the oscillating plate to define one specific
Depth.
2. the manufacture method of fluid control device as claimed in claim 1, it is characterised in that the synchronization deformation operation apply to
A few active force is in the outer surface of the flow plate of the deformable base construction, so that the deformable base construction produces synchronously
Deformation.
3. the manufacture method of fluid control device as claimed in claim 2, it is characterised in that the synchronization deformation operation apply to
A few active force is in the outer surface of the flow plate of the deformable base construction, and towards close to the deformable base construction
The flex plate direction exerts a force, so that the deformable base construction produces synchronous deformation, and is contacted the deformable base construction
The outer surface of the flow plate produces at least one force vestige.
4. the manufacture method of fluid control device as claimed in claim 2, it is characterised in that this synchronously deforms operation in outside
Apply an at least active force in the outer surface of the flow plate of the deformable base construction, and be directed away from the deformable pedestal
The flex plate direction force of structure, and the deformable base construction is contacted the outer surface of the flow plate and produce at least one
Exert a force vestige.
5. the manufacture method of fluid control device as claimed in claim 2, it is characterised in that this synchronously deforms operation in outside
Apply an at least active force in the outer surface of the flow plate of the deformable base construction, an at least active force and the circulation
The outer surface of plate keeps certain interval, and is directed away from the flex plate direction force of the deformable base construction, so that should
Deformable base construction produces synchronous deformation, and the outer surface of the flow plate of deformable base construction is produced at least one and apply
Power vestige.
6. the manufacture method of fluid control device as claimed in claim 5, it is characterised in that an at least active force and the stream
The outer surface of logical plate keeps certain interval, and it is an attraction to force in an at least active force on the outer surface of the flow plate
Power, so that the deformable base construction produces synchronous deformation.
7. the manufacture method of fluid control device as claimed in claim 1, it is characterised in that the one of the deformable base construction
Synchronous deformed region is that and it is synchronously deformed into a bending synchronization distressed structure in the movable part region of the flex plate, and this is curved
A certain depth is defined between bent synchronous distressed structure and the protuberance of the oscillating plate.
8. the manufacture method of fluid control device as claimed in claim 1, it is characterised in that the one of the deformable base construction
Synchronous deformed region is that and it is synchronously deformed into a taper synchronization distressed structure, the cone in the movable part region of the flex plate
A certain depth is defined just as between step distressed structure and the protuberance of the oscillating plate.
9. the manufacture method of fluid control device as claimed in claim 1, it is characterised in that the one of the deformable base construction
Synchronous deformed region is that and it is synchronously deformed into a projection plane synchronization distressed structure in the movable part region of the flex plate,
A certain depth is defined between the projection plane synchronization distressed structure and the protuberance of the oscillating plate.
10. the manufacture method of fluid control device as claimed in claim 1, it is characterised in that the deformable base construction
One synchronous deformed region is that this is same in the movable part region of the flex plate and the synchronous distressed structure beyond the movable part region
A certain depth is defined between step distressed structure and the protuberance of the oscillating plate.
11. the manufacture method of fluid control device as claimed in claim 1, it is characterised in that the deformable base construction
One synchronous deformed region be in the movable part region of the flex plate and beyond the movable part region, and its to be synchronously deformed into one curved
Bent synchronous distressed structure, a certain depth is defined between the bending synchronization distressed structure and the protuberance of the oscillating plate.
12. the manufacture method of fluid control device as claimed in claim 1, it is characterised in that the deformable base construction
One synchronous deformed region is that and it is synchronously deformed into a cone in the movable part region of the flex plate and beyond the movable part region
Just as step distressed structure, a certain depth is defined between the taper synchronization distressed structure and the protuberance of the oscillating plate.
13. the manufacture method of fluid control device as claimed in claim 1, it is characterised in that the deformable base construction
One synchronous deformed region is that and it is synchronously deformed into a projection and put down in the movable part region of the flex plate and beyond movable part region
Face synchronization distressed structure, defines a certain depth between the projection plane synchronization distressed structure and the protuberance of the oscillating plate.
14. the manufacture method of fluid control device as claimed in claim 1, it is characterised in that the deformable base construction is
The curved surface synchronization distressed structure that the flow plate and the flex plate are formed, the curved surface synchronization distressed structure differ song to be multiple
The curved surface of rate is formed, and it is specific to go out one for justice between the curved surface synchronization distressed structure of the flex plate and the protuberance of the oscillating plate
Depth.
15. the manufacture method of fluid control device as claimed in claim 1, it is characterised in that the deformable base construction is
The curved surface synchronization distressed structure that the flow plate and the flex plate are formed, the curved surface synchronization distressed structure are multiple same curvatures
Curved surface formed, justice goes out a specific depth between the curved surface synchronization distressed structure of the flex plate and the protuberance of the oscillating plate
Degree.
16. the manufacture method of fluid control device as claimed in claim 1, it is characterised in that the deformable base construction is
The irregular synchronous distressed structure that the flow plate and the flex plate are formed, the irregular synchronous deformation knot of the flex plate
Justice goes out a certain depth between this of structure and the oscillating plate protuberance.
17. the manufacture method of the fluid control device as any one of claim 1,7 to 16, it is characterised in that this can
It is synchronously to be deformed towards the synchronous distressed structure of protrusion close to the protuberance direction of the oscillating plate, the protrusion to deform base construction
A certain depth is defined between this of structure and the oscillating plate protuberance.
18. the manufacture method of the fluid control device as any one of claim 1,7 to 16, it is characterised in that this can
Deformation base construction is the synchronous distressed structure of protrusion in the protuberance direction for being directed away from the oscillating plate, and the protrusion synchronously deforms
A certain depth is defined between this of structure and the oscillating plate protuberance.
19. the manufacture method of fluid control device as claimed in claim 1, it is characterised in that the vibration of the piezo-activator
Plate is square, and flexible vibration, and the piezo-activator further includes:
One housing, around the outside for being arranged at the oscillating plate；And
An at least support, it is connected between a side of the oscillating plate and the housing, for resilient support.
20. the manufacture method of fluid control device as claimed in claim 1, it is characterised in that the deformable base construction with
Engage and position by a medium between the oscillating plate, and the medium is a sticker.
21. the manufacture method of fluid control device as claimed in claim 1, it is characterised in that the housing is piezoelectric actuated with this
The temporary chamber for forming fluid circulation is stacked between device, and the housing is provided with least one tap, is communicated in the temporary storage cavity
Room is outside with the housing.
22. the manufacture method of fluid control device as claimed in claim 1, it is characterised in that the flex plate has a stream
Hole, and be arranged at the center of the movable part or be adjacent at center, so that fluid passes through.
23. the manufacture method of fluid control device as claimed in claim 22, it is characterised in that the flow plate has at least one
Access aperture, at least one, which are confluxed, groove and one confluxes opening portion, and the access aperture at least one is confluxed groove through the flow plate and with this
It is connected, and the other end of the groove that confluxes is communicated in the opening portion of confluxing, and the opening portion of confluxing is corresponding to the flex plate
The movable part, and connected with the stream hole of the flex plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610801490.4A CN107795467B (en) | 2016-09-05 | 2016-09-05 | Method for manufacturing fluid control device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610801490.4A CN107795467B (en) | 2016-09-05 | 2016-09-05 | Method for manufacturing fluid control device |
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| CN107795467A true CN107795467A (en) | 2018-03-13 |
| CN107795467B CN107795467B (en) | 2020-03-31 |
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| CN102979705A (en) * | 2011-09-06 | 2013-03-20 | 株式会社村田制作所 | Fluid control device |
| CN102979704A (en) * | 2011-09-06 | 2013-03-20 | 株式会社村田制作所 | Fluid control device |
| WO2013125364A1 (en) * | 2012-02-21 | 2013-08-29 | 株式会社村田製作所 | Fluid control device |
| CN103339380A (en) * | 2011-10-11 | 2013-10-02 | 株式会社村田制作所 | Fluid-control device, and method for adjusting fluid-control device |
| WO2016009870A1 (en) * | 2014-07-16 | 2016-01-21 | 株式会社村田製作所 | Fluid control device |
| CN205383064U (en) * | 2016-01-29 | 2016-07-13 | 研能科技股份有限公司 | Miniature gas pressure power unit |
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Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102979705A (en) * | 2011-09-06 | 2013-03-20 | 株式会社村田制作所 | Fluid control device |
| CN102979704A (en) * | 2011-09-06 | 2013-03-20 | 株式会社村田制作所 | Fluid control device |
| CN103339380A (en) * | 2011-10-11 | 2013-10-02 | 株式会社村田制作所 | Fluid-control device, and method for adjusting fluid-control device |
| WO2013125364A1 (en) * | 2012-02-21 | 2013-08-29 | 株式会社村田製作所 | Fluid control device |
| WO2016009870A1 (en) * | 2014-07-16 | 2016-01-21 | 株式会社村田製作所 | Fluid control device |
| CN205383064U (en) * | 2016-01-29 | 2016-07-13 | 研能科技股份有限公司 | Miniature gas pressure power unit |
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